JP2020056438A - Contact area structure product and method for forming contact area structure product - Google Patents

Contact area structure product and method for forming contact area structure product Download PDF

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JP2020056438A
JP2020056438A JP2018186431A JP2018186431A JP2020056438A JP 2020056438 A JP2020056438 A JP 2020056438A JP 2018186431 A JP2018186431 A JP 2018186431A JP 2018186431 A JP2018186431 A JP 2018186431A JP 2020056438 A JP2020056438 A JP 2020056438A
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contact surface
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structure product
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JP7373898B2 (en
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博司 沢田
Hiroshi Sawada
博司 沢田
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Canon Machinery Inc
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Canon Machinery Inc
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Abstract

To provide a contact area structure product capable of improving oil release degree without depending on base oil kinetic viscosity and worked penetration, to improve oil film formation capability and protective film formation capability, and reduce fretting wear, and a method for forming the contact area structure product.SOLUTION: A contact surface structure product relatively vibrates or minutely moves under grease lubrication. On at least one of a contact surfaces, a periodic structure of grating-shaped irregularities whose height continuously changes is formed, where convex vertices become non-flat surfaces. Moreover, a ratio (A/D) of an amplitude A of the vibration or minute movement to a contact width D in a minute movement direction is more than or equal to 1.SELECTED DRAWING: Figure 1

Description

本発明は、接触面構造品及び接触面構造品の形成方法に関するものである。   The present invention relates to a contact surface structure product and a method for forming the contact surface structure product.

転がり軸受や軸のはめ合い面などに振動や微小揺動運動が作用すると、接触面に潤滑剤が行き渡らず、フレッチング摩耗が発生することがある。フレッチング摩耗は精度や軸受トルクなどに悪影響を及ぼすため、耐フレッチング特性の向上が課題となっている。   When vibrations or minute oscillating movements act on the rolling bearings or the mating surfaces of the shafts, the lubricant does not spread to the contact surfaces, and fretting wear may occur. Fretting wear has an adverse effect on accuracy, bearing torque, and the like, and therefore, improvement of fretting resistance has been an issue.

特許文献1には、微小揺動時に、一対の軌道部材と転動体との接触面の摩耗(フレッチング摩耗)を防止する転がり軸受が提案されている。特許文献1に記載の転がり軸受は、一対の軌道部材の微小揺動時の振幅をAとし、転動体に接触する一対の軌道部材の軌道面に生じる接触円の半径をBとし、振幅Aと接触円の半径Bとの比(A/B)を振幅比Rとすると、微小揺動時の振幅比Rが1.5を超えるようにするものである。   Patent Literature 1 proposes a rolling bearing that prevents abrasion (fretting wear) of contact surfaces between a pair of track members and a rolling element during a minute swing. In the rolling bearing described in Patent Document 1, the amplitude at the time of the minute swing of the pair of track members is A, the radius of the contact circle generated on the track surfaces of the pair of track members in contact with the rolling elements is B, and the amplitude A is Assuming that the ratio (A / B) to the radius B of the osculating circle is the amplitude ratio R, the amplitude ratio R at the time of minute swing exceeds 1.5.

特開2008−95868号公報JP 2008-95868 A

グリースは、液体の潤滑油(基油またはベースオイル)に、増ちょう剤と呼ばれる微細な固体を分散して半固体状にした潤滑剤である。グリース潤滑下で接線方向の振動や微小揺動運動が作用した場合、グリースの基油動粘度が小さく、混和ちょう度が大きい(離油度の高い)ほど耐フレッチング性が向上する。これは、基油動粘度が小さく、混和ちょう度が大きいグリースは離油度が高く、接触域に残った高濃度の増ちょう剤が保護膜を形成することで耐フレッチング性が向上すると考えられるからである。   Grease is a semi-solid lubricant in which a fine solid called a thickener is dispersed in a liquid lubricant (base oil or base oil). When tangential vibration or micro-oscillating motion acts under grease lubrication, the fretting resistance improves as the kinematic viscosity of the base oil of the grease decreases and the penetration becomes higher (the degree of oil release increases). This is thought to be due to the fact that grease with a low base oil kinematic viscosity and a large degree of penetration has a high degree of oil release, and the high-concentration thickener remaining in the contact area forms a protective film to improve fretting resistance. Because.

前記特許文献1のものでは、グリースの離油度が低く、接触域から基油と一緒に保護膜の素材となる増ちょう剤も排除されることから、保護膜形成能が乏しく、フレッチング摩耗が生じることがある。   In the case of Patent Document 1, the grease has a low degree of oil separation, and a thickening agent that becomes a material of the protective film together with the base oil is also removed from the contact area, so that the protective film forming ability is poor and fretting wear is reduced. May occur.

また、揺動運動の耐フレッチング用グリースとして、基油動粘度が小さく、混和ちょう度が大きいグリースを適用した場合、基油動粘度が小さくなると油膜形成能が低下して油膜切れが生じやすく、混和ちょう度が大きくなると、保護膜を形成するための増ちょう剤が不足するため、増ちょう剤由来の保護膜形成能が低下する。このため、基油動粘度や混和ちょう度に依存することなく離油度を向上させることが望ましい。   In addition, as a grease for fretting resistance of rocking motion, when a grease having a low base oil kinematic viscosity and a high penetration consistency is used, when the base oil kinematic viscosity is reduced, an oil film forming ability is reduced and an oil film breakage easily occurs. When the mixing penetration becomes large, the thickener for forming the protective film becomes insufficient, so that the ability to form the protective film derived from the thickener decreases. For this reason, it is desirable to improve the degree of oil separation without depending on the kinematic viscosity of the base oil or the penetration consistency.

本発明は、上記課題に鑑みて、基油動粘度や混和ちょう度に依存することなく離油度を向上させて、油膜形成能と保護膜形成能を向上させるとともに、フレッチング摩耗を低減することができる接触面構造品及び接触面構造品の形成方法を提供する。   In view of the above problems, the present invention improves oil separation without depending on base oil kinematic viscosity and mixing consistency, improves oil film forming ability and protective film forming ability, and reduces fretting wear. And a method for forming the contact surface structure.

