JP2020081948A - Washing machine, and method for washing and drying an object - Google Patents

Washing machine, and method for washing and drying an object Download PDF

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Publication number
JP2020081948A
JP2020081948A JP2018218810A JP2018218810A JP2020081948A JP 2020081948 A JP2020081948 A JP 2020081948A JP 2018218810 A JP2018218810 A JP 2018218810A JP 2018218810 A JP2018218810 A JP 2018218810A JP 2020081948 A JP2020081948 A JP 2020081948A
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Prior art keywords
closing plate
nozzle
washing machine
container
cleaning
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JP6808702B2 (en
Inventor
豊彰 光江
Toyoaki Mitsue
豊彰 光江
福志 田村
Fukushi Tamura
福志 田村
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Sugino Machine Ltd
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Sugino Machine Ltd
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Priority to JP2018218810A priority Critical patent/JP6808702B2/en
Priority to CN201921026082.1U priority patent/CN210546601U/en
Priority to KR2020190003370U priority patent/KR200493825Y1/en
Priority to DE202019105406.9U priority patent/DE202019105406U1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/024Cleaning by means of spray elements moving over the surface to be cleaned
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P17/00Metal-working operations, not covered by a single other subclass or another group in this subclass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042Devices for removing chips

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

To provide a washing machine capable of appropriately applying a vacuum dryer.SOLUTION: A washing machine (10) comprises: a closing plate (13) that has an installation surface (13A) and a frame body (15) on which an object (21) is installed; a support body (19) for supporting the object (21) with a gap between the object and the installation surface so that a main washing surface (21A) faces a different direction from the installation surface; a nozzle moving device (33); a nozzle (25) that is arranged on the nozzle moving device to be rotatable around a rotation axis (5) and can be inserted into the gap along the closing plate; a vacuum container (43) that has an aperture (43A) and an adhesion surface (41) and stores the object and the support body as a result of the adhesion surface being adhered to the frame body (15) at a contact position; a container moving device (45) for moving the vacuum container to the contact position and a retreat position; and a vacuum pump (49).SELECTED DRAWING: Figure 1

Description

本発明は、洗浄機、及び、対象物の洗浄および乾燥方法に関する。 The present invention relates to a washing machine and a method for washing and drying an object.

複数の工具を配置したタレットを含む洗浄機が提案されている(例えば、特許第5432943号)。また、乾燥容器と、乾燥容器に対して相対的に移動でき、所定の角度で位置決めできる載置台とを含む乾燥機が提案されている(特許第6128688号)。 A washing machine including a turret in which a plurality of tools are arranged has been proposed (for example, Japanese Patent No. 5432943). Further, a dryer including a drying container and a mounting table that can move relative to the drying container and can be positioned at a predetermined angle has been proposed (Japanese Patent No. 6128688).

真空乾燥機に好適に適用できる洗浄機を提供する。 Provided is a washing machine which can be suitably applied to a vacuum dryer.

本発明の第1の側面は、洗浄機であって、
主要な洗浄対象部位を含む主要洗浄面を持つ対象物を載せる設置面、および前記設置面を囲うように配置された枠体を持つ閉塞板と、
前記主要洗浄面が前記設置面と異なる方向を向くように前記設置面と間隙を開けて前記対象物を前記閉塞板に支持する支持体と、
ノズル移動装置と、
噴口を有し、第1の回転軸を中心に回転可能に前記ノズル移動装置に配置され、前記閉塞板に沿って前記間隙に挿入できるノズルと、
開口および前記開口の周囲に配置された密着面を有し、当接位置において前記密着面が前記枠体と密着して前記対象物及び前記支持体を収納する減圧容器と、
前記減圧容器を前記当接位置と退避位置に移動させる容器移動装置と、
前記減圧容器と接続する減圧ポンプと、
を含む。
本発明の第2の側面は、洗浄および乾燥方法であって、
ノズルが液体噴流を生成し、
前記ノズルが前記対象物の主要洗浄面を洗浄し、
前記ノズルが対象物と閉塞板の間隙に、前記閉塞板に沿って挿入されて、前記対象物の閉塞板に対向する部位を洗浄し、
前記閉塞板が回転して乾燥位相に位置決めされ、
前記閉塞板に減圧容器が密着して密閉容器を構成し、
前記密閉容器を減圧して、前記対象物に付着した液体を蒸発させ、
前記減圧容器が前記閉塞板から離間する、
方法である。
A first aspect of the present invention is a washing machine,
An installation surface on which an object having a main cleaning surface including a main cleaning target portion is placed, and a closing plate having a frame body arranged so as to surround the installation surface,
A support for supporting the object on the closing plate by leaving a gap with the installation surface so that the main cleaning surface faces a direction different from the installation surface;
A nozzle moving device,
A nozzle that has a nozzle and is arranged in the nozzle moving device so as to be rotatable about a first rotation axis, and that can be inserted into the gap along the closing plate;
A decompression container having an opening and a contact surface disposed around the opening, wherein the contact surface is in close contact with the frame at the contact position and stores the object and the support,
A container moving device for moving the decompression container to the contact position and the retracted position,
A decompression pump connected to the decompression container,
including.
A second aspect of the present invention is a cleaning and drying method,
The nozzle creates a liquid jet,
The nozzle cleans the main cleaning surface of the object,
The nozzle is inserted into the gap between the object and the closing plate, is inserted along the closing plate, and cleans a portion of the object facing the closing plate,
The closure plate is rotated and positioned in the dry phase,
A pressure reducing container is closely attached to the closing plate to form a closed container,
The airtight container is depressurized to evaporate the liquid attached to the object,
The decompression container is separated from the closing plate,
Is the way.

洗浄はバリ取りを含む。
洗浄対象部位とは、対象物の部分のうち、洗浄の目標となる部分をいう。例えば洗浄対象部位とは、ヘッドシリンダのウォータージャケット、めねじ、油穴、ピン穴、合わせ面やスリーブ穴である。
主要洗浄面とは、対象物の主要な洗浄対象部位を含む面や洗浄対象部位の大部分を含む面をいう。主要洗浄面は複数面設定されてもよい。たとえば対象物がヘッドシリンダであれば、主要洗浄面はブロックシリンダ合わせ面やカムキャップ取付け面である。例えば対象物がトランスアクスルケースであれば、主要洗浄面はトランスアクスルハウジング合わせ面である。
乾燥位相は、減圧容器が閉塞板に当接するときの閉塞板やジグ回転装置の位相をいう。
Cleaning includes deburring.
The cleaning target part means a part of the part of the object which is a target of cleaning. For example, the parts to be cleaned are the water jacket of the head cylinder, the female screw, the oil hole, the pin hole, the mating surface and the sleeve hole.
The main cleaning surface refers to a surface including a main cleaning target portion of an object or a surface including most of the cleaning target portion. Multiple main cleaning surfaces may be set. For example, if the object is a head cylinder, the main cleaning surface is the block cylinder mating surface or the cam cap mounting surface. For example, if the object is a transaxle case, the primary cleaning surface is the transaxle housing mating surface.
The dry phase refers to the phase of the closing plate or jig rotating device when the decompression container contacts the closing plate.

