JP2020161837A - Liquid processing apparatus and liquid processing method - Google Patents

Abstract

To provide a technique which allows for reduction of operation frequency of a flow rate adjustment mechanism when adjusting the flow rate of liquid supplied to a substrate.SOLUTION: A liquid processing apparatus includes a substrate processing section 16 for supplying fluid to a substrate W, a supply line 112 for supplying fluid to the substrate processing section 16, a flowmeter 22 for measuring the flow rate of the fluid flowing through the supply line 112, a flow rate adjustment mechanism 23 for adjusting the flow rate of the fluid flowing through the supply line 112, and a control section 24 for controlling the flow rate adjustment mechanism 23 based on the measurement results of the flowmeter 22. The control section 24 receives the measurement results of the flowmeter 22 at a first period. When the measurement results of the flowmeter 22 indicates that the flow rate of the fluid flowing through the supply line 112 falls in a preset range, the control section 24 controls the flow rate adjustment mechanism 23 to adjust the flow rate of the fluid flowing through the supply line 112 at a period of time interval longer than that of the first period.SELECTED DRAWING: Figure 3

Description

The present invention relates to a technique for supplying a fluid to a substrate.

In order to perform liquid treatment such as chemical treatment and rinsing treatment on a substrate such as a semiconductor wafer, the substrate held in a horizontal position is rotated around the vertical axis, and a treatment liquid such as DHF (Diluted HydroFluoric acid) is applied to the processing surface of the substrate. A method of supplying a rinse solution such as DIW (DeIonized Water) is generally adopted. In this method, a set amount of liquid is supplied to the substrate by adjusting the flow rate of the liquid flowing through the supply line by a flow rate adjusting mechanism and bringing the flow rate close to a preset set flow rate. Various valve bodies can be used as such a flow rate adjusting mechanism, and a flow rate control valve, which is typically called a needle valve, can be preferably used (see, for example, Patent Document 1).

By measuring the flow rate with a flow meter and feedback-controlling the flow rate adjustment mechanism based on the measurement result, a set amount of liquid can be stably supplied to the substrate. Such flow rate adjustment is always performed while the liquid is supplied to the substrate.

On the other hand, since the flow rate adjustment mechanism includes a valve body or the like that involves mechanical operation, as the number of operations increases, the deterioration of each part progresses, the accuracy of the flow rate adjustment decreases, and the liquid flow rate cannot be adjusted appropriately. Is likely to occur. Therefore, it is necessary to predict the life of the flow rate adjusting mechanism and replace the flow rate adjusting mechanism before the flow rate adjusting mechanism reaches the end of its life. In particular, when a very high level of flow rate adjustment is required, such as in liquid processing of a semiconductor wafer, the valve body of the flow rate adjustment mechanism is opened and closed in a very short cycle, for example, a cycle of 0.5 seconds. Therefore, as the number of operations of the flow rate adjusting mechanism increases, the life of the flow rate adjusting mechanism tends to be shortened, and there is a demand for reducing the frequency of replacement.

Japanese Unexamined Patent Publication No. 2015-213145

The present invention provides a technique capable of extending the life of a flow rate adjusting mechanism that adjusts the flow rate of a liquid supplied to a substrate.

One aspect of the present invention is provided in a substrate processing unit that supplies fluid to the substrate, a supply line that supplies fluid to the substrate processing unit, a flow meter that measures the flow rate of the fluid flowing through the supply line, and a supply line. A flow rate adjusting mechanism for adjusting the flow rate of the fluid flowing through the supply line and a control unit for controlling the flow rate adjusting mechanism based on the measurement result of the flow meter are provided, and the control unit first obtains the measurement result of the flow meter. If the flow meter measurement results indicate that the flow rate of the fluid that is received in a cycle and flows through the supply line is within a preset range, the fluid is supplied in the second cycle, which is longer than the time interval of the first cycle. The present invention relates to a liquid treatment device that adjusts the flow rate of a fluid flowing through a line by a flow rate adjusting mechanism.

Another aspect of the present invention is a step of supplying a fluid to the substrate processing unit via a supply line and supplying the fluid from the substrate processing unit to the substrate, and measuring the flow rate of the fluid flowing through the supply line with a flow meter. The process of performing, the process of receiving the measurement result of the flow meter in the first cycle, and the flow rate of the fluid flowing through the supply line by the flow rate adjusting mechanism controlled by the control unit based on the measurement result of the flow meter. If the flow meter measurement results indicate that the flow rate of the fluid flowing through the supply line is within a preset range, the second cycle has a time interval longer than the time interval of the first cycle. The present invention relates to a liquid treatment method in which the flow rate of the fluid flowing through the supply line is adjusted by a flow rate adjusting mechanism.

According to the present invention, the life of the flow rate adjusting mechanism can be extended.

FIG. 1 is a diagram showing an outline of an example of a liquid treatment apparatus. FIG. 2 is a vertical sectional side view showing an outline of the processing unit. FIG. 3 is a schematic view showing a configuration example of a flow meter, a motor needle valve, and a control unit. FIG. 4 is a graph showing an example of the relationship between the flow rate of the processing liquid flowing through the branch line and the opening degree of the motor needle valve with respect to the passage of time T, and the behavior of the flow rate of the processing liquid and the behavior of the opening degree of the motor needle valve. Are associated with each other. FIG. 5 is a diagram showing an example of the relationship between the flow rate measurement cycle (that is, the first cycle) by the flow meter and the flow rate adjustment cycle (that is, the second cycle) by the motor needle valve. FIG. 6 is a diagram showing a flow for determining the flow rate adjustment cycle of the motor needle valve in the normal feedback process. FIG. 7 is a conceptual diagram showing an example of the relationship between the sizes of the first range, the second range, and the third range. FIG. 8 is a conceptual diagram showing another example of the relationship between the sizes of the first range, the second range, and the third range. FIG. 9 is a conceptual diagram showing an example of the relationship between the sizes of the first range and the second range when the flow rate range of the treatment liquid is divided into two. FIG. 10 is a diagram showing an outline of the process of the liquid treatment step.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

First, a typical example of a liquid treatment apparatus to which the present invention can be applied will be described.

As shown in FIG. 1, the liquid treatment apparatus has a plurality of treatment units (liquid treatment units) 16 that perform liquid treatment on a substrate, and a treatment fluid supply source 70 that supplies the treatment liquid to the treatment unit 16. There is.

The treatment fluid supply source 70 has a tank 102 for storing the treatment liquid and a circulation line 104 that exits the tank 102 and returns to the tank 102. A pump 106 is provided on the circulation line 104. The pump 106 forms a circulating flow that exits the tank 102, passes through the circulation line 104, and returns to the tank 102. On the downstream side of the pump 106, the circulation line 104 is provided with a filter 108 for removing contaminants such as particles contained in the treatment liquid. If necessary, auxiliary equipment (for example, a heater or the like) may be further provided on the circulation line 104.

