JP2020065005A - Transfer apparatus and processing apparatus - Google Patents

Abstract

To provide a transfer apparatus and a processing apparatus that enable improvement in efficiency of transferring a transfer target.SOLUTION: A rotation unit 21 is disposed in a transfer chamber 11 and rotates a transfer rail 22 around a rotation axis A in a first rotation direction and a second rotation direction. The transfer rail 22 is disposed in the transfer chamber 11, is capable of holding a transfer target T while the transfer rail is made to be rotating by the rotation unit 21, and allows the transfer target T to slide along an extending direction of the transfer rail 22 to transfer the target T between the transfer chamber 11 and the processing chamber positioned in the extension direction while the processing chamber is positioned in the extension direction. A drive unit 23 whose position with respect to the transfer chamber 11 is fixed is connected to the transfer rail 22 to apply force for driving the transfer rail 22 to the transfer rail 22 while a portion of the transfer rail 22 stops on the drive unit 23, and is not connected to the transfer rail 22 while the transfer rail 22 is rotating.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a transfer device and a processing device including the transfer device.

  The cluster type processing apparatus includes a transfer chamber and a plurality of processing chambers connected to the transfer chamber. The plurality of processing chambers are arranged at predetermined intervals in the circumferential direction of the transfer chamber. The plurality of processing chambers include, for example, a heating chamber that heats a processing target, a sputtering chamber that forms a thin film on the processing target using a sputtering method, and the like. The plurality of processing chambers include a first processing chamber and a second processing chamber that does not face the first processing chamber in the radial direction of the transfer chamber. The processing apparatus includes a transfer device for transferring a processing target between the transfer chamber and each processing chamber.

  When the transfer device transfers the processing target from the first processing chamber to the second processing chamber, first, the transfer device transfers the film formation target disposed in the first processing chamber to the transfer chamber. Then, the transfer device rotates the film formation target in the transfer chamber along one rotation direction so that the film formation target is parallel to the extending direction of the second processing chamber in the radial direction of the transfer chamber. Place it in a position along the specified direction. Finally, the transfer device transfers the processing target from the transfer chamber to the second processing chamber (see, for example, Patent Documents 1 and 2).

JP, 2014-28999, A JP, 2014-148736, A

By the way, in the processing apparatus, in order to improve the processing efficiency of the processing target, it is required to improve the transfer efficiency of the processing target, in other words, the transfer target of the transfer apparatus.
It is an object of the present invention to provide a transfer device and a processing device capable of increasing the transfer efficiency of a transfer target.

  A transfer device for solving the above problem is a transfer device that is applied to a processing device and transfers an object to be transferred. The processing apparatus includes a transfer chamber and a plurality of processing chambers connected to the transfer chamber. The transfer device is disposed in the transfer chamber and rotates a transfer rail about a rotation axis in a first rotation direction and a second rotation direction that is a rotation direction opposite to the first rotation direction. While being placed in the transfer chamber and being rotated by the rotating unit, the transfer target can be held, and the processing chamber is positioned and stopped in the extending direction of the transfer rail. While being moved, the slide of the transfer target is allowed along the extending direction of the transfer rail to transfer the transfer target between the transfer chamber and the processing chamber located in the extending direction of the transfer rail. The transport rail and a drive unit whose position with respect to the transport chamber are fixed, and the transport rail and the drive unit are connected while a part of the transport rail is stopped on the drive unit. The transport rail Powered for moving the transport rails, and, while the conveying rail is rotating, and a said drive unit which is not connected to the transport rail.

A processing apparatus for solving the above problem includes a transfer chamber, a plurality of processing chambers connected to the transfer chamber, and the transfer device.
According to each of the above configurations, by rotating the transfer target in the first rotation direction, it is possible to transfer the transfer target from the first processing chamber to the second processing chamber via the transfer chamber. It is also possible to transfer the transfer target from the second processing chamber to the first processing chamber via. Furthermore, by rotating the transfer target in the second rotation direction, it is possible to transfer the transfer target from the first processing chamber to the second processing chamber via the transfer chamber, and to transfer the transfer target to the second processing chamber via the transfer chamber. It is also possible to transfer the transfer target from the processing chamber to the first processing chamber. As described above, according to the above configuration, since the rotation direction of the transfer target is not limited, the degree of freedom in the transfer direction is increased, and thus the transfer efficiency of the transfer target can be increased.

  In the above-described transfer device, the transfer rail may be provided with an input unit connected to the drive unit and receiving power from the drive unit, one at each of both ends with the rotation shaft interposed therebetween. According to the above configuration, since the position of the input unit on the transport rail does not depend on the rotation direction of the transport rail, it is possible to increase the degree of freedom regarding the position of the drive unit connected to the input unit.

  In the above-described transfer device, the transfer chamber has a 2 × n (n is an integer of 2 or more) square shape in a bird's-eye view, and the transfer device is equally arranged around the rotation axis in the transfer chamber. The processing apparatus includes n driving units, and the processing apparatus includes 2 × n processing chambers, and the processing chambers are equidistantly arranged around the rotation shaft and are opposed to each other with the rotation shaft interposed therebetween. The drive units are associated with the chambers one by one, and each drive unit supplies the power for transporting the transport target between each of the processing chambers associated with the drive unit and the transport chamber. It may be provided on the transport rail.

  According to the above configuration, since it is possible to perform the transfer from the transfer chamber to the pair of processing chambers by one drive unit regardless of the rotation direction of the transfer rail, the number of drive units included in the transfer device is increased. Can be suppressed.

  In the above-described transfer device, the transfer rail is a first transfer rail, and further includes a second transfer rail extending along the first transfer rail, wherein the first transfer rail and the second transfer rail are the first transfer rail. One of the first transport rail and the second transport rail is arranged in a line along a direction orthogonal to the direction in which the first transport rail extends, and the rotating unit integrally rotates the first transport rail and the second transport rail. You may further provide the selection part which selects either one as the conveyance rail which conveys the said conveyance object.

