JP2001076992A - Optical member holding device and aligner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical member holding device for improving the area accuracy of an optical member to be held, by reducing the deformation of the deadweight direction of the optical member without substantially increasing the costs. SOLUTION: This optical member holding device 70 is provided with an interposing member brought into contact with one face 51b of an optical member 51 and the other face 51a, for interposing the optical member 51. In this case, the interposing member is provided with a first member 82, having a contact face 94a to be brought into contact with one face 51b and a second member 81, having a contact surface 89a to be brought into contact with the other face 51a, and the contact face 94a of the first member 82 and the contact race 89a of the second member 81 are arranged so as to face each other, and the contact area with one face 51a and the contact area with the other face 51b are formed almost dentical.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical member holding device for holding an optical member and an exposure apparatus using the same.

[0002]

2. Description of the Related Art There is an apparatus using an optical member, such as an exposure apparatus for transferring an image of a mask pattern onto a substrate via a projection optical system. An optical member (a lens, a prism, a reflection mirror, or the like) used in such an apparatus is usually held by an optical member holding device.

FIG. 7 shows a first example of the optical member holding device. The optical member holding device 160 includes an optical member holding hardware 161 and a spacer 162.
And a fixing ring 163.

On the inner surface of the optical member holding hardware 161, three trapezoidal support portions 164 extending in the center direction are formed. These support portions 164 are provided with optical member holding hardware 161.
Are arranged at equal intervals in the inner circumferential direction. The optical member holding hardware 161 has the optical member 165 fitted on the inner diameter side.
Is supported by bringing one optical surface 165 a in the axial direction into contact with the support portion 164. The optical member 165 thus supported by the optical member holding hardware 161
The spacer 162 is disposed so as to abut on the other optical surface 165b. In addition, the fixing ring 163 is screwed to the optical member holding hardware 161. In this way, the optical member holding device 160 holds the optical member 165.

FIG. 8 shows a second example of the optical member holding device. This configuration has a holding spring 169 and a mounting bolt 170 instead of the spacer and the fixing ring in the first example.

In the second example, the optical member holding hardware 168 is used.
The other optical surface 173b of the optical member 173 supported by
The pressing spring 169 is disposed so as to abut. In addition, the holding spring 169 is attached to the optical member holding hardware 168 with the attachment bolt 170. In this manner, the optical member holding device 167 holds the optical member 173.

[0007]

By the way, in recent years, circuit patterns of semiconductor elements have been steadily miniaturized, and accordingly, the surface accuracy required for optical members has been increased. When the structure in which the optical member is sandwiched between the support portion and the spacer or the pressing spring as in the first and second examples described above, the following problem occurs. That is,
As in the first example and the second example described above, if the contact area of the spacer or the pressing spring with respect to one surface on the near side in the direction of its own weight is larger than the contact area of the support portion with the other surface on the opposite side, A bending moment is applied to bend the optical member to the other surface side about the support portion.
Since the direction of the bending moment coincides with the direction of deformation due to its own weight, deformation in the direction of its own weight is likely to occur in the optical member.

[0008] The present invention has been made in view of the above,
An optical member holding device capable of improving the surface accuracy of an optical member to be held by reducing deformation of the optical member in its own weight direction without significantly increasing the cost, and using the same. An object of the present invention is to provide an exposure apparatus.

[0009]

In order to achieve the above object, an optical member holding device according to a first aspect of the present invention holds one side of an optical member in contact with the other side and holds the optical member. Wherein the holding member includes a first member having a contact surface that contacts the one surface, and a second member having a contact surface that contacts the other surface. The contact surface of the first member and the contact surface of the second member oppose each other, and a contact area with the one surface and a contact area with the other surface are formed to be substantially the same. It is characterized by:

As described above, the holding member has the first member having the contact surface in contact with one surface of the optical member and the second member having the contact surface in contact with the other surface. The contact surface of the first member and the contact surface of the second member oppose each other, and the contact area on one surface and the contact area on the other surface are formed substantially the same. For this reason, if one surface side is disposed on the near side in the direction of its own weight of the optical member, it is possible to prevent a moment of bending the optical member in the direction of its own weight by the sandwiching member, and to deform in the direction of its own weight. Can be hardly generated in the optical member. Moreover, it is only necessary that the holding member be formed so that the contact area on one surface of the optical member and the contact area on the other surface are the same.

According to a second aspect of the present invention, in the optical member holding apparatus according to the first aspect, the holding member has a contact surface shape with respect to the one surface and a contact surface shape with the other surface. It is characterized by doing.

