JP2020049408A - Water treatment device, and device of detecting degradation of ultraviolet lamp for water treatment device - Google Patents

Abstract

To provide a water treatment device capable of more efficiently treating water by virtue of its excellent disinfecting/cleaning function even when a plurality of water treatment devices are used in a longer channel for treating a large amount of water, by intensively monitoring a lighted state and an unlighted state of a plurality of ultraviolet lamps while minimizing adverse influence on its components caused by ultraviolet rays, and a device of detecting degradation of an ultraviolet lamp for use in a water treatment device.SOLUTION: The water treatment device comprising a reaction tank 2 incorporating an ultraviolet lamp 10 emitting ultraviolet rays to water to be treated, a photocatalyst 7 disposed in the reaction tank 2, an ozone supply section 4 that supplies the reaction tank 2 with ozone, an ultraviolet sensor 3 disposed outside the reaction tank 2 to measure the ultraviolet illuminance of the ultraviolet lamp 10 when water to be treated flows through the inside of the reaction tank 2, and a memory/control device 5 having a function of converting the ultraviolet illuminance measured by the ultraviolet sensor 3 to an ultraviolet illuminance of a specific wavelength, is characterized in that the memory/control device 5 has a function of detecting an unlighted state of the ultraviolet lamp or a degraded state of the ultraviolet lamp based on the ultraviolet illuminance of the specific wavelength.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a water treatment apparatus and a water treatment apparatus for treating water to be treated, such as pure water used in a semiconductor manufacturing process or a liquid crystal manufacturing process, or a nutrient solution used for agricultural cultivation in a reusable manner. The present invention relates to an apparatus for detecting deterioration of an ultraviolet lamp for an apparatus.

  For example, in the manufacturing process of semiconductor elements and liquid crystal glass, a large amount of pure water is used to wash semiconductor wafer substrates, liquid crystal glass substrates, glass substrates, and the like, while in the agricultural field, growing crops by hydroponic cultivation. Requires a large amount of nutrient solution. Regarding the use of such a large amount of water, it is desired to collect and reuse used pure water and nutrient solution from the viewpoints of reducing the burden on the environment and effectively utilizing water resources.

  When treating pure water or nutrient solution in a reusable manner, a water treatment device is generally provided in a part of a flow path for circulating the water to be treated, and the water treatment device is used to disinfect the water to be treated. An ultraviolet lamp (ultraviolet light source) for purifying is often provided. When purifying bacteria using an ultraviolet lamp, an ultraviolet sensor for measuring ultraviolet rays may be provided in order to measure ultraviolet illuminance required for purifying bacteria to be treated.

  For example, in the ultraviolet irradiation device of Patent Document 1, an ultraviolet monitoring window is provided in a reaction tank through which water to be treated flows, and an ultraviolet monitor serving as an ultraviolet sensor is installed in the ultraviolet monitoring window. Then, the UV illuminance transmitted through the water to be treated is measured by an ultraviolet monitor, and the UV transmittance to the water to be treated is calculated based on the UV illuminance and the UV illuminance radiated from the irradiation unit. The deterioration of the part is detected.

  On the other hand, in the ultraviolet water treatment system of Patent Document 2, an ultraviolet illuminometer for measuring ultraviolet light is provided in the ultraviolet water treatment device, and the illuminance is measured by the illuminometer. In this system, the measured illuminance is compared with a preset set value, and a decrease in the illuminance of the ultraviolet lamp or a lamp burnout is predicted according to the state.

  There is disclosed a water treatment apparatus using an ultraviolet lamp, in which an ozone supply device is added to further increase the sterilization and purification ability (for example, see Patent Document 3). In this water treatment device, an ozone supply device is disposed on the primary side of an ultraviolet irradiation device, and the water to be treated supplied with ozone passes through an ultraviolet lamp in a reaction vessel, and is sterilized and purified by the ultraviolet light of the ultraviolet lamp. . In addition, a photocatalyst is provided in the reaction vessel, and the photocatalyst also performs sterilization of water to be treated and decomposition of organic substances.

  A large number of water treatment devices are required in order to disinfect and purify a large amount of water to be treated by these water treatment devices so that the water can be reused, and accordingly, the number of ultraviolet lamps used increases. . In this case, in order to maintain the sterilizing and purifying function by ultraviolet rays at a constant level, it is necessary that each of the ultraviolet lamps is reliably turned on during operation and the ultraviolet illuminance has reached a predetermined level or more. Therefore, in recent years, there has been a demand for a water treatment apparatus capable of centrally monitoring the on / off state of the ultraviolet lamp and the decrease in the ultraviolet illuminance.

Japanese Patent No. 5649703 JP 2009-82774 A Japanese Patent No. 4229363

In order to confirm the on / off state of the ultraviolet lamp, for example, it is conceivable to detect an on / off control signal for each ultraviolet lamp. In this case, although the control signal is on, Depending on the life of the ultraviolet lamp or the like, the lamp may be actually turned off and cannot be detected accurately.
On the other hand, it is also conceivable to visually check the on / off state of the ultraviolet lamp on site. It takes time and effort to visually recognize the lighting state of each of the many ultraviolet lamps installed along the road.

In contrast, Patent Literature 1 and Patent Literature 2 attempt to collectively monitor the state of the ultraviolet lamps collectively. However, since these are located close to the ultraviolet lamp and the ultraviolet sensor, they are difficult to monitor. The components including the ultraviolet sensor are easily deteriorated by the ultraviolet rays. For this reason, it is necessary to take measures such as increasing the thickness of the signal transmission wiring of the ultraviolet sensor. Further, in order to prevent the attenuation of the ultraviolet rays, it is necessary to reduce the distance between the ultraviolet lamp and the flow path, but this makes it difficult to arrange the ultraviolet sensor in the flow path.
For these reasons, it is difficult to construct a long water treatment channel in the semiconductor manufacturing and agricultural fields by using a large number of this type of ultraviolet irradiation device, and to accurately measure the on / off state of the ultraviolet lamp and the state of ultraviolet illuminance. It becomes difficult to do.

