JP2020073894A - Electromagnetic wave detection device and information acquisition system - Google Patents

Abstract

To reduce the difference in the coordinate system in detection results from a plurality of detectors.SOLUTION: An electromagnetic wave detection device 100 has a separation unit 16, a switch unit 180, and a second detection unit 20. The separation unit 16 allows a portion of incident electromagnetic waves to travel in a second direction d2. The switch unit 180 has a plurality of switch elements se. The switch elements se can switch between a first state and a second state. In the first state, the electromagnetic waves having traveled in the second direction d2 travel in a third direction d3. In the second state, the electromagnetic waves having traveled in the second direction d2 travel in a fourth direction d4. The second detection unit 20 detects the electromagnetic waves having traveled in the third direction. The switch unit 180 switches each of the switch elements se between the first state and the second state in accordance with a region irradiated with the electromagnetic waves radiated by a radiation unit.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an electromagnetic wave detection device and an information acquisition system.

  In recent years, devices have been developed that obtain information about the surroundings from the detection results of a plurality of detectors that detect electromagnetic waves. For example, there is known a device that measures the position of an object in an image captured by an infrared camera using a laser radar. (See Patent Document 1).

JP, 2011-220732, A

  In such an apparatus, it is beneficial to reduce the difference in the coordinate system in the detection result by each detector.

  Therefore, an object of the present disclosure made in view of the above-described problems of the related art is to reduce the difference in the coordinate system in the detection result by the plurality of detectors that detect electromagnetic waves.

In order to solve the above-mentioned problems, the electromagnetic wave detection device according to the first aspect is
A separation part for advancing a part of the incident electromagnetic wave in the second direction,
A switching unit having a plurality of switching elements capable of switching between a first state in which the electromagnetic wave traveling in the second direction proceeds in a third direction and a second state in which the electromagnetic wave travels in a fourth direction;
A second detector that detects the electromagnetic wave traveling in the third direction,
The switching unit switches the plurality of switching elements to the first state and the second state, respectively, according to an irradiation region of the electromagnetic wave emitted by the irradiation unit.

The information acquisition system according to the second aspect is
A separation unit that advances a part of the incident electromagnetic wave in the second direction, a first state in which the electromagnetic wave that has advanced in the second direction advances in the third direction, and a second state that advances the electromagnetic wave in the fourth direction. An electromagnetic wave detection device including a switching unit having a plurality of switching elements that can be switched to a state, and a second detection unit that detects the electromagnetic wave traveling in the third direction,
A control unit for acquiring information about the surroundings of the electromagnetic wave detection device based on a detection result of the electromagnetic wave by the second detection unit,
The switching unit switches the plurality of switching elements to the first state and the second state, respectively, according to an irradiation region of the electromagnetic wave emitted by the irradiation unit.

  Although the solution means of the present disclosure has been described as an apparatus and a system as described above, the present disclosure can also be realized as an aspect including these, and a method, a program substantially equivalent to these, It can be realized as a storage medium recording a program, and it should be understood that these are also included in the scope of the present disclosure.

  According to the present disclosure configured as described above, the difference in the coordinate system in the detection result by the plurality of detectors that detect electromagnetic waves can be reduced.

It is a block diagram which shows schematic structure of the information acquisition system containing the electromagnetic wave detection apparatus which concerns on 1st Embodiment. FIG. 3 is a state diagram of an information acquisition system for explaining traveling directions of electromagnetic waves in a first state and a second state of a switching element in a switching unit of the electromagnetic wave detection device of FIG. 1. 3 is a timing chart showing the timing of electromagnetic wave emission and the timing of detection for explaining the principle of distance measurement by a distance measurement sensor configured by the irradiation unit, the second detection unit, and the control unit of FIG. 1. It is a block diagram which shows schematic structure of the electromagnetic wave detection apparatus which concerns on 2nd Embodiment. It is a state diagram of an electromagnetic wave detection device for explaining a state in which the traveling direction of the electromagnetic wave is switched for each switching element in the second embodiment. It is a block diagram which shows schematic structure of the modification of the electromagnetic wave detection apparatus which concerns on 1st Embodiment.

  Hereinafter, an embodiment of an electromagnetic wave detection device to which the present invention is applied will be described with reference to the drawings. In a configuration in which a plurality of detectors that detect electromagnetic waves detect electromagnetic waves, the detection axes of the detection units are different. Therefore, even if each detector performs detection in the same region, the coordinate system in the detection result is different in each detection unit. Therefore, it is useful to reduce the difference in the coordinate system in the detection result by each detection unit. However, it is impossible or difficult to reduce the difference by correction. Therefore, the electromagnetic wave detection device to which the present invention is applied is configured so as to reduce the difference in the detection axis in each detection unit, and thus can reduce the difference in the coordinate system in the detection result by each detection unit.

  As shown in FIG. 1, an information acquisition system 11 including an electromagnetic wave detection device 10 according to the first embodiment of the present disclosure includes an electromagnetic wave detection device 10, an irradiation unit 12, a reflection unit 13, and a control unit 14. Has been done.

  In the following figures, broken lines connecting the functional blocks show the flow of control signals or information to be communicated. The communication indicated by the broken line may be wired communication or wireless communication. The solid line protruding from each functional block indicates a beam-shaped electromagnetic wave.

  The electromagnetic wave detection device 10 includes a front optical system 15, a separation unit 16, a first detection unit 17, a switching unit 18, a first rear optical system 19, and a second detection unit 20.

  The pre-stage optical system 15 includes, for example, at least one of a lens and a mirror, and forms an image of the target ob as a subject.

  The separation unit 16 is provided between the pre-stage optical system 15 and a primary image forming position which is an image forming position of the pre-stage optical system 15 for an image of the object ob which is separated from the pre-stage optical system 15 at a predetermined position. ing. The separating unit 16 separates the incident electromagnetic wave so as to travel in the first direction d1 and the second direction d2.

  In the first embodiment, the separating unit 16 reflects a part of the incident electromagnetic wave in the first direction d1 and transmits another part of the electromagnetic wave in the second direction d2. The separating unit 16 may transmit a part of the incident electromagnetic wave in the first direction d1 and another part of the electromagnetic wave in the second direction d2. The separating unit 16 may refract a part of the incident electromagnetic wave in the first direction d1 and refract another part of the electromagnetic wave in the second direction d2. The separation unit 16 is, for example, a half mirror, a beam splitter, a dichroic mirror, a cold mirror, a hot mirror, a metasurface, a deflection element, a prism, or the like.

