JP2020179171A - 再構成されたスペクトルを用いた2次元多層厚測定 - Google Patents
再構成されたスペクトルを用いた2次元多層厚測定 Download PDFInfo
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/101—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for examining the tear film
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/0016—Operational features thereof
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- A—HUMAN NECESSITIES
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- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/14—Arrangements specially adapted for eye photography
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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Abstract
Description
この出願は、2019年4月24日に出願された「2D MULTI−LAYER THICKNESS MEASUREMENT WITH RECONSTRUCTED SPECTRUM(再構成されたスペクトルを用いた2次元多層厚測定)」と題する米国仮特許出願第62/837,785号に基づく優先権を主張するものであり、その全体を参照により本明細書に援用する。
Claims (12)
- 構造の層厚を測定する方法であって、
前記構造のマルチスペクトル干渉パターンを取得し、
前記マルチスペクトル干渉パターンに対してハイパースペクトル再構成を実行することにより、再構成フルスペクトル干渉パターン又は再構成ハイパースペクトル干渉パターンを生成し、
前記再構成フルスペクトル干渉パターン又は前記再構成ハイパースペクトル干渉パターンに基づいて前記層厚を推定する、
方法。 - 前記構造は、眼の涙液層である、
請求項1の方法。 - RGBカメラを用いて前記構造からの反射光を取り込むことによって前記マルチスペクトル干渉パターンを取得する、
請求項1の方法。 - デュアルカラーカメラを用いて前記構造からの反射光を取り込むことによって前記マルチスペクトル干渉パターンを取得する、
請求項1の方法。 - 狭帯域マルチスペクトルカメラを用いて前記構造からの反射光を取り込むことによって前記マルチスペクトル干渉パターンを取得する、
請求項1の方法。 - マルチスペクトル干渉パターンの入力に基づいて前記フルスペクトル干渉パターン又は前記再構成ハイパースペクトル干渉パターンを出力するように訓練された機械学習システムによって、前記マルチスペクトル干渉パターンに対する前記ハイパースペクトル再構成を実行する、
請求項1の方法。 - 前記フルスペクトル干渉パターン又は前記再構成ハイパースペクトル干渉パターンをルックアップテーブルと比較することによって、前記層厚を推定する、
請求項1の方法。 - 前記フルスペクトル干渉パターン又は前記再構成ハイパースペクトル干渉パターンに対してカーブフィッティングを実行することによって、前記層厚を推定する、
請求項1の方法。 - 前記フルスペクトル干渉パターン又は前記再構成ハイパースペクトル干渉パターンの入力に基づいて層厚を出力するように訓練された機械学習システムに、前記フルスペクトル干渉パターン又は前記再構成ハイパースペクトル干渉パターンを供給することによって、前記層厚を推定する、
請求項1の方法。 - 更に、前記推定された層厚を表示する、
請求項1の方法。 - 前記取得されたマルチスペクトル干渉パターンは非合焦であり、
更に、前記ハイパースペクトル再構成よりも前に、前記非合焦のマルチスペクトル干渉パターンのフォーカス調整を実行する、
請求項1の方法。 - 非合焦のマルチスペクトル干渉パターンの入力に基づいて合焦したマルチスペクトル干渉パターンを出力するように訓練された機械学習システムによって、前記フォーカス調整を実行する、
請求項11の方法。
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