JP2020138227A - Surface processing apparatus - Google Patents

Abstract

To provide a surface processing apparatus that is able to recover sputter more securely than a conventional one and is able to hinder sticking of sputters to a steel plate.SOLUTION: In a surface processing apparatus 1, a plate passing direction x1 for a steel plate 7 is changed by a plate passing direction change roller 5, and thereby a sputter recovery device 6 can be disposed on an extension line EL1 in which the plate passing direction x1 for the steel plate 7 in a laser emission position O1 is extended straight as it is, without interference with the steel plate 7. Therefore, when a processing surface 7a is processed with a laser 3a, sputters scattering along the processing surface 7a of the steel plate 7 from the laser emission position O1 by gas can be recovered by the sputter recovery device 6.SELECTED DRAWING: Figure 2

Description

The present invention relates to a surface processing apparatus.

Conventionally, when an iron core is manufactured using an electromagnetic steel sheet (hereinafter, also simply referred to as a steel sheet), it is possible to reduce the iron loss of the iron core by irradiating the surface of the steel sheet with a laser to form a groove before forming the iron core. Are known. Generally, when a groove is formed on the surface of a steel sheet, the surface of the steel sheet is irradiated with a laser. When the laser is applied to the steel sheet, the steel sheet is instantly melted at the laser irradiation position to generate molten metal. After that, due to a sudden increase in pressure at the laser irradiation position, droplets of molten metal (hereinafter referred to as sputtering) are scattered around and grooves are formed on the surface of the steel sheet.

When the spatter generated from the steel sheet is scattered around when forming a groove on the surface of the steel sheet, the scattered spatter may adhere to other surfaces of the steel sheet. If the steel sheet is wound into a coil with spatter attached, the spatter is caught between the steel sheets, which causes surface defects.

Further, when the spatter is scattered around, it may adhere to peripheral devices such as a laser irradiation device. For example, if spatter repeatedly adheres to a peripheral device, the spatter accumulates on the peripheral device and becomes a lump of metal. Such a metal block may fall on the steel sheet and adhere to the surface of the steel sheet, which causes defects and troubles as described above.

Therefore, in order to solve such a problem, for example, in Patent Document 1, an assist gas is injected at the laser irradiation position substantially parallel to the surface of the steel sheet, and the spatter is blown off by the assist gas to melt around the groove. It is disclosed to suppress the formation of metal protrusions.

Further, in Patent Document 2, it is possible to remove the molten by-product (sputter) formed on the surface of the steel sheet by irradiating the surface of the steel sheet with a laser by air blowing or by suctioning. It is disclosed.

JP-A-2002-292484 Special Table 2015-510543

However, in Patent Document 1, the assist gas is injected to the laser irradiation position where the laser is irradiated, and the spatter generated at the laser irradiation position is simply forcibly blown off in the gas flow direction, so that the assist gas is skipped. There is a problem that the spatter adheres to the surface of the steel sheet again.

Further, in Patent Document 2, although it is easy to collect spatter by installing a suction duct or the like, depending on the installation location of the suction duct, the spatter collides with a wall or the like in the suction duct and bounces off. There is a problem that the spatter adheres to the surface of the steel sheet again. Furthermore, even if the suction duct is installed on the surface of the steel plate, there is a gap between the suction duct and the steel plate. Therefore, for spatter scattered along the surface of the steel plate due to air blowing, the suction duct and the steel plate There is a problem that the spatter passes through the gap between the steel sheets and adheres to the surface of the steel sheet again.

Therefore, the present invention has been made in view of the above problems, and provides a surface processing apparatus capable of recovering spatter more reliably than before and suppressing spatter from adhering to a steel sheet.

The surface processing apparatus of the present invention includes a plurality of rollers for passing a steel plate, a laser irradiation device that irradiates the processed surface of the steel plate with a laser to process the processed surface, and irradiates the steel plate with the laser. A gas injection device that injects gas to a laser irradiation position and blows off spatter generated from the processed surface at the laser irradiation position when the processed surface is processed by the laser, and the laser irradiation from the gas injection device. In the airflow direction in which the gas flows toward the position, the steel plate is bent toward the non-processed surface side that is not processed by the laser on the downstream side in the airflow direction of the gas from the laser irradiation position, and the steel plate at the laser irradiation position A roller for changing the plate direction to change the plate direction is arranged on an extension line of the steel plate at the laser irradiation position in which the plate direction is linearly extended, and the gas is applied along the steel plate from the laser irradiation position. It is provided with a spatter recovery device for recovering the spatter scattered.

According to the present invention, by changing the plate-passing direction of the steel plate with the plate-passing direction changing roller, the spatter recovery device is located on an extension line extending linearly from the laser irradiation position in the plate-passing direction without interfering with the steel plate. Can be placed. Therefore, in the present invention, the spatter scattered along the steel sheet from the laser irradiation position can be recovered by the spatter recovery device, so that the spatter can be recovered more reliably than in the conventional case and the spatter is suppressed from adhering to the steel sheet. Can be done.