  The first detection unit 17 is provided on the path of the electromagnetic wave traveling from the separation unit 16 in the first direction d1. Furthermore, the first detection unit 17 forms an image of the image of the object ob distant from the pre-stage optical system 15 at a predetermined position by the pre-stage optical system 15 in the first direction d1 from the separating unit 16 or the relevant position. It is provided near the image position. The first detection unit 17 detects an electromagnetic wave traveling from the separation unit 16 in the first direction d1.

  Further, the first detection unit 17 makes the first traveling axis of the electromagnetic wave traveling from the separation unit 16 in the first direction d1 parallel to the first detection axis of the first detection unit 17, It may be arranged with respect to the separating part 16. The first traveling axis is the central axis of the electromagnetic wave that propagates from the separating unit 16 in the first direction d1 and propagates while spreading radially. In the first embodiment, the first traveling axis is an axis that extends the optical axis of the pre-stage optical system 15 to the separating section 16 and bends in the separating section 16 so as to be parallel to the first direction d1. .. The first detection axis is an axis that passes through the center of the detection surface of the first detection unit 17 and is perpendicular to the detection surface.

  Further, the first detection unit 17 may be arranged such that the interval between the first traveling axis and the first detection axis is equal to or less than the first interval threshold value. Further, the first detection unit 17 may be arranged so that the first traveling axis and the first detection axis coincide with each other. In the first embodiment, the first detection unit 17 is arranged so that the first traveling axis and the first detection axis coincide with each other.

  Further, the first detection unit 17 separates the first traveling axis and the detection surface of the first detection unit 17 so that the first angle is equal to or less than the first angle threshold value or a predetermined angle. It may be arranged with respect to the part 16. In the first embodiment, the first detector 17 is arranged so that the first angle is 90 °, as described above.

  In the first embodiment, the first detection unit 17 is a passive sensor. In the first embodiment, the first detection unit 17 more specifically includes an element array. For example, the first detection unit 17 includes an image sensor such as an image sensor or an imaging array, captures an image of an electromagnetic wave formed on the detection surface, and generates image information corresponding to the captured object ob.

  In addition, in the first embodiment, the first detection unit 17 more specifically captures an image of visible light. The first detection unit 17 transmits the generated image information to the control unit 14 as a signal.

  The first detection unit 17 may capture an image other than visible light, such as an image of infrared rays, ultraviolet rays, and radio waves. Further, the first detection unit 17 may include a distance measuring sensor. In this configuration, the electromagnetic wave detection device 10 can acquire image-like distance information by the first detection unit 17. Further, the first detection unit 17 may include a distance measuring sensor thermosensor or the like. In this configuration, the electromagnetic wave detection device 10 can acquire image-like temperature information by the first detection unit 17.

  The switching unit 18 is provided on the path of the electromagnetic wave traveling from the separating unit 16 in the second direction d2. Further, the switching unit 18 is a primary imaging position of the image of the object ob separated from the pre-stage optical system 15 at a predetermined position by the pre-stage optical system 15 in the second direction d2 from the separating unit 16 or the primary image formation. It is provided near the position.

  In the first embodiment, the switching unit 18 is provided at the image forming position. The switching unit 18 has a working surface as on which the electromagnetic waves that have passed through the pre-stage optical system 15 and the separating unit 16 are incident. The action surface as is composed of a plurality of switching elements se arranged along a two-dimensional shape. The action surface as is a surface that causes an action such as reflection and transmission of electromagnetic waves in at least one of a first state and a second state described later.

  The switching unit 18 can switch, for each switching element se, the first state in which the electromagnetic wave incident on the working surface as is advanced in the third direction d3 and the second state in which the electromagnetic wave is advanced in the fourth direction d4. Is. In the first embodiment, the first state is the first reflection state in which the electromagnetic wave incident on the working surface as is reflected in the third direction d3. The second state is the second reflection state in which the electromagnetic wave incident on the working surface as is reflected in the fourth direction d4.

  In the first embodiment, more specifically, the switching unit 18 includes a reflective surface that reflects electromagnetic waves for each switching element se. The switching unit 18 switches the first reflection state and the second reflection state for each switching element se by changing the direction of the reflecting surface for each switching element se.

  In the first embodiment, the switching unit 18 includes, for example, a DMD (Digital Micro mirror Device). The DMD can switch the reflecting surface for each switching element se to any one of + 12 ° and −12 ° with respect to the acting surface as by driving the minute reflecting surface that constitutes the acting surface as. is there. The acting surface as is parallel to the plate surface of the substrate on which the minute reflecting surface of the DMD is placed.

  The switching unit 18 switches the first state and the second state for each switching element se based on the control of the control unit 14 described later. For example, as shown in FIG. 2, the switching unit 18 may simultaneously switch some of the switching elements se1 to the first state to cause the electromagnetic waves incident on the switching elements se1 to travel in the third direction d3, By switching another part of the switching element se2 to the second state, the electromagnetic wave incident on the switching element se2 can be advanced in the fourth direction d4.

  As shown in FIG. 1, the first post-stage optical system 19 is provided in the third direction d3 from the switching unit 18. The first post-stage optical system 19 includes, for example, at least one of a lens and a mirror. The first post-stage optical system 19 forms an image of the target ob as an electromagnetic wave whose traveling direction is switched by the switching unit 18.

  The second detection unit 20 is provided on the path of the electromagnetic wave that travels in the third direction d3 by the switching unit 18 and then travels via the first post-stage optical system 19. The second detection unit 20 detects an electromagnetic wave that has passed through the first post-stage optical system 19, that is, an electromagnetic wave that has traveled in the third direction d3.

  In addition, the second detection unit 20, together with the switching unit 18, travels in the second direction d2 from the separating unit 16 and is switched by the switching unit 18 to the third direction d3. The axis may be arranged with respect to the separation unit 16 such that the axis is parallel to the second detection axis of the second detection unit 20. The second traveling axis is the central axis of the electromagnetic wave that propagates from the switching unit 18 in the third direction d3 and propagates while spreading radially. In the first embodiment, the second traveling axis is an axis that extends the optical axis of the pre-stage optical system 15 to the switching unit 18 and bends the switching unit 18 so as to be parallel to the third direction d3. .. The second detection axis is an axis that passes through the center of the detection surface of the second detection unit 20 and is perpendicular to the detection surface.