As described above, in the holding member, the shape of the contact surface on one surface of the optical member is made to match the shape of the contact surface on the other surface. Therefore, it is possible to prevent a moment for bending the optical member from being generated, and it is possible to make it difficult for the optical member to be deformed in its own weight direction. In addition, it is only necessary that the holding member has the same contact surface shape with respect to one surface of the optical member and the contact surface shape with respect to the other surface.

According to a third aspect of the present invention, there is provided an exposure apparatus comprising: the optical member holding device according to any one of the first and second aspects; and an optical member held by the optical member holding device. The image of the pattern of the mask is transferred onto the substrate through the substrate.

Thus, since the surface accuracy of the optical member held by the optical member holding device can be further improved, the image of the pattern of the mask can be accurately transferred onto the substrate.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an exposure apparatus. First, the overall configuration of the exposure apparatus will be described.

The exposure device 15 converts the image of the pattern formed on the reticle (mask) R into a substrate P coated with a photosensitive agent.
The light is transferred onto and exposed to light, and is roughly composed of a light source 22, an illumination optical system 23, a projection optical system 24, a reticle stage 25, and a substrate stage 26. Here, the optical axis of the projection optical system 24 is arranged along the vertical direction.

The light source 22 emits a beam B as exposure light, and is composed of, for example, an ArF excimer laser light source. The beam B emitted from the light source 22 is
The light enters the illumination optical system 23.

The illumination optical system 23 includes reflection mirrors 28 and 29
, An optical integrator (such as a fly-eye lens) 31 for homogenizing the beam B, and a relay lens 3
2, 33, a variable field stop 34, and a condenser optical system 3
And 5. The illuminance of the beam B emitted from the light source 22 is made uniform by the optical integrator 31. The beam B having uniform illuminance passes through the relay lenses 32 and 33 and then passes through the condenser optical system 3.
The light is condensed at 5, and an illumination area on the reticle R defined by the opening of the variable field stop 34, for example, a slit-shaped illumination area extending in the non-scanning direction is illuminated in a superimposed manner.

A reticle R is held and fixed to the reticle stage 25 via a reticle holder 39. A movable mirror 40 is provided on the reticle holder 39. The position of the reticle stage 25 (and thus the position of the reticle R) is determined by the laser light emitted from the laser interferometer 41 being reflected by the movable mirror 40 and entering the laser interferometer 41. Measured based on interference. The measured position information is used for controlling the position of the reticle R and the speed of the reticle R during scanning exposure via the drive motor 42.

The projection optical system 24 forms an image of a pattern existing in the illumination area of the reticle R on the substrate P. Then, the resist applied on the substrate P is exposed to light and the substrate P
The pattern image is transferred onto the top.

The substrate stage 26 holds and fixes the substrate P via a substrate holder 43, and is movable in directions orthogonal to each other. This substrate stage 26
A movable mirror 44 is provided above. Then, the position of the substrate stage 26 (and thus the position of the substrate P) is such that the laser light emitted from the laser interferometer 45 is reflected by the moving mirror 44 and is incident on the laser interferometer 45. Measured based on interference. The measured position information is used for controlling the position of the substrate P and the speed of the substrate P during scanning exposure via the driving motor 46.

Therefore, the beam B transmitted through the reticle R forms an image on the substrate P via the projection optical system 24. Then, a pattern image in an illumination area of the reticle R is transferred to a predetermined exposure area on the substrate P. Then, while detecting the positions of the reticle stage 25 and the substrate stage 26, the reticle R and the substrate P are synchronously moved with respect to the beam B by the reticle stage 25 and the substrate stage 26. Thereby, the pattern formed on the reticle R is transferred to a predetermined exposure area on the substrate P. And
This operation is performed for a plurality of shot areas on the substrate P.

Next, an optical member holding device according to a first embodiment which is provided in the projection optical system 24 and holds an optical member such as a lens will be described with reference to FIG. The optical member holding device 70 of the first embodiment is an optical member 5 having a rotationally symmetric shape (specifically, a disk shape having a constant thickness and outer diameter).
The optical member holding hardware (holding member, second member) 81 and the spacer (holding member, first member) 8
2 and a fixing ring 83.