It is the schematic which shows the structure of the surface processing apparatus by 1st Embodiment. It is a partially enlarged view which enlarged the periphery of the plate passing direction change roller in the surface processing apparatus of FIG. It is the schematic which shows the structure of a sputter recovery apparatus. It is the schematic which shows the structure of the surface processing apparatus by 2nd Embodiment. FIG. 5 is an enlarged partially enlarged view of the periphery of the plate passing direction changing roller in the surface processing apparatus of FIG. It is the schematic which shows the structure of the surface processing apparatus by 3rd Embodiment. It is the schematic which shows the structure of the water flow type sputter recovery apparatus.

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. In the following description, similar elements are designated by the same reference numerals, and duplicate description will be omitted.

(1) <First embodiment>
(1-1) <Structure of surface processing apparatus according to the first embodiment>
FIG. 1 is a schematic view showing the overall configuration of the surface processing apparatus 1 according to the first embodiment. Here, as an example of a steel sheet whose surface is processed by the laser 3a by the surface processing apparatus 1, for example, a grain-oriented electrical steel sheet in which grooves are formed on the surface will be described below. Hereinafter, the front surface of the steel sheet 7 processed by the laser 3a is referred to as a processed surface 7a, and the back surface of the steel sheet 7 not processed by the laser 3a is referred to as a non-processed surface 7b.

The grain-oriented electrical steel sheet is a steel sheet in which the easily magnetized axes of the crystal grains (cubic crystals (100) <001>) are substantially aligned in the rolling direction in the manufacturing process.

Such directional electromagnetic steel sheets are, for example, a casting process, a hot rolling process, an annealing process, a cold rolling process, a decarburization annealing process, an annealing separator coating process, a final finish annealing process, an insulating film forming process, and laser irradiation. It is produced through a process and an insulating film forming process in sequence. The surface processing apparatus 1 is used in the laser irradiation step, and a groove is formed on the surface of the steel sheet 7 by the laser 3a. The laser irradiation step can also be performed after the cold rolling step, the decarburization annealing step, or the final finish annealing step. Since each of these steps is a known technique, the description thereof will be omitted here.

As shown in FIG. 1, the surface processing device 1 includes a plurality of rollers 9, a plate passing direction changing roller 5, a gas injection device 2, a laser irradiation device 3, a spatter recovery device 6, a dust collector 11, and a suction blower. It has twelve. A plurality of rollers 9 are provided along the plate path through which the flat plate-shaped steel plate 7 is passed, and the steel plate 7 is passed through the plate in the plate-passing directions x1 and x3 at a constant speed.

The laser irradiation device 3 focuses and irradiates the laser 3a toward one side of the steel plate 7 which is passed through by the roller 9, scans the laser 3a in the width direction of the steel plate 7 orthogonal to the plate passing direction x1 of the steel plate 7. A groove is formed on the machined surface 7a of the steel sheet 7 at the position where the laser 3a is irradiated (laser irradiation position). As a result, grooves extending in the width direction substantially orthogonal to the plate passing direction x1 are formed on the machined surface 7a of the steel plate 7 at predetermined intervals in the plate passing direction x1.

In the first embodiment, the steel plate 7 is passed in the lateral direction by the rollers 9 arranged on the upstream side in the plate passing direction from the laser irradiation position O1. As a result, the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 is also in the lateral direction. Here, the lateral direction includes not only the horizontal direction orthogonal to the vertical direction in which gravity acts, but also a direction inclined by a predetermined angle with respect to the horizontal direction.

The laser irradiation device 3 uses, for example, a fiber laser in which the fiber core is doped with Yb (ytterbium) as a laser medium, and forms a groove on the machined surface 7a of the steel plate 7 which is passed through in the plate-passing direction x1 at a constant speed. To do. The laser irradiation device 3 is not limited to the fiber laser, and may be any one generally used for laser processing, such as a CO ₂ laser, a YAG laser, and a semiconductor laser.

The laser irradiation device 3 in the first embodiment is arranged above the steel plate 7 which is passed through in the lateral direction by the roller 9, and the laser 3a is radiated from a direction perpendicular to the machined surface 7a of the steel plate 7 which is passed through in the lateral direction. Irradiate. Here, the direction perpendicular to the machined surface 7a of the steel sheet 7 includes not only the direction of the surface normal of the steel sheet 7 at the laser irradiation position O1 but also a deviation due to an installation error of the roller 9 or the laser irradiation device 3. ..