  Further, the second detection unit 20 may be arranged together with the switching unit 18 so that the interval between the second traveling axis and the second detection axis is equal to or less than the second interval threshold value. The second interval threshold may be the same as or different from the first interval threshold. In addition, the second detection unit 20, together with the first detection unit 17 and the switching unit 18, the interval between the first advancing axis and the first detection axis and the interval between the second advancing axis and the second detection axis. It may be arranged such that the difference between and is less than or equal to a predetermined interval difference (for example, the diameter of the detection surface of the first detection unit 17 and the second detection unit 20). Further, the second detection unit 20 may be arranged so that the second traveling axis and the second detection axis coincide with each other. In the first embodiment, the second detector 20 is arranged so that the second traveling axis and the second detecting axis coincide with each other.

  In addition, the second detection unit 20, together with the switching unit 18, forms a second angle between the second traveling axis and the detection surface of the second detection unit 20, which is equal to or less than the second angle threshold value or a predetermined angle. Therefore, it may be arranged with respect to the separating unit 16. The second angle threshold value may be the same as or different from the first angle threshold value. In addition, the second detection unit 20, together with the first detection unit 17 and the switching unit 18, sets the difference between the first angle and the second angle to be a predetermined angle difference or less (for example, in Scheimpflug May be arranged (to meet the principle). In the first embodiment, the second detector 20 is arranged so that the second angle is 90 ° as described above.

  In the first embodiment, the second detection unit 20 is an active sensor that detects a reflected wave of the electromagnetic wave emitted from the irradiation unit 12 toward the target ob. In the first embodiment, the second detection unit 20 reflects the electromagnetic wave emitted from the irradiation unit 12 and reflected by the reflection unit 13 toward the target ob, and reflected from the target ob. To detect. As will be described later, the electromagnetic wave emitted from the irradiation unit 12 is at least one of infrared rays, visible light rays, ultraviolet rays, and radio waves, and the second detection unit 20 is different from or the same kind as the first detection unit 17. Detect electromagnetic waves.

  In the first embodiment, the second detection unit 20 more specifically includes an element that constitutes a distance measuring sensor. For example, the second detection unit 20 includes a single element such as an APD (Avalanche PhotoDiode), a PD (PhotoDiode), and a distance measurement image sensor. The second detection unit 20 may include an element array such as an APD array, a PD array, a ranging imaging array, and a ranging image sensor.

  In the first embodiment, the second detection unit 20 transmits detection information indicating that the reflected wave from the subject has been detected to the control unit 14 as a signal. More specifically, the second detection unit 20 detects an electromagnetic wave in the infrared band.

  Note that the second detection unit 20 need only be able to detect electromagnetic waves in the configuration of the single element that constitutes the distance measurement sensor described above, and need not be imaged on the detection surface. Therefore, the second detection unit 20 does not have to be provided at the secondary image forming position which is the image forming position of the first post-stage optical system 19. That is, in this configuration, the second detector 20 moves to the third direction d3 by the switching unit 18 and then moves to the first direction at the position where electromagnetic waves from all angles of view can be incident on the detection surface. It may be arranged anywhere on the path of the electromagnetic wave traveling through the rear optical system 19.

  The irradiation unit 12 emits at least one of infrared rays, visible rays, ultraviolet rays, and radio waves. In the first embodiment, the irradiation unit 12 emits infrared rays. The irradiation unit 12 irradiates the radiated electromagnetic wave toward the target ob directly or indirectly via the reflecting unit 13. In the first embodiment, the irradiation unit 12 indirectly irradiates the radiated electromagnetic wave toward the target ob through the reflection unit 13.

  In the first embodiment, the irradiation unit 12 emits a beam-shaped electromagnetic wave having a narrow width, for example, 0.5 °. In addition, in the first embodiment, the irradiation unit 12 can radiate the electromagnetic waves in a pulse shape. For example, the irradiation unit 12 includes an LED (Light Emitting Diode), an LD (Laser Diode), and the like. The irradiation unit 12 switches between emission and stop of electromagnetic waves based on the control of the control unit 14 described later.

  The reflection unit 13 changes the irradiation position of the electromagnetic wave emitted to the target ob by reflecting the electromagnetic wave emitted from the irradiation unit 12 while changing its direction. That is, the reflection unit 13 scans the target ob with the electromagnetic waves emitted from the irradiation unit 12. Therefore, in the first embodiment, the second detector 20 cooperates with the reflector 13 to form a scanning distance measuring sensor. The reflecting unit 13 scans the target ob in the one-dimensional direction or the two-dimensional direction. In the first embodiment, the reflection unit 13 scans the object ob in the two-dimensional direction.

  The reflection unit 13 is configured such that at least a part of the irradiation region of the electromagnetic waves emitted and reflected from the irradiation unit 12 is included in the electromagnetic wave detection range of the electromagnetic wave detection device 10. Therefore, at least a part of the electromagnetic wave with which the target ob is radiated via the reflector 13 can be detected by the electromagnetic wave detection device 10.

  In the first embodiment, in the reflection unit 13, at least a part of the irradiation area of the electromagnetic waves emitted from the irradiation unit 12 and reflected by the reflection unit 13 is included in the detection range of the second detection unit 20. Is configured. Therefore, in the first embodiment, at least a part of the electromagnetic waves with which the target ob is radiated via the reflector 13 can be detected by the second detector 20.

  The reflecting unit 13 includes, for example, a MEMS (Micro Electro Mechanical Systems) mirror, a polygon mirror, and a galvano mirror. In the first embodiment, the reflection unit 13 includes a MEMS mirror.

  The reflector 13 changes the direction in which electromagnetic waves are reflected under the control of the controller 14, which will be described later. Further, the reflection unit 13 may have an angle sensor such as an encoder, and may notify the control unit 14 of the angle detected by the angle sensor as direction information of reflecting electromagnetic waves. In such a configuration, the control unit 14 can calculate the irradiation position based on the direction information acquired from the reflecting unit 13. In addition, the control unit 14 can calculate the irradiation position based on the drive signal input to the reflecting unit 13 to change the direction in which the electromagnetic wave is reflected.