  Further, in the case where an ozone supply device is provided in an ultraviolet irradiation device as in Patent Document 3, in order to effectively sterilize and purify ozone-supplied water to be treated with an ultraviolet lamp, in particular, ultraviolet light having a wavelength of about 254 nm is used. It is necessary to generate a radical reaction by irradiation. In this case, the illuminance of ultraviolet light having a wavelength of about 254 nm has a characteristic of being extremely attenuated as the distance from the light source of the ultraviolet lamp increases, so that the distance between the ultraviolet lamp and the flow path must be further reduced. It becomes more difficult to place an ultraviolet sensor inside.

For the above-described reasons, it may not be possible to accurately measure a decrease in the amount of ultraviolet irradiation due to deterioration of the ultraviolet lamp or the like. As a result, there is a possibility that the water to be treated cannot be sufficiently irradiated with the ultraviolet light.
For this reason, when this ultraviolet irradiation apparatus is used in, for example, a semiconductor manufacturing process, complex sterilization and purification using an ozone supply device and a photocatalyst cannot be effectively performed due to a shortage of ultraviolet light, and particularly high quality is required. There is a risk of adversely affecting semiconductor products.
On the other hand, when used for agricultural cultivation, since the nutrient solution contains impurities, there is also a problem that the glass that transmits ultraviolet light is easily stained due to the attachment of the impurities. In this case, the amount of irradiation of ultraviolet rays decreases more drastically, and the action of removing and purifying bacteria by ultraviolet rays becomes insufficient.

  If an ultraviolet sensor is provided inside the reaction tank, it becomes difficult to take out the ultraviolet sensor in the event of a failure, and in particular, if the water treatment device is downsized, it becomes more difficult to attach and detach it, making maintenance more difficult. Have.

  The present invention has been developed in order to solve the above-mentioned problems, and the object thereof is to turn on / off the ultraviolet lamp even when a large number of water treatments are used in a long flow path. And a water treatment device that can efficiently treat water with a high sterilization and purification function while minimizing adverse effects on parts due to ultraviolet rays and a deterioration detection device for ultraviolet lamps for water treatment devices. To provide.

  In order to achieve the above object, an invention according to claim 1 is a reaction tank having a built-in ultraviolet lamp for irradiating ultraviolet rays to water to be treated, a photocatalyst provided inside the reaction tank, and ozone for supplying ozone to the reaction tank. A supply unit, and an ultraviolet sensor that measures the ultraviolet illuminance of an ultraviolet lamp when the water to be treated passes through the reaction tank is disposed outside the reaction tank, and a specific ultraviolet light intensity is measured from the ultraviolet illuminance measured by the ultraviolet sensor. The water treatment device includes a storage / control device having a function of converting the wavelength into ultraviolet illuminance, and the storage / control device has a function of detecting whether the ultraviolet lamp is turned off or deteriorated based on the ultraviolet illuminance of a specific wavelength.

  In the invention according to claim 2, the ultraviolet illuminance of a specific wavelength is an ultraviolet illuminance of a wavelength of about 254 nm which causes a radical reaction of the water to be treated, and the ultraviolet illuminance measured by the ultraviolet sensor is more than the wavelength of about 254 nm. Water treatment equipment with long UV illuminance.

  According to a third aspect of the present invention, there is provided a water treatment apparatus provided with an outer glass tube having a property of transmitting ultraviolet light having a wavelength longer than at least about 254 nm, and an ultraviolet sensor disposed close to the outer glass tube. It is.

  According to a fourth aspect of the present invention, the storage / control device has a function of detecting turning off when the ultraviolet illuminance of the ultraviolet lamp is zero, or detecting a life time when the ultraviolet illuminance falls below a predetermined value. Water treatment equipment.

  The invention according to claim 5 is that, in the storage / control device, illuminance attenuation characteristic data for conversion from ultraviolet illuminance measured by an ultraviolet sensor to ultraviolet illuminance of a specific wavelength is stored for each type of the water to be treated. Water treatment equipment.

  7. The water treatment apparatus according to claim 6, wherein the illuminance attenuation characteristic data is data corresponding to two waters to be treated: pure water used for semiconductor manufacturing and nutrient solution used for agricultural use.

  According to a seventh aspect of the present invention, the storage / control device includes a storage unit and a control unit, wherein the storage unit stores the illuminance attenuation characteristic data, and the control unit reduces the illuminance of the ultraviolet light measured by the ultraviolet sensor. The water treatment apparatus has a function of converting into an ultraviolet illuminance of a specific wavelength through characteristic data, and detecting the turning off or deterioration state of the ultraviolet lamp from the converted value.

  According to an eighth aspect of the present invention, the storage / control device is configured such that, based on the ultraviolet illuminance of the specific wavelength, each of the states of replacement of the ultraviolet lamp, cleaning of the reaction tank, turning off of the ultraviolet lamp due to exhaustion or failure of the ultraviolet lamp. This is a water treatment apparatus having a function of issuing a predetermined signal notifying the user.

  The invention according to claim 9 is a deterioration detection device for an ultraviolet lamp for a water treatment device, which is provided in the water treatment device and includes an ultraviolet sensor and a storage / control device.

  According to the invention according to claim 1, an ultraviolet sensor for measuring the ultraviolet illuminance of the ultraviolet lamp is arranged outside the reaction tank, and the ultraviolet illuminance measured by the ultraviolet sensor is converted into an ultraviolet illuminance of a specific wavelength by the storage / control device. Then, by detecting whether the ultraviolet lamp is turned off or deteriorated from the ultraviolet illuminance, the state of the ultraviolet lamp can be confirmed without providing an ultraviolet sensor inside the reaction tank. For this reason, it is possible to prevent ultraviolet rays having a wavelength that adversely affects the components from leaking to the outside, and it is possible to prevent ultraviolet rays sensors and other components from malfunctioning by measuring ultraviolet rays having a wavelength with little adverse effect outside the reaction tank. In addition, the ultraviolet illuminance required for sanitizing and purifying can be secured. Even when many lamps are used in a long flow path such as a semiconductor manufacturing process requiring a large amount of water treatment, it is possible to intensively monitor the on / off state and the deterioration state of the ultraviolet lamp, which increase with the use. As a result, the water to be treated supplied with ozone by the ozonizer is subjected to an ultraviolet treatment and a sanitizing and purifying treatment by activating the photocatalyst sufficiently, and in particular, the irradiation of the treated water containing ozone with an appropriate amount of ultraviolet rays. , And the water treatment can be efficiently performed with a high sterilization and purification function that synergistically improves the sterilization and purification function of ozone and ultraviolet rays. If a failure occurs in the ultraviolet sensor, maintenance can be easily performed by removing ultraviolet rays outside the reaction tank.

