JP2020067403A - Electromagnetic wave detection device - Google Patents

Abstract

To maintain detection accuracy of an electromagnetic wave.SOLUTION: An electromagnetic wave detection device 10 has a radiation unit 11, a first detection unit 16, an advancing unit 14, a storage unit 18, and a control unit 19. The radiating unit 11 radiates an electromagnetic wave. In the radiation unit 11, a direction of radiation of the electromagnetic wave can be changed. The first detection unit 16 detects a reflected wave of the electromagnetic wave irradiated on a target ob. The advancing unit 14 can switch a traveling direction of the electromagnetic wave to a detection direction for each pixel px. The first detection unit 16 is arranged in the detection direction. The storage unit 18 stores a correspondence relationship. With respect to an optional value of one of radial direction and a coordinate in the correspondence relationship, the control unit 19 adds a plurality of search values different in size to the other of the radial direction and the coordinate, respectively. The control unit 19 calibrates the correspondence relationship based on a plurality of detection signals using a plurality of search correspondence relationships added with the plurality of search values, respectively.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electromagnetic wave detection device.

  2. Description of the Related Art In recent years, there is known a device that detects an electromagnetic wave by radiating the electromagnetic wave radiated for each part of a target region of a measurement target to a photoelectric converter side by a part of pixels in a spatial modulation element such as a DMD (Patent Document 1). 1).

JP, 2005-351851, A

  In such a device, maintaining the detection accuracy of electromagnetic waves is beneficial.

  Therefore, an object of the present disclosure made in view of the above-described problems of the related art is to maintain the detection accuracy of electromagnetic waves.

In order to solve the above-mentioned problems, the electromagnetic wave detection device according to the first aspect is
The emission direction that maximizes the intensity can be changed, and the emission part that emits electromagnetic waves,
A first detection unit that detects a reflected wave of the electromagnetic wave with which the target is irradiated;
A plurality of pixels are arranged along a reference plane, and a traveling direction capable of switching a traveling direction of an electromagnetic wave incident on the reference plane from the object for each pixel to a detection direction in which the first detecting unit is arranged, ,
A storage unit that stores a correspondence relationship between the radiation direction and the coordinates of the pixel that advances in the detection direction;
In the correspondence relationship, for any value of one of the radial direction and the coordinate, using a plurality of search correspondence relationships in which a plurality of search values having different sizes are added to the other, to the advancing unit, The correspondence relationship is based on a plurality of detection signals corresponding to a plurality of search values, which are detected by the first detection unit by switching the pixel to the detection direction and causing the emission unit to emit the electromagnetic wave. And a control unit for calibrating.

  Although the solution means of the present disclosure has been described as an apparatus and a system as described above, the present disclosure can also be realized as an aspect including these, and a method, a program substantially equivalent to these, It can also be realized as a storage medium recording a program, and it should be understood that these are also included in the scope of the present disclosure.

  According to the present disclosure configured as described above, the detection accuracy of electromagnetic waves can be maintained.

It is a block diagram which shows schematic structure of the electromagnetic wave detection apparatus which concerns on this embodiment. It is a conceptual diagram which shows the correspondence of the radiation direction and the coordinate of the pixel in the advancing part. It is a table which shows the corresponding relationship tabulated. 3 is a timing chart showing the timing of emission of electromagnetic waves and the timing of detection for explaining the principle of distance measurement by a distance measurement sensor configured by the radiation unit, the first detection unit, and the control unit of FIG. 1. 9 is a table showing a plurality of search correspondences tabulated in a configuration in which a search value is a displacement amount to a coordinate. 9 is a table showing a plurality of search correspondences tabulated in a configuration in which a search value is a variation amount in a radial direction. 7 is a flowchart for explaining a correspondence relationship calibration process by the first method executed by the control unit of FIG. 1. 7 is a flowchart for explaining a correspondence calibration process by a second method executed by the control unit of FIG. 1. It is a block diagram which shows schematic structure of the modification of the electromagnetic wave detection apparatus which concerns on this embodiment.

  Hereinafter, an embodiment of an electromagnetic wave detection device to which the present invention is applied will be described with reference to the drawings. A radiation part that emits electromagnetic waves so that the radiation position to the target can be changed, a detection part that detects electromagnetic waves reflected and scattered in the target, and some of the pixels can be switched by switching multiple pixels with respect to the electromagnetic waves traveling from the target side. An electromagnetic wave detection device is provided that includes an advancing unit that advances an incident electromagnetic wave to the detection unit. In such an electromagnetic wave detection device, the emission position of the electromagnetic wave on the target and the arrival position of the electromagnetic wave emitted from the emission position on the traveling portion correspond to each other. Therefore, in the electromagnetic wave detection device, it is possible to improve the detection accuracy of the electromagnetic wave by determining the pixel that advances the incident electromagnetic wave to the detection unit according to the radiation position and controlling the traveling unit and the radiation unit. However, due to thermal deformation and changes over time in the components of the electromagnetic wave detection device such as the radiation part and the traveling part, the correspondence relationship between the radiation position of the electromagnetic wave estimated based on the control of the radiation part and the pixel that advances toward the detection part. May change. When the correspondence changes in this way, the pixel at a position different from the arrival position on the traveling part of the electromagnetic wave scattered at the actual radiation position on the target can be switched so as to cause the electromagnetic wave to travel to the detection part. As a result, the detection accuracy of the radiated electromagnetic wave cannot be maintained, and the detection accuracy may decrease. Therefore, the electromagnetic wave detection device to which the present invention is applied scatters the electromagnetic wave reaching the pixel at the arrival position on the traveling part of the electromagnetic wave scattered at the actual radiation position, or reaching any pixel, based on the detection result of the detection part. By estimating the actual radiation position on the target and adjusting the correspondence, the detection accuracy of electromagnetic waves can be maintained.

  As illustrated in FIG. 1, an electromagnetic wave detection device 10 according to an embodiment of the present disclosure includes a radiation unit 11, a pre-stage optical system 12, a separation unit 13, a traveling unit 14, a post-stage optical system 15, and a first detection unit 16. The second detection unit 17, the storage unit 18, and the control unit 19 are included.

  In the following figures, broken lines connecting the respective functional blocks show the flow of control signals or information to be communicated. The communication indicated by the broken line may be wired communication or wireless communication. The solid line protruding from each functional block indicates a beam-shaped electromagnetic wave.

  The radiating unit 11 can change the radiating direction that maximizes the intensity and radiates an electromagnetic wave. In the present embodiment, the radiation unit 11 is configured to include, for example, the radiation source 20 and the scanning unit 21. In the present embodiment, the scanning unit 21 changes the radiation direction of the electromagnetic wave emitted by the radiation source 20.

  The radiation source 20 emits at least one of infrared rays, visible light, ultraviolet rays, and radio waves, for example. In the present embodiment, the radiation source 20 emits infrared rays. The radiation source 20 radiates the radiated electromagnetic wave toward the target ob, directly or indirectly via the scanning unit 21. In the present embodiment, the radiation source 20 indirectly radiates the radiated electromagnetic wave toward the target ob through the scanning unit 21.

