JP2020160164A - Optical device, exposure device and article producing method - Google Patents

Abstract

To provide an advantageous technology for reducing the influence of stress acting on an optical part.SOLUTION: An optical device 100 comprises an optical part 111, support mechanisms 130a and 130b having support parts 120a and 120b for supporting the optical part, and a position regulating part for regulating the position of the optical part in a first direction, and operating mechanisms 140a and 140b that apply a force in a second direction different from the first direction onto the optical part and operate the optical part. The operating mechanisms include a contact part that comes into contact with the optical part, an operating part that moves the contact part in the second direction, and a connecting part that connects the contact part and the operating part. The connecting part is configured such that the operating part and the contact part are relatively movable in the first direction.SELECTED DRAWING: Figure 1

Description

The present invention relates to an optical device, an exposure device, and a method for manufacturing an article.

In an optical device in which an optical component such as a lens or a mirror is supported by a support mechanism, the optical component can be deformed by stress generated by its own weight or the like. For example, Patent Document 1 describes that the lens may be deformed and the optical characteristics may be deteriorated in a configuration in which the lens and the lens mounting portion are in contact with each other at a plurality of points.

Japanese Unexamined Patent Publication No. 2001-242364

Deformation of optical components due to stress can have a significant effect on imaging performance, especially in optical devices having large optical components such as exposure devices and large telescopes. Further, even in an optical device having a small optical component, if the required imaging performance is high, the deformation of the optical component due to stress may not be negligible.

An object of the present invention is to provide an advantageous technique for reducing the influence of stress acting on an optical component.

One aspect of the present invention relates to an optical device, which is a support mechanism having an optical component, a support portion that supports the optical component, and a position regulating portion that regulates the position of the optical component in a first direction. The optical component is provided with an operating mechanism for operating the optical component by applying a force to the optical component in a second direction different from the first direction, and the operating mechanism comes into contact with the optical component. The contact portion includes, an operation portion for moving the contact portion in the second direction, and a connecting portion for connecting the contact portion and the operation portion, and the connecting portion includes the operation in the first direction. The portion and the contact portion are configured to be relatively movable.

According to the present invention, an advantageous technique for reducing the influence of stress acting on an optical component is provided.

The front view which shows typically the structure of the optical apparatus of 1st Embodiment. A cross-sectional view taken along the line AA of FIG. BB sectional view of FIG. The figure which illustrates the operation for reducing the influence by the stress acting on an optical component. FIG. 4 (b) is a sectional view taken along the line CC. FIG. 4 (b) is a sectional view taken along line DD. The figure which shows the 1st structural example of the connecting part. The figure which shows the other configuration example and operation example of the support mechanism. The front view which shows typically the structure of the optical apparatus of 1st Example of 1st Embodiment. FIG. 9 is a sectional view taken along line FF of FIG. FIG. 9 is a sectional view taken along line GG of FIG. FIG. 4 is a cross-sectional view taken along the line DD of the exposure apparatus of the first embodiment in which the step of FIG. 4B is carried out. The front view which shows typically the structure of the optical apparatus of 2nd Embodiment of 1st Embodiment. The perspective view of the operation mechanism of the optical apparatus of 2nd Example. FIG. 13 is a sectional view taken along the line HH of FIG. FIG. 4 is a cross-sectional view taken along the line DD of the exposure apparatus of the second embodiment in which the step of FIG. 4B is carried out. The front view which shows typically the structure of the optical apparatus of 3rd Embodiment of 1st Embodiment. FIG. 16 is a cross-sectional view taken along the line II of FIG. The figure which shows the operation example of the optical apparatus of 3rd Example. The figure which shows the structure of the exposure apparatus of 2nd Embodiment. The figure which shows the structure of the exposure apparatus of 3rd Embodiment.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The following embodiments do not limit the invention according to the claims. Although a plurality of features are described in the embodiment, not all of the plurality of features are essential for the invention, and the plurality of features may be arbitrarily combined. Further, in the attached drawings, the same or similar configurations are designated by the same reference numbers, and duplicate description is omitted.

1 to 6 schematically show the configuration of the optical device 100 according to the first embodiment of the present invention. 1 is a front view of the optical device 100 according to the first embodiment of the present invention, FIG. 2 is a sectional view taken along the line AA of FIG. 1, and FIG. 3 is a sectional view taken along the line BB of FIG. The optical device 100 may include one optical component 111, one or more support mechanisms 130 for supporting the optical component 111, and one or more operating mechanisms 140 for operating the optical component 111. In one example, the optical device 100 may include one optical component 111, two support mechanisms 130, and two operating mechanisms 140. Here, when the two support mechanisms 130 are described separately from each other, they are described as the support mechanisms 130a and 130b, and when they are not distinguished from each other, they are described as the support mechanism 130. In the case of simply describing as the support mechanism 130, the number of the support mechanisms 130 may be one or more. Similarly, when the two operating mechanisms 140 are distinguished from each other, they are described as operating mechanisms 140a and 140b, and when they are not distinguished from each other, they are described as operating mechanisms 140. In the case of simply describing as the operation mechanism 140, the number of the operation mechanisms 140 may be one or a plurality.