  According to the above configuration, it is possible to simultaneously perform the transfer of the transfer target using the first transfer rail and the transfer of the transfer target using the second transfer rail. As a result, it is possible to improve the efficiency of carrying the object to be carried, as compared with the case where the carrying device includes only one carrying rail.

The block diagram which shows the structure of the vacuum processing apparatus provided with the conveyance apparatus of one Embodiment. The block diagram which shows the structure of a rotation part and a slide part. FIG. 6 is an operation diagram for explaining the operation of the rotating portion. FIG. 6 is an operation diagram for explaining the operation of the slide portion. FIG. 6 is a plan view showing the structure of the transport rail when the transport rail is viewed from above. The top view which shows the structure of a conveyance rail at the time of carrying out side view of a conveyance rail. The top view which shows the structure of the conveyance rail seen from the direction which opposes the edge part of a conveyance rail. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device. FIG. 6 is an operation diagram for explaining the operation of the transport device.

  An embodiment of a carrying device and a processing device will be described with reference to FIGS. 1 to 16. Hereinafter, an embodiment in which the processing apparatus is embodied as a vacuum processing apparatus that performs various kinds of processing in a vacuum atmosphere will be described. Further, below, the configuration of the vacuum processing apparatus, the configuration of the transfer apparatus, and the operation of the transfer apparatus will be described in order.

[Construction of vacuum processing equipment]
The configuration of the vacuum processing apparatus will be described with reference to FIG.
The vacuum processing apparatus 10 includes a transfer chamber 11, a plurality of processing chambers, and a transfer device 20. The plurality of processing chambers are connected to the transfer chamber 11.

  In the present embodiment, the vacuum processing apparatus 10 includes a first processing chamber 12A, a second processing chamber 12B, a third processing chamber 12C, a fourth processing chamber 12D, and a fifth processing chamber 12E. The first processing chamber 12A to the fifth processing chamber 12E are arranged at intervals in the circumferential direction of the transfer chamber 11. The number of processing chambers provided in the vacuum processing apparatus 10 may be any number of 2 or more.

  The transfer device 20 is applied to the vacuum processing device 10 as described above. The transfer device 20 transfers the transfer target T. In the present embodiment, the transport target T includes a carrier and a processing target attached to the carrier. The processing target is, for example, either a glass substrate or a resin substrate. The transport device 20 is in a state where the transport target T is erected, in other words, the transport device 20 is in a state in which an angle formed by a plane extending along the vertical direction and a plane where the transport target T spreads is 10 ° or less. Then, the transfer target T is transferred.

  The transfer device 20 includes a rotating unit 21, a transfer rail 22, and a drive unit 23. The rotating unit 21 is arranged in the transfer chamber 11. The rotating unit 21 rotates the transport rail 22 around the rotation axis A in the first rotation direction and the second rotation direction. The second rotation direction is the rotation direction opposite to the first rotation direction.

  The transfer rail 22 is arranged in the transfer chamber 11. The transport rail 22 can hold the transport target T while being rotated by the rotating unit 21. On the other hand, the transport rail 22 allows the transport target T to slide along the extending direction of the transport rail 22 while the processing chamber is positioned in the extending direction of the transport rail 22 and stopped. The extending direction is the direction in which the transport rail 22 extends. As a result, the transport rail 22 transports the transport target T between the transport chamber 11 and the processing chamber located in the extending direction of the transport rail 22.

  As described above, the vacuum processing apparatus 10 includes the five processing chambers from the first processing chamber 12A to the fifth processing chamber 12E. The transfer device 20 transfers the transfer target T between the transfer chamber 11 and any one of the first processing chamber 12A, the second processing chamber 12B, the third processing chamber 12C, the fourth processing chamber 12D, and the fifth processing chamber 12E. Can be transported. The transport rail 22 transports the transport target T from the transport chamber 11 to each processing chamber, and transports the transport target T from each processing chamber to the transport chamber 11.

  The position of the drive unit 23 with respect to the transfer chamber 11 is fixed. The drive unit 23 connects the transport rail 22 and the drive unit 23 while a part of the transport rail 22 is stopped on the drive unit 23, and supplies power for driving the transport rail 22 to the transport rail. give. The drive unit 23 is not connected to the transport rail 22 while the transport rail 22 is rotating. The drive unit 23 applies power to the transport rail 22 to slide the transport target T along the extending direction.

  Thereby, for example, by rotating the transfer target T in the first rotation direction, it is possible to transfer the transfer target T from the first processing chamber 12A to the second processing chamber 12B via the transfer chamber 11. It is also possible to transfer the transfer target T from the second processing chamber 12B to the first processing chamber 12A via the transfer chamber 11. Furthermore, by rotating the transfer target T in the second rotation direction, the transfer target T can be transferred from the first processing chamber 12A to the second processing chamber 12B via the transfer chamber 11, and the transfer chamber can be transferred. It is also possible to transfer the transfer target T from the second processing chamber 12B to the first processing chamber 12A via 11. As described above, according to the above configuration, since the rotation direction of the transfer target T is not limited, the degree of freedom in the transfer direction is increased, and thus the transfer efficiency of the transfer target T can be increased.

  In the present embodiment, the vacuum processing apparatus 10 further includes a carry-in / out chamber 13, an atmosphere heating chamber 14, a vacuum heating chamber 15, a plurality of gate valves 16, and a plurality of exhaust units 17. The carry-in / out chamber 13, the atmospheric heating chamber 14, and the vacuum heating chamber 15 are lined up in one direction. The vacuum heating chamber 15 is an example of a processing chamber connected to the transfer chamber 11. One of the plurality of gate valves 16 is arranged between the processing chambers. By opening each gate valve 16, a fluid flows between two adjacent processing chambers via the gate valve 16. By closing each gate valve 16, the flow of the fluid is shut off between the two adjacent processing chambers via the gate valve 16.

