JP2020136526A - Transmission line, manufacturing method of transmission line, and manufacturing device for transmission line - Google Patents
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- Production Of Multi-Layered Print Wiring Board (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Structure Of Printed Boards (AREA)
- Insulated Conductors (AREA)
Abstract
Description
本発明は、伝送線路、伝送線路の製造方法及び伝送線路の製造装置に関する。 The present invention relates to a transmission line, a method for manufacturing a transmission line, and an apparatus for manufacturing a transmission line.
近年、電子機器における高密度実装技術の発展は著しく、銅張積層板(CCL)を用いた薄型の伝送線路の需要は益々高まっている。 In recent years, the development of high-density mounting technology in electronic devices has been remarkable, and the demand for thin transmission lines using copper-clad laminates (CCL) has been increasing more and more.
従来、液晶ポリマーから成る絶縁体層の一主面の片側領域ないし中央領域に、互いに絶縁隔離して信号配線およびグランド配線を形成する工程と、前記絶縁体層の他主面に、前記グランド配線に接続可能な導電性突起部を有する導電性箔を位置決めして積層配置する工程と、前記積層体を加圧して一体化し、前記絶縁体層を貫挿する導電性突起部をグランド配線に電気的に接続させる工程と、前記絶縁体層を前記各配線の形成領域の外側に沿って非形成領域を折り曲げ、各配線の形成領域面および非形成領域面を対向させて一体化し、前記他主面の導電性箔をシールド層化する工程と、を有するフラット型シールドケーブルの製造方法が提案されている(特許文献1:特許第3497110号公報)。 Conventionally, a step of forming signal wiring and ground wiring by insulatingly isolating each other from one side region or a central region of one main surface of an insulator layer made of a liquid crystal polymer, and the ground wiring on the other main surface of the insulator layer. The step of positioning and laminating the conductive foil having the conductive protrusions that can be connected to the above, and the step of pressurizing and integrating the laminated body and electrically connecting the conductive protrusions that penetrate the insulator layer to the ground wiring. In the step of specifically connecting the insulator layer, the non-formed region is bent along the outside of the formed region of each wiring, and the formed region surface and the non-formed region surface of each wiring are opposed to each other and integrated. A method for manufacturing a flat type shield cable having a step of forming a shield layer of a conductive foil on a surface has been proposed (Patent Document 1: Patent No. 3497110).
また、可撓性を有する誘電体素体(液晶ポリマー)と、前記誘電体素体に設けられている線状の信号線と、前記誘電体素体に設けられ、かつ、前記信号線と対向しているグランド導体と、前記誘電体素体の主面の法線方向において、前記信号線に関して前記グランド導体の反対側に設けられている補助グランド導体であって、該法線方向から平面視したときに、前記信号線を挟んでいると共に、該信号線に沿って延在している2つの主要部と、該2つの主要部を接続していると共に、該信号線と交差するブリッジ部とを含んでいる補助グランド導体と、前記補助グランド導体と前記グランド導体とを電気的に接続しているビアホール導体と、を備えており、前記法線方向において、前記信号線と前記補助グランド導体との間隔が前記信号線と前記グランド導体との間隔よりも小さい構成の高周波信号線路が提案されている(特許文献2:実用新案登録第3173143号公報)。 Further, a flexible dielectric element (liquid crystal polymer), a linear signal line provided on the dielectric element, and a line provided on the dielectric element and facing the signal line. An auxiliary ground conductor provided on the opposite side of the ground conductor with respect to the signal line in the normal direction of the main surface of the dielectric element and the ground conductor, which is viewed from the normal direction. When this happens, the two main parts that sandwich the signal line and extend along the signal line, and the bridge part that connects the two main parts and intersects the signal line. Auxiliary ground conductor including the above, and a via hole conductor that electrically connects the auxiliary ground conductor and the ground conductor are provided, and the signal line and the auxiliary ground conductor are provided in the normal direction. A high-frequency signal line having a configuration in which the distance between the signal line and the ground conductor is smaller than the distance between the signal line and the ground conductor has been proposed (Patent Document 2: Practical New Application Registration No. 3173143).
そして、信号導体の両側に、信号導体と同一平面上に接地導体を配置し、これら信号導体および接地導体を上下双方向から電気絶縁薄膜で被覆し、導電性接着層を設けた面同士が向き合うようにして電気絶縁薄膜の外側に金属遮蔽層で被覆した信号伝送用ケーブルが提案されている(特許文献3:特開2006−202714号公報)。 Then, ground conductors are arranged on both sides of the signal conductor on the same plane as the signal conductor, and these signal conductors and the ground conductor are covered with an electrically insulating thin film from both the upper and lower directions, and the surfaces provided with the conductive adhesive layers face each other. In this way, a signal transmission cable in which the outer side of the electrically insulating thin film is coated with a metal shielding layer has been proposed (Patent Document 3: Japanese Patent Application Laid-Open No. 2006-202714).
伝送線路は、外来ノイズを抑えるシールド性能を維持しつつ、省スペースに対応した薄型構造が要求される。特に、伝送線路間のクロストークの低減が課題となっている。また、伝送線路の製造メーカに対して、伝送線路またはその中間体を、携帯情報端末等の急な需要拡大に対応可能な短い生産時間で生産することが要求される。 The transmission line is required to have a thin structure that saves space while maintaining the shielding performance that suppresses external noise. In particular, reduction of crosstalk between transmission lines has become an issue. Further, manufacturers of transmission lines are required to produce transmission lines or their intermediates in a short production time capable of responding to a sudden increase in demand for mobile information terminals and the like.
ここで、伝送線路の中間体は、伝送線路となる前段階の半製品であって、特に、全周に亘ってシールドする構造となっている状態の半製品を指している。 Here, the intermediate of the transmission line refers to a semi-finished product in the previous stage of becoming a transmission line, and in particular, a semi-finished product having a structure that shields the entire circumference.
上記の課題に対して、特許文献1の伝送線路は、銅張積層板を折り曲げる構造上、全周に亘ってシールドする場合に薄型化が困難である。また、特許文献2の伝送線路は、側面にシールドが施されていないので、全周に亘ってシールドする構造に比べてシールド性能が劣るうえ、クロストークが大きくなる。そして、特許文献2および特許文献3の伝送線路は、クリームはんだや導電性接着剤等の導電ペーストを熱硬化させてグランド導体とシールド導体とを接続しているので、導電ペーストの熱硬化時間がネックとなって、生産時間(タクトタイム)を熱硬化時間よりも短くすることができない。また、接着剤を用いて銅張積層板同士を接合する場合にも同様の問題がある。従来技術として、伝送線路間にビアを打ってクロストーク低減を図る方法も考えられるが、多数のビア加工が必要となるため、製造コストが高くなってしまう。 In response to the above problems, the transmission line of Patent Document 1 is difficult to be thinned when it is shielded over the entire circumference due to the structure in which the copper-clad laminate is bent. Further, since the transmission line of Patent Document 2 is not shielded on the side surface, the shielding performance is inferior to that of the structure that shields the entire circumference, and the crosstalk becomes large. In the transmission lines of Patent Documents 2 and 3, a conductive paste such as cream solder or a conductive adhesive is thermoset to connect the ground conductor and the shield conductor, so that the thermosetting time of the conductive paste is long. As a bottleneck, the production time (tact time) cannot be made shorter than the thermosetting time. Further, there is a similar problem when joining copper-clad laminates to each other using an adhesive. As a conventional technique, a method of striking vias between transmission lines to reduce crosstalk can be considered, but since a large number of vias are required to be processed, the manufacturing cost is high.
本発明は、上記事情に鑑みてなされ、対向配置された銅張積層板を互いに接合する構成によって全周に亘ってシールドしてクロストークを低減した薄型の伝送線路、及び薄型の伝送線路またはその中間体を一貫した製造ラインで製造し、かつ、接着剤や導電ペーストを用いずに銅張積層板同士を接合することによって生産時間(タクトタイム)を導電ペーストや接着剤の熱硬化時間よりも短くすることができる構成の伝送線路の製造方法並びに伝送線路の製造装置を提供することを目的とする。 The present invention has been made in view of the above circumstances, and is a thin transmission line in which crosstalk is reduced by shielding over the entire circumference by a configuration in which copper-clad laminates arranged opposite to each other are joined to each other, and a thin transmission line or a thin transmission line thereof. By manufacturing the intermediates on a consistent production line and joining the copper-clad laminates together without using adhesives or conductive pastes, the production time (tact time) is greater than the heat curing time of conductive pastes and adhesives. It is an object of the present invention to provide a method for manufacturing a transmission line having a structure that can be shortened and an apparatus for manufacturing a transmission line.
一実施形態として、以下に開示するような解決手段により、前記課題を解決する。 As an embodiment, the problem is solved by a solution means as disclosed below.
本発明の伝送線路は、伝送線路導体と前記伝送線路導体の入力端および出力端にそれぞれ近接するグランド導体とからなる第1導体がシート状で熱可塑性樹脂からなる第1基材の第1主面に形成されるとともに前記第1導体のうち少なくとも前記伝送線路導体が所定ピッチで複数形成されたベースと、各前記伝送線路導体を覆うシート状で熱可塑性樹脂からなるカバーレイと、第2導体がシート状で熱可塑性樹脂からなる第2基材の第2主面に形成された第1シールドと、第3導体がシート状で熱可塑性樹脂からなる第3基材に形成された第2シールドと、を備え、前記第1基材における前記第1主面と前記カバーレイ、前記ベースにおける前記第1主面の反対側の面と前記第1シールドの前記第2主面の側、前記ベースにおける前記第1主面の反対側の面と前記第1シールドの前記第2主面の側、及び前記カバーレイと前記第2シールドの前記第2主面の側とは互いに熱圧着されており、対向配置された前記第2導体と前記第3導体とは互いに超音波接合されており、前記第2導体と前記第3導体とで前記伝送線路導体を各々囲むように配設されていることを特徴とする。 In the transmission line of the present invention, the first main conductor of the first base material is a sheet-like first conductor composed of a transmission line conductor and a ground conductor adjacent to an input end and an output end of the transmission line conductor, respectively, and is made of a thermoplastic resin. A base formed on a surface and at least a plurality of the transmission line conductors formed at a predetermined pitch among the first conductors, a sheet-like coverlay made of a thermoplastic resin covering each of the transmission line conductors, and a second conductor. The first shield formed on the second main surface of the second base material which is sheet-shaped and made of thermoplastic resin, and the second shield formed on the third base material whose third conductor is sheet-shaped and made of thermoplastic resin. The first main surface and the coverlay of the first base material, the surface of the base opposite to the first main surface, the side of the second main surface of the first shield, and the base. The surface opposite to the first main surface and the side of the second main surface of the first shield, and the coverlay and the side of the second main surface of the second shield are heat-bonded to each other. The second conductor and the third conductor, which are arranged so as to face each other, are ultrasonically joined to each other, and the second conductor and the third conductor are arranged so as to surround the transmission line conductor. It is characterized by.
この構成によれば、ベース及びカバーレイを挟んで対向配置された第1シールドの第2導体と第2シールドの第3導体とが超音波接合された状態で伝送線路導体を囲むように、全周に亘ってシールドする構造の伝送線路となる。そして、接着剤や導電ペーストを用いずに、第1シールドの第2導体と第2シールドの第3導体とが超音波接合されるので、少なくとも接着剤や導電ペーストの厚みの分薄型構造にできる。 According to this configuration, the second conductor of the first shield and the third conductor of the second shield, which are arranged so as to face each other across the base and the coverlay, are ultrasonically bonded to surround the transmission line conductor. It is a transmission line with a structure that shields over the circumference. Then, since the second conductor of the first shield and the third conductor of the second shield are ultrasonically bonded without using an adhesive or a conductive paste, the structure can be made thinner by at least the thickness of the adhesive or the conductive paste. ..
一例として、長手方向の両側に切断面が形成されている。この構成によれば、長手方向の両側が切断されているので幅寸法が一定となる。 As an example, cut surfaces are formed on both sides in the longitudinal direction. According to this configuration, since both sides in the longitudinal direction are cut, the width dimension becomes constant.