The support mechanism 130 may have a support portion 120 that supports the optical component 111, and position restricting portions 131 and 132 that regulate the position of the optical component 111 in the first direction 202. Here, the support portion 120 of the support mechanism 130a is described as the support portion 120a, and the support portion 120 of the support mechanism 130b is also described as the support portion 120b. The two support mechanisms 130 may have structures that are symmetrical with respect to the axis of symmetry 110. The two support mechanisms 130 may regulate the position of the optical component 111 in the second direction 203 and the third direction 201. The third direction can be different from both the first direction 202 and the second direction 203. In one example, the first direction 202, the second direction 203, and the third direction 201 can be angles that form 90 degrees with each other. From another point of view, the first direction 202, the second direction 203, and the third direction 201 can correspond to the X-axis direction, the Z-axis direction, and the Y-axis direction in the XYZ Cartesian coordinate system, respectively.

The operating mechanism 140 may be provided to operate the optical component 111 by applying a force to the optical component 111 in the second direction 203 different from the first direction 202. The operation mechanism 140 may be, for example, a drive mechanism that drives the optical component 111 by applying a force to the optical component 111 in the second direction 203. The two operating mechanisms 140 may have structures that are symmetrical with respect to the axis of symmetry 110. The axis of symmetry 110 may be arranged so as to pass through the center of the optical component 111. Such a drive mechanism can be controlled by a control unit (not shown) to perform a stress reduction operation described below.

The operating mechanism 140 may include a contact portion 141 that contacts the optical component 111, an operating portion 142 that moves the contact portion 141 in the second direction 203, and a connecting portion 145 that connects the contact portion 141 and the operating portion 142. .. When the operating portion 142 moves in the second direction 203, the connecting portion 145 and the contact portion 141 also move in the second direction 203, and a force in the second direction 203 is applied to the optical component 111. As a result, the optical component 111 can be driven in the second direction 203. The connecting portion 145 may include a first portion 146 fixed to the operating portion 142 and a second portion 147 fixed to the contact portion 141. The connecting portion 145 may be configured such that the operating portion 142 and the contact portion 141 are relatively movable in the first direction.

The operating mechanism 140 can be used to reduce the influence of stress acting on the optical component 111 (for example, deformation of the optical component 111 or a resulting change in the optical performance of the optical component 111). The optical component 111 may be supported by two support mechanisms 130a, 130b in use. When the optical component 111 is supported by the support mechanisms 130a and 130b, the optical component 111 may first contact the support portion 120 of the support mechanism 130a and then the support portion 120 of the support mechanism 130b. The opposite is possible. Alternatively, when the optical component 111 is supported by the support portion 120 of the support mechanism 130, the optical component 111 may or may not rotate around the contact point between the optical component 111 and the support portion 120. sell. As described above, the starting state of the support of the optical component 111 by the support portion 120 of the support mechanism 130 varies and is not constant. Therefore, the stress finally acting on the optical component 111 supported by the support mechanism 130, and the influence of the stress may vary. Therefore, the operating mechanism 140 can be used to reduce the influence of stress acting on the optical component 111 (for example, deformation of the optical component 111 or a change in the optical performance of the optical component 111 due to the deformation).

4 (a) to 4 (e) exemplify an operation for reducing the influence of stress acting on the optical component 111 (hereinafter, also referred to as a stress reduction operation). The operating mechanisms 140a and 140b are configured so that the state of the optical component 111 can be changed, and the states are the first state in which the optical component 111 is supported by the support mechanism 130 and the optical component, as described in detail below. 111 may include a second state supported by the operating mechanism 140. When the optical component 111 is installed, the stress acting on the optical component 111 can be made constant by determining the installation rule so as to shift from the first state to the first state via the second state. For example, the optical component 111 is adjusted after installing the optical component 111 according to the installation rule at the time of adjustment before shipment, and then the optical component 111 is adjusted after installing the optical component 111 according to the installation rule at the time of adjustment after shipment. Is useful. According to such a method, the stress acting on the optical component 111 at the time of pre-shipment adjustment can be equalized with the stress acting on the optical component 111 at the time of post-shipment adjustment, so that the post-shipment adjustment work can be performed. Can be facilitated.

Hereinafter, an operation example by the operation mechanism 140 will be described with reference to FIGS. 4 (a) to 4 (e). In FIGS. 4A to 4E, only the support portions 120 (120a, 120b) among the components of the support mechanism 130 are shown. FIG. 4A shows the initial state. The initial state corresponds to the first state. In the initial state, the optical component 111 may have stress depending on the state when the support mechanisms 130a and 130b start supporting the optical component 111. Alternatively, in the initial state, stress due to impact and vibration (for example, impact and vibration during transportation) applied to the optical device 100 while the optical component 111 is supported by the support mechanisms 130a and 130b exists in the optical component 111. sell.

First, as shown in FIG. 4B, the operation mechanism 140a can be operated so that the optical component 111 is separated from the support portion 120a of the support mechanism 130a. In this state, the optical component 111 is supported by the support portion 120b of the support mechanism 130b and the operation mechanism 140a.