  The exhaust unit 17 is mounted in each of the vacuum heating chamber 15, the transfer chamber 11, the first processing chamber 12A, the second processing chamber 12B, the third processing chamber 12C, the fourth processing chamber 12D, and the fifth processing chamber 12E. Has been done. The exhaust unit 17 includes, for example, a valve and a vacuum pump. The exhaust unit 17 reduces the pressure in the processing chamber by exhausting the fluid in the processing chamber in which the exhaust unit 17 is mounted.

  The atmosphere heating chamber 14, the vacuum heating chamber 15, and the fourth processing chamber 12D each include a heating unit 31. The atmosphere heating chamber 14 and the vacuum heating chamber 15 heat the processing target before the processing to cause the processing target to release the gas adsorbed by the processing target. The atmospheric heating chamber 14 heats the processing target in the atmospheric atmosphere, while the vacuum heating chamber 15 heats the processing target in the vacuum atmosphere. As a result, the vapor pressure of the gas in each processing chamber is different, so that the gas adsorbed on the processing target is more easily released from the processing target than when one heating chamber is provided. The fourth processing chamber 12D heats the processing target after the processing in another processing. As a result, the fourth processing chamber 12D changes the state of the processing target to a state different from the state before heating.

  The first processing chamber 12A, the third processing chamber 12C, and the fifth processing chamber 12E each include a cathode 32. The cathode 32 includes a target. The targets included in each cathode 32 may be made of the same material as each other or may be made of different materials. The material forming each target may be a metal, a metal compound, a nonmetal, and a nonmetal compound. When the materials forming each target are the same, the processing efficiency of the processing target can be increased in the vacuum processing apparatus 10. When the materials forming each target are different from each other, a plurality of types of thin films can be formed on the processing target in the vacuum processing apparatus 10.

  The second processing chamber 12B includes an irradiation unit 33. The irradiation unit 33 irradiates the processing target with an ion beam. The irradiation unit 33 can modify the processing target or the thin film formed on the processing target by irradiating the processing target with an ion beam.

  The processing performed in each of the first processing chamber 12A to the fifth processing chamber 12E is an example of the processing that can be performed in each of the processing chambers 12A to 12E. The processing performed in each of the processing chambers 12A to 12E can be arbitrarily selected according to the product manufactured by using the vacuum processing apparatus 10.

  The transfer chamber 11 has a (2 × n) (n is an integer of 2 or more) square shape in a bird's-eye view, that is, in a plan view facing the bottom surface of the transfer chamber 11. The transfer device 20 includes n driving units 23 that are equally arranged around the rotation axis A in the transfer chamber 11. The vacuum processing apparatus 10 includes 2 × n processing chambers. The respective processing chambers are equidistantly arranged around the rotation axis A, and a pair of processing chambers facing each other across the rotation axis A is associated with one drive unit 23. Each drive unit 23 applies power to the transfer rail 22 to transfer the transfer target T between each processing chamber and the transfer chamber 11 associated with the drive unit 23.

  In the present embodiment, the transfer chamber 11 has a hexagonal shape in a bird's-eye view. That is, in the present embodiment, n described above is 3, and the transfer chamber 11 includes three pairs of diagonal lines. The vacuum processing apparatus 10 includes three driving units 23. Among the six processing chambers 12A to 12E and 15, the vacuum heating chamber 15 and the fourth processing chamber 12D are a pair of processing chambers that face each other with the rotation axis A in between, and are a first processing chamber pair. 12 A of 1st process chambers and 12 C of 3rd process chambers are a pair of process chambers which oppose on both sides of the rotating shaft A, and are a 2nd process chamber pair. The second processing chamber 12B and the fifth processing chamber 12E are a pair of processing chambers that face each other across the rotation axis A, and are a third processing chamber pair. One drive unit 23 is opposed to each processing chamber pair.

  In the present embodiment, the drive unit 23 associated with the first processing chamber pair has a vacuum higher than the rotation axis A in the direction in which the vacuum heating chamber 15 and the fourth processing chamber 12D face each other with the rotation axis A in between. It is located near the heating room. The drive unit 23 associated with the second processing chamber pair has the first processing chamber 12A with respect to the rotation axis A in the direction in which the first processing chamber 12A and the third processing chamber 12C face each other with the rotation axis A interposed therebetween. It is located close to. The drive unit associated with the third processing chamber pair is closer to the fifth processing chamber 12E than the rotation axis A in the direction in which the second processing chamber 12B and the fifth processing chamber 12E face each other across the rotation axis A. Is located in.

  The transfer device 20 further includes a plurality of transfer rails 24. In the vacuum processing apparatus 10, the atmosphere heating chamber 14, the vacuum heating chamber 15, the first processing chamber 12A, the second processing chamber 12B, the third processing chamber 12C, the fourth processing chamber 12D, and the fifth processing chamber 12E. One transfer rail 24 is arranged for each. The transfer rail 24 disposed in each of the vacuum heating chamber 15, the first processing chamber 12A, the second processing chamber 12B, the third processing chamber 12C, the fourth processing chamber 12D, and the fifth processing chamber 12E is the transfer chamber 11 The transfer target T is transferred between the processing chamber and each processing chamber. The transfer rail 24 arranged in the atmospheric heating chamber 14 transfers the transfer target T between the atmospheric heating chamber 14 and the vacuum heating chamber 15.

  The vacuum processing apparatus 10 further includes a controller 10C. The control unit 10C controls driving of the vacuum processing apparatus 10 by electrically connecting to each unit included in the vacuum processing apparatus 10. The control unit 10C is electrically connected to the transport device 20.

[Construction of transfer device]
The configuration of the transport device 20 will be described in more detail with reference to FIGS. 2 to 7. Below, each structure of the rotation part 21, the slide part, and the conveyance rail 22 which the conveyance apparatus 20 comprises is demonstrated in order.

