JP2019505829A5 - - Google Patents
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- JP2019505829A5 JP2019505829A5 JP2018528789A JP2018528789A JP2019505829A5 JP 2019505829 A5 JP2019505829 A5 JP 2019505829A5 JP 2018528789 A JP2018528789 A JP 2018528789A JP 2018528789 A JP2018528789 A JP 2018528789A JP 2019505829 A5 JP2019505829 A5 JP 2019505829A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- optical surface
- area
- shape
- location
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005498 polishing Methods 0.000 claims 26
- 230000003287 optical Effects 0.000 claims 15
- 238000003754 machining Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 201000009310 astigmatism Diseases 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
Claims (12)
自由曲面として具現された前記光学面(2)と、該光学面(2)の側方に隣接する区域(3)とにわたって、前記研磨工具(6)の研磨面(7)を動かすことにより、前記光学面(2)を研磨するステップを含み、前記区域(3)の各場所(P)で研磨基準(Δz)の閾値(ΔzS)を超えないように、前記区域(3)の形状を前記研磨工具(6)に、特に該研磨工具(6)の前記研磨面(7)の形状に適合させ、前記研磨基準(Δz)は、前記光学面(2)に隣接する前記区域(3)にわたって前記研磨工具(6)を動かすことにより作製された前記光学面(2)における研磨誤差の尺度を表す、
方法。 A method for polishing an optical surface (2) with a polishing tool (6),
By moving the polishing surface (7) of the polishing tool (6) over the optical surface (2) embodied as a free-form surface and an area (3) adjacent to the optical surface (2), Polishing the optical surface (2), wherein the shape of the area (3) is adjusted such that the polishing reference (Δz) threshold (Δz S ) is not exceeded at each location (P) of the area (3). The polishing tool (6) is adapted in particular to the shape of the polishing surface (7) of the polishing tool (6), and the polishing reference (Δz) is set in the area (3) adjacent to the optical surface (2). Representing a measure of polishing error in the optical surface (2) produced by moving the polishing tool (6) over
Method.
Δz=(kmax−kmin)/8D2
により求め、式中、Dは前記研磨工具(6)の前記研磨面(7)の直径を示し、kminは前記区域(3)の各場所(P)での最小局所曲率を示し、kmaxは前記区域(3)の各場所(P)での最大局所曲率を示す方法。 4. The method according to claim 3 , wherein the local astigmatism Δz at each location (P) of the zone (3) is:
Δz = (k max −k min ) / 8D 2
Where D represents the diameter of the polishing surface (7) of the polishing tool (6), kmin represents the minimum local curvature at each location (P) in the section (3), and kmax Is a method of indicating the maximum local curvature at each location (P) in the area (3).
研磨対象の前記光学面(2)及び前記側方隣接区域(3)を作製するために基板(1)を機械加工するステップ
をさらに含む方法。 The method according to any one of claims 1 to 8 , wherein in the step before the polishing step,
A method further comprising the step of machining a substrate (1) to create said optical surface (2) and said lateral adjacent area (3) to be polished.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015223983.7 | 2015-12-02 | ||
DE102015223983.7A DE102015223983A1 (en) | 2015-12-02 | 2015-12-02 | Method for polishing an optical surface and optical element |
PCT/EP2016/077866 WO2017093020A1 (en) | 2015-12-02 | 2016-11-16 | Method for polishing an optical surface and optical element |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021068492A Division JP7053925B2 (en) | 2015-12-02 | 2021-04-14 | How to polish the optical surface and optical elements |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019505829A JP2019505829A (en) | 2019-02-28 |
JP2019505829A5 true JP2019505829A5 (en) | 2019-12-26 |
Family
ID=57348658
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018528789A Pending JP2019505829A (en) | 2015-12-02 | 2016-11-16 | Method for polishing optical surface and optical element |