Next, as shown in FIG. 4 (c), the operation mechanism 140a can operate the operation mechanism 140a so that the optical component 111 is separated from the support portion 120b of the support mechanism 130b. As a result, the optical component 111 is in the second state supported by the operating mechanisms 140a and 140b.

Next, as shown in FIG. 4D, the operation mechanism 140a can be operated so that the support portion 120a of the support mechanism 130a and the optical component 111 come into contact with each other. In this state, the optical component 111 is supported by the support portion 120b of the support mechanism 130b and the operation mechanism 140b. Next, as shown in FIG. 4E, the operation mechanism 140b can be operated so that the support portion 120b of the support mechanism 130b and the optical component 111 come into contact with each other. As a result, the optical component 111 is in the first state of being supported by the support portions 120a and 120b of the support mechanisms 130a and 130b. That is, in the example of FIGS. 4A to 4E, the state of the optical component 111 changes from the first state to the first state through the second state.

FIG. 5 is a cross-sectional view taken along the line CC of FIG. 4 (b). The operation mechanism 140 preferably moves only in the second direction 203, but in reality, due to processing errors, assembly errors, adjustment residuals, etc. of the operation mechanism 140, the operation mechanism 140 is moved in the second direction as illustrated in FIG. It can also move in the first direction 202 during the operation in 203. When the operating unit 142 moves in the first direction 202, an operating force in the first direction 202 is applied to the connecting unit 145 connected to the operating unit 142, the contact unit 141 connected to the connecting unit 145, and the optical component 111. 151, 161 and 171 act. FIG. 6 is a cross-sectional view taken along the line DD of FIG. 4 (b). Since the position of the optical component 111 in the first direction 202 is regulated by the support mechanism 130, a reaction force 172 that resists the operating force 171 acts on the optical component 111 and does not move. Further, the contact portion 141 does not move because it receives a reaction force that resists the operating force 161 from the optical component 111.

The connecting portion 145 may include a first portion 146 and a second portion 147. The first portion 146 and the second portion 147 may be relatively movable in the direction of the first direction 202. The force required to move the first portion 146 relative to the second portion 147 in the first direction (also referred to as movable resistance) is stationary acting between the optical component 111 and the contact portion 141. Less than frictional resistance. The movable resistance is a force required to move the operating portion 142 relative to the contact portion 141 in the first direction. In other words, the movable resistance is a force required to relatively move the operating portion 142 and the contact portion 141 in the first direction.

The first portion 146 receives an operating force 151 from the operating portion 142 and moves relative to the second portion 147 in the first direction 202. The second portion 147 receives an operating force 152 in the first direction 202 due to the reaction of the movable resistance described above as the first portion 146 moves, but the reaction force resisting the operating force 152 from the contact portion 141. Do not move to receive.

As described above, as the operation unit 142 moves in the first direction 202, the first portion 146 moves in the first direction 202. The second portion 147, the contact portion 141, and the optical component 111 are internally balanced by the force caused by the reaction of the movable resistance and the reaction force from the support mechanism 130, and remain in their original positions without moving. At this time, the magnitudes of the operating force 171 and the reaction force 172 acting on the optical component 111 are equal to the magnitude of the movable resistance.

When stress acts on the optical component 111 due to the operating force 171 and the reaction force 172 acting on the optical component 111, the optical component 111 may be distorted and the optical performance of the optical component 111 may be deteriorated. Therefore, it is preferable to keep the operating force 171 and the reaction force 172 small. The operating mechanism 140 includes a connecting portion 145, whereby the operating force 171 and the reaction force 172 can be suppressed to be small by reducing the movable resistance. As a result, the stress acting on the optical component 111 is suppressed to a small value, the distortion generated in the optical component 111 is reduced, and the deterioration of the optical performance of the optical component 111 is suppressed.

FIG. 7 shows a first configuration example of the connecting portion 145. The connecting portion 145 may include a first portion 246 fixed to the operating portion 142 and a second portion 247 fixed to the contact portion 141. The first portion 246 may be movable relative to the second portion 247. The connecting portion 145 may include an elastic portion that allows the operating portion 142 and the contact portion 141 to move relative to each other with respect to the first direction 202. In one example, the first portion 246 may be composed of such elastic portions. In another example, the second portion 247 may be composed of such elastic parts. In yet another example, the first portion 246 and the second portion 247 may be composed of such elastic portions.

FIG. 7 shows an example in which the first portion 246 is composed of an elastic portion. The magnitude of the resistance when the first portion 246 is deformed (this is also referred to as the deformation resistance) can be made smaller than the magnitude of the operating force 251 received by the first portion 246 from the operating portion 142. The first portion 246 receives an operating force 251 from the operating portion 142 and deforms with respect to the first direction 202. The second portion 247 receives an operating force 252 in the first direction 202 due to the reaction of the deformation resistance as the first portion 246 is deformed, but receives a reaction force resisting the operating force 252 from the contact portion 141. Therefore, it does not move.
The contact portion 141 and the optical component 111 internally balance the force caused by the reaction force of the deformation resistance and the reaction force caused by the reaction force from the support mechanism 130, and remain in their original positions without moving.