本発明の接触面構造品は、グリース潤滑下で相対的に振動や微小運動する接触面構造品において、少なくとも一方の接触面に、凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造が形成され、かつ、振動や微小運動の振幅Aと微小運動方向の接触幅Dとの比(A/D)が1以上である。   The contact surface structure product of the present invention is a contact surface structure product that relatively vibrates or moves slightly under grease lubrication. A periodic structure of changing grating-like irregularities is formed, and the ratio (A / D) of the amplitude A of the vibration or minute movement to the contact width D in the minute movement direction is 1 or more.

本発明の接触面構造品によれば、少なくとも一方の接触面に、凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造が形成されるため、油分に対し高い濡れ性を示し、グリースの離油度が増大し、増ちょう剤由来の移着膜の形成が促進される。移着膜は保護膜として作用するため、フレッチング摩耗を防止することができる。また、振動や微小運動の振幅Aと、振動や微小運動方向の接触幅Dとの比(A/D)を1以上とすることで、接触部が重なり合う常時接触部を解消できる。その結果、グリースの再流入性と摩耗粉の排出性が向上し、一層フレッチング摩耗を防止することができる。   According to the contact surface structure product of the present invention, at least one of the contact surfaces is formed with a periodic structure of grating-like irregularities in which the height of the convex portion is a non-flat surface and the height is continuously changed. On the other hand, it exhibits high wettability, increases the degree of oil release of the grease, and promotes the formation of a transfer film derived from the thickener. Since the transfer film acts as a protective film, fretting wear can be prevented. Further, by setting the ratio (A / D) of the amplitude A of the vibration or the minute movement to the contact width D in the direction of the vibration or the minute movement to be 1 or more, it is possible to eliminate the constant contact portion where the contact portions overlap. As a result, the re-inflow property of grease and the discharge property of wear powder are improved, and fretting wear can be further prevented.

前記構成において、前記グレーティング状凹凸の周期構造が接触面外に連通し、接触面外に付着するグリースと当接してもよい。これにより、接触面外のグリースから油が分離し、その油分を接触面内に移動させることで、フレッチング摩耗を防止することができる。   In the above-described configuration, the periodic structure of the grating-shaped irregularities may communicate with the outside of the contact surface and abut against the grease attached to the outside of the contact surface. As a result, the oil is separated from the grease outside the contact surface, and the oil is moved into the contact surface, so that fretting wear can be prevented.

前記構成において、前記グレーティング状凹凸の周期構造の凹凸が50nm以上10μm以下、かつ周期ピッチが10μm以下とすることができる。これにより、油分の保持性、移動性を向上することができる。周期構造の凹凸が50nm未満では十分な量の増ちょう剤を担持できず、凹凸および周期ピッチが10μmを超えると、増ちょう剤や油分がほとんど流出してしまう。   In the above-described configuration, the unevenness of the periodic structure of the grating-shaped unevenness can be 50 nm or more and 10 μm or less, and the periodic pitch can be 10 μm or less. Thereby, the oil retention and mobility can be improved. If the unevenness of the periodic structure is less than 50 nm, a sufficient amount of the thickener cannot be carried, and if the unevenness and the periodic pitch exceed 10 μm, the thickener and oil will almost flow out.

前記構成において、前記グレーティング状凹凸の周期構造が、振動や微小運動方向に沿って配向していてもよい。これにより、接触面に速やかに油分が移動し、潤滑特性を向上することができる。また、離油作用によって高濃度化した増ちょう剤が側方に排除されにくく、周期構造に沿って保持されるため、増ちょう剤の担持性が向上する。さらに、摩耗粉の排出性も向上する。   In the above-mentioned configuration, the periodic structure of the grating-shaped irregularities may be oriented along the direction of vibration or minute movement. As a result, the oil component quickly moves to the contact surface, and the lubrication characteristics can be improved. In addition, the thickener having a high concentration due to the oil releasing action is hardly removed to the side, and is held along the periodic structure, so that the carrying property of the thickener is improved. Further, the discharging property of the wear powder is also improved.

前記構成において、少なくとも一方の接触面に前記振動や微小運動方向と交差する方向の溝が振動や微小運動の振幅Aより狭い間隔で形成されていてもよい。これにより、微小運動方向の接触幅を分割することができる。その結果、微小運動方向の接触幅が広い場合でも微小運動の振幅Aと微小運動方向の接触幅Dとの比(A/D)を1以上とすることができ、フレッチング摩耗を防止することができる。   In the above configuration, grooves in a direction intersecting with the vibration or minute movement direction may be formed on at least one contact surface at an interval smaller than the amplitude A of the vibration or minute movement. Thereby, the contact width in the minute movement direction can be divided. As a result, even when the contact width in the minute movement direction is wide, the ratio (A / D) between the amplitude A of the minute movement and the contact width D in the minute movement direction can be made 1 or more, and fretting wear can be prevented. it can.

軸部材と、前記軸部材とのはめ合い面を備えた部品とを備え、前記一方の接触面は、軸部材の外周面又は前記はめ合い面であるのが好ましく、特に転がり軸受に用いられるのが好ましい。   A shaft member and a part having a fitting surface for the shaft member are provided, and the one contact surface is preferably an outer peripheral surface of the shaft member or the fitting surface, and is particularly used for a rolling bearing. Is preferred.

本発明の接触面構造品の形成方法は、グリース潤滑下で相対的に振動や微小運動する接触面構造品の形成方法において、少なくとも一方の接触面に、凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造を形成し、振動や微小運動の振幅Aと微小運動方向の接触幅Dとの比(A/D)を1以上とする。   According to the method for forming a contact surface structure product of the present invention, in the method for forming a contact surface structure product that relatively vibrates or moves slightly under grease lubrication, at least one of the contact surfaces has a convex apex that is a non-flat surface. A periodic structure of grating-like irregularities whose height continuously changes is formed, and the ratio (A / D) between the amplitude A of the vibration or minute movement and the contact width D in the minute movement direction is 1 or more.

