JP2019217440A

JP2019217440A - Cleaning apparatus

Info

Publication number: JP2019217440A
Application number: JP2018115673A
Authority: JP
Inventors: 慎二藤井; Shinji Fujii; 高橋　裕一; Yuichi Takahashi; 裕一高橋; 眞弘芝; Masahiro Shiba
Original assignee: Miura Co Ltd
Current assignee: Miura Co Ltd
Priority date: 2018-06-19
Filing date: 2018-06-19
Publication date: 2019-12-26
Anticipated expiration: 2038-06-19
Also published as: JP7069527B2; CN110614250A

Abstract

To provide a cleaning apparatus that can dry an object to be cleaned subjected to immersion cleaning even if a drying fan is not installed in the apparatus.SOLUTION: The cleaning apparatus comprises a cleaning tank 3 in which an object 2 to be cleaned is stored and liquid is retained, decompressing means 5 that suctions and discharges gas in the cleaning tank 3 to the outside, air-supply means 6 for introducing gas into the cleaning tank 3, and control means for controlling each means. The decompressing means 5 comprises a vacuum pump 22 in an exhaust path 19 extended from the cleaning tank 3. As drying operation in a step of drying the object 2 to be cleaned already cleaned, ventilation operation by which gas is introduced from the air-supply means 6 into the cleaning tank 3 and the vacuum pump 22 is actuated is performed. Preferably the air-supply means 6 comprises a liquid-phase air-supply nozzle 29 provided at a lower side in the cleaning tank 3, and the liquid-phase air-supply nozzle 29 has a plurality of nozzle holes 29a which open downward.SELECTED DRAWING: Figure 1

Description

本発明は、洗浄後の被洗浄物の乾燥が可能な洗浄装置に関するものである。 The present invention relates to a cleaning apparatus capable of drying an object to be cleaned after cleaning.

従来、下記特許文献１に開示されるように、排気装置（３０）によって洗浄槽（２０）内を減圧して洗浄液（２４）を沸騰させた後、リーク弁（２６）を開放することによって導気口（２５ａ）から液相部へ外気を導入して、被洗浄物を洗浄する洗浄装置が知られている。 Conventionally, as disclosed in Patent Literature 1 below, the inside of the cleaning tank (20) is depressurized by an exhaust device (30) to boil the cleaning liquid (24), and then the leak valve (26) is opened to conduct the cleaning. 2. Description of the Related Art There is known a cleaning apparatus for cleaning an object to be cleaned by introducing outside air into a liquid phase from an air port (25a).

この種の洗浄装置では、洗浄終了後、洗浄槽内から排水しても、被洗浄物は濡れた状態にある。洗浄槽内に強制対流を起こして被洗浄物を乾燥させるには、被洗浄物を乾燥装置に移すか、洗浄装置に乾燥用ファンを設置する必要がある。また、仮に真空ポンプ（排気装置）の吸込みをファン代わりに利用するとしても、ファンと比較して真空ポンプの吸込風量は少ないので、洗浄槽内の空気の流れが不均一となるおそれがあり、その対策が望まれる。 In this type of cleaning apparatus, the object to be cleaned is in a wet state even after draining from the cleaning tank after cleaning is completed. In order to dry the object to be cleaned by causing forced convection in the cleaning tank, it is necessary to transfer the object to be cleaned to a drying device or to install a drying fan in the cleaning device. Also, even if the suction of the vacuum pump (exhaust device) is used instead of the fan, the suction air volume of the vacuum pump is smaller than that of the fan, so that the air flow in the cleaning tank may be uneven, The measures are desired.

特開平１０−１０５０９号公報（要約の欄）JP-A-10-10509 (abstract column)

本発明が解決しようとする課題は、乾燥用ファンを設置しなくても、浸漬洗浄後の被洗浄物の乾燥が可能な洗浄装置を提供することにある。また、風量が少なくても、被洗浄物を均一に乾燥可能な洗浄装置を提供することを課題とする。 It is an object of the present invention to provide a cleaning apparatus that can dry an object to be cleaned after immersion cleaning without installing a drying fan. It is another object of the present invention to provide a cleaning apparatus that can uniformly dry an object to be cleaned even when the air volume is small.

本発明は、前記課題を解決するためになされたもので、請求項１に記載の発明は、被洗浄物が収容されると共に液体が貯留される洗浄槽と、この洗浄槽内の気体を外部へ吸引排出する減圧手段と、前記洗浄槽内へ気体を導入する給気手段と、前記各手段を制御する制御手段とを備え、前記減圧手段は、前記洗浄槽内からの排気路に真空ポンプを備え、前記制御手段は、洗浄後の被洗浄物の乾燥工程の乾燥動作として、前記給気手段から前記洗浄槽内へ気体を導入させると共に前記真空ポンプを作動させる通風動作を行わせることを特徴とする洗浄装置である。 SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and the invention according to claim 1 has a cleaning tank in which an object to be cleaned is stored and a liquid is stored, and a gas in the cleaning tank is externally supplied. Pressure reducing means for sucking and discharging to the cleaning tank, air supply means for introducing gas into the cleaning tank, and control means for controlling the respective means, wherein the pressure reducing means is provided with a vacuum pump in an exhaust passage from inside the cleaning tank. The control means, as a drying operation in the drying step of the object to be cleaned after cleaning, to perform a ventilation operation to introduce gas from the air supply means into the cleaning tank and to operate the vacuum pump. It is a cleaning device characterized by the following.

