JP2020074440A - Substrate transfer robot - Google Patents

Abstract

To provide a substrate transfer robot capable of preventing interference with an external object as well as improving positioning accuracy.SOLUTION: First and second arm portions 36 and 37 are provided so as to be capable of relatively turning to each other. At a joint between the first and second arm portions 36 and 37, second turn-driving means 42 is provided. The second turn-driving means 42 has a second motor 76 and a second power transmission portion 77. The second motor 76 has a fixed part 78 fixed on the first arm portion 36, and a rotation part 79 that rotates with respect to the fixed part 78 around a rotation axis L22 substantially parallel to a direction in which the first arm portion 36 extends. The second power transmission portion 77 is interposed between the second motor 76 and the second arm portion 37 and transmits power of the second motor 76 from a rotation part 79 of the second motor 76 to the second arm portion 37. By such the second turn-driving means 42, the first and second arm portions 36 and 37 are turned and driven relative to each other.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate transfer robot for transferring a substrate such as a wafer.

  The semiconductor processing equipment, which is a substrate processing equipment, includes a wafer processing equipment that is a substrate processing equipment that processes a semiconductor wafer (hereinafter, simply referred to as “wafer”) that is a substrate, a hoop that is a container for containing a wafer, and a wafer processing equipment. And a wafer transfer device which is a substrate transfer device for transferring a wafer between them. A wafer before or after processing is accommodated in the hoop. As the processing for the wafer, process processing such as heat treatment, impurity introduction processing, thin film formation processing, lithography processing, cleaning processing and planarization processing is assumed.

  The wafer transfer device includes a preparatory space forming unit in which a preparatory space is formed, a hoop opener, and a substrate transfer robot. The preparation space is filled with an atmosphere gas having high cleanliness. The hoop opener opens and closes each door provided in the hoop and the preparation space forming unit. The substrate transfer robot is arranged in the preparation space and transfers the wafer between the hoop and the wafer processing apparatus.

  FIG. 13 is a diagram showing a simplified configuration of the substrate transfer robot 1 according to the first conventional technique. A technique similar to this conventional technique is disclosed in Patent Document 1. The substrate transfer robot 1 is realized by a scalar-shaped horizontal articulated robot. The substrate transfer robot 1 includes a robot arm 2, a base 3 to which a base end portion of the robot arm 2 is connected, and a robot hand 4 to which a tip end portion of the robot arm 2 is connected and which holds a wafer. The robot arm 2 has first and second arm portions 5 and 6.

  A first arm portion 5 is provided on the base 3 so as to be rotatable about a first turning axis L1, and a second arm portion 6 is provided on the first arm portion 5 so as to be able to turn about a second turning axis L2. The robot hand 4 is provided on the second arm portion 6 so as to be capable of turning about the third turning axis L3. The second arm portion 6 is driven to rotate by the first motor 7. The first arm unit 5 and the robot hand 4 are driven to rotate by the second motor 8. The first and second motors 7 and 8 are provided on the base 3.

  A power transmission unit 10 having a belt 9 and the like is interposed between the second arm unit 6 and the first motor 7, and the power of the first motor 7 is transmitted to the robot hand 4 via the power transmission unit 10. As a result, the second arm portion 6 is driven to rotate. Further, another power transmission unit 12 having another belt 11 and the like is interposed between the robot hand 4 and the second motor 8, and the power of the second motor 8 is transferred to the robot via the other power transmission unit 12. It is transmitted to the hand 4, and the robot hand 4 is driven to rotate. A large number of gears may be used instead of the belt 9 and the other belt 11.

  In such a substrate transfer robot 1, the distance from the joint between the first and second arm portions 5 and 6 to the first motor 7 is long, and therefore the number of parts of the power transmission unit 10 is large and the power transmission unit 10 is large. The error accumulation in becomes large. As a result, the positioning accuracy of the tip portion of the robot arm 2 is lowered, and thus the positioning accuracy of the robot hand 4 is lowered. Further, the distance from the joint between the second arm portion 6 and the robot hand 4 to the second motor 8 becomes long, so that the number of parts of the other power transmission unit 12 increases and the error accumulated in the other power transmission unit 12 increases. growing. This causes a problem that the accuracy of the posture of the robot hand 4 is lowered.

  FIG. 14 is a diagram showing a simplified configuration of a substrate transfer robot 16 which is a second conventional technique. Since the substrate transfer robot 16 is similar to the above-described substrate transfer robot 1, corresponding parts are designated by the same reference numerals, and only different points will be described.

  The first arm portion 5 is driven to rotate by the first motor 17. The first motor 17 is provided on the base 3. The second arm portion 6 is driven to rotate by the second motor 18. The second motor 18 is provided on the first arm unit 5. The robot hand 4 is driven to rotate by the third motor 19. The third motor 19 is provided on the second arm unit 6.

  The first motor 17 has a fixed portion fixed to the base 3 and a rotating portion that rotates with respect to the fixed portion around a rotation axis L5 that is parallel to the first turning axis L1. A first power transmission unit 20, which serves as a speed reduction unit, is interposed between the first arm unit 5 and the first motor 17, and the power of the first motor 17 is transmitted through the first power transmission unit 20 to the first power transmission unit 20. It is transmitted to the arm portion 5, and thereby the first arm portion 5 is driven to rotate.

  The second motor 18 has a fixed portion fixed to the first arm portion 5, and a rotating portion that rotates around a rotation axis L6 parallel to the second turning axis L2 with respect to the fixed portion. A second power transmission unit 21 serving as a speed reduction unit is interposed between the second arm unit 6 and the second motor 18, and the power of the second motor 18 is transmitted through the second power transmission unit 21 to the second power transmission unit 21. It is transmitted to the arm portion 6, and thereby the second arm portion 6 is driven to rotate.

  The third motor 19 has a fixed portion fixed to the second arm portion 6 and a rotating portion that rotates with respect to the fixed portion around a rotation axis L7 that is parallel to the third turning axis L3. A third power transmission unit 22 serving as a speed reduction unit is interposed between the robot hand 4 and the third motor 19, and the power of the third motor 19 is transmitted to the robot hand 4 via the third power transmission unit 22. The robot hand 4 is transmitted, and the robot hand 4 is driven to rotate.

  In such a substrate transfer robot 16, the second motor 18 is arranged so that the rotating portion rotates around the rotation axis L6 parallel to the second turning axis L2, so that the arrangement space of the second motor 18 is reduced. In order to secure it, it is necessary to project a part of the first arm portion 5 in the extending direction. Therefore, the first arm portion 5 becomes large in size, which causes a problem of interference between the first arm portion 5 and an external object. Further, since the third motor 19 is arranged so that the rotating portion rotates about the rotation axis L7 parallel to the third turning axis L3, in order to secure the arrangement space for the third motor 19, the second arm 19 is provided. It is necessary to project a part of the portion 6 in the extending direction. Therefore, the second arm portion 6 becomes large in size, which causes a problem of interference between the second arm portion 6 and an external object.

  As a third conventional technique, Patent Document 2 discloses a technique relating to a wrist mechanism of an industrial robot. In this conventional wrist mechanism, the wrist is tiltably connected to the tip of the rotary arm, and the wrist is tilted by the tilting motor. The tilting motor is installed inside the rotating arm in parallel to the axis of the arm, and thereby the distance from the tilting motor to the wrist can be shortened.

  Such a conventional technique is intended to reduce inertia and improve rigidity in driving the wrist, and does not take into consideration the problems occurring in the first and second conventional techniques.

JP, 11-10576, A JP-A-1-92087

  An object of the present invention is to provide a substrate transfer robot capable of improving positioning accuracy and preventing interference with an external object.