本発明の伝送線路の製造方法は、伝送線路導体と前記伝送線路導体の入力端および出力端にそれぞれ近接するグランド導体とからなる第1導体がシート状で熱可塑性樹脂からなる第1主面に形成されるとともに前記第1導体のうち少なくとも前記伝送線路導体が所定ピッチで複数形成されたベースと、各前記伝送線路導体を覆うシート状のカバーレイと、第2導体がシート状で熱可塑性樹脂からなる第2基材の第2主面に形成された第1シールドと、第3導体がシート状で熱可塑性樹脂からなる第3基材に形成された第2シールドとを用いて、前記第1主面に前記カバーレイを熱圧着する第1熱圧着ステップと、前記カバーレイが熱圧着された第1中間体に対し、前記伝送線路導体と前記伝送線路導体との間の不要領域を除去して前記第1中間体を貫通する貫通穴を複数形成する不要領域除去ステップと、前記貫通穴が複数形成された第2中間体に対し、前記ベースにおける前記第1主面の反対側の面に前記第1シールドの前記第2主面の側を熱圧着する第2熱圧着ステップと、前記第1シールドが熱圧着された状態で、前記第2導体の露出面と前記第3導体の露出面とを互いに超音波接合する第1接合ステップと、を有することを特徴とする。 In the method for manufacturing a transmission line of the present invention, a first conductor composed of a transmission line conductor and a ground conductor adjacent to an input end and an output end of the transmission line conductor is formed on a sheet-like first main surface made of a thermoplastic resin. A base in which at least a plurality of the transmission line conductors are formed at a predetermined pitch among the first conductors, a sheet-shaped coverlay covering each of the transmission line conductors, and a sheet-shaped thermoplastic resin as the second conductor. The first shield formed on the second main surface of the second base material made of the same material and the second shield formed on the third base material having a third conductor in the form of a sheet and made of a thermoplastic resin are used. 1. The unnecessary region between the transmission line conductor and the transmission line conductor is removed from the first heat crimping step in which the coverlay is heat-bonded to the main surface and the first intermediate body in which the coverlay is heat-bonded. The unnecessary region removing step of forming a plurality of through holes penetrating the first intermediate body and the surface opposite to the first main surface of the base with respect to the second intermediate body in which the plurality of through holes are formed. A second thermal crimping step in which the side of the second main surface of the first shield is thermally crimped, and an exposed surface of the second conductor and the exposed surface of the third conductor in a state where the first shield is thermally crimped. It is characterized by having a first joining step of ultrasonically joining the surfaces to each other.
この構成によれば、ベース、カバーレイ、第1シールド、及び第2シールドを所定ピッチで送ることで、第1熱圧着ステップ、不要領域除去ステップ、第2熱圧着ステップ、及び第1接合ステップを経て、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路またはその中間体を一貫した製造ラインで製造できる。そして、接着剤や導電ペーストを用いずに、第1シールドの第2導体と第2シールドの第3導体とを超音波接合するので、生産時間(タクトタイム)を導電ペーストや接着剤の熱硬化時間よりも短くすることができ、必要な構成部材も最小限に抑えられる。 According to this configuration, by feeding the base, the coverlay, the first shield, and the second shield at a predetermined pitch, the first thermocompression bonding step, the unnecessary region removal step, the second thermocompression bonding step, and the first joining step can be performed. Through this, a thin transmission line or an intermediate thereof that is shielded over the entire circumference to reduce crosstalk can be manufactured on a consistent production line. Then, since the second conductor of the first shield and the third conductor of the second shield are ultrasonically bonded without using an adhesive or a conductive paste, the production time (tact time) is heat-cured by the conductive paste or the adhesive. It can be shorter than the time and the required components are minimized.
前記第2熱圧着ステップは、前記第2中間体に対し、前記ベースにおける前記第1主面の反対側の面に前記第1シールドの前記第2主面の側を熱圧着するとともに、前記カバーレイに前記第2シールドの前記第2主面の側を熱圧着することが好ましい。この構成によれば、第2中間体に対し、ベースにおける第1主面の反対側の面に、第1シールドの第2主面の側を熱圧着すると同時に、カバーレイに第2シールドの第2主面の側を熱圧着するので、第1シールドや第2シールドの皺の発生を防止できる。 In the second thermocompression bonding step, the side of the second main surface of the first shield is thermocompression bonded to the surface of the base opposite to the first main surface of the base, and the cover. It is preferable that the side of the second main surface of the second shield is thermocompression bonded to the ray. According to this configuration, the side of the second main surface of the first shield is thermocompression bonded to the surface opposite to the first main surface of the base with respect to the second intermediate, and at the same time, the coverlay is attached to the second shield. Since the side of the two main surfaces is thermocompression bonded, it is possible to prevent the occurrence of wrinkles on the first shield and the second shield.
本発明の伝送線路の製造装置は、伝送線路導体と前記伝送線路導体の入力端および出力端にそれぞれ近接するグランド導体とからなる第1導体が所定ピッチでシート状の第1基材の第1主面に形成されるとともに前記第1導体のうち少なくとも前記伝送線路導体が所定ピッチで複数形成されたベースを供給するベース供給機と、各前記伝送線路導体を覆うシート状のカバーレイを供給するカバーレイ供給機と、第2導体がシート状で熱可塑性樹脂からなる第2基材の第2主面に形成された第1シールドを供給する第1シールド供給機と、第3導体がシート状で熱可塑性樹脂からなる第3基材に形成された第2シールドを供給する第2シールド供給機と、第1主面に前記カバーレイを熱圧着する第1熱圧着機と、前記カバーレイが熱圧着された第1中間体に対し、前記伝送線路導体と前記伝送線路導体との間の不要領域を除去して前記第1中間体を貫通する貫通穴を複数形成する不要領域除去機と、前記貫通穴が複数形成された第2中間体に対し、前記ベースにおける前記第1主面の反対側の面に前記第1シールドの前記第2主面の側を熱圧着する第2熱圧着機と、前記第1シールドが熱圧着された状態で、前記第2導体の露出面と前記第3導体の露出面とを互いに超音波接合する第1接合機と、を備えることを特徴とする。 In the transmission line manufacturing apparatus of the present invention, the first conductor is a sheet-like first base material having a first conductor composed of a transmission line conductor and a ground conductor adjacent to an input end and an output end of the transmission line conductor at a predetermined pitch. A base feeder for supplying a base formed on the main surface and at least a plurality of the transmission line conductors formed at a predetermined pitch among the first conductors, and a sheet-shaped coverlay covering each of the transmission line conductors are supplied. The coverlay feeder, the first shield feeder that supplies the first shield formed on the second main surface of the second base material whose second conductor is sheet-shaped and made of thermoplastic resin, and the third conductor are sheet-shaped. A second shield feeder that supplies a second shield formed on a third base material made of a thermoplastic resin, a first thermal crimping machine that thermally crimps the coverlay to the first main surface, and the coverlay. An unnecessary region removing machine that removes unnecessary regions between the transmission line conductor and the transmission line conductor to form a plurality of through holes penetrating the first intermediate with respect to the heat-bonded first intermediate. A second thermal crimping machine that thermally crimps the side of the second main surface of the first shield to the surface of the base opposite to the first main surface of the second intermediate body in which a plurality of through holes are formed. It is characterized by comprising a first joining machine for ultrasonically joining the exposed surface of the second conductor and the exposed surface of the third conductor with each other in a state where the first shield is heat-bonded.
この構成によれば、第1熱圧着機、打ち抜き機、第2熱圧着機、及び第1接合機が連係動作して、ベース及びカバーレイを挟んで対向配置された第1シールドの第2導体と第2シールドの第3導体とを貫通穴を通して超音波接合する。よって、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路またはその中間体を一貫した製造ラインで製造できる。そして、接着剤や導電ペーストを用いずに、第1シールドの第2導体と第2シールドの第3導体とを超音波接合するので、生産時間(タクトタイム)を導電ペーストや接着剤の熱硬化時間よりも短くすることができ、短時間で生産できる。 According to this configuration, the first thermocompression bonding machine, the punching machine, the second thermocompression bonding machine, and the first bonding machine operate in cooperation with each other, and the second conductor of the first shield is arranged so as to face each other with the base and the coverlay in between. And the third conductor of the second shield are ultrasonically bonded through a through hole. Therefore, a thin transmission line or an intermediate thereof that is shielded over the entire circumference to reduce crosstalk can be manufactured on a consistent manufacturing line. Then, since the second conductor of the first shield and the third conductor of the second shield are ultrasonically bonded without using an adhesive or a conductive paste, the production time (tact time) is heat-cured by the conductive paste or the adhesive. It can be shorter than the time and can be produced in a short time.
本発明の伝送線路によれば、接着剤や導電ペーストを用いずに、第1シールドの第2導体と第2シールドの第3導体とが超音波接合されるので、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路が実現できる。また、本発明の伝送線路の製造方法並びに伝送線路の製造装置によれば、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路またはその中間体を一貫した製造ラインで製造できる。 According to the transmission line of the present invention, the second conductor of the first shield and the third conductor of the second shield are ultrasonically bonded without using an adhesive or a conductive paste, so that the transmission line is shielded over the entire circumference. It is possible to realize a thin transmission line with reduced crosstalk. Further, according to the transmission line manufacturing method and the transmission line manufacturing apparatus of the present invention, a thin transmission line or an intermediate thereof that is shielded over the entire circumference to reduce crosstalk can be manufactured on a consistent manufacturing line.
(第1の実施形態)
以下、図面を参照して、本発明の実施形態について詳しく説明する。図1は本実施形態の伝送線路の製造装置1の例を模式的に示す構成図であり、図中の左側が上流側であり、図中の右側が下流側である。伝送線路の製造装置1は、上流側から順に、第1熱圧着機2、不要領域除去機3、第2熱圧着機4、第1接合機5、第2接合機6、レーザ加工機7、検査機8、分割取出し機9、移載機17が配設されており、そして、これらを制御するコントローラ10を備える。なお、実施形態を説明するための全図において、同一の機能を有する部材には同一の符号を付し、その繰り返しの説明は省略する場合がある。
(First Embodiment)
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a configuration diagram schematically showing an example of the transmission line manufacturing apparatus 1 of the present embodiment, in which the left side in the figure is the upstream side and the right side in the figure is the downstream side. The transmission line manufacturing apparatus 1 includes a first thermocompression bonding machine 2, an unnecessary region removing machine 3, a second thermocompression bonding machine 4, a first bonding machine 5, a second bonding machine 6, and a laser processing machine 7, in order from the upstream side. An inspection machine 8, a split take-out machine 9, and a transfer machine 17 are arranged, and a controller 10 for controlling these is provided. In all the drawings for explaining the embodiment, members having the same function may be designated by the same reference numerals, and the repeated description thereof may be omitted.
第1熱圧着機2の上流側には、ベース供給機11およびテンション調節機15と、カバーレイ供給機12およびテンション調節機15とがそれぞれ配設されている。第2熱圧着機4の上流側には、第1シールド供給機13とテンション調節機15、および、第2シールド供給機14とテンション調節機15が配設されている。ここで、テンション調節機15は一例としてテンションローラを有し、当該テンションローラの位置によってシート状のワーク(ベース30、カバーレイ35、第1中間体51、第1シールド40、第2シールド45)の張力を一定範囲内に保っている。 A base feeder 11 and a tension adjuster 15 and a coverlay feeder 12 and a tension adjuster 15 are arranged on the upstream side of the first thermocompression bonding machine 2, respectively. A first shield feeder 13 and a tension adjuster 15, and a second shield feeder 14 and a tension adjuster 15 are arranged on the upstream side of the second thermocompression bonding machine 4. Here, the tension adjuster 15 has a tension roller as an example, and depending on the position of the tension roller, a sheet-shaped work (base 30, coverlay 35, first intermediate 51, first shield 40, second shield 45). The tension of is kept within a certain range.
そして、第2熱圧着機4の上流側にはピッチ送り機16が配設されており、また、検査機8の上流側にはピッチ送り機16が配設されている。ピッチ送り機16は一例として送りローラを有し、前記送りローラの送り量によってシート状のワーク(第1中間体52、第6中間体56)の送りピッチを一定値に保っている。 A pitch feeder 16 is arranged on the upstream side of the second thermocompression bonding machine 4, and a pitch feeder 16 is arranged on the upstream side of the inspection machine 8. The pitch feeder 16 has a feed roller as an example, and keeps the feed pitch of the sheet-shaped workpieces (first intermediate 52, sixth intermediate 56) at a constant value depending on the feed amount of the feed roller.
図8Aは第1熱圧着機2を模式的に示す図である。第1熱圧着機2は一例としてヒータが内蔵されたプレス板を有し、対向配置された2つの前記プレス板によって、ベース30およびカバーレイ35を上下方向から挟んで加圧するとともに加熱して第1中間体51を形成する構成である。 FIG. 8A is a diagram schematically showing the first thermocompression bonding machine 2. As an example, the first thermocompression bonding machine 2 has a press plate having a built-in heater, and the base 30 and the coverlay 35 are sandwiched from above and below by the two press plates arranged to face each other, pressurized and heated. 1 It is a configuration that forms an intermediate 51.