The gas injection device 2 is arranged on the upstream side in the plate-passing direction from the laser irradiation position O1 in the plate-passing direction x1 (horizontal direction in FIG. 1) of the steel plate 7 at the laser irradiation position O1. Gas is injected laterally along the machined surface 7a of the steel plate 7 toward the laser irradiation position O1. The gas injection device 2 blows the spatter generated from the steel plate 7 at the laser irradiation position O1 to the downstream side in the air flow direction from the laser irradiation position O1 in the flow direction 8 in which the gas flows from the lateral direction toward the laser irradiation position O1.

In addition to this configuration, the surface processing apparatus 1 is provided with a plate passing direction changing roller 5 on the downstream side in the airflow direction from the laser irradiation position O1 in the airflow direction 8 in which the gas flows toward the laser irradiation position O1. .. The plate-passing direction changing roller 5 bends the steel plate 7 toward the non-processed surface 7b on the downstream side in the airflow direction from the laser irradiation position O1 to change the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1. In FIG. 1, the plate-passing direction of the steel plate 7 at the laser irradiation position O1 is x1, and the plate-passing direction of the steel plate 7 changed by the plate-passing direction changing roller 5 is x2.

The plate-passing direction changing roller 5 is formed in a columnar shape, for example, and is arranged on the non-processed surface 7b side of the steel plate 7 not irradiated with the laser 3a, and the steel plate 7 is placed along the curved surface of the plate-passing direction changing roller 5. Pass the plate while bending. As a result, the plate-passing direction changing roller 5 changes the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 to the plate-passing direction x2 toward the non-processed surface 7b side. Here, in the first embodiment, the downward direction is shown as an example of the plate-passing direction x2 changed by the plate-passing direction changing roller 5.

The roller 9 provided downstream of the plate-passing direction changing roller 5 has a curved surface in contact with the machined surface 7a on which the groove of the steel plate 7 is formed, and the plate-passing direction changing roller 5 is directed downward. The steel plate 7 that has been passed through is passed through again in the lateral direction along the curved surface. Reference numeral x3 shown in FIG. 1 indicates the direction in which the steel plate 7 that has passed through the plate-passing direction changing roller 5 is changed by the roller 9 located downstream of the plate-passing direction changing roller 5.

The plate-passing direction changing roller 5 changes the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 to a different plate-passing direction x2 by bending toward the non-processed surface 7b side, and the gas sprayed to the laser irradiation position O1. An installation space on which the spatter recovery device 6 can be installed is formed on the downstream side in the airflow direction without interfering with the steel plate 7.

The spatter recovery device 6 is installed in the installation space formed by changing the plate-passing direction x1 of the steel plate 7 by the plate-passing direction changing roller 5 in this way. As a result, the sputtering recovery device 6 can be arranged in the vicinity of the laser irradiation position O1 without interfering with the steel plate 7.

Here, the gas injection device 2 strongly blows gas onto the laser irradiation position O1 from the lateral direction. Therefore, the gas blown from the lateral direction to the laser irradiation position O1 does not become an air flow along the steel plate 7 bent downward by the plate-passing direction changing roller 5, and most of the gas is blown to the laser irradiation position O1. It flows linearly and laterally as it is substantially along the plate passing direction x1 of the steel plate 7 in. As a result, the spatter generated from the steel sheet 7 at the laser irradiation position O1 is blown off toward the spatter recovery device 6 located on the downstream side in the airflow direction.

In this case, the suction blower 12 and the dust collector 11 are connected to the sputtering recovery device 6 via a ventilation duct 10. The spatter recovery device 6 sucks the gas around the opening by driving the suction blower 12, and takes it into the dust collector 11 through the ventilation duct 10. The dust collector 11 collects spatter and the like contained in the taken-in gas, and then takes in the gas from which the spatter and the like have been removed into the suction blower 12 via the ventilation duct 10.

As a result, the surface processing apparatus 1 is a spatter recovery apparatus in which the spatter blown off by the gas along the processed surface 7a of the steel sheet 7 is arranged downstream in the flow direction of the gas that flows linearly and laterally from the laser irradiation position O1. Can be recovered by 6.

Next, in the surface processing apparatus 1 shown in FIG. 1, a configuration in which the spatter generated on the processed surface 7a is recovered by the sputtering recovery apparatus 6 will be described in detail. FIG. 2 is a partially enlarged view of the surface processing apparatus 1 shown in FIG. 1 in which the periphery of the plate-passing direction changing roller 5 is enlarged. As shown in FIG. 2, the laser 3a emitted from the laser irradiation device 3 irradiates the machined surface 7a of the steel sheet 7 from the vertical direction, and the laser 3a forms a groove on the machined surface 7a of the steel sheet 7.