  According to the second aspect of the present invention, the ultraviolet sensor measures ultraviolet illuminance having a wavelength longer than approximately 254 nm, which has less adverse effect on components, and from the measurement result, the ultraviolet light having a wavelength of approximately 254 nm is applied to the water to be treated flowing through the internal flow path. Illuminance can be detected. Thereby, it is possible to maintain the ultraviolet illuminance on the water to be treated having a wavelength of about 254 nm, promote the radical reaction of the water to be treated containing ozone, effectively generate hydroxy radicals, and enhance the sterilization and purification effect. it can.

  According to the third aspect of the invention, ultraviolet rays having a wavelength of about 254 nm are blocked to prevent leakage to the outside. As a result, it is possible to prevent the deterioration of the external components by avoiding the adverse effects of ultraviolet rays, while ensuring an excellent sterilizing and purifying effect on the water to be treated flowing through the internal flow passage. In this case, ultraviolet rays having a wavelength longer than 254 nm pass through the outer glass tube, and the illuminance of the ultraviolet rays can be accurately measured by an ultraviolet sensor.

  According to the fourth aspect of the present invention, since the ultraviolet lamp is turned off or the lifetime when the ultraviolet illuminance is insufficient can be distinguished and accurately detected through the storage / control device, the inside of the main body is cleaned based on each detection result. Or, the ultraviolet lamp can be replaced, and an appropriate maintenance operation can be performed according to a condition such as failure of the ultraviolet lamp or insufficient illuminance.

  According to the invention of claim 5, since the illuminance attenuation characteristic data is stored in the storage / control device for each type of the water to be treated, it is possible to accurately detect whether the ultraviolet lamp is turned off or deteriorated according to the water to be treated. it can.

  According to the invention according to claim 6, the storage unit stores the illuminance attenuation characteristics for the two treatment waters of pure water used for semiconductor manufacturing and nutrient solution used for agricultural use, respectively. The state of deterioration of the ultraviolet lamp can be accurately detected in accordance with the type of water to be treated, and the respective water treatment capacities can be maintained.

  According to the invention according to claim 7, by comparing the illuminance attenuation data stored in the storage unit with the ultraviolet data of the specific wavelength converted by the control unit, the extinguished state or the deteriorated state of the ultraviolet lamp is immediately detected. be able to. For this reason, a certain disinfection purification function can be exhibited in response to the abnormality of the ultraviolet lamp quickly. For this reason, in a semiconductor manufacturing process requiring clean pure water, it is possible to process a semiconductor product with stable, high-quality water by avoiding a light-off state and estimating a lifetime. On the other hand, in the case of a nutrient solution for agricultural cultivation, it is possible to circulate high-quality nutrient solution because maintenance and cleaning can be performed by quickly confirming contamination of the glass due to impurities contained in the nutrient solution.

  According to the invention according to claim 8, since a signal is issued according to the time when the ultraviolet lamp needs to be replaced, the time when the reaction tank needs to be cleaned, or when the ultraviolet lamp is exhausted or turned off due to a failure, appropriate measures are taken according to each situation. It can be applied quickly.

  According to the ninth aspect of the present invention, it can be configured by an ultraviolet sensor and a unitized storage and control device, and the structure of the newly provided water treatment device main body or the existing water treatment device main body is not complicated. It can be easily mounted, and when used, the illuminance of ultraviolet rays from the reaction tank is measured by an ultraviolet sensor, and based on the measured value, deterioration of the ultraviolet lamp can be accurately detected via a storage / control device.

It is a schematic diagram which shows one Embodiment of the water treatment apparatus of this invention. It is a block diagram of the water treatment apparatus of FIG. FIG. 2 is a schematic longitudinal sectional view showing a reaction tank in FIG. 1. (A) is a partial enlarged schematic sectional view of a reaction tank. (B) is a graph showing the relationship between the ultraviolet ray distance and the illuminance. It is a graph showing the life curve of the ultraviolet lamp according to the water to be treated. It is a graph showing the illuminance attenuation characteristic of pure water. It is a graph showing the illuminance attenuation characteristic of a nutrient solution.

  Hereinafter, a water treatment apparatus and a deterioration detecting device for an ultraviolet lamp for the water treatment apparatus according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic diagram of an embodiment of the water treatment device, and FIG. 2 is a block diagram of the water treatment device.

  In the figure, a water treatment apparatus (hereinafter referred to as apparatus main body 1) is incorporated as a part of a circulation flow path for supplying pure water or nutrient solution to semiconductor manufacturing equipment or agricultural equipment, for example, and is circulated by a pump (not shown). It is provided so that water or nutrient solution is sterilized and purified as water to be treated, and is returned to the flow path.

  The apparatus main body 1 includes a reaction tank 2, an ultraviolet sensor 3, an ozone supply unit 4 for supplying ozone, a storage / control device 5, and a photocatalyst 7, among which water treatment is performed by the ultraviolet sensor 3 and the storage / control device 5. An apparatus for detecting deterioration of an ultraviolet lamp for an apparatus (hereinafter, referred to as a detection apparatus main body 6) is configured.

  In the apparatus main body 1, an ultraviolet lamp 10 serving as an ultraviolet irradiation unit that irradiates ultraviolet rays to the water to be treated is built in the reaction tank 2, and a photocatalyst 7 is provided inside the reaction tank 2. An inlet-side connection port 11 is provided on the primary side of the reaction tank 2, and an outlet-side connection port 12 is provided on the secondary side. The ozone supply section 4 is connected to the inlet-side connection port 11. The inflow channel 15 is connected to the side, and the outflow channel 16 is connected to the outlet connection port 12 of the reaction tank 2, so that they are arranged in a part of the circulation channel. With this configuration, the apparatus main body 1 has an ozone supply function by the ozone supply unit 4, an ultraviolet irradiation function by the ultraviolet lamp 10, and a photocatalytic function by the photocatalyst 7, and has a three-in-one function by organically connecting these. The to-be-processed water is effectively sterilized and purified.