図8Bは不要領域除去機3を模式的に示す図である。不要領域除去機3は一例として打ち抜き刃および打ち抜き刃を受ける受台を有し、前記打ち抜き刃によって第1中間体51の不要領域R1を打ち抜くことで当該不要領域R1を除去して第1中間体51を貫通する貫通穴U1を形成し、第2中間体52を形成する構成である。上記以外の構成として、不要領域除去機3は、レーザ照射によって不要領域R1を除去するレーザ加工機を適用可能である。 FIG. 8B is a diagram schematically showing the unnecessary area removing machine 3. As an example, the unnecessary area removing machine 3 has a punching blade and a pedestal for receiving the punching blade, and the unnecessary area R1 is removed by punching the unnecessary area R1 of the first intermediate 51 with the punching blade to remove the unnecessary area R1. The structure is such that a through hole U1 penetrating the 51 is formed to form a second intermediate 52. As a configuration other than the above, as the unnecessary region removing machine 3, a laser processing machine that removes the unnecessary region R1 by laser irradiation can be applied.
図8Cは第2熱圧着機4を模式的に示す図である。第2熱圧着機4は一例としてヒータが内蔵されたプレス板を有し、対向配置された2つの前記プレス板によって、第1シールド40および第2中間体52を上下方向から挟んで加圧するとともに加熱する構成であり、かつ、ベース30に第1シールド40を熱圧着すると同時に、カバーレイ35に第2シールド45を熱圧着する構成である。 FIG. 8C is a diagram schematically showing the second thermocompression bonding machine 4. The second thermocompression bonding machine 4 has a press plate having a built-in heater as an example, and pressurizes the first shield 40 and the second intermediate 52 by sandwiching the first shield 40 and the second intermediate 52 from above and below by the two press plates arranged so as to face each other. The structure is such that the first shield 40 is thermocompression bonded to the base 30 and the second shield 45 is thermocompression bonded to the coverlay 35 at the same time.
ここで、第1熱圧着機2と第2熱圧着機4とは、同様の装置構成とすることができる。これにより、装置のメンテナンスがし易くなる。 Here, the first thermocompression bonding machine 2 and the second thermocompression bonding machine 4 can have the same device configuration. This facilitates maintenance of the device.
図9Aは第1接合機5(第1超音波接合機)または第2接合機6(第2超音波接合機)を模式的に示す図である。第1接合機5は一例として振動体が内蔵された本体部と当該本体部に付設されて振動体から伝達された振動で超音波振動するヘッド部(ホーン)と当該ヘッド部を受ける受け部とを有する。第1接合機5(第1超音波接合機)は、対向配置された前記ヘッド部および受け部によって、ベース30に第1シールド40が熱圧着されるとともに、カバーレイ35に第2シールド45が熱圧着された状態のワークを上下方向から挟んで挟持するとともに前記ヘッド部を超音波振動させて超音波接合によって第4中間体54を形成する構成である。 FIG. 9A is a diagram schematically showing a first bonding machine 5 (first ultrasonic bonding machine) or a second bonding machine 6 (second ultrasonic bonding machine). As an example, the first joining machine 5 includes a main body portion having a built-in vibrating body, a head portion (horn) attached to the main body portion and ultrasonically vibrating by vibration transmitted from the vibrating body, and a receiving portion receiving the head portion. Has. In the first bonding machine 5 (first ultrasonic bonding machine), the first shield 40 is thermocompression bonded to the base 30 by the head portion and the receiving portion arranged to face each other, and the second shield 45 is bonded to the coverlay 35. The work in a thermocompression-bonded state is sandwiched from above and below, and the head portion is ultrasonically vibrated to form a fourth intermediate 54 by ultrasonic bonding.
若しくは、第1接合機5(第1超音波接合機)は、対向配置された前記ヘッド部および受け部によって、ベース30に第1シールド40が熱圧着された第3中間体53に第2シールド45が重なった状態のワークを上下方向から挟んで挟持するとともに前記ヘッド部を超音波振動させて超音波接合によって第4中間体54を形成する構成である。 Alternatively, the first bonding machine 5 (first ultrasonic bonding machine) has a second shield on a third intermediate body 53 in which the first shield 40 is thermocompression bonded to the base 30 by the head portion and the receiving portion arranged to face each other. The workpieces in which the 45s are overlapped are sandwiched from above and below, and the head portion is ultrasonically vibrated to form a fourth intermediate body 54 by ultrasonic bonding.
ここで、第4中間体54は、伝送線路20となる前段階の半製品であって、全周に亘ってシールドする構造となっている状態の半製品を指している。 Here, the fourth intermediate 54 refers to a semi-finished product in a pre-stage that becomes the transmission line 20, and is in a state of being shielded over the entire circumference.
第2接合機6(第2超音波接合機)は一例として振動体が内蔵された本体部と当該本体部に付設されて振動体から伝達された振動で超音波振動するヘッド部(ホーン)と当該ヘッド部を受ける受け部とを有し、対向配置された前記ヘッド部および受け部によって、第4中間体54を上下方向から挟んで挟持するとともに前記ヘッド部を超音波振動させて超音波接合によって第5中間体55を形成する構成である。ここで、第1接合機5と第2接合機6とは、同様の装置構成とすることができる。これにより、装置のメンテナンスがし易くなる。または、超音波振動するヘッド部を対向配置して第1接合機5と第2接合機6の両方の機能を兼ねた構成とする場合もある。 As an example, the second bonding machine 6 (second ultrasonic bonding machine) includes a main body portion having a built-in vibrating body and a head portion (horn) attached to the main body portion and ultrasonically vibrates by vibration transmitted from the vibrating body. It has a receiving portion that receives the head portion, and the fourth intermediate body 54 is sandwiched and sandwiched from above and below by the head portion and the receiving portion that are arranged so as to face each other, and the head portion is ultrasonically vibrated for ultrasonic bonding. The fifth intermediate 55 is formed by the above. Here, the first joining machine 5 and the second joining machine 6 can have the same device configuration. This facilitates maintenance of the device. Alternatively, the head portions that vibrate ultrasonic waves may be arranged so as to face each other so as to have the functions of both the first joining machine 5 and the second joining machine 6.
図9Bはレーザ加工機7を模式的に示す図である。レーザ加工機7は、レーザ照射によって所定領域を除去して第3導体46を一部露出させて第6中間体56を形成する構成である。 FIG. 9B is a diagram schematically showing the laser processing machine 7. The laser processing machine 7 has a configuration in which a predetermined region is removed by laser irradiation to partially expose the third conductor 46 to form the sixth intermediate 56.
図9Cは検査機8を模式的に示す図である。検査機8は、所定間隔で下向きに突出した接触ピンを伝送線路導体32に接触させて通電することで伝送線路導体32が断線していないか導通レベルが正常範囲内であるか否かを検査する構成である。上記以外の構成として、検査機8は、カメラによって伝送線路導体32の画像を撮像し画像解析することで伝送線路導体32が断線していないか導通レベルが正常範囲内であるか否かを検査する構成とする場合があり、または、検査機8は、伝送線路導体32を通電することによる電気特性検査と、伝送線路導体32を撮像し画像解析することによる外観特性検査との両方を行う構成とする場合がある。 FIG. 9C is a diagram schematically showing the inspection machine 8. The inspection machine 8 inspects whether the transmission line conductor 32 is broken or the continuity level is within the normal range by contacting the transmission line conductor 32 with contact pins protruding downward at predetermined intervals and energizing the transmission line conductor 32. It is a configuration to do. As a configuration other than the above, the inspection machine 8 inspects whether the transmission line conductor 32 is broken or the continuity level is within the normal range by capturing an image of the transmission line conductor 32 with a camera and analyzing the image. Or, the inspection machine 8 is configured to perform both an electrical characteristic inspection by energizing the transmission line conductor 32 and an appearance characteristic inspection by imaging the transmission line conductor 32 and analyzing the image. In some cases.
図1に示すように、検査機8の下流側には第6中間体56から伝送線路20を取り出す分割取出し機9が配設されている。分割取出し機9は一例として打ち抜き刃および打ち抜き刃を受ける受台を有し、前記打ち抜き刃によって、インライン検査された第6中間体56を所定のカットラインに沿って打ち抜くことで伝送線路20を分離して、伝送線路20を取り出す構成である。上記以外の構成として、分割取出し機9は、インライン検査された第6中間体56を所定のカットラインに沿ってスクライブして伝送線路20を分離して、伝送線路20を取り出す構成とする場合があり、または、分割取出し機9は、インライン検査された第6中間体56を所定のカットラインに沿ってレーザ照射して伝送線路20を分離して、伝送線路20を取り出す構成とする場合がある。 As shown in FIG. 1, a split take-out machine 9 for taking out the transmission line 20 from the sixth intermediate 56 is arranged on the downstream side of the inspection machine 8. As an example, the split take-out machine 9 has a punching blade and a pedestal for receiving the punching blade, and the transmission line 20 is separated by punching the in-line-inspected sixth intermediate 56 along a predetermined cut line by the punching blade. Then, the transmission line 20 is taken out. As a configuration other than the above, the split take-out machine 9 may have a configuration in which the in-line-inspected sixth intermediate 56 is screened along a predetermined cut line to separate the transmission line 20 and take out the transmission line 20. Yes, or the split take-out machine 9 may be configured to irradiate the in-line-inspected sixth intermediate 56 with a laser along a predetermined cut line to separate the transmission line 20 and take out the transmission line 20. ..
そして、分割取出し機9の下流側には伝送線路20を収納するトレイ18が配置されている。上述の一貫した製造ラインで製造されインライン検査された伝送線路20は、移載機17によって、一例として、真空吸着された状態で搬送されてトレイ18に収納される。 A tray 18 for accommodating the transmission line 20 is arranged on the downstream side of the split take-out machine 9. The transmission line 20 manufactured on the above-mentioned consistent production line and in-line-inspected is conveyed by the transfer machine 17 in a vacuum-adsorbed state and stored in the tray 18.
本実施形態によれば、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路20を一つの製造ラインで一貫して製造できる。そして、接着剤や導電ペーストを用いずに、熱圧着や超音波接合を行って伝送線路20を製造するので、生産時間(タクトタイム)を導電ペーストや接着剤の熱硬化時間よりも短くすることができ、必要な構成部材も最小限に抑えられる。 According to this embodiment, a thin transmission line 20 that is shielded over the entire circumference to reduce crosstalk can be consistently manufactured on one production line. Then, since the transmission line 20 is manufactured by thermocompression bonding or ultrasonic bonding without using an adhesive or a conductive paste, the production time (tact time) should be shorter than the heat curing time of the conductive paste or the adhesive. And the required components are minimized.
上述のとおり、第2熱圧着機4は、ベース30に第1シールド40を熱圧着するとともに、第2シールド45を熱圧着する構成である。この構成によれば、第1シールド40と第2シールド45とを一括して同時に熱圧着するので、熱圧着の際に、第1シールド40や第2シールド45に皺が出来るのを防止できる。 As described above, the second thermocompression bonding machine 4 has a configuration in which the first shield 40 is thermocompression bonded to the base 30 and the second shield 45 is thermocompression bonded. According to this configuration, since the first shield 40 and the second shield 45 are thermocompression bonded at the same time, it is possible to prevent wrinkles from being formed on the first shield 40 and the second shield 45 during thermocompression bonding.
上記の製造装置は一例である。伝送線路の製造装置1は上記実施形態に限定されない。上記以外の構成として、例えば接合機5の下流側の製造設備や検査機器等を省く場合がある。この場合、全周に亘ってシールドする構造の第4中間体54の状態で、伝送線路の製造装置1での製造が完了する。そして、リール状態、短冊状態、個装状態等で搬送容器やトレイに収納されるなどして、第4中間体54として出荷される、または第4中間体54が別の製造ラインにて後加工される、或いは第4中間体54が電子機器の組立ラインで組み立て加工されて、伝送線路20となる。 The above manufacturing apparatus is an example. The transmission line manufacturing apparatus 1 is not limited to the above embodiment. As a configuration other than the above, for example, a manufacturing facility, an inspection device, or the like on the downstream side of the joining machine 5 may be omitted. In this case, the production of the transmission line by the manufacturing apparatus 1 is completed in the state of the fourth intermediate 54 having a structure that shields the entire circumference. Then, it is stored in a transport container or tray in a reel state, a strip state, an individual packaging state, etc., and is shipped as a fourth intermediate 54, or the fourth intermediate 54 is post-processed on another production line. Or, the fourth intermediate 54 is assembled and processed on the assembly line of the electronic device to become the transmission line 20.