本発明の接触面構造品及び接触面構造品の形成方法は、基油動粘度や混和ちょう度に依存することなく離油度を向上させて、油膜形成能と保護膜形成能を向上させるとともに、フレッチング摩耗を低減することができる。   The contact surface structure product and the method for forming the contact surface structure product of the present invention improve the oil separation without depending on the base oil kinematic viscosity and the mixing consistency, and improve the oil film forming ability and the protective film forming ability. And fretting wear can be reduced.

本発明の実施形態を示す接触面構造品の第1部材の第2部材との接触部を示す図であり、(a)はA/D<1、(b)はA/D=1、(c)はA/D>1を示す。It is a figure which shows the contact part with the 2nd member of the 1st member of the contact surface structure product which shows embodiment of this invention, (a) is A / D <1, (b) is A / D = 1, ( c) shows A / D> 1. 第2部材に対して第1部材を摺動させている状態の簡略斜視図である。FIG. 4 is a simplified perspective view of a state where a first member is slid with respect to a second member. 周期構造の拡大平面図である。It is an enlarged plan view of a periodic structure. 前記周期構造の形成に用いるレーザ表面加工装置の簡略図である。It is a simplified diagram of a laser surface processing device used for forming the periodic structure. 本発明の第2実施形態を示す接触面構造品の第1部材と第2部材との簡略平面図である。It is a simplified plan view of the first member and the second member of the contact surface structure product showing the second embodiment of the present invention. 往復動回数10000回における振幅比とボール側摩耗痕の振動方向長さの関係、及びしゅう動ストローク4mmで5000往復させた際の振幅比とボール側摩耗痕の振動方向長さの関係を示すグラフ図である。A graph showing the relationship between the amplitude ratio and the length of the ball-side wear mark in the vibration direction when the number of reciprocating movements is 10000, and the relationship between the amplitude ratio and the vibration direction length of the ball-side wear mark when reciprocating 5000 times with a sliding stroke of 4 mm. FIG. 前記図6におけるボール側摩耗痕の写真図である。FIG. 7 is a photograph of a ball-side wear mark in FIG. 6. 往復回数50000回におけるボール側摩耗痕長さの結果を示すグラフ図である。It is a graph which shows the result of the ball side wear mark length in 50,000 reciprocations. 前記図8におけるボール側摩耗痕の写真図である。FIG. 9 is a photograph of the ball-side wear mark in FIG. 8. 往復動回数50000回におけるプレート側摩耗痕深さの結果を示すグラフ図である。It is a graph which shows the result of the plate side wear mark depth in 50,000 reciprocating motion times. 前記図10におけるプレート側摩耗痕の写真図である。It is a photograph figure of the plate side wear trace in the said FIG.

以下本発明の実施の形態を図1〜図11に基づいて説明する。   An embodiment of the present invention will be described below with reference to FIGS.

本発明に係る接触面構造品は、図2に示すように、第1部材1と、第2部材2とがグリース潤滑下で相対的に接線方向の振動や微小運動をするものである。本実施形態において、「振動や微小運動」とは、接線方向における揺動や、振幅の比較的小さい往復動など、振幅の小さい運動全般を意味する。本発明では振動と微小運動とを区別する必要はなく、「振動や微小運動」を単に微小運動ということがある。   In the contact surface structure product according to the present invention, as shown in FIG. 2, the first member 1 and the second member 2 relatively perform tangential vibrations and minute movements under grease lubrication. In the present embodiment, “vibration or minute motion” means all motions with small amplitudes such as tangential swings and reciprocating motions with relatively small amplitudes. In the present invention, it is not necessary to distinguish between vibration and minute movement, and "vibration or minute movement" may be simply referred to as minute movement.

図例における第1部材1としてはSUJ2(高炭素クロム軸受鋼)等の金属製の球体で構成し、第2部材2はSUJ2(高炭素クロム軸受鋼)等の金属製の平板体で構成している。グリースは、本実施形態では脂環式ウレアグリースを使用しており、第1部材1(球体)の第2部材2との接触面に付着させている。   In the illustrated example, the first member 1 is formed of a metal sphere such as SUJ2 (high carbon chromium bearing steel), and the second member 2 is formed of a metal plate such as SUJ2 (high carbon chromium bearing steel). ing. The grease uses alicyclic urea grease in the present embodiment, and is attached to the contact surface of the first member 1 (sphere) with the second member 2.

第2部材2において、第1部材1との接触面2aには、図3に示すように、微小の凹部4と微小の凸部5とが交互に所定ピッチで配設されたグレーティング状凹凸の周期構造3が所定幅で帯状に形成されている。グレーティング状凹凸の周期構造3は、連続的に高さが変化するものである。この凹凸の高低差(凹部4の底部から凸部5の頂点までの高さ)が50nm以上10μm以下かつ、周期ピッチが10μm以下であるのが好ましい。本実施形態では、グレーティング状凹凸の周期構造3が微小運動方向(図2の矢印の方向)に沿って配向している。また、グレーティング状凹凸の周期構造3が接触面2a外に連通し、接触面2a外に付着するグリースと当接している。   As shown in FIG. 3, in the second member 2, a contact surface 2 a with the first member 1 has a grating-like unevenness in which minute concave portions 4 and minute convex portions 5 are alternately arranged at a predetermined pitch. The periodic structure 3 is formed in a band shape with a predetermined width. The height of the periodic structure 3 having the grating-like unevenness changes continuously. It is preferable that the height difference of this unevenness (the height from the bottom of the concave portion 4 to the apex of the convex portion 5) is 50 nm or more and 10 μm or less, and the periodic pitch is 10 μm or less. In the present embodiment, the periodic structure 3 having grating-like irregularities is oriented along the direction of minute movement (the direction of the arrow in FIG. 2). Further, the periodic structure 3 having the grating-like irregularities communicates with the outside of the contact surface 2a, and is in contact with grease adhering to the outside of the contact surface 2a.