One or more branch lines 112 are connected to the connection area 110 set in the circulation line 104. Each branch line 112 supplies the processing liquid flowing through the circulation line 104 to the corresponding processing unit 16. Each branch line 112 may be provided with a flow rate adjusting mechanism such as a flow rate control valve, a filter, or the like, if necessary.

The liquid treatment apparatus has a tank liquid replenishment unit 116 for replenishing the treatment liquid or the treatment liquid constituents in the tank 102. The tank 102 is provided with a drain portion 118 for discarding the treatment liquid in the tank 102.

Next, a typical example of the processing unit 16 will be described with reference to FIG. In FIG. 2, in order to clarify the positional relationship, the X-axis, the Y-axis, and the Z-axis that are orthogonal to each other are defined, and the positive direction of the Z-axis is the vertical upward direction.

As shown in FIG. 2, the processing unit 16 includes a chamber 20, a substrate holding mechanism 30, a processing fluid supply unit 40, and a recovery cup 50.

The chamber 20 houses the substrate holding mechanism 30, the processing fluid supply unit 40, and the recovery cup 50. An FFU (Fan Filter Unit) 21 is provided on the ceiling of the chamber 20. The FFU 21 forms a downflow in the chamber 20.

The substrate holding mechanism 30 includes a holding portion 31, a strut portion 32, and a driving portion 33. The holding unit 31 holds the wafer W horizontally. The strut portion 32 is a member extending in the vertical direction, the base end portion is rotatably supported by the drive portion 33, and the holding portion 31 is horizontally supported at the tip portion. The drive unit 33 rotates the strut unit 32 around a vertical axis. The substrate holding mechanism 30 rotates the holding portion 31 supported by the supporting portion 32 by rotating the supporting portion 32 by using the driving unit 33, thereby rotating the wafer W held by the holding portion 31. ..

The processing fluid supply unit 40 supplies the processing fluid to the wafer W. The processing fluid supply unit 40 is connected to the processing fluid supply source 70.

The recovery cup 50 is arranged so as to surround the holding portion 31, and collects the processing liquid scattered from the wafer W by the rotation of the holding portion 31. A drainage port 51 is formed at the bottom of the recovery cup 50, and the treatment liquid collected by the recovery cup 50 is discharged from the drainage port 51 to the outside of the treatment unit 16. Further, at the bottom of the recovery cup 50, an exhaust port 52 for discharging the gas supplied from the FFU 21 to the outside of the processing unit 16 is formed.

In the liquid processing apparatus whose schematic configuration has been described above, for example, the processing unit 16 functions as a substrate processing unit that supplies the processing liquid to the wafer W, and the circulation line 104 and the branch line 112 provide the processing liquid to the processing unit 16. Functions as a supply line to supply. The liquid treatment apparatus of the present embodiment is further based on a flow meter that measures the flow rate of the processing liquid flowing through the supply line, a flow rate adjusting mechanism that adjusts the flow rate of the processing liquid flowing through the supply line, and the measurement results of the flow meter. It includes a control unit that controls a flow rate adjusting mechanism. Hereinafter, a configuration example of the flow meter, the motor needle valve, and the control unit when the motor needle valve is used as the flow rate adjusting mechanism will be described.

FIG. 3 is a schematic view showing a configuration example of the flow meter 22, the motor needle valve 23, and the control unit 24. In FIG. 3, some of the elements constituting the processing unit 16 are briefly shown.

In the embodiment shown in FIG. 3, a flow meter 22 and a motor needle valve 23 are provided on a branch line 112 connected to each processing fluid supply unit 40 and functioning as a supply line. In FIG. 3, the flow meter 22 is arranged on the upstream side and the motor needle valve 23 is arranged on the downstream side, but even if the flow meter 22 is arranged on the downstream side and the motor needle valve 23 is arranged on the upstream side. Good.

The flow meter 22 measures the flow rate of the processing liquid flowing through the branch line 112, and sends a measurement signal S1 indicating the measurement result to the control unit 24. On the other hand, the motor needle valve 23 adjusts the flow rate of the processing liquid flowing through the branch line 112 based on the control signal S2 sent from the control unit 24. The control unit 24 acquires information on the flow rate of the processing liquid flowing through the branch line 112 based on the measurement signal S1 from the flow meter 22, and is a motor needle required to bring the flow rate of the processing liquid closer to a preset set flow rate. Information on the drive amount of the valve 23 is acquired, and the control signal S2 based on the drive amount is sent to the motor needle valve 23. By driving the motor of the motor needle valve 23 based on the control signal S2 from the control unit 24, the valve opening degree is adjusted, and the flow rate of the processing liquid flowing through the branch line 112 is increased or decreased by the motor needle valve 23.

The flow rate meter 22, the motor needle valve 23, and the control unit 24 adjust the flow rate of the processing liquid flowing through the branch line 112 so as to approach the set flow rate. As a result, a desired amount of processing liquid is supplied from the processing fluid supply unit 40 to the wafer W held by the holding unit 31 and rotated by the support column 32.

In the above-mentioned liquid treatment apparatus, in the conventional method, the flow rate measurement cycle of the flow meter 22 and the flow rate adjustment cycle of the motor needle valve 23 are equal to each other. That is, each time the control unit 24 receives the measurement signal S1 from the flow meter 22, the control unit 24 acquires information on the optimum opening degree of the motor needle valve 23 and transmits the control signal S2 to the motor needle valve 23, and the motor needle valve 23. Adjusts the flow rate of the processing liquid based on the received control signal S2. According to this conventional method, the flow rate of the processing liquid is adjusted by the motor needle valve 23 in a relatively short cycle regardless of the measurement result of the flow meter 22. Therefore, in this conventional method, since the flow rate of the processing liquid is adjusted in a short cycle, the number of operations of the motor needle valve 23 inevitably increases, and the device life of the motor needle valve 23 is shortened.

On the other hand, in the present embodiment, when the measurement result of the flow meter 22 indicates that the flow rate of the processing liquid flowing through the branch line 112 is within a preset range, the time is longer than the measurement interval of the flow meter 22. The flow rate is adjusted by the motor needle valve 23 at intervals. That is, the control unit 24 receives the measurement signal S1 indicating the measurement result of the flow meter 22 in the first cycle P1, and monitors the flow rate of the processing liquid flowing through the branch line 112 in the first cycle P1. On the other hand, when the measurement result of the flow meter 22 indicates that the flow rate of the processing liquid flowing through the branch line 112 is included in the preset range, the control unit 24 is more than the time interval of the first cycle P1. The flow rate of the processing liquid flowing through the branch line 112 is adjusted by the motor needle valve 23 in a cycle of a long time interval (that is, the second cycle P2). The above-mentioned "preset range of the flow rate of the processing liquid flowing through the branch line 112" in which the motor needle valve 23 is driven in the second cycle P2 is the flow rate of the processing liquid at a time interval longer than the measurement interval of the flow meter 22. It is within the range where it is expected that no harmful effects will occur even if the adjustment is made. Therefore, it is possible to set a range relatively close to the set flow rate to the "preset range" referred to here.