The present invention includes a base,
A robot hand that holds the board,
It has a plurality of hollow arm portions formed to extend, each arm portion is connected in series, one end arm portion is connected to the base, the other end arm portion is connected to the robot hand, A robot arm in which two arm portions connected to each other are provided so as to be rotatable relative to each other;
Swivel drive means provided for each joint between the two arm parts connected to each other, and rotatingly driving the two arm parts connected to each other relative to each other,
The swing drive means
A fixed part fixed to one of the two arm parts connected to each other, and a rotating part that rotates with respect to the fixed part around a rotation axis substantially parallel to the extending direction of the one arm part, A motor housed in the internal space of the one arm portion,
It is housed in the internal space of the one arm portion and is interposed between the motor and the other of the two arm portions connected to each other, and transmits the power of the motor from the rotating portion of the motor to the other arm portion. A substrate transfer robot including a power transmission unit.

  Further, the invention is characterized in that the one arm portion is an arm portion on a base side.

  Further, the present invention is characterized in that the power transmission section transmits the power of the motor from the rotation section of the motor to the other arm section by a plurality of gears.

Further, according to the present invention, the power transmission unit is
A first gear fixed to the rotating part of the motor coaxially with the rotation axis of the rotating part;
A second gear that is fixed to the other arm portion coaxially with the turning axes of the one and the other arm portions;
A plurality of intermediate gears interposed between the first and second gears,
The intermediate gear is fixed to the one arm portion, and each intermediate gear has a gear accommodating box that is accommodated in a rotatable state around a rotation axis of each intermediate gear.

The present invention is also a substrate transfer robot in which a robot hand is provided so as to be relatively rotatable with respect to the arm portion at the one end,
Including other turning drive means for turning the robot hand relative to the arm portion at the one end,
The other turning drive means is
A fixed portion provided on the arm portion at the one end, and a rotating portion that rotates with respect to the fixed portion about a rotation axis that is substantially parallel to the extending direction of the arm portion at the one end. Other motors housed in the internal space,
Another power transmission unit that is housed in the internal space of the arm unit at the one end and is interposed between the other motor and the robot hand, and transmits the power of the other motor from the rotating unit of the other motor to the robot hand. It is characterized by including.

The present invention also provides a substrate transfer robot that transfers a semiconductor wafer as a substrate,
It is characterized in that the semiconductor wafer is transferred between a container that accommodates the semiconductor wafer and a treatment device that processes the semiconductor wafer.

  According to the present invention, the robot arm is configured by connecting a plurality of arm portions in series. Each arm is hollow and is formed to extend. The arm portion at one end is connected to the base, and the arm portion at the other end is connected to the robot hand. The two arm portions connected to each other are provided so as to be rotatable relative to each other. A swivel drive means is provided at the joint between the two arm portions connected to each other. The turning drive means is provided for each joint. The swivel driving means swivels the two arm portions connected to each other relative to each other. As a result, the robot hand is moved, and the substrate gripped by the robot hand is moved.

  The turning drive unit includes a motor and a power transmission unit. The motor has a fixed portion fixed to one arm portion and a rotating portion that rotates with respect to the fixed portion. The power transmission unit is interposed between the motor and the other arm unit, and transmits the power of the motor from the rotation unit of the motor to the other arm unit. As a result, the one arm portion and the other arm portion are driven to rotate relative to each other.

  Since the motor is provided in the one arm portion, the distance from the joint between the one and the other arm portions to the motor is shorter than in the case where the motor is provided in the base. Therefore, it is possible to simplify the structure of the power transmission unit and prevent accumulation of errors in the power transmission unit. As a result, the positioning accuracy of the tip of the robot arm can be improved, which in turn can improve the positioning accuracy of the robot hand.

  The motor has a dimension in a direction parallel to the rotation axis of the rotating portion larger than a dimension in a direction perpendicular to the rotation axis of the rotating portion. In consideration of this point, the motor is arranged such that the rotating portion rotates about the rotation axis that is substantially parallel to the extending direction of the one arm portion. Since the motor is arranged in this way, it is not necessary to project a part of one arm portion in a direction perpendicular to the extending direction thereof in order to secure a space for disposing the motor. Therefore, it is possible to prevent the one arm portion from becoming large in size, and thereby to prevent the interference between the one arm portion and an external object.

  Further, according to the present invention, the one arm portion is the arm portion on the base side, and therefore the motor is provided on the arm portion on the base side. Therefore, the mass of the arm portion on the robot hand side can be reduced as compared with the case where the motor is provided on the arm portion on the robot hand side. With this, the arm portion on the robot hand side can be driven to rotate with respect to the arm portion on the base side with a small force.

  According to the invention, the power of the motor is transmitted from the rotating portion of the motor to the other arm portion by the plurality of gears. Therefore, the positioning accuracy of the tip end portion of the robot arm can be improved as compared with the case where the belt is used for transmitting power.

  Further, according to the present invention, the first gear is fixed to the rotating part of the motor coaxially with the rotation axis of the rotating part, and the second gear is attached to the other arm part and the swiveling of the one and the other arm parts. It is fixed coaxially with the axis and a plurality of intermediate gears are interposed between the first and second gears. As a result, the power of the motor is transmitted from the rotating part of the motor to the other arm part.

  Each intermediate gear is accommodated in the gear accommodating box so as to be rotatable about the rotation axis of each intermediate gear. This gear housing box is fixed to one arm portion. Therefore, as compared with the case where each intermediate gear is individually aligned and attached to one arm portion, the attaching work can be facilitated.

  Further, according to the present invention, the robot hand is provided so as to be relatively rotatable with respect to the arm portion at one end. The other turning drive means drives the robot hand to turn relative to the arm portion at one end. By this, the posture of the robot hand can be changed.

  The other turning drive means includes another motor and another power transmission unit. The other motor has a fixed portion fixed to the arm portion at one end and a rotating portion that rotates with respect to the fixed portion. The other power transmission unit is interposed between the other motor and the robot hand, and transmits the power of the other motor from the rotation unit of the other motor to the robot hand. As a result, the robot hand is rotationally driven relative to the arm portion at one end.

  Since the other motor is provided in the arm portion at one end, the distance from the joint between the arm portion at one end and the robot hand to the other motor is shorter than in the case where it is provided at the base. Therefore, it is possible to simplify the configuration of the other power transmission unit and prevent the accumulation of errors in the other power transmission unit. As a result, the accuracy of the posture of the robot hand can be improved.

  Other motors have a dimension in a direction parallel to the rotation axis of the rotating portion larger than a dimension in a direction perpendicular to the rotation axis of the rotating portion. In consideration of this point, the other motor is arranged such that the rotating portion rotates about a rotation axis that is substantially parallel to the extending direction of the arm portion at one end. Since the other motor is arranged in this way, it is not necessary to project a part of the arm portion at one end in a direction perpendicular to the extending direction in order to secure a space for disposing the other motor. Therefore, it is possible to prevent the arm portion at one end from becoming large in size, and thus it is possible to prevent interference between the arm portion at one end and an external object.

  Further, according to the present invention, the substrate is a semiconductor wafer, and the substrate transfer robot transfers the semiconductor wafer between the container in which the semiconductor wafer is housed and the treatment device that processes the semiconductor wafer. In this case, the substrate transfer robot is arranged in a space kept at a predetermined cleanliness. Since this space is made as small as possible in order to easily achieve a predetermined cleanliness, a problem of interference is likely to occur when the semiconductor wafer is transferred. Since the substrate transfer robot can prevent interference as described above, it can be preferably used for transferring semiconductor wafers.