  The control unit 14 includes one or more processors and memories. The processor may include at least one of a general-purpose processor that loads a specific program and executes a specific function, and a dedicated processor that is specialized for a specific process. The dedicated processor may include an application specific integrated circuit (ASIC; Application Specific Integrated Circuit). The processor may include a programmable logic device (PLD; Programmable Logic Device). The PLD may include an FPGA (Field-Programmable Gate Array). The control unit 14 may include at least one of SoC (System-on-a-Chip) and SiP (System In a Package) in which one or more processors cooperate.

  The control unit 14 acquires information about the surroundings of the electromagnetic wave detection device 10 based on the electromagnetic waves detected by the first detection unit 17 and the second detection unit 20, respectively. The information about the surroundings is, for example, image information, distance information, and temperature information. In the first embodiment, the control unit 14 acquires, as image information, the electromagnetic waves detected by the first detection unit 17 as an image, as described above. Further, in the first embodiment, the control unit 14 uses the ToF (Time-of-Flight) method and the irradiation unit 12 based on the detection information detected by the second detection unit 20, as described below. The distance information of the irradiation position that is irradiated on the is acquired.

  As shown in FIG. 3, the control unit 14 causes the irradiation unit 12 to emit a pulsed electromagnetic wave by inputting an electromagnetic wave emission signal to the irradiation unit 12 (see the “electromagnetic wave emission signal” column). The irradiation unit 12 irradiates an electromagnetic wave on the basis of the inputted electromagnetic wave emission signal (see the "irradiation unit radiation amount" column). The electromagnetic waves emitted by the irradiation unit 12 and reflected by the reflection unit 13 and applied to an arbitrary irradiation region are reflected in the irradiation region. The control unit 14 switches at least a part of the switching elements se in the image formation region in the switching unit 18 by the pre-stage optical system 15 of the reflected wave of the irradiation region to the first state and sets the other switching elements se to the second state. Switch to the state of. Then, when the second detection unit 20 detects the electromagnetic wave reflected in the irradiation area (see the “electromagnetic wave detection amount” column), the second detection unit 20 notifies the control unit 14 of the detection information as described above.

  The control unit 14 has, for example, a time measurement LSI (Large Scale Integrated circuit), and acquires detection information from the time T1 when the irradiation unit 12 emits an electromagnetic wave (see the "Detection Information Acquisition" column). The time ΔT to T2 is measured. The control unit 14 calculates the distance to the irradiation position by multiplying the time ΔT by the speed of light and dividing by 2. The control unit 14 calculates the irradiation position based on the direction information acquired from the reflection unit 13 or the drive signal output to the reflection unit 13 by itself, as described above. The control unit 14 creates image-like distance information by calculating the distance to each irradiation position while changing the irradiation position.

  In the first embodiment, as described above, the information acquisition system 11 is configured to generate distance information by Direct ToF that directly measures the time until the laser beam is emitted and returned. However, the information acquisition system 11 is not limited to such a configuration. For example, the information acquisition system 11 irradiates electromagnetic waves at a constant cycle, and based on the phase difference between the radiated electromagnetic waves and the returned electromagnetic waves, the flash ToF indirectly measures the time until the electromagnetic waves are returned to obtain distance information. You can create it. Further, the information acquisition system 11 may create the distance information by another ToF method, for example, Phased ToF.

  The electromagnetic wave detection device 10 of the first exemplary embodiment having the above-described configuration separates the incident electromagnetic wave so as to travel in the first direction d1 and the second direction d2 and travels in the second direction d2. The traveling direction of the electromagnetic wave can be switched to the third direction d3. With such a configuration, the electromagnetic wave detection device 10 causes the optical axis of the pre-stage optical system 15 to be the first traveling axis, which is the central axis of the electromagnetic wave traveling in the first direction d1, and to be in the third direction d3. It is possible to match the second traveling axis which is the central axis of the propagated electromagnetic wave. Therefore, the electromagnetic wave detection device 10 can reduce the deviation of the optical axes of the first detection unit 17 and the second detection unit 20. Thereby, the electromagnetic wave detection device 10 can reduce the deviation between the first detection axis and the second detection axis. Therefore, the electromagnetic wave detection device 10 can reduce the deviation of the coordinate system in the detection results of the first detection unit 17 and the second detection unit 20. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  Further, in the electromagnetic wave detecting device 10 of the first exemplary embodiment, the first traveling axis is parallel to the first detecting axis and the second traveling axis is parallel to the second detecting axis. The first detection unit 17, the switching unit 18, and the second detection unit 20 are arranged with respect to the separation unit 16. With such a configuration, the electromagnetic wave detection device 10 can reduce the deviation between the first detection axis and the second detection axis and can homogenize the imaging state of the electromagnetic wave on the detection surface regardless of the distance from the traveling axis. .. Therefore, the electromagnetic wave detection device 10 can obtain information about the surroundings in a homogeneous image forming state without performing information processing for homogenizing the image forming state in the control unit 14. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  In addition, in the electromagnetic wave detection device 10 of the first exemplary embodiment, the first detection unit 17 is provided with respect to the separation unit 16 so that the distance between the first traveling axis and the first detection axis is equal to or less than the first distance threshold value. The switching unit 18 and the second detection unit 20 are arranged with respect to the separation unit 16 such that the distance between the second traveling axis and the second detection axis is equal to or less than the second distance threshold. With such a configuration, the electromagnetic wave detection device 10 can further reduce the deviation between the first detection axis and the second detection axis. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  Further, in the electromagnetic wave detection device 10 of the first exemplary embodiment, the difference between the distance between the first traveling axis and the first detecting axis and the distance between the second traveling axis and the second detecting axis is a predetermined distance difference. The first detection unit 17, the switching unit 18, and the second detection unit 20 are arranged with respect to the separation unit 16 as described below. With such a configuration, the electromagnetic wave detection device 10 can further reduce the deviation between the first detection axis and the second detection axis. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  Further, the electromagnetic wave detection device 10 of the first exemplary embodiment performs the first detection so that the first traveling axis and the first detecting axis coincide with each other and the second traveling axis and the second detecting axis coincide with each other. The unit 17, the switching unit 18, and the second detection unit 20 are arranged with respect to the separation unit 16. With such a configuration, the electromagnetic wave detection device 10 can further reduce the deviation between the first detection axis and the second detection axis. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  Further, the electromagnetic wave detection device 10 of the first exemplary embodiment is configured such that the first angle is equal to or less than the first angle threshold value or the predetermined angle, and the second angle is equal to or less than the second angle threshold value or the predetermined angle. The first detection unit 17, the switching unit 18, and the second detection unit 20 are arranged with respect to the separation unit 16 so that With such a configuration, the electromagnetic wave detection device 10 reduces the deviation between the first detection axis and the second detection axis and also makes the imaging state of the electromagnetic wave on the detection surface inhomogeneous according to the distance from the traveling axis. Can be reduced. Therefore, the electromagnetic wave detection device 10 can reduce the load of information processing for homogenizing the imaging state in the control unit 14. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  Further, the electromagnetic wave detection device 10 of the first exemplary embodiment includes the first detection unit 17, the switching unit 18, and the first detection unit 17, so that the difference between the first angle and the second angle is equal to or less than the predetermined angle difference. Two detectors 20 are arranged with respect to the separator 16. With such a configuration, the electromagnetic wave detection device 10 can further reduce the deviation of the optical axes of the first detection unit 17 and the second detection unit 20. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  Further, the electromagnetic wave detection device 10 of the first exemplary embodiment can switch some of the switching elements se in the switching unit 18 to the first state and can switch some of the other switching elements se to the second state. With such a configuration, the electromagnetic wave detection device 10 can cause the second detection unit 20 to detect information based on the electromagnetic wave for each part of the target ob that emits the electromagnetic wave incident on each switching element se. It should be noted that such a configuration and effects are the same also in the electromagnetic wave detection device of the second embodiment described later.