The optical member holding metal member 81 has a stepped shape on the inner diameter side and a substantially cylindrical shape with a constant diameter on the outer diameter side. That is, on the inner diameter side, a first inner diameter portion 85 is formed on one side in the axial direction, and a second inner diameter portion 86 is formed on the other side in the axial direction. Here, the first inner diameter portion 85 has a smaller diameter than the second inner diameter portion 86, and as a result, a step portion 87 orthogonal to the axial direction is formed between them.

The first inner diameter portion 85 has three trapezoidal support portions 89 protruding toward the center at the end opposite to the second inner diameter portion 86. These support portions 89 have the same shape and are formed at equal intervals in the circumferential direction of the optical member holding hardware 81. These support parts 89
A trapezoidal contact surface 89a orthogonal to the axial direction on the second inner diameter portion 86 side of the optical member holding metal member 81 in the axial direction.
Respectively. These contact surfaces 89a have the same shape and are located in the same plane orthogonal to the axial direction of the optical member holding hardware 81.

In addition, a female screw 91 is formed in the second inner diameter portion 86 at an end opposite to the first inner diameter portion 85.

A pair of insertion holes (only one is shown) is formed in the step portion 87 so as to be aligned with the support portion 89 in the radial direction.
2 are formed respectively.

The optical member 51 is inserted into the optical member holding metal 81 from the second inner diameter portion 85, and the other surface 51 a of the optical member 51 is
Is mounted.

The spacers 82 are respectively mounted in a pair of insertion holes 92, and a pair of parallel shaft portions 93 inserted into the insertion holes 92, and interpositions extending perpendicularly from the shaft portions 93 in the axial direction. And a plate portion 94. Each spacer 8
2 into the insertion hole 92, the spacer 82
The contact surface 94a of the interposed plate portion 94 contacts the peripheral portion 62 on the one surface 51b of the optical member 51.

Here, in the first embodiment,
Interposed plate portion 94 that contacts one surface 51b of optical member 51
Of the contact surface 94a of the optical member 51
The shape of the contact surface 89a of the support portion 89 that comes into contact with a. As a result, these contact surfaces 94a, 89a
Are the same as each other. Further, the corresponding contact surfaces 94a and 89a are arranged at positions facing each other (the same positions in the circumferential direction of the optical member holding hardware 81).

The fixing ring 83 has a stepped shape on the outer diameter side and a substantially annular shape with a constant diameter on the inner diameter side. That is, on the outer diameter side, a first outer diameter portion 96 is provided on one side in the axial direction, and a second outer diameter portion 97 is provided on the other side in the axial direction.
Are formed. Here, the first outer diameter portion 96 has a larger diameter than the second outer diameter portion 97, and a male screw 98 is formed in the first outer diameter portion 96. As described above, the fixing ring 83 allows the optical member 51 to be inserted into the first inner diameter portion 85 and the female screw 91 of the optical member holding metal member 81 in a state where all the spacers 82 are attached to be screwed with the male screw 98. By being combined, it is attached to the hardware 81. Here, when the fixing ring 83 is screwed into the optical member holding metal member 81, the optical member 51 is supported from both sides in the axial direction.
9 and the trapezoidal contact surface 94a of the interposition plate portion 94.

In the optical member holding device 70 for holding the optical member 51 in this manner, the support portion 89 is arranged in the direction of the weight of the optical member 51 (ie, the lower side), and the axial direction of the optical member 51 is set vertically. And the projection optical system 2
4 will be attached.

According to the optical member holding device 70 of the first embodiment described above, the interposition plate portion 9 that comes into contact with one surface 51b of the optical member 51 in the direction of its own weight of the optical member 51.
The shape of the contact surface 94a of the optical member 51 is different from that of the other surface 5 of the optical member 51.
The shape of the contact surface 89a of the support portion 89 that comes into contact with 1a is matched. Moreover, the corresponding contact surfaces 94a, 89
a are arranged at the same position in the circumferential direction of the optical member holding metal member 81 so that they face each other. For these reasons, the optical member 5 by the interposed plate portion 94 and the support portion 89
The moment for bending the first member 1 in the direction of its own weight is not generated, so that deformation of the optical member 51 in the direction of its own weight can be made hard to occur. Therefore, the surface accuracy of the held optical member 51 can be further improved.

According to the exposure apparatus 15 using the optical member holding device 70 of the first embodiment, the surface accuracy of the optical member 51 held by the optical member holding device 70 can be further improved. it can. Therefore, reticle R
Can be accurately transferred onto the substrate P.