FIG. 4 is a graph showing an example of the relationship between the flow rate H1 of the processing liquid flowing through the branch line 112 and the opening degree H2 of the motor needle valve 23 with respect to the passage of time T, and shows the behavior of the flow rate H1 of the processing liquid and the motor needle valve. The behavior of the opening degree H2 of 23 is associated with each other. In FIG. 4, the lateral direction shows the passage of time T. Note that the range indicated by the signs "t1" and "t2" in FIG. 4 is not always represented by a strictly correct scale ratio, and the range indicated by various codes is approximate for ease of understanding. It is shown in. Regarding the flow rate H1 of the treatment liquid, the vertical direction in FIG. 4 indicates the magnitude of the flow rate, the upper side indicates the larger flow rate, and the lower side indicates the smaller flow rate. Regarding the opening degree H2 of the motor needle valve 23, the vertical direction of FIG. 4 indicates the magnitude of the opening degree, the motor needle valve 23 is opened toward the upper side to increase the cross-sectional area of the flow path, and the lower side is toward the motor needle valve 23. Is closed to indicate that the cross section of the flow path becomes smaller.

In the embodiment shown in FIG. 4, the initial valve opening process Ta is first performed, and then the normal feedback process Tb is performed.

In the initial valve opening process Ta, the motor needle valve 23 is fully closed and the processing fluid is not flowing from the branch line 112 to the processing fluid supply unit 40. This is a process of flowing a treatment liquid to 40. In this initial valve opening process Ta, the opening degree of the motor needle valve 23 is fixed to a preset opening degree. The initial valve opening process Ta is not an essential process and may be omitted if necessary. In that case, the normal feedback process Tb described later may be performed from the beginning.

On the other hand, the normal feedback process Tb is a process of adjusting the flow rate of the processing liquid from the branch line 112 to the processing fluid supply unit 40 according to the measurement result of the flow meter 22. In this normal feedback process Tb, the control unit 24 controls the motor needle valve 23 so that the flow rate of the processing liquid flowing through the branch line 112 approaches the set flow rate P based on the measurement result of the flow meter 22. Therefore, in the normal feedback process Tb, in addition to the step of supplying the processing liquid to the processing fluid supply unit 40 via the branch line 112 and supplying the processing liquid from the processing fluid supply unit 40 to the wafer W, the flow rate of the processing liquid Is further included in the step of measuring with the flow meter 22 and the step of adjusting the flow rate of the processing fluid with the motor needle valve 23.

Specifically, in the normal feedback process Tb of the present embodiment, the opening degree of the motor needle valve 23 and the flow rate of the processing liquid are adjusted as follows.

In the embodiment shown in FIG. 4, the first range R1, the second range R2, and the third range R3 are set with respect to the flow rate of the processing liquid flowing through the branch line 112. The first range R1 is a preset range determined with reference to the set flow rate P, includes the set flow rate P, and is a range closer to the set flow rate P than the second range R2 and the third range R3. On the other hand, the second range R2 is a preset range farther from the set flow rate P than the first range R1, and is a range closer to the set flow rate P than the third range R3. Further, the third range R3 is a preset range farther from the set flow rate P than the second range R2, and for example, the flow rate of the treatment liquid when the treatment liquid does not flow through the branch line 112, that is, the flow rate of the treatment liquid is The zero (0) state is included in the third range R3.

The first range R1 and the second range R2 referred to here are ranges that are acceptable for appropriately performing liquid treatment on the wafer W using the treatment liquid, whereas the third range R3 is the treatment liquid. This is an unacceptable range for properly performing liquid treatment on the used wafer W.

When the first range R1 to the third range R3 are compared in this way, the first range R1 indicates a state in which the treatment liquid having a flow rate in the range closest to the set flow rate P is flowing through the branch line 112, and the third range R1. The range R3 indicates a state in which the processing liquid having a flow rate in the range farthest from the set flow rate P is flowing through the branch line 112. The second range R2 indicates a state in which the treatment liquid having a flow rate in the intermediate range is flowing through the branch line 112. Therefore, when the flow rate of the treatment liquid flowing through the branch line 112 is included in the first range R1, the flow rate of the treatment liquid is close to the set flow rate P, so that the urgency of adjusting the flow rate of the treatment liquid is relatively low. On the other hand, when the flow rate of the treatment liquid flowing through the branch line 112 is included in the third range R3, the flow rate of the treatment liquid is far from the set flow rate P, so that the urgency of adjusting the flow rate of the treatment liquid is relatively high. .. When the flow rate of the processing liquid flowing through the branch line 112 is included in the second range R2, the urgency of adjusting the flow rate of the processing liquid is intermediate. As described above, the urgency of adjusting the flow rate of the processing liquid flowing through the branch line 112 increases in the order of the first range R1, the second range R2, and the third range R3.

The control unit 24 of the present embodiment changes the frequency of the flow rate adjustment by the motor needle valve 23 according to the urgency of the flow rate adjustment of the processing liquid. As a result, the number of operations of the motor needle valve 23 is reduced. That is, the control unit 24 determines which of the first range R1, the second range R2, and the third range R3 includes the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22. The operation cycle of the motor needle valve 23 is changed accordingly.

For example, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the first range R1, the control unit 24 adjusts the flow rate of the processing liquid flowing through the branch line 112 by the motor needle valve 23. Avoid being done. When the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the second range R2, the control unit 24 controls the flow rate of the processing liquid flowing through the branch line 112 in the above-mentioned second cycle P2. Is adjusted by the motor needle valve 23. Further, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the third range R3, the control unit 24 has a third cycle P3 having a time interval shorter than the time interval of the second cycle P2. Then, the flow rate of the processing liquid flowing through the branch line 112 is adjusted by the motor needle valve 23. In particular, in the present embodiment, the time interval of the third cycle P3 is equal to the time interval of the first cycle P1. Therefore, when the flow rate of the processing liquid flowing through the branch line 112 is included in the third range R3, the motor needle valve 23 adjusts the flow rate of the processing liquid flowing through the branch line 112 in the first cycle P1.

Next, the behavior of the flow rate H1 of the processing liquid flowing through the branch line 112 shown in FIG. 4 and the behavior of the opening degree H2 of the motor needle valve 23 will be specifically described.

