JP2020194160A - 量子ドットバリアリブの構造物及びそれの調製方法 - Google Patents
量子ドットバリアリブの構造物及びそれの調製方法 Download PDFInfo
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- JP2020194160A JP2020194160A JP2020089318A JP2020089318A JP2020194160A JP 2020194160 A JP2020194160 A JP 2020194160A JP 2020089318 A JP2020089318 A JP 2020089318A JP 2020089318 A JP2020089318 A JP 2020089318A JP 2020194160 A JP2020194160 A JP 2020194160A
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- quantum dot
- cured film
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- colorant
- dot barrier
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Abstract
Description
量子ドットバリアリブの構造物が、6μm以上の全厚さ及び0.05/μm〜2.0/μmの光学密度、並びにそれぞれ、以下の関係:
(関係1)RSCI≦5.0%
(関係2)RSCE≦0.5%
(関係3)2≦RSCE/RSCI≦10
を満たす550nmの波長でSCI(正反射光を含む)方法によって測定される反射率RSCI及びSCE(正反射光を含まない)方法によって測定される反射率RSCEを有する
構造物を提供する。
第1感光性樹脂組成物、第2感光性樹脂組成物、又は両方が、(A)コポリマー;(B)光重合性化合物;(C)光重合開始剤;及び(D)黒色着色剤を含む着色剤を含み、この構造物が6μm以上の全厚さを有する
構造物を提供する。
本発明の量子ドットバリアリブの構造物は、一様なフィルム厚さ及び適切な範囲のフィルム厚さを有する硬化フィルムを含む。ここで、SCI(正反射光を含む)方法によって測定される反射率RSCI及びSCE(正反射光を含まない)方法によって測定される反射率RSCEは低下し、それらの間の比(RSCE/RSCI)は適切に調節され、その結果、解像度及びパターン特性は優れたままに維持されながら同時に高い遮光性及び低い反射率のような特性を満たすことが可能である。
(関係1)RSCI≦5.0%
(関係2)RSCE≦0.5%
(関係3)2≦RSCE/RSCI≦10。
本発明に用いられるコポリマー(A)は、(a−1)エチレン性不飽和カルボン酸、エチレン性不飽和カルボン酸無水物、又はそれらの組み合わせに由来する構造物単位、(a−2)芳香環を含有するエチレン性不飽和化合物に由来する構造物単位、(a−3)エポキシ基を含有するエチレン性不飽和化合物に由来する構造物単位、及び(a−4)(a−1)、(a−2)、及び(a−3)とは異なるエチレン性不飽和化合物に由来する構造物単位からなる群から選択される少なくとも2つの構造物単位を含み得る。
構造物単位(a−1)は、エチレン性不飽和カルボン酸、エチレン性不飽和カルボン酸無水物、又はそれらの組み合わせに由来する。エチレン性不飽和カルボン酸及びエチレン性不飽和カルボン酸無水物は、分子中に少なくとも1個のカルボキシル基を含有する重合性不飽和モノマーである。それの特定の例としては、(メタ)アクリル酸、クロトン酸、α−クロロアクリル酸、及び桂皮酸などの不飽和モノカルボン酸;マレイン酸、マレイン酸無水物、フマル酸、イタコン酸、イタコン酸無水物、シトラコン酸、シトラコン酸無水物、及びメサコン酸などの不飽和ジカルボン酸及びそれらの無水物;3価以上の不飽和ポリカルボン酸及びそれらの無水物;並びにモノ[2−(メタ)アクリロイルオキシエチル]スクシネート、モノ[2−(メタ)アクリロイルオキシエチル]フタレートなどの2価以上のポリカルボン酸のモノ[(メタ)アクリロイルオキシアルキル]エステル等が挙げられ得る。上に例示された化合物に由来する構造物単位は、単独で又は2つ以上の組み合わせでコポリマーに含有され得る。