対象物が閉塞板に設置されたときに、このとき、主要洗浄面は設置面の他方を向く。言い換えると、主要洗浄面は設置面に対向しない。対象物は複数設置されてよい。
対象物が閉塞板に複数設置される場合、枠体も複数配置されてよい。枠体は対象物と同数設置されてよい。
望ましくは、ジグ回転装置と回転可能なノズルを両方備える。ジグ回転装置の回転軸とノズルの回転軸は直交する。ジグ回転装置を備えない場合、ノズルは閉塞板と平行に伸びる。
閉塞板は貫通する開口を有さない。閉塞板は減圧容器の開口を閉塞する。閉塞板と減圧容器は一体となって密閉容器を構成する。設置面は平面や山形として良い。
ジグ回転装置は閉塞板を乾燥位相に位置決めできる。
減圧容器は当接位置と離間位置との間を移動する。当接位置において、減圧容器は、乾燥位相にある閉塞板に当接できる。減圧容器は閉塞板に当接して密閉容器を形成する。
封止体は密着面又は枠体のいずれか一方に配置される。密着面又は枠体の他方は、封止体に密着する。封止体は密着面と枠体との隙間を封止する。
枠体は設置面を囲む。枠体は減圧容器が閉塞板と接合するときに、閉塞板へ減圧容器が接近する方向から見て対象物及び支持体を囲むように配置される。
When the object is installed on the closure plate, the main cleaning surface then faces the other of the installation surfaces. In other words, the main cleaning surface does not face the installation surface. A plurality of objects may be installed.
When a plurality of objects are installed on the closing plate, a plurality of frame bodies may be arranged. The frame bodies may be installed in the same number as the objects.
Desirably, it has both a jig rotation device and a rotatable nozzle. The axis of rotation of the jig rotating device and the axis of rotation of the nozzle are orthogonal to each other. Without the jig rotation device, the nozzle extends parallel to the closure plate.
The closure plate has no opening therethrough. The closing plate closes the opening of the decompression container. The closing plate and the decompression container together form a closed container. The installation surface may be flat or mountain-shaped.
The jig rotation device can position the closure plate in the dry phase.
The decompression container moves between the contact position and the separation position. In the abutting position, the decompression container can abut the closing plate in the dry phase. The decompression container abuts the closing plate to form a closed container.
The sealing body is arranged on either the contact surface or the frame body. The other side of the contact surface or the frame is in close contact with the sealing body. The sealing body seals the gap between the contact surface and the frame body.
The frame surrounds the installation surface. The frame body is arranged so as to surround the object and the support when viewed from the direction in which the decompression container approaches the closing plate when the decompression container joins with the closing plate.

乾燥方法は、更に、閉塞板が回転して、対象物、支持体や閉塞板に付着した洗浄液を振り払っても良い。
乾燥方法は、更に、乾燥気体噴流を対象物に当てても良い。
乾燥方法は、更に、乾燥気体噴流を対象物に向けて当てながら、対象物を回転しても良い。
乾燥方法は、上記の3つの方法を自由に組み合わせて利用しても良い。
As a drying method, the blocking plate may be further rotated to shake off the cleaning liquid attached to the object, the support or the blocking plate.
In the drying method, a dry gas jet may be applied to the object.
In the drying method, the target object may be rotated while applying a dry gas jet toward the target object.
As the drying method, the above three methods may be freely combined and used.

本発明は、真空乾燥機に好適に適用できる洗浄機を提供する。 The present invention provides a washing machine that can be suitably applied to a vacuum dryer.

第1実施形態の洗浄機The washing machine of the first embodiment 図1のII-II線断面図II-II line sectional view of FIG. 第1実施形態の洗浄方法を示すフローチャートFlowchart showing the cleaning method of the first embodiment 第1実施形態の洗浄機の使用状況Usage of the washing machine of the first embodiment 第1実施形態の洗浄機の使用状況Usage of the washing machine of the first embodiment 第2実施形態の洗浄機のジグの断面図Sectional drawing of the jig of the washing machine of 2nd Embodiment 図6のVII方向からの矢視図The arrow view from the VII direction of FIG. 図6のVIII方向からの矢視図View from the direction of VIII in FIG. 6 第3実施形態の洗浄機Cleaning machine of the third embodiment 第3実施形態の洗浄方法を示すフローチャートFlowchart showing the cleaning method of the third embodiment

(第1実施形態)
図1は図2のI-I線断面図を示す。図1および図2に示すように、第1実施形態の洗浄機10は、ジグ12、ノズル25、ポンプ31、移動装置33、減圧容器43、容器移動装置45及び減圧ポンプ49を含む。洗浄機10はジグ回転装置11、封止体17及び気体供給装置51を含んでも良い。洗浄機10は、対象物21を洗浄し、乾燥する。なお、図1においてノズル25はII-II線の背面に位置しているため、図2においてノズル25を二点鎖線で表す。
(First embodiment)
FIG. 1 shows a sectional view taken along line II of FIG. As shown in FIGS. 1 and 2, the washing machine 10 of the first embodiment includes a jig 12, a nozzle 25, a pump 31, a moving device 33, a decompression container 43, a container moving device 45, and a decompression pump 49. The washing machine 10 may include a jig rotating device 11, a sealing body 17, and a gas supply device 51. The cleaning machine 10 cleans and dries the object 21. Since the nozzle 25 is located on the back surface of the line II-II in FIG. 1, the nozzle 25 is indicated by a chain double-dashed line in FIG.