[Rotating part and sliding part]
The configurations of the rotating unit 21 and the sliding unit will be described with reference to FIGS. 2 to 4. FIG. 2 schematically shows the structures of the rotating unit 21 and the sliding unit as seen from the direction facing the end of the transport rail 22. In other words, FIG. 2 shows the structures of the rotating portion 21 and the sliding portion when the rotating portion 21 and the sliding portion are visually recognized along the extending direction of the transport rail 22. FIG. 3 is a diagram for explaining the action of the rotating portion 21, and FIG. 4 is a diagram for explaining the action of the sliding portion. Note that, in FIG. 3, a part of the configuration of the vacuum processing apparatus 10 is omitted for convenience of illustration.

  As shown in FIG. 2, the transfer device 20 includes a rotating unit 21 and a slide unit 25. The rotating part 21 includes a motor 21A and a slide support part 21B. The motor 21A rotates about the rotation axis A in a first rotation direction R1 and a second rotation direction R2. The second rotation direction R2 is the rotation direction opposite to the first rotation direction R1. In the present embodiment, the rotation axis A is a straight line extending along the normal direction of the bottom surface of the transfer chamber 11 and a line passing through the center of the transfer chamber 11 in a bird's-eye view.

  The slide support portion 21B is connected to the motor 21A and the slide portion 25. Thereby, the slide support portion 21B supports the slide portion 25, and the slide portion 25 rotates in the first rotation direction R1 or the second rotation direction R2 in accordance with the rotation of the motor 21A.

  The slide portion 25 includes an air cylinder 25A, a slider 25B, and a rail support portion 25C. The air cylinder 25A includes an atmosphere box 25A1 and a rod 25A2. Atmosphere box 25A1 includes a cylinder connected to rod 25A2. In the air cylinder 25A, the protrusion amount of the rod 25A2 with respect to the atmosphere box 25A1 changes depending on the compressed air supplied to the cylinder. The protrusion amount of the rod 25A2 is the distance between the tip of the rod 25A2 and the atmosphere box 25A1.

  The slider 25B is fixed to a portion of the atmosphere box 25A1 opposite to the portion to which the slide support portion 21B is connected. The slider 25B includes a rail 25B1 and a carrier 25B2. The rail 25B1 extends along a direction parallel to the direction in which the rod 25A2 extends. The carrier 25B2 is connected to the rail 25B1 so as to be movable along the rail 25B1.

  The rail support portion 25C is connected to the tip of the rod 25A2 and the carrier 25B2. Therefore, the carrier 25B2 moves along the rail 25B1 by changing the protrusion amount of the rod 25A2. In this way, the rail support portion 25C is connected to the tip of the rod 25A2 and the carrier 25B2, whereby the movement of the rod 25A2 along the extending direction of the rod 25A2 and the movement of the carrier 25B2 are interlocked.

  Two transport rails 22 are fixed to a portion of the rail support portion 25C opposite to the portion to which the carrier 25B2 is connected. Therefore, when the rail support portion 25C moves along the rail 25B1, the transport rail 22 also moves along the rail 25B1. The transport rail 22 is connected to the motor 21A via the slide portion 25 and the slide support portion 21B. Therefore, the transport rail 22 rotates in the first rotation direction R1 or the second rotation direction R2 according to the rotation of the motor 21A.

  In this way, the transport rail 22 slides along the direction orthogonal to the extending direction of the transport rail 22. That is, the direction in which the rod 25A2 extends and the direction in which the rail 25B1 extends are orthogonal to the extending direction of the transport rail 22.

  As shown in FIG. 3, when the motor 21A rotates, the transport rail 22 rotates about the rotation axis A in the first rotation direction R1 or the second rotation direction R2. Although FIG. 3 shows an example in which the transport rails 22 rotate in a state where the centers of the two transport rails 22 and the rotation axis A coincide with each other, the two transport rails 22 are located at the centers of the two transport rails 22. Can rotate in a state of being eccentric with respect to the rotation axis A.

  As shown in FIG. 4, the slide portion 25 can slide the transport rail 22 along a direction orthogonal to the extending direction of the transport rail 22. It should be noted that, as shown in FIG. 4A, the slide portion 25 can slide the transport rail 22 along the first direction, and as shown in FIG. It is possible to slide the transport rail 22 along the direction. The second direction is the opposite direction to the first direction.

  Further, the slide portion 25 can select the transport rail 22 facing the gate valve 16 from the two transport rails 22 by sliding the transport rail 22. In other words, it is possible to select the transport rail 22 in which any one of the processing chambers is located in the extending direction of the transport rail 22. As shown in FIG. 4A, the slide unit 25 selects one of the two transport rails 22 as the transport rail 22 facing the gate valve 16, and as shown in FIG. The slide unit 25 selects the other transport rail 22 of the two transport rails 22 as the transport rail 22 facing the gate valve 16. Thereby, the transport rail 22 that transports the transport target T from the transport chamber 11 to the processing chamber is selected from the two transport rails 22. That is, in the present embodiment, the slide unit 25 is an example of a selection unit that selects one of the two transfer rails 22 as the transfer rail 22 that transfers the transfer target T from the transfer chamber 11 to the processing chamber.

[Conveyor rail]
The configuration of the transport rail 22 will be described with reference to FIGS. 5 to 7. FIG. 5 shows the structure of the transport rail 22 when the transport chamber 11 is viewed from a bird's eye view, in other words, when the transport chamber 11 is viewed from above. FIG. 6 shows the structure of the transport rail 22 when the transport rail 22 is viewed from the side, in other words, when the transport rail 22 shown in FIG. 5 is viewed from the direction from below to above the paper surface. FIG. 7 shows the structure of the transport rail 22 when viewed from the direction facing the end of the transport rail 22, in other words, when the transport rail 22 shown in FIG. 5 is viewed from the direction from left to right of the drawing. Shows.