First, the initial valve opening process Ta is performed, and the motor needle valve 23 is opened from the fully closed state to a preset opening degree. As a result, the flow rate of the processing liquid flowing from the branch line 112 toward the processing fluid supply unit 40 rapidly increases, and in the example shown in FIG. 4, the flow rate of the processing liquid is increased up to the third range R3 (FIG. 4). Reference numeral "g1").

In this initial valve opening process Ta, the flow meter 22 measures the flow rate of the processing liquid in the first cycle P1, whereas the motor needle valve 23 does not periodically adjust the flow rate of the processing liquid. That is, in the initial valve opening process Ta, the feedback control of the motor needle valve 23 is not performed, and the opening degree of the motor needle valve 23 is fixed to a preset opening degree regardless of the measurement result of the flow meter 22.

Then, when the initial valve opening process Ta is completed and the normal feedback process Tb is started, the feedback control of the motor needle valve 23 is performed, and the flow rate of the processing liquid is adjusted according to the flow rate of the processing liquid.

In the example shown in FIG. 4, when the initial valve opening process Ta ends and the normal feedback process Tb starts, the flow rate H1 of the processing liquid flowing through the branch line 112 is in the third range R3. Therefore, as described above, the control unit 24 adjusts the flow rate of the processing liquid flowing through the branch line 112 by the motor needle valve 23 in the first cycle P1 to bring the flow rate of the processing liquid closer to the set flow rate P. Specifically, the motor needle valve 23 reduces the opening degree in response to the control signal S2 from the control unit 24, narrows the flow path, and reduces the flow rate of the processing liquid flowing through the branch line 112.

In particular, the control unit 24 of the present embodiment substantially coincides with the timing of receiving the measurement result of the flow meter 22 indicating that the flow rate of the processing liquid flowing through the branch line 112 is included in the third range R3. The flow rate of the processing liquid flowing through 112 is adjusted by the motor needle valve 23. In the example shown in FIG. 4, the flow rate of the processing liquid flowing through the branch line 112 is included in the third range R3 at the start of the normal feedback process Tb. Therefore, the control unit 24 transmits the control signal S2 to the motor needle valve 23 and flows through the branch line 112 substantially at the same time as the timing when the measurement signal S1 is received from the flow meter 22 immediately after the normal feedback process Tb is started. The flow rate of the treatment liquid is reduced (see the reference numeral “g2” in FIG. 4).

The term "substantially simultaneous" as used herein means that it is not necessary to be strictly simultaneous. The time required from the reception of the measurement signal S1 to the transmission of the control signal S2 by the control unit 24 and the time required from the reception of the control signal S2 by the motor needle valve 23 to the valve drive are actually very short times. Therefore, even if there is a delay corresponding to these times between "the timing when the control unit 24 receives the measurement result of the flow meter 22" and "the timing when the flow rate is adjusted by the motor needle valve 23". , Such delays are practically negligible short times. Therefore, it can be said that such "reception of the measurement result of the flow meter 22 by the control unit 24" and "flow rate adjustment by the motor needle valve 23" are performed substantially at the same time.

In the example shown in FIG. 4, due to the initial flow rate adjustment of the motor needle valve 23 in the above-mentioned normal feedback process Tb, the flow rate of the processing liquid flowing through the branch line 112 is from the third range R3 (see the reference numeral “g2” in FIG. 4). It changes to the second range R2 (see the reference numeral “g3” in FIG. 4). Therefore, the control unit 24 then adjusts the flow rate of the processing liquid flowing through the branch line 112 by the motor needle valve 23 in the second cycle P2 described above. That is, the control unit 24 receives the measurement signal S1 from the flow meter 22 in the first cycle P1, while transmitting the control signal S2 to the motor needle valve 23 in the second cycle P2.

In particular, the control unit 24 of the present embodiment has changed the flow rate of the processing liquid flowing through the branch line 112 from the state where it is not included in the second range R2 to the state where it is included in the second range R2. The timing at which the motor needle valve 23 adjusts the flow rate of the processing liquid is determined with reference to the timing at which the measurement result of the above is received (see the reference numeral “g3”). Then, the control unit 24 does not adjust the flow rate of the processing liquid flowing through the branch line 112 by the motor needle valve 23, at least substantially at the same time as the timing of receiving such a measurement result.

FIG. 5 is a diagram showing an example of the relationship between the flow rate measurement cycle by the flow meter 22 (that is, the first cycle P1) and the flow rate adjustment cycle by the motor needle valve 23 (that is, the second cycle P2). In FIG. 5, the horizontal direction indicates the passage of time T, and the solid line extending in the vertical direction indicates the flow rate measurement timing by the flow meter 22 and the flow rate adjustment timing by the motor needle valve 23. In FIG. 5, the symbol “t1” indicates the time interval of the first period P1, the code “t2” indicates the time interval of the second period P2, and the same applies to the codes “t1” and “t2” shown in FIG. is there.

In the present embodiment, as shown in FIG. 5, the measurement result of the flow meter 22 indicating that the flow rate of the treatment liquid has shifted from the state not included in the second range R2 to the state included in the second range R2. Is received by the control unit 24 (see reference numeral "g3"), the flow rate of the processing liquid is not adjusted. On the other hand, the timing for adjusting the flow rate of the processing liquid is determined by the motor needle valve 23 based on the timing when the control unit 24 receives such a measurement result. That is, the timing at which the control unit 24 receives such a measurement result becomes the start point of the second cycle P2, and the timing at which the flow rate adjustment by the motor needle valve 23 is performed next is set after time t2 from the start point. Therefore, even if the control unit 24 detects that the flow rate of the processing liquid flowing through the branch line 112 has shifted from the state not included in the second range R2 to the state included in the second range R2, the detection timing thereof. The flow rate of the processing liquid is not adjusted by the motor needle valve 23. However, after a time t2 from the detection timing, the flow rate of the processing liquid is adjusted by the motor needle valve 23, and the flow rate of the processing liquid flowing through the branch line 112 is brought close to the set flow rate P.

In this way, by operating the motor needle valve 23 in a cycle longer than the measurement cycle (that is, the first cycle P1) by the flow meter 22 (that is, the second cycle P2), the number of operations of the motor needle valve 23 can be effectively increased. Can be reduced. That is, compared with the conventional method in which the flow rate measurement cycle of the flow meter 22 and the flow rate adjustment cycle of the motor needle valve 23 are equal, in the control method of the present embodiment, the flow rate adjustment cycle of the motor needle valve 23 is larger than the flow rate measurement cycle of the flow meter 22. Therefore, the flow rate adjustment frequency is suppressed, and the number of operations of the motor needle valve 23 is reduced. For example, in FIG. 5, since the relationship of “t2 = t1 × 10” is satisfied, the number of operations of the motor needle valve 23 while the flow rate of the processing liquid is in the second range R2 is one tenth of that of the conventional method. (That is, 1/10). In particular, the timing at which the control unit 24 receives the measurement result of the flow meter 22 indicating that the flow rate of the processing liquid has shifted from the state not included in the second range R2 to the state included in the second range R2. By not operating the motor needle valve 23 substantially at the same time, the number of operations of the motor needle valve 23 can be reduced more effectively.