請求項１に記載の発明によれば、浸漬洗浄後の乾燥工程において、給気手段から洗浄槽内へ気体を導入させつつ真空ポンプで排気することで、洗浄槽内に通風して被洗浄物の乾燥を図ることができる。減圧手段の真空ポンプを利用することで、別途、乾燥用ファンを設置しなくても、洗浄槽内に強制対流を起こして、被洗浄物の乾燥を図ることができる。 According to the first aspect of the present invention, in the drying step after the immersion cleaning, the air is exhausted by the vacuum pump while introducing gas from the air supply means into the cleaning tank, so that the object to be cleaned is ventilated in the cleaning tank. Can be dried. By using the vacuum pump of the decompression means, forced convection can be generated in the cleaning tank and the object to be cleaned can be dried without separately providing a drying fan.

請求項２に記載の発明は、前記給気手段は、前記洗浄槽内の下方に設けられた液相給気ノズルを備え、前記液相給気ノズルは、下方に向けて開口する複数のノズル穴を有していることを特徴とする請求項１に記載の洗浄装置である。 The invention according to claim 2 is characterized in that the air supply means includes a liquid phase air supply nozzle provided below in the cleaning tank, and the liquid phase air supply nozzle has a plurality of nozzles opening downward. The cleaning device according to claim 1, wherein the cleaning device has a hole.

請求項２に記載の発明によれば、洗浄槽内の下方に液相給気ノズルを備える。被洗浄物の浸漬洗浄時、所望により、液相給気ノズルから液中に気体を噴出させて、被洗浄物を効果的に洗浄することができる。浸漬洗浄後、洗浄槽内から排水するが、液相給気ノズルの各ノズル穴は下方へ開口して形成されているので、液相給気ノズル内からも排水することができる。その後の乾燥工程では、真空ポンプの吸込みに伴い、液相給気ノズルから洗浄槽内へ気体が導入されるが、液相給気ノズルの各ノズル穴から気体を導入することで、真空ポンプの吸込風量が少なくても、気体の流れを均一にして、被洗浄物を均一に乾燥することができる。その際、事前に液相給気ノズル内からも排水されているので、液相給気ノズル内から導入される空気が湿るおそれがなく、被洗浄物を迅速に乾燥することができる。 According to the second aspect of the present invention, the liquid supply nozzle is provided below the cleaning tank. At the time of immersion cleaning of the object to be cleaned, if necessary, a gas can be blown out of the liquid from the liquid-phase air supply nozzle to effectively clean the object to be cleaned. After the immersion cleaning, the liquid is drained from the cleaning tank. Since each nozzle hole of the liquid-phase air supply nozzle is formed to open downward, it can be drained from the liquid-phase air supply nozzle. In the subsequent drying step, gas is introduced from the liquid-phase air supply nozzle into the cleaning tank with the suction of the vacuum pump, but by introducing gas from each nozzle hole of the liquid-phase air supply nozzle, the vacuum pump is operated. Even if the suction air volume is small, it is possible to make the flow of gas uniform and to uniformly dry the object to be cleaned. At this time, since the liquid is also drained from the inside of the liquid supply nozzle in advance, there is no possibility that the air introduced from the inside of the liquid supply nozzle becomes wet, and the object to be cleaned can be dried quickly.

請求項３に記載の発明は、前記給気手段からの気体を加温するヒータを備えたことを特徴とする請求項１または請求項２に記載の洗浄装置である。 The invention according to claim 3 is the cleaning apparatus according to claim 1 or 2, further comprising a heater that heats the gas from the air supply unit.

請求項３に記載の発明によれば、給気手段により導入される気体をヒータで加温することができるから、被洗浄物を温風で迅速に乾燥することができる。通風動作において洗浄槽内に温風を流通させる場合、乾燥用ファンを設置した場合と比較して、真空ポンプによる風量は比較的少ないので、その分、ヒータの容量を小さくすることができる。 According to the third aspect of the present invention, since the gas introduced by the air supply means can be heated by the heater, the object to be cleaned can be quickly dried with warm air. When warm air is circulated in the washing tank in the ventilation operation, the air volume by the vacuum pump is relatively small as compared with the case where a drying fan is installed, so that the capacity of the heater can be reduced accordingly.

請求項４に記載の発明は、前記ヒータは、蒸気ヒータまたは電気ヒータであり、前記ヒータが電気ヒータである場合、前記洗浄槽外の給気路に第一電気ヒータを設けることを特徴とする請求項３に記載の洗浄装置である。 The invention according to claim 4 is characterized in that the heater is a steam heater or an electric heater, and when the heater is an electric heater, a first electric heater is provided in an air supply passage outside the cleaning tank. A cleaning device according to claim 3.