ジグ12は、閉塞板13及び支持体19を含む。ジグ12は封止体17を含んで良い。
閉塞板13は平板状であり、設置面13A、枠体15を持つ。閉塞板13には開口部が設けられていない。設置面13Aは閉塞板13の中央に設けられる。設置面13Aは平面である。枠体15は設置面13Aの周囲を囲む。閉塞板13の垂直方向から見て、枠体15は対象物21及び支持体19を囲むように配置される。枠体15は平面である。枠体15は設置面13Aよりも対象物21から離れた位置に設けられてよい。
The jig 12 includes a closing plate 13 and a support body 19. The jig 12 may include a sealing body 17.
The closing plate 13 has a flat plate shape, and has an installation surface 13A and a frame body 15. The closing plate 13 has no opening. The installation surface 13A is provided at the center of the closing plate 13. The installation surface 13A is a flat surface. The frame 15 surrounds the periphery of the installation surface 13A. The frame body 15 is arranged so as to surround the object 21 and the support body 19 when viewed from the vertical direction of the closing plate 13. The frame body 15 is a plane. The frame body 15 may be provided at a position farther from the object 21 than the installation surface 13A.

支持体19は設置面13Aに配置される。支持体19は支持ピン19A、位置決めピン(不図示)およびクランプ19Bを含んで良い。支持体19は対象物21を閉塞板13に間隙を開けて支持する。クランプ19Bは対象物21を保持する。 The support 19 is arranged on the installation surface 13A. Support 19 may include support pins 19A, locating pins (not shown) and clamps 19B. The support body 19 supports the target object 21 in the closing plate 13 with a gap. The clamp 19B holds the object 21.

対象物21は主要洗浄面21A及び背面洗浄部位21Bを含む。対象物21は主要洗浄面21Aが設置面13Aと異なる方向(図では反対方向)を向くように支持体19に支持される。対象物21が支持体19に支持されたときに、背面洗浄部位21Bは閉塞板13に向く。背面洗浄部位21Bは閉塞板13と対象物21との間隙に面している。背面洗浄部位21Bと閉塞板13との間隙の長さを間隙長さ55という。背面洗浄部位21Bから閉塞板13の端面までの設置面13Aに沿った長さを挿入長さ56という。 The object 21 includes a main cleaning surface 21A and a back surface cleaning portion 21B. The object 21 is supported by the support 19 such that the main cleaning surface 21A faces a direction different from the installation surface 13A (opposite direction in the drawing). When the object 21 is supported by the support 19, the back surface cleaning portion 21B faces the closing plate 13. The back surface cleaning portion 21B faces the gap between the closing plate 13 and the object 21. The length of the gap between the back surface cleaning portion 21B and the closing plate 13 is referred to as a gap length 55. The length along the installation surface 13A from the back surface cleaning portion 21B to the end surface of the closing plate 13 is referred to as an insertion length 56.

ジグ回転装置11は例えばNC円テーブルである。ジグ回転装置11は回転軸3を中心として閉塞板13を回転する。ジグ回転装置11は、閉塞板13の回転方向を乾燥位相に位置決めし、保持できる。ここで、乾燥位相とは、閉塞板13が減圧容器43と接合できる位相である。洗浄機10において、乾燥位相は閉塞板13が直線ガイド45A(後述)と垂直になる位相である。 The jig rotating device 11 is, for example, an NC circular table. The jig rotating device 11 rotates the closing plate 13 about the rotation shaft 3. The jig rotating device 11 can position and hold the rotation direction of the closing plate 13 in the dry phase. Here, the dry phase is a phase in which the closing plate 13 can be joined to the decompression container 43. In the washing machine 10, the drying phase is a phase in which the closing plate 13 is perpendicular to the linear guide 45A (described later).

ノズル移動装置(以下、「移動装置33」という。)は、X移動装置33X、Z移動装置33Z、Y移動装置33Y、ノズル回転装置(以下、「回転装置33C」という。)を含む。好ましくは、移動装置33は制御装置(不図示)によって数値制御される。X移動装置33Xは洗浄機10の正面からみて、左右方向(X方向)に移動する。Z移動装置33ZはX移動装置33Xに設置され、正面から見て上下方向(Z方向)に移動する。Y移動装置33YはZ移動装置に配置され、正面から見て前後方向(Y方向)に移動する。回転装置33CはY移動装置に配置され、上下方向に配置された回転軸5を中心にノズル25を回転し、所定の回転角度に位置決めする。移動装置33は例えばコラムトラバース式の移動装置を利用できる。移動装置33は例えば特許第6147623号や特許第5432943号を利用できる。
移動装置33は垂直多関節ロボット、スカラロボット、パラレルリンクロボットを利用しても良い。
The nozzle moving device (hereinafter referred to as “moving device 33”) includes an X moving device 33X, a Z moving device 33Z, a Y moving device 33Y, and a nozzle rotating device (hereinafter referred to as “rotating device 33C”). Preferably, the moving device 33 is numerically controlled by a controller (not shown). The X movement device 33X moves in the left-right direction (X direction) when viewed from the front of the washing machine 10. The Z moving device 33Z is installed on the X moving device 33X and moves in the vertical direction (Z direction) when viewed from the front. The Y moving device 33Y is arranged in the Z moving device and moves in the front-back direction (Y direction) when viewed from the front. The rotating device 33C is arranged in the Y moving device, and rotates the nozzle 25 about the rotating shaft 5 arranged in the up-down direction and positions it at a predetermined rotation angle. As the moving device 33, for example, a column traverse type moving device can be used. As the moving device 33, for example, Japanese Patent No. 6147623 and Japanese Patent No. 5432943 can be used.
The moving device 33 may use a vertical articulated robot, a SCARA robot, or a parallel link robot.

ノズル25は軸体25A、噴口25Bおよび流路25Cを含む。ノズル25は回転軸5を中心に回転できるように回転装置33Cに配置される。軸体25Aは回転軸5に沿って延びる。好ましくは、軸体25Aは回転軸5と同軸である。噴口25Bは軸体25Aの先端部に配置される。噴口25Bは軸体25Aから突出して配置されてよい。噴口25Bは回転軸5と異なる方向を向く。好ましくは、噴口25Bは回転軸5と垂直な方向を向く。噴口25Bは回転軸5と異なる方向に噴流9を生ずる。流路25Cは軸体25Aの内部に配置され、回転軸5に沿って延びる。流路25Cは噴口25Bを回転装置33Cに接続する。ノズル25の噴口25Bの方向に沿った長さ57は、間隙長さ55より小さい。ノズル25の基端部から噴口25Bまでの長さ58は挿入長さ56よりも大きい。 The nozzle 25 includes a shaft body 25A, an injection port 25B and a flow path 25C. The nozzle 25 is arranged in the rotating device 33C so that it can rotate around the rotating shaft 5. The shaft 25A extends along the rotation axis 5. Preferably, the shaft body 25A is coaxial with the rotation shaft 5. The injection port 25B is arranged at the tip of the shaft 25A. The injection port 25B may be arranged so as to project from the shaft body 25A. The injection port 25B faces a direction different from that of the rotating shaft 5. Preferably, the injection port 25B faces the direction perpendicular to the rotation axis 5. The jet 25B produces a jet flow 9 in a direction different from that of the rotating shaft 5. The flow path 25C is disposed inside the shaft body 25A and extends along the rotating shaft 5. The flow path 25C connects the injection port 25B to the rotating device 33C. The length 57 of the nozzle 25 along the direction of the injection port 25B is smaller than the gap length 55. The length 58 from the base end of the nozzle 25 to the injection port 25B is larger than the insertion length 56.