In this embodiment, as shown in FIG. 5, the flow rate of the processing liquid is measured by the flow meter 22 almost at the same time as the timing of adjusting the flow rate of the processing liquid by the motor needle valve 23. The flow rate adjustment timing and the flow rate measurement timing of the flow meter 22 may be different from each other.

Then, as shown in FIG. 4, while the measurement result of the flow meter 22 indicates that the flow rate of the processing liquid flowing through the branch line 112 is in the second range R2, the opening degree of the motor needle valve 23 is in the second cycle P2. The adjustment is repeated so that the flow rate of the treatment liquid approaches the set flow rate P (see the codes "g4" and "g5").

After that, in the example shown in FIG. 4, from the measurement result of the flow meter 22, the control unit 24 indicates that the flow rate of the processing liquid flowing through the branch line 112 is excessively smaller than the set flow rate P and is in the third range R3. Detected (see sign "g6"). Therefore, as described above, the control unit 24 causes the motor needle valve 23 to adjust the flow rate of the processing liquid flowing through the branch line 112 substantially at the same time as the timing of receiving such a measurement result. Specifically, the motor needle valve 23 is opened, and the flow rate of the processing liquid flowing through the branch line 112 is increased so as to approach the set flow rate P.

In this way, as soon as it is detected that the flow rate of the processing liquid flowing through the branch line 112 is in the third range R3, the motor needle valve 23 is operated to adjust the flow rate of the processing liquid, so that the flow rate of the processing liquid is set. It is possible to quickly prevent an excessive deviation from P.

After that, in the example shown in FIG. 4, the measurement result of the flow meter 22 indicates that the flow rate of the processing liquid flowing through the branch line 112 is in the first range R1 (see the sign “g7”). As described above, while the flow rate of the processing liquid flowing through the branch line 112 is in the first range R1, the flow rate of the processing liquid is not adjusted by the motor needle valve 23, and the motor needle valve 23 does not substantially operate. The opening is maintained. However, while the flow rate of the processing liquid flowing through the branch line 112 is in the first range R1, the flow meter 22 continues to measure and the measurement signal S1 is transmitted, and the control unit 24 performs the first cycle P1. The flow rate of the processing liquid flowing through the branch line 112 is continuously monitored.

After that, in the example shown in FIG. 4, again, from the measurement result of the flow meter 22, the flow rate of the processing liquid flowing through the branch line 112 is excessively larger than the set flow rate P and is in the third range R3. Detected by 24 (see sign "g8"). Therefore, as described above, the control unit 24 adjusts the flow rate of the processing liquid flowing through the branch line 112 by the motor needle valve 23 to approach the set flow rate P substantially at the same time as the timing of receiving such a measurement result. ..

As described above, the control unit 24 processes the branch line 112 to flow through any of the first range R1 to the third range R3, which is an index of deviation from the set flow rate P, based on the measurement result of the flow meter 22. The flow rate adjustment cycle of the motor needle valve 23 is adjusted according to whether the flow rate of the liquid belongs. While the flow rate of the processing liquid belongs to the first range R1, the opening / closing operation of the motor needle valve 23 is not performed, and the number of operations of the motor needle valve 23 is reduced. On the other hand, while the flow rate of the treatment liquid belongs to the third range R3, the opening and closing operation of the motor needle valve 23 is performed in a relatively short cycle to quickly optimize the flow rate of the treatment liquid. Then, while the flow rate of the treatment liquid belongs to the second range R2, the opening and closing operation of the motor needle valve 23 is performed in a relatively long cycle to reduce the number of operations of the motor needle valve 23 and to reduce the flow rate of the treatment liquid. It is being optimized.

FIG. 6 is a diagram showing a flow for determining the flow rate adjustment cycle of the motor needle valve 23 in the normal feedback process Tb.

In the processing flow shown in FIG. 6, the control unit 24 first determines whether or not the flow rate of the processing liquid flowing through the branch line 112 is within the first range R1 (S11 in FIG. 6). Specifically, the control unit 24 acquires information on the flow rate of the processing liquid flowing through the branch line 112 based on the measurement signal S1 from the flow meter 22, and the flow rate of the processing liquid is in the first range based on the information. Determine if it is in R1.

When it is determined that the flow rate of the processing liquid flowing through the branch line 112 is within the first range R1 (Y in S11), the control unit 24 does not adjust the flow rate of the processing liquid by the motor needle valve 23 (S12). The specific method is not particularly limited, but for example, by stopping the transmission of the control signal S2 from the control unit 24 to the motor needle valve 23, it is possible to prevent the motor needle valve 23 from adjusting the flow rate of the processing liquid.

On the other hand, when it is determined that the flow rate of the processing liquid flowing through the branch line 112 is not within the first range R1 (N in S11), the control unit 24 determines that the flow rate of the processing liquid flowing through the branch line 112 is within the second range R2. It is determined whether or not it is inside (S13). When it is determined that the flow rate of the processing liquid flowing through the branch line 112 is within the second range R2 (Y in S13), the control unit 24 adjusts the flow rate of the processing liquid by the motor needle valve 23 in the second cycle P2. (S14). Specifically, by sending the control signal S2 from the control unit 24 to the motor needle valve 23 in the second cycle P2, the flow rate adjustment of the processing liquid by the motor needle valve 23 can be performed in the second cycle P2.

On the other hand, when it is determined that the flow rate of the processing liquid flowing through the branch line 112 is not within the second range R2 (N in S13), the flow rate of the processing liquid flowing through the branch line 112 is in the third range R3, so that control is performed. The unit 24 adjusts the flow rate of the processing liquid by the motor needle valve 23 in the first cycle P1 (S15). Specifically, by sending the control signal S2 from the control unit 24 to the motor needle valve 23 in the first cycle P1, the flow rate adjustment of the processing liquid by the motor needle valve 23 can be performed in the first cycle P1.

Then, the control unit 24 repeats the above-mentioned processing steps S11 to S15 until the end of the normal feedback process Tb (N in S16), and ends the processing flow shown in FIG. 6 by the end of the normal feedback process Tb (Y in S16). The control unit 24 can usually determine the end of the feedback process Tb by any method. For example, when a signal instructing the end of the normal feedback process Tb is input to the control unit 24, the control unit 24 may determine the end of the normal feedback process Tb based on such a signal. Further, when the end timing of the normal feedback process Tb is predetermined, the control unit 24 may determine the end of the normal feedback process Tb according to such a timing.