The gas injection device 2 has a nozzle for injecting gas toward the steel plate 7, and the airflow direction 8 in which the gas flows from the nozzle toward the laser irradiation position O1 is laterally substantially orthogonal to the optical axis 3b of the laser 3a. It is selected in the direction. Further, the nozzle of the gas injection device 2 is arranged near the surface of the steel plate 7, and the gas to be injected in the lateral direction is sprayed along the machined surface 7a of the steel plate 7 at the laser irradiation position O1.

As a result, the gas injection device 2 causes spatter generated when the laser 3a forms a groove on the machined surface 7a of the steel sheet 7 at the laser irradiation position O1 along the machined surface 7a at the laser irradiation position O1. The gas flowing in x1 (lateral direction) blows it toward the spatter recovery device 6.

Here, the surface normal line orthogonal to the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 is set to L1, and the steel plate 7 after the steel plate 7 is bent toward the non-processed surface 7b by the plate-passing direction changing roller 5. When the steel plate 7 is bent toward the non-processed surface 7b by the plate direction changing roller 5 with the surface normal line orthogonal to the plate direction x2 as L2, the surface normal line L1 before the change is changed to the surface normal L2 after the change. Let the change angle θ be the internal angle when changing to. This change angle θ changes from the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 to the plate-passing direction x2 by bending the steel plate 7 toward the non-processed surface 7b side by the plate-passing direction changing roller 5. It shows the bending angle at the time.

Such a change angle θ is an angle that can secure an installation space in which the spatter recovery device 6 can be installed on the extension line EL1 that linearly extends the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1. For example, there is no particular limitation. However, among them, the preferable change angle θ is 20 degrees or more and 90 degrees or less.

Sputtering diffuses to some extent from the laser irradiation position O1 and part of the injection gas flows along the machined surface 7a of the steel sheet 7. Therefore, if the change angle θ is small, it will be in the immediate vicinity of the machined surface 7a. Spatter will flow along it. In that case, the spatter recovery device 6 may not be able to sufficiently recover the spatter. Therefore, by setting the change angle θ to 20 degrees or more, even if there is spatter diffusion or a flow along the machined surface 7a, the plate passing direction of the steel plate 7 is greatly changed, so that the vicinity of the laser irradiation position O1 is obtained. The spatter that has flowed in the vicinity of the machined surface 7a of the steel sheet 7 is separated from the steel sheet 7, and can be easily recovered by the sputtering recovery device 6.

Further, it is preferable that the larger the change angle θ is, the larger the installation space of the spatter recovery device 6 can be set, and the larger the opening of the opening 6b of the spatter recovery device 6 can be designed. When θ is 90 degrees, the opening 6b that can be installed becomes almost maximum. On the other hand, when the change angle θ becomes further large, the load on the plate-passing direction changing roller 5 due to the bending stress of the steel plate 7 at the time of plate-passing becomes large, and the design and plate-passing speed of the plate-passing direction changing roller 5 are restricted. It ends up. Therefore, the change angle θ is preferably 90 degrees or less.

The gas injected from the gas injection device 2 toward the laser irradiation position O1 is laser-irradiated even if the plate-passing direction x1 of the steel plate 7 is changed to the non-processed surface 7b side by the plate-passing direction changing roller 5 by the change angle θ. It can be an air flow that flows substantially along the extension line EL1 that extends the plate-passing direction x1 of the steel plate 7 at the position O1 as it is.

In this case, the sputtering recovery device 6 is arranged on the extension line EL1 in which the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 is linearly extended as it is. Further, the spatter recovery device 6 is selected so that the distance D between the opening 6b that sucks the gas in the atmosphere and the laser irradiation position O1 is a distance that can take in the gas flowing substantially along the extension line EL1. ..

In this embodiment, the gas injection method from the gas injection device 2 is described as being substantially parallel to the plate passing direction x1, but it may be injected from diagonally above toward the machined surface 7a of the steel plate 7. .. Even in this case, since the injected gas is deflected by the machined surface 7a of the steel sheet 7 and flows substantially along the extension line EL1, the spatter can be blown off toward the spatter recovery device 6 arranged on the extension line EL1.

Here, the distance D between the opening 6b and the laser irradiation position O1 is changed by bending the steel plate 7 with the gas injection force from the gas injection device 2, the suction force of the spatter recovery device 6, and the plate passing direction changing roller 5. It can be determined by adjusting the size of the installation space formed by changing the angle θ.

In the spatter recovery device 6, one end of the opening 6b is included so that the extension line EL1 in which the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 is linearly extended is included in the opening region of the opening 6b. The width H from 6c to the other end 6d is selected.

In the spatter recovery device 6, since the through plate of the steel plate 7 is avoided by the plate passing direction changing roller 5, the direction side in which the steel plate 7 is bent by the plate passing direction changing roller 5 without interfering with the steel plate 7 (FIG. One end 6c of the opening 6b can be arranged on the lower side in 2.).