構造物単位(a−2)は、芳香環を含有するエチレン性不飽和化合物に由来する。芳香環を含有するエチレン性不飽和化合物の特定の例としては、フェニル(メタ)アクリレート、ベンジル(メタ)アクリレート、2−フェノキシエチル(メタ)アクリレート、フェノキシジエチレングリコール(メタ)アクリレート、p−ノニルフェノキシポリエチレングリコール(メタ)アクリレート、p−ノニルフェノキシポリプロピレングリコール(メタ)アクリレート、トリブロモフェニル(メタ)アクリレート;スチレン;メチルスチレン、ジメチルスチレン、トリメチルスチレン、エチルスチレン、ジエチルスチレン、トリエチルスチレン、プロピルスチレン、ブチルスチレン、ヘキシルスチレン、ヘプチルスチレン、及びオクチルスチレンなどのアルキル置換基を含有するスチレン;フルオロスチレン、クロロスチレン、ブロモスチレン、及びヨードスチレンなどのハロゲンを含有するスチレン;メトキシスチレン、エトキシスチレン、及びプロポキシスチレンなどのアルコキシ置換基を含有するスチレン;4−ヒドロキシスチレン、p−ヒドロキシ−α−メチルスチレン、アセチルスチレン;並びにビニルトルエン、ジビニルベンゼン、ビニルフェノール、o−ビニルベンジルメチルエーテル、m−ビニルベンジルメチルエーテル、p−ビニルベンジルメチルエーテル、o−ビニルベンジルグリシジルエーテル、m−ビニルベンジルグリシジルエーテル、p−ビニルベンジルグリシジルエーテル等が挙げられ得る。上に例示された化合物に由来する構造物単位は、単独で又は2つ以上の組み合わせでコポリマーに含有され得る。組成物の重合性を得るために、スチレン化合物に由来する構造物単位が、これらの例の中でも好ましい。
構造物単位(a−3)は、エポキシ基を含有するエチレン性不飽和化合物に由来する。エポキシ基を含有するエチレン性不飽和化合物の特定の例としては、グリシジル(メタ)アクリレート、3,4−エポキシブチル(メタ)アクリレート、4,5−エポキシペンチル(メタ)アクリレート、5,6−エポキシヘキシル(メタ)アクリレート、6,7−エポキシヘプチル(メタ)アクリレート、2,3−エポキシシクロペンチル(メタ)アクリレート、3,4−エポキシシクロヘキシル(メタ)アクリレート、α−エチルグリシジルアクリレート、α−n−プロピルグリシジルアクリレート、α−n−ブチルグリシジルアクリレート、N−(4−(2,3−エポキシプロポキシ)−3,5−ジメチルベンジル)アクリルアミド、N−(4−(2,3−エポキシプロポキシ)−3,5−ジメチルフェニルプロピル)アクリルアミド、4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテル、4−ヒドロキシブチルアクリレートグリシジルエーテル、アリルグリシジルエーテル、2−メチルアリルグリシジルエーテル等が挙げられ得る。上に例示された化合物に由来する構造物単位は、単独で又は2つ以上の組み合わせでコポリマーに含有され得る。上記の中でグリシジル(メタ)アクリレート、4−ヒドロキシブチルアクリレートグリシジルエーテル、及び4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテルに由来する構造物単位から選択される少なくとも1つが、共重合性及び硬化フィルムの強度の向上の観点からより好ましい。
本発明に用いられるコポリマー(A)は、(a−1)、(a−2)、及び(a−3)に加えて、(a−1)、(a−2)、及び(a−3)とは異なる、エチレン性不飽和化合物に由来する構造物単位をさらに含み得る。
本発明に用いられる光重合性化合物(B)は、少なくとも1つのエチレン性不飽和二重結合を有する一官能性又は多官能性エステル化合物であり得る。特に、それは、耐化学薬品性の観点から少なくとも2つの官能基を有する多官能性化合物であり得る。
本発明に用いられる光重合開始剤(C)は、いずれかの公知の光重合開始剤であり得る。
本発明の感光性樹脂組成物は、それに遮光性を付与するための着色剤(D)を含み得る。着色剤(D)は、黒色着色剤を含み得る。
本発明の感光性樹脂組成物は、被覆性を向上させるために及び欠陥の発生を防ぐために界面活性剤(E)をさらに含み得る。