At this time, the magnitude of the operating force 271 acting on the optical component 111 and the magnitude of the reaction force from the support mechanism 130 are equal to the magnitude of the deformation resistance. Therefore, by reducing the deformation resistance, the operating force 271 and the reaction force from the support mechanism 130 can be suppressed to be small. As a result, the stress acting on the optical component 111 is suppressed to a small value, the distortion generated in the optical component 111 is reduced, and the deterioration of the optical performance of the optical component 111 is suppressed.

8 (a) to 8 (c) show other configuration examples and operation examples of the support mechanism 130. The support mechanism 130 is modified to change the positions of the support portion 120 that supports the optical component 111, the position regulating portions 131 and 132 that regulate the positions of the optical component 111 in the first direction 202, and the position regulating portions 131 and 132, respectively. It may have mechanisms 133, 135 and the like. 8 (a) to 8 (c) show that the stress acting on the region of the optical component 111 that abuts on the position regulating portions 131 and 132 is set to a predetermined stress state, and the optical component 111 is pressed in the first direction. The step of positioning with respect to 202 is shown.

FIG. 8A is a cross-sectional view taken along the line EE of FIG. 4C. FIG. 8B shows a state in which the positions of the position regulating portions 131 and 132 are changed from the state of FIG. 8A to positions separated from the optical component 111 by the changing mechanisms 133 and 135. By changing the positions of the position regulating portions 131 and 132 to positions separated from the optical component 111, the stress acting on the optical component 111 due to the contact between the position regulating portions 131 and 132 and the optical component 111 is removed. At this time, the optical component 111 may move in the first direction 202 depending on the stress state before the stress is removed. FIG. 8B exemplifies a state in which the optical component 111 is moved toward the position regulating unit 132.

In FIG. 8 (c), from the state of FIG. 8 (b), the positions of the position regulating portions 131 and 132 are changed to the positions where the position regulating portions 131 and 132 come into contact with the optical component 111 by the changing mechanisms 133 and 135. , The state in which the optical component 111 is arranged at a predetermined position is shown. In this example, the position of the position regulating unit 132 is from the position shown by the dotted line (the position shown in FIG. 8B) to the predetermined position shown by the solid line after the position regulating unit 132 comes into contact with the optical component 111. The optical component 111 is changed to be moved while being pressed.

When the positions of the position regulating portions 131 and 132 are changed by the changing mechanisms 133 and 135, the contact portion 141 in contact with the optical component 111 and the second portion 147 connected to the contact portion 141 move together with the optical component 111. .. On the other hand, since the frictional resistance between the first part 146 and the operation part 142 acts on the first part 146, the first part 146 does not move. The pressing force 181 that presses the optical component 111 by the position regulating portion 132 is equal to the magnitude of the resistance (this is also referred to as pressing resistance) when the second portion 147 moves relative to the first portion 146.

When stress acts on the optical component 111 due to the pressing force 181 acting on the optical component 111, the optical component 111 may be distorted and the optical performance of the optical component 111 may deteriorate. Therefore, the pressing force 181 should be kept small. Is preferable. The operating mechanism 140 includes a connecting portion 145 that allows the operating portion 142 and the contact portion 141 to move relatively, whereby the pressing resistance can be reduced and the pressing pressure 181 can be suppressed to be small. .. As a result, the stress acting on the optical component 111 is suppressed to a small value, the distortion generated in the optical component 111 is reduced, and the deterioration of the optical performance of the optical component 111 is suppressed.

FIG. 9 shows a front view of the optical device 300 as the first embodiment of the first embodiment. The optical device 300 may include a mirror 311 as an optical component, support mechanisms 330a and 330b for supporting the mirror 311 and an operation mechanism 340a and 340b for operating the mirror 311. The optical device 300 may further include a lens barrel 301 to which the support mechanisms 330a and 330b and the operation mechanisms 340a and 340b are fixed.

FIG. 10 is a cross-sectional view taken along the line FF of FIG. The support mechanism 330a has a metal body 331, 332 having protrusions for restricting the position of the mirror 311 with respect to the first direction 402 parallel to the optical axis of the mirror 311 and an elastic sheet for supporting the weight of the mirror 311. It may include a metal body 320 with an elastic body. The support mechanism 330b has the same configuration as the support mechanism 330a. The support mechanisms 330a and 330b may be arranged symmetrically with respect to the axis of symmetry 310 of the optical device 300. The axis of symmetry 310 may be arranged so as to pass through the center (optical axis) of the mirror 311.

FIG. 11 is a cross-sectional view taken along the line GG of FIG. The operation mechanism 340 includes a metal body 341 with an elastic body that comes into contact with the mirror 311, a screw bolt (operation unit) 342 that can move in the second direction 203 parallel to the direction of gravity, a metal body 341 with an elastic body, and a screw bolt 342. Can include a connecting portion 345 that connects and. The screw bolt 342 is screw-engaged with the lens barrel 301, and when the screw bolt 342 is rotated, the connecting portion 345 can be moved to the 203rd position. When the connecting portion 345 moves in the second direction 203, the metal body 341 with an elastic body connected to the connecting portion 345 also moves in the second direction 203.