ポンプ31は回転装置33Cと接続する。ポンプ31は回転装置33Cを介して噴口25Bに接続する。 The pump 31 is connected to the rotating device 33C. The pump 31 is connected to the injection port 25B via the rotating device 33C.

容器移動装置45は、直線ガイド45A、直線ブロック45B及びシリンダ45Cを含む。直線ガイド45Aは固定される。直線ガイド45Aは一つでも良く、一組互いに平行に配置されてもよい。直線ガイド45Aは回転軸3と垂直方向に延びる。直線ブロック45Bは直線ガイド45Aに摺動できるように配置される。直線ブロック45Bは減圧容器43に固定される。シリンダ45Cは望ましくはエアシリンダである。シリンダ45Cは電動シリンダや油圧シリンダでも良い。シリンダ45Cは直線ガイド45Aに沿って伸縮するように配置される。シリンダ45Cは、直線ガイド45Aに沿って、減圧容器43を当接位置と離間位置に移動させる。ここで、当接位置は、減圧容器43が閉塞板13と密着する位置をいう。離間位置は、減圧容器43が閉塞板13から離間する位置をいう。 The container moving device 45 includes a linear guide 45A, a linear block 45B, and a cylinder 45C. The linear guide 45A is fixed. The number of the linear guides 45A may be one or one set may be arranged in parallel with each other. The linear guide 45A extends in the direction perpendicular to the rotary shaft 3. The linear block 45B is arranged so as to be slidable on the linear guide 45A. The linear block 45B is fixed to the decompression container 43. The cylinder 45C is preferably an air cylinder. The cylinder 45C may be an electric cylinder or a hydraulic cylinder. The cylinder 45C is arranged so as to expand and contract along the linear guide 45A. The cylinder 45C moves the decompression container 43 to the contact position and the separation position along the linear guide 45A. Here, the contact position refers to a position where the decompression container 43 comes into close contact with the closing plate 13. The separated position is a position where the decompression container 43 is separated from the closing plate 13.

減圧容器43は密着面41及び開口部43Aを含む。減圧容器43は箱状である。密着面41は開口部43Aの周囲に配置される。密着面41は枠体15と実質的に同一の形状をもつ。密着面41は枠体15に密着できる。減圧容器43は閉塞板13に接したときに、支持体19及び対象物21を収容できる広さを持つ。減圧容器43は閉塞板13と結合して密閉容器47(図5参照)を形成する。 The decompression container 43 includes a contact surface 41 and an opening 43A. The decompression container 43 has a box shape. The contact surface 41 is arranged around the opening 43A. The contact surface 41 has substantially the same shape as the frame 15. The contact surface 41 can be in close contact with the frame 15. The decompression container 43 has a size capable of accommodating the support 19 and the object 21 when it contacts the blocking plate 13. The decompression container 43 is combined with the closing plate 13 to form a closed container 47 (see FIG. 5).

枠体15に取り付け溝17Aが配置されてよい。取り付け溝17Aは設置面13Aの全周を囲む。Oリングである封止体17は取り付け溝17Aに装着される。密着面41は枠体15と密着するときに、密着面41が封止体17を押しつぶす。
封止体17はリング状のゴム板であっても良い。封止体17は密着面41に設けても良い。
The mounting groove 17A may be arranged in the frame body 15. The mounting groove 17A surrounds the entire circumference of the installation surface 13A. The sealing body 17, which is an O-ring, is mounted in the mounting groove 17A. When the contact surface 41 is in close contact with the frame body 15, the contact surface 41 crushes the sealing body 17.
The sealing body 17 may be a ring-shaped rubber plate. The sealing body 17 may be provided on the contact surface 41.

減圧ポンプ49は減圧容器43と接続する。減圧ポンプ49は密閉容器47の内部を排気する。気体供給装置51は減圧容器と接続する。気体供給装置51は減圧された密閉容器47内に気体を供給し、減圧容器の内外の圧力を実質的に同一にする。気体供給装置51は真空破壊弁や気体供給弁を利用できる。
減圧ポンプ49の排気口を気体供給装置51に接続しても良い。この場合、気体供給装置51を通して減圧ポンプ49の排気を密閉容器47の内部に供給する。
The decompression pump 49 is connected to the decompression container 43. The decompression pump 49 exhausts the inside of the closed container 47. The gas supply device 51 is connected to the decompression container. The gas supply device 51 supplies gas into the decompressed closed container 47 to make the pressure inside and outside the decompression container substantially the same. The gas supply device 51 can use a vacuum break valve or a gas supply valve.
The exhaust port of the decompression pump 49 may be connected to the gas supply device 51. In this case, the exhaust gas of the decompression pump 49 is supplied into the closed container 47 through the gas supply device 51.

更に、洗浄機10は、エアブローノズル53を含んでも良い。エアブローノズル53は配管54に設置され、左右方向に並べて配置されてよい。エアブローノズル53は、対象物21に向けて乾燥空気を噴出する。エアブローノズル53は、対象物21、閉塞板13及び支持体19が回転した領域の外部に配置されてよい。 Furthermore, the washing machine 10 may include an air blow nozzle 53. The air blow nozzles 53 may be installed in the pipe 54 and arranged side by side in the left-right direction. The air blow nozzle 53 jets dry air toward the target object 21. The air blow nozzle 53 may be arranged outside the region where the object 21, the closing plate 13 and the support 19 are rotated.