上記以外の構成として、例えば第2超音波接合機6に代えてはんだ接合機を配置し、はんだ接合機に対向配置されたヘッド部および受け部によって、第4中間体54を上下方向から挟んで挟持するとともにヘッド部からはんだを供給し加熱する等して、はんだ接合によって第5中間体55を形成する構成とする場合がある。または、第2超音波接合機6に代えて接着接合機を配置し、接着剤や導電ペーストを用いた接合によって第5中間体55を形成する構成とする場合がある。 As a configuration other than the above, for example, a solder bonding machine is arranged in place of the second ultrasonic bonding machine 6, and the fourth intermediate body 54 is sandwiched from above and below by a head portion and a receiving portion arranged to face the solder bonding machine. In some cases, the fifth intermediate 55 is formed by solder bonding by sandwiching and supplying solder from the head portion and heating the solder. Alternatively, an adhesive bonding machine may be arranged in place of the second ultrasonic bonding machine 6 to form the fifth intermediate 55 by bonding using an adhesive or a conductive paste.
また、上記以外の構成として、例えばレーザ加工機7に代えてエッチング加工機を配置し、エッチングによって所定領域を除去して第3導体46を一部露出させて第6中間体56を形成する構成とする場合がある。 Further, as a configuration other than the above, for example, an etching processing machine is arranged instead of the laser processing machine 7, and a predetermined region is removed by etching to partially expose the third conductor 46 to form the sixth intermediate 56. May be.
続いて、本発明に係る伝送線路の製造装置1の他の例について、以下に説明する。 Subsequently, another example of the transmission line manufacturing apparatus 1 according to the present invention will be described below.
図10は上記実施形態の伝送線路の製造装置1の他の例の配置構成を模式的に示す構成図である。図10の例では、第2熱圧着機4の上流側に、第1シールド供給機13およびテンション調節機15が配設されている。また、第1接合機5の上流側に、第2シールド供給機14およびテンション調節機15が配設されている。この構成の場合は、第2熱圧着機4によって、ベース30に第1シールド40が熱圧着されて第3中間体53となる。そして、第1接合機5によって、第3中間体53に第2シールド45が重なった状態のワークに第2シールド45が超音波溶着されて第4中間体54となる。 FIG. 10 is a configuration diagram schematically showing an arrangement configuration of another example of the transmission line manufacturing apparatus 1 of the above embodiment. In the example of FIG. 10, the first shield feeder 13 and the tension adjuster 15 are arranged on the upstream side of the second thermocompression bonding machine 4. Further, a second shield feeder 14 and a tension adjuster 15 are arranged on the upstream side of the first joining machine 5. In the case of this configuration, the first shield 40 is thermocompression bonded to the base 30 by the second thermocompression bonding machine 4 to become the third intermediate 53. Then, by the first joining machine 5, the second shield 45 is ultrasonically welded to the work in which the second shield 45 is overlapped with the third intermediate 53 to become the fourth intermediate 54.
この構成によれば、例えば、第1シールド40のサイズや熱容量が第2シールド45のサイズや熱容量よりも大きい場合に、ベース30に第1シールド40を熱圧着することが容易かつ確実となり、また、ベース30に第2シールド45を超音波溶着することが容易かつ確実となる。 According to this configuration, for example, when the size and heat capacity of the first shield 40 are larger than the size and heat capacity of the second shield 45, it is easy and reliable to thermocompression-bond the first shield 40 to the base 30. , It becomes easy and reliable to ultrasonically weld the second shield 45 to the base 30.
伝送線路20のサイズや材質等の規格や構成部品のサイズや材質等の規格に応じて図1の構成や図10の構成を選択することができ、また、図1や図2の構成の製造設備や検査機器等を適宜追加したり省いたりすることが可能である。 The configuration of FIG. 1 and the configuration of FIG. 10 can be selected according to the standard of the size and material of the transmission line 20 and the standard of the size and material of the component parts, and the configuration of FIGS. 1 and 2 can be manufactured. It is possible to add or omit equipment and inspection equipment as appropriate.
続いて、本発明に係る伝送線路20及び伝送線路20の製造方法について、以下に説明する。 Subsequently, the transmission line 20 and the method for manufacturing the transmission line 20 according to the present invention will be described below.
図11は、伝送線路20の製造手順を示すフローチャート図である。伝送線路20は一例として、第1熱圧着ステップS1、不要領域除去ステップS2、第2熱圧着ステップS3、第1接合ステップS4、第2接合ステップS5、レーザ加工ステップS6、検査ステップS7、分割ステップS8の順に製造される。 FIG. 11 is a flowchart showing a manufacturing procedure of the transmission line 20. As an example, the transmission line 20 has a first thermocompression bonding step S1, an unnecessary region removal step S2, a second thermocompression bonding step S3, a first bonding step S4, a second bonding step S5, a laser processing step S6, an inspection step S7, and a division step. Manufactured in the order of S8.
上記の製造手順は一例である。伝送線路20の製造手順は、上記以外の構成として、第1接合ステップS4と第2接合ステップS5とを同時に行うことが可能であり、第2接合ステップS5を省くことが可能である。また、上記以外に、レーザ加工ステップS6を省くことが可能であり、検査ステップS7を省くことが可能であり、分割ステップS8を省くことが可能である。そして、第4中間体54、第5中間体55、第6中間体56、または伝送線路20を、一つのシートに長手方向の所定ピッチで複数配された状態で出荷し、次工程の電子機器の組立ラインにてシートを分割し、伝送線路20を取り出して使用する場合がある。 The above manufacturing procedure is an example. In the manufacturing procedure of the transmission line 20, as a configuration other than the above, the first joining step S4 and the second joining step S5 can be performed at the same time, and the second joining step S5 can be omitted. In addition to the above, the laser processing step S6 can be omitted, the inspection step S7 can be omitted, and the division step S8 can be omitted. Then, the fourth intermediate 54, the fifth intermediate 55, the sixth intermediate 56, or the transmission line 20 are shipped in a state of being arranged on one sheet at a predetermined pitch in the longitudinal direction, and the electronic device in the next process is used. The sheet may be divided at the assembly line of the above, and the transmission line 20 may be taken out and used.
図2Aはベース30を示す概略の平面図であり、図2Bは第1中間体51を示す概略の平面図であり、図2Cは第2中間体52を示す概略の平面図である。また、図3Aは第4中間体54を示す概略の平面図であり、図3Bは第6中間体56を示す概略の平面図である。そして、図4Aは伝送線路20を示す概略の平面図であり、図4Bは伝送線路20を示す概略の側面図である。 2A is a schematic plan view showing the base 30, FIG. 2B is a schematic plan view showing the first intermediate 51, and FIG. 2C is a schematic plan view showing the second intermediate 52. Further, FIG. 3A is a schematic plan view showing the fourth intermediate 54, and FIG. 3B is a schematic plan view showing the sixth intermediate 56. 4A is a schematic plan view showing the transmission line 20, and FIG. 4B is a schematic side view showing the transmission line 20.
図5Aはベース30を伝送線路導体32の位置にて示す概略の断面図であり、同様に、図5Bは第1中間体51を示す概略の断面図であり、図5Cは第2中間体52を示す概略の断面図である。また、図6Aは第4中間体54を示す概略の断面図であり、そして、図6Bは伝送線路20を伝送線路導体32の位置にて示す概略の断面図である。 5A is a schematic cross-sectional view showing the base 30 at the position of the transmission line conductor 32, similarly, FIG. 5B is a schematic cross-sectional view showing the first intermediate 51, and FIG. 5C is the second intermediate 52. It is a schematic cross-sectional view which shows. 6A is a schematic cross-sectional view showing the fourth intermediate 54, and FIG. 6B is a schematic cross-sectional view showing the transmission line 20 at the position of the transmission line conductor 32.
図2Aと図5Aとに示すように、ベース30は銅張積層板(CCL)からなり、伝送線路導体32が長手方向の所定ピッチP1でシート状の第1基材34の第1主面34aに形成されている。第1導体31は、直線状に形成された伝送線路導体32と、伝送線路導体32の入力端と出力端とにそれぞれ近接し、入力端や出力端に近接する側が「U字状」または「コ字状」に形成されたグランド導体33とからなる。一例として、グランド導体33および伝送線路導体32の入力端および出力端に、一例として、はんだや導電ペーストを介してコネクタが接合される(不図示)。上記以外の構成として、第1導体31が、伝送線路導体32の入力端と出力端とにそれぞれ一対一で近接し、「U字状」または「コ字状」に形成された複数のグランド導体33とからなる場合がある。 As shown in FIGS. 2A and 5A, the base 30 is made of a copper-clad laminate (CCL), and the transmission line conductor 32 is the first main surface 34a of the sheet-like first base material 34 at a predetermined pitch P1 in the longitudinal direction. Is formed in. The first conductor 31 is close to the linearly formed transmission line conductor 32 and the input end and the output end of the transmission line conductor 32, respectively, and the side close to the input end and the output end is "U-shaped" or "U-shaped" or " It is composed of a ground conductor 33 formed in a "U" shape. As an example, a connector is joined to the input end and the output end of the ground conductor 33 and the transmission line conductor 32 via solder or conductive paste (not shown). As a configuration other than the above, a plurality of ground conductors formed in a "U-shape" or "U-shape" in which the first conductor 31 is close to the input end and the output end of the transmission line conductor 32 on a one-to-one basis. It may consist of 33.
ベース30は、シート状の第1基材34に、伝送線路導体32が長手方向の所定ピッチで複数配されており、図2Aの状態では、伝送線路導体32と伝送線路導体32との間に不要領域R1がある。 In the base 30, a plurality of transmission line conductors 32 are arranged on a sheet-shaped first base material 34 at a predetermined pitch in the longitudinal direction, and in the state of FIG. 2A, between the transmission line conductor 32 and the transmission line conductor 32. There is an unnecessary area R1.
第1導体31は一例として、銅箔からなる。第1基材34は一例として、熱可塑性樹脂からなる。第1基材34は一例として、液晶ポリマー(LCP)、ポリイミド(PI)、ポリアミド(PA)、またはポリエーテルエーテルケトン(PEEK)からなる。シート状のベース30は一例として、リール状態でベース供給機11に取り付けられて、連続加工可能に供給される。 As an example, the first conductor 31 is made of copper foil. As an example, the first base material 34 is made of a thermoplastic resin. As an example, the first base material 34 is made of a liquid crystal polymer (LCP), a polyimide (PI), a polyamide (PA), or a polyetheretherketone (PEEK). As an example, the sheet-shaped base 30 is attached to the base feeder 11 in a reel state and is supplied so that it can be continuously processed.
第1導体31は一例として、厚みが5[μm]以上かつ25[μm]以下の銅箔である。第1基材34は一例として、厚みが50[μm]以上かつ150[μm]以下の液晶ポリマー(LCP)である。第1導体31は一例として、銅張積層板(CCL)をパターンエッチングして形成される。 As an example, the first conductor 31 is a copper foil having a thickness of 5 [μm] or more and 25 [μm] or less. As an example, the first base material 34 is a liquid crystal polymer (LCP) having a thickness of 50 [μm] or more and 150 [μm] or less. As an example, the first conductor 31 is formed by pattern etching a copper-clad laminate (CCL).
ベース30は一例として、第1熱圧着ステップS1の前処理として、プラズマ照射装置によって、第1導体31が貼り合わさった側の面(第1主面34a)に酸素含有プラズマを照射して、有機物を除去するとともに、改質する。酸素含有プラズマを照射することで、第1熱圧着の際、密着度が向上する。上記以外に、第1熱圧着機2の上流側にプラズマ照射装置を配設して、第1主面34aに酸素含有プラズマを照射する場合がある(不図示)。 As an example, as a pretreatment of the first thermocompression bonding step S1, the base 30 is irradiated with oxygen-containing plasma on the side surface (first main surface 34a) to which the first conductor 31 is bonded by a plasma irradiation device, and is an organic substance. Is removed and reformed. By irradiating the oxygen-containing plasma, the degree of adhesion is improved during the first thermocompression bonding. In addition to the above, a plasma irradiation device may be arranged on the upstream side of the first thermocompression bonding machine 2 to irradiate the first main surface 34a with oxygen-containing plasma (not shown).
カバーレイ35は一例として、熱可塑性樹脂からなる。カバーレイ35は一例として、液晶ポリマー(LCP)、ポリイミド(PI)、ポリアミド(PA)、またはポリエーテルエーテルケトン(PEEK)からなる。一例として、カバーレイ35は、リール状態でカバーレイ供給機12に取り付けられて、連続加工可能に供給される。 The coverlay 35 is made of a thermoplastic resin as an example. The coverlay 35 comprises, for example, a liquid crystal polymer (LCP), a polyimide (PI), a polyamide (PA), or a polyetheretherketone (PEEK). As an example, the coverlay 35 is attached to the coverlay feeder 12 in a reel state and is supplied so that it can be continuously processed.
