JP2020112467A - 検査装置 - Google Patents
検査装置 Download PDFInfo
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- JP2020112467A JP2020112467A JP2019004167A JP2019004167A JP2020112467A JP 2020112467 A JP2020112467 A JP 2020112467A JP 2019004167 A JP2019004167 A JP 2019004167A JP 2019004167 A JP2019004167 A JP 2019004167A JP 2020112467 A JP2020112467 A JP 2020112467A
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- 238000007689 inspection Methods 0.000 title claims description 19
- 239000007788 liquid Substances 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract description 12
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- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
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- 230000008439 repair process Effects 0.000 description 4
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- 239000002274 desiccant Substances 0.000 description 3
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Abstract
Description
10…測定装置
11…発生部
12…検出部
20…判定装置
21…判定部
22…表示部
100…クロージャ
C1,C2…光ケーブル
Claims (4)
- 中空状の容器内の液体の存在の有無を前記容器の外部から判定する検査装置であって、
前記容器の筐体と前記容器内の空間との境界面に液体が存在する場合は反射波に特定の位相変化が生じる周波数の信号を発生し、当該信号を前記容器の外部から内部に向けて入射する発生部と、
前記信号の反射波を検出する検出部と、
前記境界面における前記反射波の位相変化に基づいて前記容器内の液体の存在の有無を判定する判定部と、を有する
ことを特徴とする検査装置。 - 前記信号は、前記液体の屈折率が前記容器の筐体の屈折率よりも高くなる周波数を持つ
ことを特徴とする請求項1に記載の検査装置。 - 前記判定部は、前記容器の筐体の厚み情報を用い、前記反射波において前記位相変化を検知する部分を特定して前記容器内の液体の存在の有無を判定する
ことを特徴とする請求項1または2に記載の検査装置。 - 前記発生部および前記検出部は前記容器に接触可能である
ことを特徴とする請求項1乃至3のいずれかに記載の検査装置。
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JP2019004167A JP6735368B2 (ja) | 2019-01-15 | 2019-01-15 | 検査装置 |
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JP2019004167A JP6735368B2 (ja) | 2019-01-15 | 2019-01-15 | 検査装置 |
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JP2020112467A true JP2020112467A (ja) | 2020-07-27 |
JP6735368B2 JP6735368B2 (ja) | 2020-08-05 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008224449A (ja) * | 2007-03-13 | 2008-09-25 | Hamamatsu Photonics Kk | 全反射テラヘルツ波測定装置 |
US20100292936A1 (en) * | 2006-07-05 | 2010-11-18 | Danmarks Tekniske Universitet | DETERMINING PARAMETERS OF THE DIELECTRIC FUNCTION OF A SUBSTANCE IN AQUEOUS SOLUTION BY SELF-REFERENCED REFLECTION THz SPECTROSCOPY |
JP2014525572A (ja) * | 2011-08-31 | 2014-09-29 | フラウンホッファー−ゲゼルシャフト ツァー フェーデルング デア アンゲバンテン フォルシュング エー ファー | テラヘルツ放射線の使用により物質を確定するための方法及び装置 |
JP2015083964A (ja) * | 2013-09-17 | 2015-04-30 | キヤノン株式会社 | テラヘルツ波を用いて検体の情報を取得する情報取得装置および情報取得方法 |
JP2018004365A (ja) * | 2016-06-30 | 2018-01-11 | ローム株式会社 | 反射式検出装置 |
JP2018009824A (ja) * | 2016-07-12 | 2018-01-18 | 株式会社リコー | 試料分析方法及び試料分析装置 |
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- 2019-01-15 JP JP2019004167A patent/JP6735368B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100292936A1 (en) * | 2006-07-05 | 2010-11-18 | Danmarks Tekniske Universitet | DETERMINING PARAMETERS OF THE DIELECTRIC FUNCTION OF A SUBSTANCE IN AQUEOUS SOLUTION BY SELF-REFERENCED REFLECTION THz SPECTROSCOPY |
JP2008224449A (ja) * | 2007-03-13 | 2008-09-25 | Hamamatsu Photonics Kk | 全反射テラヘルツ波測定装置 |
JP2014525572A (ja) * | 2011-08-31 | 2014-09-29 | フラウンホッファー−ゲゼルシャフト ツァー フェーデルング デア アンゲバンテン フォルシュング エー ファー | テラヘルツ放射線の使用により物質を確定するための方法及び装置 |
JP2015083964A (ja) * | 2013-09-17 | 2015-04-30 | キヤノン株式会社 | テラヘルツ波を用いて検体の情報を取得する情報取得装置および情報取得方法 |
JP2018004365A (ja) * | 2016-06-30 | 2018-01-11 | ローム株式会社 | 反射式検出装置 |
JP2018009824A (ja) * | 2016-07-12 | 2018-01-18 | 株式会社リコー | 試料分析方法及び試料分析装置 |
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