請求項４に記載の発明によれば、蒸気ヒータまたは電気ヒータを用いて、被洗浄物を温風で迅速に乾燥することができる。なお、ヒータが電気ヒータである場合、洗浄槽外の給気路に設けることで、被洗浄物の乾燥に適した容量の電気ヒータを設置しやすい。 According to the fourth aspect of the present invention, the object to be cleaned can be quickly dried with warm air using the steam heater or the electric heater. When the heater is an electric heater, by providing the heater in an air supply path outside the cleaning tank, it is easy to install an electric heater having a capacity suitable for drying an object to be cleaned.

請求項５に記載の発明は、前記洗浄槽内には、前記液相給気ノズルよりも下方に第二電気ヒータを設けることを特徴とする請求項４に記載の洗浄装置である。 The invention according to claim 5 is the cleaning apparatus according to claim 4, wherein a second electric heater is provided below the liquid-phase air supply nozzle in the cleaning tank.

請求項５に記載の発明によれば、液相給気ノズルよりも下方に第二電気ヒータを設けることで、洗浄工程において、貯留液の加温を図ることができる。また、乾燥工程において、第二電気ヒータを用いる場合でも、液相給気ノズルには下方へ向けてノズル穴が形成されているので、ノズル穴からの噴出気体を第二電気ヒータに当てて加温することができる。 According to the fifth aspect of the invention, by providing the second electric heater below the liquid-phase air supply nozzle, it is possible to heat the stored liquid in the cleaning step. Further, even in the case where the second electric heater is used in the drying step, since the nozzle hole is formed downward in the liquid-phase air supply nozzle, the gas ejected from the nozzle hole is applied to the second electric heater to apply heat. Can be warmed.

請求項６に記載の発明は、前記制御手段は、前記乾燥工程では、前記洗浄槽外の第一電気ヒータを用い、前記洗浄槽内に液体を貯留した洗浄工程では、前記洗浄槽内の第二電気ヒータを用いることを特徴とする請求項５に記載の洗浄装置である。 The invention according to claim 6, wherein the control means uses a first electric heater outside the cleaning tank in the drying step, and in the cleaning step in which a liquid is stored in the cleaning tank, The cleaning device according to claim 5, wherein two electric heaters are used.

請求項６に記載の発明によれば、第一電気ヒータと第二電気ヒータとを、工程に応じて使い分けることで、各工程に応じた加温を容易に図ることができる。 According to the sixth aspect of the present invention, the first electric heater and the second electric heater are selectively used according to the process, so that heating according to each process can be easily achieved.

さらに、請求項７に記載の発明は、前記洗浄槽内からの排気路には、熱交換器と前記真空ポンプとが順に設けられ、前記洗浄工程は、前記減圧手段により前記洗浄槽内を減圧する減圧動作を含み、前記制御手段は、前記減圧動作では、前記熱交換器に通水させ、前記乾燥工程の前記通風動作では、前記熱交換器に通水させない制御を行うことを特徴とする請求項１〜６のいずれか１項に記載の洗浄装置である。 Further, in the invention according to claim 7, a heat exchanger and the vacuum pump are sequentially provided in an exhaust path from inside the cleaning tank, and in the cleaning step, the inside of the cleaning tank is depressurized by the decompression means. The control means performs control such that water is passed through the heat exchanger in the pressure reducing operation, and water is not passed through the heat exchanger in the ventilation operation in the drying step. A cleaning device according to any one of claims 1 to 6.

請求項７に記載の発明によれば、洗浄槽内からの排気路に、熱交換器と真空ポンプとを順に備える。そして、洗浄工程の減圧動作では、熱交換器に通水することで効率的な減圧を図ることができる一方、乾燥工程の通風動作では、熱交換器に通水しないことで水の節約を図ることができる。 According to the seventh aspect of the present invention, a heat exchanger and a vacuum pump are sequentially provided in an exhaust path from inside the cleaning tank. In the depressurizing operation of the washing step, efficient depressurization can be achieved by passing water through the heat exchanger. On the other hand, in the ventilating operation of the drying step, water can be saved by not passing water through the heat exchanger. be able to.

本発明の洗浄装置によれば、乾燥用ファンを設置しなくても、浸漬洗浄後の被洗浄物を乾燥することができる。また、真空ポンプを用いることで風量が少なくても、被洗浄物を均一に乾燥することができる。 ADVANTAGE OF THE INVENTION According to the cleaning apparatus of this invention, the to-be-cleaned object after immersion cleaning can be dried, without installing a drying fan. Further, by using a vacuum pump, the object to be cleaned can be uniformly dried even if the air volume is small.

本発明の実施例１の洗浄装置を示す概略図である。1 is a schematic diagram illustrating a cleaning device according to a first embodiment of the present invention. 図１の洗浄装置による乾燥工程の一例を示す概略図であり、洗浄槽内の圧力Ｐ（縦軸）と経過時間ｔ（横軸）との関係を示している。FIG. 2 is a schematic diagram illustrating an example of a drying process by the cleaning device of FIG. 1, and illustrates a relationship between a pressure P (vertical axis) in a cleaning tank and an elapsed time t (horizontal axis). 本発明の実施例２の洗浄装置を示す概略図である。It is the schematic which shows the washing | cleaning apparatus of Example 2 of this invention.

