JP2020193919A5 - - Google Patents

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JP2020193919A5
JP2020193919A5 JP2019100827A JP2019100827A JP2020193919A5 JP 2020193919 A5 JP2020193919 A5 JP 2020193919A5 JP 2019100827 A JP2019100827 A JP 2019100827A JP 2019100827 A JP2019100827 A JP 2019100827A JP 2020193919 A5 JP2020193919 A5 JP 2020193919A5
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self
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JP2019100827A
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JP7381827B2 (ja
JP2020193919A (ja
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Priority claimed from JP2019100827A external-priority patent/JP7381827B2/ja
Priority to JP2019100827A priority Critical patent/JP7381827B2/ja
Priority to CN202080036899.6A priority patent/CN113892024B/zh
Priority to PCT/JP2020/020582 priority patent/WO2020241583A1/ja
Priority to US17/614,880 priority patent/US12000699B2/en
Priority to EP20813602.8A priority patent/EP3978865B1/en
Publication of JP2020193919A publication Critical patent/JP2020193919A/ja
Publication of JP2020193919A5 publication Critical patent/JP2020193919A5/ja
Publication of JP7381827B2 publication Critical patent/JP7381827B2/ja
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JP2019100827A 2019-05-30 2019-05-30 光干渉測定装置および光干渉測定方法 Active JP7381827B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2019100827A JP7381827B2 (ja) 2019-05-30 2019-05-30 光干渉測定装置および光干渉測定方法
EP20813602.8A EP3978865B1 (en) 2019-05-30 2020-05-25 Optical interference measuring apparatus and optical interference measuring method
PCT/JP2020/020582 WO2020241583A1 (ja) 2019-05-30 2020-05-25 光干渉測定装置および光干渉測定方法
US17/614,880 US12000699B2 (en) 2019-05-30 2020-05-25 Optical interference measuring apparatus and optical interference measuring method
CN202080036899.6A CN113892024B (zh) 2019-05-30 2020-05-25 光干涉测定装置及光干涉测定方法

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Application Number Priority Date Filing Date Title
JP2019100827A JP7381827B2 (ja) 2019-05-30 2019-05-30 光干渉測定装置および光干渉測定方法

Publications (3)

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JP2020193919A JP2020193919A (ja) 2020-12-03
JP2020193919A5 true JP2020193919A5 (https=) 2021-02-04
JP7381827B2 JP7381827B2 (ja) 2023-11-16

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JP2019100827A Active JP7381827B2 (ja) 2019-05-30 2019-05-30 光干渉測定装置および光干渉測定方法

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US (1) US12000699B2 (https=)
EP (1) EP3978865B1 (https=)
JP (1) JP7381827B2 (https=)
CN (1) CN113892024B (https=)
WO (1) WO2020241583A1 (https=)

Families Citing this family (1)

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TWI886974B (zh) * 2024-05-27 2025-06-11 芯聖科技股份有限公司 用於非破壞性獲得物品三維結構的光學掃描系統

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4409384B2 (ja) * 2004-08-03 2010-02-03 株式会社トプコン 光画像計測装置及び光画像計測方法
JP4622564B2 (ja) * 2005-02-10 2011-02-02 凸版印刷株式会社 膜厚測定方法
JP2009516181A (ja) * 2005-11-16 2009-04-16 シェモメテック・アクティーゼルスカブ 試料または試料の成分の化学的または物理学的特性の決定
US7924435B2 (en) * 2006-12-22 2011-04-12 Zygo Corporation Apparatus and method for measuring characteristics of surface features
JP4389032B2 (ja) 2007-01-18 2009-12-24 国立大学法人 筑波大学 光コヒーレンストモグラフィーの画像処理装置
JP2009115474A (ja) * 2007-11-02 2009-05-28 Lasertec Corp 多層膜構造観察方法及び多層膜構造観察装置
JP2009115503A (ja) * 2007-11-02 2009-05-28 Lasertec Corp 粗さ測定方法及び粗さ測定装置
US8340455B2 (en) 2008-03-31 2012-12-25 University Of Central Florida Research Foundation, Inc. Systems and methods for performing Gabor-domain optical coherence microscopy
DE102009045130B3 (de) * 2009-09-29 2011-03-31 Carl Zeiss Ag Verfahren zur Bestimmung der inneren Struktur einer Probe
US20140347672A1 (en) * 2011-07-29 2014-11-27 Ecole Polytechnique Federale De Lausanne (Epfl) Apparatus and method for quantitive phase tomography through linear scanning with coherent and non-coherent detection
US9251604B2 (en) 2012-07-20 2016-02-02 Samsung Electronics Co., Ltd. Apparatus and method for generating tomography image
AU2012268876A1 (en) * 2012-12-24 2014-07-10 Canon Kabushiki Kaisha Non-linear solution for 2D phase shifting
JP2016176689A (ja) 2013-07-04 2016-10-06 株式会社日立ハイテクノロジーズ 干渉測定方法、及びその装置
WO2016054079A1 (en) * 2014-09-29 2016-04-07 Zyomed Corp. Systems and methods for blood glucose and other analyte detection and measurement using collision computing
CN104523239B (zh) * 2015-01-12 2017-02-22 南京理工大学 全深度谱域光学相干层析成像装置及方法
CN109157187A (zh) * 2018-09-06 2019-01-08 中国科学院上海光学精密机械研究所 增加扫频光学相干层析成像系统成像深度范围的方法
JP6999908B2 (ja) 2019-05-30 2022-01-19 株式会社トプコン 光干渉測定装置および光干渉測定方法

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