  In FIG. 3, the ultraviolet lamp 10 is disposed at the center of the reaction tank 2, and an inner glass tube 20 for protection is provided on the outer peripheral side of the ultraviolet lamp 10, and an outer glass tube 21 is provided on the outer peripheral side of the inner glass tube 20. Is arranged. A substantially cylindrical flow path 22 of the water to be treated is formed between the inner glass tube 20 and the outer glass tube 21, and the flow path 22 extends in the length direction along the inner circumference and the outer circumference in the flow path 22. Photocatalyst 7 is arranged. By arranging the ultraviolet lamp 10 in the center of the reaction tank 2 as described above, the entire reaction tank 2 is made compact, and ultraviolet rays are radiated from the ultraviolet lamp 10 radially toward the water to be treated. Thus, the water to be treated is efficiently sterilized and purified.

  Here, the ultraviolet rays are invisible electromagnetic waves shorter than the wavelength of visible light and longer than the wavelength of X-rays, and generally represent light having a wavelength of about 100 to 400 nm. Among them, it is said that ultraviolet rays having a wavelength of 250 to 270 nm have a particularly high bactericidal property, and ultraviolet rays having a wavelength near 254 nm have a higher bactericidal property and are called germicidal rays (germicidal radiation).

  As the ultraviolet lamp 10 in the present embodiment, a lamp that emits mainly ultraviolet light having a wavelength of about 254 nm is used. Thus, when the water to be treated containing ozone is irradiated with ultraviolet rays having a wavelength of about 254 nm by the ozone supply unit 4 described later, the ozone is decomposed into active oxygen and oxygen by the accelerated oxidation action, and Various reactive oxygen species are produced. The hydroxy radicals generated at this time have a stronger oxidizing power than ozone, and microorganisms resistant to ozone can be more effectively sterilized.

Further, the ultraviolet lamp 10 also contains light other than ultraviolet light having a wavelength of about 254 nm, specifically, ultraviolet light having a wavelength of about 400 nm or more. Of these, it is difficult to detect ultraviolet light having a wavelength of approximately 254 nm or so with the ultraviolet sensor 3, but light having a wavelength of approximately 400 nm or more can be detected by the ultraviolet sensor 3.
Here, the vicinity of about 400 nm means 350 nm ± 50 nm. However, this value varies depending on the spectral distribution of the ultraviolet lamp 10, but ultraviolet light having a wavelength longer than at least 254 nm is preferable.

  The ultraviolet lamp 10 may be a fluorescent lamp having light having a wavelength of approximately 400 nm or a lamp in which a plurality of LEDs are arranged. Further, the ultraviolet lamp 10 may have various shapes such as a linear shape, a cylindrical shape, a spiral shape, and a waveform depending on the shape and the internal structure of the reaction tank 2.

  4A and 4B, the inner glass tube 20 is provided by, for example, quartz glass for reasons of ultraviolet transmittance, heat resistance, strength, and the like, and at least the distance L from the ultraviolet lamp 10 is 4 to 5 mm. The inner diameter is formed so as to be slightly apart. When the inner glass tube 20 is formed of quartz glass, light having a wavelength of about 400 nm from about 254 nm of ultraviolet light can be transmitted. The reason why the inner glass tube 20 is formed with the above-mentioned dimensions is that if the distance from the ultraviolet lamp 10 is smaller than 4 mm, distortion occurs between the upper end and the lower end due to processing accuracy and the like. This is because there is a possibility that the distortion between them increases, and the UV lamp 10 cannot be properly assembled in contact with the UV lamp 10. On the other hand, if the distance is greater than 5 mm, the water to be treated cannot be sufficiently irradiated with ultraviolet light having a wavelength of about 254 nm, the attenuation rate of which increases as the distance increases.

  The outer glass tube 21 on the outer surface side of the reaction tank 2 is made of glass having a property of transmitting ultraviolet light having a wavelength longer than approximately 254 nm. For this reason, the outer glass tube 21 is provided by, for example, borosilicate glass, and this borosilicate glass transmits only light having a wavelength of about 400 nm of ultraviolet light and transmits germicidal rays of a wavelength of about 254 nm. Can not.

  Since the inner glass tube 20 and the outer glass tube 21 are formed of the above-described materials, when the ultraviolet lamp 10 irradiates ultraviolet light, light having a wavelength of about 254 nm is emitted as shown in FIG. When the light passes through the glass tube 20 and reaches the water to be treated, the illuminance decreases greatly, and the illuminance becomes zero at a position where the length X is about several mm from the outer peripheral surface of the inner glass tube 20. In this case, since the inner side photocatalyst 7 is contained in the length X, ultraviolet rays having a wavelength of approximately 254 nm act on the photocatalyst. On the other hand, light having a wavelength of about 370 to 400 nm, which is a long-wavelength component, in the ultraviolet band passes through the inner glass tube 20, the flow path 22, and the outer glass tube 21 while the illuminance gradually decreases.

  As shown in FIG. 4A, the ultraviolet sensor 3 is disposed outside the outer glass tube 21 in a close state, and the inner glass tube when the water to be treated passes through the inside of the reaction tank 2 is provided by the ultraviolet sensor 3. The illuminance of ultraviolet light of the ultraviolet lamp 10 passing through the passage 20, the flow path 22, and the outer glass tube 21 can be measured. The ultraviolet sensor 3 is a sensor capable of detecting ultraviolet illuminance having a wavelength longer than approximately 254 nm. In FIG. 4B, the illuminance of ultraviolet light having a wavelength of approximately 400 nm transmitted to the outside of the outer glass tube 21 is shown. Is measured, and the magnitude of the illuminance enables the deterioration diagnosis of the ultraviolet lamp 10 via the storage / control device 5 described later.

  On the light receiving side of the ultraviolet sensor 3, a filter 25 for cutting visible light having a wavelength longer than approximately 400 nm is provided. The filter 25 cuts visible light to suppress the adverse effect on the ultraviolet sensor 3, and the ultraviolet sensor 3 can measure the illuminance only at a wavelength of about 400 nm. The filter 25 does not need to have a property of cutting ultraviolet rays having a wavelength of less than about 400 nm. This is because, as described above, the ultraviolet light having a wavelength of less than approximately 400 nm is attenuated to 0% before reaching the ultraviolet sensor 3.