油の接触角は、数1に示すようにWenzelの式で表せる。なお、数1において、rは表面積倍率であり、r>1である。θeは平滑面の接触角であり、θwはみかけの接触角である。数1により、θe>90°ではθw>θeとなり、θe<90°ではθw<θeとなる。すなわち、表面積倍率rが大きいほど油の接触角が低減し、表面粗さの導入により潤滑油の濡れ性が向上する。すなわち、本実施形態において、微小の凹部4と微小の凸部5とが交互に所定ピッチで配設されたグレーティング状凹凸の周期構造3を形成すると、油分に対し高い濡れ性を示し、グリースの離油度が増大し、増ちょう剤由来の移着膜の形成が促進される。移着膜は保護膜として作用するため、フレッチング摩耗を防止することができる。
The oil contact angle can be expressed by Wenzel's equation as shown in Equation 1. In Equation 1, r is a surface area magnification, and r> 1. θ e is the contact angle of the smooth surface, and θ w is the contact angle of apparent. The number 1, a theta e> In 90 ° become θ w> θ e, θ e <90 ° in θ we. That is, the larger the surface area ratio r, the smaller the oil contact angle, and the better the surface roughness, the better the wettability of the lubricating oil. That is, in this embodiment, when the periodic structure 3 of the grating-like irregularities in which the minute concave portions 4 and the minute convex portions 5 are alternately arranged at a predetermined pitch is formed, a high wettability to oil is exhibited, and The degree of oil separation is increased, and the formation of a transfer film derived from the thickener is promoted. Since the transfer film acts as a protective film, fretting wear can be prevented.

第1部材1と第2部材2とが振幅Aで振動や微小運動する場合、振幅A(図1参照)と微小運動方向の接触幅D(図1参照)との比(A/D)を1以上としている。なお、図1は、第1部材1の第2部材2との接触部6(第1部材1が第2部材2と接触している部分の外縁を示しており、符号6で示す円形の内側において第2部材2と接触している)を示す図であり、接触部6は、6aで示す実線の位置から6bで示す仮想線の位置までを往復する。図1の(a)はA/D<1の場合、(b)はA/D=1の場合、(c)はA/D>1の場合を示す。つまり、本実施形態において、第1部材1は、図1(b)又は図1(c)のように微小運動する。   When the first member 1 and the second member 2 vibrate or move minutely at the amplitude A, the ratio (A / D) between the amplitude A (see FIG. 1) and the contact width D (see FIG. 1) in the minute movement direction is determined. 1 or more. FIG. 1 shows a contact portion 6 of the first member 1 with the second member 2 (an outer edge of a portion where the first member 1 is in contact with the second member 2, and a circular inner portion denoted by reference numeral 6). In contact with the second member 2), and the contact portion 6 reciprocates from the position of the solid line indicated by 6a to the position of the virtual line indicated by 6b. 1A shows a case where A / D <1, FIG. 1B shows a case where A / D = 1, and FIG. 1C shows a case where A / D> 1. That is, in the present embodiment, the first member 1 makes a small movement as shown in FIG. 1B or FIG. 1C.

第1部材1と第2部材2との微小運動が、図1(a)のようにA/D<1の場合、接触部6が重なり合う常時接触部が生じる。常時接触部とは、図1(a)のハッチングで示すように、第1部材1が常時第2部材2と接触している箇所(領域)であり、運動中においては外側に現れない第1部材1と第2部材2同士が連続的に接触する領域である。一方、第1部材1と第2部材2との微小運動が、図1(b)のようにA/D=1の場合や、図1(b)のようにA/D>1の場合、常時接触部が生じない。その結果、グリースの再流入性と摩耗粉の排出性が向上し、一層フレッチング摩耗を防止することができる。   When the minute movement between the first member 1 and the second member 2 is A / D <1, as shown in FIG. 1A, a constant contact portion where the contact portions 6 overlap is generated. As shown by hatching in FIG. 1A, the constant contact portion is a portion (region) where the first member 1 is always in contact with the second member 2, and the first member that does not appear outside during exercise. This is an area where the member 1 and the second member 2 are in continuous contact with each other. On the other hand, when the minute movement between the first member 1 and the second member 2 is A / D = 1 as shown in FIG. 1B, or when A / D> 1 as shown in FIG. There is no contact at all times. As a result, the re-inflow property of grease and the discharge property of wear powder are improved, and fretting wear can be further prevented.

接触面構造品の形成方法は、まず、第1部材1又は第2部材2の接触面に周期構造3を形成する。周期構造3は、図4に示すように、レーザ発生器11と光学系10とを備えたレーザ表面加工装置を使用して形成する。   In the method for forming the contact surface structure, first, the periodic structure 3 is formed on the contact surface of the first member 1 or the second member 2. The periodic structure 3 is formed by using a laser surface processing device having a laser generator 11 and an optical system 10, as shown in FIG.

図4に示すレーザ表面加工装置では、レーザ発生器11は、ミラー12により加工材料
Wに向けて折り返され、メカニカルシャッタ13に導かれる。レーザ照射時はメカニカル
シャッタ13を開放し、レーザ照射強度は1/2波長板14と偏光ビームスプリッタ16
によって調整可能とし、1/2波長板15によって偏光方向を調整し、集光レンズ17に
よって、XYθステージ19上の加工材料W表面に集光照射することになる。
In the laser surface processing apparatus shown in FIG. 4, the laser generator 11 is turned toward the processing material W by the mirror 12 and is guided to the mechanical shutter 13. At the time of laser irradiation, the mechanical shutter 13 is opened, and the laser irradiation intensity is reduced to a half-wave plate 14 and a polarization beam splitter 16.
The polarization direction is adjusted by the half-wave plate 15, and the condensing lens 17 condenses and irradiates the surface of the processing material W on the XYθ stage 19.