以下、本発明の具体的実施例を図面に基づいて詳細に説明する。 Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

図１は、本発明の実施例１の洗浄装置１を示す概略図である。
本実施例の洗浄装置１は、被洗浄物２が収容されると共に液体が貯留される洗浄槽３と、この洗浄槽３内の貯留液を加温する加温手段４と、洗浄槽３内の気体を外部へ吸引排出して洗浄槽３内を減圧する減圧手段５と、減圧された洗浄槽３内の液相部へ外気を導入する液相給気手段６と、減圧された洗浄槽３内の気相部へ外気を導入する気相給気手段７と、これら各手段４〜７を制御する制御手段（図示省略）とを備える。 FIG. 1 is a schematic diagram illustrating a cleaning apparatus 1 according to a first embodiment of the present invention.
The cleaning apparatus 1 of the present embodiment includes a cleaning tank 3 in which an object 2 to be cleaned is stored and a liquid is stored, a heating unit 4 for heating the liquid stored in the cleaning tank 3, and a cleaning tank 3 in the cleaning tank 3. A decompression means 5 for sucking and discharging the gas to the outside to decompress the inside of the cleaning tank 3, a liquid-phase air supply means 6 for introducing outside air into the liquid phase portion in the decompressed cleaning tank 3, and a decompression cleaning tank The apparatus includes a gas supply means 7 for introducing outside air to a gas phase part in the apparatus 3 and a control means (not shown) for controlling these means 4 to 7.

被洗浄物２は、洗浄を図りたい物品であり、たとえば、医療器械、電子部品または機械部品である。被洗浄物２は、洗浄槽３内に設けられた網棚８に載せられて、洗浄槽３内に収容される。 The article to be cleaned 2 is an article to be cleaned, and is, for example, a medical instrument, an electronic component, or a mechanical component. The article to be cleaned 2 is placed on a net shelf 8 provided in the cleaning tank 3 and is accommodated in the cleaning tank 3.

洗浄槽３は、内部空間の減圧に耐える中空容器であり、本実施例では略矩形のボックス状に形成されている。洗浄槽３は、上方へ開口する洗浄槽本体９と、この洗浄槽本体９の開口部を開閉するドア１０とを備える。ドア１０を閉じた状態では、洗浄槽本体９とドア１０との隙間はパッキン１１で封止される。 The cleaning tank 3 is a hollow container that can withstand reduced pressure in the internal space, and in this embodiment, is formed in a substantially rectangular box shape. The cleaning tank 3 includes a cleaning tank main body 9 that opens upward, and a door 10 that opens and closes an opening of the cleaning tank main body 9. When the door 10 is closed, a gap between the cleaning tank main body 9 and the door 10 is sealed by the packing 11.

図示しないが、洗浄槽３には、給水手段および排水手段の他、所望により薬液供給手段も設けられる。給水手段は、洗浄槽３内へ水を供給する手段であり、排水手段は、洗浄槽３外へ水を排出する手段である。また、薬液供給手段は、洗浄槽３内へ薬液を供給する手段である。給水手段による給水に薬液供給手段による薬液を投入することで、所望濃度の洗浄液とすることができる。 Although not shown, the cleaning tank 3 is provided with a chemical liquid supply means as required in addition to the water supply means and the drainage means. The water supply means is a means for supplying water into the cleaning tank 3, and the drainage means is a means for discharging water out of the cleaning tank 3. The chemical liquid supply means is a means for supplying a chemical liquid into the cleaning tank 3. A cleaning solution having a desired concentration can be obtained by adding a chemical solution from the chemical solution supply unit to water supplied by the water supply unit.

洗浄槽３には、圧力センサ１２と温度センサ１３とが設けられる。圧力センサ１２は、洗浄槽３の上部に設けられる一方、温度センサ１３は、洗浄槽３の下部に設けられる。そのため、洗浄槽３内に液体を貯留した状態では、圧力センサ１２により洗浄槽３内の気相部の圧力を検出でき、温度センサ１３により洗浄槽３内の液相部の温度を検出できる。 The cleaning tank 3 is provided with a pressure sensor 12 and a temperature sensor 13. The pressure sensor 12 is provided on the upper part of the cleaning tank 3, while the temperature sensor 13 is provided on the lower part of the cleaning tank 3. Therefore, when the liquid is stored in the cleaning tank 3, the pressure of the gas phase in the cleaning tank 3 can be detected by the pressure sensor 12, and the temperature of the liquid phase in the cleaning tank 3 can be detected by the temperature sensor 13.

加温手段４は、被洗浄物２の浸漬洗浄時、洗浄槽３内の液体を加温する。また、本実施例では、加温手段４は、浸漬洗浄後の被洗浄物２の乾燥時、洗浄槽３内へ導入される気体を加温する。 The heating means 4 heats the liquid in the cleaning tank 3 during the immersion cleaning of the object 2 to be cleaned. Further, in the present embodiment, the heating means 4 heats the gas introduced into the cleaning tank 3 when the object to be cleaned 2 is dried after immersion cleaning.