  The photocatalyst 7 is provided in a configuration in which the surface of the metal titanium base material is oxidized to form titanium oxide and thus hardly peels off. For example, a mesh, a titanium wire, an aggregate of a fibrous titanium material, or a porous titanium material It is provided by coating titanium dioxide on the surface side of a material such as titanium or titanium alloy. When the metal titanium base material is formed in a thin shape, the reaction area becomes large, and the reactivity with ozone is improved. The metal titanium base material may be a material other than titanium or a titanium alloy, for example, a material such as glass or silica gel may be used to form titanium oxide on the surface of this material. And those formed on a titanium substrate. The photocatalyst 7 is easily activated by an ultraviolet ray having a wavelength of about 250 to 350 nm.

  1, the ozone supply unit 4 is connected to the primary side of the reaction tank 2 as described above, and is provided so as to supply ozone to the water to be treated flowing to the reaction tank 2 side. The ozone supply unit 4 includes an ozonizer 30, an ejector 31, an ozone supply pipe 32, and a check valve 33.

  The ozonizer 30 has a structure having a discharge gap between the ground electrode 41 and the dielectric 42 to which the high-voltage electrode is attached, and applies a high voltage between the ground electrode 41 and the dielectric 42 to cause discharge. The ozone is generated using air flowing through the discharge gap as a raw material. The air is continuously supplied to a discharge gap of the ozonizer 30 by a pump (not shown), and the generated ozone (and dissolved oxygen) is provided so as to be supplied to the ejector 31 via an ozone supply pipe 32 connected to the ozonizer 30. Can be

  The ejector 31 is formed of, for example, a resin such as a fluororesin, or a material such as ceramic or metal, and is provided in the inflow passage 15 so that ozone generated by the ozonizer 30 is applied to the water to be treated flowing through the inflow passage 15. Can be mixed. A check valve 33 for preventing backflow is provided between the ejector 31 and the ozonizer 30, and the ozone and dissolved oxygen passing through the check valve 33 pass through a narrow passage (not shown) inside the ejector 31. It is dissolved in the water to be treated in a bubble state while the flow rate is increased, and a mixed liquid (ozone water) in the form of fine bubbles is generated and supplied to the reaction tank 2 side.

  In FIG. 2, the storage / control device 5 is electrically connected to the reaction tank 2, the ultraviolet sensor 3, and the ozone supply unit 4, and determines a specific wavelength based on the ultraviolet illuminance of the wavelength around 400 nm measured by the ultraviolet sensor 3. It has a function of converting to ultraviolet illuminance. The apparatus main body 1 has a function of detecting whether the ultraviolet lamp 10 is turned off or deteriorated from the ultraviolet illuminance of the specific wavelength.

  In this case, in the graph of FIG. 5 showing the change in the illuminance of the ultraviolet lamp 10 at a wavelength near 400 nm with respect to the elapse of time, the storage / control device 5 indicates that the ultraviolet lamp 10 is in the off state when the ultraviolet illuminance is zero. It has a function of detecting, or detecting that it is the end of life when the ultraviolet illuminance falls below the value of a preset process.

  In the present embodiment, the UV illuminance of a specific wavelength is the UV illuminance of the above-described wavelength of about 254 nm that causes a radical reaction of the water to be treated, and the wavelength of about 400 nm of the above-described low disinfecting and purifying property to the water to be treated. By measuring the UV illuminance, it is possible to recognize the UV illuminance having a wavelength of approximately 254 nm, which is the most excellent in removing bacteria.

The storage / control device 5 includes a storage unit 50 for storing various data, and a control unit 51 capable of detecting an operation state of the device main body 1.
The storage unit 50 stores the illuminance attenuation characteristic data 55, the measurement result of the ultraviolet illuminance by the ultraviolet sensor 3, and the like. The illuminance attenuation characteristic data 55 is stored in the storage unit 50 for each type of water to be treated, for conversion from the ultraviolet illuminance of the ultraviolet lamp 10 measured by the ultraviolet sensor 3 to the ultraviolet illuminance of a specific wavelength.

  The illuminance attenuation characteristic data 55 in this example is a graph corresponding to two types of treated water: pure water used in semiconductor manufacturing applications shown in FIG. 6 and (cultivation) nutrient solution used in agricultural applications shown in FIG. Is provided. In each graph, the solid curve shows the characteristics of ultraviolet light (light having a wavelength of 100 to 400 nm) emitted when the ultraviolet lamp 10 is irradiated, and the two vertical axes in the graph show the units. The dashed curve shows the characteristics of visible light (light having a wavelength of about 400 to about 780 nm) emitted when irradiated with the ultraviolet lamp 10 for comparison with the properties of ultraviolet rays. Shows the unit.

From these illuminance attenuation characteristic data 55, the ultraviolet illuminance at a wavelength of approximately 400 nm measured by the ultraviolet sensor 3 (400 nm illuminance: unit mW / cm ² ) is converted to the ultraviolet illuminance at a wavelength of approximately 254 nm (254 nm illuminance). : Unit mW / cm ² ) is performed by the storage / control device 5 as follows.
In general, the life of the ultraviolet lamp 10 is considered when the ultraviolet illuminance at a wavelength near 254 nm becomes 70% or less of the illuminance when it is new. However, since this life is a general story, this life depends on the manufacturer of the ultraviolet lamp and the like.

In the case of the pure water in FIG. 6, for example, from the graph, the 254 nm illuminance is approximately 8 mW / cm ² when the 400 nm illuminance is the initial value B of 0.02 mW / cm ² , and the 254 nm when the 400 nm illuminance is 0.018 mW / cm ^2. When the illuminance is approximately 5.75 mW / cm ² and the 400 nm illuminance is 0.017 mW / cm ² , the 254 nm illuminance is converted to approximately 4.5 mW / cm ² .

On the other hand, in the case of visible light in the graph, for example, when the illuminance of this visible light (visible light illuminance: unit LX) is 280 LX, which is the initial value B, the 254 nm illuminance is approximately 8 mW / cm ² , and the visible light illuminance is When the illuminance at 254 nm is reduced to approximately 4.5 W / cm ^2, there is almost no change. That is, even if the illuminance of visible light is measured, it does not change until the measured value becomes smaller than approximately 4.5 W / cm ^2, so that a decrease in the illuminance of 254 nm cannot be confirmed until that stage.

The same applies to the case of the nutrient solution of FIG. 7. For example, from the graph, when the 400 nm illuminance is 0.01 mW / cm ² of the initial value B, the 254 nm illuminance is approximately 8 mW / cm ² , and the 400 nm illuminance is approximately 0.0095 mW / cm 2. ^{In the case of 2} , the 254 nm illuminance is converted to approximately 5.6 mW / cm ² .