As described above, according to the liquid treatment apparatus and the liquid treatment method of the present embodiment, by adjusting the flow rate of the treatment liquid flowing through the branch line 112 according to the degree of urgency, the flow rate of the treatment liquid can be adjusted from the set flow rate P. The number of operations of the motor needle valve 23 can be effectively reduced while preventing an excessive deviation. That is, when the flow rate of the treatment liquid is in the third range R3 with high urgency, priority is given to reducing the deviation from the set flow rate P, and the treatment liquid is supplied by the motor needle valve 23 at the same time as the measurement timing of the flow meter 22. By adjusting the flow rate, the flow rate of the processing liquid can be quickly brought close to the set flow rate P. On the other hand, when there is a flow rate of the processing liquid in the second range R2 where the degree of urgency is not so high, the flow rate of the processing liquid is adjusted by the motor needle valve 23 at a time interval longer than the measurement cycle of the flow meter 22 and set. The number of operations of the motor needle valve 23 can be reduced while preventing deviation from the flow rate P. Further, when the flow rate of the processing liquid is in the first range R1 where the degree of urgency is not high, the flow rate of the processing liquid is not adjusted by the motor needle valve 23, and the number of operations of the motor needle valve 23 can be further reduced. ..

For example, even in the above-mentioned case where it is necessary to operate the motor needle valve 23 many times as many as 15,000,000 times in 10 years by the conventional method, according to the above-described present embodiment, the motor needle valve It is also possible to reduce the number of operations of 23 to about 20,000,000 in 10 years. That is, according to the liquid treatment method and the liquid treatment device of the present embodiment, it is possible to reduce the number of operations of the motor needle valve 23 to 1/7 (1/7) or less as compared with the conventional method, and the motor The device life of the needle valve 23 can be dramatically extended.

On the other hand, the control unit 24 receives the measurement signal S1 from the flow meter 22 at a very short time interval and monitors the flow rate of the processing liquid flowing through the branch line 112 regardless of the urgency of adjusting the flow rate of the processing liquid. Keep going. Therefore, even if the flow rate of the processing liquid flowing through the branch line 112 becomes excessive or too small for some reason, the control unit 24 quickly detects such a change in the flow rate of the processing liquid and controls the motor needle valve 23. Then, the flow rate of the processing liquid can be quickly adjusted to approach the set flow rate P.

It should be noted that such factors that cause an abnormality in the flow rate of the treatment liquid are based on various events, and the flow rate of the treatment liquid is caused not only by factors that can predict the occurrence timing but also by sudden factors that cannot predict the occurrence timing. Can be disturbed. For example, as shown by the symbol “D1” in FIG. 4, in the initial valve opening process Ta in which the motor needle valve 23 is opened from the closed state to a preset opening degree, the flow rate far from the set flow rate P The treatment liquid easily flows through the branch line 112. Further, as shown in FIG. 1, when a plurality of processing units 16 are connected to one tank 102, the liquid processing process of each processing unit 16 is affected by the operating state of the other processing units 16. Therefore, for example, if the liquid treatment step of another treatment unit 16 is started in the middle of the liquid treatment step of a certain treatment unit 16, the supply amount of the treatment liquid to the certain treatment unit 16 is reduced, and the sign “D2” in FIG. The flow rate of the treatment liquid may be reduced as shown by. Although not shown, a plurality of tanks 102 are connected to one processing unit 16, and the supply source of the processing liquid to the processing unit 16 is from the empty tank 102 to another tank 102 that is full. When switched to, the flow rate of the treatment liquid may suddenly increase as shown by the symbol “D3” in FIG. According to the liquid treatment method and the liquid treatment apparatus of the present embodiment, even if the flow rate of the treatment liquid is disturbed by the above-mentioned predictable factors and unpredictable factors, the flow rate of the treatment liquid is quickly brought close to the set flow rate P. Can be done.

The present invention is not limited to the above-described embodiments and modifications, and various embodiments to which various modifications that can be conceived by those skilled in the art are added can also be included in the scope of the present invention. The effect produced by is not limited to the above items. Therefore, various additions, changes, and partial deletions can be made to the scope of claims and each element described in the specification without departing from the technical idea and purpose of the present invention.

For example, the above-mentioned first range R1, second range R2, and third range R3 do not necessarily have to be fixedly set ranges, and the characteristics of the processing liquid to be measured and adjusted for the flow rate, the wafer, and the wafer. It may be variably set according to the characteristics of W, the required flow rate adjustment accuracy, and the like. Further, the above-mentioned first range R1, second range R2 and third range R3 may be variably set in one liquid treatment step (particularly, the normal feedback process Tb).

FIG. 7 is a conceptual diagram showing an example of the relationship between the sizes of the first range R1, the second range R2, and the third range R3. FIG. 8 is a conceptual diagram showing another example of the relationship between the sizes of the first range R1, the second range R2, and the third range R3. In FIGS. 7 and 8, the horizontal axis indicates the flow rate of the processing liquid flowing through the branch line 112, the sign “P” indicates the set flow rate, and the flow rate of the processing liquid decreases as the distance from the sign “P” increases to the left. It is shown that the flow rate of the treatment liquid increases as the distance from the sign "P" to the right side increases.

As described above, the flow rate of the treatment liquid is not adjusted in the first range R1, and the flow rate of the treatment liquid is adjusted in the second cycle P2 having a time interval longer than that of the first cycle P1 in the second range R2. In the range R3, the flow rate of the treatment liquid is adjusted in the first cycle P1. Therefore, the larger the range occupied by the third range R3, the greater the number of operations of the motor needle valve 23, and the larger the range occupied by the first range R1 and the second range R2 (particularly the first range R1), the larger the operation of the motor needle valve 23. The number of times tends to decrease. On the other hand, as the range occupied by the second range R2 and the third range R3 (particularly the third range R3) is larger, the possibility that the flow rate of the processing liquid flowing through the branch line 112 deviates from the set flow rate P can be reduced, and the first range can be reduced. The larger the range occupied by R1, the higher the possibility that the flow rate of the treatment liquid deviates from the set flow rate P.

Therefore, for example, when it is required to reduce the number of operations of the motor needle valve 23 and to adjust the flow rate of the processing liquid with high accuracy in a well-balanced manner, as shown in FIG. It is preferable that the two-range R2 is relatively wide and the third range R3 is relatively narrow. On the other hand, when the priority of adjusting the flow rate of the processing liquid with high accuracy is higher than the reduction of the number of operations of the motor needle valve 23, the second range R2 is relatively narrowed as shown in FIG. It is preferable that the third range R3 is relatively wide and the first range R1 is relatively narrow. Further, when the priority of reducing the number of operations of the motor needle valve 23 is higher than adjusting the flow rate of the processing liquid with high accuracy, the first range R1 and / or the second range R2 is relatively wide. However, it is preferable that the third range R3 is relatively narrow.