  Next, an electromagnetic wave detection device according to the second embodiment of the present disclosure will be described. The second embodiment is different from the first embodiment in that a third detection unit is further included. The second embodiment will be described below, focusing on the points different from the first embodiment. It should be noted that parts having the same configurations as those in the first embodiment are designated by the same reference numerals.

  As shown in FIG. 4, the electromagnetic wave detection device 100 according to the second exemplary embodiment includes a front stage optical system 15, a separation unit 16, a first detection unit 17, a switching unit 180, a first rear stage optical system 19, and a second stage. The second-stage optical system 210, the second detection unit 20, and the third detection unit 220 are included. The configuration of the information acquisition system 11 according to the second embodiment other than the electromagnetic wave detection device 100 is the same as that of the first embodiment. The configurations and functions of the pre-stage optical system 15, the separation unit 16, the first detection unit 17, the first post-stage optical system 19, and the second detection unit 20 in the second embodiment are the same as those in the first embodiment. Is.

  The arrangement of the switching unit 180 in the electromagnetic wave detection device 100 is the same as that in the first embodiment. Similar to the first embodiment, the switching unit 180 has an action surface as composed of a plurality of switching elements se arranged along a two-dimensional shape. Unlike the first embodiment, the switching unit 180 sets the electromagnetic wave incident on the working surface as to the first state in which the electromagnetic wave advances in the third direction d3 and the second state in which the electromagnetic wave advances in the fourth direction d4. In addition, the switching element se can be switched to the third state in which it is advanced in a direction other than the third direction d3 and the fourth direction d4.

  In the second embodiment, the first state is the first reflection state in which the electromagnetic wave incident on the working surface as is reflected in the third direction d3. The second state is the second reflection state in which the electromagnetic wave incident on the working surface as is reflected in the fourth direction d4. The third state is a third reflection state in which the electromagnetic wave incident on the working surface as is reflected in a direction other than the third direction d3 and the fourth direction d4.

  In the second embodiment, more specifically, the switching unit 180 includes a reflective surface that reflects electromagnetic waves for each switching element se. The switching unit 180 switches the first reflection state, the second reflection state, and the third reflection state for each switching element se by changing the direction of the reflecting surface for each switching element se.

  In the second embodiment, the switching unit 180 includes, for example, a DMD (Digital Micro mirror Device). The DMD can switch the reflecting surface for each switching element se to any one of + 12 ° and −12 ° with respect to the acting surface as by driving the minute reflecting surface that constitutes the acting surface as. is there. Further, the DMD can switch the reflecting surface for each switching element se to an inclined state of about 0 ° with respect to the working surface as by stopping the driving of the reflecting surface.

  The switching unit 180 switches the first state, the second state, and the third state for each switching element se based on the control of the control unit 14. For example, as shown in FIG. 5, the switching unit 18 simultaneously sets a part of the switching elements se1, another part of the switching elements se2, and the remaining switching elements se3 to the first state, the second state, And electromagnetic waves that enter the switching elements se1, se2, and se3 by switching to the third state in the third direction d3, the fourth direction d4, and directions other than the third direction d3 and the fourth direction d4. Can proceed to.

  The second post-stage optical system 210 is provided in the fourth direction d4 from the switching unit 180. The second post-stage optical system 210 includes, for example, at least one of a lens and a mirror. The second post-stage optical system 210 forms an image of the object ob as an electromagnetic wave whose traveling direction is switched by the switching unit 180.

  The third detection unit 220 is provided on the path of the electromagnetic wave that travels in the fourth direction d4 by the switching unit 180 and then travels via the second post-stage optical system 210. The third detection unit 220 detects the electromagnetic wave that has passed through the second post-stage optical system 210, that is, the electromagnetic wave that has traveled in the fourth direction d4.

  In addition, the third detection unit 220, together with the switching unit 180, moves in the second direction d2 from the separating unit 16 and is switched to the fourth direction d4 by the switching unit 180, and the third traveling direction of the electromagnetic wave. The axis may be arranged with respect to the separation unit 16 such that the axis is parallel to the third detection axis of the third detection unit 220. The third traveling axis is the central axis of the electromagnetic wave that propagates from the switching unit 180 in the fourth direction d4 and propagates while spreading radially. In the second embodiment, the third traveling axis is an axis that extends the optical axis of the upstream optical system 15 to the switching unit 180 and bends the switching unit 180 so as to be parallel to the fourth direction d4. .. The third detection axis is an axis that passes through the center of the detection surface of the third detection unit 220 and is perpendicular to the detection surface.