  In the present embodiment, the radiation source 20 emits a beam-shaped electromagnetic wave having a narrow width, for example, 0.5 °. Further, in the first embodiment, the electromagnetic wave emitted from the radiation source 20 has an elliptical cross-sectional shape having a long axis and a short axis. In addition, in the present embodiment, the radiation source 20 can radiate electromagnetic waves in a pulse shape.

  The radiation source 20 includes, for example, a Fabry-Perot laser diode, an LED (Light Emitting Diode), a VCSEL (Vertical Cavity Surface Emitting LASER), a photonic crystal laser, a gas laser, and a fiber laser. The radiation source 20 switches between radiating and stopping the electromagnetic wave under the control of the control unit 19 described later.

  The scanning unit 21 has, for example, a reflection surface that reflects electromagnetic waves, and changes the radiation direction of the electromagnetic waves by reflecting the electromagnetic waves emitted from the radiation source 20 while changing the direction of the reflection surface. When the scanning unit 21 changes the emission direction of the electromagnetic wave, the emission position of the electromagnetic wave with which the target ob is irradiated changes. That is, the scanning unit 21 scans the target ob using the electromagnetic waves emitted from the radiation source 20.

  The scanning unit 21 changes the radiation direction of the electromagnetic wave in a direction perpendicular to the first rotation axis, for example, by rotating the reflection surface around the first rotation axis. The scanning unit 21 scans the object ob in a one-dimensional direction by rotating the reflection surface around only the first rotation axis. Further, the scanning unit 21 rotates the reflection surface around a second rotation axis different from the first rotation axis, so that the electromagnetic wave is emitted in the direction perpendicular to the second rotation axis. The direction of radiation may be changed. The scanning unit 21 scans the object ob in a two-dimensional direction by rotating the reflecting surface around the first rotation axis and the second rotation axis. In the present embodiment, the scanning unit 21 scans the target ob in the two-dimensional direction.

  The scanning unit 21 may be arranged such that the first rotation axis is parallel to the elliptical long axis of the electromagnetic wave emitted by the radiation source 20. Alternatively, the scanning unit 21 may be arranged such that the first rotation axis and the second rotation axis are parallel to the elliptical major axis and the minor axis of the electromagnetic wave emitted by the radiation source 20, respectively. .

  The scanning unit 21 is configured such that at least a part of the irradiation area of the electromagnetic wave emitted from and reflected by the radiation source 20 is included in the electromagnetic wave detection range of the electromagnetic wave detection device 10. Therefore, at least a part of the electromagnetic waves emitted to the target ob via the scanning unit 21 can be detected by the electromagnetic wave detection device 10.

  The scanning unit 21 includes, for example, a MEMS (Micro Electro Mechanical Systems) mirror, a polygon mirror, a galvano mirror, a grating, and the like. In the present embodiment, the scanning unit 21 includes a MEMS mirror.

  The scanning unit 21 changes the direction in which electromagnetic waves are reflected under the control of the control unit 19 described later. The control unit 19 can calculate the radiation direction based on the drive signal input to the scanning unit 21 to change the direction in which the electromagnetic wave is reflected.

  The pre-stage optical system 12 includes, for example, at least one of a lens and a mirror, and forms an image of the object ob as a subject.

  The separation unit 13 is provided between the pre-stage optical system 12 and a primary image forming position which is an image forming position of the pre-stage optical system 12 for an image of the object ob which is separated from the pre-stage optical system 12 at a predetermined position. ing.

  The separating unit 13 separates the electromagnetic waves traveling in the incident direction di so as to travel in the first separating direction dd1 and the second separating direction dd2. The incident direction di may be parallel to the optical axis of the pre-stage optical system 12, for example. The separating unit 13 may move a part of the electromagnetic wave traveling in the incident direction di in the first separating direction dd1 and another part of the electromagnetic wave in the second separating direction dd2. Part of the electromagnetic waves that travel in the first separation direction dd1 may be electromagnetic waves of a specific wavelength among electromagnetic waves that travel in the incident direction di, and electromagnetic waves that travel in the second separation direction dd2 may be electromagnetic waves of other wavelengths. May be

  For example, the separating unit 13 may specifically cause the electromagnetic wave in the infrared band to travel in the first separating direction dd1 and the electromagnetic wave in the visible light band to travel in the second separating direction dd2. Conversely, the separating unit 13 may cause the electromagnetic waves in the visible light band to travel in the first separating direction dd1 and the electromagnetic waves in the infrared band to travel in the second separating direction dd2. Further, the separating unit 13 may cause the electromagnetic wave of short wavelength to travel in the first separating direction dd1 and the electromagnetic wave of long wavelength to travel in the second separating direction dd2. On the contrary, the separation unit 13 may cause the electromagnetic waves of long wavelength to travel in the first separation direction dd1 and the electromagnetic waves of short wavelength to travel in the second separation direction dd2.

  In the present embodiment, the separation unit 13 transmits a part of the electromagnetic wave traveling in the incident direction di in the first separation direction dd1 and reflects another part of the electromagnetic wave in the second separation direction dd2. The separation unit 13 may transmit a part of the electromagnetic wave traveling in the incident direction di in the first separation direction dd1 and another part of the electromagnetic wave in the second separation direction dd2. The separating unit 13 may refract a part of the electromagnetic wave traveling in the incident direction di in the first separating direction dd1 and another part of the electromagnetic wave in the second separating direction dd2. The separation unit 13 includes, for example, any one of a visible light reflection coating, a half mirror, a beam splitter, a dichroic mirror, a cold mirror, a hot mirror, a metasurface, and a deflecting element.

  The traveling unit 14 is located on the path of the electromagnetic wave traveling from the separating unit 13 in the first separating direction dd1. Further, the advancing unit 14 determines the primary imaging position of the image of the object ob which is separated from the pre-stage optical system 12 at a predetermined position by the pre-stage optical system 12 in the first separating direction dd1 from the separating unit 13 or the primary coupling. It is provided near the image position.

  In the present embodiment, the advancing unit 14 is provided at the image forming position. The traveling section 14 has a reference surface ss on which the electromagnetic waves that have passed through the pre-stage optical system 12 and the separating section 13 are incident. The reference plane ss is composed of a plurality of pixels px arranged along a two-dimensional shape. The reference surface ss is a surface that causes an action such as reflection and transmission of electromagnetic waves in at least one of a first state and a second state described later.

  The traveling unit 14 has an electromagnetic wave traveling in the first separation direction dd1 and incident on the reference surface ss in a first state in which the electromagnetic wave travels in the detection direction don and a second state in which the electromagnetic wave travels in the non-detection direction doff. It is possible to switch for each pixel px. In the present embodiment, the first state is a first reflection state in which the electromagnetic wave incident on the reference surface ss is reflected in the detection direction don. Further, the second state is a second reflection state in which the electromagnetic wave incident on the reference surface ss is reflected in the non-detection direction doff.

  In this embodiment, more specifically, the traveling unit 14 includes a reflection surface that reflects electromagnetic waves for each pixel px. The advancing unit 14 switches the first reflection state and the second reflection state for each pixel px by changing the direction of the reflection surface for each pixel px.