カバーレイ35は一例として、厚みが25[μm]以上かつ125[μm]以下の液晶ポリマー(LCP)である。 As an example, the coverlay 35 is a liquid crystal polymer (LCP) having a thickness of 25 [μm] or more and 125 [μm] or less.
第1シールド40は一例として銅張積層板(CCL)からなり、第2導体41がシート状の第2基材42の第2主面42aに形成されている。第2導体41は、第2基材42の全面に貼り合わされている場合、若しくはメッシュ状で貼り合わされている場合がある。 The first shield 40 is made of a copper-clad laminate (CCL) as an example, and the second conductor 41 is formed on the second main surface 42a of the sheet-shaped second base material 42. The second conductor 41 may be bonded to the entire surface of the second base material 42, or may be bonded in a mesh shape.
第2導体41は一例として、銅箔からなる。第2基材42は一例として、熱可塑性樹脂からなる。第2基材42は一例として、液晶ポリマー(LCP)、ポリイミド(PI)、ポリアミド(PA)、またはポリエーテルエーテルケトン(PEEK)からなる。第1シールド40は一例として、リール状態で第1シールド供給機13に取り付けられて、連続加工可能に供給される。 As an example, the second conductor 41 is made of copper foil. As an example, the second base material 42 is made of a thermoplastic resin. As an example, the second base material 42 is made of a liquid crystal polymer (LCP), a polyimide (PI), a polyamide (PA), or a polyetheretherketone (PEEK). As an example, the first shield 40 is attached to the first shield feeder 13 in a reel state and is supplied so that it can be continuously processed.
第2導体41は一例として、厚みが5[μm]以上かつ25[μm]以下の銅箔である。第2基材42は一例として、厚みが5[μm]以上かつ25[μm]以下のポリイミド(PI)である。第1シールド40は一例として、銅張積層板(CCL)がそのままの状態で用いられる。 As an example, the second conductor 41 is a copper foil having a thickness of 5 [μm] or more and 25 [μm] or less. As an example, the second base material 42 is a polyimide (PI) having a thickness of 5 [μm] or more and 25 [μm] or less. As an example, the first shield 40 is used with the copper-clad laminate (CCL) as it is.
第1シールド40は一例として、第2熱圧着ステップS3の前処理として、プラズマ照射装置によって、第2導体41が貼り合わされている側の面(第2主面42a)に酸素含有プラズマを照射して、有機物を除去するとともに、改質する。酸素含有プラズマを照射することで、第2熱圧着の際、密着度が向上する。上記以外に、第2熱圧着機4の上流側にプラズマ照射装置を配設して、第2主面42aに酸素含有プラズマを照射する場合がある(不図示)。 As an example, the first shield 40 irradiates the surface (second main surface 42a) on the side where the second conductor 41 is bonded with oxygen-containing plasma by a plasma irradiation device as a pretreatment of the second thermocompression bonding step S3. To remove organic substances and modify them. By irradiating with oxygen-containing plasma, the degree of adhesion is improved during the second thermocompression bonding. In addition to the above, a plasma irradiation device may be arranged on the upstream side of the second thermocompression bonding machine 4 to irradiate the second main surface 42a with oxygen-containing plasma (not shown).
第2シールド45は一例として、銅張積層板(CCL)からなり、第3導体46がシート状の第3基材47の片面に形成されている。第3導体46は、第3基材47の全面に貼り合わされている場合、若しくはメッシュ状で貼り合わされている場合がある。 As an example, the second shield 45 is made of a copper-clad laminate (CCL), and a third conductor 46 is formed on one side of a sheet-shaped third base material 47. The third conductor 46 may be bonded to the entire surface of the third base material 47, or may be bonded in a mesh shape.
第3導体46は一例として、銅箔からなる。第3基材47は一例として、熱可塑性樹脂からなる。第3基材47は一例として、液晶ポリマー(LCP)、ポリイミド(PI)、ポリアミド(PA)、またはポリエーテルエーテルケトン(PEEK)からなる。第2シールド45は一例として、リール状態で第2シールド供給機14に取り付けられて、連続加工可能に供給される。 As an example, the third conductor 46 is made of copper foil. The third base material 47 is made of a thermoplastic resin as an example. As an example, the third base material 47 is made of a liquid crystal polymer (LCP), a polyimide (PI), a polyamide (PA), or a polyetheretherketone (PEEK). As an example, the second shield 45 is attached to the second shield feeder 14 in a reel state and is supplied so that it can be continuously processed.
第3導体46は一例として、厚みが5[μm]以上かつ25[μm]以下の銅箔である。第3基材47は一例として、厚みが5[μm]以上かつ25[μm]以下のポリイミド(PI)である。第2シールド45は一例として、銅張積層板(CCL)がそのままの状態で用いられる。第2シールド45は一例として、第1シールド40と同一材料構成である。 As an example, the third conductor 46 is a copper foil having a thickness of 5 [μm] or more and 25 [μm] or less. As an example, the third base material 47 is a polyimide (PI) having a thickness of 5 [μm] or more and 25 [μm] or less. As an example, the second shield 45 is used with the copper-clad laminate (CCL) as it is. As an example, the second shield 45 has the same material composition as the first shield 40.
第2シールド45は一例として、第1接合ステップS4の前処理として、プラズマ照射装置によって、第3導体46が貼り合わされている側の面に酸素含有プラズマを照射して、有機物を除去するとともに、改質する。酸素含有プラズマを照射することで、第1接合ステップS4における、密着度が向上する。上記以外に、第1接合機5の上流側にプラズマ照射装置を配設して、第3導体46が貼り合わさった側の面に酸素含有プラズマを照射する場合がある(不図示)。 As an example, the second shield 45 irradiates the surface on the side where the third conductor 46 is bonded with oxygen-containing plasma by a plasma irradiation device as a pretreatment of the first joining step S4 to remove organic substances and remove organic substances. Reform. By irradiating the oxygen-containing plasma, the degree of adhesion in the first joining step S4 is improved. In addition to the above, a plasma irradiation device may be arranged on the upstream side of the first joining machine 5 to irradiate the surface on the side to which the third conductor 46 is bonded with oxygen-containing plasma (not shown).
第1熱圧着ステップS1は、図2Bと図5Bとに示すように、第1基材34の第1主面34aにカバーレイ35を熱圧着する。一例として、第1基材34とカバーレイ35を同種材料として、第1基材34及びカバーレイ35の融点以下の加熱温度であり、かつ、荷重たわみ温度または荷重たわみ温度を中心としてプラスマイナス50[℃]以内の加熱温度で、所定圧力で所定時間加圧しながら加熱して熱圧着し、第1中間体51とする。 In the first thermocompression bonding step S1, the coverlay 35 is thermocompression bonded to the first main surface 34a of the first base material 34 as shown in FIGS. 2B and 5B. As an example, using the first base material 34 and the coverlay 35 as the same material, the heating temperature is below the melting point of the first base material 34 and the coverlay 35, and the deflection temperature under load or the deflection temperature under load is plus or minus 50. At a heating temperature within [° C.], heat distortion is performed while pressurizing at a predetermined pressure for a predetermined time to obtain the first intermediate 51.
第1熱圧着ステップS1は一例として、180[℃]以上で280[℃]以下の加熱温度、10[MPa]以上で60[MPa]以下の加圧力、5[秒]以上で240[秒]以下の加熱・加圧時間で熱圧着する。熱圧着は一例として、大気中で行う。 As an example, the first thermocompression bonding step S1 has a heating temperature of 180 [° C.] or higher and 280 [° C.] or lower, a pressing force of 10 [MPa] or higher and 60 [MPa] or lower, and 240 [sec] or higher. Thermocompression bonding is performed with the following heating and pressurizing times. Thermocompression bonding is performed in the air as an example.
不要領域除去ステップS2は、図2Cと図5Cとに示すように、第1中間体51に対し、伝送線路導体32と伝送線路導体32との間の不要領域R1を打ち抜くことで除去して第1中間体51を貫通する貫通穴U1を形成し、第2中間体52とする。貫通穴U1は一例として、長方形状、または角丸の長方形状であり、長手方向に所定間隔P2で形成される。所定間隔P2は2.5[mm]以下が好ましい。これにより、クロストークの低減効果が高くなる。一例として、貫通穴U1の長さは伝送線路導体32の全長に対して0.2倍以上かつ1.0倍未満に設定される。 In the unnecessary region removing step S2, as shown in FIGS. 2C and 5C, the unnecessary region R1 between the transmission line conductor 32 and the transmission line conductor 32 is punched out from the first intermediate 51 to remove the first intermediate 51. A through hole U1 penetrating the 1 intermediate 51 is formed to form a second intermediate 52. As an example, the through hole U1 has a rectangular shape or a rectangular shape with rounded corners, and is formed at predetermined intervals P2 in the longitudinal direction. The predetermined interval P2 is preferably 2.5 [mm] or less. As a result, the effect of reducing crosstalk is enhanced. As an example, the length of the through hole U1 is set to 0.2 times or more and less than 1.0 times the total length of the transmission line conductor 32.
伝送線路導体32の全長が500[mm]超の場合、一例として、所定間隔P2は1.5[mm]以上に設定される。これにより、第2導体41と第3導体46との接合が容易となる。伝送線路導体32の全長が500[mm]以下の場合、一例として、所定間隔P2は0.5[mm]未満に設定される。これにより、クロストークの低減効果がより高くなる。一例として、所定間隔P2は0.0[mm]に設定される。これにより、クロストークの低減効果が最も高くなる。 When the total length of the transmission line conductor 32 exceeds 500 [mm], the predetermined interval P2 is set to 1.5 [mm] or more as an example. This facilitates the joining of the second conductor 41 and the third conductor 46. When the total length of the transmission line conductor 32 is 500 [mm] or less, the predetermined interval P2 is set to less than 0.5 [mm] as an example. As a result, the effect of reducing crosstalk becomes higher. As an example, the predetermined interval P2 is set to 0.0 [mm]. As a result, the effect of reducing crosstalk is maximized.
第2熱圧着ステップS3は、図3Aと図6Aとに示すように、第2中間体52に対し、ベース30における第1主面34aと反対側の面に、第1シールド40の第2主面42aの側を熱圧着する、それと同時に、ベース30における第1主面34aに第2シールド46を熱圧着する。一例として、第1基材34と第2基材42とを異種材料として、第2基材42と第3基材47とを同一材料として、第1基材34の融点以下の加熱温度であり、かつ、第1基材34の荷重たわみ温度または第1基材34の荷重たわみ温度を中心としてプラスマイナス50[℃]以内の加熱温度で、所定圧力で所定時間加圧しながら加熱して熱圧着する。 In the second thermocompression bonding step S3, as shown in FIGS. 3A and 6A, the second main surface of the first shield 40 is on the surface of the base 30 opposite to the first main surface 34a with respect to the second intermediate 52. The side of the surface 42a is thermocompression bonded, and at the same time, the second shield 46 is thermocompression bonded to the first main surface 34a of the base 30. As an example, the first base material 34 and the second base material 42 are made of different materials, the second base material 42 and the third base material 47 are made of the same material, and the heating temperature is equal to or lower than the melting point of the first base material 34. In addition, thermocompression bonding is performed by heating while pressurizing at a predetermined pressure for a predetermined time at a heating temperature within plus or minus 50 [° C.] centered on the deflection temperature under load of the first base material 34 or the deflection temperature under load of the first base material 34. To do.
若しくは、第2熱圧着ステップS3は、第2中間体52に対し、ベース30における第1主面34aの反対側の面に、第1シールド40の第2主面42aの側を熱圧着する。一例として、第1基材34と第2基材42を異種材料として、第1基材34の融点以下の加熱温度であり、かつ、第1基材34の荷重たわみ温度または第1基材34の荷重たわみ温度を中心としてプラスマイナス50[℃]以内の加熱温度で、所定圧力で所定時間加圧しながら加熱して熱圧着する。 Alternatively, in the second thermocompression bonding step S3, the side of the second main surface 42a of the first shield 40 is thermocompression bonded to the surface of the base 30 opposite to the first main surface 34a. As an example, using the first base material 34 and the second base material 42 as different materials, the heating temperature is equal to or lower than the melting point of the first base material 34, and the deflection temperature under load of the first base material 34 or the first base material 34. Thermocompression bonding is performed by heating while pressurizing at a predetermined pressure for a predetermined time at a heating temperature within plus or minus 50 [° C.] centered on the deflection temperature under load.
第2熱圧着ステップS3は一例として、180[℃]以上で280[℃]以下の加熱温度、10[MPa]以上で60[MPa]以下の加圧力、5[秒]以上で240[秒]以下の加熱・加圧時間で熱圧着する。熱圧着は一例として、大気中で行う。 As an example, the second thermocompression bonding step S3 has a heating temperature of 180 [° C.] or higher and 280 [° C.] or lower, a pressing force of 10 [MPa] or higher and 60 [MPa] or lower, and 240 [seconds] or higher. Thermocompression bonding is performed for the following heating and pressurizing times. Thermocompression bonding is performed in the air as an example.
