JP2020145287A - 基板貼合装置および半導体装置の製造方法 - Google Patents
基板貼合装置および半導体装置の製造方法 Download PDFInfo
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Abstract
Description
Claims (6)
- 第1基板群から選択される基板を保持する第1基板保持部と、
前記第1基板保持部に対向して配置され、第2基板群から選択される基板を保持する第2基板保持部と、
前記第1基板保持部および前記第2基板保持部に保持される基板の貼合を制御するコントローラと、
を備え、
前記コントローラは、
前記第1基板群のそれぞれの基板について、前記第2基板群のそれぞれの基板との間のグリッド形状の一致率を算出し、
前記一致率が所定の範囲にある場合に前記一致率の算出に使用された前記基板の組み合わせを登録したペアリング情報を生成し、
前記第1基板群から前記第1基板保持部に保持させる第1基板を選択し、
前記ペアリング情報を参照して前記第1基板とペアリングされた前記第2基板群の前記基板の中から1つの第2基板を選択する基板貼合装置。 - 前記コントローラは、前記一致率の算出前に、
前記基板の所定のパターンの位置を計測した基板計測結果を取得し、
前記基板計測結果に基づいてグリッドデータを生成することを含み、
前記一致率の算出では、前記グリッドデータが用いられる請求項1に記載の基板貼合装置。 - 前記コントローラは、前記一致率の算出では、前記グリッドデータを画像として用い、画像処理によって2つの前記グリッドデータ間の一致率を算出する請求項2に記載の基板貼合装置。
- 前記コントローラは、前記一致率の算出では、前記グリッドデータが前記基板上の所定の位置を基準とした絶対位置座標系を用いて表現される場合に、対応する2つの前記基板上の前記所定のパターンの各位置のずれから所定のアルゴリズムを用いて前記グリッドデータ間の一致率を算出する請求項2に記載の基板貼合装置。
- 前記ペアリング情報は、前記第1基板群の1枚の前記基板に対して、前記第2基板群の複数枚の前記基板が対応付けられる請求項1から4のいずれか1つに記載の基板貼合装置。
- 第1基板群のそれぞれの基板について、第2基板群のそれぞれの基板との間のグリッド形状の一致率を算出し、
前記一致率が所定の範囲にある場合に前記一致率の算出に使用された前記基板の組み合わせを登録したペアリング情報を生成し、
前記第1基板群から第1基板を選択し、
前記ペアリング情報を参照して前記第1基板とペアリングされた前記第2基板群の前記基板の中から1つの第2基板を選択し、
基板貼合装置の第1基板保持部と、前記第1基板保持部に対向して配置される第2基板保持部と、に、それぞれ前記第1基板および前記第2基板を保持させ、
接着層を介して前記第1基板および前記第2基板を貼合する半導体装置の製造方法。
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