JP2020038218A5 - Processing equipment, inspection systems, processing methods, programs, and storage media - Google Patents

Processing equipment, inspection systems, processing methods, programs, and storage media Download PDF

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JP2020038218A5
JP2020038218A5 JP2019210326A JP2019210326A JP2020038218A5 JP 2020038218 A5 JP2020038218 A5 JP 2020038218A5 JP 2019210326 A JP2019210326 A JP 2019210326A JP 2019210326 A JP2019210326 A JP 2019210326A JP 2020038218 A5 JP2020038218 A5 JP 2020038218A5
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processing apparatus
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detection result
transmission direction
processing device
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本発明の実施形態は、処理装置、検査システム、処理方法、プログラム、及び記憶媒体に関する。 Embodiments of the present invention relate to processing equipment , inspection systems, processing methods, programs, and storage media.

本発明が解決しようとする課題は、検査において、対象物に向けて送信される超音波の角度をより適切な値に設定できる、処理装置、検査システム、処理方法、プログラム、及び記憶媒体を提供することである。 The problem to be solved by the present invention is to provide a processing device , an inspection system, a processing method, a program, and a storage medium capable of setting an angle of ultrasonic waves transmitted toward an object to a more appropriate value in inspection. It is to be.

実施形態に係る処理装置は、超音波を送信し、対象物からの反射波を検出する複数のセンサと通信可能である。前記処理装置は、前記超音波の送信方向における複数の位置での前記反射波の強度を含む検出結果を取得する取得ステップと、前記複数の位置のそれぞれでの前記強度の勾配に基づき、前記対象物の傾きを示す傾斜角度を算出する算出ステップと、を実行する。 The processing apparatus according to the embodiment can communicate with a plurality of sensors that transmit ultrasonic waves and detect reflected waves from an object. The processing apparatus is based on an acquisition step of acquiring a detection result including the intensity of the reflected wave at a plurality of positions in the transmission direction of the ultrasonic wave and a gradient of the intensity at each of the plurality of positions. A calculation step of calculating a tilt angle indicating the tilt of an object and a calculation step are performed.

Claims (19)

