JP2020132443A - 多結晶シリコン製造装置および多結晶シリコン - Google Patents
多結晶シリコン製造装置および多結晶シリコン Download PDFInfo
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- C01B33/00—Silicon; Compounds thereof
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- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/12—Production of homogeneous polycrystalline material with defined structure directly from the gas state
- C30B28/14—Production of homogeneous polycrystalline material with defined structure directly from the gas state by chemical reaction of reactive gases
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Silicon Compounds (AREA)
Abstract
Description
図2に示した態様の芯線ホルダを、80Nmのトルクで電極に固定した。1対の多結晶シリコンロッドが約125kgとなるまで成長させる析出反応を2バッチ行ったが、何れのバッチにおいても、放電痕および変色などの異常は確認できなかった。
図2に示した態様の芯線ホルダを、80Nmのトルクで電極に固定した。1対の多結晶シリコンロッドが約200kgとなるまで成長させる析出反応を3バッチ行ったが、何れのバッチにおいても、放電痕は確認できなかった。なお、16.7%の電極にカーボン芯線ホルダの一部が固着していた。
図2に示した態様の芯線ホルダを、該芯線ホルダと電極の間に高純度黒鉛(Na<0.05,Cu<0.08,Fe,Ni<0.1,Zn<0.1)で作られたシート状の部材を挿入した状態で、80Nmのトルクで電極に固定した。1対の多結晶シリコンロッドが約200kgとなるまで成長させる析出反応を3バッチ行ったが、何れのバッチにおいても、放電痕および変色などの異常は確認できなかった。
図4に図示したカーボン製の芯線ホルダ14を、電極10にねじり込むように(嵌合させて)固定した。1対の多結晶シリコンロッドが約125kgとなるまで成長させる析出反応を2バッチ行ったところ、放電痕は認められなかったものの、4.2%の電極がカーボン芯線ホルダとの接触面で黒色に変色しており、29.2%の電極にカーボン芯線ホルダの一部が固着していた。
図4に図示したカーボン製の芯線ホルダ14を、電極10にねじり込むように(嵌合させて)固定した。1対の多結晶シリコンロッドが約200kgとなるまで成長させる析出反応を3バッチ行ったところ、16.7%の電極において芯線ホルダの接触面に放電痕が認められた。また、25.0%の電極において芯線ホルダとの接触面で黒色に変色しており、41.7%の電極において芯線ホルダの一部が固着していた。
2 のぞき窓
3 冷媒入口(ベルジャ)
4 冷媒出口(ベルジャ)
5 ベースプレート
6 冷媒入口(ベースプレート)
7 冷媒出口(ベースプレート)
8 反応排ガス出口
9 原料ガス供給ノズル
10 電極
11 冷媒入口(電極)
12 冷媒出口(電極)
13 シリコン芯線
14 芯線ホルダ
15 多結晶シリコン
16 ナット部材
17 固定部
17a 螺合部
18 電極部の頂部
19 嵌合部
100 反応炉
Claims (6)
- シーメンス法で多結晶シリコンを製造ための装置であって、
シリコン芯線を保持するためのカーボン製の芯線ホルダを備え、
前記芯線ホルダの下端側は、該芯線ホルダに通電する電極部の頂部と接しており、
前記芯線ホルダは、その下方側にのみ前記電極部に固定するための螺合部を有し、
前記芯線ホルダが前記電極部の頂部と接する面は、前記螺合部が締結される部位よりも低い電気抵抗とされている、
ことを特徴とする多結晶シリコン製造装置。 - 該螺合部は、該芯線ホルダが前記電極部の頂部と接する面よりも下方に位置している、請求項1に記載の多結晶シリコン製造装置。
- 前記電極部の頂部側にも螺合部が設けられており、
前記芯線ホルダおよび前記電極部の螺合部は、絶縁体からなるナット部材により締結されている、請求項1に記載の多結晶シリコン製造装置。 - 前記電極部の頂部および前記芯線ホルダの前記電極部の頂部との接触面は何れも水平面である、請求項1〜3の何れか1項に記載の多結晶シリコン製造装置。
- 前記芯線ホルダと前記電極部の頂部との接触面に、導電性の部材が挿入されている、請求項1〜4の何れか1項に記載の多結晶シリコン製造装置。
- 請求項1〜5の何れか1項に記載の多結晶シリコン製造装置により製造された多結晶シリコン。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2019024192A JP7064455B2 (ja) | 2019-02-14 | 2019-02-14 | 多結晶シリコン製造装置 |
CN202010079430.2A CN111560650A (zh) | 2019-02-14 | 2020-02-04 | 多晶硅制造装置以及多晶硅 |
US16/787,274 US20200263293A1 (en) | 2019-02-14 | 2020-02-11 | Apparatus for producing polycrystalline silicon and polycrystalline silicon |
DE102020000902.6A DE102020000902A1 (de) | 2019-02-14 | 2020-02-12 | Vorrichtung zum Produzieren von polykristallinem Silicium und polykristallines Silicium |
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JP2019024192A JP7064455B2 (ja) | 2019-02-14 | 2019-02-14 | 多結晶シリコン製造装置 |
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JP2020132443A true JP2020132443A (ja) | 2020-08-31 |
JP7064455B2 JP7064455B2 (ja) | 2022-05-10 |
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US (1) | US20200263293A1 (ja) |
JP (1) | JP7064455B2 (ja) |
CN (1) | CN111560650A (ja) |
DE (1) | DE102020000902A1 (ja) |
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CN112424121A (zh) * | 2018-07-23 | 2021-02-26 | 株式会社德山 | 芯线支架、硅制造装置及硅制造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006016243A (ja) * | 2004-07-01 | 2006-01-19 | Sumitomo Titanium Corp | 多結晶シリコン製造方法およびシード保持電極 |
JP2010030878A (ja) * | 2008-06-24 | 2010-02-12 | Mitsubishi Materials Corp | 多結晶シリコン製造装置 |
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- 2019-02-14 JP JP2019024192A patent/JP7064455B2/ja active Active
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2020
- 2020-02-04 CN CN202010079430.2A patent/CN111560650A/zh active Pending
- 2020-02-11 US US16/787,274 patent/US20200263293A1/en not_active Abandoned
- 2020-02-12 DE DE102020000902.6A patent/DE102020000902A1/de active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006016243A (ja) * | 2004-07-01 | 2006-01-19 | Sumitomo Titanium Corp | 多結晶シリコン製造方法およびシード保持電極 |
JP2010030878A (ja) * | 2008-06-24 | 2010-02-12 | Mitsubishi Materials Corp | 多結晶シリコン製造装置 |
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JP7064455B2 (ja) | 2022-05-10 |
DE102020000902A1 (de) | 2020-08-20 |
US20200263293A1 (en) | 2020-08-20 |
CN111560650A (zh) | 2020-08-21 |
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