JP2021068492A Active JP7053925B2 (en) | 2015-12-02 | 2021-04-14 | How to polish the optical surface and optical elements |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021068492A Active JP7053925B2 (en) | 2015-12-02 | 2021-04-14 | How to polish the optical surface and optical elements |
Country Status (4)
Country | Link |
---|---|
JP (2) | JP2019505829A (en) |
CN (1) | CN108369299B (en) |
DE (1) | DE102015223983A1 (en) |
WO (1) | WO2017093020A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107322411B (en) * | 2017-06-09 | 2023-04-11 | 中国科学院西安光学精密机械研究所 | Large-caliber aspheric optical element polishing device |
DE102017216128A1 (en) * | 2017-09-13 | 2019-03-14 | Carl Zeiss Smt Gmbh | Method for processing a workpiece in the manufacture of an optical element |
DE102018202570A1 (en) | 2018-02-20 | 2019-08-22 | Carl Zeiss Smt Gmbh | A method of polishing a workpiece in the manufacture of an optical element |
EP3931160A1 (en) * | 2019-03-01 | 2022-01-05 | Zygo Corporation | Method for figure control of optical surfaces |
JP7162844B2 (en) * | 2019-03-29 | 2022-10-31 | 株式会社ロジストラボ | Optical element manufacturing method |
CN115319625A (en) * | 2022-08-11 | 2022-11-11 | 浙江百康光学股份有限公司 | Workpiece polishing process |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5958415A (en) * | 1982-09-29 | 1984-04-04 | Seiko Epson Corp | Progressive multifocal lens |
JPS63221954A (en) * | 1987-03-11 | 1988-09-14 | Matsushita Electric Ind Co Ltd | Curved surface polishing method |
JPH09239653A (en) * | 1996-03-06 | 1997-09-16 | Nikon Corp | Polishing device |
JP2001246539A (en) * | 2000-03-03 | 2001-09-11 | Inst Of Physical & Chemical Res | Grinding work method for non-axisymmetric aspherical mirror |
JP2001322063A (en) * | 2000-05-18 | 2001-11-20 | Canon Inc | Method of machining optical element |
JP3890186B2 (en) * | 2000-08-11 | 2007-03-07 | キヤノン株式会社 | Polishing method, optical element and mold for molding optical element |
JP2002346899A (en) * | 2001-03-23 | 2002-12-04 | Ricoh Co Ltd | Curve surface working method and working device |
JP2002370147A (en) * | 2001-06-12 | 2002-12-24 | Canon Inc | Polishing tool |
JP3882764B2 (en) | 2003-02-19 | 2007-02-21 | セイコーエプソン株式会社 | Progressive power lens |
DE10338893B4 (en) * | 2003-08-23 | 2007-07-05 | Essilor International (Compagnie Generale D'optique) | Process for the production of spectacle lenses and other optical molded articles made of plastic |
US7118449B1 (en) | 2004-09-20 | 2006-10-10 | Carl Zeiss Smt Ag | Method of manufacturing an optical element |
DE102007013563A1 (en) * | 2007-03-21 | 2008-09-25 | Carl Zeiss Smt Ag | Method and device for producing an element with at least one free-form surface with high dimensional accuracy and low surface roughness |
JP5029485B2 (en) | 2008-05-12 | 2012-09-19 | 株式会社島津製作所 | Aspherical reflective optical element |
EP2184132B1 (en) | 2008-11-07 | 2013-05-08 | Essilor International (Compagnie Générale D'Optique) | A method of and an apparatus for manufacturing an optical lens |
KR101039144B1 (en) * | 2008-12-10 | 2011-06-07 | 한국표준과학연구원 | The appatatus grinding to big size optics lens from incoming data |
JP5399167B2 (en) | 2009-08-19 | 2014-01-29 | オリンパス株式会社 | Polishing method |
-
2015
- 2015-12-02 DE DE102015223983.7A patent/DE102015223983A1/en not_active Ceased
-
2016
- 2016-11-16 WO PCT/EP2016/077866 patent/WO2017093020A1/en active Application Filing
- 2016-11-16 CN CN201680070686.9A patent/CN108369299B/en active Active
- 2016-11-16 JP JP2018528789A patent/JP2019505829A/en active Pending
-
2021
- 2021-04-14 JP JP2021068492A patent/JP7053925B2/en active Active
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