  Furthermore, the third detection unit 220 may be arranged together with the switching unit 180 such that the distance between the third traveling axis and the third detection axis is equal to or less than the third distance threshold. The third interval threshold may be the same as or different from the first interval threshold or the second interval threshold. Further, the third detection unit 220, together with the first detection unit 17, the switching unit 180, and the second detection unit 20, the interval between the first traveling axis and the first detection axis, and the second traveling axis. The distance between the second detection axis and the distance between the third traveling axis and the third detection axis may be set to be a predetermined distance difference or less. Further, the third detection unit 220 may be arranged such that the third traveling axis and the third detection axis coincide with each other. In the second embodiment, the third detection unit 220 is arranged so that the third traveling axis and the third detection axis coincide with each other.

  Further, the third detection unit 220, together with the switching unit 180, the third angle formed by the third traveling axis and the perpendicular of the detection surface of the third detection unit 220 is equal to or less than the third angle threshold value or the predetermined angle. May be arranged with respect to the separating part 16. The third angle threshold may be the same value as the first angle threshold or the second angle threshold, or may be a different value. Further, the third detection unit 220, together with the first detection unit 17, the switching unit 180, and the second detection unit 20, has a predetermined difference between the first angle and the second angle and the third angle. The angle difference may be equal to or less than the angle difference. In the second embodiment, the third detector 220 is arranged so that the third angle is 90 ° as described above.

  In the second embodiment, the third detection unit 220 is an active sensor that detects the reflected wave from the target ob of the electromagnetic wave emitted from the irradiation unit 12 toward the target ob. In addition, in the second embodiment, the third detection unit 220 reflects the reflected wave from the target ob of the electromagnetic wave emitted toward the target ob by the irradiation unit 12 and the reflection unit 13. To detect. As described above, the electromagnetic waves emitted from the irradiation unit 12 are at least one of infrared rays, visible light rays, ultraviolet rays, and radio waves, and the third detection unit 220 is different from or the same kind as the first detection unit 17. , And the second detection unit 20 detects the same type of electromagnetic wave.

  In the second embodiment, the third detection unit 220 more specifically includes an element forming a distance measuring sensor. For example, the third detection unit 220 includes a single distance measurement image sensor such as an APD (Avalanche PhotoDiode), a PD (PhotoDiode), a SPAD (Single Photon Avalanche Diode), an MPPC (Multi-Pixel Photon Counter), and the like. Including. In addition, the third detection unit 220 may include an element array such as a SPAD array, an APD array, a PD array, a ranging imaging array, and a ranging image sensor.

  In the second embodiment, the third detection unit 220 transmits detection information indicating that the reflected wave from the subject has been detected to the control unit 14 as a signal. More specifically, the third detection unit 220 detects an electromagnetic wave in the infrared band.

  It should be noted that the third detector 220 need only be capable of detecting electromagnetic waves in the configuration of the single element that constitutes the distance measuring sensor described above, and need not be imaged on the detection surface. Therefore, the third detector 220 does not have to be provided at the secondary image forming position which is the image forming position of the second post-stage optical system 210. That is, in this configuration, the third detection unit 220 moves to the second direction d4 by the switching unit 180 at the position where electromagnetic waves from all field angles can be incident on the detection surface. It may be arranged anywhere on the path of the electromagnetic wave traveling via the rear optical system 210.

  In the second embodiment, the control unit 14 is different from the first embodiment in that at least a part of the switching elements se in the image formation region in the switching unit 180 by the front optical system 15 of the reflected wave in the irradiation region of the electromagnetic wave. Is switched to the first state, another part of the switching elements se in the imaging region is switched to the second state, and the remaining switching elements se are switched to the third state.

  As described above, the electromagnetic wave detection device 100 according to the second embodiment has the third detection unit 220 that detects the electromagnetic wave traveling from the switching unit 180 in the fourth direction d4. With such a configuration, the electromagnetic wave detection device 100 travels in the third direction d3 with the optical axis of the pre-stage optical system 15 being the first traveling axis that is the central axis of the electromagnetic wave traveling in the first direction d1. It is possible to match the second traveling axis that is the central axis of the electromagnetic wave that has been caused to occur and the third traveling axis that is the central axis of the electromagnetic wave that has proceeded in the fourth direction d4. Therefore, the electromagnetic wave detection device 100 can reduce the deviation of the optical axes of the first detection unit 17, the second detection unit 20, and the third detection unit 220. Thereby, the electromagnetic wave detection device 100 can reduce the deviation of the first detection axis, the second detection axis, and the third detection axis. Therefore, the electromagnetic wave detection device 100 can reduce the deviation of the coordinate system in the detection results of the first detection unit 17, the second detection unit 20, and the third detection unit 220.

  Further, the electromagnetic wave detection device 100 of the second exemplary embodiment can switch some of the switching elements se in the switching unit 180 to the first state and switch some of the other switching elements se to the second state. With such a configuration, the electromagnetic wave detection device 100 allows the electromagnetic waves to travel to some of the switching elements se toward the second detection unit 20, and at the same time, causes some of the switching elements se to have the third detection unit 220. Electromagnetic waves can be directed toward. Therefore, the electromagnetic wave detection device 100 can simultaneously acquire information regarding different areas. Thus, the electromagnetic wave detection device 100 can shorten the time required to acquire image-like distance information, for example.

  In addition, in the electromagnetic wave detection device 100 of the second exemplary embodiment, the third detection unit 220 is connected to the separation unit 16 together with the switching unit 180 so that the third traveling axis is parallel to the third detection axis. It is arranged. With such a configuration, the electromagnetic wave detection device 100 reduces the deviation of the first detection axis, the second detection axis, and the third detection axis, and the third detection axis regardless of the distance from the third traveling axis. The imaging state of the electromagnetic wave on the detection surface of the detection unit 220 can be homogenized. Therefore, the electromagnetic wave detection device 100 can obtain information about the surroundings in a homogeneous imaging state without performing information processing for homogenizing the imaging state in the control unit 14.

  Further, in the electromagnetic wave detection device 100 of the second exemplary embodiment, the third detection unit 220 includes the switching unit 180 so that the distance between the third traveling axis and the third detection axis is equal to or less than the third distance threshold. It is also arranged with respect to the separating unit 16. With such a configuration, the electromagnetic wave detection device 100 can further reduce the deviation of the third detection axis from the first detection axis or the second detection axis.