Next, an optical member holding device according to a second embodiment will be described with reference to FIG. The optical member holding device 100 according to the second embodiment holds the same optical member 51 as that of the first embodiment, and includes an optical member holding hardware (a holding member, a second member) 101 and a pressing spring (a holding member). (First member) 102 and mounting bolts 103.

The optical member holding metal member 101 has a substantially cylindrical shape with a constant diameter on both the inner diameter side and the outer diameter side.
Three trapezoidal support portions 106 projecting in the center direction are formed at one end in the axial direction of. These support portions 106 have the same shape and are formed at equal intervals in the circumferential direction of the optical member holding hardware 101. These support portions 106 each have a trapezoidal contact surface 106a orthogonal to the axial direction on the other end side of the optical member holding hardware 101 in the axial direction. These contact surfaces 106a have the same shape and are located in the same plane orthogonal to the axial direction of the optical member holding hardware 101.

Further, the support portion 1 of the optical member holding hardware 101
06, the supporting portion 106
And the position in the radial direction.
07 is formed.

The optical member 51 is fitted to the optical member holding hardware 101 on the opposite side to the support portion 106 of the inner diameter portion 105. At this time, the peripheral portion 62 of the other surface 51 a of the optical member 51 is placed on the contact surface 106 a of the support portion 106 of the optical member holding hardware 101.

The presser spring 102 has a contact plate 109, an intermediate plate 110, and a mounting plate 111. The intermediate plate 110 is connected to one end of the contact plate 109 by the contact plate 10.
9 slightly extends in the thickness direction. The mounting plate 111 is
The contact plate portion 109 is substantially parallel to the contact plate portion 109.
, And has a rectangular shape. The mounting plate portion 111 has a mounting hole 112 formed therethrough in the thickness direction.

When the position of the mounting hole 112 is aligned with the bolt hole 107 of the optical member holding hardware 101, the presser spring 102 is inserted into the bolt hole 107 through the mounting hole 112.
The optical member holding fixture 101 is attached to the optical member holding fixture 101 by an attachment bolt 103 screwed into the bracket. In this mounting state, the pressing spring 102 is configured such that the contact plate 109 is
1b. Then, the optical member 51 is pressed toward the support portion 106 by the urging force.

Here, in the second embodiment, the shape of the contact surface 109a of the contact plate portion 109 which contacts one surface 51b of the optical member 51 is in contact with the one surface 51a of the optical member 51. The shape of the contact surface 106a of the supporting portion 106 is matched. As a result, these contact surfaces 1
09a and 106a have the same area. Further, the corresponding contact surfaces 109a and 106a are arranged at positions facing each other (the same positions in the circumferential direction of the optical member holding hardware 101). As a result, the optical member 51 is sandwiched between the substantially equilateral trapezoidal contact surfaces 106a of the support portions 106 and the substantially equilateral trapezoidal contact surfaces 109a of the contact plate portion 109 from both sides in the axial direction.

The optical member holding device 100 for holding the optical member 51 as described above,
The optical member 51 is attached to the projection optical system 24 in a state where the optical member 51 is disposed in a direction in which its own weight is exerted (that is, on the lower side) and the axial direction of the optical member 51 is arranged vertically.

According to the optical member holding device 100 of the second embodiment described above, the contact surface 109a of the contact plate portion 109 which comes into contact with one surface 51b of the optical member 51 in the direction of its own weight of the optical member 51. Is made to match the shape of the contact surface 106a of the support portion 106 that contacts the other surface 51a of the optical member 51. Moreover, the corresponding contact surface 1
09a and 106a are arranged so as to face each other. For these reasons, the contact plate 109 and the support 1
No moment of bending the optical member 51 in the direction of its own weight due to the optical member 51 is generated.
1 can hardly occur. Therefore, the surface accuracy of the held optical member 51 can be further improved.

According to the exposure device 15 using the optical member holding device 100 of the second embodiment,
The surface accuracy of the optical member 51 held by the optical member holding device 100 can be further improved. For this reason, the image of the pattern of the reticle R can be accurately transferred onto the substrate P.

Next, an optical member holding device according to a third embodiment will be described with reference to FIG. The optical member holding device 114 according to the third embodiment holds an optical member 117 having a rotationally symmetric shape, and includes an optical member holding hardware (a holding member, a second member) 118 and a spacer (a holding member, the first member).
) 119 and a fixing ring 120. Here, the optical member 117 has a convex portion having surfaces parallel to each other formed on a side surface portion thereof.