  In the present embodiment, the advancing unit 14 includes, for example, a DMD (Digital Micro mirror Device). The DMD can switch the reflection surface for each pixel px to any one of + 12 ° and −12 ° with respect to the reference surface ss by driving a minute reflection surface that constitutes the reference surface ss. is there. The reference surface ss is parallel to the plate surface of the substrate on which the minute reflecting surface of the DMD is placed.

  In the present embodiment, the DMD traveling unit 14 is arranged such that the rotation axis that inclines the reflection surface corresponds to the changing direction of the electromagnetic wave emission direction by the first rotation axis of the scanning unit 21. You may In other words, the displacement direction of the arrival position of the electromagnetic wave on the reference plane ss in response to the change of the radiation direction by the rotation of the reflection surface of the scanning unit 21 only around the first rotation axis tilts the reflection surface. It may be parallel to the axis of rotation.

  The advancing unit 14 switches the first state and the second state for each pixel px based on the control of the control unit 19 described later. For example, the advancing unit 14 may simultaneously switch some of the pixels px to the first state to cause the electromagnetic waves incident on the pixels px to travel in the detection direction don, and to move the other pixels px to the second position. By switching to the state, the electromagnetic wave incident on the pixel px can proceed in the non-detection direction doff.

  The rear optical system 15 is provided in the detection direction don from the traveling unit 14. The rear optical system 15 includes, for example, at least one of a lens and a mirror. The post-stage optical system 15 forms an image of the object ob as an electromagnetic wave whose traveling direction is switched in the traveling unit 14.

  The first detection unit 16 is provided on the path of an electromagnetic wave that travels in the detection direction don by the traveling unit 14 and then travels via the post-stage optical system 15. The first detection unit 16 detects an electromagnetic wave that has passed through the rear optical system 15, that is, an electromagnetic wave that travels in the detection direction don.

  In addition, in the present embodiment, the first detection unit 16 is configured such that at least a part of the emission region of the electromagnetic wave emitted from the emission unit 11 is included in the detection range. Therefore, in the present embodiment, the first detection unit 16 can detect at least a part of the electromagnetic waves emitted from the emission unit 11 to the target ob.

  In the present embodiment, the first detection unit 16 is an active sensor that detects a reflected wave of the electromagnetic wave radiated from the radiation unit 11 toward the target ob. Therefore, the first detection unit 16 detects, for example, at least one of infrared rays, visible rays, ultraviolet rays, and radio waves. In the present embodiment, the first detection unit 16 detects infrared rays. Further, in the present embodiment, the first detection unit 16 forms a scanning sensor in cooperation with the radiation unit 11 that can change the radiation direction.

  In the present embodiment, the first detection unit 16 more specifically includes an element that constitutes a distance measuring sensor. For example, the first detection unit 16 includes a single element such as an APD (Avalanche PhotoDiode), a PD (PhotoDiode), and a distance measurement image sensor. The first detection unit 16 may include an element array such as an APD array, a PD array, a ranging imaging array, and a ranging image sensor. Alternatively, the first detection unit 16 may include an element forming an image sensor or a thermosensor.

  In the present embodiment, the first detection unit 16 transmits detection information indicating that the reflected wave from the subject has been detected to the control unit 19 as a signal.

  It should be noted that the first detection unit 16 need only be capable of detecting electromagnetic waves in the configuration that is a single element that constitutes the distance measuring sensor described above, and need not be imaged on the detection surface. Therefore, the first detection unit 16 does not have to be provided at the secondary image forming position which is the image forming position of the post optical system 15. That is, in this configuration, the first detection unit 16 moves the post-stage optical system 15 to the post-stage optical system 15 after traveling in the detection direction don by the traveling unit 14 at a position where electromagnetic waves from all angles of view can be incident on the detection surface. It may be placed anywhere on the path of the electromagnetic wave traveling through.

  The second detection unit 17 is provided on the path of the electromagnetic wave traveling from the separation unit 13 in the second separation direction dd2. Further, the second detection unit 17 forms an image of the image of the object ob separated from the pre-stage optical system 12 at a predetermined position by the pre-stage optical system 12 in the second separation direction dd2 from the separation unit 13 or the relevant position. It is provided near the image formation position. The second detection unit 17 detects the electromagnetic wave traveling from the separation unit 13 in the second separation direction dd2.

  In the present embodiment, the second detection unit 17 is a passive sensor. In the present embodiment, the second detector 17 more specifically includes an element array. For example, the second detection unit 17 includes an image sensor such as an image sensor or an imaging array, captures an image of an electromagnetic wave formed on the detection surface, and generates image information corresponding to the captured object ob.

  In addition, in the present embodiment, the second detection unit 17 more specifically captures an image of visible light. The second detector 17 sends the generated image information as a signal to the controller 19.

  The second detector 17 may capture an image other than visible light, such as an image of infrared rays, ultraviolet rays, and radio waves. Therefore, the second detection unit 17 detects an electromagnetic wave that is different from or the same as that of the first detection unit 16.

  The second detection unit 17 may include a distance measuring sensor. In this configuration, the electromagnetic wave detection device 10 can acquire image-like distance information by the second detection unit 17. In addition, the second detection unit 17 may include a thermosensor or the like. In this configuration, the electromagnetic wave detection device 10 can acquire image-like temperature information by the second detection unit 17. Therefore, in the present embodiment, the second detection unit 17 may be a sensor different from or the same as the first detection unit 16.

  The storage unit 18 includes one or more memories. In the present embodiment, the memory is, for example, a semiconductor memory, a magnetic memory, an optical memory, or the like, but is not limited to these. Each memory included in the storage unit 18 may function as, for example, a main storage device, an auxiliary storage device, or a cache memory. The storage unit 18 stores arbitrary information used for the operation of the electromagnetic wave detection device 10. The storage unit 18 may store, for example, a system program, an application program, a correspondence relationship, a search value, and the like. The search value will be described later.

  The correspondence relationship indicates a direct or indirect correspondence between an arbitrary radiation direction of the electromagnetic wave emitted by the radiation unit 11 and the coordinates of the pixel px for switching the electromagnetic wave incident on the reference surface ss to the detection direction don. The indirect correspondence is a correspondence between the radial direction and the coordinate, which corresponds to both the radial direction and the coordinate, for example, via the coordinate on the virtual plane on which the electromagnetic wave emitted from the radiation unit 11 is irradiated. .

  The correspondence will be described below. As shown in FIG. 2, the electromagnetic wave radiated from the radiating unit 11 in an arbitrary radiating direction is applied to a small area fa on the target ob. The irradiated electromagnetic wave is reflected in the minute area fa. The reflected electromagnetic wave is focused by the front optical system 12 and reaches the pixel px at some coordinates on the reference plane ss of the traveling unit 14. By changing the radiation direction, the position of the minute area fa on the object ob irradiated with the electromagnetic wave changes. The coordinates of the pixel px reaching the traveling portion 14 of the reflected electromagnetic wave also change according to the change in the position of the minute area fa. The storage unit 18 has a correspondence relationship in which the coordinates of the pixel px, which the electromagnetic waves reflected in an arbitrary radiation direction reach, associated with the arbitrary radiation direction are designed in advance and, if necessary, calibrated during manufacturing, It is stored in. In the present embodiment, the correspondence relationship is, for example, as shown in FIG. 3, a table in which the coordinates co1, co2, co3, ... Are associated with each discrete radial direction dr1, dr2, dr3 ,. It is stored in the storage unit 18 as Tc. The coordinates associated with each of the discrete radiation directions may be the coordinates of a single pixel px or the coordinates of a plurality of pixels px adjacent to each other.