  Further, the electromagnetic wave detection device 100 of the second exemplary embodiment includes the distance between the third traveling axis and the third detecting axis, the distance between the first traveling axis and the first detecting axis, and the second traveling axis and the first traveling axis. The first detection unit 17, the switching unit 180, the second detection unit 20, and the third detection unit 220 are separated by the separation unit 16 so that the difference between the distance between the two detection axes is equal to or less than a predetermined distance difference. Is placed against. With such a configuration, the electromagnetic wave detection device 100 can further reduce the deviation of the third detection axis from the first detection axis and the second detection axis.

  In addition, in the electromagnetic wave detection device 100 of the second exemplary embodiment, the third detection unit 220, together with the switching unit 180, with respect to the separation unit 16, so that the third traveling axis and the third detection axis coincide with each other. It is arranged. With such a configuration, the electromagnetic wave detection device 100 can further reduce the deviation of the third detection axis from the first detection axis and the second detection axis.

  In addition, in the electromagnetic wave detection device 100 of the second exemplary embodiment, the third detection unit 220, together with the switching unit 180, the separation unit 16 so that the third angle is equal to or less than the third angle threshold value or a predetermined angle. Is placed against. With such a configuration, the electromagnetic wave detection device 100 reduces the deviation of the first detection axis, the second detection axis, and the third detection axis, and the third detection axis according to the distance from the third traveling axis. It is possible to reduce the non-uniformity of the imaging state of electromagnetic waves on the detection surface of the detection unit 220. Therefore, the electromagnetic wave detection device 100 can reduce the load of information processing for homogenizing the imaging state in the control unit 14.

  In addition, the electromagnetic wave detection device 100 of the second exemplary embodiment switches the first detection unit 17 so that the difference between the third angle and the first angle and the second angle is equal to or less than a predetermined angle difference. The section 180, the second detection section 20, and the third detection section 220 are arranged with respect to the separation section 16. With such a configuration, the electromagnetic wave detection device 100 can further reduce the deviation of the optical axis of the third detection unit 220 with respect to the first detection unit 17 and the second detection unit 20.

  Although the present invention has been described based on the drawings and the embodiments, it should be noted that those skilled in the art can easily make various variations and modifications based on the present disclosure. Therefore, it should be noted that these variations and modifications are included in the scope of the present invention.

  For example, in the first embodiment and the second embodiment, the irradiation unit 12, the reflection unit 13, and the control unit 14 constitute the information acquisition system 11 together with the electromagnetic wave detection devices 10 and 100. 10, 100 may be configured to include at least one of these.

  In addition, in the first embodiment, the switching unit 18 can switch the traveling direction of the electromagnetic wave incident on the working surface as to two directions, but it does not switch to one of the two directions but to three or more directions. It may be switchable. Further, in the second embodiment, the switching unit 180 can switch the traveling directions of the electromagnetic waves incident on the working surface as in three directions, but may switch in four or more directions.

  In the switching unit 18 of the first embodiment, the first state and the second state are the first reflection state in which the electromagnetic waves incident on the working surface as are reflected in the third direction d3, and Although the second reflection state is that the light is reflected in the fourth direction d4, another mode may be used.

  For example, as shown in FIG. 6, the first state may be a transmissive state in which an electromagnetic wave incident on the working surface as is transmitted and traveled in the third direction d3. More specifically, the switching unit 181 may include a shutter having a reflecting surface that reflects an electromagnetic wave in the fourth direction for each switching element. In the switching unit 181 having such a configuration, the transmission state as the first state and the reflection state as the second state can be switched for each switching element by opening and closing the shutter for each switching element.

  Examples of the switching unit 181 having such a configuration include a switching unit including a MEMS shutter in which a plurality of shutters that can be opened and closed are arranged in an array. Further, the switching unit 181 may be a switching unit including a liquid crystal shutter capable of switching between a reflective state in which electromagnetic waves are reflected and a transmissive state in which electromagnetic waves are transmitted according to liquid crystal orientation. In the switching unit 181 having such a configuration, by switching the liquid crystal orientation for each switching element, the transmissive state as the first state and the reflective state as the second state can be switched for each switching element.

  In addition, in the first embodiment, the information acquisition system 11 causes the reflecting unit 13 to scan the beam-shaped electromagnetic wave emitted from the irradiating unit 12 so that the second detecting unit 20 cooperates with the reflecting unit 13. It has a configuration to function as a scanning active sensor. Further, in the second embodiment, the information acquisition system 11 causes the reflecting section 13 to scan the beam-shaped electromagnetic wave radiated from the irradiating section 12, so that the second detecting section 20 and the third detecting section 220 are controlled. It has a configuration in which it cooperates with the reflector 13 to function as a scanning active sensor. However, the information acquisition system 11 is not limited to such a configuration. For example, even if the information acquisition system 11 does not include the reflector 13 and emits a radial electromagnetic wave from the irradiation unit 12 to acquire information without scanning, an effect similar to that of the first embodiment can be obtained.

  Moreover, in the first embodiment, the information acquisition system 11 has a configuration in which the first detection unit 17 is a passive sensor and the second detection unit 20 is an active sensor. However, the information acquisition system 11 is not limited to such a configuration. For example, in the information acquisition system 11, the same effect as that of the first embodiment can be obtained whether the first detection unit 17 and the second detection unit 20 are both active sensors or passive sensors. In addition, in the second embodiment, the information acquisition system 11 has a configuration in which the first detection unit 17 is a passive sensor and the second detection unit 20 and the third detection unit 220 are active sensors. However, the information acquisition system 11 is not limited to such a configuration. For example, in the information acquisition system 11, whether the first detection unit 17, the second detection unit 20, and the third detection unit 220 are all active sensors or passive sensors is the same as the second embodiment. Similar effects are obtained. Further, for example, in the information acquisition system 11, any two of the first detection unit 17, the second detection unit 20, and the third detection unit 220 are passive sensors, which is similar to the second embodiment. The effect is obtained.