The optical member holding hardware 118 has a stepped shape on the inner diameter side and a substantially cylindrical shape with a constant diameter on the outer diameter side.
That is, on the inner diameter side, the first inner diameter portion 121 is formed on one side in the axial direction, and the second inner diameter portion 122 is formed on the outer periphery of the first inner diameter portion 121 in the axial direction. Further, the second inner diameter portion 12 in the axial direction
The third inner diameter portion 123 is opposite to the first inner diameter portion 121 of FIG.
Are formed, and the third inner diameter portion 12 in the axial direction is formed.
The fourth inner diameter portion 124 is opposite to the second inner diameter portion 122 of FIG.
Are formed. The first inner diameter portion 121 has a smaller diameter than the second inner diameter portion 122, and the third inner diameter portion 123 has a smaller diameter than the second inner diameter portion 122 and a slightly larger diameter than the fourth inner diameter portion 124. Therefore, a first step portion 126 orthogonal to the axial direction is formed between the first inner diameter portion 121 and the second inner diameter portion 122, and the second inner diameter portion 122 and the third inner diameter portion 12 are formed.
3, a second step 127 perpendicular to the axial direction is formed.

The first step portion 126 is provided with a plurality of trapezoidal support portions 128 (specifically, three, but only one is shown) slightly projecting in the direction of the fourth inner diameter portion 124. These support portions 128 have the same shape and are formed at equal intervals in the circumferential direction of the optical member holding hardware 118. These support portions 128 are used to hold the optical member holding hardware 11.
On the side of the fourth inner diameter portion 124 in the axial direction of No. 8, each has a trapezoidal contact surface 128a orthogonal to the axial direction. These contact surfaces 128a have the same shape,
The optical member holding hardware 118 is located in the same plane orthogonal to the axial direction.

An insertion hole 129 is formed in the second step portion 127 so as to be aligned with the support portion 128 in the radial direction. A female screw 125 is formed in the fourth inner diameter portion 124.

The optical member 117 is provided with an optical member 117 from the fourth inner diameter portion 124 side to the second inner diameter portion 122.
Is inserted into. At this time, the peripheral portion 115 of the other surface 117a of the optical member is placed on the contact surface 128a of the support portion 128 of the optical member holding hardware 118.

The spacer 119 has an insertion portion 130 to be inserted into the insertion hole 129, and an interposition plate 131 extending perpendicular to the insertion portion 130. This spacer 11
9 is inserted into the insertion hole 129 of the optical member holding hardware 118 with the optical member 117 inserted as described above.
As a result, the trapezoidal contact surface 131a of the interposition plate portion 131 of the spacer 119 comes into contact with one surface 117b of the optical member 117.

Here, in the third embodiment,
The area of the contact surface 131a of the interposition plate portion 131 that contacts one surface 117b of the optical member 117 is equal to the contact surface 128 of the support portion 128 that contacts the other surface 117a of the optical member 117.
The area is the same as the area of a. Further, the interposition plate portion 13
1 and the contact surface 128 of the support portion 128
“a” is disposed at a position facing each other (the same position in the radial direction of the optical member holding hardware 118).

The fixing ring 120 has a stepped shape on the outer diameter side and a substantially annular shape with a constant diameter on the inner diameter side. That is, on the outer diameter side, the first outer diameter portion 132 is provided on one side in the axial direction, and the second outer diameter portion 1 is provided on the other side in the axial direction.
33 are formed. Here, the first outer diameter portion 132 has a larger diameter than the second outer diameter portion 133. In addition, a male screw 134 is formed in the first outer diameter portion 132. The fixing ring 120 allows the optical member 117 to be inserted into the second inner diameter portion 122 as described above, and the female screw 1 of the optical member holding hardware 118 in a state where the spacer 119 is attached.
25 is screwed with a male screw 134. Here, when the fixing ring 120 is screwed into the optical member holding hardware 118, the optical member 117 is brought into contact with the trapezoidal contact surface 128 a of the support part 128 and the interposition plate part 13 from both sides in the axial direction.
It is sandwiched by the one trapezoidal contact surface 131a.

The optical member holding device 114 for holding the optical member 117 in this manner allows the support portion 128 to
The optical member 117 is mounted on the projection optical system 24 in a state where the optical member 117 is disposed in a direction to which the weight of the optical member 17 is applied (that is, the lower side) and the axial direction of the optical member 117 is arranged vertically.