The one end 6c of the opening 6b is adjusted by adjusting the change angle θ of the steel plate 7 by the plate direction change roller 5, for example, from the top of the plate direction change roller 5 around the laser irradiation position O1. It can be further placed on the lower side.

Here, the relationship between the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 and the flow direction 8 of the gas flowing from the gas injection device 2 toward the laser irradiation position O1 will be described. The plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 and the flow direction 8 of the gas flowing from the gas injection device 2 toward the laser irradiation position O1 do not necessarily have to be parallel, and these plate passing directions x1 and The opening 6b of the spatter recovery device 6 may be arranged ahead of the air flow direction 8.

As a result, when the spatter recovery device 6 recovers the spatter blown off by the flow direction 8 of the gas flowing from the gas injection device 2 toward the laser irradiation position O1, the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 It is also possible to recover the spatter blown off along the machined surface 7a toward the surface.

More preferably, the angle at which the gas injected from the gas injection device 2 is sprayed onto the laser irradiation position O1 and the distance from the laser irradiation position O1 are adjusted so that the processed surface 7a of the steel sheet 7 is formed at the laser irradiation position O1. It is desirable for gas to flow along. As a result, the flow direction 8 of the gas flowing toward the laser irradiation position O1 substantially coincides with the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1, so that the plate-passing direction x1 is extended as it is. Spatter can be blown off toward the spatter recovery device 6 arranged on the wire EL1.

Here, FIG. 3 is a schematic view showing the configuration of the sputtering recovery device 6. As shown in FIG. 3, in the sputtering recovery device 6, an opening 6b is formed at the tip of the housing 6a, and a ventilation duct 10 is connected to the root side. The width H of one end 6c and the other end 6d of the opening 6b is formed to be wider than the width on the root side of the housing 6a to which the ventilation duct 10 is connected, and gradually increases from the opening 6b toward the root side. It is formed narrowly. As a result, the spatter recovery device 6 is configured so that the opening 6b can suck more gas in the atmosphere, and can more reliably suck the spatter blown toward the opening 6b by the gas.

(1-2) <Action and effect>
In the above configuration, in the surface processing apparatus 1, gas is injected to the laser irradiation position O1 that irradiates the steel plate 7 with the laser 3a, and when the processing surface 7a is processed by the laser 3a, the processing surface 7a is processed at the laser irradiation position O1. The spatter generated from the gas is blown off by the gas.

Then, in the surface processing device 1, in the airflow direction 8 in which the gas flows from the gas injection device 2 toward the laser irradiation position O1, the surface is downstream of the laser irradiation position O1 in the airflow direction and is on the non-processed surface 7b side that is not processed by the laser 3a. The steel plate 7 was bent so that the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 was changed.

In this way, in the surface processing apparatus 1, by changing the plate-passing direction x1 of the steel plate 7 with the plate-passing direction changing roller 5, the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 is linearly laterally oriented as it is. The spatter recovery device 6 can be arranged on the extended extension line EL1 without interfering with the steel plate 7.

Therefore, when the machined surface 7a is machined by the laser 3a, the spatter scattered from the laser irradiation position O1 along the machined surface 7a of the steel sheet 7 by the gas can be recovered by the spatter recovery device 6. Therefore, the surface processing device 1 can recover the spatter more reliably than the conventional configuration in which the spatter recovery device is arranged so as to face the steel sheet 7, and suppresses the adhesion of the spatter to the steel sheet 7. obtain.

Further, in the first embodiment, the steel plate 7 which is passed through in the horizontal direction is passed through while being bent in the vertical direction by the plate direction changing roller 5, so that the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 The installation space of the spatter recovery device 6 can be formed on the extension line EL1 which is linearly extended in the lateral direction as it is. As a result, the surface processing apparatus 1 can have a configuration in which the spatter recovery device 6 is arranged laterally with respect to the laser irradiation position O1 and can recover spatter scattered in the lateral direction from the laser irradiation position O1. it can.

(2) <Second embodiment>
(2-1) <Structure of surface processing apparatus according to the second embodiment>
FIG. 4 is a schematic view showing the overall configuration of the surface processing apparatus 21 according to the second embodiment. In the second embodiment, the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 is the vertical direction, and the plate-passing direction x2 changed by the plate-passing direction changing roller 5 is the horizontal direction. The point is different from the first embodiment described above. Here, the vertical direction includes not only the vertical direction in which gravity acts, but also a direction inclined by a predetermined angle with respect to the vertical direction.

Hereinafter, the configuration different from that of the first embodiment will be described with reference to the above-described configuration, and the same configuration as that of the first embodiment will be omitted because the description is duplicated. As shown in FIG. 4, the laser irradiation device 3 in the second embodiment is arranged in the horizontal direction with respect to the steel plate 7 which is vertically passed by the roller 9, and the processing of the steel plate 7 which is passed in the vertical direction is processed. The laser 3a is irradiated from the direction perpendicular to the surface 7a.