  As shown in FIG. 5, the vacuum processing apparatus 10 includes a first transfer rail 22A and a second transfer rail 22B. The second transport rail 22B extends along the first transport rail 22A. 22 A of 1st conveyance rails and 22 B of 2nd conveyance rails are located in a line along the direction orthogonal to the direction in which 22 A of 1st conveyance rails extend. The rotating unit 21 integrally rotates the first transport rail 22A and the second transport rail 22B. Therefore, it is possible to carry out the carrying of the carrying target T using the first carrying rail 22A and the carrying of the carrying target T using the second carrying rail 22B at the same time. As a result, the efficiency of transporting the transport target T can be increased as compared with the case where the transport device 20 includes only one transport rail.

  Note that the first transport rail 22A and the second transport rail 22B differ in the positions in which they are arranged in the transport chamber 11, but have the same configuration regarding the transport of the transport target T. Therefore, hereinafter, the configuration of the first transport rail 22A will be described in detail, while the detailed description of the configuration of the second transport rail 22B will be omitted.

  The transport rail 22 includes a pair of frame bodies 41. Each frame 41 has a plate shape extending in one direction. The extending direction of the frame 41 is the extending direction of the transport rail 22. The rotation axis A is located at the center of the transport rail 22 in the extending direction of the transport rail 22. The transport rail 22 further includes a transmission shaft 42. The transmission shaft 42 extends along a direction parallel to the extending direction of the frame body 41.

  The transport rail 22 includes a pair of first gear pairs 43. The pair of first gear pairs 43 is arranged between the pair of frame bodies 41. The first gear pair 43 is located at each of both ends of the frame body 41. The first gear pair 43 is composed of a first gear 43A and a second gear 43B. The first gear 43A and the second gear 43B are bevel gears, respectively. The first gear 43A rotates with an axis extending along the vertical direction, while the second gear 43B rotates with an axis extending along the horizontal direction. When the second gear 43B meshes with the first gear 43A, the rotation of the first gear 43A is transmitted to the second gear 43B, or the rotation of the second gear 43B is transmitted to the first gear 43A.

  The transport rail 22 includes a pair of second gear pairs 44. The second gear pair 44 is arranged at each of both ends of the transmission shaft 42. The second gear pair 44 includes a first gear 44A and a second gear 44B. The first gear 44A and the second gear 44B are bevel gears, respectively. The first gear 44A is fixed to the end of the shaft to which the second gear 43B of the first gear pair 43 is fixed. The second gear 44B is fixed to the end of the transmission shaft 42 or in the vicinity of the end. When the second gear 44B meshes with the first gear 44A, the rotation of the first gear 44A is transmitted to the second gear 44B, or the rotation of the second gear 44B is transmitted to the first gear 44A.

  The transport rail 22 includes a pair of third gear pairs 45. The third gear pair 45 is arranged inside the pair of second gear pairs 44 with respect to the transmission shaft 42. The third gear pair 45 is composed of a first gear 45A and a second gear 45B. The first gear 45A and the second gear 45B are bevel gears, respectively. The first gear 45A is fixed to the transmission shaft 42 and rotates together with the transmission shaft 42. The second gear 45B is fixed to the end portion of the shaft of the roller 46 arranged between the pair of frame bodies 41. The roller 46 is rotated by the rotation of the transmission shaft 42 being transmitted via the second gear 45B.

  The transport rail 22 further includes a plurality of rollers 47. Each roller 47 is fixed to the pair of frame bodies 41. The transport rail 22 includes, for example, four rollers 47. Each of the rollers 47 rotates as the conveyance target T slides on the roller 47.

  As shown in FIG. 6, the pair of frame bodies 41 is provided with a cylindrical protection portion 48, one at each end thereof. The protection part 48 extends along a direction orthogonal to the direction in which the frame body 41 extends. In other words, the protection part 48 extends along the vertical direction. An input shaft 49 is located inside the protection unit 48. The input shaft 49 is connected to the drive unit 23 to input power from the drive unit 23. That is, in the present embodiment, the input shaft 49 is an example of the input unit.

  As described above, the transport rail 22 is provided with the input shafts 49 connected to the drive unit 23 and to which the power from the drive unit 23 is input, one at both ends with the rotary shaft A interposed therebetween. As a result, the position of the input shaft 49 on the transport rail 22 does not depend on the rotation direction of the transport rail 22, so that the degree of freedom of the position of the drive unit 23 connected to the input shaft 49 can be increased.

  FIG. 7 shows an example in which the transport rail 22 is stopped. FIG. 7 shows a state in which the input rail 49, which is a part of the transport rail 22, is positioned on the drive unit 23, and the transport rail 22 is stopped.

  As shown in FIG. 7, the drive unit 23 includes a motor 23A and a transmission shaft 23B connected to the motor 23A. The motor 23A is located outside the chamber 11A of the transfer chamber 11. On the other hand, in the transmission shaft 23B, the end connected to the motor 23A is located outside the chamber 11A, while the end connected to the input shaft 49 is located inside the chamber 11A. The transmission shaft 23B extends from the outside of the chamber 11A to the inside of the chamber 11A through the through hole 11A1 of the chamber 11A. The first gear 43A of the above-described first gear pair 43 is fixed to the end of the input shaft 49 opposite to the end connected to the transmission shaft 23B.

  When the first transport rail 22A transports the transport target T, the first transport rail 22A is stopped with the input shaft 49 positioned above the drive unit 23. Then, the transmission shaft 23B and the input shaft 49 are connected. Next, the motor 23A rotates, whereby the rotation of the motor 23A is transmitted to the input shaft 49 via the transmission shaft 23B. Then, the first gear 43A of the first gear pair 43 rotates, and the rotation of the first gear 43A is transmitted to the second gear 43B. As a result, the first gear 44A of the second gear pair 44 rotates and the second gear 44B of the second gear pair 44 rotates, whereby the transmission shaft 42 rotates. The rotation of the transmission shaft 42 is converted into the rotation of the roller 46 through the first gear 45A and the second gear 45B of the third gear pair 45.