According to the optical member holding device 114 of the third embodiment described above, the contact surface 131a of the interposition plate portion 131 that contacts one surface 117b of the optical member 117 in the direction of its own weight of the optical member 117. Of the optical member 11
7 has the same shape as the contact surface 128a of the support portion 128 that contacts the other surface 117a. Moreover, the corresponding contact surfaces 131a and 128a are arranged so as to face each other. For these reasons, it is possible to prevent the moment of bending the optical member 117 in the direction of its own weight by the interposition plate portion 131 and the support portion 128, and to make it difficult for the optical member 117 to be deformed in the direction of its own weight. Can be. Therefore, the surface accuracy of the optical member 117 to be held can be improved.

According to the exposure apparatus 15 using the optical member holding device 114 of the third embodiment,
The surface accuracy of the optical member 117 held by the optical member holding device 114 can be further improved. For this reason, the image of the pattern of the reticle R can be accurately transferred onto the substrate P.

Next, an optical member holding device according to a fourth embodiment will be described with reference to FIG. The optical member holding device 136 according to the fourth embodiment holds the same optical member 117 as in the third embodiment, and includes an optical member holding hardware (a holding member, a second member) 137 and a fixing member (a holding member). (First member) 138 and mounting bolts 139.

The optical member holding hardware 137 has a substantially cylindrical shape with a constant diameter on both the inner diameter side and the outer diameter side. A plurality (specifically, three, but only one is shown) of trapezoidal support portions 140 slightly protruding in the axial direction are formed on the inner diameter side of one end surface portion 137a in the axial direction. I have. These support portions 140 have the same shape and are formed at equal intervals in the circumferential direction of the optical member holding hardware 137. These support portions 140 have trapezoidal contact surfaces 140 a orthogonal to the axial direction of the optical member holding hardware 137.
Respectively. These contact surfaces 140a have the same shape and are located in the same plane orthogonal to the axial direction of the optical member holding hardware 137.

The end face portion 137a is aligned with the support portion 140 in the radial direction, and the bolt holes 14 are respectively formed.
1 is formed. The optical member 117 is placed on the one end surface 137a side of the optical member holding hardware 137. At this time, the peripheral part 115 of the other surface 117 a of the optical member 117 is placed on the contact surface 140 a of the support part 140 of the optical member holding hardware 137.

The fixing member 138 has a contact arm 143, a connecting part 144, and a mounting arm 145. Connecting part 14
4 slightly extends from one end of the contact arm 143 in the thickness direction of the contact arm 143. The mounting arm 145 extends substantially in parallel with the arm 143 and in the opposite direction to the arm 143. A mounting hole 146 is formed in the mounting arm 145.

The fixing member 138 is optically fixed by a mounting bolt 139 which is screwed into the bolt hole 141 through the mounting hole 146 in a state where the mounting hole 146 is aligned with the bolt hole 141 of the optical member holding hardware 137. Member holding hardware 1
37. In this mounting state, the fixing member 138
The contact arm 143 contacts one surface 117b of the optical member 117 at the contact surface 143a.

Here, in the fourth embodiment, the area of the contact surface 143a of the contact arm 143 of the fixing member 138 in contact with one surface 117b of the optical member 117 is equal to the other area of the optical member 117. The area is the same as the area of the contact surface 140a of the support portion 140 that contacts the surface 117a. Further, the contact surface 143a of the contact arm 143 and the contact surface 140a of the support portion 140 are arranged at positions facing each other (the same position in the radial direction of the optical member holding hardware 137). As a result, the optical member 117 is placed on the trapezoidal contact surface 140 of the support portion 140 from both sides in the axial direction.
a and the trapezoidal contact surface 143 a of the contact arm 143.

The optical member holding device 136 holding the optical member 117 as described above,
The optical member 117 is mounted on the projection optical system 24 in a state where the optical member 117 is disposed in a direction to which the weight of the optical member 17 is applied (that is, the lower side) and the axial direction of the optical member 117 is arranged vertically.

According to the optical member holding device 136 of the fourth embodiment described above, the contact surface 143a of the contact arm 143 that contacts one surface 117b of the optical member 117 in the direction of its own weight of the optical member 117. Of the optical member 11
7 has the same shape as the contact surface 140a of the support portion 140 that contacts the other surface 117a. Moreover, the corresponding contact surfaces 143a and 140a are arranged so as to face each other. For these reasons, it is possible to prevent the moment of bending the optical member 117 by the contact arm 143 and the support portion 140 in the direction of its own weight, thereby making it difficult for the optical member 117 to be deformed in the direction of its own weight. Can be. Therefore, the surface accuracy of the optical member 117 to be held can be improved.

