JP2014128749A - Fan filter unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fan filter unit structure in which any one can do replacement so that a fan unit part having an air-blowing function, its fan, and its motor can be attached, detached and replaced easily.SOLUTION: Outer shapes of a fan unit part, a dust removal filter part, a chemical filter part and a prefilter part of a fan filter unit are standardized, and a structure for arranging those in series in a gas flow direction is provided so that an arranging order and an arranging number can be changed arbitrarily. As the structure for arranging the unit part in series, a tube-like case is provided to house the unit part, and an opening is provided at a side surface of the tube-like case for putting in and taking out the unit. In a case that the units of a number less than that of the whole length of the case are operated, a dummy unit having a frame only is inserted, and fastening metal fittings are provided to fasten all units in the gas flow direction.

Description

  The present invention relates generally to a device for supplying clean air.

  A fan filter unit is known as a device used to supply clean air to spaces called clean rooms that require clean air in factories that manufacture semiconductor devices and food factories. For example, there are Patent Document 1 and Patent Document 2.

  Patent Document 1 discloses a configuration for improving the convenience of filter replacement in a fan filter unit.

  Patent Document 2 discloses a configuration that is a fan filter unit that is compact and can handle a wide range of filter pressure losses.

JP 2009-240938 A JP 2008-256266 A

  Conventionally, a fan filter unit and a fan filter unit with a chemical filter are included in a fan unit portion having a blowing function, a pre-filter portion that removes coarse dust contained in the air, a dust removal filter portion that removes dust, and the air. Combined with a chemical filter section that removes chemical substances, it was designed exclusively for the space where the target equipment is installed (clean air supply amount, target substance to be removed, pressure difference between the discharge and inflow spaces).

  Therefore, since the configuration of the equipment differs depending on the installation space and the required specifications, it is necessary to design and select the installation space and the installation specifications each time.

  As for the design, the fan unit having the above-described air blowing function, the pre-filter that removes coarse dust contained in the air, the dust-removing filter that removes dust, and the chemical filter that removes chemical substances contained in the air The structure, configuration, size, and dimensions of each unit unit such as the unit may need to be redesigned each time.

  In this re-design, the size, dimensions, and configuration of the entire housing that supports the unit may be required to be designed.

  Therefore, it is necessary to design and remanufacture the fan filter unit for changes in the environment of the installation space and changes in the installation specifications, and it is difficult to flexibly respond to changes in the environment and specifications.

  In addition, the chemical filter generally has a shorter life than the dust filter, and only the chemical filter needs to be replaced frequently. However, the chemical filter is installed between the fan unit and the dust filter. It was necessary to remove the unit part.

  For this reason, although it is only necessary to replace the chemical filter, it is necessary to remove and remove other filters in the vicinity, which is expected to be complicated.

  Therefore, the replacement requires a lot of time, and during that time, the space in which the fan filter unit is installed and the movement of the apparatus must be stopped, and the operation rate of the apparatus is expected to be lowered.

  In addition, the power supply method for the fan unit is generally performed by connecting the power supply terminal to the terminal block, or by connecting the power supply side and the power reception side terminals to a connector-shaped structure that enables connection and connection. In some cases, it was necessary to consider problems such as removal, space removal of lead-out cable, and increase in the number of parts.

  Based on these, the following points are being examined.

  The fan filter unit will be considered to have a structure that can be replaced by anyone so that the fan unit having the air blowing function and the fan and motor can be easily replaced, removed, and replaced.

  In consideration of installation space and installation specifications, if the static pressure increases by increasing the number of filters used, consideration should be given to flexibility in the compatibility of new settings and design changes for fans and motors. consider.

Even if the type and quantity of filters are changed with respect to the installation space and installation specifications, consideration should be given to ensuring airtightness between each filter when incorporated in the fan filter unit. Consideration is made to reduce as much as possible the increase in man-hours during assembly and installation (for example, screw tightening).
In addition, regarding the power supply method for the fan unit, consideration should be given to reducing the increase in the number of parts when connecting to the terminal block of the power supply or connector connection, and the man-hours for manufacturing, assembly, or maintenance. Consider to reduce the man-hours.