It is sectional drawing which simplifies and shows the structure of the board | substrate conveyance robot 31 which is 1st Embodiment of this invention. FIG. 3 is a plan view of the substrate transfer robot 31 viewed from above in FIG. 1. It is a sectional view showing the composition of the 2nd power transmission part 77. FIG. 3 is a plan view showing a part of a semiconductor processing facility 101 including a substrate transfer robot 31. It is sectional drawing which cuts and shows a part of semiconductor processing equipment 101. It is sectional drawing which simplifies and shows the structure of the board | substrate conveyance robot 161 which is 2nd Embodiment of this invention. FIG. 7 is a plan view of the substrate transfer robot 161 seen from above in FIG. 6. It is sectional drawing which simplifies and shows the structure of the board | substrate conveyance robot 171 which is the 3rd Embodiment of this invention. FIG. 9 is a plan view of the substrate transfer robot 171 viewed from above in FIG. 8. It is sectional drawing which simplifies and shows the structure of the board | substrate conveyance robot 181 which is the 4th Embodiment of this invention. FIG. 11 is a plan view of the substrate transfer robot 181 viewed from above in FIG. 10. It is sectional drawing which shows the structure of the 2nd power transmission part 186 in the board | substrate transfer robot which is 5th Embodiment of this invention. It is a figure which simplifies and shows the structure of the board | substrate transfer robot 1 which is a 1st prior art. It is a figure which simplifies and shows the structure of the board | substrate transfer robot 16 which is a 2nd prior art.

  FIG. 1 is a sectional view showing a simplified configuration of a substrate transfer robot 31 according to a first embodiment of the present invention. FIG. 2 is a plan view of the substrate transfer robot 31 seen from above in FIG. The substrate transfer robot 31 of the present embodiment is used to transfer a semiconductor wafer (hereinafter, simply referred to as “wafer”) 32 that is a substrate.

  The substrate transfer robot 31 is realized by a SCARA (Selective Compliance Assembly Robot Arm, abbreviated as SCARA) type horizontal articulated robot. The substrate transfer robot 31 includes a robot arm 33, a base 34 to which the base end portion 33 a of the robot arm 33 is connected, and a robot hand 35 to which the tip end portion 33 b of the robot arm 33 is connected and which holds the wafer 32. ..

  The robot arm 33 has first and second arm portions 36 and 37. The first and second arm portions 36, 37 are hollow. The first and second arm portions 36, 37 are formed to extend, in other words, have a longitudinal shape. Such first and second arm portions 36 and 37 are connected in series. The first arm portion 36 which is an arm portion at one end in the connecting direction is connected to the base 34, and the second arm portion 37 which is an arm portion at the other end in the connecting direction is connected to the robot hand 35.

  The robot hand 35 has a structure capable of holding the wafer 32. Holding the wafer 32 means holding or grasping the wafer 32, and holding includes forms such as suction, receiving, and hanging, and grasping includes forms such as knobs, scissors, and nigiri. In the present embodiment, the robot hand 35 holds the wafer 32 by the receiver. The robot hand 35 is formed in a plate shape, and has a substantially Y shape when viewed in the thickness direction. The robot hand 35 has a hand main body 38 having a substantially U-shape when viewed from the thickness direction, and an extending portion 39 that is continuous with and extends from the hand main body 38.

  The first and second arm portions 36, 37 and the robot hand 35 are horizontally provided. The base 34 and the first arm portion 36 are provided so as to be rotatable relative to each other. Specifically, the upper end 34 a of the base 34 has an extending direction one end portion 36 a of the first arm portion 36 in the vertical direction Z. Is provided so as to be capable of turning around a first turning axis L11 extending in the direction of. The first and second arm portions 36, 37 are provided so as to be rotatable relative to each other. Specifically, the other end portion 36b of the first arm portion 36 in the extending direction has an extending direction of the second arm portion 37. The one end portion 37a is provided so as to be capable of turning about a second turning axis L12 which is parallel to the first turning axis L11. The second arm portion 37 and the robot hand 35 are provided so as to be relatively rotatable with respect to each other. Specifically, the other end portion 37b of the second arm portion 37 in the extending direction has a hand at the extending portion 39 of the robot hand 35. An extending direction one end 39a opposite to the side connected to the main body 38 is provided so as to be capable of turning around a third turning axis L13 parallel to the first and second turning axes L11, L12. The turning means a movement that relatively changes the axial direction of each member between two members.

  The first and second arm portions 36, 37 and the robot hand 35 are provided so as to be displaced from each other in the vertical direction Z. The second arm portion 37 is arranged above the first arm portion 36. This prevents the first arm portion 36 and the second arm portion 37 from interfering with each other, and thus the second arm portion 37 can be moved to a position overlapping the first arm portion 36 in the vertical direction Z. .. The robot hand 35 is arranged above the second arm portion 37. This prevents the second arm portion 37 and the robot hand 35 from interfering with each other, and thus the robot hand 35 can be moved to a position overlapping the second arm portion 37 in the vertical direction Z.

  A first turning drive means 41 is provided at a joint between the base 34 and the first arm portion 36. The first turning drive means 41 turns and drives the base 34 and the first arm portion 36 relative to each other, and more specifically, the first arm portion 36 is moved relative to the base 34 about the first turning axis L11. Drive to rotate.

  The joint between the first and second arm portions 36, 37 is provided with a second turning drive means 42 which is a turning drive means. The second swivel driving means 42 swivels the first and second arm portions 36, 37 relative to each other, and more specifically, with respect to the first arm portion 36, moves the second arm portion 37 to the second swivel axis L12. It is driven to rotate relatively around.

  The joint between the second arm portion 37 and the robot hand 35 is provided with a third turning drive means 43 which is another turning drive means. The third turning drive means 43 turns the second arm portion 37 and the robot hand 35 relatively to each other. Specifically, the robot hand 35 is moved relative to the second arm portion 37 about the third turning axis L13. Drive to rotate.

  The first and second swing drive means 41, 42 swing-drive the first and second arm portions 36, 37, whereby the position of the tip end portion 33b of the robot arm 33 changes within a horizontal virtual plane, and by extension, The position of the robot hand 35 changes within a horizontal virtual plane. Further, the robot hand 35 is driven to rotate by the third turning drive means 43, and the posture of the robot hand 35 changes accordingly.

  The base 34 includes a base portion 46 fixed to a predetermined installation surface 45, a movable portion 47 displaceable in the vertical direction Z with respect to the base portion 46, and a movable portion 47 in the vertical direction Z relative to the base portion 46. Elevating drive means 48 for displacement driving is provided (see FIG. 5). The movable portion 47 is formed in a cylindrical shape, and its axis is provided so as to extend in the vertical direction Z. The upper portion of the movable portion 47 becomes the upper portion 34a of the base 34. The movable unit 47 is displaced and driven by the elevating and lowering drive unit 48, whereby the position of the tip end portion 33b of the robot arm 33 changes up and down, and thus the position of the robot hand 35 changes up and down.

  A cylindrical one end side communication hole 52 communicating with the internal space 51 of the first arm portion 36 is formed in a portion of the first arm portion 36 near the one end portion 36a in the extending direction. The axis of the one end side communication hole 52 extends in a direction perpendicular to the extending direction of the first arm portion 36. A cylindrical other end side communication hole 53 communicating with the internal space 51 of the first arm portion 36 is formed in a portion of the first arm portion 36 near the other end portion 36b in the extending direction. The axis of the other end side communication hole 53 is parallel to the axis of the one end side communication hole 52. The other end side communication hole 53 faces the side opposite to the one end side communication hole 52 and is opened.

  A cylindrical one end side communication hole 55 that communicates with the internal space 54 of the second arm portion 37 is formed in a portion of the second arm portion 37 near the one end portion 37a in the extending direction, and a cylindrical shape that protrudes outward. Is formed. The axis of the one end side communication hole 55 extends in a direction perpendicular to the extending direction of the second arm portion 37. The inner hole 57 of the protruding portion 56 is coaxial with the one end side communication hole 55, and communicates with the internal space 54 of the second arm portion 37 via the one end side communication hole 55. A cylindrical other end side communication hole 58 communicating with the internal space 54 of the second arm portion 37 is formed in a portion of the second arm portion 37 near the other end portion 37b in the extending direction. The axis of the other end side communication hole 58 is parallel to the axis of the one end side communication hole 55. The other end side communication hole 58 faces the side opposite to the one end side communication hole 55 and is opened.