The gas injection device 2 is arranged above the plate-passing direction x1 (vertical direction in FIG. 4) of the steel plate 7 at the laser irradiation position O1 on the upstream side in the plate-passing direction. A gas along the machined surface 7a of the steel sheet 7 is injected from the upstream side in the direction toward the laser irradiation position O1 below. As a result, the gas injection device 2 spatters generated from the steel plate 7 at the laser irradiation position O1 on the downstream side in the air flow direction from the laser irradiation position O1 in the flow direction 8 in which the gas flows from the vertical direction toward the laser irradiation position O1. Blow away.

In addition to this configuration, the plate-passing direction changing roller 5 moves the steel plate 7 to the non-processed surface 7b side in the airflow direction 8 in which the gas flows toward the laser irradiation position O1 on the downstream side in the airflow direction from the laser irradiation position O1. By bending, the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 is changed to the lateral direction. Also in FIG. 4, the plate-passing direction of the steel plate 7 at the laser irradiation position O1 is x1, and the plate-passing direction of the steel plate 7 changed by the plate-passing direction changing roller 5 is x2. Further, in the second embodiment, the direction toward the lateral direction is shown as an example of the plate-passing direction x2 changed by the plate-passing direction changing roller 5.

Also in the second embodiment, the plate-passing direction changing roller 5 changes the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 to the non-processed surface 7b side to change to a different plate-passing direction x2, and changes the laser irradiation position. An installation space in which the spatter recovery device 6 can be installed is formed on the downstream side in the flow direction of the gas sprayed on O1 without interfering with the steel plate 7.

The spatter recovery device 6 is installed in the installation space formed by changing the plate-passing direction x1 of the steel plate 7 by the plate-passing direction changing roller 5 in this way. As a result, the sputtering recovery device 6 can be arranged in the vicinity of the laser irradiation position O1 without interfering with the steel plate 7.

Next, in the surface processing apparatus 21 shown in FIG. 4, a configuration for recovering the spatter generated on the processed surface 7a by the sputtering recovery apparatus 6 will be described in detail. FIG. 5 is an enlarged partial enlarged view of the periphery of the plate-passing direction changing roller 5 in the surface processing apparatus 21 shown in FIG.

Here, when the steel plate 7 is bent from the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 to the non-processed surface 7b side by the plate-passing direction changing roller 5, the steel plate 7 is changed to the plate-passing direction x2. As for the bending angle (change angle) θ, the spatter recovery device 6 is installed on the extension line EL1 in which the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 is linearly extended as it is, as in the first embodiment described above. The angle is not particularly limited as long as the possible installation space can be secured, but the preferred change angle θ is 20 degrees or more and 90 degrees or less.

In the case of the present embodiment, the laser irradiation position O1 for irradiating the processed surface 7a with the laser 3a is adjusted, and the plate passing direction x1 at the laser irradiation position O1 and the flow direction 8 of the gas flowing toward the laser irradiation position O1. Are selected so that they are almost parallel to each other.

In the second embodiment as well, as in the first embodiment described above, the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 and the flow direction of the gas flowing from the gas injection device 2 toward the laser irradiation position O1. It is not always necessary that the 8 is parallel to the 8th, and it is sufficient that the opening 6b of the spatter recovery device 6 is arranged ahead of the plate passing direction x1 and the airflow direction 8.

As a result, when the spatter recovery device 6 recovers the spatter blown off by the flow direction 8 of the gas flowing from the gas injection device 2 toward the laser irradiation position O1, the plate passing direction x1 of the steel plate 7 at the laser irradiation position O1 It is also possible to recover the spatter blown off along the line.

(2-2) <Action and effect>
In the above configuration, even in the surface processing apparatus 21 according to the second embodiment, by changing the plate-passing direction x1 of the steel plate 7 with the plate-passing direction changing roller 5, the steel plate at the laser irradiation position O1 does not interfere with the steel plate 7. The spatter recovery device 6 can be arranged on the extension line EL1 in which the plate-passing direction x1 of 7 is linearly extended downward in the vertical direction. Therefore, when the machined surface 7a is machined by the laser 3a, the spatter scattered by the gas from the laser irradiation position O1 along the machined surface 7a of the steel sheet 7 is installed on the lower side in the vertical direction, that is, in the direction of gravity. The spatter that has entered the opening 6b of the spatter recovery device 6 due to the action of gravity has less rebound, and the spatter can be recovered more reliably than before, and the spatter adheres to the steel plate 7. Can be suppressed.

Further, in the second embodiment, the steel plate 7 which is passed in the vertical direction is passed through while being bent in the horizontal direction by the plate direction changing roller 5, so that the steel plate 7 is passed through at the laser irradiation position O1. The installation space of the spatter recovery device 6 can be formed on the extension line EL1 in which the direction x1 is linearly extended in the vertical direction as it is. As a result, the surface processing device 21 can have a configuration in which the spatter recovery device 6 is arranged in the vertical direction with respect to the laser irradiation position O1, and the spatter scattered in the vertical direction from the laser irradiation position O1 can be recovered. it can.