  The control unit 19 includes one or more processors and memories. The processor may include at least one of a general-purpose processor that loads a specific program and executes a specific function, and a dedicated processor that is specialized for a specific process. The dedicated processor may include an application-specific integrated circuit (ASIC; Application Specific Integrated Circuit). The processor may include a programmable logic device (PLD; Programmable Logic Device). The PLD may include an FPGA (Field-Programmable Gate Array). The control unit 19 may include at least one of SoC (System-on-a-Chip) and SiP (System In a Package) in which one or more processors cooperate.

  The control unit 19 acquires information about the surroundings of the electromagnetic wave detection device 10 based on the electromagnetic waves detected by the first detection unit 16 and the second detection unit 17, respectively. The information about the surroundings is, for example, image information, distance information, and temperature information. In the present embodiment, the control unit 19 uses the ToF (Time-of-Flight) method to irradiate the emitting unit 11 with an irradiation position based on the detection information detected by the first detecting unit 16, as described below. Get distance information for. Further, in the present embodiment, as described above, the control unit 19 acquires the electromagnetic waves detected by the second detection unit 17 as an image as image information.

  As shown in FIG. 4, the control unit 19 inputs an electromagnetic wave radiation signal into the radiation source 20 to cause the radiation source 20 to emit a pulsed electromagnetic wave (see the “electromagnetic wave radiation signal” column). The radiation source 20 radiates an electromagnetic wave based on the inputted electromagnetic wave radiation signal (see the "radiation section radiation amount" column). The electromagnetic wave emitted by the radiation source 20 and reflected by the scanning unit 21 and emitted to an arbitrary minute area fa is reflected in the minute area fa. The control unit 19 switches at least some of the pixels px in the image formation region in the traveling unit 14 by the upstream optical system 12 of the reflected wave of the minute region fa to the first state and sets the other pixels px to the second state. Switch to the state. Then, when detecting the electromagnetic wave reflected in the minute area fa (see the “electromagnetic wave detection amount” column), the first detection unit 16 notifies the control unit 19 of the detection information as described above.

  The control unit 19 has, for example, a time measurement LSI (Large Scale Integrated circuit), and acquires detection information from the time T1 when the radiation source 20 emits an electromagnetic wave (see the "Detection Information Acquisition" column). The time ΔT to T2 is measured. The control unit 19 calculates the distance to the radiation position by multiplying the time ΔT by the speed of light and dividing by 2.

  Before causing the radiation source 20 to radiate an electromagnetic wave, the control unit 19 applies a drive signal to cause the scanning unit 21 to radiate the electromagnetic wave in an arbitrary radiation direction, and performs scanning so that the electromagnetic wave can be radiated in the arbitrary radiation direction. The part 21 drives the reflecting surface. Furthermore, the control unit 19 gives the drive signal to the advancing unit 14 to switch some of the pixels px in the coordinates corresponding to the arbitrary radiation direction to the first state in the correspondence relationship read from the storage unit 18. The control unit 19 applies the drive signal to the traveling unit 14 to switch some of the pixels px having a corresponding relationship with the arbitrary radiation direction to the first state, and then, as described above, the radiation source. The emission of electromagnetic waves by 20 and the acquisition of detection information by the first detection unit 16 are executed. The control unit 19 calculates the position of the minute area fa irradiated with the electromagnetic wave based on the drive signal given to the scanning unit 21. The control unit 19 creates image-like distance information by calculating the distance to each micro area fa while changing the radiation direction.

  The control unit 19 has a calibration mode for calibrating the correspondence as an operation mode, as described below. In the calibration mode, the control unit 19 sets a plurality of search values having different magnitudes to the other associated value with respect to any one of the radial direction and the coordinate associated with each other in the corresponding relationship. In addition, a plurality of search correspondences are created.

5, the control unit 19, for example, each for a given radial direction, the coordinates associated with the correspondence relationship, a plurality of displacement Δco ₁ ~Δco _n of different sizes as the search value it allows to create a plurality of search correspondence Tcco ₁ ~Tcco _n added. Alternatively, as shown in FIG. 6, for example, the control unit 19 searches for a plurality of displacement amounts Δdr _{1 to} Δdr _n having different sizes in the radial direction associated with the arbitrary coordinates by the correspondence relationship. A plurality of search correspondences Tcdr _{1 to} Tcdr _n are created by adding each as a value.

The plurality of search values may change the radial direction or the coordinate in the correspondence relationship along a single direction. For example, in the configuration search value is displacement Δco ₁ ~Δco _n displacing the coordinates, a plurality of search values, the value of the original coordinates is varied along one direction on the reference plane ss. Alternatively, for example, in a configuration in which the search value is the variation amount Δdr _{1 to} Δdr _n that changes the radial direction, the plurality of search values changes the original radial direction along one direction. Alternatively, the plurality of search values may change the radial direction or the coordinate in the correspondence relationship along two different directions. In the present embodiment, the plurality of search values change the radial direction or the coordinate in the correspondence relationship along a single direction.

  In the configuration in which the plurality of search values change the radiation direction or the coordinate in the correspondence relationship along a single direction, the single direction further corresponds to the elliptical short axis of the electromagnetic wave emitted by the radiation source 20. You can do it. In other words, the single direction is parallel to the short axis of the image of the elliptical electromagnetic wave formed on the reference surface ss and reflected by the electromagnetic wave emitted by the radiation source 20 on the reference surface ss. .

  It should be noted that the plurality of search values are added to the value associated with the other one of the arbitrary values of the radial direction and the coordinates associated with each other in the correspondence relationship, but may be directly added. , May be added indirectly. Indirectly added means, for example, that the correspondence is the first partial correspondence of the radiation direction and the coordinates on the virtual plane on which the electromagnetic wave is irradiated, and the coordinates on the virtual plane on which the electromagnetic wave is irradiated and the coordinates of the traveling unit 14. In the configuration including the second partial correspondence relationship of, the addition to any one of the correspondence relationships is included. Even in the configuration that is indirectly added, the search value is added to the overall correspondence of the radial direction and the coordinates of the traveling portion 14 by synthesizing the first partial correspondence and the second partial correspondence. Is equivalent to

  The control unit 19 corresponds to each of the plurality of search values by causing the advancing unit 14 to switch the pixel px in the detection direction don and causing the emitting unit 11 to emit an electromagnetic wave in the emitting direction using the plurality of search correspondences. Then, the detection signal detected by the first detection unit 16 is acquired.

  In the configuration in which the search value is added to the coordinates, the control unit 19 drives the scanning unit 21 so that the radiation unit 11 can emit an electromagnetic wave in an arbitrary radiation direction. Further, the control unit 19 drives the advancing unit 14 so as to switch the pixel px of the coordinates corresponding to the arbitrary radial direction in the single search correspondence relationship to the first state. In this state, the control unit 19 causes the radiation source 20 to emit an electromagnetic wave, and acquires the detection signal detected by the first detection unit 16. Similarly, the control unit 19 acquires the detection signal in each of the other search correspondences.