  The extending portion 39 of the robot hand 35 is hollow. A cylindrical one end side communication hole 62 communicating with the internal space 61 of the extending portion 39 is formed in a portion of the extending portion 39 near the one end portion 39a in the extending direction, and a cylindrical protrusion protruding outward. The part 63 is formed. The axis of the one end side communication hole 62 extends in a direction parallel to the thickness direction of the robot hand 35. The inner hole 64 of the projecting portion 63 is coaxial with the one end side communication hole 62, and communicates with the internal space 61 of the extending portion 39 via the one end side communication hole 62.

  The upper portion of the movable portion 47, which is the upper portion 34a of the base 34, is gently inserted coaxially into the communication hole 52 on the one end side of the first arm portion 36, so that the base 34 and the first arm portion 36 are They are connected to each other so as to be rotatable relative to each other around the rotation axis L11. The axes of the one-end side communication hole 52 and the movable portion 47 form a common straight line with the first turning axis L11. A bearing means is interposed between the upper portion 34a of the base 34 and the formation portion 52a of the one end side communication hole 52 of the first arm portion 36, thereby smoothly rotating the first arm portion 36 with respect to the base 34. can do.

  The protruding portion 56 of the second arm portion 37 is coaxially and gently inserted into the other end side communication hole 53 of the first arm portion 36, whereby the first and second arm portions 36 and 37 are moved to the second turning axis line. They are connected so as to be rotatable relative to each other around L12. The axes of the other end side communication hole 53 and the protrusion 56 form a straight line common to the second turning axis L12. Bearing means is interposed between the protruding portion 56 of the second arm portion 37 and the formation portion 53a of the other end side communication hole 53 of the first arm portion 36, whereby the second arm portion relative to the first arm portion 36. The turning of 37 can be made smooth.

  The protruding portion 63 of the extending portion 39 of the robot hand 35 is coaxially and gently inserted into the other end side communication hole 58 of the second arm portion 37, whereby the second arm portion 37 and the robot hand 35 are moved to the third side. They are connected to each other so as to be rotatable relative to each other around the swing axis L13. Each axis line of the other end side communication hole 58 and the protruding portion 63 forms a common straight line with the third turning axis line L13. Bearing means is interposed between the protruding portion 63 of the extending portion 39 of the robot hand 35 and the forming portion 58a of the communication hole 58 on the other end side of the second arm portion 37, whereby the robot for the second arm portion 37 is provided. It is possible to smoothly turn the hand 35.

  The first turning drive means 41 has a first motor 71 and a first power transmission section 72. The first motor 71 and the first power transmission section 72 are housed in the internal space 51 of the first arm section 36. Therefore, even if dust is generated from the first motor 71 and the first power transmission unit 72, it is possible to prevent the dust from diffusing around the substrate transfer robot 31, and thereby the cleanliness around the substrate transfer robot 31. Can be prevented from decreasing.

  The first motor 71 has a fixed portion 73 fixed to the first arm portion 36, and a rotating portion 74 that rotates around a rotation axis L21 that is substantially parallel to the extending direction of the first arm portion 36 with respect to the fixed portion 73. Have and. The first motor 71 is realized by an electric motor, specifically, a servo motor. The first motor 71 is provided with a first encoder 75 that detects the amount of rotation of the rotating portion 74 with respect to the fixed portion 73. The first power transmission unit 72 is interposed between the first motor 71 and the base 34, and transmits the power of the first motor 71 from the rotating unit 74 of the first motor 71 to the base 34. The base 34 and the first arm portion 36 are driven to rotate relative to each other by the first turning drive means 41.

  The second turning drive means 42 has a second motor 76, which is a motor, and a second power transmission unit 77, which is a power transmission unit. The second motor 76 and the second power transmission unit 77 are housed in the internal space 51 of the first arm unit 36. Therefore, even if dust is generated from the second motor 76 and the second power transmission unit 77, it is possible to prevent the dust from diffusing around the substrate transfer robot 31, and thus the cleanliness around the substrate transfer robot 31. Can be prevented from decreasing.

  The second motor 76 includes a fixed portion 78 fixed to the first arm portion 36, and a rotating portion 79 that rotates around a rotation axis L22 that is substantially parallel to the extending direction of the first arm portion 36 with respect to the fixed portion 78. Have and. The second motor 76 is realized by an electric motor, specifically, a servo motor. The second motor 76 is provided with a second encoder 80 that detects the amount of rotation of the rotating portion 79 with respect to the fixed portion 78. The second power transmission unit 77 is interposed between the second motor 76 and the second arm unit 37, and transmits the power of the second motor 76 from the rotating unit 79 of the second motor 76 to the second arm unit 37. .. The first and second arm portions 36 and 37 are driven to rotate relative to each other by the second turning drive means 42.

  The third turning drive means 43 has a third motor 81, which is another motor, and a third power transmission unit 82, which is another power transmission unit. The third motor 81 and the third power transmission unit 82 are housed in the internal space 54 of the second arm unit 37. Therefore, even if dust is generated from the third motor 81 and the third power transmission unit 82, it is possible to prevent the dust from diffusing around the substrate transfer robot 31, and thereby the cleanliness around the substrate transfer robot 31. Can be prevented from decreasing.

  The third motor 81 has a fixed portion 83 fixed to the second arm portion 37, and a rotating portion 84 that rotates around a rotation axis L23 that is substantially parallel to the extending direction of the second arm portion 37 with respect to the fixed portion 83. Have and. The third motor 81 is realized by an electric motor, specifically, a servo motor. The third motor 81 is provided with a third encoder 85 that detects the amount of rotation of the rotating portion 84 with respect to the fixed portion 83. The third power transmission unit 82 is interposed between the third motor 81 and the robot hand 35, and transmits the power of the third motor 81 from the rotation unit 84 of the third motor 81 to the robot hand 35. The third swing drive means 43 as described above drives the second arm portion 37 and the robot hand 35 to swing relative to each other.

  The up-and-down drive means 48 has a fourth motor and a fourth power transmission section. The fourth motor has a fixed portion fixed to the base portion 46 of the base 34 and a rotating portion that rotates with respect to the fixed portion. The fourth motor is realized by an electric motor, specifically, a servo motor. The fourth motor is provided with a fourth encoder that detects the rotation amount of the rotating unit with respect to the fixed unit. The fourth power transmission section is interposed between the fourth motor and the movable section 47 of the base 34, and transmits the power of the fourth motor from the rotating section of the fourth motor to the movable section 47 of the base 34. The fourth power transmission unit converts the rotary motion of the rotary unit of the fourth motor into a linear motion in the vertical direction Z.

  The 1st-4th power transmission parts 72, 77, 82 also function as a speed reducer. Therefore, it is not necessary to separately provide a speed reducer, and this can reduce the number of parts.

  FIG. 3 is a sectional view showing the configuration of the second power transmission unit 77. In FIG. 3, in order to prevent complication, the configuration of the second power transmission unit 77 is simplified and shown. Since the configurations of the first to third power transmission units 72, 77 and 82 are similar to each other, only the configuration of the second power transmission unit 77 will be described and the first and third power transmission units 72 and 82 will not be duplicated. The description is omitted.

  The second power transmission unit 77 transmits the power of the second motor 76 by the plurality of gears 91, 92, 93 from the rotating unit 79 of the second motor 76 to the protrusion 56 of the second arm unit 37. Therefore, as compared with the case where the belt is used for transmitting power, the positioning accuracy of the tip end portion 33b of the robot arm 33 can be improved. Further, since there is no deformation like a belt, vibration due to a sudden stop can be prevented, whereby the operation speed of the robot arm 33 can be increased.

