JP2020106159A - Dust collector - Google Patents

Abstract

To provide a dust collector which has excellent maintainability by allowing maintenance areas above or below the dust collector to be selected, in the dust collector used in a clean room which requires a clean space, a manufacturing device, and the like.SOLUTION: A dust collector includes a blower fan, a main housing, an electrical component part, and a sub housing for storing the electrical component part. The sub housing includes a top surface part, a bottom surface part which opposes to the top surface part and in which the electrical component part is fixed, and a side wall part for connecting the top surface part and the bottom surface part. The bottom surface part can be removed upward or downward with respect to the main housing. Since the maintenance can be performed only above or only below, maintenance is easily possible in accordance with the state of each manufacturing device.SELECTED DRAWING: Figure 4

Description

The present invention relates to a dust remover.

In recent years, in order to further improve the cleanliness of the space inside the manufacturing apparatus, a system in which the manufacturing apparatus is arranged inside a large clean room has been used.

In order to maintain a high cleanliness inside such a manufacturing apparatus, a dust removing device is attached to the manufacturing apparatus. This dust removing device is an outside of the manufacturing device, sucks air in a clean room, cleans it through a dust removing filter, and supplies it to the manufacturing device.

In such a system, it is necessary to reduce the volume of the clean room in order to reduce the air conditioning load and the purification load in the clean room. Therefore, the space outside the manufacturing apparatus and inside the clean room is designed to be as small as possible.

Hereinafter, the configuration of the dust remover according to Patent Document 1 will be described with reference to FIGS. 9 and 10.

As shown in FIG. 9, for example, the dust removing device 100 is provided on the wall surface (or ceiling surface) of the manufacturing device 102 that houses a robot or the like. The dust remover 100 sucks the air in the clean room 101 whose temperature is adjusted by the air conditioner 103 to remove dust and the like, and then supplies the clean air into the manufacturing apparatus 102. In order to reduce the volume of the clean room 101, the space outside the manufacturing apparatus and the space inside the clean room is designed to be as small as possible.

As shown in FIG. 10, this type of dust remover 100 accommodates a blower unit 112 including a fan 105 and a motor 106 inside a box-shaped main casing 108 having a suction port, and a downstream blow-out side thereof. The filter frame 104 is provided with a dust filter 107. The filter frame 104 includes an inner flange 110 provided on the main housing 108 side and an outer flange 111 provided on the manufacturing apparatus side, and is configured not to directly contact the manufacturing apparatus 100, and the dust filter 107 is connected to the main housing 108. Set up. This makes it possible to remove only the dust filter 107 and the blower unit 112 from the inside of the manufacturing apparatus 102 with the main housing 108 installed on the wall surface of the manufacturing apparatus 102.

Although the above-mentioned conventional technique is an example in which the manufacturing apparatus 102 is provided in the clean room 101, there are cases where the dust removing apparatus 100 is provided in the clean room 101 instead of the air conditioning apparatus 103.

JP, 2014-196852, A

By the way, in order to perform maintenance from the inside of the manufacturing apparatus, it is necessary to previously provide a space for maintenance in the manufacturing apparatus or temporarily remove the internal member to secure the space. However, due to the multi-functionalization of the manufacturing apparatus, the internal mechanism is diverse, and it is difficult to limit the maintenance space, the type of member that needs to be removed, and the method.

Therefore, from the standpoint of supplying the dust removing device, it is necessary to prepare a plurality of dust removing devices corresponding to various maintenances.

Then, this invention solves the said subject, and it aims at providing the dust removal apparatus which can be easily maintained according to the state of each manufacturing apparatus.

In order to achieve this object, the present invention provides a blower fan, a main housing that stores the blower fan, an electrical component that controls the blower fan, and a sub-enclosure that stores the electrical component, Wherein the sub-casing includes a top surface portion, a bottom surface portion facing the top surface portion and to which the electrical component is fixed, and a sidewall portion connecting the top surface portion and the bottom surface portion to each other. The part is a dust removing device that can be removed both above and below the main housing, thereby achieving the intended purpose.

According to the present invention, it is an object of the present invention to provide a dust removing device that can be easily maintained according to the state of each manufacturing apparatus.

Perspective view of dust remover Exploded view of the dust remover (section AA) Exploded view of the dust remover (section BB) Exploded perspective view of the sub-housing Enlarged perspective view A of the sub-housing Enlarged perspective view B of the sub-housing Exploded perspective view of dust remover during upward maintenance Exploded perspective view of dust remover during downward maintenance (without filter) Installation drawing of conventional dust remover Cross section of conventional dust remover

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention. The following embodiments are examples of embodying the present invention, and do not limit the technical scope of the present invention. In addition, the same reference numerals are given throughout the drawings and the second and subsequent explanations are omitted.