For visible light in FIG. 7, for example, an approximately 8 mW / cm ² 254nm illuminance at 270LX visible light illuminance initial value B, the visible light illuminance is decreased 254nm illumination to approximately 5.6 W / cm ² Sometimes it tends to rise. As a result, even if the illuminance of visible light is measured, a decrease in the illuminance of 254 nm cannot be confirmed.
As described above, by measuring the illuminance at 400 nm and converting the measurement result to 254 nm illuminance, the decrease in illuminance of the ultraviolet lamp 10 can be finely measured.

In FIGS. 6 and 7, the dashed line indicates the reference for the lifetime of the 254 nm illuminance. The life of the ultraviolet lamp 10 may be changed based on the case where the illuminance of the initial value B is reduced to, for example, 70% of the illuminance, as one reference. In this case, the 254 nm illuminance of both the pure water of FIG. 6 and the nutrient solution of FIG. It becomes a case where it became 5.6 mW / cm ² . More preferably, the life is defined as a case where the illuminance of 254 nm decreases from the illuminance of the initial value B to the illuminance of 90%.
In the case of the pure water shown in FIG. 6, even when the illuminance is reduced to 55%, the illuminance of the visible light does not change. Therefore, it is difficult to determine the life of the ultraviolet lamp 10 by measuring the visible light sensor.
In other words, since 70% of the initial value of the illuminance at 254 nm is 90% of the initial value of the illuminance at around 400 nm, the life of the ultraviolet lamp 3 is measured by measuring the illuminance at around 400 nm with the ultraviolet sensor 3. Can be diagnosed.

  On the other hand, the control unit 51 in the storage / control device 5 converts the ultraviolet illuminance measured by the ultraviolet sensor 3 into ultraviolet illuminance of a specific wavelength, that is, ultraviolet illuminance of a wavelength of approximately 254 nm, via the illuminance attenuation characteristic data 55. Then, it has a function of detecting whether the ultraviolet lamp 10 is turned off or deteriorated from the converted value.

  Based on the result of the UV illuminance of the wavelength of approximately 254 nm, the control unit 51 determines the time for replacement of the UV lamp 10, the time for cleaning the reaction tank 2, and the state of turning off the UV lamp 10 due to exhaustion or failure of the UV lamp 10. It has a function of issuing a predetermined signal to notify, and by confirming this signal, it is possible to perform a predetermined treatment according to the condition of the ultraviolet lamp 10.

  In the present embodiment, the UV illuminance of a specific wavelength converted from the UV illuminance when the water to be treated passes through the reaction tank 2 is the UV illuminance of a wavelength of approximately 254 nm. Can be ultraviolet illuminance of a different wavelength depending on the type of the fluid to be treated and the like.

  The UV sensor 3 measures the UV illuminance at a wavelength of about 400 nm from the UV lamp 10, but may measure the UV illuminance at a different wavelength, and transmits through the outer glass tube 21 depending on the type of the UV lamp 10. When the wavelength is different, an appropriate ultraviolet sensor 3 corresponding to the ultraviolet lamp 10 can be used. A lamp such as a low-pressure or high-pressure mercury lamp may be used instead of the ultraviolet lamp 10 as long as it can irradiate ultraviolet light.

  The water to be treated may be other than pure water or a nutrient solution. For example, a culture solution for aquaculture may be used as the water to be treated. In this case, by storing the illuminance attenuation characteristic data 55 corresponding to the water to be treated in the storage unit 50, it is possible to detect whether the ultraviolet lamp 10 is turned off or deteriorated according to the water to be treated.

Subsequently, an operation of the above-described water treatment apparatus and a control example when detecting the extinguishing or deterioration state of the ultraviolet lamp during this operation will be described.
In FIG. 1, when the water to be treated is sent to the apparatus main body 1 side by a pump (not shown), the water to be treated flows into the ozone supply unit 4 from the inflow passage 15.

  At this time, ozone (and dissolved oxygen) generated by the ozonizer 30 via the ejector 31 provided in the inflow passage 15 is mixed with the water to be treated, and ozone in the form of fine bubbles is mixed into the water to be treated in a bubble state. A dissolved liquid mixture (ozone water) is generated. If the concentration of ozone supplied in this case is low, bacteria cannot be sterilized and organic substances cannot be decomposed. If the concentration is high, the life of equipment and components on the downstream side may be shortened. For this reason, the total amount of the water to be treated, the amount of the water to be treated, and the lower and upper limits of the ozone concentration for effective ozone treatment are comprehensively determined. The amount of ozone supplied in step 4 is adjusted to 0.05 to 2.0 (g / H).

  Most of the bacteria in the water to be treated are killed by the sterilizing effect of the supplied ozone, and many of the organic matter including the dead bacteria are killed.

  Subsequently, when the to-be-treated water containing ozone flows into the reaction tank 2 from the inlet-side connection port 11, it passes through the ultraviolet lamp 10 and the photocatalyst 7 in the flow path 22, and the ultraviolet light is added to the to-be-treated water in which ozone is dissolved. Irradiates with ultraviolet rays to generate a radical (a chemical species having unpaired electrons and a strong activation) called OH (hydroxyl radical or OH radical).

  Since this OH is strongly activated, bacteria remaining in the water to be treated without being sterilized when the ozone is treated by the ozone supply unit 4 can be substantially sterilized, and the OH can be dissolved in the water to be treated without being decomposed. The remaining organic matter can be almost completely decomposed.

As described above, in the reaction tank 2, OH radicals are generated by the ultraviolet lamp 10 and the photocatalyst 7 and a combination of low concentration ozone, that is, bacteria and organic substances remaining due to organic bonding are reliably removed. Purify bacteria.
The water to be treated, which has been subjected to the sterilization and purification treatment in the reaction tank 2, is returned from the outlet side connection port 12 to the circulation flow path via the outflow flow path 16.

  When the irradiation state of the ultraviolet lamp 10 is checked during the operation of the apparatus main body 1, the ultraviolet illuminance of the ultraviolet lamp 10 at a wavelength of 400 nm of the ultraviolet lamp 10 is measured by the ultraviolet sensor 3 while the water to be treated is flowing in the processing tank 2. Then, by converting this measurement result to ultraviolet illuminance of a wavelength near 254 nm through the illuminance attenuation characteristic data 55 of the storage / control device 5, it is possible to detect whether the ultraviolet lamp 10 is turned off or deteriorated from the ultraviolet illuminance. Has become.