According to the exposure apparatus 15 using the optical member holding device 136 of the fourth embodiment,
The surface accuracy of the optical member 117 held by the optical member holding device 136 can be further improved. For this reason, the image of the pattern of the reticle R can be accurately transferred onto the substrate P.

In the above description, an actuator (such as a piezoelectric element) may be provided between the support members for supporting the optical members to reduce the deformation of the optical members between the support members due to their own weight. The number of the actuators may be plural (for example, three or more) between the support members.

Further, as the exposure apparatus of the above embodiment,
The present invention can also be applied to a step-and-repeat type exposure apparatus that exposes a mask pattern while the mask and the substrate are stationary and sequentially moves the substrate in steps.

Further, the exposure apparatus of the above embodiment can be applied to a proximity exposure apparatus that exposes a mask pattern by bringing a mask and a substrate into close contact without using a projection optical system.

In addition, the application of the exposure apparatus is not limited to an exposure apparatus for manufacturing semiconductors. For example, an exposure apparatus for a liquid crystal for exposing a liquid crystal display element pattern to a square glass plate, a thin film magnetic head And can be widely applied to an exposure apparatus for manufacturing the same.

Further, the light source of the exposure apparatus according to the above-mentioned embodiment includes g-line (436 nm), i-line (365 nm), KrF
Not only excimer laser (248 nm), ArF excimer laser (193 nm) and F2 laser (157 nm) but also charged particle beams such as X-rays and electron beams can be used. For example, when an electron beam is used, thermionic emission type lanthanum hexaborite (LaB6) or tantalum (Ta) can be used as the electron gun. Further, when an electron beam is used, a structure using a mask may be used, or a pattern may be formed directly on a substrate without using a mask.

The magnification of the projection optical system may be not only a reduction system but also any one of an equal magnification and an enlargement system.

Further, as the projection optical system, when far ultraviolet rays such as an excimer laser are used, a material which transmits far ultraviolet rays such as quartz or fluorite is used as a glass material, and when a F2 laser or X-ray is used, a catadioptric system is used. Or, use a refraction type optical system (use a reticle of a reflection type).
When an electron beam is used, an electron optical system including an electron lens and a deflector may be used as the optical system. It goes without saying that the optical path through which the electron beam passes is in a vacuum state.

In addition, when a linear motor is used for a wafer stage or a reticle stage, any of an air levitation type using an air bearing and a magnetic levitation type using Lorentz force or reactance force may be used. Also,
The stage may be a type that moves along a guide or a guideless type that does not have a guide.

Further, when a plane motor is used as the stage driving device, one of the magnet unit (permanent magnet) and the armature unit is connected to the stage, and the other of the magnet unit and the armature unit is moved by the stage. It may be provided on the surface side (base).

Further, the reaction force generated by the movement of the wafer stage is mechanically moved to the floor (ground) by using a frame member, as described in JP-A-8-166475.
You may escape to The present invention is also applicable to an exposure apparatus having such a structure.

In addition, the reaction force generated by the movement of the reticle stage may be mechanically released to the floor (ground) using a frame member as described in JP-A-8-330224. The present invention is also applicable to an exposure apparatus having such a structure.

Further, as described above, the exposure apparatus according to the above-described embodiment is capable of converting various subsystems including the constituent elements recited in the claims of the present application into predetermined mechanical accuracy, electrical accuracy, and optical accuracy. Manufactured by assembling to maintain accuracy. Before and after this assembly, adjustments to achieve optical accuracy for various optical systems, adjustments to achieve mechanical accuracy for various mechanical systems, and various electric systems to ensure these various accuracy Are adjusted to achieve electrical accuracy. The process of assembling the exposure apparatus from various subsystems includes mechanical connections, wiring connections of electric circuits, and piping connections of pneumatic circuits among the various subsystems. It goes without saying that there is an assembling process for each subsystem before the assembling process from these various subsystems to the exposure apparatus. When the process of assembling the various subsystems into the exposure apparatus is completed, comprehensive adjustment is performed, and various precisions of the entire exposure apparatus are secured.
It is desirable that the manufacture of the exposure apparatus be performed in a clean room in which the temperature, cleanliness, and the like are controlled.