加えて、本発明の感光性樹脂組成物は、感光性樹脂組成物の物理的特性に悪影響を及ぼさない限り、エポキシ化合物、光塩基発生剤、チオール化合物、及びエポキシ樹脂から誘導される化合物からなる群から選択される少なくとも1つの添加物をさらに含み得る。
Xは、それぞれ独立して、
Halはハロゲンであり;X、R1、R2、及びL1は、上の式1において定義されたのと同じものである。
R9は、それぞれ独立して、H、C1〜10アルキル基、C1〜10アルコキシ基、C2〜10アルケニル基、又はC6〜14アリール基であり;R10及びR11は、それぞれ独立して、飽和若しくは不飽和のC6脂肪族若しくは芳香族環であり;nは、1〜10の整数であり;X、R1、R2、及びL1は、上記の式1において定義されたのと同じものである。
本発明の感光性樹脂組成物は、上記の成分が溶媒と混合されている液体組成物として調製され得る。感光性樹脂組成物中の成分と相溶性であるが反応しない、当技術分野において公知のいずれかの溶媒が、感光性樹脂組成物の調製において溶媒(G)として使用され得る。
第1感光性樹脂組成物、第2感光性樹脂組成物、又は両方が、(A)コポリマー;(B)光重合性化合物;(C)光重合開始剤;及び(D)黒色着色剤を含む着色剤を含み、この構造物が6μm以上の全厚さを有する
構造物を提供し得る。
ここで、第1感光性樹脂組成物、第2感光性樹脂組成物、又は両方が、(A)コポリマー;(B)光重合性化合物;(C)光重合開始剤;及び(D)黒色着色剤を含む着色剤を含み得る。
(関係1)RSCI≦5.0%
(関係2)RSCE≦0.5%
(関係3)2≦RSCE/RSCI≦10
を満たし得る。
還流冷却器及び撹拌機を備えた500mlの丸底フラスコに、溶媒としての300gのプロピレングリコールモノメチルエーテルアセテート(PGMEA)及びラジカル重合開始剤としての2gの2,2’−アゾビス(2,4−ジメチルバレロニトリル)と共に、50モル%のN−フェニルマレイミド(PMI)、6モル%のスチレン(Sty)、10モル%の4−ヒドロキシブチルアクリレートグリシジルエーテル(4−HBAGE)、及び34モル%の(メタ)アクリル酸(MAA)からなる100gの混合物を仕込んだ。その後、混合物を70℃に加熱し、5時間撹拌して31重量%の固形分を有するコポリマー(A−1)溶液を得た。このようにして調製されたコポリマーは、100mg KOH/gの酸価及び7,000Daのゲル浸透クロマトグラフィーによって測定されるポリスチレン基準の重量平均分子量(Mw)を有した。
30モル%のメチル(メタ)アクリレート、20モル%の(メタ)アクリル酸、30モル%のヘキサフルオロイソプロピル(メタ)アクリレート、及び20モル%のブチル(メタ)アクリレートからなる30gのモノマー混合物と、ラジカル重合開始剤としての2.74gのV−59を溶媒としての30gのプロピレングリコールメチルエーテルアセテート(PGMEA)に溶解させた混合物とを、還流冷却器及び撹拌機を備えた250mlの丸底フラスコ中の窒素雰囲気中で80℃に加熱された溶媒に4時間にわたって滴加した。それを次に20時間重合にかけてコポリマー(A−2)を得た。このようにして調製されたコポリマーは、85mg KOH/gの酸価、ゲル浸透クロマトグラフィーによって測定され、ポリスチレンを基準とする場合に9,053Daの重量平均分子量(Mw)、30.5重量%の固形分、及び2.3の多分散性(Mw/Mn)を有した。
30モル%のメチル(メタ)アクリレート、20モル%の(メタ)アクリル酸、30モル%のオクタフルオロペンチル(メタ)アクリレート、及び20モル%のブチル(メタ)アクリレートからなる30gのモノマー混合物と、ラジカル重合開始剤としての2.74gのV−59を溶媒としての30gのプロピレングリコールメチルエーテルアセテート(PGMEA)に溶解させた混合物とを、還流冷却器及び撹拌機を備えた250mlの丸底フラスコ中の窒素雰囲気中で80℃に加熱された溶媒に4時間にわたって滴加した。それを次に20時間重合にかけてコポリマー(A−3)を得た。このようにして調製されたコポリマーは、66mg KOH/gの酸価、ゲル浸透クロマトグラフィーによって測定され、ポリスチレンを基準とする場合に14,968Daの重量平均分子量(Mw)、31.2重量%の固形分、及び2.3の多分散性(Mw/Mn)を有した。