周期構造3は、加工閾値近傍の照射強度で直線偏光のレーザを照射し、その照射部分をオーバーラップさせながら走査して、自己組織的に形成している。すなわち、アブレーション閾値近傍のフルエンスで直線偏光のレーザをワーク(加工材料)Wに照射した場合、入射光と加工材料Wの表面に沿った散乱光またはプラズマ波の干渉により、レーザ波長と同程度の周期間隔で、エネルギー分布にわずかな粗密が生じる。一般的な加工方法ではレーザ照射面全体が加工されるが、加工閾値近傍のエネルギー密度でレーザ照射することで、高エネルギー部分を選択的に加工することができる。その結果、1光軸のレーザ照射でありながら、グレーティング状の周期構造3が形成される。このとき、加工に用いるレーザのパルス幅が長くなるほど熱影響や加工蒸散物との相互作用によるレーザの散乱によって周期構造に乱れが生じることになる。   The periodic structure 3 is formed in a self-organizing manner by irradiating a linearly polarized laser with an irradiation intensity near the processing threshold value and scanning while overlapping the irradiated portions. That is, when a work (working material) W is irradiated with a linearly polarized laser beam at a fluence near the ablation threshold, the interference between incident light and scattered light or plasma waves along the surface of the working material W causes the laser light to be substantially equal to the laser wavelength. At periodic intervals, there is a slight densification of the energy distribution. Although the entire laser irradiation surface is processed by a general processing method, high-energy portions can be selectively processed by laser irradiation at an energy density near a processing threshold. As a result, a grating-shaped periodic structure 3 is formed while laser irradiation is performed on one optical axis. At this time, as the pulse width of the laser used for processing becomes longer, the periodic structure is more disturbed due to the influence of heat and the scattering of the laser due to the interaction with the evaporated material.

そして、前述のように、第1部材1と第2部材2とが振幅Aで振動や微小運動する場合、振幅Aと微小運動方向の接触幅Dとの比(A/D)が1以上となるようにする。   Then, as described above, when the first member 1 and the second member 2 vibrate or move minutely with the amplitude A, the ratio (A / D) between the amplitude A and the contact width D in the direction of the minute movement is 1 or more. To be.

本発明では、少なくとも一方の接触面に、凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造3が形成されるため、油分に対し高い濡れ性を示し、グリースの離油度が増大し、増ちょう剤由来の移着膜の形成が促進される。移着膜は保護膜として作用するため、フレッチング摩耗を防止することができる。また、振動や微小運動の振幅Aと微小運動方向の接触幅Dとの比(A/D)を1以上とすることで、接触部が重なり合う常時接触部を解消できる。その結果、グリースの再流入性と摩耗粉の排出性が向上し、一層フレッチング摩耗を防止することができる。このように、本実施形態では、基油動粘度や混和ちょう度に依存することなく離油度を向上させて、油膜形成能と保護膜形成能を向上させるとともに、フレッチング摩耗を低減することができる。   In the present invention, the periodic structure 3 of the grating-like irregularities in which the peaks of the convex portions are non-flat surfaces and whose height continuously changes is formed on at least one of the contact surfaces. As a result, the degree of oil release of the grease increases, and the formation of a transfer film derived from the thickener is promoted. Since the transfer film acts as a protective film, fretting wear can be prevented. In addition, by setting the ratio (A / D) of the amplitude A of the vibration or minute movement to the contact width D in the minute movement direction to be 1 or more, it is possible to eliminate the constant contact portion where the contact portions overlap. As a result, the re-inflow property of grease and the discharge property of wear powder are improved, and fretting wear can be further prevented. As described above, in the present embodiment, it is possible to improve the oil separation degree without depending on the base oil kinematic viscosity and the mixing consistency, improve the oil film forming ability and the protective film forming ability, and reduce the fretting wear. it can.

また、グレーティング状凹凸の周期構造3が接触面外に連通し、接触面外に付着するグリースと当接しているため、接触面外のグリースから油が分離し、その油分を接触面内に移動させることで、フレッチング摩耗を防止することができる。   In addition, since the periodic structure 3 of the grating-like irregularities communicates with the outside of the contact surface and is in contact with the grease adhering to the outside of the contact surface, the oil separates from the grease outside the contact surface and moves the oil to the inside of the contact surface. By doing so, fretting wear can be prevented.

グレーティング状凹凸の周期構造3の凹凸が50nm以上10μm以下、かつ周期ピッチが10μm以下としているため、油分の保持性、移動性を向上することができる。周期構造の凹凸が50nm未満では十分な量の増ちょう剤を担持できず、凹凸および周期ピッチが10μmを超えると、増ちょう剤や油分がほとんど流出してしまう。   Since the unevenness of the periodic structure 3 of the grating-like unevenness is 50 nm or more and 10 μm or less and the periodic pitch is 10 μm or less, the oil retention and mobility can be improved. If the unevenness of the periodic structure is less than 50 nm, a sufficient amount of the thickener cannot be carried, and if the unevenness and the periodic pitch exceed 10 μm, the thickener and oil will almost flow out.

グレーティング状凹凸の周期構造3が、振動や微小運動方向に沿って配向しているため、接触面に速やかに油分が移動し、潤滑特性を向上することができる。また、離油作用によって高濃度化した増ちょう剤が側方に排除されにくく、周期構造に沿って保持されるため、増ちょう剤の担持性が向上する。さらに、摩耗粉の排出性も向上する。   Since the periodic structure 3 of the grating-shaped irregularities is oriented along the direction of vibration or micro-motion, the oil can quickly move to the contact surface, and the lubrication characteristics can be improved. In addition, the thickener having a high concentration due to the oil releasing action is hardly removed to the side, and is held along the periodic structure, so that the carrying property of the thickener is improved. Further, the discharging property of the wear powder is also improved.