Further, in the above-described embodiment, the range of the flow rate of the treatment liquid flowing through the branch line 112 is divided into three, but it may be divided into two or four or more.

FIG. 9 is a conceptual diagram showing an example of the relationship between the sizes of the first division range A1 and the second division range A2 when the flow rate range of the treatment liquid is divided into two. In FIG. 9, the horizontal axis indicates the flow rate of the processing liquid flowing through the branch line 112, the sign “P” indicates the set flow rate, and the sign “P” indicates that the flow rate of the processing liquid decreases as the distance from the left side increases. It indicates that the flow rate of the treatment liquid increases as the distance from "P" increases to the right.

As shown in FIG. 9, when the flow rate range of the treatment liquid is divided into the first division range A1 and the second division range A2, the flow rate of the treatment liquid flowing through the branch line 112 is relatively close to the set flow rate P. When it is in the preset first division range A1, the time interval of the flow rate adjustment cycle of the motor needle valve 23 can be set to be relatively long. On the other hand, when the flow rate of the processing liquid flowing through the branch line 112 is in the preset second division range A2, which is farther from the set flow rate P than the first division range A1, the time of the flow rate adjustment cycle of the motor needle valve 23. The interval can be set relatively short. As a result, it is possible to reduce the number of operations of the motor needle valve 23 and to control the flow rate of the processing liquid with high accuracy in a well-balanced manner.

It should be noted that any one of the above-mentioned first range R1, second range R2 and third range R3 can be assigned to the above-mentioned first division range A1 and second division range A2 determined with reference to the set flow rate P. It is possible. That is, the first division range A1 is set as the first range R1 and the second division range A2 is set as the second range R2, the first division range A1 is set as the first range R1 and the second division range A2 is set as the third range R3. Alternatively, the first division range A1 can be set as the second range R2 and the second division range A2 can be set as the third range R3.

For example, when the first division range A1 is the first range R1 and the second division range A2 is the second range R2, the control unit 24 adjusts the flow rate of the processing liquid flowing through the branch line 112 as follows. .. That is, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the first division range A1 (that is, the first range R1), the control unit 24 controls the processing liquid flowing through the branch line 112. Prevent the flow rate from being adjusted by the motor needle valve 23. On the other hand, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the second division range A2 (that is, the second range R2), the control unit 24 performs the above-mentioned second cycle P2. The flow rate of the processing liquid flowing through the branch line 112 is adjusted by the motor needle valve 23.

When the first division range A1 is the first range R1 and the second division range A2 is the third range R3, the control unit 24 adjusts the flow rate of the processing liquid flowing through the branch line 112 as follows. That is, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the first division range A1 (that is, the first range R1), the control unit 24 controls the processing liquid flowing through the branch line 112. Prevent the flow rate from being adjusted by the motor needle valve 23. On the other hand, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the second division range A2 (that is, the third range R3), the control unit 24 performs the above-mentioned third cycle P3. The flow rate of the processing liquid flowing through the branch line 112 is adjusted by the motor needle valve 23. The time interval of the third cycle may be equal to the time interval of the first cycle P1 which is the flow rate measurement cycle of the flow meter 22.

When the first division range A1 is the second range R2 and the second division range A2 is the third range R3, the control unit 24 adjusts the flow rate of the processing liquid flowing through the branch line 112 as follows. That is, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the first division range A1 (that is, the second range R2), the control unit 24 performs the above-mentioned second cycle P2. The flow rate of the processing liquid flowing through the branch line 112 is adjusted by the motor needle valve 23. On the other hand, when the flow rate of the processing liquid flowing through the branch line 112 indicated by the measurement result of the flow meter 22 is included in the second division range A2 (that is, the third range R3), the control unit 24 controls the time of the second cycle P2 described above. The flow rate of the processing liquid flowing through the branch line 112 is adjusted by the motor needle valve 23 in the third cycle P3 having a time interval shorter than the interval. The time interval of the third cycle may be equal to the time interval of the first cycle P1 which is the flow rate measurement cycle of the flow meter 22.

As described above, the range in which the flow rate is not adjusted by the motor needle valve 23 (see the first range R1 in FIG. 4) is not essential. Similarly, the range in which the flow rate is adjusted by the motor needle valve 23 in the same cycle as the flow rate measurement cycle by the flow meter 22 (see the third range R3 in FIG. 4) is not essential.

Further, when the operation mode in which the flow rate of the processing liquid flowing through the branch line 112 tends to deviate from the set flow rate P is known in advance, during that time, the flow rate adjustment cycle by the motor needle valve 23 is set regardless of the measurement result of the flow meter 22. The time interval may be set short to prevent the flow rate of the treatment liquid from deviating from the set flow rate P. Specifically, the control unit 24 has the time interval of the second cycle P2 described above, regardless of the measurement result of the flow meter 22, at least during the period when the operation mode of the liquid treatment device is the preset first operation mode. It is possible to adjust the flow rate of the processing liquid flowing through the branch line 112 by the motor needle valve 23 in the fourth cycle having a shorter time interval. The time interval of the fourth cycle may be equal to the time interval of the first cycle P1 which is the flow rate measurement cycle of the flow meter 22.

FIG. 10 is a diagram showing an outline of the process of the liquid treatment step. In the liquid treatment step shown in FIG. 10, the above-mentioned initial valve opening process Ta is performed at the start of the liquid treatment step. Then, at the control mode switching timing, the operation mode shifts from the initial valve opening process Ta to the normal feedback process Tb. Then, the feedback process Tb is usually continued until the end of the liquid treatment process. In the above-described embodiment, the feedback control of the motor needle valve 23 is not performed during the initial valve opening process Ta, and the opening degree of the motor needle valve 23 is fixed to a preset opening degree, but the initial valve opening is performed. Feedback control of the motor needle valve 23 may also be performed during the process Ta. In particular, by inputting information regarding the execution timing of the initial valve opening process Ta to the control unit 24, the control unit 24 can grasp the execution timing of the initial valve opening process Ta in advance. Therefore, the initial valve opening process Ta is set as the period of the first operation mode described above, and the control unit 24 sets the flow rate of the processing liquid during the period during which the initial valve opening process Ta is being performed, regardless of the measurement result of the flow meter 22. The adjustment may be performed on the motor needle valve 23 in the fourth cycle described above. As a result, even in the initial valve opening process Ta (see the sign "D1" in FIG. 4) in which the flow rate of the treatment liquid tends to deviate from the set flow rate P, the flow rate of the treatment liquid is brought closer to the set flow rate P to perform the liquid treatment. Can be done properly.