図3〜図5に従って、洗浄および乾燥方法を説明する。
対象物21は支持体19に装着される。ポンプ31が起動し、洗浄液を加圧する。ポンプ31は洗浄液をノズル25へ送る。噴口25Bは噴流9を生成する(S1)。
A cleaning and drying method will be described with reference to FIGS.
The object 21 is mounted on the support 19. The pump 31 is activated and pressurizes the cleaning liquid. The pump 31 sends the cleaning liquid to the nozzle 25. The jet port 25B produces the jet flow 9 (S1).

ノズル25は主要洗浄面21Aを洗浄する。移動装置33は、ノズル25を主要洗浄面21Aに対向させて、洗浄対象箇所に噴流9を次々に衝突させる。噴流9は洗浄対象箇所に衝突して、洗浄対象箇所に付着した異物やバリを除去する(S2)。 The nozzle 25 cleans the main cleaning surface 21A. The moving device 33 makes the nozzle 25 face the main cleaning surface 21A and causes the jet stream 9 to collide with the cleaning target portion one after another. The jet stream 9 collides with the cleaning target portion to remove foreign matters and burrs adhering to the cleaning target portion (S2).

ジグ回転装置11は、閉塞板13を回転軸5と平行になるように位置決めする。図4に示すように、移動装置33は、ノズル25を対象物21と閉塞板13との間隙に挿入する(S3)。
なお、移動装置33は、ノズル25を対象物21と閉塞板13との間隙に挿入する前に、噴口25Bを閉塞板13から対象物21に向かう方向に位置決めしても良い。
The jig rotating device 11 positions the closing plate 13 so as to be parallel to the rotating shaft 5. As shown in FIG. 4, the moving device 33 inserts the nozzle 25 into the gap between the object 21 and the closing plate 13 (S3).
The moving device 33 may position the injection port 25B in the direction from the closing plate 13 to the target 21 before inserting the nozzle 25 into the gap between the target 21 and the closing plate 13.

ノズル25は、対象物21のうち、閉塞板13に対向する面を洗浄する。移動装置33は、ノズル25を背面洗浄部位21Bに対向させて、噴流9を背面洗浄部位21Bに衝突させる。噴流9は背面洗浄部位21Bに付着した異物やバリを除去する(S4)。
長さ57が間隙長さ55よりも小さく、長さ58が挿入長さ56よりも大きいため、噴口25Bを背面洗浄部位21Bに対向できる。
The nozzle 25 cleans the surface of the object 21 facing the closing plate 13. The moving device 33 makes the nozzle 25 face the back surface cleaning portion 21B and causes the jet stream 9 to collide with the back surface cleaning portion 21B. The jet 9 removes foreign matters and burrs adhering to the back surface cleaning portion 21B (S4).
Since the length 57 is smaller than the gap length 55 and the length 58 is larger than the insertion length 56, the injection port 25B can face the back surface cleaning portion 21B.

ポンプ31は洗浄液の吐出を停止する。ノズル25は噴流9の生成を停止する。移動装置33は、ノズル25を閉塞板13及び対象物21から退避させる(S5)。 The pump 31 stops discharging the cleaning liquid. The nozzle 25 stops the generation of the jet flow 9. The moving device 33 retracts the nozzle 25 from the closing plate 13 and the object 21 (S5).

ジグ回転装置11は閉塞板13を乾燥位相に位置決めする(S6)。ステップS6に先立って、ジグ回転装置11は閉塞板13を回転し、対象物21、閉塞板13及び支持体19に付着した洗浄液を振り払っても良い。ステップS6に先立って、又はステップS6と同時に、エアブローノズル53から対象物21に向けて乾燥空気を噴出してもよい。 The jig rotating device 11 positions the closing plate 13 in the dry phase (S6). Prior to step S6, the jig rotating device 11 may rotate the closing plate 13 to shake off the cleaning liquid attached to the object 21, the closing plate 13 and the support 19. Prior to step S6 or simultaneously with step S6, dry air may be jetted from the air blow nozzle 53 toward the target object 21.

容器移動装置45は、減圧容器43を当接位置に移動させる。図5に示すように、密着面41が枠体15に密着して、閉塞板13は開口部43Aを閉塞する。そして減圧容器43は閉塞板13と共に密閉容器47を形成する。封止体17は密着面41と枠体15との隙間を封止する。対象物21及び支持体19は密閉容器47に収容される(S7)。閉塞板13に開口が設けられていないため、閉塞板13と減圧容器43のみで密閉容器47を構成できる。 The container moving device 45 moves the decompression container 43 to the contact position. As shown in FIG. 5, the close contact surface 41 is in close contact with the frame body 15, and the closing plate 13 closes the opening 43A. The decompression container 43 forms a closed container 47 together with the closing plate 13. The sealing body 17 seals the gap between the contact surface 41 and the frame body 15. The object 21 and the support 19 are housed in the closed container 47 (S7). Since the closing plate 13 is not provided with an opening, the closed container 47 can be configured only by the closing plate 13 and the decompression container 43.

減圧ポンプ49を駆動する。減圧ポンプ49は、減圧容器内を減圧する。対象物21、閉塞板13及び支持体19に付着した洗浄液は周囲から蒸発潜熱を奪って蒸発する。対象物21が乾燥する(S8)。 The decompression pump 49 is driven. The decompression pump 49 decompresses the inside of the decompression container. The cleaning liquid adhering to the object 21, the closing plate 13, and the support 19 takes away evaporation latent heat from the surroundings and evaporates. The object 21 is dried (S8).

気体供給装置51は気体を密閉容器47へ送る。密閉容器47の内部は外気圧と実質的に同一の圧力になる。続いて、容器移動装置45は減圧容器43を離間位置に移動させる。減圧容器43は閉塞板13から離間する。対象物21は支持体19から取り外しできる状態になる(S9)。 The gas supply device 51 sends the gas to the closed container 47. The pressure inside the closed container 47 is substantially the same as the outside air pressure. Subsequently, the container moving device 45 moves the decompression container 43 to the separated position. The decompression container 43 is separated from the closing plate 13. The object 21 is ready to be removed from the support 19 (S9).