(Embodiment 1)
First, the configuration of the dust removing device 1 will be described with reference to FIGS. 1 to 3. 1 is a perspective view of the dust removing device, and FIG. 2 is an exploded development view showing the AA cross section of the dust removing device. FIG. 3 is an exploded development view showing a BB cross section of the dust removing device.

The dust removing device 1 includes a main housing 3, a blower fan 2, a filter 6, a sub housing 5, and an electrical component section 4.

Hereinafter, the outside of the main housing 3, that is, the surface (upper side in FIG. 1) facing the outside of the manufacturing apparatus when the dust removing apparatus 1 is mounted on the manufacturing apparatus is defined as the upper side. Further, the inside of the main housing 3, that is, the surface (lower side in FIG. 1) facing the inside of the manufacturing apparatus when the dust removing apparatus 1 is mounted on the manufacturing apparatus is defined as the lower side. When the flow of the blower fan 2 is used as a reference, the upper side corresponds to the upstream side and the lower side corresponds to the downstream side.

The main housing 3 has a box shape formed of five surfaces excluding the bottom surface, and the top surface has air supply ports 7 on both sides in the longitudinal direction. The main housing 3 accommodates the blower fan 2 on the inner top surface thereof, and includes a blower fan fixing portion 8 for fastening the blower fan 2 from the inside of the main housing 3 with a fastener such as a screw. The main housing 3 includes a sub housing opening 10 for disposing the sub housing 5 between the two air supply ports 7. The main housing 3 is provided on the outer peripheral side of two sides of the sub-housing opening 10 adjacent to the air supply port 7 with a fastener such as a screw from the outside of the top surface of the main housing 3. A sub-housing fixing portion 11 for fastening 5 is provided. The main housing 3 includes a bent portion 12 that extends inward from the edge of the bottom opening. The bent portion 12 includes a filter fixing portion 13 for fastening the filter 6 from the filter 6 side with a fastener such as a screw.

Two air supply ports 7 are provided, with the long side of the air supply port 7 adjacent to the long side of the sub case opening 10 with the sub case opening 10 interposed therebetween. The two air supply ports 7 have the same shape.

The sub housing opening 10 is a rectangular opening having a size that allows the bottom surface of the sub housing 5 to be inserted and arranged from above.

The blower fan 2 constitutes one blower fan 2 with one fan, and four dust blowers 2 are arranged in the dust removing device 1. The blower fan 2 has substantially the same shape as the air supply port 7, and is provided with the upstream side of the blower fan 2 positioned inside the main housing 3 on the inner surface of the air supply port 7.

The filter 6 is provided so as to cover the bottom opening of the main housing 3, and removes air passing through the filter 6. The individual members are connected to respective fixing parts by locking tools 14 such as screws to be integrated.

Next, the configurations of the sub-housing 5 and the electrical component section 4 will be described with reference to FIG. Note that FIG. 4 is an exploded perspective view of the sub-housing.

The sub-housing 5 includes a top surface portion 15, a bottom surface portion 16 facing the top surface portion 15 and to which the electrical component portion 4 is fixed, and a side wall portion 17 connecting the top surface portion 15 and the bottom surface portion 16.

The side wall portion 17 has a rectangular tube shape in which four side walls excluding the top surface and the bottom surface are connected in an annular shape, and includes a protruding portion 18 extending inward from two long sides of the edge portion of the bottom opening. .. The projecting portion 18 includes a bottom surface fixing portion 19 through which a locking tool such as a screw penetrates and is tightened. The side wall portion 17 includes a top long side outward bending portion 29 extending outward from two long sides of the top surface peripheral edge. The top long side outward bending portion 29 is provided with a sub housing locking hole 30.

The electrical component 4 is fixed to the upper surface of the bottom portion 16. The bottom surface portion 16 includes short bending portions 21 that stand upright from the four sides of the bottom surface portion bottom portion 20 toward the side wall portion 17. A wall bottom part locking hole 22 which is an opening for allowing a locking tool such as a screw to penetrate is provided on the inner periphery of the short bent part 21 in the bottom part bottom part 20. The side wall portion 17 and the bottom surface portion 16 are integrated by inserting the bottom surface fixing screw 23 from below into the wall bottom surface portion locking hole 22 and connecting them by the bottom surface portion fixing portion 19.

In addition, the side wall portion 17 includes a top short side outer bent portion 24 that extends outward from the two short sides of the top surface periphery, and the top short side outer bent portion 24 includes a top surface fixing portion 25. ing.

The top surface portion 15 is in the shape of a sloping prism having five surfaces with an open bottom, and includes top surface bending portions 26 extending outward from two short sides of the bottom peripheral edge of the top surface portion 15. The top surface bending portion 26 includes a top surface locking hole 27.