  Alternatively, in the configuration in which the search value is added in the radial direction, the control unit 19 drives the advancing unit 14 to switch the pixel px at an arbitrary coordinate to the first state. Further, the control unit 19 drives the scanning unit 21 so that the electromagnetic waves can be emitted in the emission direction corresponding to the arbitrary coordinates in the single search correspondence. In this state, the control unit 19 causes the radiation source 20 to emit an electromagnetic wave, and acquires the detection signal detected by the first detection unit 16. Similarly, the control unit 19 acquires the detection signal in each of the other search correspondences.

  The control unit 19 calibrates the correspondence relationship based on the plurality of detection signals corresponding to the plurality of search values. More specifically, the control unit 19 determines, as the search value to be used for calibration, a single search value that maximizes the signal intensity among the plurality of acquired detection signals. The control unit 19 calibrates the correspondence by adding the search value used for the calibration to the correspondence. The control unit 19 stores the calibrated correspondence relationship in the storage unit 18 as a correspondence relationship used for subsequent distance measurement.

  The control unit 19 may create a search correspondence using a search value whose absolute value is within the upper limit value. The upper limit value may be set to the maximum value of the shift that is considered to occur in the correspondence relationship due to thermal deformation, change over time, or the like.

  Note that the plurality of search values may or may not be integral multiples of the search value having the smallest absolute value among the plurality of search values.

  Alternatively, the control unit 19 may create a plurality of search correspondences after determining the polarity of the search value used for calibration, that is, the sign of the search value, as described below. The control unit 19 switches the pixel px of an arbitrary coordinate to the first state via the advancing unit 14 by using the correspondence, as in the distance measurement, and associates the arbitrary coordinate with the correspondence. The radiation source 20 is caused to emit an electromagnetic wave in a state in which the electromagnetic wave can be emitted in the given radiation direction, and the detection signal is acquired as a reference signal.

  Next, the control unit 19 creates a search correspondence including the initial search value. The initial search value is, for example, a search value corresponding to the minimum adjustment amount that can be adjusted by the control unit 19, that is, a search value having a minimum absolute value. For example, in the configuration in which the search value is added to the coordinates, the initial search value is the interval between two adjacent pixels. Alternatively, in the configuration in which the search value is added in the radial direction, the initial search value is the minimum variable amount of the signal strength of the drive signal to the scanning unit 21. The minimum fluctuable amount is the minimum amount that the control unit 19 can adjust the fluctuation as a difference in signal strength between two drive signals having different signal strengths.

  The control unit 19 switches the pixel px at an arbitrary coordinate to the first state via the advancing unit 14 using the search correspondence including the initial search value, and associates the pixel px with the arbitrary coordinate in a corresponding relationship. The radiation source 20 is caused to radiate an electromagnetic wave in a state capable of radiating the electromagnetic wave in the given radiation direction, and a detection signal is acquired as an initial signal. The control unit 19 compares the signal strengths of the reference signal and the initial signal.

  When the signal strength of the reference signal is smaller than the signal strength of the initial signal, the control unit 19 determines that the polarity of the initial search value matches the polarity of the search value used for calibration. When the control unit 19 determines that the polarity of the initial search value matches the polarity of the search value used for calibration, the control unit 19 adds a plurality of search values having the same polarity as the initial search value in ascending order of the absolute values, thereby performing a plurality of searches. Create correspondence relationship. Further, the control unit 19 switches the pixel px of an arbitrary coordinate to the first state via the advancing unit 14 using each of the created plurality of search correspondences, and the search correspondence to the arbitrary coordinates. A plurality of detection signals are acquired by causing the radiation source 20 to emit an electromagnetic wave in a state in which the electromagnetic wave can be emitted in the radiation directions associated with each other. When acquiring the plurality of detection signals, the control unit 19 calibrates the correspondence relationship based on the plurality of detection signals as described above.

  When the signal strength of the reference signal is larger than the signal strength of the initial signal, the control unit 19 determines that the polarity of the initial search value is different from the polarity of the search value used for calibration. When the control unit 19 determines that the polarity of the initial search value is different from the polarity of the search value used for calibration, the control unit 19 adds a plurality of search values in which the polarities of the initial search value are inverted in the order of increasing absolute value, Create a search correspondence of. Further, the control unit 19 switches the pixel px of an arbitrary coordinate to the first state via the advancing unit 14 using each of the created plurality of search correspondences, and the search correspondence to the arbitrary coordinates. A plurality of detection signals are acquired by causing the radiation source 20 to emit an electromagnetic wave in a state in which the electromagnetic wave can be emitted in the radiation directions associated with each other. When acquiring the plurality of detection signals, the control unit 19 calibrates the correspondence relationship based on the plurality of detection signals as described above.

  In the configuration for determining the polarity of the search value used for calibration, when the control unit 19 adds the search values in ascending order of the absolute value and the signal strength of the detection signal to be acquired turns to decrease, as described below. Then, the calibration of the correspondence may be finished. After acquiring the initial signal or the detection signal, the control unit 19 creates a search correspondence by adding a search value whose absolute value is next larger than the search value used when detecting the previous detection signal. The control unit 19 switches the pixel px of an arbitrary coordinate to the first state via the advancing unit 14 using the created search correspondence, and associates the arbitrary coordinate with the search correspondence. The detection signal is acquired by causing the radiation source 20 to emit the electromagnetic wave in a state where the electromagnetic wave can be emitted in the radiation direction. When the signal strength of the detection signal is larger than the signal strength of the previously acquired detection signal, the control unit 19 continuously acquires and compares the detection signal by adding a search value having the next largest absolute value. When the signal intensity of the newly acquired detection signal is smaller than the previously acquired detection signal, the control unit 19 determines the search value corresponding to the previously acquired detection signal as the search value used for calibration, and calibrates the correspondence relationship. To finish.

  In the configuration for determining the polarity of the search value used in the configuration, the plurality of search values used in the calibration mode may or may not be an integer multiple of the initial search value.

  The control unit 19 may calibrate the correspondence relationship for each discrete value of the radial direction or each coordinate. Alternatively, the control unit 19 may perform all discrete values in the radial direction or all coordinates. Performing on the entire radial direction or the entire coordinate means adding the same search value to all the discrete values in the radial direction or all the coordinates in the correspondence relationship.

  Next, the correspondence calibration process according to the first method executed by the control unit 19 in the present embodiment will be described with reference to the flowchart of FIG. 7. In a configuration in which calibration is performed using a plurality of search values whose absolute values are within the upper limit value, the control unit 19 starts the correspondence calibration process by the first method when detecting an input that starts the calibration mode.

  In step S100, the control unit 19 reads the correspondence relationship from the storage unit 18. After reading the correspondence, the process proceeds to step S101.

  In step S101, the control unit 19 recognizes a single search value. The control unit 19 may recognize the search value by reading it out of the search values stored in the storage unit 18 or by calculating it based on the previous search value. After recognition, the process proceeds to step S102.