図5は第2実施形態を示す。少なくとも一方の接触面(本実施形態では第2部材2)に振動や微小運動方向と交差する方向の溝7が形成されている。溝7の数や幅は任意のものであってよく、本実施形態では2つの溝(7a、7b)が設けられている。溝7は微小運動の振幅Aより狭い間隔で形成されている。   FIG. 5 shows a second embodiment. A groove 7 is formed on at least one contact surface (the second member 2 in the present embodiment) in a direction intersecting the direction of vibration or minute movement. The number and width of the grooves 7 may be arbitrary, and in the present embodiment, two grooves (7a, 7b) are provided. The grooves 7 are formed at intervals smaller than the amplitude A of the minute movement.

これにより、第1部材1が第2部材2と接触した場合に、溝7では接触しないため、接触部6が領域d1、d2、d3に分割される。すなわち、微小運動方向の接触幅Dを分割することができ、本実施形態では、接触幅Dは、運動方向に3分割(d1、d2、d3)される。その結果、微小運動方向の接触幅Dが広く、図5に示すように(A/D)<1となるような場合であっても、微小運動の振幅Aと微小運動方向の接触幅Dとの比(A/D)を1以上とすることができ、フレッチング摩耗を防止することができる。   Thereby, when the first member 1 comes into contact with the second member 2, it does not come into contact with the groove 7, so that the contact portion 6 is divided into regions d 1, d 2 and d 3. That is, the contact width D in the minute movement direction can be divided, and in the present embodiment, the contact width D is divided into three (d1, d2, d3) in the movement direction. As a result, even when the contact width D in the small movement direction is large and (A / D) <1 as shown in FIG. 5, the amplitude A of the small movement and the contact width D in the small movement direction are different from each other. (A / D) can be set to 1 or more, and fretting wear can be prevented.

本発明は前記実施形態に限定されることなく種々の変形が可能であって、例えば、第1部材1及び第2部材2の接触面としては、平坦面形状であっても、凸曲面状であっても、凹曲面であってもよく、このため、第1部材1及び第2部材2としては、円柱状、円錐体乃至円錐台状等であってもよい。また、摺動方向として直線状ではなく、円形や楕円形状であってもよい。このため、第1部材1や第2部材2が回転しない、または、その軸心廻りに回転するものであってもよい。特に、第1部材1(又は第2部材2)が軸であり、第2部材2(又は第1部材1)が軸とのはめ合い面を有する部材であるのが好ましく、例えば転がり軸受に適用するのが好ましい。   The present invention can be variously modified without being limited to the above-described embodiment. For example, the contact surface between the first member 1 and the second member 2 may have a flat surface shape or a convex curved surface shape. The first member 1 and the second member 2 may have a columnar shape, a conical shape or a truncated conical shape. The sliding direction may be circular or elliptical, instead of linear. For this reason, the first member 1 and the second member 2 may not rotate, or may rotate around their axes. In particular, it is preferable that the first member 1 (or the second member 2) is a shaft and the second member 2 (or the first member 1) is a member having a fitting surface with the shaft, and is applied to, for example, a rolling bearing. Is preferred.

周期構造形成工程に使用するレーザとしては、フェムト秒レーザ、ピコ秒レーザ、及びナノ秒レーザといったパルスレーザを使用することができる。また、第1部材1側を固定して第2部材2を第1部材1に対して摺動させても、逆に、第2部材2側を固定して第1部材1を第2部材2に対して摺動させても、第1部材1と第2部材2とを摺動させてもよい。周期構造3は第1部材1に設けてもよい。また、グリースの種類は、本発明の接触面構造品としての用途に適したものを任意に選択することができる。   As a laser used in the periodic structure forming step, a pulse laser such as a femtosecond laser, a picosecond laser, and a nanosecond laser can be used. Further, even if the first member 1 is fixed and the second member 2 is slid with respect to the first member 1, on the contrary, the second member 2 is fixed and the first member 1 is , Or the first member 1 and the second member 2 may be slid. The periodic structure 3 may be provided on the first member 1. The type of grease can be arbitrarily selected to be suitable for use as the contact surface structure product of the present invention.

図2に示すような往復式ボールオンプレート試験機を用いてグリース潤滑下における微小往復運動時のフレッチング試験を行った。プレート試験片は光学研磨したSUJ基板(Ra2nm)とした。ボール試験片は直径6.35mmのSUJ2ボール(Ra8nm)とした。プレート試験片にはグレーティング状の周期構造(ピッチ約900nm、深さ約250nm)を幅1mmの帯状領域に形成した。周期構造の配向方向は、振動方向に対して直交(以下、周期直交プレートという)、および平行(以下、周期平行プレートという)の2方向とした。比較のため、未加工のプレート試験片(以下、鏡面プレートという)も用いた。   Using a reciprocating ball-on-plate tester as shown in FIG. 2, a fretting test was performed during a minute reciprocating motion under grease lubrication. The plate test piece was an optically polished SUJ substrate (Ra 2 nm). The ball test piece was a SUJ2 ball (Ra8 nm) having a diameter of 6.35 mm. A grating-shaped periodic structure (pitch: about 900 nm, depth: about 250 nm) was formed on a plate test piece in a band-like region having a width of 1 mm. The orientation direction of the periodic structure was two directions perpendicular to the vibration direction (hereinafter, referred to as a periodic orthogonal plate) and parallel (hereinafter, referred to as a periodic parallel plate). For comparison, an unprocessed plate test piece (hereinafter referred to as a mirror surface plate) was also used.