  The space between the through hole 11A1 of the chamber 11A of the transfer chamber 11 and the transmission shaft 23B is sealed by a sealing portion (not shown). As a result, the pressure inside the transfer chamber 11 can be reduced.

[Operation of carrier device]
The operation of the carrier device 20 will be described with reference to FIGS. 8 to 16. Hereinafter, with reference to FIGS. 8 to 13, the operation of the transfer device 20 when the transfer target T is transferred in the order of the vacuum heating chamber 15, the first processing chamber 12A, and the second processing chamber 12B. explain. Next, referring to FIGS. 14 to 16, after the first transfer target T is transferred from the first processing chamber 12A to the transfer chamber 11, the second transfer target T is transferred from the vacuum heating chamber 15 to the transfer chamber 11 The operation of the transport device 20 when transporting to another will be described. 8 to 16, a part of the configuration of the vacuum processing apparatus 10 is omitted for convenience of illustration. Further, in FIGS. 8 to 16, dots are added to the drive unit 23 that gives power to the transport rail 22.

The operation of each unit described below is performed based on a control signal output from the control unit 10C to each unit.
As shown in FIG. 8, when the transfer target T is transferred from the vacuum heating chamber 15 to the transfer chamber 11, the gate valve 16 arranged between the vacuum heating chamber 15 and the transfer chamber 11 opens. Next, the driving unit 23 associated with the vacuum heating chamber 15 and the fourth processing chamber 12D is connected to one of the input shafts 49 included in the second transport rail 22B, so that power for transporting the transport target T can be obtained. To the second transport rail 22B. At this time, power for transporting the transport target T is also applied to the transport rail 24 of the vacuum heating chamber 15. As a result, the transfer target T is transferred from the vacuum heating chamber 15 toward the transfer chamber 11.

  As shown in FIG. 9, the rotating unit 21 rotates the second transport rail 22B in the second rotation direction R2. The second transport rail 22B rotates integrally with the first transport rail 22A. The rotating unit 21 rotates the second transfer rail 22B to a position facing the gate valve 16 between the transfer chamber 11 and the first processing chamber 12A. In other words, the rotating unit 21 stops the rotation of the first transport rail 22A and the second transport rail 22B in a state where the first processing chamber 12A is located in the extending direction of the second transport rail 22B. At this time, the second transfer rail 22B continues to transfer the transfer target T from the transfer chamber 11 to the first processing chamber 12A from when the transfer target T is transferred from the vacuum heating chamber 15 to the transfer chamber 11. Has been selected. Therefore, the slide unit 25 is not driven while the transfer target T is transferred from the transfer chamber 11 to the first processing chamber 12A.

  As shown in FIG. 10, when the transfer target T is transferred from the transfer chamber 11 to the first processing chamber 12A, the gate valve 16 arranged between the transfer chamber 11 and the first processing chamber 12A opens. Next, the drive unit 23 associated with the first processing chamber 12A and the third processing chamber 12C is connected to the same input shaft 49 as when the transfer target T is transferred from the vacuum heating chamber 15 to the transfer chamber 11. As a result, the drive unit 23 applies power for transporting the transport target T to the second transport rail 22B. At this time, the power for transporting the transport target T is also applied to the transport rail 24 of the first processing chamber 12A. As a result, the transfer target T is transferred from the transfer chamber 11 toward the first processing chamber 12A.

  As shown in FIG. 11, after the transfer target T is transferred from the transfer chamber 11 to the first processing chamber 12A, the gate valve 16 between the transfer chamber 11 and the first processing chamber 12A is closed. Next, a predetermined process is performed on the transfer target T in the first processing chamber 12A. In the present embodiment, the first transfer rail 22A and the second transfer rail 22B transfer the transfer target T from the transfer chamber 11 to the first processing chamber 12A until the processing in the first processing chamber 12A is completed. It is placed at the same position as when. In addition, until the processing in the first processing chamber 12A is completed, the first transfer rail 22A and the second transfer rail 22B are different from when the transfer target T is transferred from the transfer chamber 11 to the first processing chamber 12A. They may be arranged at different positions. In addition, until the processing in the first processing chamber 12A is completed, the first transfer rail 22A and the second transfer rail 22B have different transfer targets T from the transfer targets T arranged in the first processing chamber 12A. Alternatively, the transfer may be performed between the transfer chamber 11 and the processing chamber.

  After the processing in the first processing chamber 12A is completed, the transfer target T is transferred from the first processing chamber 12A to the transfer chamber 11. At this time, the same drive unit 23 as when the transfer target T is transferred from the transfer chamber 11 to the first processing chamber 12A applies power to the transfer target T to the second transfer rail 22B.

  As shown in FIG. 12, after the transfer target T is transferred from the first processing chamber 12A to the transfer chamber 11, the rotating unit 21 rotates the second transfer rail 22B in the first rotation direction R1. The rotating unit 21 rotates the second transfer rail 22B to a position facing the gate valve 16 between the transfer chamber 11 and the second processing chamber 12B. In other words, the rotating unit 21 stops the rotation of the first transport rail 22A and the second transport rail 22B in a state where the second processing chamber 12B is located in the extending direction of the second transport rail 22B. At this time, the second transfer rail 22B continuously transfers the transfer target T from the transfer chamber 11 to the second processing chamber 12B from the time when the transfer target T is transferred from the first processing chamber 12A to the transfer chamber 11. Selected for the rail. Therefore, the slide unit 25 is not driven while the transfer target T is transferred from the transfer chamber 11 to the second processing chamber 12B.

  As shown in FIG. 13, when the transfer target T is transferred from the transfer chamber 11 to the second processing chamber 12B, the gate valve 16 arranged between the transfer chamber 11 and the second processing chamber 12B opens. Next, the drive unit 23 associated with the second processing chamber 12B and the fifth processing chamber 12E is connected to the input shaft 49 that is different from when the transfer target T is transferred from the transfer chamber 11 to the first processing chamber 12A. . As a result, the drive unit 23 applies power for transporting the transport target T to the second transport rail 22B. At this time, the power for transporting the transport target T is also applied to the transport rail 24 of the second processing chamber 12B. As a result, the transfer target T is transferred from the transfer chamber 11 to the second processing chamber 12B.

