JP2020140961A5 - - Google Patents

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Publication number
JP2020140961A5
JP2020140961A5 JP2020027747A JP2020027747A JP2020140961A5 JP 2020140961 A5 JP2020140961 A5 JP 2020140961A5 JP 2020027747 A JP2020027747 A JP 2020027747A JP 2020027747 A JP2020027747 A JP 2020027747A JP 2020140961 A5 JP2020140961 A5 JP 2020140961A5
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JP
Japan
Prior art keywords
charged particle
particle beams
detector
microscope
plane
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JP2020027747A
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English (en)
Japanese (ja)
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JP7278983B2 (ja
JP2020140961A (ja
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Priority claimed from US16/289,292 external-priority patent/US10607811B1/en
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Publication of JP2020140961A5 publication Critical patent/JP2020140961A5/ja
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Publication of JP7278983B2 publication Critical patent/JP7278983B2/ja
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JP2020027747A 2019-02-28 2020-02-21 マルチビーム走査透過荷電粒子顕微鏡 Active JP7278983B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/289,292 2019-02-28
US16/289,292 US10607811B1 (en) 2019-02-28 2019-02-28 Multi-beam scanning transmission charged particle microscope

Publications (3)

Publication Number Publication Date
JP2020140961A JP2020140961A (ja) 2020-09-03
JP2020140961A5 true JP2020140961A5 (https=) 2023-03-02
JP7278983B2 JP7278983B2 (ja) 2023-05-22

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ID=69713944

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JP2020027747A Active JP7278983B2 (ja) 2019-02-28 2020-02-21 マルチビーム走査透過荷電粒子顕微鏡

Country Status (4)

Country Link
US (1) US10607811B1 (https=)
EP (1) EP3706155B1 (https=)
JP (1) JP7278983B2 (https=)
CN (1) CN111627787B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3614414A1 (en) * 2018-08-20 2020-02-26 FEI Company Method of examining a sample using a charged particle microscope
US11211223B1 (en) * 2020-08-25 2021-12-28 Fei Company System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy
US11430633B2 (en) * 2020-12-29 2022-08-30 Fei Company Illumination apertures for extended sample lifetimes in helical tomography
US12567560B2 (en) * 2022-09-28 2026-03-03 Kla Corporation Distortion reduction in a multi-beam imaging system
US20250069847A1 (en) * 2023-08-22 2025-02-27 Fei Company Differential phase contrast microanalysis using energy loss spectrometers

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10289847A (ja) * 1997-04-11 1998-10-27 Fujitsu Ltd 荷電粒子ビーム露光方法及びシステム
US10067239B2 (en) * 2012-05-31 2018-09-04 Minnesota Imaging And Engineering Llc Detector systems for radiation imaging
DE102013014976A1 (de) * 2013-09-09 2015-03-12 Carl Zeiss Microscopy Gmbh Teilchenoptisches System
EP2887381B1 (en) * 2013-12-18 2016-09-21 Fei Company Method of investigating the wavefront of a charged-particle beam
EP2911180A1 (en) * 2014-02-24 2015-08-26 FEI Company Method of examining a sample in a charged-particle microscope
EP3010031B1 (en) * 2014-10-16 2017-03-22 Fei Company Charged Particle Microscope with special aperture plate
US10170274B2 (en) 2015-03-18 2019-01-01 Battelle Memorial Institute TEM phase contrast imaging with image plane phase grating
EP3082150B1 (en) * 2015-04-15 2017-07-19 FEI Company Method and scanning transmission type charged-particle microscope for performing tomographic imaging

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