  In step S102, the control unit 19 creates a search correspondence by adding the search value recognized in step S101 to the correspondence read in step S100. Further, the control unit 19 drives the scanning unit 21 and the traveling unit 14 using the search correspondence. Further, the control unit 19 causes the radiation source 20 to emit an electromagnetic wave to acquire a detection signal from the first detection unit 16. After obtaining the detection signal, the process proceeds to step S103.

  In step S103, the control unit 19 determines whether or not detection signals have been acquired for all the search values whose absolute value is equal to or less than the upper limit value. If no detection signal has been obtained for all search values, the process returns to step S100. If the detection signals have been acquired for all the search values, the process proceeds to step S104.

  In step S104, the control unit 19 determines the maximum value of the signal strength among the detection signals corresponding to each of the plurality of search values. After determining the maximum value, the process proceeds to step S105.

  In step S105, the control unit 19 determines the search value corresponding to the detection signal having the maximum signal strength in step S104 as the search value for calibration. After the determination, the process proceeds to step S106.

  In step S106, the control unit 19 calibrates the correspondence relationship by adding the calibration search value determined in step S105 to the correspondence relationship stored in the storage unit 18. Further, the control unit 19 stores the calibrated correspondence relationship in the storage unit 18. After the storage, the correspondence calibration process according to the first method ends.

  Next, the correspondence calibration process by the second method executed by the control unit 19 in the present embodiment will be described with reference to the flowchart of FIG. In the configuration that determines the polarity of the search value used for calibration, the control unit 19 starts the correspondence calibration process by the second method when detecting the input that starts the calibration mode.

  In step S200, the control unit 19 reads the correspondence relationship from the storage unit 18. After reading the correspondence, the process proceeds to step S201.

  In step S201, the control unit 19 drives the scanning unit 21 and the advancing unit 14 using the correspondence relationship read in step S200. Further, the control unit 19 acquires the reference signal from the first detection unit 16 by causing the radiation source 20 to emit an electromagnetic wave. After obtaining the reference signal, the process proceeds to step S202.

  In step S202, the control unit 19 recognizes the initial search value. The control unit 19 recognizes, for example, the initial search value by reading it from the search values stored in the storage unit 18. After recognition, the process proceeds to step S203.

  In step S203, the control unit 19 creates a search correspondence by adding the initial search value recognized in step S202 to the correspondence read in step S200. Further, the control unit 19 drives the scanning unit 21 and the traveling unit 14 using the search correspondence. Furthermore, the control unit 19 acquires an initial signal from the first detection unit 16 by causing the radiation source 20 to emit an electromagnetic wave. After obtaining the initial signal, the process proceeds to step S204.

  In step S204, the control unit 19 determines whether or not the signal intensities of the reference signal acquired in step S201 and the initial signal acquired in step S203 are equal. When the signal strengths are equal, the correspondence calibration process according to the second method ends. If the signal strengths are different, the process proceeds to step S205.

  In step S205, the control unit 19 determines whether or not the signal strength of the reference signal acquired in step S201 is larger than the signal strength of the initial signal acquired in step S203. If the signal strength of the reference signal is greater than the signal strength of the initial signal, the process proceeds to step S206. If the signal strength of the reference signal is less than the signal strength of the initial signal, the process proceeds to step S207.

  In step S206, the control unit 19 determines to maintain the polarity of the initial search value, in other words, to use the search value having the same polarity as the initial search value thereafter. After the determination, the process proceeds to step S208.

  In step S207, the control unit 19 determines to invert the polarity of the initial search value, in other words, to use the search value obtained by inverting the polarity of the initial search value thereafter. After determination, the process proceeds to step S208

  In step S208, the control unit 19 reads the correspondence relationship from the storage unit 18. After reading the correspondence, the process proceeds to step S209.

  In step S209, the control unit 19 recognizes the next search value. The control unit 19 may recognize the next search value by reading it from the search values stored in the storage unit 18 or by calculating it based on the previous search value. After recognition, the process proceeds to step S210.

  In step S210, the control unit 19 creates a search correspondence by adding the next search value recognized in step S209 to the correspondence read in step S208. Further, the control unit 19 drives the scanning unit 21 and the traveling unit 14 using the search correspondence. Further, the control unit 19 causes the radiation source 20 to emit an electromagnetic wave to acquire a detection signal from the first detection unit 16. After obtaining the detection signal, the process proceeds to step S211.

  In step S211, the control unit 19 determines whether the detection signal obtained in the previous step S210 is the first time, or the latest step S210 is the first time, rather than the signal strength of the latest detection signal obtained in step S210. If the signal strength of the initial signal obtained in S203 is not large, the process returns to step S208. If the signal strength of the detection signal acquired this time is higher than the signal strength of the detection signal or the initial signal acquired last time, the process proceeds to step S212.

  In step S212, the control unit 19 sets the search value corresponding to the detection signal having a larger signal strength out of the two detection signals (including the case where one is the initial signal) of which the sizes are compared in step S211. Determine the search value for calibration. After the determination, the process proceeds to step S213.

  In step S213, the control unit 19 calibrates the correspondence relationship by adding the search value for calibration determined in step S212 to the correspondence relationship stored in the storage unit 18. Further, the control unit 19 stores the calibrated correspondence relationship in the storage unit 18. After the storage, the correspondence calibration process by the second method ends.

  The electromagnetic wave detection device 10 according to the present exemplary embodiment having the above-described configuration includes a plurality of search values detected by the first detection unit 16 using the search correspondence based on the plurality of search values. The correspondence is calibrated based on the detection signal. The intensity of the reflected wave in the micro area fa irradiated with the electromagnetic wave is maximum at the actual arrival position on the reference surface ss, and the intensity of the reflected wave decreases as the distance from the arrival position on the reference surface ss increases. Therefore, the detection signal for switching the pixel px corresponding to the actual arrival position to the first state and detecting it is higher than the detection signal for detecting the pixel px corresponding to the position other than the arrival position by switching to the first state. The maximum signal strength. Therefore, by having the above-described configuration, the electromagnetic wave detection device 10 can correct the correspondence relationship stored in the storage unit 18 so as to respond to a change in the actual correspondence relationship due to thermal deformation, aging, or the like. Therefore, the electromagnetic wave detection device 10 can maintain the electromagnetic wave detection accuracy even if thermal deformation or temporal change occurs.

  Further, the electromagnetic wave detection device 10 of the present exemplary embodiment compares the signal strengths of the reference signal acquired using the correspondence relationship and the initial signal acquired using the search correspondence relationship based on the initial search value to determine the polarity of the search value. You can tell. With such a configuration, the electromagnetic wave detection device 10 can reduce the number of times of detecting the detection signal for calibrating the correspondence relationship, and thus can shorten the time required to calibrate the correspondence relationship.

  Further, the electromagnetic wave detection device 10 of the present embodiment ends the calibration of the correspondence relationship when the signal strength of the detection signal acquired while adding the search values in the order of increasing absolute value starts to decrease. With such a configuration, the electromagnetic wave detection device 10 can further reduce the number of times of detecting the detection signal for the calibration of the correspondence relationship, so that the time required for the calibration of the correspondence relationship can be further shortened.