(3) <Third embodiment>
(3-1) Configuration of Water Flow Type Sputter Recovery Device Next, a third embodiment in which the configuration of the spatter recovery device is changed will be described below. FIG. 6 shows a surface processing device 31 provided with a water flow type spatter recovery device 32 instead of the spatter recovery device 6 of the surface processing device 21 shown in FIG. Here, the water flow type sputtering recovery device 32, which is different from the above-described second embodiment, will be described below, and other configurations will be omitted because the description is duplicated.

As shown in FIG. 6, the surface processing device 31 injects gas from the gas injection device 2 arranged above the laser irradiation position O1 toward the laser irradiation position O1 below. The water flow type sputter recovery device 32 is located below the laser irradiation position O1 and the plate direction changing roller 5, and the plate direction x1 of the steel plate 7 at the laser irradiation position O1 is linearly extended as it is. It is arranged on the extension line EL1.

As a result, the spatter generated from the machined surface 7a of the steel sheet 7 at the laser irradiation position O1 is a water flow type spatter due to the gas flowing in the vertical direction (passing direction x1) along the machined surface 7a of the steel sheet 7 at the laser irradiation position O1. It is blown toward the recovery device 32. The water flow type sputtering recovery device 32 includes a hollow storage unit 36 that communicates with the outside air through an opening 32d formed on the upper surface, and gas is blown toward the storage unit 36. In the water flow type spatter recovery device 32, the water W circulates in the storage unit 36, and the spatter is collected by the storage unit 36 in which the water W is stored.

As described above, in the surface processing apparatus 31, even if the spatter generated from the steel plate 7 at the laser irradiation position O1 is blown off along the processed surface 7a of the steel plate 7 by the gas, the sheet passing direction of the steel plate 7 at the laser irradiation position O1 The spatter can be recovered by the water flow type spatter recovery device 32 arranged on the extension line EL1 in which x1 is linearly extended.

Here, the storage unit 36 of the water flow type sputtering recovery device 32 is provided with a supply pipe 32b for supplying water W into the storage unit 36 and a discharge pipe 32c for discharging water W from the storage unit 36. In the water flow type sputtering recovery device 32, water W is constantly sent from the supply pipe 32b into the storage unit 36 by a pump (not shown) connected to the supply pipe 32b.

Further, the water flow type sputtering recovery device 32 is connected to the pump 35 and the dust collector 34 via the pipe 33, and the discharge pipe 32c is connected to the dust collector 34. The water flow type sputtering recovery device 32 sucks the water W in the storage unit 36 from the discharge pipe 32c by driving the pump 35, and takes it into the dust collector 34 via the discharge pipe 32c. The dust collector 34 collects spatter and the like contained in the taken-in water W, and then takes the water W from which the spatter and the like have been removed into the pump 35 via the pipe 33.

As a result, the water flow type sputtering recovery device 32 discharges the old water W stored in the storage unit 36 from the discharge pipe 32c while the new water W is constantly supplied from the supply pipe 32b, and the water W in the storage unit 36. Is constantly circulating.

Next, the detailed configuration of the water flow type sputtering recovery device 32 will be described below. FIG. 7 is a schematic view showing the configuration of the water flow type sputtering recovery device 32. As shown in FIG. 7, the water flow type sputtering recovery device 32 has a housing 32a having an opening 32d formed on the upper surface thereof. The housing 32a is internally formed with a hollow storage portion 36 that communicates with the outside air through the opening 32d.

The storage portion 36 has an upper region 36a formed on the opening 32d side and a lower region 36b formed below the upper region 36a. The upper region 36a forms an inverted trapezoidal hollow space in which the width of the opening 32d is wide and the inner side surface is inclined so as to gradually become narrower as the opening 32d approaches the lower region 36b. A supply port 37a communicating with the supply pipe 32b is formed on the inclined inner wall surface of the upper region 36a.

The lower region 36b forms a hollow space formed narrower than the opening 32d, and a discharge port 37b communicating with the discharge pipe 32c is formed on the inner wall surface. In the storage unit 36, water W is constantly supplied from the supply port 37a formed at the upper part, and water W is constantly discharged from the discharge port 37b formed at the lower part, and the water W moves from top to bottom. ing.

