JP2020119927A - 搬送装置 - Google Patents
搬送装置 Download PDFInfo
- Publication number
- JP2020119927A JP2020119927A JP2019007414A JP2019007414A JP2020119927A JP 2020119927 A JP2020119927 A JP 2020119927A JP 2019007414 A JP2019007414 A JP 2019007414A JP 2019007414 A JP2019007414 A JP 2019007414A JP 2020119927 A JP2020119927 A JP 2020119927A
- Authority
- JP
- Japan
- Prior art keywords
- gear
- arm
- temperature
- control unit
- joint portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1674—Programme controls characterised by safety, monitoring, diagnostic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/087—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices for sensing other physical parameters, e.g. electrical or chemical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0075—Means for protecting the manipulator from its environment or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/06—Safety devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
- B25J9/0087—Dual arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37431—Temperature
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41359—Gearbox
Abstract
Description
実施形態に係る搬送装置の構成の一例を説明する。本実施形態では、搬送装置を多関節ロボットとした場合を例に説明する。図1は、実施形態に係る搬送装置の構成の一例を示す斜視図である。
11 ベース部
20 アーム部
21 第1アーム
22 第2アーム
23 第3アーム
23a 上アーム
23b 下アーム
25 第1関節部
26 第2関節部
27 第3関節部
31 第1ギア
31a 軸
31b 貫通孔
32 第2ギア
32a 軸
41 真空シール
42 真空シール
50 制御部
60a〜60d モータ
61a〜61c 検出部
W ウエハ
Claims (7)
- 基板を支持するアームと、
前記アームを回転可能に支持する関節部に設けられ、前記アームを回転駆動させるギアと、
前記ギアと対向して配置され、前記ギアの温度を非接触で検出する検出部と、
を有する搬送装置。 - 前記アームは、2つ設けられ、それぞれの前記アームの端部が前記関節部で重なるように支持され、
前記ギアは、2つの前記アームに対応して2つ同軸的に設けられ、対応するアームをそれぞれ回転駆動させ、2つのギアのうちの一方のギアに透過部が形成され、
前記検出部は、前記一方のギア側に当該一方のギアと対向して配置され、前記一方のギアの前記透過部が形成されていない部分から前記一方のギアの温度を検出し、前記一方のギアの前記透過部を介して他方のギアの温度を検出する
請求項1に記載の搬送装置。 - 2つの前記アームの回転駆動を制御する制御部をさらに有し、
前記一方のギアは、2つの前記アームのうちの一方のアームを回転駆動させ、前記一方のアームが所定の回転位置となった際に、前記検出部と対向する位置に前記透過部が形成され、
前記制御部は、前記他方のギアの温度を検出する際、前記一方のアームを前記所定の回転位置に制御する
請求項2に記載の搬送装置。 - 前記アームは、気密に構成され、
前記関節部は、前記ギアの軸に真空シールが設けられて封止されている
請求項1〜3の何れか1つに記載の搬送装置。 - 前記制御部は、前記検出部により検出したギアの温度が所定の許容範囲を超えた場合、警告を出力するよう制御する
請求項3に記載の搬送装置。 - 前記制御部は、前記検出部により検出したギアの温度が所定の許容範囲を超えた場合、当該ギアで回転駆動するアームを休止させ、他のアームで基板の搬送を代行するよう制御する
請求項3または5に記載の搬送装置。 - 前記検出部は、前記ギアの端面に対向して配置され、前記ギアの端面の温度を非接触で検出する
請求項1〜6の何れか1つに記載の搬送装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019007414A JP7202902B2 (ja) | 2019-01-21 | 2019-01-21 | 搬送装置 |
KR1020200005831A KR102343040B1 (ko) | 2019-01-21 | 2020-01-16 | 반송 장치 |
US16/747,250 US11554493B2 (en) | 2019-01-21 | 2020-01-20 | Transfer apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019007414A JP7202902B2 (ja) | 2019-01-21 | 2019-01-21 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020119927A true JP2020119927A (ja) | 2020-08-06 |
JP7202902B2 JP7202902B2 (ja) | 2023-01-12 |
Family
ID=71609366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019007414A Active JP7202902B2 (ja) | 2019-01-21 | 2019-01-21 | 搬送装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11554493B2 (ja) |
JP (1) | JP7202902B2 (ja) |
KR (1) | KR102343040B1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022041221A (ja) * | 2020-08-31 | 2022-03-11 | 東京エレクトロン株式会社 | 基板搬送システムの制御方法及び基板搬送システム |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55136920A (en) * | 1979-04-13 | 1980-10-25 | Chino Works Ltd | Device for measuring gear temperature |
JP2000042952A (ja) * | 1998-07-27 | 2000-02-15 | Hitachi Ltd | 搬送装置及び搬送方法 |
JP2012109536A (ja) * | 2010-10-28 | 2012-06-07 | Canon Anelva Corp | 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法 |
JP2013177975A (ja) * | 2008-12-09 | 2013-09-09 | Canon Anelva Corp | ラック・アンド・ピニオン機構及び真空処理装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5011052B2 (ja) * | 2007-10-03 | 2012-08-29 | 株式会社日立ニコトランスミッション | 歯車装置 |
KR101439748B1 (ko) * | 2013-03-05 | 2014-09-12 | 이종희 | 교시 시스템을 갖는 로봇 및 이의 교시 방법 |
CN105531086B (zh) * | 2013-09-13 | 2017-09-05 | 日本电产三协株式会社 | 工业用机器人 |
US9618400B2 (en) * | 2015-02-12 | 2017-04-11 | Allegro Microsystems, Llc | Temperature detection circuit for a magnetic sensor |
US9732838B2 (en) * | 2015-09-22 | 2017-08-15 | Caterpillar Inc. | Gearbox component and lubricant condition monitoring system |
JP6853686B2 (ja) | 2017-02-10 | 2021-03-31 | 川崎重工業株式会社 | 多関節型ロボット |
US10753893B2 (en) * | 2018-01-26 | 2020-08-25 | Hamilton Sunstrand Corporation | Gear set health monitoring system |
-
2019
- 2019-01-21 JP JP2019007414A patent/JP7202902B2/ja active Active
-
2020
- 2020-01-16 KR KR1020200005831A patent/KR102343040B1/ko active IP Right Grant
- 2020-01-20 US US16/747,250 patent/US11554493B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55136920A (en) * | 1979-04-13 | 1980-10-25 | Chino Works Ltd | Device for measuring gear temperature |
JP2000042952A (ja) * | 1998-07-27 | 2000-02-15 | Hitachi Ltd | 搬送装置及び搬送方法 |
JP2013177975A (ja) * | 2008-12-09 | 2013-09-09 | Canon Anelva Corp | ラック・アンド・ピニオン機構及び真空処理装置 |
JP2012109536A (ja) * | 2010-10-28 | 2012-06-07 | Canon Anelva Corp | 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20200090626A (ko) | 2020-07-29 |
US11554493B2 (en) | 2023-01-17 |
JP7202902B2 (ja) | 2023-01-12 |
KR102343040B1 (ko) | 2021-12-24 |
US20200230819A1 (en) | 2020-07-23 |
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