加温手段４は、本実施例では蒸気ヒータ１４から構成される。具体的には、洗浄槽３内の下部にはパイプ材が設けられ、このパイプ材には、一端部から給蒸路１５を介して蒸気が供給され、他端部からドレン排出路１６を介してドレンが排出される。給蒸路１５には、給蒸弁１７が設けられる一方、ドレン排出路１６には、スチームトラップ１８が設けられる。給蒸弁１７の開閉または開度を制御して、洗浄槽３内の温度を調整することができる。 The heating means 4 comprises a steam heater 14 in this embodiment. Specifically, a pipe material is provided at a lower portion in the washing tank 3, and steam is supplied to the pipe material from one end through a steam supply passage 15, and from the other end through a drain discharge passage 16. Drain is discharged. The steam supply path 15 is provided with a steam supply valve 17, while the drain discharge path 16 is provided with a steam trap 18. The temperature in the washing tank 3 can be adjusted by controlling the opening and closing or the opening degree of the steam supply valve 17.

減圧手段５は、洗浄槽３内の気体を外部へ吸引排出して、洗浄槽３内を減圧する。本実施例では、洗浄槽３内からの排気路１９に、熱交換器２０、逆止弁２１および真空ポンプ２２が順に設けられて構成される。 The decompression means 5 sucks and discharges gas in the cleaning tank 3 to the outside, and decompresses the inside of the cleaning tank 3. In this embodiment, a heat exchanger 20, a check valve 21, and a vacuum pump 22 are sequentially provided in an exhaust path 19 from inside the cleaning tank 3.

熱交換器２０は、排気路１９内の流体と冷却水とを混ぜることなく熱交換する間接熱交換器である。熱交換器２０には、熱交給水路２３を介して冷却水が供給され、熱交排水路２４を介して冷却水が排出される。熱交換器２０において、排気路１９内の蒸気を、冷却水により冷却し凝縮させることができる。熱交給水路２３（または熱交排水路２４）に設けた熱交給水弁２５の開閉により、熱交換器２０への通水の有無を切り替えることができる。 The heat exchanger 20 is an indirect heat exchanger that exchanges heat without mixing the fluid in the exhaust path 19 and the cooling water. The cooling water is supplied to the heat exchanger 20 via the heat exchange water supply channel 23, and the cooling water is discharged via the heat exchange drainage channel 24. In the heat exchanger 20, the steam in the exhaust path 19 can be cooled and condensed by the cooling water. Opening / closing of the heat exchange water supply valve 25 provided in the heat exchange water supply passage 23 (or the heat exchange drainage passage 24) can switch the presence / absence of water supply to the heat exchanger 20.

真空ポンプ２２は、水封式であり、周知のとおり、封水と呼ばれる水が供給されつつ運転される。そのために、真空ポンプ２２には、封水給水路２６を介して水が供給される。封水給水路２６には封水給水弁２７が設けられており、この封水給水弁２７は、真空ポンプ２２の発停と連動して開閉される。 The vacuum pump 22 is of a water sealing type, and is operated while being supplied with water called water sealing, as is well known. For this purpose, water is supplied to the vacuum pump 22 via a sealed water supply channel 26. A sealed water supply valve 27 is provided in the sealed water supply passage 26, and the sealed water supply valve 27 is opened and closed in conjunction with the start and stop of the vacuum pump 22.

液相給気手段６は、被洗浄物２の浸漬洗浄時、減圧された洗浄槽３内の液相部へ、液相給気路２８を介して外気を導入する。また、詳細は後述するが、液相給気手段６は、浸漬洗浄後の被洗浄物２の乾燥時、排水済の洗浄槽３内に外気を導入するのにも用いられる。外気は、液相給気ノズル２９を介して導入されるのが好ましい。液相給気ノズル２９は、水平に配置されたパイプ材に、その長手方向へ離隔して複数のノズル穴２９ａが下方へ開口して形成されている。洗浄槽３内には、平面視において、液相給気ノズル２９が蛇行して配置されるのが好ましい。液相給気ノズル２９への液相給気路２８には、フィルタ３０および液相給気弁３１が順に設けられている。洗浄槽３内が減圧された状態で液相給気弁３１を開けると、洗浄槽３の内外の差圧により、フィルタ３０を介した空気を洗浄槽３内へ導入することができる。なお、液相給気ノズル２９は、蒸気ヒータ１４の上部に配置されるのが好ましい。 The liquid-phase air supply means 6 introduces outside air to the decompressed liquid-phase portion in the cleaning tank 3 via the liquid-phase air supply path 28 during immersion cleaning of the article 2 to be cleaned. As will be described later in detail, the liquid-phase air supply means 6 is also used to introduce outside air into the drained cleaning tank 3 when the object to be cleaned 2 is dried after immersion cleaning. The outside air is preferably introduced via a liquid-phase air supply nozzle 29. The liquid-phase air supply nozzle 29 has a plurality of nozzle holes 29a formed in a horizontally disposed pipe member so as to be spaced apart in the longitudinal direction and open downward. In the cleaning tank 3, it is preferable that the liquid-phase air supply nozzle 29 be arranged in a meandering manner in a plan view. In the liquid supply path 28 to the liquid supply nozzle 29, a filter 30 and a liquid supply valve 31 are sequentially provided. When the liquid-phase air supply valve 31 is opened in a state where the pressure inside the cleaning tank 3 is reduced, air can be introduced into the cleaning tank 3 through the filter 30 by a differential pressure between the inside and outside of the cleaning tank 3. The liquid supply nozzle 29 is preferably disposed above the steam heater 14.