The connecting portion 345 may be a structure having a linear guide having a degree of freedom with respect to the first direction 202. The connecting portion 345 may include, for example, a rail portion 346 composed of a coupling of the metal plate 348 and the rail 343, and a carriage portion 347 composed of a coupling of the carriage 344 and the metal plate 349. In one example, the coefficient of kinetic friction of the linear guide is 0.003 when the load ratio is 0.1, and 0.02 when the weights of the mirror 311 and the metal body 341 with the elastic body act. In the optical device 300 as well, the stress acting on the mirror 311 can be brought into a predetermined stress state by the series of steps from FIG. 4A to FIG. 4E.

FIG. 12 is a DD cross-sectional view of the exposure apparatus 300 performing the step of FIG. 4 (b). Here, the screw bolt 342, the connecting portion 345, and the metal body 341 with an elastic body move in the second direction 203, and can also move slightly in the first direction 202 due to machining errors, assembly errors, adjustment errors, and the like. Therefore, FIG. 12 shows a state in which the screw bolt 342 moves in the first direction 202 while moving in the second direction 203 for convenience.

When the screw bolt 342 moves in the first direction 202, operating forces 351, 352, 361, and 371 act on the rail portion 346, the carriage portion 347, the metal body with elastic body 341, and the mirror 311 with respect to the first direction 202. To do. Since the position of the mirror 311 in the first direction 202 is regulated by the support mechanisms 320 and 330, a reaction force resisting the operating force 371 acts on the mirror 311 and the mirror 311 does not move. The metal body 341 with an elastic body does not move because it receives a reaction force from the mirror 311 that resists the operating force 361. The rail portion 346 receives an operating force 351 from the screw bolt 342 and moves relative to the carriage portion 347 in the first direction 202. The carriage portion 347 receives an operating force 352 in the first direction 202 due to the reaction of the resistance of the linear guide as the rail portion 346 moves, but the reaction force 352 resists the operating force 352 from the metal body 341 with the elastic body. Do not move because it receives force.

As described above, as the screw bolt 342 moves in the first direction 202, the rail portion 346 moves in the first direction 202. In the carriage portion 347, the metal body 341 with an elastic body, and the mirror 311, the force caused by the reaction of the resistance of the linear guide and the reaction force from the support mechanisms 320 and 330 are internally balanced and do not move. Stay in its original position. At this time, the magnitude of the operating force 371 acting on the mirror 311 and the magnitude of the reaction force from the support mechanisms 320 and 330 are equal to the magnitude of the resistance of the linear guide.

In one example, the resistance of the linear guide is 0.02 Mg, where Mg is the sum of the weights acting on the linear guide by the mirror 311 and the metal body 341 with an elastic body. This is one tenth the size of the configuration without the connecting portion 345, that is, the configuration in which the screw bolt 342 and the metal body with elastic body 341 are directly connected (screw bolt 342 and the metal body with elastic body 341). When the coefficient of dynamic friction with and is 0.2).

When stress acts on the mirror 311 due to the operating force 371 acting on the mirror 311 and the reaction force from the support mechanisms 320 and 330, the mirror 311 may be distorted and the optical performance of the mirror 311 may be deteriorated. Therefore, it is preferable to keep the operating force 371 and the reaction force from the support mechanisms 320 and 330 small. The operating mechanism 340 includes a connecting portion 345 that allows the operating portion 342 and the contact portion 341 to move relative to each other, whereby the coefficient of dynamic friction of the linear guide can be reduced, and the operating force 371 and the support The reaction force 372 from the mechanism 330 can be suppressed to a small value. As a result, the stress acting on the mirror 311 is suppressed to a small value, the distortion generated in the mirror 311 is reduced, and the deterioration of the optical performance of the mirror 311 is suppressed.

FIG. 13 shows a front view of the optical device 500 as a second embodiment of the first embodiment. The optical device 500 may include a mirror 511 as an optical component, support mechanisms 530a and 530b for supporting the mirror 511, and operation mechanisms 540a and 540b for operating the mirror 511. The optical device 500 may further include a lens barrel 501 to which the support mechanism 530a, 530b and the operation mechanism 540a, 540b are fixed. The configuration of the support mechanisms 530a and 530b may be similar to the support mechanisms 330a and 330b of the optical device 300.

FIG. 14 is a perspective view of the operation mechanism 540. FIG. 15 is a sectional view taken along the line HH of FIG. The operation mechanism 540 includes a metal body (contact portion) 541 with an elastic body having an elastic sheet on the surface for supporting the weight of the mirror 511, and a stepping motor that drives the movable portion in a second direction parallel to the direction of gravity. It may include a linear actuator 542. The metal body (contact portion) 541 and the linear actuator 542 are connected to each other by a connecting portion having a leaf spring 543 and a metal body 546, 547, 548. The linear actuator 542 is fixed to the lens barrel 501. By driving the linear actuator 542, the connecting portion 545 can be moved in the second direction 203. Along with the movement of the connecting portion 545, the metal body 541 with an elastic body also moves in the second direction 603. Also in the optical device 500, the stress acting on the mirror 511 becomes a predetermined stress state by the series of steps from FIG. 4 (a) to FIG. 4 (e).

