JP2019521948A5 - - Google Patents

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Publication number
JP2019521948A5
JP2019521948A5 JP2019505137A JP2019505137A JP2019521948A5 JP 2019521948 A5 JP2019521948 A5 JP 2019521948A5 JP 2019505137 A JP2019505137 A JP 2019505137A JP 2019505137 A JP2019505137 A JP 2019505137A JP 2019521948 A5 JP2019521948 A5 JP 2019521948A5
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JP
Japan
Prior art keywords
aqueous solution
vapor phase
carrier gas
hydrazine
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019505137A
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English (en)
Japanese (ja)
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JP2019521948A (ja
JP6918921B2 (ja
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Publication date
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Priority claimed from PCT/US2017/027634 external-priority patent/WO2017181013A1/en
Publication of JP2019521948A publication Critical patent/JP2019521948A/ja
Publication of JP2019521948A5 publication Critical patent/JP2019521948A5/ja
Application granted granted Critical
Publication of JP6918921B2 publication Critical patent/JP6918921B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2019505137A 2016-04-16 2017-04-14 プロセスガスの送達のための方法、システム、および装置 Active JP6918921B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662323697P 2016-04-16 2016-04-16
US62/323,697 2016-04-16
PCT/US2017/027634 WO2017181013A1 (en) 2016-04-16 2017-04-14 Method, system, and device for delivery of process gas

Publications (3)

Publication Number Publication Date
JP2019521948A JP2019521948A (ja) 2019-08-08
JP2019521948A5 true JP2019521948A5 (https=) 2020-05-14
JP6918921B2 JP6918921B2 (ja) 2021-08-11

Family

ID=60042719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019505137A Active JP6918921B2 (ja) 2016-04-16 2017-04-14 プロセスガスの送達のための方法、システム、および装置

Country Status (6)

Country Link
EP (1) EP3442691A4 (https=)
JP (1) JP6918921B2 (https=)
KR (1) KR102483803B1 (https=)
CN (1) CN109152990B (https=)
DE (1) DE17783234T1 (https=)
WO (1) WO2017181013A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10150048B2 (en) 2014-10-23 2018-12-11 Rasirc, Inc. Method, system, and device for delivery of process gas
WO2018102139A1 (en) * 2016-12-01 2018-06-07 Rasirc, Inc. Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems
US11471816B2 (en) * 2019-03-11 2022-10-18 Karim Salehpoor Pollutant capturer and mobilizer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2785052A (en) * 1951-06-22 1957-03-12 Metalectro Corp Production of hydrazine
US2865714A (en) * 1954-08-02 1958-12-23 Guggenheim Brothers Production of anhydrous hydrazine
US3557009A (en) * 1967-05-15 1971-01-19 Norac Co Nonhazardous polymerization initiators
LU85789A1 (fr) * 1985-02-26 1986-09-02 Oreal Utilisation dans les domaines therapeutique et cosmetique d'une solution anhydre de peroxyde d'hydrogene
JPH04154193A (ja) * 1990-10-18 1992-05-27 Mitsubishi Gas Chem Co Inc 多層プリント板の製造法
JPH07230953A (ja) * 1994-02-15 1995-08-29 Sumitomo Chem Co Ltd ３ｂ−５ｂ族化合物半導体の気相成長方法
JP4232264B2 (ja) 1999-03-26 2009-03-04 株式会社Ｉｈｉ 窒化物半導体の製造方法および製造装置
FR2802829B1 (fr) * 1999-12-24 2002-05-17 Atofina Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre
FR2815956B1 (fr) * 2000-10-26 2003-05-23 Atofina Procede d'obtention d'hydrazine anhydre et dispositif pour sa mise en oeuvre
AU2013240292B2 (en) * 2012-03-28 2018-02-15 Rasirc, Inc. Method of delivering a process gas from a multi-component solution
WO2014014511A1 (en) * 2012-07-16 2014-01-23 Rasirc Method, system, and device for delivery of high purity hydrogen peroxide
US20160051928A1 (en) * 2013-04-05 2016-02-25 Rasirc, Inc. Delivery of a High Concentration Hydrogen Peroxide Gas Stream
US10214420B2 (en) * 2014-10-23 2019-02-26 Rasirc, Inc. Method, system, and device for delivery of process gas
WO2018089502A1 (en) * 2016-11-08 2018-05-17 Rasirc, Inc. Method, system and device for delivery of process gas

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