第2熱圧着ステップS3に続いて、第1接合ステップS4は、第2導体41の露出面に第3導体46の露出面を超音波接合する。一例として、第2導体41と第3導体46を同一材料として、ホーンの押圧力が500[N]以上かつ2500[N]以下の押圧力で押圧しながら、周波数が15[kHz]以上かつ200[kHz]以下の超音波振動を加えることで超音波接合し、第4中間体54とする。 Following the second thermocompression bonding step S3, the first bonding step S4 ultrasonically bonds the exposed surface of the third conductor 46 to the exposed surface of the second conductor 41. As an example, using the same material as the second conductor 41 and the third conductor 46, the frequency is 15 [kHz] or more and 200 while pressing the horn with a pressing force of 500 [N] or more and 2500 [N] or less. By applying ultrasonic vibration of [kHz] or less, ultrasonic bonding is performed to obtain a fourth intermediate 54.
上述のように、一貫した製造ラインで製造された第4中間体54は、全周に亘ってシールドする構造の第4中間体54として出荷される、または第4中間体54が別の製造ラインにて後加工される、或いは第4中間体54が電子機器の組立ラインで組み立て加工されて、伝送線路20となる。 As described above, the fourth intermediate 54 manufactured on a consistent production line is shipped as the fourth intermediate 54 having a structure that shields over the entire circumference, or the fourth intermediate 54 is on another production line. The fourth intermediate 54 is assembled and processed on the assembly line of the electronic device to become the transmission line 20.
図11の例では、第1接合ステップS4に引き続いて第2接合ステップS5を行う。第2接合ステップS5は、第4中間体54に対し、グランド導体33の端部に第3導体46の端部を超音波接合する。ここで、グランド導体33の端部は、伝送線路導体32の側の各々の端部である。また、第3導体46の端部は、両方の端部である。一例として、第2導体41と第3導体46を同一材料として、ホーンの押圧力が500[N]以上かつ2500[N]以下の押圧力で押圧しながら、周波数が15[kHz]以上かつ200[kHz]以下の超音波振動を加えることで超音波接合し、第5中間体55とする。 In the example of FIG. 11, the second joining step S5 is performed following the first joining step S4. In the second bonding step S5, the end of the third conductor 46 is ultrasonically bonded to the end of the ground conductor 33 with respect to the fourth intermediate 54. Here, the ends of the ground conductor 33 are the respective ends on the side of the transmission line conductor 32. Further, the ends of the third conductor 46 are both ends. As an example, using the same material as the second conductor 41 and the third conductor 46, the frequency is 15 [kHz] or more and 200 while pressing the horn with a pressing force of 500 [N] or more and 2500 [N] or less. By applying ultrasonic vibration of [kHz] or less, ultrasonic bonding is performed to obtain a fifth intermediate 55.
図11の例では、第2接合ステップS5に引き続いてレーザ加工ステップS6を行う。レーザ加工ステップS6は、図3Bに示すように、第5中間体55に対し、第3導体46におけるグランド導体33との接合面の反対側の面を、レーザ照射にて一部露出させて所定間隔で窓部V1を形成し、第6中間体56とする。窓部V1は一例として、四角形状または角丸四角形状であり、所定間隔で複数形成される。レーザ照射は、所定出力で所定時間照射する。レーザ照射は、既知の設備と既知の工法が適用可能である。なお、レーザ加工ステップS6は、省く場合がある。 In the example of FIG. 11, the laser processing step S6 is performed following the second joining step S5. In the laser processing step S6, as shown in FIG. 3B, the surface of the third conductor 46 opposite to the ground conductor 33 is partially exposed by laser irradiation with respect to the fifth intermediate 55. Window portions V1 are formed at intervals to form a sixth intermediate 56. As an example, the window portion V1 has a quadrangular shape or a rounded quadrangular shape, and a plurality of window portions V1 are formed at predetermined intervals. Laser irradiation is performed at a predetermined output for a predetermined time. For laser irradiation, known equipment and known construction methods can be applied. The laser processing step S6 may be omitted.
図11の例では、レーザ加工ステップS6に引き続いて検査ステップS7を行う。検査ステップS7は、第6中間体56に対し、検査機8の接触ピンを伝送線路導体32に接触させて通電することで伝送線路導体32が断線していないこと、及び導通レベルが正常範囲内であることを検査する。導通検査は、既知の設備と既知の工法が適用可能である。なお、検査ステップS7は、ここでは行わず、別の製造ラインで行う場合がある。 In the example of FIG. 11, the inspection step S7 is performed following the laser processing step S6. In the inspection step S7, the contact pin of the inspection machine 8 is brought into contact with the transmission line conductor 32 to energize the sixth intermediate 56 so that the transmission line conductor 32 is not broken and the continuity level is within the normal range. Inspect that. For continuity inspection, known equipment and known construction methods can be applied. The inspection step S7 is not performed here, but may be performed on another production line.
図11の例では、検査ステップS7に引き続いて分割ステップS8を行う。分割ステップS8は、分割取出し機9の打ち抜き刃によって、インライン検査された第6中間体56を所定のカットラインに沿って打ち抜くことで、伝送線路20を分離して取り出す。分割取出しは、既知の設備と既知の工法が適用可能である。なお、分割ステップS8は、ここでは行わず、別の製造ラインで行う場合がある。 In the example of FIG. 11, the inspection step S7 is followed by the division step S8. In the division step S8, the transmission line 20 is separated and taken out by punching the in-line-inspected sixth intermediate 56 along a predetermined cut line by the punching blade of the division take-out machine 9. Known equipment and known construction methods can be applied to the split removal. The division step S8 is not performed here, but may be performed on another production line.
そして、上述のように、一貫した製造ラインで製造されてインライン検査された伝送線路20は、移載機17によって、一例として、真空吸着された状態で搬送されてトレイ18に収納される。 Then, as described above, the transmission line 20 manufactured on the consistent production line and in-line-inspected is conveyed by the transfer machine 17 in a vacuum-adsorbed state and stored in the tray 18.
一例として、図4Aと図6Bは伝送線路導体32が2つ平行して配設されている二芯構造の伝送線路20である。上記以外の構成として、図7Aに示すように、伝送線路導体32が3つそれぞれ平行して配設されている三芯構造の伝送線路20とする場合がある。或いは、図7Bに示すように、伝送線路導体32が4つ以上それぞれ平行して配設されている多芯構造の伝送線路20とする場合がある。 As an example, FIGS. 4A and 6B are a two-core transmission line 20 in which two transmission line conductors 32 are arranged in parallel. As a configuration other than the above, as shown in FIG. 7A, there is a case where the transmission line 20 has a three-core structure in which three transmission line conductors 32 are arranged in parallel. Alternatively, as shown in FIG. 7B, the transmission line 20 may have a multi-core structure in which four or more transmission line conductors 32 are arranged in parallel.
本実施形態によれば、ベース30、カバーレイ35、第1シールド40、及び第2シールド45を所定ピッチP1で送ることで、第1熱圧着ステップS1、不要領域除去ステップS2、第2熱圧着ステップS3、および、第1接合ステップS4を経て、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路20を一貫したラインで製造できる。そして、接着剤や導電ペーストを用いずに、第1シールド40の第2導体と第2シールドの第3導体とを超音波接合するので、生産時間(タクトタイム)を導電ペーストや接着剤の熱硬化時間よりも短くすることができ、必要な構成部材も最小限に抑えられる。 According to the present embodiment, by feeding the base 30, the coverlay 35, the first shield 40, and the second shield 45 at a predetermined pitch P1, the first thermocompression bonding step S1, the unnecessary area removal step S2, and the second thermocompression bonding are performed. Through step S3 and first joining step S4, a thin transmission line 20 that is shielded over the entire circumference to reduce crosstalk can be manufactured on a consistent line. Then, since the second conductor of the first shield 40 and the third conductor of the second shield are ultrasonically bonded without using an adhesive or a conductive paste, the production time (tact time) is set to the heat of the conductive paste or the adhesive. It can be shorter than the curing time and the required components are minimized.
また、この構成によれば、第2導体41と第3導体46とが超音波接合された状態で、伝送線路導体32の入力端および出力端に近接配置されたグランド導体33を同時に第3導体46に超音波接合することができる。そして、第1シールド40と第2シールド45とが一体構造体となっているので、グランド導体33を同時に第3導体46に超音波接合する際の皺の発生や応力歪みを防止できる。そして、この構成によれば、第3導体46は第2シールド45と一体構造体となっているので、第3導体46におけるグランド導体33との接合面の反対側の面をレーザにて一部露出させる窓部V1を所定間隔で形成することが容易にできる。 Further, according to this configuration, in a state where the second conductor 41 and the third conductor 46 are ultrasonically bonded, the ground conductor 33 which is arranged close to the input end and the output end of the transmission line conductor 32 is simultaneously made into the third conductor. It can be ultrasonically bonded to 46. Since the first shield 40 and the second shield 45 are an integral structure, it is possible to prevent wrinkles and stress distortion when the ground conductor 33 is ultrasonically bonded to the third conductor 46 at the same time. According to this configuration, since the third conductor 46 is an integral structure with the second shield 45, a part of the third conductor 46 on the opposite side of the joint surface with the ground conductor 33 is lasered. The windows V1 to be exposed can be easily formed at predetermined intervals.
上述した実施形態の伝送線路の製造装置1並びに伝送線路の製造方法によって、シールド性能に優れるとともに伝送線路間のクロストークを低減した薄型で、省スペースに対応した構造の伝送線路20が製造できる。 By the transmission line manufacturing apparatus 1 and the transmission line manufacturing method of the above-described embodiment, it is possible to manufacture a thin transmission line 20 having excellent shielding performance and reduced crosstalk between transmission lines and having a space-saving structure.
本実施形態の伝送線路20は、伝送線路導体32と伝送線路導体32の入力端および出力端にそれぞれ近接するグランド導体33とからなる第1導体31がシート状で熱可塑性樹脂からなる第1基材34の第1主面34aに形成されるとともに第1導体31のうち少なくとも伝送線路導体32が所定ピッチP1で複数形成されたベース30と、各伝送線路導体32を覆うシート状で熱可塑性樹脂からなるカバーレイ35と、第2導体41がシート状で熱可塑性樹脂からなる第2基材42の第2主面42aに形成された第1シールド40と、第3導体46がシート状で熱可塑性樹脂からなる第3基材47に形成された第2シールド45と、を備え、第1基材34における第1主面34aとカバーレイ35、ベース30における第1主面34aの反対側の面と第1シールド40の第2主面42aの側、ベース30における第1主面34aの反対側の面と第1シールド40の第2主面42aの側、及びカバーレイ35と第2シールド45の第2主面42aの側とは互いに熱圧着されており、且つ、対向配置された第2導体41と第3導体46とは互いに超音波接合されており、第2導体41と第3導体46とで伝送線路導体32を各々囲むように配設されている。 In the transmission line 20 of the present embodiment, the first conductor 31 composed of the transmission line conductor 32 and the ground conductor 33 adjacent to the input end and the output end of the transmission line conductor 32 is in the form of a sheet and is made of a thermoplastic resin. A sheet-like thermoplastic resin that covers the base 30 formed on the first main surface 34a of the material 34 and at least a plurality of transmission line conductors 32 of the first conductor 31 formed at a predetermined pitch P1 and each transmission line conductor 32. A coverlay 35 made of a coverlay 35, a first shield 40 formed on a second main surface 42a of a second base material 42 having a sheet-like second conductor 41 and made of a thermoplastic resin, and a sheet-like third conductor 46 having heat. A second shield 45 formed on a third base material 47 made of a plastic resin is provided, and the first main surface 34a and coverlay 35 of the first base material 34 and the opposite side of the first main surface 34a of the base 30 are provided. The surface and the side of the second main surface 42a of the first shield 40, the surface opposite to the first main surface 34a in the base 30, the side of the second main surface 42a of the first shield 40, and the coverlay 35 and the second shield. The side of the second main surface 42a of 45 is heat-bonded to each other, and the second conductor 41 and the third conductor 46 arranged to face each other are ultrasonically bonded to each other, and the second conductor 41 and the third conductor are third. It is arranged so as to surround the transmission line conductor 32 with the conductor 46.