(3-2) <Action and effect>
In the above configuration, even in the surface processing apparatus 31 according to the third embodiment, by changing the plate-passing direction x1 of the steel plate 7 with the plate-passing direction changing roller 5, the steel plate at the laser irradiation position O1 does not interfere with the steel plate 7. The water flow type spatter recovery device 32 can be arranged on the extension line EL1 in which the plate passing direction x1 of 7 is extended as it is. Therefore, when the machined surface 7a is machined by the laser 3a, the spatter scattered by the gas from the laser irradiation position O1 along the machined surface 7a of the steel sheet 7 can be recovered by the water flow type spatter recovery device 32. The spatter can be recovered more reliably, and the spatter can be suppressed from adhering to the steel sheet 7.

In addition to this, the water flow type sputtering recovery device 32 absorbs the impact of the sputtering by the water W in the storage unit 36 even if the sputtering generated from the steel plate 7 is skipped at the laser irradiation position O1 (FIG. 7). can do. Therefore, the water flow type spatter recovery device 32 can suppress the rebound of spatter because the spatter does not easily collide with the inner wall surface of the housing 32a, and the spatter can be recovered more reliably.

Further, the water flow type sputtering recovery device 32 can instantly cool the sputtering by the water W in the storage unit 36 even if the sputtering is such as high temperature metal particles generated at the laser irradiation position O1. The influence of the heat of sputtering can be reduced on the peripheral devices arranged around the sputtering recovery device 32.

(4) <Other embodiments>
In each of the above-described embodiments, the grain-oriented electrical steel sheet is applied as the steel sheet, but the present invention is not limited to this, and for example, a non-oriented electrical steel sheet, a simple steel sheet, or various other steel sheets are applied. You may. Further, the processing by laser irradiation may be not only the formation of grooves but also the cutting of steel sheets and various other surface processing. Further, the plate-passing direction x1 of the steel plate 7 at the laser irradiation position O1 and the plate-passing direction x2 changed by the plate-passing direction changing roller are not limited to the horizontal and vertical directions described in the above-described embodiments. It may be in any other direction.

Further, in each of the above-described embodiments, the gas injection device 2 is provided on the upstream side in the plate-passing direction from the laser irradiation position O1, and the spatter recovery device 6 or the water flow type spatter recovery is provided on the downstream side in the plate-passing direction from the laser irradiation position O1. The device 32 is provided so that the airflow flows in the same direction as the plate passing direction x1, but the present invention is not limited to this. For example, a gas injection device 2 is provided on the downstream side in the plate-passing direction from the laser irradiation position O1, and a spatter recovery device 6 or a water flow type spatter recovery device 32 is provided on the upstream side in the plate-through direction from the laser irradiation position O1. The airflow may be made to flow in the direction opposite to x1.

1, 21, 31 Surface processing equipment 2 Gas injection equipment 3 Laser irradiation equipment 5 Roller for changing plate direction 6 Spatter recovery equipment 7 Steel plate 7a Processed surface 7b Non-processed surface 9 Roller 32 Water flow type spatter recovery device (spatter recovery device)

Claims (5)

With multiple rollers passing through the steel plate,
A laser irradiation device that irradiates the machined surface of the steel sheet with a laser to process the machined surface,
A gas injection device that injects gas onto the steel plate at a laser irradiation position for irradiating the laser, and blows away spatter generated from the processed surface at the laser irradiation position when the processed surface is processed by the laser. When,
In the airflow direction in which the gas flows from the gas injection device toward the laser irradiation position, the steel plate is bent toward the non-processed surface side that is not processed by the laser on the downstream side in the airflow direction of the gas from the laser irradiation position. A plate-passing direction changing roller that changes the plate-passing direction of the steel plate at the laser irradiation position,
A spatter recovery device that is arranged on an extension line of the steel plate at the laser irradiation position in which the plate passing direction is linearly extended and collects the spatter scattered along the steel plate from the laser irradiation position by the gas.
A surface processing device equipped with. The spatter recovery device
An opening for collecting the spatter is provided on the extension line in the plate passing direction at the laser irradiation position.
The surface processing apparatus according to claim 1. The laser irradiation device is
Irradiate the laser from a direction perpendicular to the machined surface of the steel sheet.
The gas injection device is
The gas along the machined surface is injected from a direction orthogonal to the optical axis of the laser emitted from the laser irradiation device.
The surface processing apparatus according to claim 1 or 2. The laser irradiation device is
The laser is applied to the processed surface of the steel sheet that is passed through in the vertical direction.
The gas injection device is
The gas along the machined surface of the steel sheet is injected toward the laser irradiation position on the lower side in the vertical direction.
The spatter recovery device
It is arranged on an extension line in which the through-plate direction of the steel sheet at the laser irradiation position is linearly extended downward in the vertical direction.
The surface processing apparatus according to any one of claims 1 to 3. The spatter recovery device
It is a water flow type spatter recovery device that includes a storage unit in which water is supplied through a supply pipe and the water is discharged through a discharge pipe, and the spatter is collected by the storage unit in which the water circulates.
The surface processing apparatus according to claim 4.

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