The period of the first operation mode described above is not limited to the initial valve opening process Ta, and any process can be set as the period of the first operation mode described above. For example, when a plurality of processing units 16 are connected to one tank 102 as shown in FIG. 1, a liquid processing process of another processing unit 16 starts in the middle of a liquid processing process of one processing unit 16. The timing and the preset period before and / or after that may be set as the period of the first operation mode described above. Further, when a plurality of tanks 102 are connected to one processing unit 16, the timing of switching the tank 102, which is a substantial supply source of the processing liquid to the processing unit 16, and the timing before and / or after that are preset. The set period may be set as the period of the first operation mode described above.

Further, in the above-described embodiment, the case where the target of the flow rate measurement by the flow meter 22 and the target of the flow rate adjustment by the motor needle valve 23 are treatment liquids such as DHF has been described, but these targets are fluids other than the treatment liquid. May be good. For example, when the flow rate of a rinse liquid such as DIW or another fluid is measured by the flow meter 22 and adjusted by the motor needle valve 23, the same liquid treatment apparatus and liquid treatment method as in the above-described embodiment and modification can be used. It can be used.

Further, in the above-described embodiment, the case where the motor needle valve is used as the flow rate adjusting mechanism has been described, but when the flow rate of the fluid such as the treatment liquid is adjusted by another mechanism, the same as in the above-described embodiment and modification. Can be processed.

As described above, in the above-described embodiment and modification, the measurement result of the flow meter 22 indicates that the flow rate of the fluid (treatment liquid or the like) flowing through the supply line (branch line 112) is included in the preset range. In this case, the flow rate of the fluid flowing through the supply line is adjusted by the flow rate adjusting mechanism (motor needle valve 23) at a cycle longer than the time interval of the first cycle P1. In the case of "when the flow rate of the fluid flowing through the supply line is adjusted by the flow rate adjusting mechanism at a cycle longer than the time interval of the first cycle P1", the flow rate of the fluid is as described in the second range R2 described above. Not only when the adjustment is positively performed, but also when the flow rate of the fluid is not positively adjusted as in the first range R1 described above (that is, when the flow rate adjustment cycle has an infinite time interval). Is also included.

16 Processing unit 22 Flow meter 23 Motor needle valve 24 Control unit 112 Branch line W Wafer

Claims (11)

A substrate processing unit that supplies fluid to the substrate,
A supply line that supplies the fluid to the substrate processing unit,
A flow meter that measures the flow rate of the fluid flowing through the supply line,
A flow rate adjusting mechanism provided on the supply line and adjusting the flow rate of the fluid flowing through the supply line.
A control unit that controls the flow rate adjusting mechanism based on the measurement result of the flow meter is provided.
The control unit
The measurement result of the flow meter is received in the first cycle, and
When the measurement result of the flow meter indicates that the flow rate of the fluid flowing through the supply line is included in a preset range, the supply line is operated at a cycle longer than the time interval of the first cycle. A liquid treatment device that adjusts the flow rate of the flowing fluid by the flow rate adjusting mechanism. The control unit
When the flow rate of the fluid flowing through the supply line indicated by the measurement result of the flow meter is included in a preset first range determined with reference to the set flow rate, the flow rate of the fluid flowing through the supply line is said. Make sure it is not adjusted by the flow adjustment mechanism
When the flow rate of the fluid flowing through the supply line indicated by the measurement result of the flow meter is included in a preset second range farther from the set flow rate than the first range, the time interval of the first cycle The liquid treatment apparatus according to claim 1, wherein the flow rate of the fluid flowing through the supply line is adjusted by the flow rate adjusting mechanism in a second cycle having a longer time interval. The control unit
When the flow rate of the fluid flowing through the supply line indicated by the measurement result of the flow meter is included in the preset second range determined with reference to the set flow rate, the time is longer than the time interval of the first cycle. In the second cycle of the interval, the flow rate of the fluid flowing through the supply line is adjusted by the flow rate adjusting mechanism.
When the flow rate of the fluid flowing through the supply line indicated by the measurement result of the flow meter is included in a preset third range farther from the set flow rate than the second range, the time interval of the second cycle The liquid treatment apparatus according to claim 1, wherein the flow rate of the fluid flowing through the supply line is adjusted by the flow rate adjusting mechanism in a third cycle having a shorter time interval. The control unit
When the flow rate of the fluid flowing through the supply line indicated by the measurement result of the flow meter is included in a preset third range farther from the set flow rate than the second range, the time interval of the second cycle The liquid treatment apparatus according to claim 2, wherein the flow rate of the fluid flowing through the supply line is adjusted by the flow rate adjusting mechanism in a third cycle having a shorter time interval. The liquid treatment apparatus according to claim 3 or 4, wherein the time interval of the third cycle is equal to the time interval of the first cycle. The control unit receives the measurement result of the flow meter indicating that the flow rate of the fluid flowing through the supply line is included in the third range substantially at the same time as the fluid flowing through the supply line. The liquid treatment apparatus according to claim 4, wherein the flow rate of the above is adjusted by the flow rate adjusting mechanism. The control unit receives the measurement result of the flow meter indicating that the flow rate of the fluid flowing through the supply line has shifted from the state not included in the second range to the state included in the second range. Claim that the adjustment timing of the flow rate adjusting mechanism is determined with reference to the timing, and the flow rate of the fluid flowing through the supply line is not adjusted by the flow rate adjusting mechanism at least substantially at the same time as the timing of receiving the measurement result. The liquid treatment apparatus according to any one of 2, 4 and 6. The control unit has a time interval shorter than the time interval of the second cycle, regardless of the measurement result of the flow meter, at least during the period in which the operation mode of the liquid treatment device is the preset first operation mode. The liquid treatment apparatus according to any one of claims 2 to 7, wherein the flow rate of the fluid flowing through the supply line is adjusted by the flow rate adjusting mechanism in four cycles. The liquid treatment apparatus according to claim 8, wherein the time interval of the fourth cycle is equal to the time interval of the first cycle. According to any one of claims 1 to 9, the control unit controls the flow rate adjusting mechanism so that the flow rate of the fluid flowing through the supply line approaches the set flow rate based on the measurement result of the flow meter. The liquid treatment apparatus according to the description. A process of supplying a fluid to a substrate processing unit via a supply line and supplying the fluid from the substrate processing unit to the substrate.
A process of measuring the flow rate of the fluid flowing through the supply line with a flow meter, and
The process in which the measurement result of the flow meter is received by the control unit in the first cycle, and
A step of adjusting the flow rate of the fluid flowing through the supply line by a flow rate adjusting mechanism controlled by the control unit based on the measurement result of the flow meter is provided.
When the measurement result of the flow meter indicates that the flow rate of the fluid flowing through the supply line is included in a preset range, the supply line is operated at a cycle longer than the time interval of the first cycle. A liquid treatment method in which the flow rate of the flowing fluid is adjusted by the flow rate adjusting mechanism.

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