JP2020077797A5 - - Google Patents

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Publication number
JP2020077797A5
JP2020077797A5 JP2018210925A JP2018210925A JP2020077797A5 JP 2020077797 A5 JP2020077797 A5 JP 2020077797A5 JP 2018210925 A JP2018210925 A JP 2018210925A JP 2018210925 A JP2018210925 A JP 2018210925A JP 2020077797 A5 JP2020077797 A5 JP 2020077797A5
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JP
Japan
Prior art keywords
light
imprint
substrate
curing
modulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018210925A
Other languages
English (en)
Japanese (ja)
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JP7202148B2 (ja
JP2020077797A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2018210925A external-priority patent/JP7202148B2/ja
Priority to JP2018210925A priority Critical patent/JP7202148B2/ja
Priority to TW108138996A priority patent/TWI771623B/zh
Priority to EP19205896.4A priority patent/EP3650937B1/en
Priority to EP24170999.7A priority patent/EP4398040A3/en
Priority to US16/673,804 priority patent/US11226554B2/en
Priority to CN201911076450.8A priority patent/CN111158212B/zh
Priority to KR1020190141428A priority patent/KR102641226B1/ko
Publication of JP2020077797A publication Critical patent/JP2020077797A/ja
Priority to US17/544,447 priority patent/US11921423B2/en
Publication of JP2020077797A5 publication Critical patent/JP2020077797A5/ja
Publication of JP7202148B2 publication Critical patent/JP7202148B2/ja
Application granted granted Critical
Priority to US18/390,910 priority patent/US12372866B2/en
Priority to KR1020240025586A priority patent/KR102687480B1/ko
Priority to KR1020240094126A priority patent/KR20240115792A/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018210925A 2018-11-08 2018-11-08 インプリント装置および物品製造方法 Active JP7202148B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2018210925A JP7202148B2 (ja) 2018-11-08 2018-11-08 インプリント装置および物品製造方法
TW108138996A TWI771623B (zh) 2018-11-08 2019-10-29 壓印裝置和產品製造方法
EP19205896.4A EP3650937B1 (en) 2018-11-08 2019-10-29 Imprint apparatus and product manufacturing method
EP24170999.7A EP4398040A3 (en) 2018-11-08 2019-10-29 Imprint apparatus and product manufacturing method
US16/673,804 US11226554B2 (en) 2018-11-08 2019-11-04 Imprint apparatus and product manufacturing method
CN201911076450.8A CN111158212B (zh) 2018-11-08 2019-11-06 压印装置和产品制造方法
KR1020190141428A KR102641226B1 (ko) 2018-11-08 2019-11-07 임프린트 장치 및 물품 제조 방법
US17/544,447 US11921423B2 (en) 2018-11-08 2021-12-07 Imprint apparatus and product manufacturing method
US18/390,910 US12372866B2 (en) 2018-11-08 2023-12-20 Imprint apparatus and product manufacturing method
KR1020240025586A KR102687480B1 (ko) 2018-11-08 2024-02-22 임프린트 장치, 물품 제조 방법, 및 임프린트 방법
KR1020240094126A KR20240115792A (ko) 2018-11-08 2024-07-17 임프린트 장치, 물품 제조 방법, 및 임프린트 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018210925A JP7202148B2 (ja) 2018-11-08 2018-11-08 インプリント装置および物品製造方法

Publications (3)

Publication Number Publication Date
JP2020077797A JP2020077797A (ja) 2020-05-21
JP2020077797A5 true JP2020077797A5 (enrdf_load_stackoverflow) 2021-12-16
JP7202148B2 JP7202148B2 (ja) 2023-01-11

Family

ID=70724422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018210925A Active JP7202148B2 (ja) 2018-11-08 2018-11-08 インプリント装置および物品製造方法

Country Status (1)

Country Link
JP (1) JP7202148B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7590895B2 (ja) * 2021-03-08 2024-11-27 キヤノン株式会社 インプリント装置、インプリント方法、および物品製造方法
JP7675130B2 (ja) * 2023-05-23 2025-05-12 キヤノン株式会社 インプリント装置、および物品製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013069918A (ja) 2011-09-22 2013-04-18 Toshiba Corp インプリント方法およびインプリント装置
JP5686779B2 (ja) 2011-10-14 2015-03-18 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP6632270B2 (ja) 2014-09-08 2020-01-22 キヤノン株式会社 インプリント装置、インプリント方法および物品の製造方法

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