  In order to solve the above-described problems, the present invention can facilitate replacement of a fan and a motor, can cope with various specifications (for example, when a plurality of filters are used), or has airtightness. It is an object of the present invention to provide a system that can be improved easily and can supply power more easily than before.

  The fan unit unit, dust filter unit, chemical filter unit, and pre-filter unit of the fan filter unit have the same outer shape and are equipped with a mechanism for arranging them in series in the airflow direction, and the arrangement order and number of arrangements can be changed arbitrarily. I was able to do it.

  As a mechanism for arranging the unit parts in series, a cylindrical case for storing the unit part is provided, and the side surface of the cylindrical case is provided with an opening through which the unit can be taken in and out. For operation, a dummy unit having only a frame portion is inserted, and a fastening bracket for fastening all units in the airflow direction is provided.

As another method, a fastening bracket is provided on the side surface of each unit, and the units are connected in series.
Furthermore, when the fan unit is inserted, an electrode is attached to the outside of the fan unit and an electrode on the power supply side is prepared at the bottom of the cylindrical case. The electrode should be shared so that there is no problem even if filters are inserted.

  Below, the structure of this invention is demonstrated with another expression.

A fan unit having a fan and a motor for driving the fan and having a blowing function, a filter unit having a function of filtering an air flow blown by the fan unit, and a housing supporting at least the fan unit and the filter unit In the provided fan filter unit, the vertical and horizontal dimensions of the plane perpendicular to the airflow direction of each unit are predetermined dimensions, and the thickness dimension of each unit in the airflow direction is the first thickness dimension as the predetermined dimension. The units are arranged in series in the airflow direction, arranged in the casing, and tightened by a tightening portion provided in the casing, so that the units are supported by the casing.

  Further, in addition to the first thickness dimension of the unit, the thickness dimension is an integral multiple of the first thickness dimension.

  The filter unit may be any one of a dust filter, a chemical filter, and a prefilter.

  Further, the filter unit is a dummy case having a vertical dimension and a horizontal dimension of the filter unit each having a predetermined dimension, a first thickness dimension, and having no filter function.

  The filter unit is provided with a tightening structure so that the filter units are supported with each other.

  Further, the casing has a structure for fastening each unit to be arranged and a structure for separating each unit.

  In addition, a power supply unit is provided in the casing, and a power receiving unit that receives power so that electric power can be supplied to the motor is provided in the fan unit. A power supply unit that supplies power from the power supply unit is disposed in the housing at a position corresponding to the power reception unit of the unit.

  With the above configuration, it is possible to change the equipment flexibly by standardizing the shape of the pre-filter part, fan unit part, dust removal filter, and chemical filter in response to changes in the installation environment. Reduction of man-hours can also be expected.

  Further, each unit can be easily replaced as compared with the conventional case.

  Since the filter unit can be configured by arbitrarily connecting the prefilter unit, the fan unit unit, the dust filter unit, and the chemical filter unit, all types of fan filter units can be configured as compared with the conventional one.

  Further, since the terminal block / connector is not required, the number of parts can be reduced as compared with the prior art.

  According to the present invention, it is possible to provide an economical apparatus, such as improved compatibility with the installation location than before.

The case part which comprises the fan filter unit of the Example of this invention is shown. The basic unit of the fan filter unit of the Example of this invention is shown. The multistage structure of the chemical filter of the Example of this invention is shown. The structure which increased the fan unit part with the pressure loss increase of the Example of this invention is shown. The structure of an exhaust unit is shown by arranging a dust filter on the suction side of the embodiment of the present invention. The structure at the time of removing the fan unit part of the Example of this invention as a filter unit is shown. The structure which has arrange | positioned the connection metal fitting for every unit of the Example of this invention is shown. The structure at the time of making an airflow direction perpendicular | vertical with respect to the installation surface of the Example of this invention is shown. The structure at the time of unit replacement of FIG. 8 of the Example of this invention is shown. The structure (plug-in type) of the electric power feeding of the fan unit of the Example of this invention is shown. The structure (push-in type) of the electric power feeding of the fan unit of the Example of this invention is shown. The structure at the time of the fan unit electric power feeding of FIG. 11 of the Example of this invention is shown.