  Specifically, the second power transmission unit 77 is provided on the rotating unit 79 of the second motor 76, the first gear 91 fixed coaxially with the rotation axis L22 of the rotating unit 79, and the protrusion 56 of the second arm unit 37. , A second gear 92 fixed coaxially with the second turning axis L12, a plurality of intermediate gears 93 interposed between the first and second gears 91, 92, and a plurality of intermediate gears fixed to the first arm portion 36. 93 has a gear box 94 that is a gear housing box that is housed in a rotatable state about the rotation axis of each intermediate gear 93.

  In this way, the first gear 91 is fixed to the rotating portion 79 of the second motor 76 coaxially with the rotation axis L22 of the rotating portion 79, and the second gear 92 is attached to the protruding portion 56 of the second arm portion 37. , Is fixed coaxially with the second turning axis L12, and a plurality of intermediate gears 93 are interposed between the first and second gears 91, 92. As a result, the power of the second motor 76 is transmitted from the rotating portion 79 of the second motor 76 to the protruding portion 56 of the second arm portion 37.

  Each intermediate gear 93 is housed in the gear box 94 in a state of being rotatable about the rotation axis of each intermediate gear 93. The gear box 94 is fixed to the first arm portion 36. Therefore, as compared with the case where each intermediate gear 93 is individually aligned and attached to the first arm portion 36, the attachment work can be facilitated.

  Two gears that mesh with each other among the plurality of gears 91 to 93 are realized by bevel gears. Therefore, the rotation about the rotation axis L22 of the rotating portion 79 of the second motor 76 or the rotation about the rotation axis parallel to the rotation axis L22 is converted into the rotation about the second rotation axis L12 or the rotation axis parallel to the second rotation axis L12. Therefore, the power of the second motor 76 can be transmitted from the rotating portion 79 of the second motor 76 to the protruding portion 56 of the second arm portion 37. In the present embodiment, the first gear 91 and the intermediate gear 93a that meshes with the first gear 91 among the intermediate gears 93 are realized by bevel gears.

  FIG. 4 is a plan view showing a part of the semiconductor processing facility 101 including the substrate transfer robot 31. FIG. 5 is a cross-sectional view showing a part of the semiconductor processing equipment 101 by cutting. 4 and 5, an example of the operating state of the substrate transfer robot 31 is shown by a solid line, and another example of the operating state is shown by a chain double-dashed line. The semiconductor processing equipment 101 is equipment for processing the wafer 32.

  The semiconductor processing equipment 101 is defined in advance, for example, by the SEMI (Semiconductor Equipment and Materials International) standard. In this case, the hoop 102 and the hoop opener 118, which will be described later, follow the specifications such as E47.1, E15.1, E57, E62, E63, E84 of the SEMI standard. The semiconductor processing equipment 101 may have a configuration outside the SEMI standard.

  The wafers 32 before and after processing are housed in a container (hereinafter referred to as “hoop”) 102 called a hoop 102 (Front Opening Unified Pod, abbreviated as FOUP). The hoop 102 is a substrate container for mini-environment in a clean environment in relation to the technology for cleaning the polar areas. A plurality of wafers 32 are housed in the hoop 102. The wafers 32 accommodated in the hoop 102 are arranged in a horizontal state at equal intervals in the vertical direction Z.

  The hoop 102 has a hoop body 103 that is a container body, and a hoop side door 104 that is a container door that is detachably provided to the hoop body 103. The hoop body 103 is formed in a substantially box shape, and an inner hoop space 105 that is a wafer accommodation space is formed. The hoop inner space 105 is open to one side. By mounting the hoop side door 104 on the hoop body 103, the hoop inner space 105 is closed, and by removing the hoop side door 104 from the hoop body 103, the hoop inner space 105 is opened.

  The semiconductor processing equipment 101 is a wafer processing apparatus 106 that processes the wafer 32, and a wafer transfer apparatus 107 that is a front end module apparatus (Equipment Front End Module, abbreviated as EFEM) that transfers the wafer 32 between the hoop 102 and the wafer processing apparatus 106. Including and As processing for the wafer 32, process processing such as heat treatment, impurity introduction processing, thin film formation processing, lithography processing, cleaning processing and planarization processing is assumed. The wafer processing apparatus 106 may perform processing other than the above-described processing.

  The wafer processing apparatus 106 includes a processing space forming unit 112 in which a processing space 111 is formed, a processing apparatus main body disposed in the processing space 111 to process the wafer 32 in the processing space 111, and an atmospheric gas filled in the processing space 111. And a processing space adjusting device for adjusting. The processing space adjusting device is realized by a fan filter unit or the like.

  The wafer transfer device 107 includes a preparatory space forming unit 117 in which the preparatory space 116 is formed, the substrate transfer robot 31 arranged in the preparatory space 116, and a FOUP opener 118 which is an opening / closing device for opening / closing the FOUP 102. And an aligner 119 arranged in the preparation space 116 for adjusting the orientation of the wafer 32, and a preparation space adjusting device 120 for adjusting the atmospheric gas filled in the preparation space 116. The preparation space adjusting device 120 is realized by a fan filter unit or the like.

The processing space 111 and the preparation space 116 are filled with an atmosphere gas having high cleanliness. The processing space 111 and the preparation space 116 are spaces in which contamination control is performed, and suspended fine particles in the air are managed at a limited cleanliness level or less, and if necessary, temperature, humidity, pressure, etc. It is also a space where environmental conditions are managed. In the present embodiment, the processing space 111 and the preparation space 116 are kept clean so as not to adversely affect the processing of the wafer 32. As the cleanliness, for example, CLASS1 defined by the International Organization for Standardization (abbreviated to ISO) is adopted.

  The processing space forming unit 112 and the preparation space forming unit 117 are arranged side by side in the front-back direction X orthogonal to the vertical direction Z. Hereinafter, in the front-rear direction X, the direction from the processing space forming unit 112 toward the preparation space forming unit 117 is referred to as front X1, and the opposite direction is referred to as rear X2. A direction orthogonal to the up-down direction Z and the front-rear direction X is referred to as a left-right direction Y.

  The preparation space forming unit 117 is formed in a rectangular parallelepiped box shape, and a preparation space 116 having a rectangular parallelepiped shape is formed. The preparation space forming unit 117 has a front wall 121 and a back wall 122. The front wall 121 and the rear wall 122 are arranged at intervals in the front-rear direction X. The rear wall 122 is arranged on the rear side X2 with respect to the front wall 121, and partitions the preparation space 116 and the processing space 111.

  The front wall 121 is formed with a front opening 131 penetrating in the front-rear direction X which is the thickness direction of the front wall 121. The front side opening 131 is formed so that the wafer 32 can pass therethrough. Through such a front side opening 131, the wafer 32 is moved from the hoop inner space 105 to the preparation space 116 or from the preparation space 116 to the hoop inner space 105. In the present embodiment, four front side openings 131 are provided. The front openings 131 are arranged at equal intervals in the left-right direction Y.

  A rear side opening 132 is formed in the rear wall 122 so as to penetrate in the front-rear direction X which is the thickness direction of the rear wall 122. The back side opening 132 is formed so that the wafer 32 can pass therethrough. The wafer 32 is moved from the preparation space 116 to the processing space 111 or from the processing space 111 to the preparation space 116 via the rear side opening 132. In the present embodiment, two rear side openings 132 are provided. The back side openings 132 are arranged at intervals in the left-right direction Y.

  The hoop opener 118 is arranged on the front X1 side of the preparation space forming unit 117. The hoop opener 118 constitutes a part of the front wall 121 of the preparation space forming part 117, and the front plate 141 in which the front opening 131 is formed, and the opener side door 142 detachably provided to the front plate 141. And a hoop support portion 143 that is arranged in front of the preparation space 116 and supports the hoop 102 from below, and a door opening / closing mechanism 144 that opens and closes the opener side door 142 and the hoop side door 104. By mounting the opener-side door 142 on the front plate 141, the front-side opening 131 is closed, and by removing the opener-side door 142 from the front plate 141, the front-side opening 131 is opened.