噴流を用いたロボット洗浄機においては、通常、対象物を露出するための開口がジグに配置される。開口を通った洗浄液の噴流が対象物に衝突できるため、対象物のジグに対向する面を洗浄できる。しかし、閉塞板に開口を設けると、閉塞板の開口の両側を容器や蓋で密閉する必要が生ずる。閉塞板の開口の一方に減圧容器を設け、他方に蓋を設け、減圧容器および蓋を閉塞板と密着させて密閉容器47を形成すると、装置が複雑になる。
そこで洗浄機10は、閉塞板13を開口のない平板で構成し、主要洗浄面21Aを閉塞板13と異なる方向に配置し、閉塞板13と対象物21との間に間隙を設けた。閉塞板13に沿って、閉塞板と対象物との間の間隙に、ノズル25が挿入できるようにした。これらの構成により、開口のない閉塞板13を用いた場合であっても、噴流9が対象物21の全面に衝突できる。主要洗浄面21Aは閉塞板13と異なる方向を向くため、ノズル25は主要洗浄面21Aを洗浄しやすい。
洗浄機10は、洗浄機および乾燥機の機能を併せ持つ。洗浄機10を用いれば、洗浄機、乾燥機、及び、洗浄機および乾燥機間を移送する移送装置を別途設置する必要がなく、機械の設置面積を削減できる。また、洗浄機10によれば、洗浄機から乾燥機への搬送時間や洗浄機及び乾燥機のシャッタ開閉時間を削減できる。そして生産リードタイムを短縮できる。
洗浄機10によれば、閉塞板13に大きな開口がないため、ジグ12の剛性が向上する。また、対象物21の背面側から閉塞板13の開口を塞ぐ必要がないため、構成が簡略化される。
In a robot cleaning machine using a jet, an opening for exposing an object is usually arranged in a jig. Since the jet of the cleaning liquid that has passed through the opening can collide with the target object, the surface of the target object facing the jig can be cleaned. However, if an opening is provided in the closing plate, it becomes necessary to seal both sides of the opening of the closing plate with a container or a lid. If the decompression container is provided on one side of the opening of the closing plate and the lid is provided on the other side, and the decompression container and the lid are brought into close contact with the closing plate to form the closed container 47, the apparatus becomes complicated.
Therefore, in the cleaning machine 10, the closing plate 13 is formed of a flat plate having no opening, the main cleaning surface 21A is arranged in a direction different from that of the closing plate 13, and a gap is provided between the closing plate 13 and the object 21. The nozzle 25 can be inserted along the closing plate 13 into the gap between the closing plate and the object. With these configurations, the jet flow 9 can collide with the entire surface of the object 21 even when the closing plate 13 having no opening is used. Since the main cleaning surface 21A faces a direction different from that of the closing plate 13, the nozzle 25 easily cleans the main cleaning surface 21A.
The washer 10 has both the functions of a washer and a dryer. If the washer 10 is used, it is not necessary to separately install a washer, a dryer, and a transfer device for transferring between the washer and the dryer, and the installation area of the machine can be reduced. Further, according to the washer 10, it is possible to reduce the transfer time from the washer to the dryer and the shutter open/close time of the washer and the dryer. And the production lead time can be shortened.
According to the washing machine 10, since the blocking plate 13 does not have a large opening, the rigidity of the jig 12 is improved. Moreover, since it is not necessary to close the opening of the closing plate 13 from the back side of the target object 21, the configuration is simplified.

(第2実施形態)
第2実施形態の洗浄機はジグ112を有する。その他の構成は第1実施形態と同様である。
図6は図7のVI-VI線断面図を示す。便宜上、図7及び図8において、対象物21は二点鎖線で示される。図6〜図8に示すように、第2実施形態のジグ112は、閉塞板113、立てプレート114、支持体19、枠体15及び封止体17を含む。
(Second embodiment)
The washing machine of the second embodiment has a jig 112. Other configurations are similar to those of the first embodiment.
FIG. 6 shows a sectional view taken along line VI-VI of FIG. For convenience, in FIG. 7 and FIG. 8, the object 21 is shown by a chain double-dashed line. As shown in FIGS. 6 to 8, the jig 112 of the second embodiment includes a closing plate 113, a stand plate 114, a support body 19, a frame body 15 and a sealing body 17.

設置面113Aは山形に形成されている。設置面113Aは互いに接して配置された2つの平面で構成される。 The installation surface 113A is formed in a mountain shape. The installation surface 113A is composed of two flat surfaces arranged in contact with each other.

立てプレート114は閉塞板113に垂直に固定される。立てプレート114は平板である。立てプレート114に開口114Aが配置される。開口114Aは好ましくは対象物21のほぼ全面を立てプレート114から露出させる。開口114Aは少なくとも立てプレート114に対面する洗浄部位21Cを立てプレート114から露出させる。支持体19は立てプレート114に配置される。支持体19は対象物21を立てプレートに対して支持する。支持ピン19Aは立てプレート114に垂直に配置される。クランプ19Bは立てプレート114に配置される。クランプ19Bは対象物21を立てプレート114に固定する。 The stand plate 114 is vertically fixed to the closing plate 113. The stand plate 114 is a flat plate. An opening 114A is arranged in the stand plate 114. The opening 114A preferably exposes substantially the entire surface of the object 21 from the standing plate 114. The opening 114A exposes at least the cleaning portion 21C facing the stand plate 114 from the stand plate 114. The support 19 is arranged on the stand plate 114. The support 19 supports the object 21 against the standing plate. The support pin 19A is arranged vertically to the stand plate 114. The clamp 19B is arranged on the stand plate 114. The clamp 19B fixes the object 21 to the standing plate 114.

対象物21は主要洗浄面21Aが立てプレート114に平行になるように支持体19に支持される。対象物21が支持体19に支持されたときに、主要洗浄面21Aは閉塞板113や立てプレート114と異なる方向を向く。主要洗浄面21Aは立てプレート114の反対面を向いている。このとき、背面洗浄部位21Bは閉塞板113に向く。設置面113Aと対象物21との間に間隙が設けられる。設置面113Aと対象物21の間には、間隙長さ55の間隙が設けられている。対象物21が配置される方向の閉塞板113の端面から、対象物21の設置面までの長さを挿入長さ56とする。
ここで、間隙長さ55は長さ57よりも大きい。挿入長さ56は長さ58よりも小さい。ノズル25は閉塞板113、立てプレート114及び対象物21との間に、閉塞板113に沿って挿入される。
The object 21 is supported by the support 19 so that the main cleaning surface 21A is parallel to the stand plate 114. When the object 21 is supported by the support 19, the main cleaning surface 21A faces a direction different from that of the closing plate 113 and the stand plate 114. The main cleaning surface 21A faces the surface opposite to the stand plate 114. At this time, the back surface cleaning portion 21B faces the closing plate 113. A gap is provided between the installation surface 113A and the object 21. A gap having a gap length 55 is provided between the installation surface 113A and the object 21. The length from the end surface of the closing plate 113 in the direction in which the object 21 is arranged to the installation surface of the object 21 is defined as the insertion length 56.
Here, the gap length 55 is greater than the length 57. Insertion length 56 is less than length 58. The nozzle 25 is inserted along the closing plate 113 between the closing plate 113, the stand plate 114 and the object 21.