30モル%のメチル(メタ)アクリレート、20モル%の(メタ)アクリル酸、30モル%のトリフルオロエチル(メタ)アクリレート、及び20モル%のブチル(メタ)アクリレートからなる30gのモノマー混合物と、ラジカル重合開始剤としての2.74gのV−59を溶媒としての30gのプロピレングリコールメチルエーテルアセテート(PGMEA)に溶解させた混合物とを、還流冷却器及び撹拌機を備えた250mlの丸底フラスコ中の窒素雰囲気中で80℃に加熱された溶媒に4時間にわたって滴加した。それを次に20時間重合にかけてコポリマー(A−4)を得た。このようにして調製されたコポリマーは、98mg KOH/gの酸価、ゲル浸透クロマトグラフィーによって測定され、ポリスチレンを基準とする場合に7,551Daの重量平均分子量(Mw)、31.6重量%の固形分、及び2.04の多分散性(Mw/Mn)を有した。
以下の調製例の感光性樹脂組成物は、上記の合成例において調製されたコポリマーを使用して調製した。
<感光性樹脂組成物の調製>
調製例1−1:第1感光性樹脂組成物
コポリマーとしての合成例1において得られた100重量部(固形分)のコポリマー(A−1)、光重合性化合物(B)としての40重量部の6官能性ジペンタエリスリトールヘキサアクリレート(DPHA)(B−1、日本化薬)、40重量部の4官能性ジ(トリメチロールプロパン)テトラアクリレート(B−2、商品名T−1420、日本化薬)、光開始剤(C)としての、2.0重量部のN−1919、オキシム系光開始剤1(C−1)、1.0重量部のSPI−03、オキシム系光開始剤2(C−2)、及び0.4重量部の(E)−2−(4−スチリルフェニル)−4,6−ビス(トリクロロメチル)−1,3,5−トリアジン、トリアジン光開始剤3(C−3)、黒色有機着色剤(D−2)としての6.8重量部のBK−7539(株式会社トクシキ)、界面活性剤(E)としての0.2重量部のF563(DIC)、及び添加物としての、0.5重量部のMIPHOTO GHP03HHP(Miwon)、エポキシ硬化剤(F−1)を一様に混合した。プロピレングリコールモノメチルエーテルアセテート(PGMEA)を、混合物の固形分が25重量%であるように混合物に添加した。結果として生じたものを、振盪機を用いて2時間混合して液相感光性樹脂組成物を調製した。
0.6重量部のSPI−03、オキシム系光開始剤2(C−2)、及び0.4重量部の(E)−2−(4−スチリルフェニル)−4,6−ビス(トリクロロメチル)−1,3,5−トリアジン、トリアジン光開始剤3(C−3)を光重合開始剤(C)として使用し、添加物の添加なしに一様に混合された、12.7重量部のBK−7539(株式会社トクシキ)を有機着色剤(D−2)として使用したこと、並びにプロピレングリコールモノメチルエーテルアセテート(PGMEA)(G−1)と3−メトキシブチルアセテート(3BMA)(G−2)との混合物を、混合物の固形分が25重量%であるように添加したことを除いて、調製例1−1におけるのと同様に感光性樹脂組成物を調製した。
それぞれの成分の種類及び/又は含有量を、下の表3に示すように変化させたことを除いて、調製例1−1におけるのと同様に感光性樹脂組成物を調製した。
実施例1
第1感光性樹脂組成物として調製例1−1において得られた感光性樹脂組成物を、蒸留水中に浸漬されたガラス基材上にスピンコーターを用いてコートし、次に乾燥させた。それを、90℃で150秒間プリベークして6.0μm以上の厚さのコートされたフィルムを形成した。コートされたフィルムを130℃で300秒間のミッドベークにさらにかけて溶媒を除去して第1硬化フィルム(すなわち、下方フィルム)を形成した。
上の表3に示されるような成分及び含有量を有する第1感光性樹脂組成物及び第2感光性樹脂組成物(調製例2−1〜13−2)を使用したこと、並びに現像時間及びフィルム厚さを下の表4及び6に示されるように変化させたことを除いて、実施例1におけるのと同様に多層硬化フィルムを含む量子ドットバリアリブの構造物を調製した。
上の表3に示されるような成分及び含有量を有する感光性樹脂組成物(調製例14〜24)を使用して第1硬化フィルムを形成したこと、並びに現像時間及びフィルム厚さを下の表4及び6に示されるように変化させて単一層硬化フィルムを調製したことを除いて、実施例1におけるのと同様に単一層硬化フィルムを含む量子ドットバリアリブの構造物を調製した。