気相給気手段７は、減圧された洗浄槽３内の気相部へ、気相給気路３２を介して外気を導入する。洗浄槽３内への気相給気路３２には、フィルタ３３および気相給気弁３４が順に設けられている。洗浄槽３内が減圧された状態で気相給気弁３４を開けると、洗浄槽３の内外の差圧により、フィルタ３３を介した空気を洗浄槽３内へ導入して、洗浄槽３内を復圧することができる。 The gas-phase air supply means 7 introduces outside air through the gas-phase air supply path 32 into the gas-phase portion in the cleaning tank 3 that has been reduced in pressure. A filter 33 and a gas supply valve 34 are sequentially provided in the gas supply path 32 into the cleaning tank 3. When the gas-phase air supply valve 34 is opened in a state where the inside of the washing tank 3 is depressurized, air through the filter 33 is introduced into the washing tank 3 due to a differential pressure between the inside and outside of the washing tank 3. Can be restored.

制御手段は、前記各センサ１２，１３の検出信号や経過時間などに基づき、前記各手段４〜７などを制御する制御器である。具体的には、給蒸弁１７、真空ポンプ２２、熱交給水弁２５、封水給水弁２７、液相給気弁３１、気相給気弁３４の他、圧力センサ１２および温度センサ１３などは、制御器に接続されている。また、制御器には、図示しないが、前述したとおり、給水手段（たとえば給水弁）、排水手段（たとえば排水弁）および薬液供給手段（たとえば薬液弁）も接続されている。そして、制御器は、以下に述べるように、所定の手順（プログラム）に従い、洗浄槽３内の被洗浄物２の洗浄と、その後の乾燥を図る。 The control unit is a controller that controls the units 4 to 7 based on the detection signals of the sensors 12 and 13 and the elapsed time. Specifically, in addition to the steam supply valve 17, the vacuum pump 22, the heat exchange water supply valve 25, the sealed water supply valve 27, the liquid phase supply valve 31, the gas phase supply valve 34, the pressure sensor 12, the temperature sensor 13, and the like. Is connected to the controller. Although not shown, the controller is also connected to a water supply means (for example, a water supply valve), a drainage means (for example, a drain valve), and a chemical liquid supply means (for example, a chemical liquid valve), as described above. The controller cleans the object 2 in the cleaning tank 3 and then dries it according to a predetermined procedure (program) as described below.

以下、本実施例の洗浄装置１の運転方法の一例について説明する。
運転開始に先立ち、洗浄槽３内に被洗浄物２を収容し、洗浄槽３のドア１０を気密に閉じる。その後、所定のスタートボタンを押すなど、運転開始を指示すると、制御器は、被洗浄物２の洗浄工程と乾燥工程とを順次に実行する。 Hereinafter, an example of an operation method of the cleaning apparatus 1 of the present embodiment will be described.
Prior to the start of the operation, the object to be cleaned 2 is accommodated in the cleaning tank 3 and the door 10 of the cleaning tank 3 is closed in an airtight manner. Thereafter, when an operation start is instructed, for example, by pressing a predetermined start button, the controller sequentially executes a washing step and a drying step of the article to be washed 2.

洗浄工程では、被洗浄物２が浸漬される所定水位まで、給水手段により洗浄槽３内に給水する。この間、気相給気弁３４を開けておくか、減圧手段５を作動させておけばよい。洗浄槽３内への給水後には、所望により、薬液供給手段により薬液を投入する。そして、加温手段４による貯留液の加温動作、減圧手段５による洗浄槽３内の減圧動作、減圧下の洗浄槽３内への液相給気手段６または気相給気手段７による復圧動作などを利用して、被洗浄物２を洗浄する。なお、洗浄工程での減圧動作では、真空ポンプ２２を作動させると共に、熱交給水弁２５を開けて熱交換器２０に通水するのが好ましい。 In the cleaning step, water is supplied into the cleaning tank 3 by a water supply means up to a predetermined water level at which the object to be cleaned 2 is immersed. During this time, the gas supply valve 34 may be opened or the pressure reducing means 5 may be operated. After the water is supplied into the washing tank 3, a chemical is supplied by a chemical supply means as required. A heating operation of the stored liquid by the heating unit 4, a decompression operation in the cleaning tank 3 by the decompression unit 5, and a recovery operation by the liquid phase gas supply unit 6 or the gas phase air supply unit 7 into the cleaning tank 3 under reduced pressure. The object to be cleaned 2 is cleaned using a pressure operation or the like. In the depressurizing operation in the washing step, it is preferable to operate the vacuum pump 22 and open the heat exchange water supply valve 25 to flow water through the heat exchanger 20.