図8に示すように、枠体15は、閉塞板113に垂直方向(VIII方向)から見て、対象物21、立てプレート114、支持体19を囲むように配置される。封止体17は枠体15に配置される。 As shown in FIG. 8, the frame body 15 is arranged so as to surround the target object 21, the stand plate 114, and the support body 19 when viewed from the direction perpendicular to the closing plate 113 (VIII direction). The sealing body 17 is arranged on the frame body 15.

設置面113Aは山形であるため、設置面113Aから洗浄液が排出されやすい。閉塞板113と減圧容器43が密閉容器47を構成したときに、密閉容器47の内部に残留する洗浄液量が減少しやすい。密閉容器47の内部に残留する洗浄液量が減少すれば、洗浄液が蒸発する際に閉塞板113、減圧容器43、支持体19や対象物21から洗浄液が奪う蒸発潜熱が小さくなる。すると対象物21の温度が低下しにくくなり、対象物21が乾燥しやすい。
対象物21は立てプレート114に設置するため、背面洗浄部位21Bにノズル25が近づきやすい。立てプレート114は開口114Aを持つため、ノズル25は立てプレート114の裏面から開口114Aを通して噴流9を洗浄部位21Cに衝突させられる。
Since the installation surface 113A is mountain-shaped, the cleaning liquid is easily discharged from the installation surface 113A. When the closing plate 113 and the decompression container 43 constitute the closed container 47, the amount of the cleaning liquid remaining inside the closed container 47 is likely to decrease. If the amount of the cleaning liquid remaining inside the closed container 47 decreases, the evaporation latent heat taken by the cleaning liquid from the closing plate 113, the decompression container 43, the support 19 and the object 21 when the cleaning liquid evaporates decreases. Then, the temperature of the target object 21 is less likely to decrease, and the target object 21 is easily dried.
Since the target object 21 is installed on the stand plate 114, the nozzle 25 easily approaches the back surface cleaning portion 21B. Since the stand plate 114 has the opening 114A, the nozzle 25 can cause the jet flow 9 to collide with the cleaning portion 21C from the back surface of the stand plate 114 through the opening 114A.

(第3実施形態)
図9に示すように、実施形態3の洗浄機200は、洗浄室261、仕切り板262、中間シャッタ263、乾燥室265、ノズル25、移動装置33、ターンテーブル269、2つのジグ回転装置11、2つのジグ112、減圧容器43及び容器移動装置45を持つ。仕切り板262は、洗浄室261と乾燥室265を仕切る。仕切り板262は下方に搬送口262Aを持つ。中間シャッタ263は搬送口262Aを開閉する。ターンテーブル269は、2つのテーブル面269Aを持つ。ジグ回転装置11及びジグ112はテーブル面269Aのそれぞれに配置される。ターンテーブル269は、洗浄室261及び乾燥室265の中間に配置される。ターンテーブル269は旋回して、2つのジグ112の一方を洗浄室261に、他方を乾燥室265に割出す。ノズル25、移動装置33は洗浄室261に配置される。減圧容器43及び容器移動装置45は乾燥室265に配置される。
(Third Embodiment)
As shown in FIG. 9, the washing machine 200 according to the third embodiment includes a washing chamber 261, a partition plate 262, an intermediate shutter 263, a drying chamber 265, a nozzle 25, a moving device 33, a turntable 269, two jig rotating devices 11, It has two jigs 112, a decompression container 43 and a container moving device 45. The partition plate 262 partitions the cleaning chamber 261 and the drying chamber 265. The partition plate 262 has a transfer port 262A below. The intermediate shutter 263 opens and closes the transport port 262A. The turntable 269 has two table surfaces 269A. The jig rotating device 11 and the jig 112 are arranged on each of the table surfaces 269A. The turntable 269 is arranged in the middle of the cleaning chamber 261 and the drying chamber 265. The turntable 269 rotates to index one of the two jigs 112 to the cleaning chamber 261 and the other to the drying chamber 265. The nozzle 25 and the moving device 33 are arranged in the cleaning chamber 261. The decompression container 43 and the container moving device 45 are arranged in the drying chamber 265.

図10に従って、洗浄機200の動作を次に述べる。洗浄室261では、洗浄工程(ステップS1〜S5)が実行される。乾燥室265では、乾燥工程(ステップS6〜S9)が実行される。乾燥室265では、乾燥工程が完了した後、乾燥室265内のジグ112から対象物21が取り出される(S21)。乾燥室265内のジグ112に新しい対象物21を装着する(S22)。ステップS1〜S5は、ステップS6〜S9及びステップS21〜S22と並行して実行される。次に、中間シャッタ263が搬送口262Aを開く(S23)。最後に、ターンテーブル269が旋回する(S24)。すると、洗浄室261内で洗浄された対象物21が乾燥室265に移動し、新たに装着された対象物21が洗浄室261に移動する。洗浄機200によれば、洗浄工程と乾燥工程とを並行して実行できる。 The operation of the washing machine 200 will be described below with reference to FIG. In the cleaning chamber 261, a cleaning process (steps S1 to S5) is executed. In the drying chamber 265, the drying process (steps S6 to S9) is executed. In the drying chamber 265, after the drying process is completed, the target object 21 is taken out from the jig 112 in the drying chamber 265 (S21). A new object 21 is attached to the jig 112 in the drying chamber 265 (S22). Steps S1 to S5 are executed in parallel with steps S6 to S9 and steps S21 to S22. Next, the intermediate shutter 263 opens the transport port 262A (S23). Finally, the turntable 269 turns (S24). Then, the target object 21 cleaned in the cleaning chamber 261 moves to the drying chamber 265, and the newly mounted target object 21 moves to the cleaning chamber 261. According to the washing machine 200, the washing process and the drying process can be performed in parallel.

なお、本発明は前述した実施形態に限定されず、本発明の要旨を逸脱しない範囲で種々の変形が可能であり、特許請求の範囲に記載された技術思想に含まれる技術的事項の全てが本発明の対象となる。前記実施形態は、好適な例を示したものであるが、当業者ならば、本明細書に開示の内容から、各種の代替例、修正例、変形例あるいは改良例を実現することができ、これらは添付の特許請求の範囲に記載された技術的範囲に含まれる。 The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention, and all the technical matters included in the technical idea described in the claims are included. It is the subject of the present invention. Although the above-described embodiment shows a suitable example, those skilled in the art can implement various alternatives, modifications, variations, or improvements from the contents disclosed in this specification. These are included in the technical scope described in the appended claims.