The side wall portion 17 and the bottom surface portion 16 integrated as described above are inserted from above the top surface portion 15 through the top surface fixing screw 28 through the top surface locking hole 27, and are connected by the top surface fixing portion 25. The bottom part 16 and the top part 15 are integrated to form the sub-casing 5.

To connect the main housing 3 and the sub housing 5, first, the sub housing 5 is inserted into the sub housing opening 10 from above the main housing 3 from the bottom surface portion 16. After the outer peripheral side ends of the top long side outside bent portion 29 and the top short side outside bent portion 24 are positioned on the upper surface of the sub housing opening 10 by insertion, the sub housing fixing screw 32 is attached from the outside of the top surface portion 15. It is passed through the sub-housing locking hole 30 and connected by the sub-housing fixing portion 11 provided in the main housing 3. As a result, the sub-casing 5 and the main casing 3 are integrated to form the dust removing device 1.

Next, the wiring connection of the sub-housing 5 will be described with reference to FIGS. 5 is an enlarged perspective view A of the sub casing, and FIG. 6 is an enlarged perspective view B of the sub casing.

The top short side outer bent portion 24 provided on the side wall portion 17 also functions as the terminal arrangement plate 33. The terminal arrangement plate 33 is provided with external connection terminals 36 to which power lines supplied from a manufacturing apparatus (not shown) and lead lines 35 such as signal lines can be connected. By fixing the external connection terminal 36 to the upper surface side of the terminal arrangement plate 33, the lead-in wire 35 can be vertically inserted and removed above the terminal arrangement plate 33.

For example, when the external connection terminal 36 is a terminal block, the screw head faces upward, the screw can be moved vertically by turning the screw, and the lead-in wire 35 can be attached and detached. When the external connection terminal 36 is a connector, the lead-in wire 35 from the outside can be inserted and removed in the vertical direction. Since both of them can be connected from above, the detaching and connecting work can be easily performed even in a small space.

Further, the terminal arrangement plate 33 includes a relay portion 39 that communicates with the external connection terminal 36, and an internal connection terminal 38 at the tip of the relay portion 39 opposite to the external connection terminal 36. The internal connection terminal 38 is provided so as to electrically penetrate the terminal arrangement plate 33, and is connected to the relay portion 39 on the upper surface of the terminal arrangement plate 33. The bottom portion 16 has a lead wire 37 extending from the opening provided in the short bending portion 21 and communicating with the electrical component portion 4. The lead wire 37 is connected to the internal connection terminal 38 below the terminal arrangement plate 33. That is, by fixing the internal connection terminal 38 to the lower surface side of the terminal arrangement plate 33, the lead wire 37 can be vertically inserted and removed below the terminal arrangement plate 33.

For example, when the internal connection terminal 38 is a terminal block, the screw head faces downward, the screw can be moved in the vertical direction by turning the screw, and the lead wire 37 can be attached and detached downward. When the internal connection terminal 38 is a connector, the lead wire 37 can be vertically inserted and removed. Both can be connected from below.

With the above configuration, wiring is performed both above and below the terminal arrangement plate 33 by using the external connection terminals 36 and the internal connection terminals 38 in a state in which the service wire 35 supplied from the manufacturing apparatus and the electrical component section 4 are connected. Detachable. Therefore, it is possible to easily perform the detaching and connecting work of the wiring even in a narrow space.

Next, a method of taking out the electrical component section 4 above will be described with reference to FIG. 7. 7. FIG. 7 is an exploded perspective view of the dust removing device at the time of upward maintenance. It should be noted that the electrical component section 4 is subject to maintenance, and the purpose is to remove the electrical component section 4 from the main housing 3 for repair or replacement.

At the time of upward maintenance, the top surface fixing screw 28 is removed from above and the top surface 15 is removed upward from the sub-housing 5. Thereby, the operator can confirm the electrical component section 4 and the external connection terminal 36 inside the sub-housing 5 whose top surface is open in a state where the side wall portion 17 and the bottom surface portion 16 are integrated. it can.

In this state, the motor connection wire 40 of the blower fan 2 connected to the electrical component section 4 is removed inside the sub housing 5.

Next, the lead-in wire 35 from the manufacturing apparatus is removed from the external connection terminal 36 arranged upward on the terminal arrangement plate 33 of the side wall portion 17. As a result, all the wiring of the electrical component section 4 is released. In this state, if the sub-chassis fixing screw 32 is removed from above, the bottom surface portion 16 to which the electrical component portion 4 is fixed can be taken out above the dust removing device 1 while being integrated with the side wall portion 17. Reinstallation of the sub-housing 5 after maintenance of the electrical component section 4 can be performed in the reverse order. As a result, maintenance can be performed only from above without performing work from below.