図4A,図4B及び図6Bに示すように、本実施形態によれば、ベース30及びカバーレイ35を挟んで対向配置された第1シールド40の第2導体41と第2シールド45の第3導体46とが超音波接合された状態で伝送線路導体32を囲むように、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路20となる。そして、接着剤や導電ペーストを用いずに、第1シールド40の第2導体41と第2シールド45の第3導体46とが超音波接合されるので、少なくとも接着剤や導電ペーストの厚みの分薄型構造にできる。また、従来技術の、伝送線路間にビアを打ってクロストーク低減を図る方法に比べて、製造コストを大幅に削減できる。 As shown in FIGS. 4A, 4B and 6B, according to the present embodiment, the second conductor 41 of the first shield 40 and the third of the second shield 45 arranged so as to face each other with the base 30 and the coverlay 35 interposed therebetween. The thin transmission line 20 is shielded over the entire circumference so as to surround the transmission line conductor 32 in a state of being ultrasonically bonded to the conductor 46 to reduce crosstalk. Then, since the second conductor 41 of the first shield 40 and the third conductor 46 of the second shield 45 are ultrasonically bonded without using an adhesive or a conductive paste, at least by the thickness of the adhesive or the conductive paste. Can be made into a thin structure. In addition, the manufacturing cost can be significantly reduced as compared with the conventional method of striking vias between transmission lines to reduce crosstalk.
一例として、グランド導体33の端部と第3導体46の端部とは互いに超音波接合されている。この構成によれば、伝送線路導体32の入力端および出力端へのシールド効果によって外来ノイズが防止できる。 As an example, the end of the ground conductor 33 and the end of the third conductor 46 are ultrasonically bonded to each other. According to this configuration, external noise can be prevented by the shielding effect on the input end and the output end of the transmission line conductor 32.
また、第3基材47に所定間隔で複数の窓部V1が形成されており、窓部V1によって第3導体46の一部が外部接続可能に露出している。この構成によれば、一例として、窓部V1によって露出している第3導体46の一部を携帯情報端末の筐体やグランド配線と外部接続してシールド性能を高めることが容易な構成となる。 Further, a plurality of window portions V1 are formed on the third base material 47 at predetermined intervals, and a part of the third conductor 46 is exposed by the window portions V1 so as to be externally connectable. According to this configuration, as an example, it is easy to improve the shielding performance by externally connecting a part of the third conductor 46 exposed by the window portion V1 to the housing and the ground wiring of the mobile information terminal. ..
図6Bに示すように、長手方向の両側に切断面が形成されている。この構成によれば、長手方向の両側が切断されることで幅寸法が一定となる。 As shown in FIG. 6B, cut surfaces are formed on both sides in the longitudinal direction. According to this configuration, the width dimension becomes constant by cutting both sides in the longitudinal direction.
以上、本発明は、上述した実施の形態に限定されるものではない。上述の例では、シート状のベース30をリール状態で供給する構成としたが、これに限定されず、所定サイズの枚葉状でマガジンに積み重ねて、前記マガジンから供給ローラ等によって製造ラインに供給することも可能である。カバーレイ35、第1シールド40、第2シールド45についても同様に、所定サイズの枚葉状でマガジンに積み重ねて、前記マガジンから供給ローラ等によって製造ラインに供給することも可能である。 As described above, the present invention is not limited to the above-described embodiment. In the above example, the sheet-shaped base 30 is supplied in a reel state, but the present invention is not limited to this, and the sheet-shaped base 30 is stacked in a magazine in the form of a sheet of a predetermined size and supplied from the magazine to the production line by a supply roller or the like. It is also possible. Similarly, the coverlay 35, the first shield 40, and the second shield 45 can be stacked in a magazine in the form of a sheet of a predetermined size and supplied from the magazine to the production line by a supply roller or the like.
1 伝送線路の製造装置
2 第1熱圧着機
3 不要領域除去機
4 第2熱圧着機
5 接合機(第1超音波接合機)
6 接合機(第2超音波接合機)
7 レーザ加工機
8 検査機
9 分割取出し機
10 コントローラ
11 ベース供給機
12 カバーレイ供給機
13 第1シールド供給機
14 第2シールド供給機
15 テンション調節機
16 ピッチ送り機
17 移載機
18 トレイ
20 伝送線路
30 ベース
31 第1導体
32 伝送線路導体
33 グランド導体
34 第1基材
34a 第1主面
35 カバーレイ
40 第1シールド
41 第2導体
42 第2基材
42a 第2主面
45 第2シールド
46 第3導体
47 第3基材
51 第1中間体
52 第2中間体
53 第3中間体
54 第4中間体
55 第5中間体
56 第6中間体
P1 ピッチ
R1 不要領域
U1 貫通穴
V1 窓部
1 Transmission line manufacturing equipment 2 1st thermocompression bonding machine 3 Unnecessary area removing machine 4 2nd thermocompression bonding machine 5 Bonding machine (1st ultrasonic bonding machine)
6 Bonding machine (2nd ultrasonic bonding machine)
7 Laser processing machine 8 Inspection machine 9 Split take-out machine 10 Controller 11 Base feeder 12 Coverlay feeder 13 1st shield feeder 14 2nd shield feeder 15 Tension adjuster 16 Pitch feeder 17 Transfer machine 18 Tray 20 Transmission Line 30 Base 31 First conductor 32 Transmission line conductor 33 Ground conductor 34 First base material 34a First main surface 35 Coverlay 40 First shield 41 Second conductor 42 Second base material 42a Second main surface 45 Second shield 46 3rd conductor 47 3rd base material 51 1st intermediate 52 2nd intermediate 53 3rd intermediate 54 4th intermediate 55 5th intermediate 56 6th intermediate P1 Pitch R1 Unnecessary area U1 Through hole V1 Window
本発明の伝送線路は、伝送線路導体と前記伝送線路導体の入力端および出力端にそれぞれ近接するグランド導体とからなる第1導体が熱可塑性樹脂からなるシート状の第1基材における第1主面に形成されるとともに前記第1導体のうち少なくとも前記伝送線路導体が所定ピッチで複数形成されたベースと、各前記伝送線路導体を覆う熱可塑性樹脂からなるシート状のカバーレイと、第2導体が熱可塑性樹脂からなるシート状の第2基材における第2主面に形成された第1シールドと、第3導体が熱可塑性樹脂からなるシート状の第3基材に形成された第2シールドとを備え、前記第1基材における第1主面に前記カバーレイを接着した構成であり、前記第1基材の第1主面の反対側の面に前記第1シールドの第2導体面を接着した構成であり、前記カバーレイの前記第1基材との接着面の反対側の面に前記第2シールドの第3導体面を接着した構成であり、前記第2導体面に前記第3導体面を接合した構成であり、且つ、前記第2導体と前記第3導体とで前記伝送線路導体を各々囲むように配設した構成によって、複数の前記伝送線路導体を各々シールドした薄型構造となっていることを特徴とする。 Transmission line of the present invention, the first main in the first substrate sheet in which the first conductor composed of a ground conductor in proximity to the input and output ends of the transmission line conductor and the transmission line conductor is formed of a thermoplastic resin a base at least the transmission line conductors of said first conductor is formed with a plurality at a predetermined pitch is formed in a plane, the coverlay sheet made of a thermoplastic resin covering each said transmission line conductors, second conductors second shield but formed on the first shield and the third base material sheet of the third conductor is formed of a thermoplastic resin formed on the second major surface of the second substrate sheet formed of a thermoplastic resin with the door, wherein the first major surface of the first substrate is configured to coverlay was against wear, a second conductor of the first shield on the opposite side of the first main surface of said first substrate a structure in which contact wearing surface, a configuration in which the third contact the conductor surface wear of the second shield on the opposite side of the bonding surface between the first substrate of the coverlay, the second conductor surface A plurality of the transmission line conductors are shielded by a structure in which the third conductor surface is joined to the surface of the conductor and the second conductor and the third conductor are arranged so as to surround the transmission line conductors. It is characterized by having a thin structure .
一例として、ベース及びカバーレイを挟んで対向配置された第1シールドの第2導体と第2シールドの第3導体とが超音波接合された状態で伝送線路導体を囲むように、全周に亘ってシールドする構造の伝送線路となる。そして、接着剤や導電ペーストを用いずに、第1シールドの第2導体と第2シールドの第3導体とが超音波接合されるので、少なくとも接着剤や導電ペーストの厚みの分薄型構造にできる。 As an example , the second conductor of the first shield and the third conductor of the second shield, which are arranged so as to face each other across the base and the coverlay, are ultrasonically bonded and surround the transmission line conductor over the entire circumference. It becomes a transmission line with a shielded structure. Then, since the second conductor of the first shield and the third conductor of the second shield are ultrasonically bonded without using an adhesive or a conductive paste, the structure can be made thinner by at least the thickness of the adhesive or the conductive paste. ..
本発明の伝送線路の製造方法は、伝送線路導体と前記伝送線路導体の入力端および出力端にそれぞれ近接するグランド導体とからなる第1導体が熱可塑性樹脂からなるシート状の第1基材における第1主面に形成されるとともに前記第1導体のうち少なくとも前記伝送線路導体が所定ピッチで複数形成されたベースと、各前記伝送線路導体を覆うシート状のカバーレイと、第2導体が熱可塑性樹脂からなるシート状の第2基材における第2主面に形成された第1シールドと、第3導体が熱可塑性樹脂からなるシート状の第3基材に形成された第2シールドとを用いて複数の前記伝送線路導体を各々シールドした薄型構造とするために、前記第1基材の第1主面に前記カバーレイを熱圧着する第1熱圧着ステップと、前記カバーレイが熱圧着された第1中間体に対し、前記伝送線路導体と前記伝送線路導体との間の不要領域を除去して前記第1中間体を厚み方向に貫通する貫通穴を複数形成する不要領域除去ステップと、前記貫通穴が複数形成された第2中間体に対し、前記第1基材における第1主面の反対側の面に前記第1シールドの第2導体面を熱圧着するとともに、前記カバーレイの前記第1基材との接着面の反対側の面に前記第2シールドの第3導体面を熱圧着する第2熱圧着ステップと、前記第1シールドの第2導体面が熱圧着された状態であるとともに、前記カバーレイの前記第1基材との接着面の反対側の面に前記第2シールドの第3導体面が熱圧着された状態で、前記第2導体面に前記第3導体面を超音波接合する第1接合ステップとを有することを特徴とする。 The method for manufacturing a transmission line of the present invention is to use a sheet-like first base material in which the first conductor composed of a transmission line conductor and a ground conductor adjacent to an input end and an output end of the transmission line conductor is made of a thermoplastic resin . A base formed on the first main surface and at least a plurality of the transmission line conductors formed at a predetermined pitch among the first conductors, a sheet-shaped coverlay covering each of the transmission line conductors, and the second conductor heat. a first shield which is formed on the second main surface of the second substrate sheet formed of a thermoplastic resin, and a second shield third conductors are formed on the third base material sheet made of a thermoplastic resin In order to form a thin structure in which a plurality of the transmission line conductors are shielded, the coverlay is heat-bonded to the first main surface of the first base material, and the coverlay is heat-bonded. With respect to the first intermediate body, the unnecessary area removing region between the transmission line conductor and the transmission line conductor is removed to form a plurality of through holes penetrating the first intermediate body in the thickness direction. The second conductor surface of the first shield is heat-bonded to the surface of the first base material opposite to the first main surface of the second intermediate body in which a plurality of through holes are formed, and the coverlay is formed. The second heat-bonding step of heat-bonding the third conductor surface of the second shield to the surface opposite to the bonding surface with the first base material and the second conductor surface of the first shield were heat-bonded. In a state in which the third conductor surface of the second shield is heat-bonded to the surface of the coverlay opposite to the adhesive surface with the first base material, the third conductor surface is heat-bonded to the second conductor surface . It is characterized by having a first joining step of ultrasonically joining the conductor surfaces .
この構成によれば、第1シールドや第2シールドの皺の発生を防止できる。 According to this configuration, it is possible to prevent the occurrence of wrinkles of the first shield and the second shield.