上の表3に示されるような成分及び含有量を有す第1感光性樹脂組成物(調製例25−1)及び第2感光性樹脂組成物(調製例25−2)を使用したこと、並びに現像時間及びフィルム厚さを下の表4及び6に示されるように変化させたことを除いて、実施例1におけるのと同様に、多層硬化フィルムを含む量子ドットバリアリブの構造物を調製した。
実施例及び比較例の量子ドットバリアリブの構造物の調製方法における0.04重量%の水酸化カリウムの水溶液での現像時に、非露光部分が完全に洗い流されるための(現像装置のOリング部分が基材の後に完全に見られる段階までの)時間を測定した。
− 現像時間が300秒以下であった場合、○として評価した。それが300秒を超えた場合、×として評価した。
実施例及び比較例の量子ドットバリアリブの構造物におけるラインパターンのパターンの解像度及び限界寸法(CD;単位:μm)を測定するために、ラインCDを、マイクロ光学顕微鏡(STM6−LM、製造業者:オリンパス)及びX線走査電子顕微鏡(SEM;S4300)で観察した。結果を図5及び6に示す。
− 解像度が0超〜20μmであった場合、○として評価した。それが20μmを超えた場合、×として評価した。
実施例及び比較例の量子ドットバリアリブの構造物を、それぞれ、α−ステップ機器(Alpha−ステッププロフィロメーター)である、SCAN PLUSを用いて装置プローブチップの垂直運動による高低差について測定した。それらの厚さをこれらの結果から得た。
− 初期フィルム厚さ及び最終フィルム厚さが多層状であった場合、○として評価した。それらが単層状であった場合、×として評価した。
実施例及び比較例の量子ドットバリアリブの構造物の硬化フィルムの550nmでの透過率を、光学密度計(Xlite製の361T)を用いて測定した。1μmの厚さに基づく光学密度(OD、単位:/μm)及び最終フィルム厚さの光学密度を測定した。全光学密度は、1μmに基づく光学密度に最終フィルム厚さを乗じることによって得られる値である(比較例11及び12の場合には、全光学密度は、ポストベーク前のフィルム厚さに基づいて計算した)。
全光学密度=1μmに基づく光学密度(/μm)×最終フィルム厚さ(μm)
実施例及び比較例の量子ドットバリアリブの構造物の硬化フィルムを、それぞれ、550nmの波長で分光光度計デバイス(CM−3700A)を用いてRSCI及びRSCEについて測定した。それらの間の比(RSCE/RSCI)を次に計算した。
− RSCIが5.0%以下であった場合、○として評価した。それが5.0%を超えた場合、×として評価した。
− RSCEが0.5%以下であった場合、○として評価した。それが0.5%を超えた場合、×として評価した。
− RSCE/RSCIが2%〜10%であった場合、○として評価した。それが2.0%未満又は10%超であった場合、×として評価した。
実施例及び比較例の量子ドットバリアリブの構造物の硬化フィルムを、それぞれ、2−エトキシエタノール、極性溶媒、及び接触角測定装置(DM300、Kyowa)を使用して接触角について測定した。
− フッ素含有コポリマーを全く含有しない硬化フィルムは、0°であること、及びフッ素含有コポリマーを含有する硬化フィルムは10°〜20°の接触角を有することが確認された。
110 透明な基材
120 バリアリブ
130 第1量子ドット溶液
140 第2量子ドット溶液
150 第3量子ドット溶液
200、300、400 量子ドットバリアリブの構造物
210、310、410 基材
211、311、411 第1硬化フィルム
212、312、412 第2硬化フィルム
313、413 第3硬化フィルム
nn 第n番目の硬化フィルム
Claims (20)
- (A)コポリマー;
(B)光重合性化合物;
(C)光重合開始剤、及び
(D)黒色着色剤を含む着色剤
を含む感光性樹脂組成物から形成された硬化フィルムを含む、量子ドットバリアリブの構造物であって、
量子ドットバリアリブの前記構造物が、6μm以上の全厚さ、0.05/μm〜2.0/μmの光学密度、並びに
それぞれ、以下の関係:
(関係1)RSCI≦5.0%
(関係2)RSCE≦0.5%
(関係3)2≦RSCE/RSCI≦10
を満たす550nmの波長でSCI(正反射光を含む)方法によって測定される反射率RSCI及びSCE(正反射光を含まない)方法によって測定される反射率RSCE
を有する