洗浄工程では、たとえば、加温手段４により洗浄槽３内の液体を所定温度まで加温後、次に述べる液相給気パルス制御と気相給気パルス制御との内、一方または双方を実行して、被洗浄物２を洗浄する。洗浄槽３内の液体を所定温度まで加温するには、本実施例では蒸気ヒータ１４への給蒸弁１７を開ければよい。その間、その他の弁２５，２７，３１，３４は閉じられており、真空ポンプ２２は停止している。 In the washing step, for example, after the liquid in the washing tank 3 is heated to a predetermined temperature by the heating means 4, one or both of the following liquid phase gas supply pulse control and gas phase gas supply pulse control are executed. Then, the object to be cleaned 2 is cleaned. In order to heat the liquid in the cleaning tank 3 to a predetermined temperature, in this embodiment, the steam supply valve 17 to the steam heater 14 may be opened. Meanwhile, the other valves 25, 27, 31, and 34 are closed, and the vacuum pump 22 is stopped.

液相給気パルス制御では、減圧手段５により、洗浄槽３内の液体を沸騰させるかその直前まで洗浄槽３内を減圧した状態で、液相給気手段６により、被洗浄物２よりも下方から洗浄槽３内の液相部に外気を導入して液体を突沸させる。これにより、貯留液の爆発的な噴上げとそれに続く落下とによって、貯留液を大きく揺動させることができ、被洗浄物２を効果的に洗浄することができる。その後、洗浄槽３内の貯留液を再び所定温度まで加温し、洗浄槽３内を減圧後に洗浄槽３内の液相部に外気を導入することを、所定の終了条件を満たすまで繰り返すのがよい。 In the liquid phase air supply pulse control, the liquid in the cleaning tank 3 is boiled by the decompression means 5 or the pressure in the cleaning tank 3 is reduced to just before the pressure. External air is introduced into the liquid phase portion in the washing tank 3 from below, and the liquid is bumped. Thereby, the stored liquid can be largely swung by the explosive spouting of the stored liquid and the subsequent drop, and the object to be cleaned 2 can be effectively cleaned. Thereafter, the liquid stored in the cleaning tank 3 is heated again to a predetermined temperature, and after the pressure in the cleaning tank 3 is reduced, the introduction of outside air into the liquid phase portion in the cleaning tank 3 is repeated until a predetermined termination condition is satisfied. Is good.

気相給気パルス制御では、減圧手段５により、洗浄槽３内の液体を沸騰させ続けるように洗浄槽３内の減圧を継続し、この減圧中、洗浄槽３内の気相部に外気を導入して、液体の沸騰が止むまで瞬時に一時的に復圧することを、所定の終了条件を満たすまで繰り返す。この制御によれば、洗浄槽３内の復圧の度に、それまでの沸騰により液体中に生じていた気泡は、瞬時に凝縮する。この凝縮時の圧力波や圧力差で、液体が撹拌および移送され、被洗浄物２の洗浄が図られる。また、被洗浄物２が貫通穴や袋穴を有する場合、沸騰により生じた蒸気を穴内に溜め、復圧時にその蒸気溜まりを一気に消して、穴内に液体を勢いよく入れることでも、被洗浄物２の洗浄が図られる。 In the gas-phase air supply pulse control, the pressure in the cleaning tank 3 is continuously reduced by the pressure reducing means 5 so that the liquid in the cleaning tank 3 continues to boil. Introducing and temporarily returning the pressure instantaneously until the liquid stops boiling is repeated until a predetermined termination condition is satisfied. According to this control, every time the pressure in the cleaning tank 3 is restored, bubbles generated in the liquid due to boiling up to that point are instantaneously condensed. The liquid is stirred and transferred by the pressure wave and the pressure difference at the time of the condensation, and the object to be cleaned 2 is cleaned. When the object to be cleaned 2 has a through hole or a blind hole, the vapor generated by boiling can be stored in the hole, the vapor pool can be erased at a stretch when the pressure is restored, and the liquid can be rushed into the hole. 2 is performed.

洗浄工程の終了後、洗浄槽３内の貯留水は、排水手段により排水される。具体的には、気相給気弁３４を開けた状態で、排水弁（図示省略）を開ければよい。液相給気ノズル２９は、ノズル穴２９ａが下方へ開口して形成されているので、洗浄槽３内からの排水時、液相給気ノズル２９内からも排水することができる。なお、水を入れ替えて（あるいは入れ替えないで）、洗浄工程を複数回繰り返したり、洗浄工程後に濯ぎ工程を実施したりしてもよい。洗浄工程と濯ぎ工程とは、貯留水への薬液の投入の有無、または薬液の種類が異なるが、基本的には同様の内容で実施される。洗浄工程や濯ぎ工程の後、乾燥工程が行われる。 After the completion of the cleaning step, the water stored in the cleaning tank 3 is drained by drainage means. Specifically, the drain valve (not shown) may be opened with the gas supply valve 34 opened. Since the liquid phase supply nozzle 29 is formed with the nozzle hole 29a opened downward, the liquid phase supply nozzle 29 can also drain from the liquid phase supply nozzle 29 when draining from the cleaning tank 3. Note that the washing step may be repeated a plurality of times by replacing (or not replacing) water, or a rinsing step may be performed after the washing step. The washing step and the rinsing step are basically performed in the same manner, although the presence or absence of the introduction of the chemical into the stored water or the type of the chemical are different. After the washing step and the rinsing step, a drying step is performed.