  The hoop 102 is positioned and installed on the hoop support portion 143. When the hoop 102 is installed on the hoop support 143, the opening 103a of the hoop body 103 and the opening 141a of the front plate 141 are in contact with each other over the entire circumference. Therefore, in the installed state, even if the opener side door 142 and the hoop side door 104 are respectively separated from the openings 141a and 103a, outside air is prevented from entering the hoop inner space 105 and the preparation space 116.

  The door opening / closing mechanism 144 directly or indirectly holds the opener side door 142 and the hoop side door 104. The door opening / closing mechanism 144 moves the doors 142 and 104 between the mounting position and the opening position. At the mounting position, the doors 142 and 104 are mounted to the openings 141a and 103a, respectively, and thereby the communication between the hoop inner space 105 and the preparation space 116 is blocked. At the open position, the doors 142 and 104 are separated from the openings 141a and 103a, so that the hoop inner space 105 and the preparation space 116 communicate with each other. In the open position, the doors 142 and 104 are arranged in the rear X2 and the lower Z2 in the preparation space 116 with respect to the openings 141a and 103a. In the preparation space 116, a movable area 145 for moving the doors 142 and 104 between the mounting position and the opening position is set.

  In this embodiment, four hoop openers 118 are provided. The hoop openers 118 are arranged at equal intervals in the left-right direction Y. Each hoop opener 118 is individually operable. FIG. 4 shows a state in which the front side opening located at the left end of the front side opening 131 is opened, and the remaining front side openings other than the front side opening located at the left end of the front side opening 131 are closed.

  The preparation space forming part 117 further has a bottom wall part 126. The lower ends of the front wall 121 and the back wall 122 are connected to the bottom wall 126. The aligner 119 and the substrate transfer robot 31 are fixed to the bottom wall 126. The aligner 119 and the substrate transfer robot 31 are arranged at intervals in the left-right direction Y.

  The aligner 119 has a holding unit that holds the wafer 32. The aligner 119 rotates the wafer 32 held by the holding unit, and adjusts the orientation of the wafer 32 so that the notch or orientation flat formed on the wafer 32 is oriented in a predetermined direction.

  The substrate transfer robot 31 is arranged near the rear wall 122 in the preparation space 116. Further, the substrate transfer robot 31 is arranged at a central position in the left-right direction Y between the hoop opener 118 at one end in the left-right direction and the hoop opener 118 at the other end in the left-right direction. In the substrate transfer robot 31, the base 46 of the base 34 is fixed to the bottom wall 126 of the preparation space forming unit 117. The upper surface of the bottom wall portion 126 serves as the predetermined installation surface 45.

  The substrate transfer robot 31 further includes a controller 151. The controller 151, based on a predetermined operation program or a movement command input by the user, and the detection results from the first to fourth encoders 75, 80, 85, the first to third turning drive means 41 to 43. Then, the elevation drive means 48 is controlled to move the robot hand 35. The controller 151 sends a memory circuit in which a predetermined program is stored, an arithmetic circuit for operating the program stored in the memory circuit, and a signal indicating the arithmetic result of the arithmetic circuit to the first to third turning drive means 41 to 43. And an output means for giving the elevation drive means 48. The storage circuit is realized by a RAM (Random Access Memory) and a ROM (Read Only Memory), and the arithmetic circuit is realized by a CPU (Central Processing Unit).

  In the substrate transfer robot 31, the first to third turning drive units 41 to 43 and the elevation drive unit 48 are controlled by the controller 151, whereby the robot hand 35 is moved in the movable range in the front-rear direction X, the left-right direction Y, and the vertical direction. It is moved to any position in the direction Z. By moving the robot hand 35 in this way, the wafer 32 held by the robot hand 35 can be moved.

  In such a semiconductor processing facility 101, the substrate transfer robot 31 mainly moves the wafer 32 in the preparation space 116. The substrate transfer robot 31 takes out the wafer 32 from the hoop inner space 105 through the front opening 131, and inserts the wafer 32 into the hoop inner space 105 through the front opening 131. Further, the substrate transfer robot 31 takes out the wafer 32 from the processing space 111 via the rear side opening 132, and inserts the wafer 32 into the processing space 111 via the rear side opening 132.

  When transferring the wafer 32 from the hoop 102 to the wafer processing apparatus 106, the substrate transfer robot 31 first causes the robot hand 35 to enter the hoop inner space 105 through the front opening 131. Then, the robot hand 35 grips the wafer 32 placed at the wafer accommodation position in the hoop inner space 105. Next, with the wafer 32 being held by the robot hand 35, the robot hand 35 is caused to enter the processing space 111 via the preparation space 116 and further via the rear side opening 132. Then, the wafer 32 held by the robot hand 35 is placed at the wafer placement position 156 in the processing space 111.

  Further, when the substrate transfer robot 31 transfers the wafer 32 from the wafer processing apparatus 106 to the hoop 102, first, the robot hand 35 enters the processing space 111 through the rear side opening 132. Then, the wafer 32 mounted on the wafer mounting position 156 in the processing space 111 is gripped by the robot hand 35. Next, while holding the wafer 32 by the robot hand 35, the robot hand 35 is caused to enter the hoop inner space 105 through the preparation space 116 and further through the front opening 131. Then, the wafer 32 held by the robot hand 35 is placed at the wafer accommodation position in the hoop inner space 105.

  When the wafer 32 is transferred from the hoop 102 to the wafer processing apparatus 106, the substrate transfer robot 31 once transfers the wafer 32 taken out from the hoop 102 to the aligner 119. The orientation of the wafer 32 transferred to the aligner 119 is adjusted by the aligner 119. Therefore, the wafer 32 can be inserted into the wafer processing apparatus 106 with its orientation adjusted, so that the wafers 32 can be oriented in the same direction during processing by the wafer processing apparatus 106.

  According to the present embodiment as described above, the first motor 71 is arranged so that the rotating portion 74 rotates about the rotation axis L21 that is substantially parallel to the extending direction of the first arm portion 36. In consideration of the fact that the first motor 71 has a dimension in the direction parallel to the rotation axis L21 of the rotating portion 74 larger than that in the direction perpendicular to the rotation axis L21 of the rotating portion 74, the first motor 71 is, as described above. Since 71 is arranged, it is not necessary to project a part of the first arm portion 36 in a direction perpendicular to the extending direction thereof in order to secure a space for disposing the first motor 71. Therefore, it is possible to prevent the first arm portion 36 from becoming large in size, and thus it is possible to prevent interference between the first arm portion 36 and an external object.

  Further, the second motor 76 is arranged such that the rotating portion 79 rotates about a rotation axis L22 that is substantially parallel to the extending direction of the first arm portion 36. In consideration of the fact that the dimension of the second motor 76 in the direction parallel to the rotation axis L22 of the rotation unit 79 is larger than the dimension of the rotation unit 79 in the direction perpendicular to the rotation axis L22, the second motor 76 is described above. Since 76 is arranged, it is not necessary to project a part of the first arm portion 36 in a direction perpendicular to the extending direction thereof in order to secure a space for disposing the second motor 76. Therefore, it is possible to prevent the first arm portion 36 from becoming large in size, and thus it is possible to prevent interference between the first arm portion 36 and an external object.

  Furthermore, the third motor 81 is arranged such that the rotating portion 84 rotates about a rotation axis L23 that is substantially parallel to the extending direction of the second arm portion 37. Considering that the dimension of the third motor 81 in the direction parallel to the rotation axis L23 of the rotating portion 84 is larger than the dimension of the rotation portion 84 in the direction perpendicular to the rotation axis L23, the third motor 81 is as described above. Since 81 is arranged, it is not necessary to project a part of the second arm portion 37 in a direction perpendicular to the extending direction thereof in order to secure a space for disposing the third motor 81. Therefore, it is possible to prevent the second arm portion 37 from becoming large in size, and thus it is possible to prevent interference between the second arm portion 37 and an external object.