試験条件は、荷重5N(ヘルツ接触円直径D=95μm)、往復動速度4mm/s、往復動振幅A=40、60、90、140、190μm(振幅比A/D=0.42、0.63、0.95、1.47、2.00)、往復動回数は10000回(一部50000回)とした。グリースは脂環式ウレアグリース(増ちょう剤量16%、基油PAO6、ちょう度250)とし、試験前にボール側接触部に約0.1mg付着させた。フレッチング摩耗の評価には、ボール側摩耗痕の振動方向長さを用いた。往復動回数50000回のものについてはプレート側摩耗痕深さでも評価した。   The test conditions were as follows: load 5N (Hertz contact circle diameter D = 95 μm), reciprocating speed 4 mm / s, reciprocating amplitude A = 40, 60, 90, 140, 190 μm (amplitude ratio A / D = 0.42, 0. 63, 0.95, 1.47, 2.00), and the number of reciprocating movements was 10,000 (some 50,000). The grease was an alicyclic urea grease (16% thickener, base oil PAO6, consistency 250), and about 0.1 mg was attached to the contact portion on the ball side before the test. For the evaluation of fretting wear, the length of the ball-side wear mark in the vibration direction was used. Those having a reciprocating frequency of 50,000 were also evaluated on the plate side wear scar depth.

往復動回数10000回における振幅比とボール側摩耗痕の振動方向長さの関係を図6に示す。参考のため、図6では、しゅう動ストローク4mmで5000往復させた際の摩耗痕も合わせて示す。また、ボール側摩耗痕写真を図7に示す。   FIG. 6 shows the relationship between the amplitude ratio and the length of the ball-side wear mark in the vibration direction at 10,000 reciprocations. For reference, FIG. 6 also shows wear marks when the reciprocating motion was performed 5000 times with a sliding stroke of 4 mm. FIG. 7 shows a photograph of a ball-side wear mark.

鏡面プレートは、振幅比が1以上の場合、振幅が大きくなるにしたがって摩耗痕長さが増加した。また、図7(Polished)に示すように、鏡面プレートでは振幅比を問わずボール側摩耗痕への保護膜形成が乏しかったため、振幅が大きくなるほど摩耗量が増加したと考えられる。   When the amplitude ratio of the mirror surface plate was 1 or more, the wear scar length increased as the amplitude increased. In addition, as shown in FIG. 7 (Polished), it was considered that the amount of wear increased as the amplitude increased, because the formation of the protective film on the ball-side wear scar was poor regardless of the amplitude ratio in the mirror surface plate.

周期平行プレートは、全振幅比でヘルツ接触円直径と同等の安定した摩耗痕長さとなった。振動方向に平行の周期構造では、離油作用によって高濃度化した増ちょう剤が側方に排除されにくく、周期構造に沿って保持される。その結果、図7(Textured(//))に示すように、増ちょう剤由来の保護膜(写真図の黒色部分)形成が促進され、摩耗量が低減されたと考えられる。また、周期構造による摩耗粉の成長抑制効果も摩耗量が低減された一因と考えられる。   The periodic parallel plate had a stable wear scar length equivalent to the Hertzian contact circle diameter at all amplitude ratios. In the periodic structure parallel to the vibration direction, the thickener having a high concentration due to the oil releasing action is hardly removed to the side, and is held along the periodic structure. As a result, as shown in FIG. 7 (Textured (//)), it is considered that the formation of the protective film derived from the thickener (black portion in the photograph) was promoted, and the abrasion amount was reduced. In addition, the effect of suppressing the growth of wear powder by the periodic structure is also considered to be one of the causes of the reduction in the wear amount.

周期直交プレートは、接触円が重なり合う低振幅比領域(A/D<1)で摩耗痕長さが急増した。振動方向に直交の周期構造は、摩耗粉の流動性が悪く、連続接触となる低振幅比領域(A/D<1)では摩耗粉が周期構造内のグリースと置換する形で周期構造内に堆積し、摩耗が増大したと考えられる。しかし、図7(Textured(⊥))に示すように、振幅比の増加にともなって増ちょう剤由来の保護膜形成が促進され、周期平行プレートと同等の摩耗痕長さとなった。  In the periodic plate, the wear scar length increased rapidly in the low amplitude ratio region (A / D <1) where the contact circles overlap. In the periodic structure perpendicular to the vibration direction, the fluidity of the wear powder is poor, and in the low amplitude ratio region (A / D <1) where continuous contact occurs, the wear powder replaces the grease in the periodic structure in the periodic structure. It is considered that they accumulated and abrasion increased. However, as shown in FIG. 7 (Textured (⊥)), the formation of the protective film derived from the thickener was promoted with the increase in the amplitude ratio, and the wear scar length was equivalent to that of the periodic parallel plate.

往復回数50000回におけるボール側摩耗痕長さの結果を図8に示し、ボール側摩耗痕写真を図9に示す。図8において、ドットが鏡面プレートで、ハッチングが周期平行プレートである。鏡面プレートおよび周期平行プレートに対するボール側摩耗痕長さは、接触円が重なり合うA/D=0.63ではほとんど差が認められなかった。また、振幅が接触円直径より大きいA/D=1.47では、周期平行プレートにおいてほとんど摩耗が生じておらず、ヘルツ接触円直径と同等の摩耗痕長さとなった。ボール側摩耗痕長さについては、往復動回数10000回時とほぼ同様の結果となった。   FIG. 8 shows the result of the length of the ball-side wear mark at 50,000 reciprocations, and FIG. 9 shows a photograph of the ball-side wear mark. In FIG. 8, dots are mirror plates, and hatchings are periodic parallel plates. There was almost no difference in the length of the wear trace on the ball side between the mirror surface plate and the periodic parallel plate when A / D = 0.63 where the contact circles overlap. When A / D = 1.47 where the amplitude was larger than the diameter of the contact circle, almost no wear occurred on the periodic parallel plate, and the wear scar length was equivalent to the Hertzian contact circle diameter. With respect to the length of the wear scar on the ball side, the result was almost the same as when the number of reciprocations was 10,000.