As shown in FIG. 6, in the semiconductor device, step 201 for designing the function and performance of the device,
Step 202 of manufacturing a mask (reticle) based on this design step, step 203 of manufacturing a wafer from a silicon material, wafer processing step 204 of exposing a reticle pattern to the wafer by the exposure apparatus of the above-described embodiment, device assembly step (Including dicing, bonding, and packaging processes) 20
5. It is manufactured through an inspection step 206 and the like.

[0078]

As described in detail above, claim 1 of the present invention
According to the optical member holding device described above, the holding member includes a first member including a contact surface that contacts one surface of the optical member;
A second member having a contact surface in contact with the other surface, wherein the contact surface of the first member and the contact surface of the second member face each other, and the contact area with one surface and the other The contact area with the surface is formed substantially the same. For this reason, if one surface side is disposed on the near side in the direction of its own weight of the optical member, it is possible to prevent a moment of bending the optical member in the direction of its own weight by the sandwiching member, and to deform in the direction of its own weight. Can be hardly generated in the optical member. Therefore, it is possible to improve the surface accuracy of the optical member to be held. Moreover, it is only necessary that the holding member be formed so that the contact area on one surface of the optical member and the contact area on the other surface are the same. It is not necessary to process the support part with very high precision. Therefore, cost increase can be suppressed.

According to the optical member holding device of the second aspect of the present invention, the shape of the contact surface of the holding member with respect to one surface of the optical member matches the shape of the contact surface with the other surface. Therefore, it is possible to prevent a moment for bending the optical member from being generated, and it is possible to make it difficult for the optical member to be deformed in its own weight direction. Therefore, it is possible to improve the surface accuracy of the optical member to be held. In addition, it is only necessary that the holding member has the same contact surface shape with respect to one surface of the optical member and the contact surface shape with respect to the other surface. Therefore, cost increase can be suppressed.

According to the exposure apparatus of the third aspect of the present invention, since the surface accuracy of the optical member held by the optical member holding device can be further improved, the image of the mask pattern can be accurately transferred onto the substrate. It is possible to do.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram showing an exposure apparatus.

FIGS. 2A and 2B show an optical member holding device according to a first embodiment of the present invention, in which FIG. 2A is an exploded perspective view as viewed obliquely from above, and FIG. Side sectional view along the
(C) is a perspective view seen from obliquely below.

3A and 3B show an optical member holding device according to a second embodiment of the present invention, in which FIG. 3A is a side sectional view, and FIG. 3B is an exploded perspective view as viewed obliquely from above.

FIGS. 4A and 4B show an optical member holding device according to a third embodiment of the present invention, wherein FIG. 4A is a partial plan sectional view taken along line XX shown in FIG. FIG.

FIGS. 5A and 5B show an optical member holding device according to a fourth embodiment of the present invention, wherein FIG. 5A is a partial plan view and FIG.

FIG. 6 is a flowchart illustrating an example of a manufacturing process of a semiconductor device.

7A and 7B show a first example of a conventional optical member holding device, in which FIG. 7A is an exploded perspective view as viewed obliquely from above, FIG. 7B is a side sectional view, and FIG. It is a perspective view.

8A and 8B show a second example of a conventional optical member holding device, in which FIG. 8A is a side sectional view, and FIG. 8B is an exploded perspective view seen from obliquely above.

[Explanation of symbols]

Reference Signs List 15 Exposure device 24 Projection optical system 70, 100, 114, 136 Optical member holding device 51, 117 Optical member 51a, 117a End surface (other surface) 51b, 117b End surface (one surface) 89, 106, 128, 140 Supporting parts 62, 115 Peripheral parts 81, 101, 118 Optical member holding hardware (holding member,
Second member) 82, 119 Spacer (clamping member, first member) 89a, 106a, 128a, 94a, 109a, 13
1a, 140a, 143a, contact surface 102 Holding spring (holding member, first member) R Reticle (mask) P Substrate (substrate)

Claims (3)

[Claims] 1. An optical member holding device having a holding member for holding one side of an optical member in contact with one surface and the other surface of the optical member, wherein the holding member is in contact with the one surface. And a second member having a contact surface that contacts the other surface, wherein the contact surface of the first member and the contact surface of the second member face each other. An optical member holding device, wherein a contact area with the one surface and a contact area with the other surface are formed substantially the same. 2. The optical member holding device according to claim 1, wherein the holding member has a shape of a contact surface with respect to the one surface and a shape of a contact surface with the other surface. 3. An image of a pattern of a mask on a substrate via a projection optical system having the optical member holding device according to claim 1 and an optical member held by the optical member holding device. Exposure device to transfer onto.