  In this embodiment, the substrate transfer robot 31 is used in the semiconductor processing equipment 101 as described above. In this case, the external objects include the front wall 121 and the back wall 122, and also the hoop opener 118. Since the preparation space 116 is made as small as possible in order to easily realize a predetermined cleanliness, interference problems are likely to occur when the wafer 32 is transferred. Since the substrate transfer robot 31 of the present embodiment prevents interference as described above, it can be suitably used for transferring the wafer 32 in the semiconductor processing facility 101.

  Further, according to the present embodiment, since the second motor 76 is provided in the first arm portion 36, compared with the case where it is provided in the base 34, the second motor 76 is connected to the joint between the first and second arm portions 36, 37. The distance to the second motor 76 becomes shorter. Therefore, it is possible to simplify the configuration of the second power transmission unit 77 and prevent the accumulation of errors in the second power transmission unit 77. As a result, the positioning accuracy of the distal end portion 33b of the robot arm 33 can be improved, and thus the positioning accuracy of the robot hand 35 can be improved. Also, the hysteresis can be reduced.

  Further, since the third motor 81 is provided in the second arm portion 37, the distance from the joint between the second arm portion 37 and the robot hand 35 to the third motor 81 is shorter than in the case where the third motor 81 is provided in the base 34. Become. Therefore, it is possible to simplify the configuration of the third power transmission unit 82 and prevent the accumulation of errors in the third power transmission unit 82. As a result, the accuracy of the posture of the robot hand 35 can be improved. Also, the hysteresis can be reduced.

  In the present embodiment, the substrate transfer robot 31 is used in the semiconductor processing equipment 101 as described above, and transfers the wafer 32 between the hoop 102 and the wafer processing apparatus 106. In this case, it is necessary to increase the positioning accuracy and posture accuracy of the robot hand 35. For example, when the robot hand 35 enters the hoop 102, it is necessary to prevent the robot hand 35 from undesirably contacting the wafer 32 in the hoop 102 and damaging the wafer 32. Since the substrate transfer robot 31 of the present embodiment has improved positioning accuracy and attitude accuracy of the robot hand 35 as described above, it can be suitably used for transferring the wafer 32 in the semiconductor processing equipment 101.

  Further, according to the present embodiment, the second motor 76 is provided in the first arm portion 36, which is the arm portion on the base 34 side, of the first and second arm portions 36, 37. Therefore, the mass of the second arm portion 37 can be reduced as compared with the case where the second motor 76 is provided in the second arm portion 37, which is the arm portion on the robot hand 35 side. As a result, the second arm portion 37 can be swung with respect to the first arm portion 36 with a small force.

  FIG. 6 is a sectional view showing a simplified configuration of a substrate transfer robot 161 according to the second embodiment of the present invention. FIG. 7 is a plan view of the substrate transfer robot 161 seen from above in FIG. Since the substrate transfer robot 161 of the present embodiment is similar to the substrate transfer robot 31 of the first embodiment described above, corresponding parts are designated by the same reference numerals, and only different points will be described.

  A cylindrical other end side communication hole 162 communicating with the internal space 51 of the first arm portion 36 is formed in a portion of the first arm portion 36 near the other end portion 36b in the extending direction, and also projects outward. A cylindrical protrusion 163 is formed. The axis of the other end side communication hole 162 is parallel to the axis of the one end side communication hole 52 of the first arm portion 36. The inner hole 164 of the protrusion 163 is coaxial with the other end side communication hole 162, and communicates with the internal space 51 of the first arm part 36 via the other end side communication hole 162.

  A cylindrical one end side communication hole 165 that communicates with the internal space 54 of the second arm portion 37 is formed in a portion of the second arm portion 37 near the one end portion 37 a in the extending direction. The axis of the one end side communication hole 165 extends in a direction perpendicular to the extending direction of the second arm portion 37.

  The projecting portion 163 of the first arm portion 36 is coaxially and gently inserted into the communication hole 165 on the one end side of the second arm portion 37, whereby the first and second arm portions 36 and 37 are moved to the second turning axis L12. They are pivotally connected to each other relative to each other. The axes of the one-end side communication hole 165 and the protrusion 163 form a straight line common to the second turning axis L12. Bearing means is interposed between the projecting portion 163 of the first arm portion 36 and the formation portion 165a of the one end side communication hole 165 of the second arm portion 37, whereby the second arm portion 37 with respect to the first arm portion 36 is provided. It is possible to make a smooth turn.

  In the second motor 76, the fixed portion 78 is fixed to the second arm portion 37, and the rotating portion 79 rotates with respect to the fixed portion 78 about a rotation axis L22 substantially parallel to the extending direction of the second arm portion 37. To do. The second power transmission unit 77 is interposed between the second motor 76 and the first arm unit 36, and transmits the power of the second motor 76 from the rotating unit 79 of the second motor 76 to the first arm unit 36. .. The second turning drive unit 166 is configured to include the second motor 76 and the second power transmission unit 77 as described above. The first and second arm portions 36, 37 are driven to rotate relative to each other by such a second turning drive means 166.

  The second motor 76 and the second power transmission section 77 are housed in the internal space 54 of the second arm section 37. Even in this case, as in the case of the first embodiment described above, it is possible to prevent the cleanliness around the substrate transfer robot 161 from decreasing.

  According to the present embodiment, the second motor 76 is arranged so that the rotating portion 79 rotates about the rotation axis L22 that is substantially parallel to the extending direction of the second arm portion 37. It is not necessary to project a part of the second arm portion 37 in a direction perpendicular to the extending direction of the second arm portion 37 in order to secure an arrangement space for the 76. Therefore, it is possible to prevent the second arm portion 37 from becoming large in size, and thus it is possible to prevent interference between the second arm portion 37 and an external object.

  Further, according to the present embodiment, since the second motor 76 is provided in the second arm portion 37, compared with the case where the second motor 76 is provided in the base 34, The distance to the second motor 76 becomes shorter. Therefore, it is possible to simplify the configuration of the second power transmission unit 77 and prevent the accumulation of errors in the second power transmission unit 77. As a result, similarly to the first embodiment described above, the positioning accuracy of the distal end portion 33b of the robot arm 33 can be improved, and thus the positioning accuracy of the robot hand 35 can be improved. Also, the hysteresis can be reduced.

  FIG. 8 is a sectional view showing a simplified configuration of a substrate transfer robot 171 according to the third embodiment of the present invention. FIG. 9 is a plan view of the substrate transfer robot 171 viewed from above in FIG. Since the substrate transfer robot 171 of the present embodiment is similar to the substrate transfer robot 31 of the first embodiment described above, the corresponding parts are designated by the same reference numerals, and only different points will be described.

  A cylindrical one end side communication hole 172 communicating with the internal space 51 of the first arm portion 36 is formed in a portion of the first arm portion 36 near the one end portion 36a in the extending direction, and a cylindrical shape that protrudes outward. The protruding portion 173 is formed. The axis of the one end side communication hole 172 is perpendicular to the extending direction of the first arm portion 36. The inner hole 174 of the protruding portion 173 is coaxial with the one end side communication hole 172, and communicates with the internal space 51 of the first arm part 36 via the one end side communication hole 172.

  A cylindrical communication hole 176 that communicates with the inner hole 175 of the movable portion 47 is formed on the upper portion of the movable portion 47 that is the upper portion 34 a of the base 34. The communication hole 176 is coaxial with the inner hole 175 of the movable portion 47. The communication hole 176 is opened to face upward.

  The projecting portion 173 of the first arm portion 36 is coaxially and gently inserted through the communication hole 176 of the movable portion 47, whereby the base 34 and the first arm portion 36 are relatively positioned around the first turning axis L11. Is pivotally connected to. The axes of the communication hole 176 and the protrusion 173 form a straight line common to the first turning axis L11. Bearing means is interposed between the projecting portion 173 of the first arm portion 36 and the forming portion 176a of the communication hole 176 of the movable portion 47, thereby facilitating the swiveling of the first arm portion 36 with respect to the base 34. be able to.