FIG. 16 is a DD cross-sectional view of the optical device 500 of the second embodiment in which the step of FIG. 4B is carried out. Here, the movable portion of the linear actuator 542, the connecting portion 545, and the metal body 541 with an elastic body can move in the second direction 203, and can also move in the first direction 202 due to machining errors, assembly errors, adjustment errors, and the like. .. Therefore, in FIG. 16, for convenience, a state in which the linear actuator 542 has a driving component in the first direction 202 in addition to the second direction 203 for driving the movable portion thereof is shown.

When the linear actuator 542 drives the movable part in the second direction 202, the operating forces 551, 552, 561 in the second direction 202 with respect to the leaf spring 543, the metal body 547, the metal body 541 with the elastic body, and the mirror 511, 571 works. Since the position of the mirror 511 is regulated by the support mechanism 520 and 530 in the first direction 202, a reaction force resisting the operating force 571 acts on the mirror 511 and the mirror 511 does not move. The metal body 541 with an elastic body does not move because it receives a reaction force from the mirror 511 that resists the operating force 561. The leaf spring 543 receives an operating force 551 from the linear actuator 542 and deforms with respect to the first direction 202. The metal body 547 receives an operating force 552 in the second direction 202 due to the elastic force of the leaf spring 543 as the leaf spring 543 deforms, but a reaction force that resists the operating force 552 from the metal body 541 with the elastic body. Do not move to receive.

As described above, as the linear actuator 542 moves its movable portion in the first direction 202, the leaf spring 543 is deformed with respect to the first direction 202. The metal body 547, the metal body 541 with an elastic body, and the mirror 511 are in their original positions without moving because the elastic force of the leaf spring 543 and the reaction force from the support mechanisms 520 and 530 are internally balanced. Stay in.
At this time, the magnitude of the operating force 571 and the reaction force acting on the mirror 511 is equal to the magnitude of the elastic force of the leaf spring 543.

In one example, the maximum amount of deformation of the leaf spring 543 with respect to the first direction 202 is 0.10 mm, the size of the deformed part of the leaf spring 543 is 80 mm × 67 mm, the thickness is 1.6 mm, the material is 7.9, and Young's modulus is Young's modulus. The spring stainless steel SUS304 having a modulus of 186 GPa can be used. In this case, the elastic force of the leaf spring 543 is about 10N.

In the configuration without the connecting portion 545, that is, in the configuration in which the linear actuator 542 and the metal body 541 with an elastic body are directly coupled, the operating force 571 acting on the mirror 511 is 1000 N under the following conditions.

<Conditions> The sum of the weights of the mirror 511 and the metal body 541 with the elastic body acting on the linear actuator 542 is 500 kgf, and the coefficient of dynamic friction between the linear actuator 542 and the metal body 541 with the elastic body is 0.2.

When stress acts on the mirror 511 due to the operating force 571 acting on the mirror 511 and the reaction force from the support mechanisms 520 and 530, the mirror 511 is distorted and the optical performance of the mirror 511 may deteriorate. Therefore, it is preferable to keep the operating force 571 and the reaction force 572 small. The operating mechanism 540 includes a connecting portion 545 that allows the linear actuator 542 and the metal body 541 to move relatively, thereby reducing the reaction force from the operating force 571 and the support mechanisms 520 and 530. it can. As a result, the stress acting on the mirror 511 is suppressed to a small value, the distortion generated in the mirror 511 is reduced, and the deterioration of the optical performance of the mirror 511 is suppressed.

FIG. 17 shows a front view of the optical device 700 as a third embodiment of the first embodiment. The optical device 700 may include a mirror 711 as an optical component, support mechanisms 730a and 730b for supporting the mirror 711, and operation mechanisms 740a and 740b for operating the mirror 711. The optical device 700 may further include a lens barrel 701 to which the support mechanisms 730a and 730b and the operation mechanisms 740a and 740b are fixed.

FIG. 18 is a sectional view taken along line II of FIG. The support mechanism 730a may include air cylinders 734, 736 as a changing mechanism that drives the position regulating portions 731, 732 in the first direction 202 parallel to the optical axis of the mirror 711. The support mechanism 730a may further include metal housings 733, 735 for fixing the air cylinders 734, 736 to the lens barrel 701. The support mechanism 730b may have the same configuration as the support mechanism 730a. The support mechanisms 730a and 730b may be arranged symmetrically with respect to the axis of symmetry 710 of the optical device 700. The axis of symmetry 710 may be arranged so as to pass through the center (optical axis) of the mirror 711. The operating mechanisms 740a and 740b may have the same configuration as the operating mechanisms 540a and 540b of the second embodiment. Also in the optical device 700, the stress acting on the mirror 711 becomes a predetermined stress state by the series of steps from FIG. 4A to FIG. 4E.