  As described above, according to the transfer device 20, it is possible to perform the transfer from the transfer chamber 11 to the pair of processing chambers by the single drive unit 23 regardless of the rotation direction of the transfer rail 22, and thus the transfer device 20. It is possible to suppress an increase in the number of drive units 23 included in the. As described above, in this embodiment, the vacuum processing apparatus 10 includes the six processing chambers 12A to 12E. Therefore, in order that the transport rail 22 has the input shaft 49 only at one end and is capable of transporting the transport target T toward all the processing chambers 12A to 12E regardless of the rotation direction, One drive 23 is required. In this respect, according to the above-described transfer device 20, the number of drive units 23 can be made smaller than the number of transfer destination processing chambers 12A to 12E, 15.

  For example, the transfer device 20 transfers a new transfer target T from the vacuum heating chamber 15 to the transfer chamber 11 while transferring the transfer target T from the first processing chamber 12A to the second processing chamber 12B via the transfer chamber 11. You may convey. In the following description, the transport target T whose transport by the transport device 20 is started first is the first transport target T, and the transport target T after the transport by the transport device 20 is started is the second transport target T. is there.

  As shown in FIG. 14, after the first transfer target T is transferred from the first processing chamber 12A to the transfer chamber 11, the rotating unit 21 moves the first transfer rail 22A and the second transfer rail 22B in the first rotation direction. Rotate to R1. The rotating unit 21 rotates the second transfer rail 22B to a position facing the gate valve 16 arranged between the transfer chamber 11 and the vacuum heating chamber 15. In other words, the rotating unit 21 stops the rotation of the first transport rail 22A and the second transport rail 22B while the vacuum heating chamber 15 is positioned in the extending direction of the second transport rail 22B.

  As shown in FIG. 15, after the rotating unit 21 rotates the first transport rail 22A and the second transport rail 22B, the slide unit 25 moves the first transport rail 22A and the gate valve 16 to face each other. The first transport rail 22A and the second transport rail 22B are slid. In other words, the slide part 25 slides the first transport rail 22A so as to position the vacuum heating chamber 15 in the extending direction of the first transport rail 22A. As a result, the first transport rail 22A is selected as the transport rail that transports the second transport target T from the vacuum heating chamber 15 to the transport chamber 11.

  As shown in FIG. 16, when the second transfer target T is transferred from the vacuum heating chamber 15 to the transfer chamber 11, the gate valve 16 arranged between the vacuum heating chamber 15 and the transfer chamber 11 opens. Next, the drive unit 23 associated with the vacuum heating chamber 15 and the fourth processing chamber 12D is connected to the one input shaft 49 of the first transport rail 22A. As a result, the drive unit 23 gives power for transporting the second transport target T to the first transport rail 22A. At this time, the power for transporting the second transport target T is also applied to the transport rail 24 of the vacuum heating chamber 15. As a result, the second transfer target T is transferred from the vacuum heating chamber 15 toward the transfer chamber 11.

  The transfer device 20 is not limited to the transfer method described above, and can transfer between the transfer chamber 11 and the plurality of processing chambers 12A to 12E, 15 connected to the transfer chamber 11 in any order. Is. As a result, according to the vacuum processing apparatus 10, it is possible to arbitrarily change the processing order of the processing targets included in the transfer target T. Further, when the vacuum processing apparatus 10 includes a plurality of processing chambers that perform the same processing, the processing chambers that perform the predetermined processing on the processing target are set according to the progress status of the processing in each processing chamber. It is possible to arbitrarily select from the plurality. Moreover, in these cases, since the transport target T can be transported at the shortest distance because the rotation direction of the transport rail 22 is not limited, the transport device 20 enhances the transport efficiency of the transport target T. It is possible.

  As described above, in the example described with reference to FIGS. 14 and 15, after the rotating unit 21 rotates the first transport rail 22A and the second transport rail 22B, the slide unit 25 moves the first transport rail 22A. And the second transport rail 22B is slid. The present invention is not limited to this, and the rotating unit 21 may rotate the first transport rail 22A and the second transport rail 22B after the slide unit 25 slides the first transport rail 22A and the second transport rail 22B.

As described above, according to one embodiment of the transport device and the processing device, the following effects can be obtained.
(1) Since the rotation direction of the transfer target T is not limited, the transfer efficiency of the transfer target T can be improved.

  (2) Since the position of the input shaft 49 on the transport rail 22 does not depend on the rotation direction of the transport rail 22, it is possible to increase the degree of freedom regarding the position of the drive unit 23 connected to the input shaft 49.

  (3) Since it is possible to carry the transfer from the transfer chamber 11 to each processing chamber by one drive unit 23 regardless of the rotation direction of the transfer rail 22, the number of drive units 23 included in the transfer device 20 increases. Can be suppressed.

  (4) It is possible to simultaneously perform the transfer of the transfer target using the first transfer rail 22A and the transfer of the transfer target T using the second transfer rail 22B. As a result, the efficiency of transporting the transport target T can be increased as compared with the case where the transport device 20 includes only one transport rail.

The embodiment described above can be modified and implemented as follows.
[Conveyor rail]
The transport device 20 may include only one transport rail 22, or may include three or more transport rails 22. When the vacuum processing apparatus 10 includes a plurality of transport rails 22, the number of transport rails 22 is not limited to two, and the effect according to (4) described above can be obtained.

  The transport rail 22 may have the input shaft 49 only at one end in the extending direction of the transport rail 22. Even in this case, as long as the rotation direction of the transport rail 22 is not limited to one direction, the effect according to (1) described above can be obtained.