  The fixed portion 73 of the first motor 71 is fixed to the movable portion 47 of the base 34, and the rotating portion 74 rotates with respect to the fixed portion 73 around a rotation axis L21 parallel to the first turning axis L11. The first power transmission unit 72 is interposed between the first motor 71 and the first arm unit 36, and transmits the power of the first motor 71 from the rotating unit 74 of the first motor 71 to the first arm unit 36. .. The first turning drive means 177 is configured to include the first motor 71 and the first power transmission section 72 as described above. The base 34 and the first arm portion 36 are driven to rotate relative to each other by the first turning drive means 177.

  The first motor 71 and the first power transmission portion 72 are housed in the inner hole 175 of the movable portion 47 of the base 34. Even in this case, it is possible to prevent the cleanliness around the substrate transfer robot 171 from being lowered, as in the first embodiment.

  FIG. 10 is a sectional view showing a simplified configuration of a substrate transfer robot 181 which is a fourth embodiment of the present invention. FIG. 11 is a plan view of the substrate transfer robot 181 seen from above in FIG. Since the substrate transfer robot 181 of the present embodiment is similar to the substrate transfer robot 31 of the above-described first to third embodiments, the corresponding parts are designated by the same reference numerals, and only different points will be described.

  The substrate transfer robot 181 of the present embodiment basically has the same configuration as the substrate transfer robot 31 of the first embodiment described above, and the joint between the first and second arm portions 36 and 37 is described above. The substrate transfer robot 161 of the second embodiment has the same configuration, and the joint between the base 34 and the first arm portion 36 has the same configuration as the substrate transfer robot 171 of the third embodiment.

  FIG. 12 is a sectional view showing the configuration of the second power transmission unit 186 in the substrate transfer robot according to the fifth embodiment of the present invention. In FIG. 12, the configuration of the second power transmission unit 186 is simplified for the sake of simplicity. Since the substrate transfer robot of the present embodiment is similar to the substrate transfer robot 31 of the first embodiment described above, corresponding parts are designated by the same reference numerals and only different points will be described.

  In the present embodiment, the second gear 92 and the intermediate gear 93b of the respective intermediate gears 93 that meshes with the second gear 92 are realized by bevel gears. Also in the present embodiment as described above, the power of the second motor 76 can be transmitted from the rotating portion 79 of the second motor 76 to the projecting portion 56 of the second arm portion 37, as in the above-described first embodiment. ..

  In the present embodiment, the second gear 92 and the intermediate gear 93b that meshes with the second gear 92 among the intermediate gears 93 are realized by bevel gears, but instead of this, among the intermediate gears 93, The two intermediate gears meshing with each other may be realized by bevel gears. Even in this case, the power of the second motor 76 can be transmitted from the rotating portion 79 of the second motor 76 to the protruding portion 56 of the second arm portion 37.

  Each of the above-described embodiments is merely an example of the present invention, and the configuration can be changed within the scope of the present invention. For example, the robot arm 33 may be composed of a plurality of arm portions, and therefore the number of arm portions is not limited to two and may be three or more. In this case, the two arm portions connected to each other are provided so as to be rotatable relative to each other, and the turning drive means is provided for each joint between the two arm portions connected to each other.

  In the second power transmission unit 77, two gears that mesh with each other among the plurality of gears 91 to 93 may be realized by worm gears instead of bevel gears.

  The second power transmission unit 77 may transmit the power of the second motor 76 from the rotation unit 79 of the second motor 76 to the protrusion 56 of the second arm unit 37 via the belt. In this case, the belt rotates the rotation axis L22 of the rotating portion 79 of the second motor 76 or the rotation axis parallel to the rotation axis L22 to the second rotation axis L12 or the rotation axis parallel to the second rotation axis L12. It may be configured to be converted into rotation around.

  The second arm portion 37 may be provided with a plurality of robot hands. In this case, the number of wafers 32 that can be transferred at one time can be increased, and work efficiency can be improved. Each robot hand is provided so as to be relatively rotatable with respect to the second arm portion 37. Another turning drive means is provided for each robot hand, and each robot hand is individually turned and driven by each other turning drive means. The robot hands are provided so as to be displaced in the vertical direction Z, which prevents the robot hands from interfering with each other even when the robot hands are individually driven to rotate.

  The substrate transfer robot can also be used in substrate processing equipment for processing substrates other than the wafer 32. The substrate transfer robot transfers the substrate from the substrate storage container to the substrate processing apparatus via the preparation space in which the atmospheric gas is adjusted, and from the substrate processing device to the substrate storage container via the preparation space. Transfer the substrate. The substrate may be a semiconductor substrate or a glass substrate used in a liquid crystal display device or the like. The substrate transfer robot is preferably used in a clean room.

  In the present invention, substantially parallel includes parallel.

31, 161, 171, 181 Substrate transfer robot 33 Semiconductor wafer 34 Base 35 Robot hand 36 First arm part 37 Second arm part 41, 177 First turning drive means 42, 166 Second turning drive means 43 Third turning drive Means 71 First motor 72 First power transmission unit 76 Second motor 77,186 Second power transmission unit 81 Third motor 82 Third power transmission unit

Claims (6)

Base
A robot hand that holds the board,
It has a plurality of hollow arm portions formed to extend, each arm portion is connected in series, one end arm portion is connected to the base, the other end arm portion is connected to the robot hand, A robot arm in which two arm portions connected to each other are provided so as to be rotatable relative to each other;
Swivel drive means provided for each joint between the two arm parts connected to each other, and rotatingly driving the two arm parts connected to each other relative to each other,
The swing drive means
A fixed part fixed to one of the two arm parts connected to each other, and a rotating part that rotates with respect to the fixed part around a rotation axis substantially parallel to the extending direction of the one arm part, A motor housed in the internal space of the one arm portion,
It is housed in the internal space of the one arm portion and is interposed between the motor and the other of the two arm portions connected to each other, and transmits the power of the motor from the rotating portion of the motor to the other arm portion. A substrate transfer robot comprising a power transmission unit.   The substrate transfer robot according to claim 1, wherein the one arm portion is a base side arm portion.   The substrate transfer robot according to claim 1 or 2, wherein the power transmission unit transmits the power of the motor from the rotation unit of the motor to the other arm unit by a plurality of gears. The power transmission section is
A first gear fixed to the rotating part of the motor coaxially with the rotation axis of the rotating part;
A second gear that is fixed to the other arm portion coaxially with the turning axes of the one and the other arm portions;
A plurality of intermediate gears interposed between the first and second gears,
The substrate transfer robot according to claim 3, wherein the intermediate gear is fixed to the one arm portion, and each intermediate gear has a gear accommodating box that is accommodated in a rotatable state about a rotation axis of each intermediate gear. A substrate transfer robot in which a robot hand is provided so as to be relatively rotatable with respect to the arm portion at the one end,
Including other turning drive means for turning the robot hand relative to the arm portion at the one end,
The other turning drive means is
A fixed portion provided on the arm portion at the one end, and a rotating portion that rotates with respect to the fixed portion about a rotation axis that is substantially parallel to the extending direction of the arm portion at the one end. Other motors housed in the internal space,
Another power transmission unit that is housed in the internal space of the arm unit at the one end and is interposed between the other motor and the robot hand, and transmits the power of the other motor from the rotating unit of the other motor to the robot hand. The substrate transfer robot according to claim 1, further comprising: A substrate transfer robot for transferring a semiconductor wafer as a substrate,
6. The substrate transfer robot according to claim 1, wherein the semiconductor wafer is transferred between a container accommodating the semiconductor wafer and a treatment device that processes the semiconductor wafer.

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