19 (a) to 19 (c) show that the stress acting on the region of the mirror 711 that comes into contact with the position regulating portions 731 and 732 is set to a predetermined stress state, and the mirror 711 is pressed with respect to the first direction 202. The positioning process is shown. FIG. 19A is a sectional view taken along line EE of the optical device 700 in the process of FIG. 4C. FIG. 19B shows a state in which the positions of the position regulating portions 731 and 732 are changed from the state shown in FIG. 19A to positions separated from the mirror 711 by the air cylinders 734 and 736. By changing the positions of the position regulating portions 131 and 132 to positions separated from the mirror 711, the stress acting on the mirror 711 due to the contact between the position regulating portions 131 and 132 and the mirror 711 is removed.

In FIG. 19 (c), from the state of FIG. 19 (b), the positions of the position regulating portions 131 and 132 are changed by the air cylinders 734 and 736 to the positions where the position regulating portions 131 and 132 come into contact with the mirror 711. The state in which the mirror 711 is arranged at a predetermined position is shown. When the position regulating portions 131 and 132 are driven by the air cylinders 734 and 736 and the mirror 711 is pressed, the metal body 541 with an elastic body supporting the mirror 711 and the metal body 547 connected to the metal body 541 with an elastic body are formed. , Move with the mirror 711. On the other hand, the leaf spring 543 is deformed as the metal body 547 moves. The pressing force 781 that the air cylinders 734 and 736 press against the mirror 711 is equal to the elastic force of the leaf spring 543.

In one example, the elastic force of the leaf spring 543 is about 10 N when the leaf spring 543 having the dimensions, material, and maximum deformation amount described in the second embodiment is used. In a configuration without a connecting portion 545, that is, in a configuration in which the linear actuator 542 and the metal body 541 with an elastic body are directly coupled, the pressing force 781 required to press and drive the mirror 711 is subject to the following conditions. Below it is 1000N.

<Conditions> The sum of the weights of the mirror 711 and the metal body 541 with the elastic body acting on the linear actuator 542 is 500 kgf, and the coefficient of dynamic friction between the linear actuator 542 and the metal body 541 with the elastic body is 0.2.

When stress acts on the mirror 711 due to the pressing force 781 acting on the mirror 711, the mirror 711 may be distorted and the optical performance of the mirror 711 may be deteriorated. Therefore, it is preferable to keep the pressing force 781 small. The operating mechanism 740 includes a connecting portion 545 that allows the linear actuator 542 and the metal body 541 to move relative to each other, whereby the pressing force 781 can be kept small. As a result, the stress acting on the mirror 711 is suppressed to a small value, the distortion generated in the mirror 711 is reduced, and the deterioration of the optical performance of the mirror 711 is suppressed.

FIG. 20 is a side view of the exposure apparatus 1000 according to the second embodiment of the present invention. The exposure device 1000 may include a lighting device 1100, an exposure pattern forming device 1200, a projection optical device (projection optical system) 1300, a stage device 1400, and an electric control device 1500. The lighting device 1100, the exposure pattern forming device 1200, the projection optical device 1300, the stage device 1400 and the electrical control device 1500 may be housed in the chamber 1600. The optical device represented by the optical device 100 or the like of the first embodiment may form, for example, a part of the projection optical device 1300.

The electric control device 1500 performs electrical control for keeping the temperature of the internal space of the lighting device 1100, the exposure pattern forming device 1200, the projection optical device 1300, the stage device 1400, and the chamber 1600 within a predetermined temperature range. Further, at the time of exposure, electrical control is performed to link the operation units of the lighting device 1100, the exposure pattern forming device 1200, the projection optical device 1300, and the stage device 1400.

The exposure light generated by the lighting device 1100 is applied to the exposure pattern forming device 1200 to form an exposure pattern. The exposure pattern is projected by the projection optical device 1300 onto a substrate (wafer or glass plate) mounted on the stage of the stage device 1400.

The optical component 111 constituting the optical device 100 has an imaging performance when forming an exposure pattern formed by the exposure pattern forming apparatus on a wafer or a glass plate as a part of the optical system constituting the projection optical apparatus 1300. It has a big influence. Therefore, when stress acts on the optical component 111, the optical component 111 may be distorted and the imaging performance may be deteriorated. In the optical device 100, since the stress acting on the optical component 111 is suppressed to a small value, the distortion generated in the optical component 111 is reduced. As a result, deterioration of the imaging performance of the optical component 111 can be suppressed to a small extent, and the exposure apparatus 1000 having good imaging performance can be provided.

FIG. 21 is a side view of the exposure apparatus 2000 according to the third embodiment of the present invention. The exposure apparatus 2000 may include an illumination unit 2100, an exposure mask unit 2200, a projection unit (projection optical system) 2300, a stage unit 2400, and an electric control unit 2500. The lighting unit 2100, the exposure mask unit 2200, the projection unit 2300, the stage unit 2400 and the electrical control unit 2500 may be housed in the chamber 2600. The optical device represented by the optical device 300 or the like of the first embodiment may form a part of the projection unit 2300.