[Slide part]
The slide portion 25 may include a cylinder that drives the rod by a power other than compressed air, for example, hydraulic pressure, instead of the air cylinder 25A.

[Axis of rotation]
The rotation axis A is not limited to the center of the transfer chamber 11 in the bird's-eye view, but may be set at a position deviated from the center.

[Drive part]
The drive unit 23 associated with the first processing chamber pair may be located closer to the fourth processing chamber 12D than the rotation axis A in the direction in which the pair of processing chambers face each other. The drive unit 23 associated with the second processing chamber pair may be located closer to the third processing chamber 12C than the rotation axis A in the direction in which the pair of processing chambers face each other. The drive unit 23 associated with the third processing chamber pair may be located closer to the second processing chamber 12B than the rotation axis A in the direction in which the pair of processing chambers face each other. In any of these cases, the effect according to (3) described above can be obtained without being limited to the position where the drive unit 23 is arranged.

  The transfer device 20 may include the drive unit 23 associated only with each processing chamber. That is, in the above-described embodiment, the transport device 20 may include the six driving units 23. In addition, in the above-described embodiment, the transport device 20 may include three or more and six or less driving units 23.

[Transfer room]
The transfer chamber 11 may have a hexagonal shape or less in a bird's-eye view. The transfer chamber 11 may have, for example, a quadrangular shape or an octagonal shape in a bird's-eye view. Further, the transfer chamber 11 may have a triangular shape or a pentagonal shape. Even in these cases, as long as the rotation direction of the transport rail 22 is not limited to one direction, the effect according to (1) described above can be obtained.

[Processing room]
The number of processing chambers provided in the vacuum processing apparatus 10 may be two or more and five or less. In other words, the plurality of processing chambers need not be evenly arranged around the rotation axis. Further, the plurality of processing chambers may include a processing chamber having a processing chamber that faces the rotary shaft and a processing chamber that does not have the processing chamber facing the rotary shaft. Further, all of the plurality of processing chambers do not have to have processing chambers facing each other with the rotating shaft interposed therebetween. Even in these cases, as long as the rotation direction of the transport rail 22 is not limited to one direction, the effect according to (1) described above can be obtained.

[Processing device]
The processing device may be a device that includes only a processing chamber that performs various types of processing in the atmosphere.

10 ... Vacuum processing apparatus, 10C ... Control part, 11 ... Transfer chamber, 11A ... Chamber, 11A1 ... Through hole, 12A ... 1st processing chamber, 12B ... 2nd processing chamber, 12C ... 3rd processing chamber, 12D ... 4th Processing chamber, 12E ... Fifth processing chamber, 13 ... Loading / unloading chamber, 14 ... Atmosphere heating chamber, 15 ... Vacuum heating chamber, 16 ... Gate valve, 17 ... Exhaust part, 20 ... Conveying device, 21 ... Rotating part, 21A, 23A ... Motor, 21B ... Slide support part, 22, 24 ... Conveying rail, 22A ... 1st conveying rail, 22B ... 2nd conveying rail, 23 ... Drive part, 23B, 42 ... Transmission shaft, 25 ... Sliding part, 25A ... Air Cylinder, 25A1 ... Atmosphere box, 25A2 ... Rod, 25B ... Slider, 25B1 ... Rail, 25B2 ... Carrier, 25C ... Rail support part, 31 ... Heating part, 32 ... Cathode, 33 ... Irradiation , 41 ... Frame body, 43 ... First gear pair, 43A, 44A, 45A ... First gear, 43B, 44B, 45B ... Second gear, 44 ... Second gear pair, 45 ... Third gear pair, 46, 47 ... Roller, 48 ... Protection part, 49 ... Input shaft, A ... Rotary shaft, T ... Transport target.

Claims (5)

A transfer device which is applied to a processing device and transfers an object to be transferred,
The processing apparatus includes a transfer chamber and a plurality of processing chambers connected to the transfer chamber,
The carrier is
A rotating unit that is disposed in the transfer chamber and rotates the transfer rail about a rotation axis in a first rotation direction and a second rotation direction that is a rotation direction opposite to the first rotation direction;
While being placed in the transfer chamber and being rotated by the rotating unit, the transfer target can be held, and the processing chamber is positioned and stopped in the extending direction of the transfer rail. While being moved, the slide of the transfer target is allowed along the extending direction of the transfer rail to transfer the transfer target between the transfer chamber and the processing chamber located in the extending direction of the transfer rail. The transport rail,
A drive unit having a fixed position with respect to the transfer chamber, wherein the transfer rail and the drive unit are connected to each other while the transfer rail is partially stopped on the drive unit. And a driving unit that is not connected to the transport rail while the transport rail is rotating. The transport device according to claim 1, wherein the transport rail includes an input unit that is connected to the drive unit and receives power from the drive unit, one at each end of the rotary shaft with the rotary shaft interposed therebetween. The transfer chamber has a 2 × n (n is an integer of 2 or more) square shape in a bird's-eye view,
The transfer device includes n driving units that are evenly arranged around the rotation axis in the transfer chamber,
The processing apparatus comprises 2 × n processing chambers,
Each of the processing chambers is evenly arranged around the rotation shaft, and the drive unit is associated with one pair of processing chambers facing each other across the rotation shaft.
The transport device according to claim 2, wherein each drive unit applies the power for transporting the transport target between the processing chambers associated with the drive unit and the transport chamber to the transport rail. The transport rail is a first transport rail,
Further comprising a second transport rail extending along the first transport rail,
The first transport rail and the second transport rail are arranged along a direction orthogonal to a direction in which the first transport rail extends,
The rotating unit integrally rotates the first transport rail and the second transport rail,
The transport device according to any one of claims 1 to 3, further comprising: a selection unit that selects one of the first transport rail and the transport rail as a transport rail that transports the transport target. Transport room,
A plurality of processing chambers connected to the transfer chamber,
A processing apparatus comprising: the transfer device according to any one of claims 1 to 4.