往復動回数50000回におけるプレート側摩耗痕深さの結果を図10に示し、プレート側摩耗痕写真を図11に示す。図10において、ドットが鏡面プレートで、ハッチングが周期平行プレートである。A/D=0.63では周期平行プレートの摩耗痕深さが鏡面プレートより大きくなった。接触円が重なり合う常時接触部では潤滑不足となり、周期構造が摩耗した。しかし、A/D=1.47では周期平行プレートの摩耗痕深さは9nmとなり、ほとんど摩耗が生じなかった。さらに、A/D=2.0では周期平行プレートの摩耗痕深さは検出限界以下となった。このとき、プレート側にも増ちょう剤由来の保護膜(写真図の黒色部分)形成が認められた。   FIG. 10 shows the results of the plate-side wear scar depth when the number of reciprocations was 50000, and FIG. 11 shows a photograph of the plate-side wear scar. In FIG. 10, dots are mirror-surface plates, and hatchings are periodic parallel plates. At A / D = 0.63, the depth of wear mark of the periodic parallel plate was larger than that of the mirror plate. The lubrication was insufficient at the constant contact portions where the contact circles overlap, and the periodic structure was worn. However, when A / D = 1.47, the wear scar depth of the periodic parallel plate was 9 nm, and hardly any wear occurred. Further, at A / D = 2.0, the wear scar depth of the periodic parallel plate was below the detection limit. At this time, formation of a thickening agent-derived protective film (black portion in the photograph) was also observed on the plate side.

以上の結果から、本実施形態において、A/D≧1.47の条件下では、振動方向に平行の周期構造はボール側およびプレート側双方のフレッチング摩耗防止に極めて有効であることがわかった。   From the above results, it was found that in the present embodiment, under the condition of A / D ≧ 1.47, the periodic structure parallel to the vibration direction is extremely effective in preventing fretting wear on both the ball side and the plate side.

1 第1部材
2 第2部材
3 周期構造
4 凸部
5 凹部
REFERENCE SIGNS LIST 1 first member 2 second member 3 periodic structure 4 convex portion 5 concave portion

Claims (8)

グリース潤滑下で相対的に振動や微小運動する接触面構造品において、
少なくとも一方の接触面に、凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造が形成され、かつ、振動や微小運動の振幅Aと微小運動方向の接触幅Dとの比(A/D)が1以上であることを特徴とする接触面構造品。
For contact surface structure products that relatively vibrate or move slightly under grease lubrication,
On at least one contact surface, a periodic structure of grating-like irregularities whose height is continuously changed by forming a convex apex as a non-flat surface is formed. A contact surface structure product having a ratio (A / D) to a width D of 1 or more.
前記グレーティング状凹凸の周期構造が接触面外に連通し、接触面外に付着するグリースと当接していることを特徴とする請求項1に記載の接触面構造品。   2. The contact surface structural product according to claim 1, wherein the grating-like concave-convex periodic structure communicates outside the contact surface and is in contact with grease adhering outside the contact surface. 3. 前記グレーティング状凹凸の周期構造の凹凸が50nm以上10μm以下、かつ周期ピッチが10μm以下であることを特徴とする請求項1又は請求項2に記載の接触面構造品。   The contact surface structure product according to claim 1, wherein the unevenness of the periodic structure of the grating-like unevenness is 50 nm or more and 10 μm or less, and the periodic pitch is 10 μm or less. 前記グレーティング状凹凸の周期構造が、振動や微小運動方向に沿って配向していることを特徴とする請求項1〜請求項3のいずれか1項に記載の接触面構造品。   The contact surface structure product according to any one of claims 1 to 3, wherein the periodic structure of the grating-shaped irregularities is oriented along the direction of vibration or minute movement. 少なくとも一方の接触面に前記振動や微小運動方向と交差する方向の溝が振動や微小運動の振幅Aより狭い間隔で形成されていることを特徴とする請求項1〜請求項4のいずれか1項に記載の接触面構造品。   The groove in a direction intersecting the vibration or minute movement direction is formed on at least one contact surface at an interval smaller than the amplitude A of the vibration or minute movement. The contact surface structure product described in the item. 軸部材と、前記軸部材とのはめ合い面を備えた部品とを備え、前記一方の接触面は、軸部材の外周面又は前記はめ合い面であることを特徴とする前記請求項1〜請求項5のいずれか1項に記載の接触面構造品。   A shaft member and a component having a fitting surface with the shaft member, wherein the one contact surface is an outer peripheral surface of the shaft member or the fitting surface. Item 6. The contact surface structure product according to any one of items 5. 転がり軸受に用いられることを特徴とする請求項6に記載の接触面構造品。   The contact surface structure product according to claim 6, which is used for a rolling bearing. グリース潤滑下で相対的に振動や微小運動する接触面構造品の形成方法において、
少なくとも一方の接触面に、凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造を形成し、
振動や微小運動の振幅Aと微小運動方向の接触幅Dとの比(A/D)を1以上とすることを特徴とする接触面構造品の形成方法。
In the method of forming a contact surface structure product that relatively vibrates or moves slightly under grease lubrication,
On at least one contact surface, a peak structure is formed as a non-flat surface to form a periodic structure of grating-like irregularities whose height changes continuously,
A method for forming a contact surface structure, wherein a ratio (A / D) of an amplitude A of vibration or micro motion to a contact width D in the micro motion direction is 1 or more.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001200855A (en) * 2000-01-18 2001-07-27 Nsk Ltd Rolling bearing
JP2012031989A (en) * 2010-06-30 2012-02-16 Nsk Ltd Rolling bearing, and pulley with damper equipped therewith
JP2016070454A (en) * 2014-10-01 2016-05-09 キヤノンマシナリー株式会社 Process of manufacture of slide member
JP2017214996A (en) * 2016-06-01 2017-12-07 キヤノンマシナリー株式会社 Sliding surface structure and method of manufacturing the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001200855A (en) * 2000-01-18 2001-07-27 Nsk Ltd Rolling bearing
JP2012031989A (en) * 2010-06-30 2012-02-16 Nsk Ltd Rolling bearing, and pulley with damper equipped therewith
JP2016070454A (en) * 2014-10-01 2016-05-09 キヤノンマシナリー株式会社 Process of manufacture of slide member
JP2017214996A (en) * 2016-06-01 2017-12-07 キヤノンマシナリー株式会社 Sliding surface structure and method of manufacturing the same

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