The electric control unit 2500 performs electrical control for keeping the temperature of the internal space of the lighting unit 2100, the exposure mask unit 2200, the projection unit 2300, the stage unit 2400, and the chamber 2600 within a predetermined temperature range. Specifically, the electric control unit 2500 can feedback-control the temperature of the clean dry air supplied to each unit based on the value of the temperature sensor arranged in the internal space of each unit.

When performing exposure, it is necessary to synchronize the operation of each unit described below. The operation of the lighting unit is the timing and irradiation time of irradiating the illumination light. The operation of the exposure mask unit 2200 is the timing and speed of scanning the exposure masks constituting the exposure mask unit 2200. The operation of the projection unit 2300 is the timing and speed at which the optical system accompanied by driving is driven in the projection optical system constituting the projection unit 2300. The operation of the stage unit 2400 is the timing and speed at which the stages constituting the stage unit 2400 are driven. The electric control unit 2500 performs electric control for synchronizing the operations of the above-mentioned units.

The exposure light generated by the illumination unit 2100 is applied to the exposure mask 2201 constituting the exposure mask unit 2200, and is transmitted through the exposure mask to form an exposure pattern having the exposure mask as an object surface. The exposure pattern is projected by the projection unit 2300 onto the glass plate 2401 mounted on the stage of the stage unit 2400.

The mirror 311 constituting the optical device 300 forms an image when the exposure light transmitted through the exposure mask 2201 is formed on the resist coated on the glass plate 2401 as a part of the projection optical system 2301 constituting the projection unit 2300. It greatly affects the performance. Therefore, when stress is applied to the mirror 311, the mirror 311 may be distorted and the imaging performance may be deteriorated. In the optical device 300, since the stress acting on the mirror 311 is suppressed to be small, the distortion generated in the mirror 311 is reduced. As a result, deterioration of the imaging performance of the mirror 311 can be suppressed to a small extent, and the exposure apparatus 2000 having good imaging performance can be provided.

Hereinafter, a method for manufacturing an article (semiconductor IC element, liquid crystal display element, MEMS, etc.) using the above-mentioned exposure apparatus will be described. The article has a step of exposing a substrate (wafer, glass substrate, etc.) coated with a photosensitizer using the above-mentioned exposure apparatus, a step of developing the photosensitizer of the substrate to form a pattern, and the pattern. It can be manufactured from the processed substrate through the process of processing the substrate using. Other well-known steps include etching, resist stripping, dicing, bonding, packaging and the like. According to this article manufacturing method, it is possible to manufacture an article of higher quality than before.

The invention is not limited to the above embodiments, and various modifications and modifications can be made without departing from the spirit and scope of the invention. Therefore, a claim is attached to make the scope of the invention public.

100: Optical device, 111: Optical parts, 131, 132: Position regulation part, 140: Operation mechanism, 145: Connection part

Claims (11)

Optical parts and
A support mechanism having a support portion for supporting the optical component and a position regulating portion for regulating the position of the optical component in the first direction,
The optical component is provided with an operation mechanism for operating the optical component by applying a force to the optical component in a second direction different from the first direction.
The operating mechanism includes a contact portion that comes into contact with the optical component, an operating portion that moves the contact portion in the second direction, and a connecting portion that connects the contact portion and the operating portion. The unit is configured such that the operation unit and the contact unit can be relatively movable with respect to the first direction.
An optical device characterized by that. With respect to the first direction, the force required to move the operating portion relative to the contact portion is smaller than the static frictional resistance acting between the optical component and the contact portion.
The optical device according to claim 1. Further provided with a changing mechanism for changing the position of the position regulating unit in the first direction.
The optical device according to claim 1 or 2. The connecting portion includes an elastic portion that allows the operating portion and the contact portion to move relative to each other in the first direction.
The optical device according to any one of claims 1 to 3, wherein the optical device is characterized by the above. The connecting portion includes a linear guide that allows the operating portion and the contact portion to move relative to each other in the first direction.
The optical device according to any one of claims 1 to 3, wherein the optical device is characterized by the above. The connecting portion includes a leaf spring that allows the operating portion and the contact portion to move relative to each other in the first direction.
The optical device according to any one of claims 1 to 3, wherein the optical device is characterized by the above. The operation mechanism is configured so that the state of the optical component can be changed, and the state is a first state in which the optical component is supported by the support mechanism and a second state in which the optical component is supported by the operation mechanism. Including state,
The optical device according to any one of claims 1 to 6, characterized in that. The state is changed from the first state to the first state through the second state.
The optical device according to claim 7. The operation mechanism includes a drive mechanism, and the drive mechanism operates so that the state is changed from the first state to the first state through the second state.
The optical device according to claim 7. An exposure apparatus provided with a projection optical system that projects an exposure pattern onto a substrate.
The projection optical system includes the optical device according to any one of claims 1 to 9.
An exposure apparatus characterized in that. A step of exposing a substrate coated with a photosensitive agent by using the exposure apparatus according to claim 10.
The process of developing the photosensitizer to form a pattern and
The process of processing the substrate using the pattern and
A method for producing an article, which comprises the present invention and comprises producing an article from the substrate.

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