  Specifically, for example, the state of the ultraviolet lamp 10 is checked by the following procedure. Here, FIG. 5 shows a life curve of the ultraviolet lamp 10 according to the water to be treated, and shows a curve serving as a reference for attenuating the illuminance of light having a wavelength of about 400 nm with respect to the passage of time. The data of the life curve of the ultraviolet lamp serving as this reference is also stored in the storage unit 50.

  When the operation of the water treatment apparatus is started, in the graph of FIG. 5, the storage / control apparatus determines whether or not the total operation time since the start of the water treatment (hereinafter referred to as the total time) has reached a predetermined time A. 5 is determined. The “predetermined time A” is set based on the time from when the new ultraviolet lamp 10 is turned on for the first time to when the illuminance is stabilized. The reason why the predetermined time A elapses is that, as shown by the two-dot chain line in the figure, the illuminance is difficult to stabilize at the initial lighting of the new ultraviolet lamp 10, and the illuminance gradually increases with the elapse of time and becomes stable. That's why. The predetermined time A may be, for example, about 900 seconds, and may be appropriately set depending on the type of the ultraviolet lamp 10 and individual differences.

  When the total time reaches a predetermined time A (for example, 900 seconds), at that stage, the UV sensor 3 controls the UV illuminance (400 nm illuminance) of approximately 400 nm passing through the outer glass tube 21 under the control of the control unit 51, The measurement result is stored in the storage unit 50 as an initial value B of the ultraviolet illuminance (hereinafter, referred to as an initial value B).

  From this stage, since practical disinfection and purification of the water to be treated by the apparatus body 1 becomes possible, the water to be treated is supplied to the ozone supply unit 4, the ozone supply unit 4, the ultraviolet lamp 10 of the reaction tank 2, 7 to remove bacteria.

  In this water treatment process, the control unit 51 compares the inclination of the actually measured 400 nm illuminance at the time ΔT, which is the fixed time in FIG. 5, with the inclination of the life curve of the reference data. In this case, the slope in the decreasing direction is a positive value.

  At this time, when the inclination of the illuminance at 400 nm at the time ΔT is greater than the inclination of the life curve, the control unit 51 subsequently determines whether or not the illuminance of the ultraviolet lamp 10 is less than 90% of the initial value B.

  When the ultraviolet illuminance of the ultraviolet lamp 10 falls below a predetermined value, for example, when it is less than 90% of the initial value B, it is determined that the ultraviolet illuminance is insufficient, and the control unit 51 determines that the ultraviolet lamp 10 is at the end of its life. Detect that After that, the fact that the ultraviolet lamp 10 needs to be replaced is notified by a lamp or a warning sound (not shown), and the life of the ultraviolet lamp 10 is promptly confirmed from the storage / control device 5 external to the apparatus main body. be able to. If the ultraviolet lamp 10 is replaced based on this result, the processing performance of the apparatus main body 1 can be maintained and stable operation can be continued.

  On the other hand, when the illuminance of the ultraviolet lamp 10 is 90% or more of the initial value B, the control unit 51 determines that the life has not been reached, and continues the illuminance detection process.

  As shown by the two-dot chain line in FIG. 5, when the inclination of the illuminance at 400 nm at the time ΔT becomes larger than the inclination of the life curve, at least (a) the water to be treated in the reaction tank 2 It is considered that the cause is that a deposit or the like is attached to a portion where the ultraviolet lamp 10 is deteriorated, or (b) the ultraviolet lamp 10 is deteriorated earlier than expected for some reason. In this case, the fact that the reaction tank 2 needs to be cleaned is notified by a lamp or a warning sound.

  After cleaning the reaction tank 2, a reset button (not shown) is pressed, and the control unit 51 determines whether the reset button is pressed. If the reset button has not been pressed, it is notified that the reaction tank 2 needs to be cleaned again. As described above, the reset button is provided to confirm whether or not the reaction tank is cleaned.

  After the reset button is pressed, the control unit 51 determines whether or not the value of the actually measured 400-nm illuminance is larger than the value of the ultraviolet illuminance D with respect to the elapsed time T of the life curve. As a result of this determination, when the measured value of the 400-nm illuminance is equal to or greater than the ultraviolet illuminance D of the life curve, the determination of the ultraviolet illuminance is continued. On the other hand, when the numerical value of the 400 nm illuminance is less than the ultraviolet illuminance D, it is regarded that the deterioration of the ultraviolet lamp 10 is faster than expected due to the above-mentioned (b) for some reason, and the abnormality of the ultraviolet lamp 10 is reported to the outside. I do.

  During the operation of the apparatus main body 1, an interrupt (interruption) control by the control unit 51 is performed. In this interrupt control, it is determined whether or not the ultraviolet illuminance is zero. When the illuminance is zero, it is detected that the ultraviolet lamp 10 is off, and an alarm is issued by a lamp or a warning sound. On the other hand, when these values are larger than zero, the detection processing is continued.

  On the other hand, the determination as to whether or not the ultraviolet illuminance of the ultraviolet lamp 10 is zero may be performed by means other than the interrupt control. In this case, after the procedure of comparing the inclination of the 400-nm illuminance at the time ΔT with the reference life curve, it is determined whether or not the ultraviolet illuminance is zero. When the value is zero, the procedure detects that the ultraviolet lamp 10 is turned off and issues a warning by a lamp or a warning sound. Then, similarly to the above procedure, the ultraviolet illuminance of the ultraviolet lamp 10 is set to a predetermined value. The procedure after the procedure for determining whether or not the temperature has decreased is performed below.

  Further, the procedure of comparing the inclination of the 400 nm illuminance at a certain time ΔT with the inclination of the life curve may be omitted. In this case, the ultraviolet illuminance of the ultraviolet lamp 10 reaches less than 90% of the initial value B. Only by doing so, the life time of the ultraviolet lamp 10 is detected. Therefore, the control procedure can be simplified.