Next, a method of taking out the electrical component section 4 below will be described with reference to FIG. 8 is an exploded perspective view of the dust removing device at the time of downward maintenance. The filter 6 is not shown for the sake of understanding.

At the time of downward maintenance, first, the filter fixing screw fixing the filter 6 to the main housing 3 is removed from below, and the filter 6 is removed downward from the main housing 3. This allows the operator to check the bottom surface of the sub-housing 5 housed inside the main housing 3.

Next, the lead wire 37 from the electrical component section 4 is removed from the internal connection terminal 38 arranged downward on the terminal arrangement plate 33 of the side wall portion 17.

Next, when the bottom surface fixing screw 23 is removed from below, only the bottom surface portion 16 provided with the electrical component portion 4 can be released from the fixing state and moved downward with the side wall portion 17 left in the main housing 3. By moving downward, the electrical component section 4 can be exposed to the outside of the side wall portion 17, so that the motor connection wire 40 connected to the electrical component section 4 is removed. At this time, the motor connecting wire 40 can have a slack by making the electric connecting portion 4 to have a sufficient length so that the electric connecting portion 4 can be exposed, so that disconnection or the like due to pulling can be prevented.

As a result, all the wiring of the electrical component section 4 is released, so that the bottom portion 16 having the electrical component section 4 mounted thereon is completely separated from the main housing 3. That is, it is possible to take out the electrical component section 4 downward without disconnecting the lead-in wire, which normally requires work from above.

The reinstallation of the bottom surface portion 16 after the maintenance of the electrical component portion 4 can be performed by the reverse procedure.

As described above, in the dust removing device according to the present invention, since the wiring can be removed from both the upper side and the lower side, maintenance can be performed only on the upper side or only on the lower side. Therefore, maintenance can be easily performed according to the state of each manufacturing apparatus. Further, it is not necessary to design a plurality of types of products according to the state of the manufacturing apparatus, and it is possible to reduce costs.

INDUSTRIAL APPLICABILITY The dust remover according to the present invention is useful as a dust remover mounted inside equipment such as semiconductor manufacturing equipment and clean booths.

DESCRIPTION OF SYMBOLS 1 Dust removal device 2 Blower fan 3 Main housing 4 Electrical component 5 Sub-casing 6 Filter 7 Air supply port 8 Blower fan fixing part 10 Sub-casing opening 11 Sub-casing fixing part 12 Bending part 13 Filter fixing part 14 Locking tool 15 Top surface part 16 Bottom surface part 17 Side wall part 18 Projection part 19 Bottom part fixing part 20 Bottom part bottom part 21 Short bending part 22 Wall bottom part locking hole 23 Bottom part fixing screw 24 Top short side outside bending part 25 Top part fixing part 26 Top Bend Part 27 Top Face Locking Hole 28 Top Face Fixing Screw 29 Top Long Side Outside Bending Part 30 Sub-Case Locking Hole 32 Sub-Case Fixing Screw 33 Terminal Arrangement Plate 35 Lead-in Wire 36 External Connection Terminal 37 Leader Wire 38 Internal connection terminal 39 Relay section 40 Motor connection line

Claims (6)

Blower fan,
A main housing for housing the blower fan,
An electrical component for controlling the blower fan,
A sub-housing for storing the electric component section,
The sub-housing is
The top part,
A bottom face portion facing the top face portion and fixed with the electrical component portion,
A side wall portion connecting the top surface portion and the bottom surface portion,
The bottom part is
A dust remover that is removable both above and below the main housing. The bottom part is
It is detachable upward together with the side wall portion with respect to the main housing,
The dust remover according to claim 1, which is detachable downward from the side wall portion with respect to the main housing. The side wall portion is
An external connection terminal that can connect a lead wire from the outside,
An internal connection terminal capable of connecting a lead wire from the electrical component section,
A relay unit that relays the external connection terminal and the internal connection terminal,
The external connection terminal,
Supports connection from above,
The internal connection terminal,
The dust remover according to claim 1 or 2, which corresponds to a connection from below. The side wall portion is
A terminal arrangement plate having an upper surface facing upward and a lower surface facing downward;
The external connection terminal,
Disposed on the upper surface,
The internal connection terminal,
The dust remover according to claim 3, which is disposed on the lower surface. The external connection terminal,
It is possible to insert and remove the lead wire from the outside in the vertical direction,
The internal connection terminal,
The dust remover according to claim 4, wherein a lead wire from the electrical component section can be vertically inserted and removed. The dust remover according to claim 1, wherein a filter is provided on one surface of the main housing.