  Embodiments of the present invention will be described below with reference to FIGS.

1 and 2 show an embodiment of the present invention. FIG. 1 shows a case portion of the fan filter unit.
In the illustration of FIG. 1, the central part is a top view and a plan view of the case part of the present embodiment as viewed from above, and on the right side thereof is a side view as seen from the airflow suction side direction. It is the side view seen from the blowing side direction of an air current. Below the top view and the deformed view, a side view of the longitudinal direction of the case portion viewed from the side is shown.

  The case portion includes a case main body 1 that houses the unit and has a downstream flange, and an upstream flange 3. A fastening metal fitting 2 is attached to the case body 1 and the upstream flange 3. The case main body 1 has a configuration in which an opening for opening and removing the unit is provided, and has a U-shape when viewed from the airflow direction 9.

  FIG. 2 is a view in which the fan unit 5, the dust filter 6, the chemical filter 7, the dummy case 8, and the prefilter 11 are inserted into the case portion 4. The dimensions of the plane perpendicular to the airflow direction 9 of each unit are the same, and the thickness dimension of the airflow direction is the same as the thickness of the dust filter 6, chemical filter 7, dummy case 8, and prefilter 11, and the fan unit 5 The thickness dimension is configured to be an integral multiple of the dust filter. A packing 10 is attached to the downstream surface of each unit. The dummy case is composed of only a frame, and is used for dimension adjustment so as to match the dimension of the case portion 4.

  By inserting each of these units into the case body 1, attaching the upstream flange 3, and tightening in the air flow direction with the tightening bracket 2, the packing 10 of each unit can be compressed to form a fan filter unit.

  For example, when replacing the chemical filter 7, remove the fastening bracket 2 and loosen the compression of the packing 10 of each unit, and remove the chemical filter from the open surface of the case 4 from the U-shaped open part of the case body 1. Can be removed.

  Figure 3 shows the case where chemical filters are added in multiple stages. The dummy case 8 is removed from the state of FIG. 2, and a chemical filter is inserted instead. Since there are a plurality of types of chemical filters depending on the component to be removed, in that case, several types of chemical filters are connected in multiple stages.

  FIG. 4 shows a case where fan units 5 are added in multiple stages. By using an axial fan as the type of fan unit, an air flow can be created in the air flow direction. If the fan unit is multistage, the static pressure can be increased. Therefore, it is possible to compensate for an increase in pressure loss when a dust filter, a chemical filter, or the like is used in multiple stages. In addition, it is possible to cope with a case where the duct connected to the outlet side has a long distance, a right-angle structure, a sudden expansion / contraction, and a duct loss increases.

  In FIG. 5, an exhaust unit can be configured by disposing the pre-filter 11 and the dust filter 6 on the upstream side and the fan unit 5 on the downstream side. This exhaust unit is used for measures such as biohazard and chemical hazard, and has a function of filtering contaminated air with a dust filter and discharging clean air.

  FIG. 6 shows a case where the fan unit 5 is not installed. When this configuration is used, there is an external fan unit, and this apparatus is configured as a filter unit.

  In this embodiment, as shown in FIG. 6, a fastening bracket 2 is attached to each unit and sandwiched between the upstream flange 3 and the downstream flange 12. With this configuration, the entire fan filter unit can be configured in a small size.

  In this embodiment, as shown in FIG. 8, the airflow direction is perpendicular to the installation surface. In this case, since a load is applied in the stacking direction of each unit, a structure for replacing the unit is required. Each unit is provided with a unit insertion guide 19 on the side of the unit. Each unit is housed in a case main body 14, and a replacement knob 15 is installed on the upper portion of the case main body 14. The replacement knob 15 is connected to the shaft 16, and by rotating the replacement knob 15, the unit insertion rail 18 moves up and down through the threaded portion of the drive transmission block 20, and is inserted into the unit insertion rail 18. Each unit can be moved up and down.