  In addition, in the electromagnetic wave detection device 10 of the present exemplary embodiment, the upper limit value may be set for the absolute values of the plurality of search values. In general, the actual change in correspondence caused by thermal deformation, change over time, etc. is minute. Therefore, even if the range of the search value is set, the change in the actual correspondence can be reflected. Therefore, by having the above-described configuration, the electromagnetic wave detection device 10 detects the detection signal with the search value having a limited range, so that the time required for the calibration of the correspondence relationship can be shortened.

  Further, in the electromagnetic wave detection device 10 of the present exemplary embodiment, the plurality of search values are obtained by changing the radiation direction or the coordinate along a single direction corresponding to the short axis of the elliptical shape of the electromagnetic wave emitted by the radiation unit 11. There is. The electromagnetic wave detection device 10 may use a radiation source 20 of a type that emits a beam-shaped electromagnetic wave having an elliptical cross section. The correspondence tends to become large in the direction along the short axis of the image of the electromagnetic wave formed on the reference surface ss of the traveling portion 14. In response to such an event, the electromagnetic wave detection device 10 having the above-described configuration calibrates the correspondence relationship by specializing in a direction in which the correspondence relationship is likely to be large, and therefore the maintenance of the detection accuracy of electromagnetic waves and the calibration are required. A balance with shortening of time can be achieved.

  Although the present invention has been described based on the drawings and the embodiments, it should be noted that those skilled in the art can easily make various variations and modifications based on the present disclosure. Therefore, it should be noted that these variations and modifications are included in the scope of the present invention.

  In the present embodiment, as described above, the electromagnetic wave detection device 10 is configured to generate distance information by Direct ToF that emits laser light and directly measures the time until it returns. However, the electromagnetic wave detection device 10 is not limited to such a configuration. For example, the electromagnetic wave detection device 10 radiates an electromagnetic wave at a constant cycle, and based on the phase difference between the radiated electromagnetic wave and the returned electromagnetic wave, the distance information is measured by Flash ToF that indirectly measures the time until the returned electromagnetic wave. May be created. In addition, the electromagnetic wave detection device 10 may create the distance information by another ToF method, for example, Phased ToF.

  Further, in the present embodiment, the traveling unit 14 can switch the traveling directions of the electromagnetic waves incident on the reference surface ss to two directions, but can switch to not less than two directions but to three or more directions. May be

  In the traveling unit 14 of the present embodiment, the first state and the second state are the first reflection state in which the electromagnetic wave incident on the reference surface ss is reflected in the detection direction don and the non-detection direction doff, respectively. Although it is the second reflection state in which the light is reflected on the other side, other modes may be used.

  For example, as shown in FIG. 9, the first state may be a transmissive state in which an electromagnetic wave incident on the reference surface ss is transmitted to proceed in the detection direction don. More specifically, the traveling unit 140 may include a shutter having a reflection surface that reflects the electromagnetic wave in the non-detection direction doff for each pixel px. In the advancing unit 140 having such a configuration, the transmission state as the first state and the reflection state as the second state can be switched for each pixel px by opening and closing the shutter for each pixel px.

  Examples of the advancing unit 140 having such a configuration include an advancing unit including a MEMS shutter in which a plurality of openable and closable shutters are arranged in an array. Further, as the advancing unit 140, there is an advancing unit including a liquid crystal shutter capable of switching between a reflective state of reflecting electromagnetic waves and a transmissive state of transmitting electromagnetic waves according to liquid crystal alignment. In the advancing unit 140 having such a configuration, by switching the liquid crystal alignment for each pixel px, the transmissive state as the first state and the reflective state as the second state can be switched for each pixel px.

  In addition, in the present embodiment, the electromagnetic wave detection device 10 causes the scanning unit 21 to scan the beam-shaped electromagnetic waves emitted from the radiation source 20, thereby causing the first detection unit 16 to cooperate with the scanning unit 21 to perform scanning. It has a configuration to function as an active sensor of. However, the electromagnetic wave detection device 10 is not limited to such a configuration. For example, in a radiation unit having a plurality of radiation sources capable of radiating radial electromagnetic waves, by a phased scan method of radiating electromagnetic waves from each radiation source while shifting the radiation timing, a scanning-type active sensor is provided without a scanning unit. Even with a functioning configuration, similar effects to those of the present embodiment can be obtained.

  In addition, in the present embodiment, the electromagnetic wave detection device 10 has a configuration in which the first detection unit 16 is an active sensor and the second detection unit 17 is a passive sensor. However, the electromagnetic wave detection device 10 is not limited to such a configuration. For example, in the electromagnetic wave detection device 10, even when both the first detection unit 16 and the second detection unit 17 are active sensors, the same effect as the present embodiment can be obtained. In the configuration in which both the first detection unit 16 and the second detection unit 17 are active sensors, the emission units 11 that emit electromagnetic waves to the target ob may be different or the same. Further, the different radiating units 11 may radiate different kinds or same kinds of electromagnetic waves, respectively.

DESCRIPTION OF SYMBOLS 10 Electromagnetic wave detection device 11 Radiation part 12 Pre-stage optical system 13 Separation part 14 Progression part 15 Post-stage optical system 16 First detection part 17 Second detection part 18 Storage part 19 Control part 20 Radiation source 21 Scanning part dd1, dd2 1st Separation direction, second separation direction di incident direction doff non-detection direction don detection direction minute area fa
ob target px pixel ss reference plane

Claims (31)