構造物。 - 前記黒色着色剤が、黒色有機着色剤及び黒色無機着色剤からなる群から選択される少なくとも1つを含む、請求項1に記載の量子ドットバリアリブの構造物。
- 前記黒色有機着色剤が、前記コポリマー(A)の100重量部を基準として3〜40重量部の量で用いられる、請求項2に記載の量子ドットバリアリブの構造物。
- 前記黒色無機着色剤が、前記コポリマー(A)の100重量部を基準として0.01〜10重量部の量で用いられる、請求項2に記載の量子ドットバリアリブの構造物。
- 前記着色剤(D)が、青色着色剤及びスミレ色着色剤からなる群から選択される少なくとも1つを含む着色剤をさらに含む、請求項1に記載の量子ドットバリアリブの構造物。
- 前記青色着色剤及び前記スミレ色着色剤が、それぞれ、前記コポリマー(A)の100重量部を基準として0.01〜10重量部の量で用いられる、請求項5に記載の量子ドットバリアリブの構造物。
- 前記着色剤(D)が、前記コポリマー(A)の100重量部を基準として1〜40重量部の量で用いられる、請求項1に記載の量子ドットバリアリブの構造物。
- 前記感光性樹脂組成物が、エポキシ化合物、光塩基発生剤、チオール化合物、及びエポキシ樹脂から誘導される化合物からなる群から選択される少なくとも1つをさらに含む、請求項1に記載の量子ドットバリアリブの構造物。
- 第1感光性樹脂組成物から形成された第1硬化フィルム及び前記第1硬化フィルム上に第2感光性樹脂組成物から形成された第2硬化フィルム
を含む、量子ドットバリアリブの構造物であって、
前記第1感光性樹脂組成物、前記第2感光性樹脂組成物、又は両方が、(A)コポリマー;(B)光重合性化合物;(C)光重合開始剤;及び(D)黒色着色剤を含む着色剤を含み、
前記構造物が6μm以上の全厚さを有する
構造物。 - 前記第1硬化フィルム及び前記第2硬化フィルムが、それぞれ、10μm以下の厚さを有する、請求項9に記載の量子ドットバリアリブの構造物。
- 多層硬化フィルムが6μm〜20μmの全厚さを有する、請求項9に記載の量子ドットバリアリブの構造物。
- 0.05/μm〜2.0/μmの光学密度を有する、請求項9に記載の量子ドットバリアリブの構造物。
- 第1感光性樹脂組成物を基材上にコートし、それを硬化させて第1硬化フィルムを形成する工程と;
第2感光性樹脂組成物を前記第1硬化フィルム上にコートし、それを硬化させて第2硬化フィルムを形成する工程と;
前記第1硬化フィルム及び前記第2硬化フィルムを含む多層硬化フィルムを露光し、現像してパターンを形成し、次にそれを硬化させる工程と
を含む、量子ドットバリアリブの構造物の調製方法であって、
前記第1感光性樹脂組成物、前記第2感光性樹脂組成物、又は両方が、(A)コポリマー;(B)光重合性化合物;(C)光重合開始剤;及び(D)黒色着色剤を含む着色剤を含む
方法。 - 前記第1硬化フィルム及び前記第2硬化フィルムを形成するための前記硬化が、それぞれ、70℃〜140℃で100秒〜800秒間実施される、請求項13に記載の量子ドットバリアリブの構造物の調製方法。
- 前記第1硬化フィルム及び前記第2硬化フィルムを形成するための前記硬化が、それぞれ、70℃〜100℃で50秒〜400秒間のプリベークとして及び80℃〜140℃で100秒〜500秒間のミッドベークとして実施される、請求項14に記載の量子ドットバリアリブの構造物の調製方法。
- パターンの形成後の前記硬化が、150℃〜300℃で10分〜60分間実施される、請求項13に記載の量子ドットバリアリブの構造物の調製方法。
- 前記露光が、各パターンの間隔が10μm〜30μmであるようにマスクを配置し、活性光線を照射することによって実施される、請求項13に記載の量子ドットバリアリブの構造物の調製方法。
- 前記現像が50秒〜300秒間実施される、請求項13に記載の量子ドットバリアリブの構造物の調製方法。
- 1つ以上の硬化フィルムが、前記第2硬化フィルム上にさらに形成される、請求項13に記載の量子ドットバリアリブの構造物の調製方法。
- 前記多層硬化フィルム中の各硬化フィルムが8μm以下の厚さを有し、前記多層硬化フィルムが6μm〜20μmの全厚さを有する、請求項19に記載の量子ドットバリアリブの構造物の調製方法。
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