10, 100 Electromagnetic wave detection device 11 Information acquisition system 12 Irradiation unit 13 Reflection unit 14 Control unit 15 Pre-stage optical system 16 Separation unit 17 First detection unit 18, 180, 181 Switching unit 19 First post-stage optical system 20 Second Detection unit 210 Second post-stage optical system 220 Third detection unit as Working surface d1, d2, d3, d4 First direction, Second direction, Third direction, Fourth direction ob Target

Claims (25)

A separation part for advancing a part of the incident electromagnetic wave in the second direction,
A switching unit having a plurality of switching elements capable of switching between a first state in which the electromagnetic wave traveling in the second direction proceeds in a third direction and a second state in which the electromagnetic wave travels in a fourth direction;
A second detector that detects the electromagnetic wave traveling in the third direction,
The switching unit switches the plurality of switching elements to the first state and the second state, respectively, according to an irradiation region of the electromagnetic wave emitted by the irradiation unit. The electromagnetic wave detection device according to claim 1,
The electromagnetic wave detecting device, wherein the switching unit switches a switching element of the plurality of switching elements corresponding to the irradiation region to the first state and switches another switching element to the second state. The electromagnetic wave detection device according to claim 1 or 2,
The electromagnetic wave detection device, wherein the switching unit switches the plurality of switching elements to the first state and the second state, respectively, according to a detection target position in the irradiation region. The electromagnetic wave detection device according to any one of claims 1 to 3,
Further comprising a changing unit for changing the irradiation area,
The switching unit switches the plurality of switching elements to the first state and the second state, respectively, according to the change of the irradiation region by the changing unit. The electromagnetic wave detection device according to any one of claims 1 to 4,
An image forming unit for forming an image of the electromagnetic wave traveling in the second direction,
The switching unit is an electromagnetic wave detection device arranged at or near an image forming position of the image forming unit. The electromagnetic wave detection device according to any one of claims 1 to 4,
An image forming unit for forming an image of the electromagnetic wave traveling in the second direction,
Of the plurality of switching elements, the switching section switches at least a part of the switching elements in the image formation area of the electromagnetic wave incident from the irradiation area by the image formation section to the first state, and switches the other. An electromagnetic wave detection device for switching an element to the second state. The electromagnetic wave detection device according to any one of claims 1 to 6,
The irradiation unit is an electromagnetic wave detection device that emits a beam of electromagnetic waves. The electromagnetic wave detection device according to any one of claims 1 to 7,
The electromagnetic wave detection device further comprising a third detection unit that detects the electromagnetic wave traveling in the fourth direction. The electromagnetic wave detection device according to any one of claims 1 to 8,
An electromagnetic wave detection device in which the separation unit reflects a part of an incident electromagnetic wave in a first direction and transmits another part of the electromagnetic wave in the second direction. The electromagnetic wave detection device according to any one of claims 1 to 8,
The separation unit is an electromagnetic wave detection device which transmits a part of an incident electromagnetic wave in a first direction and transmits another part of the electromagnetic wave in the second direction. The electromagnetic wave detection device according to any one of claims 1 to 8,
The separation unit refracts a part of an incident electromagnetic wave in a first direction and refracts another part of the electromagnetic wave in the second direction. The electromagnetic wave detection device according to any one of claims 1 to 11,
The electromagnetic wave detection device, wherein the separation unit includes at least one of a half mirror, a beam splitter, a dichroic mirror, a cold mirror, a hot mirror, and a metasurface. The electromagnetic wave detection device according to any one of claims 1 to 12,
The switching unit switches the switching element between a first reflection state in which the electromagnetic wave traveling in the second direction is reflected in the third direction and a second reflection state in which the electromagnetic wave is reflected in the fourth direction. Electromagnetic wave detection device that switches each time. The electromagnetic wave detection device according to claim 13,
The switching element has a reflective surface that reflects electromagnetic waves,
The switching unit switches between the first reflection state and the second reflection state by changing the direction of the reflection surface for each of the switching elements. The electromagnetic wave detection device according to claim 13 or 14,
The switching unit is an electromagnetic wave detection device including a digital micromirror device. The electromagnetic wave detection device according to any one of claims 1 to 12,
The switching unit switches, for each of the switching elements, an electromagnetic wave traveling in the second direction between a transmissive state in which the electromagnetic wave is transmitted in the third direction and a reflective state in which the electromagnetic wave is reflected in the fourth direction. . The electromagnetic wave detection device according to claim 16,
The switching element has a shutter including a reflection surface that reflects electromagnetic waves,
An electromagnetic wave detection device that switches between the reflective state and the transmissive state by opening and closing the shutter for each switching element. The electromagnetic wave detection device according to claim 17,
The electromagnetic wave detecting device, wherein the switching unit includes a MEMS shutter in which the plurality of shutters that can be opened and closed are arranged in an array. The electromagnetic wave detection device according to claim 16,
The electromagnetic wave detecting device, wherein the switching unit includes a liquid crystal shutter capable of switching between a reflective state of reflecting electromagnetic waves and a transmissive state of transmitting electromagnetic waves for each of the switching elements according to liquid crystal light distribution. The electromagnetic wave detection device according to any one of claims 1 to 19,
The electromagnetic wave detection device in which the second detection unit includes at least one of a distance measurement sensor, an image sensor, and a thermosensor. The electromagnetic wave detection device according to any one of claims 1 to 20,
The electromagnetic wave detection device further comprising a control unit that acquires information about the surroundings based on the detection result of the electromagnetic wave by the second detection unit. The electromagnetic wave detection device according to claim 21,
The electromagnetic wave detection device, wherein the control unit acquires at least one of image information, distance information, and temperature information as the information about the surroundings. The electromagnetic wave detection device according to claim 8,
An electromagnetic wave detection device in which the second detection unit and the third detection unit detect different or the same kind of electromagnetic waves. The electromagnetic wave detection device according to claim 23,
An electromagnetic wave detection device in which each of the second detection unit and the third detection unit detects at least one of infrared rays, visible light rays, ultraviolet rays, and radio waves. A separation unit that advances a part of the incident electromagnetic wave in the second direction, a first state in which the electromagnetic wave that has advanced in the second direction advances in the third direction, and a second state that advances the electromagnetic wave in the fourth direction. An electromagnetic wave detection device including a switching unit having a plurality of switching elements that can be switched to a state, and a second detection unit that detects the electromagnetic wave traveling in the third direction,
A control unit for acquiring information about the surroundings of the electromagnetic wave detection device based on a detection result of the electromagnetic wave by the second detection unit,
The information acquisition system, wherein the switching unit switches each of the plurality of switching elements to the first state and the second state according to an irradiation region of the electromagnetic wave emitted by the irradiation unit.

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