  FIG. 9 shows the replacement of each unit. By rotating the replacement knob 15 as shown in the figure, a gap of 5 to 10 mm is created between each unit, so that each unit can be easily removed. Moreover, since the distance between the units is shortened by turning the replacement knob in the reverse direction, the packing of each unit can be compressed, and the replacement is completed easily.

  In the present embodiment, as shown in FIG. 10, the fan unit side electrode A 23 is attached to the lower outside of the fan unit 5, and the case side electrode A 24 in the case lower recess 26 at the lower part of the cylindrical case body 25 is facilitated in advance. Shows when connected. Since no terminal block or connector is required, power can be easily supplied.

  In this embodiment, the fan unit side electrode B 28 is mounted below the fan unit 5 as shown in FIG. 11, and the case side electrode B and the spring 29 are connected to the lower part of the cylindrical case body 25 which is easy in advance. Show the case. Since no terminal block or connector is required, power can be easily supplied. FIG. 12 shows the configuration of the fan unit 5 when power is supplied.

  The present invention has been described above using the embodiments. However, the present invention is not limited to the above-described embodiments, and may be a combination of the above-described embodiments as appropriate, or a part thereof may be replaced with another configuration. is there.

1: Case body 2: Fastening bracket 3: Upstream flange 4: Case part 5: Fan unit 6: Dust filter 7: Chemical filter 8: Dummy case 9: Air flow direction 10: Packing 11: Prefilter 12: Downstream flange 13: Installation surface 14: Case body (when the airflow direction is perpendicular to the installation surface)
15: Replacement knob 16: Shaft 17: Rail 18: Unit insertion rail 19: Unit insertion guide 20: Drive transmission block 21: Suction port 22: Air outlet 23: Fan unit side electrode A
24: Case side electrode A
25: Case body (if the fan unit power supply method is simple)
26: Case bottom recess 27: Fan unit side electrode B
28: Case side electrode B
29: Spring

Claims (7)

A fan unit including a fan and a motor for driving the fan and having a blowing function;
A filter unit having a filter function of airflow blown by the fan unit;
In a fan filter unit comprising at least a housing that supports the fan unit and the filter unit,
The vertical and horizontal dimensions of the surface perpendicular to the airflow direction of each unit are the predetermined dimensions.
The thickness dimension in the airflow direction of each unit is the first thickness dimension as a predetermined dimension,
Arranging the units in series in the airflow direction, arranged in the housing,
The filter unit, wherein each unit is supported by the casing by tightening a tightening portion provided in the casing. The fan filter unit according to claim 1, wherein
In addition to the first thickness dimension of the unit, the filter unit has a thickness dimension that is an integral multiple of the first thickness dimension. The fan filter unit according to claim 1, wherein
The filter unit is
Either a dust filter, chemical filter or pre-filter,
A filter unit characterized by that. The fan filter unit according to claim 1, wherein
The filter unit is
A filter unit characterized in that the filter unit is a dummy case having a vertical dimension and a horizontal dimension, each of which is a predetermined dimension, a first thickness dimension, and not having a filter function. The fan filter unit according to claim 1, wherein
A tightening structure is provided in the filter unit,
Each filter unit is supported mutually, The filter unit characterized by the above-mentioned. The fan filter unit according to claim 1, wherein
The filter unit has a structure for fastening each unit to be disposed and a structure for separating each unit. The fan filter unit according to claim 1, wherein
A power supply unit is provided in the housing,
Further, the fan unit is provided with a power receiving unit that receives power so that power can be supplied to the motor.
When the fan unit is arranged in the housing,
A filter unit, wherein a power supply unit that supplies power from the power supply unit is disposed in the housing at a position corresponding to the power reception unit of the fan unit.

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