13、113 閉塞板
13A、113A 設置面
15 枠体
17 封止体
19 支持体
21 対象物
21A 主要洗浄面
21B 背面洗浄部位
25 ノズル
33 移動装置(ノズル移動装置)
41 密着面
43 減圧容器
45 容器移動装置
49 減圧ポンプ
13, 113 Closing plates 13A, 113A Installation surface 15 Frame 17 Sealing body 19 Support 21 Target 21A Main cleaning surface 21B Rear cleaning part 25 Nozzle 33 Moving device (nozzle moving device)
41 Contact surface 43 Decompression container 45 Container moving device 49 Decompression pump

Claims (11)

主要な洗浄対象部位を含む主要洗浄面を持つ対象物を載せる設置面、および前記設置面を囲うように配置された枠体を持つ閉塞板と、
前記主要洗浄面が前記設置面と異なる方向を向くように前記設置面と間隙を開けて前記対象物を前記閉塞板に支持する支持体と、
ノズル移動装置と、
噴口を有し、第1の回転軸を中心に回転可能に前記ノズル移動装置に配置され、前記閉塞板に沿って前記間隙に挿入できるノズルと、
開口および前記開口の周囲に配置された密着面を有し、当接位置において前記密着面が前記枠体と密着して前記対象物及び前記支持体を収納する減圧容器と、
前記減圧容器を前記当接位置と退避位置に移動させる容器移動装置と、
前記減圧容器と接続する減圧ポンプと、
を備える洗浄機。
An installation surface on which an object having a main cleaning surface including a main cleaning target portion is placed, and a closing plate having a frame body arranged so as to surround the installation surface,
A support for supporting the object on the closing plate by leaving a gap with the installation surface so that the main cleaning surface faces a direction different from the installation surface;
A nozzle moving device,
A nozzle that has a nozzle and is arranged in the nozzle moving device so as to be rotatable about a first rotation axis, and that can be inserted into the gap along the closing plate;
A decompression container having an opening and a contact surface disposed around the opening, wherein the contact surface is in close contact with the frame at the contact position and stores the object and the support,
A container moving device for moving the decompression container to the contact position and the retracted position,
A decompression pump connected to the decompression container,
A washing machine equipped with.
前記閉塞板を支持し、前記第1の回転軸と垂直な第2の回転軸を中心に前記閉塞板を回転するジグ回転装置を備える、
請求項1の洗浄機。
A jig rotating device that supports the closing plate and rotates the closing plate about a second rotation axis perpendicular to the first rotation axis.
The washing machine according to claim 1.
前記ノズルは前記第1の回転軸に沿って延びる軸体を有し、
前記噴口は前記軸体の先端部に前記軸体と垂直に配置される、
請求項1又は請求項2の洗浄機。
The nozzle has a shaft extending along the first axis of rotation;
The nozzle is disposed at the tip of the shaft body and perpendicular to the shaft body;
The washing machine according to claim 1 or 2.
前記対象物が前記支持体に設置された状態において、前記対象物は前記閉塞板と対向する方向に配置された背面洗浄部位を有し、
前記噴口の方向の長さが前記閉塞板と前記背面洗浄部位との間隙長さよりも小さい、
請求項1〜請求項3のいずれかの洗浄機。
In a state where the target object is installed on the support, the target object has a back surface cleaning portion arranged in a direction facing the closing plate,
The length in the direction of the injection port is smaller than the gap length between the closing plate and the back surface cleaning portion,
The washing machine according to any one of claims 1 to 3.
前記支持体は、前記主要洗浄面が前記回転軸と平行、又は前記主要洗浄面が前記回転軸を含むように、前記対象物を支持する、請求項1〜請求項4のいずれかの洗浄機。 The washing machine according to any one of claims 1 to 4, wherein the support body supports the object such that the main cleaning surface is parallel to the rotation axis or the main cleaning surface includes the rotation axis. .. 前記枠体又は前記密着面のいずれか一方に設置され、前記閉塞板と前記封止面との間を封止する封止体を更に備える、請求項1〜請求項5のいずれかの洗浄機。 The washing machine according to any one of claims 1 to 5, further comprising a sealing body that is installed on either one of the frame body and the contact surface and seals between the closing plate and the sealing surface. .. 前記閉塞板は前記減圧容器を密閉する、請求項1〜請求項6のいずれかの洗浄機。 The washing machine according to any one of claims 1 to 6, wherein the closing plate seals the decompression container. 前記支持体は前記設置面に配置される、請求項1〜請求項7のいずれかの洗浄機。 The washing machine according to claim 1, wherein the support is arranged on the installation surface. 前記設置面に立てて配置される立てプレートを更に有し、
前記支持体は前記立てプレートに配置される、
請求項1〜請求項7のいずれかの洗浄機。
Further comprising a stand plate placed upright on the installation surface,
The support is arranged on the stand plate,
The washing machine according to any one of claims 1 to 7.
前記設置面は前記対象物に向かって山型に構成された、
請求項1〜請求項9のいずれかの洗浄機。
The installation surface is configured in a mountain shape toward the object,
The washing machine according to any one of claims 1 to 9.
ノズルが液体噴流を生成し、
前記ノズルが前記対象物の主要洗浄面を洗浄し、
前記ノズルが対象物と閉塞板の間隙に、前記閉塞板に沿って挿入されて、前記対象物の閉塞板に対向する部位を洗浄し、
前記閉塞板が回転して乾燥位相に位置決めされ、
前記閉塞板に減圧容器が密着して密閉容器を構成し、
前記密閉容器を減圧して、前記対象物に付着した液体を蒸発させ、
前記減圧容器が前記閉塞板から離間する、
対象物の洗浄および乾燥方法。
The nozzle creates a liquid jet,
The nozzle cleans the main cleaning surface of the object,
The nozzle is inserted into the gap between the object and the closing plate, is inserted along the closing plate, and cleans a portion of the object facing the closing plate,
The closure plate is rotated and positioned in the dry phase,
A pressure reducing container is closely attached to the closing plate to form a closed container,
The airtight container is depressurized to evaporate the liquid attached to the object,
The decompression container is separated from the closing plate,
A method for cleaning and drying an object.
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