Next, the operation of the above-described embodiment of the water treatment device and the deterioration detection device for the ultraviolet lamp for the water treatment device of the present invention will be described.
The apparatus main body 1 includes a reaction tank 2 having a built-in ultraviolet lamp 10, a photocatalyst 7, and an ozone supply unit 4. An ultraviolet sensor 3 is disposed outside the reaction tank 2, and ultraviolet light measured by the ultraviolet sensor 3 is used. Since the illuminance at a specific wavelength of the ultraviolet lamp 10 is detected by the storage / control device 5 from the illuminance conversion result, even when a large amount of water treatment is required and the number of the apparatus main bodies 1 increases, the ultraviolet sensor Based on the measurement result of 3, the on / off state and the deterioration state of all the ultraviolet lamps 10 can be intensively monitored via the storage / control device 5.

  In this case, since the ultraviolet sensor 3 is arranged close to the outside of the outer glass tube 21 and the ultraviolet sensor 3 detects ultraviolet illuminance having a wavelength of about 400 nm, the outer glass tube 21 is set to a wavelength of about 254 nm. Borosilicate glass or the like that blocks ultraviolet rays. As a result, in the flow path 22 inside the outer glass tube 21, the water having a wavelength of about 254 nm, which exerts a bad influence on parts, while giving an excellent sterilization and purification function to the water to be treated by a radical reaction due to ultraviolet rays having a wavelength of about 254 nm. It prevents ultraviolet rays from leaking from the outer glass tube 21 to the outside and prevents the ultraviolet rays from adversely affecting the ultraviolet sensor 3 and other components, thereby preventing deterioration.

  In addition, the UV illuminance of a wavelength of about 400 nm transmitted through the borosilicate glass 21 is measured by the UV sensor 3, and the UV illuminance of the wavelength of about 254 nm is obtained from the measurement result of the UV illuminance via the illuminance attenuation characteristic data 55 in the storage unit 50. Since the illuminance converted into the illuminance can be confirmed, the ultraviolet illuminance of approximately 254 nm, which is most effective for the sterilization and purification of the water to be treated, can be accurately grasped. Therefore, even when the apparatus main body 1 is used in a semiconductor manufacturing process or the like that requires a high water treatment system, it is possible to manufacture a high-quality product while keeping the ultraviolet illuminance of each apparatus main body 1 high.

  The storage / control device 5 stores the illuminance attenuation characteristic data 55 for each type of water to be treated, ie, pure water used for semiconductor manufacturing and nutrient solution used for agricultural purposes. Even in the case of treating the water to be treated, even a slight attenuation of the UV illuminance can be measured to check the deterioration state in detail.

 In addition, the detection device main body 6 for detecting the deterioration of the ultraviolet lamp 10 can easily detect the extinguished state or the deteriorated state of the ultraviolet lamp 10 by easily attaching the ultraviolet sensor 3 and the storage / control device 5 to the water treatment apparatus. There is no adverse effect on the water treatment performance of the tank 2 or the ozone supply unit 4.

  As described above, the embodiments of the present invention have been described in detail. However, the present invention is not limited to the above embodiments, and does not depart from the spirit of the invention described in the claims of the present invention. Thus, various changes can be made.

DESCRIPTION OF SYMBOLS 1 Main body 2 Reaction tank 3 Ultraviolet sensor 4 Ozone supply part 5 Storage / control device 6 Detector main body 7 Photocatalyst 10 Ultraviolet lamp 21 Outer glass tube 50 Storage part 51 Control part 55 Illumination attenuation characteristic data

Claims (9)

  A reaction tank having a built-in ultraviolet lamp for irradiating ultraviolet rays to the water to be treated, a photocatalyst provided inside the reaction tank, and an ozone supply unit for supplying ozone to the reaction tank; An ultraviolet sensor for measuring the ultraviolet illuminance of the ultraviolet lamp when the water to be treated passes through the inside of the reaction tank is provided, and has a function of converting the ultraviolet illuminance measured by the ultraviolet sensor into ultraviolet illuminance of a specific wavelength. A water treatment apparatus, comprising: a storage / control device, wherein the storage / control device has a function of detecting whether the ultraviolet lamp is turned off or deteriorated from the ultraviolet illuminance of the specific wavelength.   The ultraviolet illuminance of the specific wavelength is an ultraviolet illuminance of a wavelength near approximately 254 nm that causes a radical reaction of the water to be treated, and the ultraviolet illuminance measured by the ultraviolet sensor is an ultraviolet illuminance having a wavelength longer than approximately 254 nm. The water treatment device according to claim 1.   An outer glass tube having a characteristic of transmitting ultraviolet light having a wavelength longer than at least approximately 254 nm is provided on an outer surface side of the reaction vessel, and the ultraviolet sensor is disposed outside the outer glass tube in a close state. Item 3. The water treatment device according to item 1 or 2.   4. The storage / control device according to claim 1, further comprising a function of detecting turning-off when the ultraviolet illuminance of the ultraviolet lamp is zero, or detecting a life time when the ultraviolet illuminance falls below a predetermined value. The water treatment device according to any one of the above.   The illuminance attenuation characteristic data for conversion from ultraviolet illuminance measured by the ultraviolet sensor to ultraviolet illuminance of a specific wavelength is stored in the storage / control device for each type of the water to be treated. The water treatment apparatus according to any one of items 4 to 5.   The water treatment apparatus according to claim 5, wherein the illuminance attenuation characteristic data is data corresponding to two types of water to be treated, namely, pure water used for semiconductor manufacturing and nutrient solution used for agricultural use.   The storage / control device has a storage unit and a control unit, and the illuminance attenuation characteristic data is stored in the storage unit, and the control unit converts the ultraviolet illuminance measured by the ultraviolet sensor into the illuminance attenuation characteristic data. 7. The water treatment apparatus according to claim 5, further comprising a function of converting the illuminance of the ultraviolet light into a specific wavelength through the illuminator, and detecting whether the ultraviolet lamp is turned off or deteriorated based on the converted value.   The storage and control device is configured to notify a predetermined time for exchanging the ultraviolet lamp, a time for cleaning the reaction tank, and turning off the ultraviolet lamp due to wear or failure based on the ultraviolet illuminance of the specific wavelength. The water treatment apparatus according to any one of claims 1 to 7, which has a function of emitting a signal.   An apparatus for detecting deterioration of an ultraviolet lamp for a water treatment apparatus, provided in the water treatment apparatus according to any one of claims 1 to 8, comprising the ultraviolet sensor and the storage / control device.

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