超音波を送信し、対象物からの反射波を検出する複数のセンサと通信可能な処理装置であって、 A processing device that can communicate with multiple sensors that transmit ultrasonic waves and detect reflected waves from an object.
前記超音波の送信方向における複数の位置での前記反射波の強度を含む検出結果を取得する取得ステップと、 The acquisition step of acquiring the detection result including the intensity of the reflected wave at a plurality of positions in the transmission direction of the ultrasonic wave, and the acquisition step.
前記複数の位置のそれぞれでの前記強度の勾配に基づき、前記対象物の傾きを示す傾斜角度を算出する算出ステップと、 A calculation step for calculating an inclination angle indicating an inclination of the object based on the intensity gradient at each of the plurality of positions, and a calculation step.
を実行する処理装置。 Processing device to execute. 前記傾斜角度に基づいて前記送信方向を設定する設定ステップをさらに実行する、請求項１記載の処理装置。 The processing apparatus according to claim 1, further performing a setting step of setting the transmission direction based on the tilt angle. 前記設定ステップの後に、前記取得ステップ及び前記算出ステップを再度実行する、請求項２記載の処理装置。 The processing apparatus according to claim 2, wherein the acquisition step and the calculation step are executed again after the setting step. 前記設定ステップの後に、前記取得ステップ、前記算出ステップ、及び前記設定ステップを含むループを繰り返し、 After the setting step, the acquisition step, the calculation step, and the loop including the setting step are repeated.
前記ループは、前記ループを終了するか判定する判定ステップをさらに含み、 The loop further includes a determination step for determining whether to end the loop.
前記判定ステップにおいて、前記ループを終了すると判定されるまで、前記ループを実行する請求項２記載の処理装置。 The processing device according to claim 2, wherein the loop is executed until it is determined in the determination step that the loop is terminated. 前記判定ステップでは、前記取得ステップ又は前記算出ステップの繰り返し回数が所定の回数以上になると、前記ループを終了すると判定される請求項４記載の処理装置。 The processing device according to claim 4, wherein in the determination step, when the number of repetitions of the acquisition step or the calculation step becomes a predetermined number or more, it is determined that the loop is terminated. 前記ループに繰り返しにより、第１傾斜角度と、前記第１傾斜角度の後に算出された第２傾斜角度と、を含む複数の前記傾斜角度が算出されると、前記第２傾斜角度と前記第１傾斜角度との差を算出し、 By repeating the loop, when a plurality of the tilt angles including the first tilt angle and the second tilt angle calculated after the first tilt angle are calculated, the second tilt angle and the first tilt angle are calculated. Calculate the difference from the tilt angle and
前記判定ステップでは、前記差が所定の値よりも小さいと、前記ループを終了すると判定される請求項４記載の処理装置。 The processing device according to claim 4, wherein in the determination step, if the difference is smaller than a predetermined value, it is determined that the loop is terminated. 前記ループによる前記送信方向又は前記傾斜角度の遷移を表示する表示ステップをさらに実行する、請求項４～６のいずれか１つに記載の処理装置。 The processing apparatus according to any one of claims 4 to 6, further performing a display step of displaying the transition of the transmission direction or the tilt angle by the loop. 前記設定ステップでは、前記送信方向を、基準角度と前記傾斜角度との差よりも大きく変化させ、 In the setting step, the transmission direction is changed to be larger than the difference between the reference angle and the inclination angle.
前記検出結果は、前記送信方向が前記基準角度に設定されたときに得られた結果である、請求項２記載の処理装置。 The processing apparatus according to claim 2, wherein the detection result is a result obtained when the transmission direction is set to the reference angle. 前記設定ステップの後に、設定された前記送信方向に沿って前記超音波が送信されたときの、前記対象物からの前記反射波の別の検出結果を受信し、 After the setting step, another detection result of the reflected wave from the object when the ultrasonic wave is transmitted along the set transmission direction is received.
前記別の検出結果を用いて、前記対象物を検査する、請求項２～８のいずれか１つに記載の処理装置。 The processing apparatus according to any one of claims 2 to 8, wherein the object is inspected using the other detection result. 前記対象物の検査において、 In the inspection of the object
前記送信方向に平行な第１方向と交差する第２方向と、前記第１方向及び前記第２方向に沿う面と交差する第３方向と、に沿った複数の点のそれぞれが、適切に接合されているか判定し、 Each of the plurality of points along the second direction intersecting the first direction parallel to the transmission direction and the third direction intersecting the surface along the first direction and the second direction is appropriately joined. Judge if it is done,
適切に接合されていると判定された前記点の数に基づいて、前記対象物を検査する、 Inspecting the object based on the number of points determined to be properly joined.
請求項９記載の処理装置。 The processing apparatus according to claim 9. 前記取得ステップでは、複数の点のそれぞれでの前記検出結果を受信し、 In the acquisition step, the detection result at each of the plurality of points is received, and the detection result is received.
前記複数の点は、前記送信方向に平行な第１方向と交差する第２方向と、前記第１方向及び前記第２方向に沿う面と交差する第３方向と、に沿って並び、 The plurality of points are arranged along a second direction that intersects the first direction parallel to the transmission direction, and a third direction that intersects the first direction and the surface along the second direction.
前記算出ステップでは、前記第１方向、前記第２方向、及び前記第３方向からなる３次元空間における前記強度の前記勾配に基づき、前記傾斜角度を算出する、請求項１～１０のいずれか１つに記載の処理装置。 In the calculation step, any one of claims 1 to 10, wherein the inclination angle is calculated based on the gradient of the intensity in the three-dimensional space including the first direction, the second direction, and the third direction. The processing device described in 1. 請求項１～１１のいずれか１つに記載の処理装置と、 The processing apparatus according to any one of claims 1 to 11.
前記複数のセンサと、 With the plurality of sensors
を備えた検査システム。 Inspection system equipped with. ロボットアームをさらに備え、 With more robot arms
前記複数のセンサは、プローブに設けられ、 The plurality of sensors are provided on the probe, and the plurality of sensors are provided on the probe.
前記プローブは、前記ロボットアームの先端部に取り付けられる、請求項１２記載の検査システム。 12. The inspection system according to claim 12, wherein the probe is attached to a tip end portion of the robot arm. 処理装置を、超音波を送信して対象物からの反射波を検出する複数のセンサと通信させ、 The processing device communicates with multiple sensors that transmit ultrasonic waves to detect reflected waves from the object.
前記処理装置に、 In the processing device
前記超音波の送信方向における複数の位置での前記反射波の強度を含む検出結果を取得する取得ステップと、 The acquisition step of acquiring the detection result including the intensity of the reflected wave at a plurality of positions in the transmission direction of the ultrasonic wave, and the acquisition step.
前記複数の位置のそれぞれでの前記強度の勾配に基づき、前記対象物の傾きを示す傾斜角度を算出する算出ステップと、 A calculation step for calculating an inclination angle indicating an inclination of the object based on the intensity gradient at each of the plurality of positions, and a calculation step.
を実行させる、処理方法。 The processing method to execute. 前記処理装置に、前記傾斜角度に基づいて前記送信方向を設定する設定ステップをさらに実行させる、請求項１４記載の処理方法。 14. The processing method according to claim 14, wherein the processing apparatus further executes a setting step of setting the transmission direction based on the inclination angle. 前記処理装置に、前記設定ステップの後に、前記取得ステップ及び前記算出ステップを再度実行させる、請求項１５記載の処理方法。 15. The processing method according to claim 15, wherein the processing apparatus is made to execute the acquisition step and the calculation step again after the setting step. 前記処理装置に、 In the processing device
前記設定ステップの後に、設定された前記送信方向に沿って前記超音波が送信されたときの、前記対象物からの前記反射波の別の検出結果を受信させ、 After the setting step, another detection result of the reflected wave from the object when the ultrasonic wave is transmitted along the set transmission direction is received.
前記別の検出結果を用いて、前記対象物を検査させる、 Using the other detection result, the object is inspected.
請求項１５又は１６に記載の処理方法。 The processing method according to claim 15 or 16. 請求項１４～１７のいずれか１つに記載の処理方法を前記処理装置に実行させるプログラム。 A program for causing the processing apparatus to execute the processing method according to any one of claims 14 to 17. 請求項１４～１７のいずれか１つに記載の処理方法を前記処理装置に実行させるプログラムを記憶した記憶媒体。 A storage medium in which a program for causing the processing apparatus to execute the processing method according to any one of claims 14 to 17 is stored.
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