The emission direction that maximizes the intensity can be changed, and the emission part that emits electromagnetic waves,
A first detection unit that detects a reflected wave of the electromagnetic wave with which the target is irradiated;
A plurality of pixels are arranged along a reference plane, and a traveling direction capable of switching a traveling direction of an electromagnetic wave incident on the reference plane from the object for each pixel to a detection direction in which the first detecting unit is arranged, ,
A storage unit that stores a correspondence relationship between the radiation direction and the coordinates of the pixel that advances in the detection direction;
In the correspondence relationship, for any value of one of the radial direction and the coordinate, using a plurality of search correspondence relationship to which the plurality of search values having different sizes are respectively added to the other, to the advancing unit to the The correspondence relationship is based on a plurality of detection signals corresponding to a plurality of search values, which are detected by the first detection unit by switching the pixel to the detection direction and causing the emission unit to emit the electromagnetic wave. An electromagnetic wave detection device comprising: a controller for calibrating the electromagnetic wave. The electromagnetic wave detection device according to claim 1,
The control unit is
The signal intensity of the reference signal detected by the first detection unit by causing the advancing unit to switch the pixel in the detection direction by using the correspondence and causing the emission unit to emit the electromagnetic wave is Of the search values by adding the initial search value having the smallest absolute value among the search values, the advancing section is caused to switch the pixel in the detection direction to cause the emitting section to emit the electromagnetic wave. When the signal strength of the initial signal detected by the first detection unit is smaller than the above, a part of the search values having the same polarity as the initial search value among the plurality of search values is added in the order of smaller absolute values. Based on the detection signal detected by the first detection unit by switching the pixel to the detection direction in the traveling unit using each of the search correspondences and causing the emission unit to emit the electromagnetic wave. ,Previous To calibrate the correspondence relationship,
When the signal strength of the reference signal is larger than the signal strength of the initial signal, a part of the search values obtained by inverting the polarity of the initial search value among the plurality of search values is added in the order of increasing absolute value. Based on a detection signal detected by the first detection unit by causing the traveling unit to switch the pixel in the detection direction by using each of the search correspondences and causing the emission unit to emit the electromagnetic wave, An electromagnetic wave detection device for calibrating the correspondence. The electromagnetic wave detection device according to claim 2,
In the calibration of the correspondence relation, the control unit causes the advancing unit to switch the pixel in the detection direction by using the correspondence relation for search while adding the search values in the order of smaller absolute values. An electromagnetic wave detection device for terminating the calibration of the correspondence relationship when the signal intensity of the detection signal detected by the first detection unit starts to decrease by radiating the electromagnetic wave to the. The electromagnetic wave detection device according to claim 1,
An electromagnetic wave detection device in which an upper limit value is set for the absolute values of the plurality of search values. The electromagnetic wave detection device according to any one of claims 1 to 4,
An electromagnetic wave detection device in which the control unit calibrates the correspondence relationship for each discrete value of the radiation direction or for each coordinate. The electromagnetic wave detection device according to any one of claims 1 to 4,
The electromagnetic wave detecting device, wherein the control unit calibrates the correspondence relationship with respect to all discrete values in the radiation direction or all coordinates. The electromagnetic wave detection device according to any one of claims 1 to 6,
The electromagnetic wave detection device, wherein the plurality of search values changes the radial direction or the coordinates along a single direction. The electromagnetic wave detection device according to claim 7,
The radiating unit radiates an electromagnetic wave having a shape with a long axis and a short axis,
An electromagnetic wave detection device in which the single direction corresponds to the short axis. The electromagnetic wave detection device according to any one of claims 1 to 6,
An electromagnetic wave detection device in which the plurality of search values change the radiation direction or the coordinates along two different directions. The electromagnetic wave detection device according to any one of claims 1 to 9,
A separation unit that separates electromagnetic waves that travel in the incident direction and travels in the first separation direction and the second separation direction;
Further comprising a second detector for detecting the electromagnetic wave traveling in the second separation direction,
The traveling section is an electromagnetic wave detection device located in the first separation direction. The electromagnetic wave detection device according to claim 10,
An electromagnetic wave detection device in which the separation unit causes an electromagnetic wave having a specific wavelength to propagate in the first separation direction among electromagnetic waves traveling in the incident direction, and causes an electromagnetic wave having another wavelength to propagate in the second separation direction. The electromagnetic wave detection device according to claim 10 or 11,
The electromagnetic wave detection device, wherein the separation unit includes at least one of a visible light reflection coating, a half mirror, a beam splitter, a dichroic mirror, a cold mirror, a hot mirror, a metasurface, and a deflection element. The electromagnetic wave detection device according to any one of claims 10 to 12,
The electromagnetic wave detection device in which the first detection unit and the second detection unit include sensors of different types or the same type. The electromagnetic wave detection device according to any one of claims 10 to 13,
An electromagnetic wave detection device in which the first detection unit and the second detection unit detect electromagnetic waves of the same type or different types. The electromagnetic wave detection device according to any one of claims 10 to 14,
An electromagnetic wave detection device in which at least one of the first detection unit and the second detection unit includes an active sensor that detects a reflected wave from the target of the electromagnetic wave radiated from the radiation unit toward the target. The electromagnetic wave detection device according to any one of claims 1 to 15,
The electromagnetic wave detection device in which the first detection unit includes at least one of a distance measurement sensor, an image sensor, and a thermosensor. The electromagnetic wave detection device according to any one of claims 1 to 16,
The first detection unit is an electromagnetic wave detection device that detects at least one of infrared rays, visible rays, ultraviolet rays, and radio waves. The electromagnetic wave detection device according to any one of claims 1 to 17,
The radiation unit is an electromagnetic wave detection device that emits any one of infrared rays, visible rays, ultraviolet rays, and radio waves. The electromagnetic wave detection device according to any one of claims 1 to 18,
The said radiation | emission part is an electromagnetic wave detection apparatus which changes the said radiation direction by a phased scan system. The electromagnetic wave detection device according to any one of claims 1 to 19,
The electromagnetic wave detecting device includes: the radiation unit having a radiation source that emits an electromagnetic wave; and a scanning unit that changes the radiation direction of the electromagnetic wave emitted by the radiation source. The electromagnetic wave detection device according to claim 20,
An electromagnetic wave detecting device, wherein the scanning unit includes a reflecting surface that reflects electromagnetic waves, and scans the electromagnetic waves emitted from the emitting unit by reflecting the electromagnetic waves on the reflecting surface while changing the direction of the reflecting surface. The electromagnetic wave detection device according to claim 20 or 21,
The electromagnetic wave detecting device, wherein the scanning unit includes any one of a MEMS mirror, a polygon mirror, and a galvano mirror. The electromagnetic wave detection device according to any one of claims 1 to 22,
The electromagnetic wave detection device, wherein the traveling unit switches, for each pixel, the electromagnetic wave incident on the reference surface into a first reflection state in which the electromagnetic wave is reflected in the detection direction and a second reflection state in which the electromagnetic wave is reflected in the non-detection direction. The electromagnetic wave detection device according to claim 23,
The traveling unit includes a reflective surface that reflects electromagnetic waves for each pixel, and switches the orientation of the reflective surface for each pixel to switch between the first reflective state and the second reflective state. Detection device. The electromagnetic wave detection device according to claim 23 or 24,
The electromagnetic wave detection device, wherein the traveling unit includes a digital micromirror device. The electromagnetic wave detection device according to any one of claims 1 to 25,
The electromagnetic wave detection device, wherein the traveling unit switches, for each pixel, an electromagnetic wave incident on the reference surface between a transmission state in which the electromagnetic wave is transmitted in the detection direction and a reflection state in which the electromagnetic wave is reflected in a non-detection direction. The electromagnetic wave detection device according to claim 26,
The electromagnetic wave detection device, wherein the traveling unit includes a shutter including a reflection surface that reflects electromagnetic waves, for each of the pixels, and opens and closes the shutter for each of the pixels to switch between the reflective state and the transmissive state. The electromagnetic wave detection device according to claim 27,
The electromagnetic wave detection device, wherein the traveling unit includes a MEMS shutter in which the shutters are arranged in an array. The electromagnetic wave detection device according to claim 26 or 27,
The electromagnetic wave detecting device, wherein the traveling unit includes a liquid crystal shutter capable of switching between a reflective state for reflecting electromagnetic waves and a transmissive state for transmitting the electromagnetic waves for each pixel according to liquid crystal alignment. The electromagnetic wave detection device according to any one of claims 1 to 29,
The electromagnetic wave detection device, wherein the control unit acquires information about the surroundings based on the detection result of the first detection unit. The electromagnetic wave detection device according to claim 30,
The electromagnetic wave detection device, wherein the control unit acquires at least one of image information, distance information, and temperature information as the information about the surroundings.

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