本発明の伝送線路の製造装置は、伝送線路導体と前記伝送線路導体の入力端および出力端にそれぞれ近接するグランド導体とからなる第1導体が所定ピッチで熱可塑性樹脂からなるシート状の第1基材における第1主面に形成されるとともに前記第1導体のうち少なくとも前記伝送線路導体が所定ピッチで複数形成されたベースを供給するベース供給機と、各前記伝送線路導体を覆うシート状のカバーレイを供給するカバーレイ供給機と、第2導体が熱可塑性樹脂からなるシート状の第2基材における第2主面に形成された第1シールドを供給する第1シールド供給機と、第3導体が熱可塑性樹脂からなるシート状の第3基材に形成された第2シールドを供給する第2シールド供給機と、前記第1基材における第1主面に前記カバーレイを熱圧着する第1熱圧着機と、前記カバーレイが熱圧着された第1中間体に対し、前記伝送線路導体と前記伝送線路導体との間の不要領域を除去して前記第1中間体を厚み方向に貫通する貫通穴を複数形成する構成の不要領域除去機と、前記貫通穴が複数形成された第2中間体に対し、前記第1基材における第1主面の反対側の面に前記第1シールドにおける第2導体面を熱圧着する構成であり、且つ、前記カバーレイの前記第1基材との接着面の反対側の面に前記第2シールドの第3導体面を熱圧着する構成である第2熱圧着機と、前記第1シールドの第2導体面が熱圧着された状態であるとともに、前記カバーレイの前記第1基材との接着面の反対側の面に前記第2シールドの第3導体面が熱圧着された状態で、前記第2導体面に前記第3導体面を超音波接合する構成の第1接合機とを備え、複数の前記伝送線路導体を各々シールドした薄型構造とすることを特徴とする。 In the transmission line manufacturing apparatus of the present invention, the first conductor composed of the transmission line conductor and the ground conductor adjacent to the input end and the output end of the transmission line conductor is a sheet-like first conductor made of a thermoplastic resin at a predetermined pitch. A base feeder that supplies a base formed on the first main surface of the base material and at least a plurality of the transmission line conductors formed at a predetermined pitch among the first conductors, and a sheet-like material that covers each of the transmission line conductors. a coverlay feeder for supplying the coverlay, the second conductor first shield supply which supplies a first shield which is formed on the second main surface of the second substrate sheet formed of a thermoplastic resin, the The coverlay is heat-bonded to a second shield feeder that supplies a second shield formed on a sheet-shaped third base material whose three conductors are made of a thermoplastic resin, and a first main surface of the first base material. With respect to the first heat crimping machine and the first intermediate body to which the coverlay is heat crimped, an unnecessary region between the transmission line conductor and the transmission line conductor is removed to move the first intermediate body in the thickness direction. With respect to the unnecessary region removing machine having a configuration in which a plurality of through holes are formed and the second intermediate body in which the plurality of through holes are formed, the first surface on the surface opposite to the first main surface of the first substrate . a second conductive surface of the shield is configured to thermocompression bonding, and, a third conductive surface of the second shield on the opposite side of the bonding surface between the first substrate of the coverlay configuration thermocompression bonding A second thermal crimping machine and the second conductor surface of the first shield are thermally crimped, and the second shield is placed on the surface of the coverlay opposite to the bonding surface with the first base material. The third conductor surface is heat-bonded, and the second conductor surface is provided with a first joining machine having a configuration in which the third conductor surface is ultrasonically bonded , and the plurality of transmission line conductors are shielded from each other. It is characterized by having a structure .
本発明の伝送線路によれば、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路が実現できる。また、本発明の伝送線路の製造方法並びに伝送線路の製造装置によれば、全周に亘ってシールドしてクロストークを低減した薄型の伝送線路またはその中間体を一貫した製造ラインで製造できる。 According to the transmission line of the present invention, it is possible to realize a thin transmission line that is shielded over the entire circumference to reduce crosstalk. Further, according to the transmission line manufacturing method and the transmission line manufacturing apparatus of the present invention, a thin transmission line or an intermediate thereof that is shielded over the entire circumference to reduce crosstalk can be manufactured on a consistent manufacturing line.
Claims (12)
前記第1基材における前記第1主面と前記カバーレイ、前記ベースにおける前記第1主面の反対側の面と前記第1シールドの前記第2主面の側、前記ベースにおける前記第1主面の反対側の面と前記第1シールドの前記第2主面の側、及び前記カバーレイと前記第2シールドの前記第2主面の側とは互いに熱圧着されており、
対向配置された前記第2導体と前記第3導体とは互いに超音波接合されており、前記第2導体と前記第3導体とで前記伝送線路導体を各々囲むように配設されていること
を特徴とする伝送線路。 A first conductor composed of a transmission line conductor and a ground conductor adjacent to an input end and an output end of the transmission line conductor is formed on the first main surface of a first base material made of a sheet-like thermoplastic resin and described above. A base in which at least a plurality of the transmission line conductors are formed at a predetermined pitch among the first conductors, a coverlay made of a sheet-like thermoplastic resin covering each of the transmission line conductors, and a sheet-like thermoplastic resin as the second conductor. A first shield formed on the second main surface of the second base material made of the same material, and a second shield formed on the third base material having a third conductor in the form of a sheet and made of a thermoplastic resin.
The first main surface of the first base material and the coverlay, the surface opposite to the first main surface of the base and the side of the second main surface of the first shield, and the first main surface of the base. The surface opposite to the surface and the side of the second main surface of the first shield, and the coverlay and the side of the second main surface of the second shield are thermocompression bonded to each other.
The second conductor and the third conductor arranged to face each other are ultrasonically bonded to each other, and the second conductor and the third conductor are arranged so as to surround the transmission line conductor. Characterized transmission line.
を特徴とする請求項1記載の伝送線路。 The transmission line according to claim 1, wherein cut surfaces are formed on both sides in the longitudinal direction.
を特徴とする請求項1または2記載の伝送線路。 The transmission line according to claim 1 or 2, wherein the end portion of the ground conductor and the end portion of the third conductor are ultrasonically bonded to each other.
を特徴とする請求項1〜3のいずれか一項記載の伝送線路。 Claims 1 to 1, wherein a plurality of window portions are formed on the third base material at predetermined intervals, and a part of each of the third conductors is exposed by the window portions so as to be externally connectable. The transmission line according to any one of 3.
前記第1主面に前記カバーレイを熱圧着する第1熱圧着ステップと、
前記カバーレイが熱圧着された第1中間体に対し、前記伝送線路導体と前記伝送線路導体との間の不要領域を除去して前記第1中間体を貫通する貫通穴を複数形成する不要領域除去ステップと、
前記貫通穴が複数形成された第2中間体に対し、前記ベースにおける前記第1主面の反対側の面に前記第1シールドの前記第2主面の側を熱圧着する第2熱圧着ステップと、
前記第1シールドが熱圧着された状態で、前記第2導体の露出面と前記第3導体の露出面とを互いに超音波接合する第1接合ステップと、を有すること
を特徴とする伝送線路の製造方法。 A first conductor composed of a transmission line conductor and a ground conductor adjacent to an input end and an output end of the transmission line conductor is formed on a sheet-like first main surface made of a thermoplastic resin, and among the first conductors. A base in which at least a plurality of the transmission line conductors are formed at a predetermined pitch, a sheet-shaped coverlay covering each of the transmission line conductors, and a second main base material having a sheet-like second conductor and made of a thermoplastic resin. Using a first shield formed on the surface and a second shield formed on a third base material whose third conductor is a sheet and made of a thermoplastic resin,
A first thermocompression bonding step in which the coverlay is thermocompression bonded to the first main surface,
An unnecessary region in which an unnecessary region between the transmission line conductor and the transmission line conductor is removed from the first intermediate in which the coverlay is thermocompression bonded to form a plurality of through holes penetrating the first intermediate. With the removal step,
A second thermocompression bonding step in which the side of the first main surface of the first shield is thermocompression bonded to the surface of the base opposite to the first main surface of the second intermediate in which a plurality of through holes are formed. When,
A transmission line characterized by having a first bonding step of ultrasonically bonding the exposed surface of the second conductor and the exposed surface of the third conductor to each other in a state where the first shield is thermocompression bonded. Production method.
を特徴とする請求項5記載の伝送線路の製造方法。 In the second thermocompression bonding step, the side of the second main surface of the first shield is thermocompression bonded to the surface of the base opposite to the first main surface of the base, and the cover. The method for manufacturing a transmission line according to claim 5, wherein the side of the second main surface of the second shield is thermocompression bonded to the ray.
を特徴とする請求項5または6記載の伝送線路の製造方法。 It is characterized by having a second bonding step of ultrasonically bonding the end of the third conductor to the end of the ground conductor in a state where the second conductor and the third conductor are ultrasonically bonded to each other. The method for manufacturing a transmission line according to claim 5 or 6.
を特徴とする請求項7記載の伝送線路の製造方法。 The transmission line according to claim 7, further comprising a laser processing step of exposing a part of each of the third conductors by laser irradiation in a state where the ground conductor and the third conductor are ultrasonically bonded. Manufacturing method.
第1主面に前記カバーレイを熱圧着する第1熱圧着機と、
前記カバーレイが熱圧着された第1中間体に対し、前記伝送線路導体と前記伝送線路導体との間の不要領域を除去して前記第1中間体を貫通する貫通穴を複数形成する不要領域除去機と、
前記貫通穴が複数形成された第2中間体に対し、前記ベースにおける前記第1主面の反対側の面に前記第1シールドの前記第2主面の側を熱圧着する第2熱圧着機と、
前記第1シールドが熱圧着された状態で、前記第2導体の露出面と前記第3導体の露出面とを互いに超音波接合する第1接合機と、を備えること
を特徴とする伝送線路の製造装置。 A first conductor composed of a transmission line conductor and a ground conductor adjacent to an input end and an output end of the transmission line conductor is formed on the first main surface of a sheet-shaped first base material at a predetermined pitch, and the first conductor is formed. Among the conductors, a base feeder for supplying a base in which at least a plurality of the transmission line conductors are formed at a predetermined pitch, a coverlay feeder for supplying a sheet-shaped coverlay covering each of the transmission line conductors, and a second conductor A first shield feeder that supplies a first shield formed on the second main surface of a second base material that is sheet-shaped and made of thermoplastic resin, and a third base material that has a third conductor that is sheet-shaped and made of thermoplastic resin. A second shield feeder that supplies the second shield formed in
A first thermocompression bonding machine that thermocompression-bonds the coverlay to the first main surface,
An unnecessary region in which an unnecessary region between the transmission line conductor and the transmission line conductor is removed from the first intermediate in which the coverlay is thermocompression bonded to form a plurality of through holes penetrating the first intermediate. With a remover
A second thermocompression bonding machine that thermocompression-bonds the side of the second main surface of the first shield to the surface of the base opposite to the first main surface of the second intermediate in which a plurality of through holes are formed. When,
A transmission line comprising a first joining machine that ultrasonically bonds the exposed surface of the second conductor and the exposed surface of the third conductor to each other in a state where the first shield is thermocompression bonded. Manufacturing equipment.
を特徴とする請求項9記載の伝送線路の製造装置。 The second thermocompression bonding machine thermocompression-bonds the side of the second main surface of the first shield to the surface of the base opposite to the first main surface of the base, and the cover. The transmission line manufacturing apparatus according to claim 9, further comprising a configuration in which the side of the second main surface of the second shield is thermocompression bonded to the ray.
を特徴とする請求項9または10記載の伝送線路の製造装置。 It is characterized by providing a second bonding machine that ultrasonically bonds the end of the third conductor to the end of the ground conductor in a state where the second conductor and the third conductor are ultrasonically bonded to each other. The transmission line manufacturing apparatus according to claim 9 or 10.
を特徴とする請求項11記載の伝送線路の製造装置。 The transmission line according to claim 11, further comprising a laser processing machine that exposes a part of each of the third conductors by laser irradiation in a state where the ground conductor and the third conductor are ultrasonically bonded. Manufacturing equipment.
Priority Applications (5)
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JP2019029386A JP6611293B1 (en) | 2019-02-21 | 2019-02-21 | Transmission line, transmission line manufacturing method, and transmission line manufacturing apparatus |
KR1020207027590A KR102369036B1 (en) | 2018-07-06 | 2019-05-15 | Transmission line, transmission line manufacturing method and transmission line manufacturing apparatus |
CN201980022963.2A CN111971850B (en) | 2018-07-06 | 2019-05-15 | Transmission line, method for manufacturing transmission line, and device for manufacturing transmission line |
PCT/JP2019/019210 WO2020008729A1 (en) | 2018-07-06 | 2019-05-15 | Transmission line, transmission line manufacturing method and transmission line manufacturing apparatus |
TW108119199A TWI748191B (en) | 2018-07-06 | 2019-06-03 | Transmission line, transmission line manufacturing method, and transmission line manufacturing device |
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JP2019029386A JP6611293B1 (en) | 2019-02-21 | 2019-02-21 | Transmission line, transmission line manufacturing method, and transmission line manufacturing apparatus |
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JP2020136526A true JP2020136526A (en) | 2020-08-31 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001135974A (en) * | 1999-11-09 | 2001-05-18 | Yamaichi Electronics Co Ltd | Flat shielded cable |
WO2008149613A1 (en) * | 2007-06-01 | 2008-12-11 | Techno Core Co., Ltd. | Signal transmission cable |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001135974A (en) * | 1999-11-09 | 2001-05-18 | Yamaichi Electronics Co Ltd | Flat shielded cable |
WO2008149613A1 (en) * | 2007-06-01 | 2008-12-11 | Techno Core Co., Ltd. | Signal transmission cable |
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