図２は、本実施例の洗浄装置１による乾燥工程の一例を示す概略図であり、洗浄槽３内の圧力Ｐ（縦軸）と経過時間ｔ（横軸）との関係を示している。図中、符号Ｐ０は、大気圧を示している。 FIG. 2 is a schematic diagram illustrating an example of a drying process by the cleaning device 1 of the present embodiment, and illustrates a relationship between the pressure P (vertical axis) in the cleaning tank 3 and the elapsed time t (horizontal axis). In the figure, reference symbol P0 indicates the atmospheric pressure.

乾燥工程では、洗浄槽３内へ気体を導入させると共に真空ポンプ２２を作動させる通風動作により、洗浄槽３内の被洗浄物２の乾燥が図られる。図２において、実線が通風動作を示している。通風動作は、たとえば設定時間だけ行われる。 In the drying step, the object to be cleaned 2 in the cleaning tank 3 is dried by a ventilation operation in which gas is introduced into the cleaning tank 3 and the vacuum pump 22 is operated. In FIG. 2, a solid line indicates a ventilation operation. The ventilation operation is performed, for example, for a set time.

通風動作の際、洗浄槽３内への気体の導入は、気相給気手段７ではなく、液相給気手段６の液相給気ノズル２９から行うのが好ましい。従って、好適には、気相給気弁３４を閉じたまま、液相給気弁３１を開けた状態で、真空ポンプ２２を作動させればよい。この場合、真空ポンプ２２による排気に伴い、洗浄槽３内には液相給気ノズル２９から外気が導入され、洗浄槽３内に通風して被洗浄物２の乾燥を図ることができる。 At the time of the ventilation operation, the gas is preferably introduced into the cleaning tank 3 not from the gas-phase gas supply means 7 but from the liquid-phase gas supply nozzle 29 of the liquid-phase gas supply means 6. Therefore, preferably, the vacuum pump 22 may be operated with the liquid-phase supply valve 31 opened while the gas-phase supply valve 34 is closed. In this case, with the evacuation by the vacuum pump 22, outside air is introduced into the cleaning tank 3 from the liquid-phase air supply nozzle 29, and air can be passed through the cleaning tank 3 to dry the object 2 to be cleaned.

真空ポンプ２２による洗浄槽３内からの排気口（洗浄槽３に対する排気路１９の接続部）１９ａは、被洗浄物２よりも上方である一方、液相給気ノズル２９は、被洗浄物２よりも下方に配置される（しかもノズル穴２９ａが下向きである）ので、液相給気ノズル２９からの空気は、排気口１９ａへショートパスすることなく、被洗浄物２を通過して被洗浄物２を効果的に乾燥させる。また、前述したとおり、洗浄工程の終了時、液相給気ノズル２９内からも排水されているので、液相給気ノズル２９内から導入される空気が湿るおそれがなく、被洗浄物２を迅速に乾燥することができる An exhaust port 19a from the inside of the cleaning tank 3 by the vacuum pump 22 (a connection portion of the exhaust path 19 to the cleaning tank 3) is located above the object 2 to be cleaned, while the liquid-phase air supply nozzle 29 is connected to the object 2 to be cleaned. Is disposed below (and the nozzle hole 29a is directed downward), so that the air from the liquid-phase air supply nozzle 29 passes through the workpiece 2 without being short-passed to the exhaust port 19a to be cleaned. The object 2 is dried effectively. Further, as described above, at the end of the cleaning step, since the water is also drained from the inside of the liquid supply nozzle 29, there is no possibility that the air introduced from the inside of the liquid supply nozzle 29 becomes wet, and the cleaning target 2 Can be dried quickly

通風動作では、真空ポンプ２２の吸込みに伴い、液相給気ノズル２９から洗浄槽３内へ外気を引き込む（つまり外気を自然に導入する）ことができる。その際、液相給気ノズル２９の各ノズル穴２９ａから外気を導入することで、真空ポンプ２２の吸込風量が少なくても、洗浄槽３内における空気の流れを均一にして、被洗浄物２を均一に乾燥させることができる。 In the ventilation operation, external air can be drawn into the cleaning tank 3 from the liquid-phase air supply nozzle 29 (that is, external air is naturally introduced) with the suction of the vacuum pump 22. At this time, by introducing outside air from each nozzle hole 29a of the liquid phase supply nozzle 29, even if the suction air volume of the vacuum pump 22 is small, the flow of air in the cleaning tank 3 is made uniform, and the Can be uniformly dried.

通風動作では、熱交給水弁２５を閉じたままとして、熱交換器２０に通水しないのが好ましい。これにより、熱交換器２０で使用される水の節約を図ることができる。但し、所望により、通風動作でも、熱交給水弁２５を開けて、熱交換器２０に通水してもよい。 In the ventilation operation, it is preferable that the heat exchange water supply valve 25 be kept closed and that no water be passed through the heat exchanger 20. As a result, the water used in the heat exchanger 20 can be saved. However, if desired, the heat exchange water supply valve 25 may be opened and water may be passed through the heat exchanger 20 even in the ventilation operation.

通風動作では、給蒸弁１７を開けて、蒸気ヒータ１４を作動させるのが好ましい。これにより、洗浄槽３内に温風を流通させて、被洗浄物２の乾燥を迅速に図ることができる。液相給気ノズル２９のノズル穴２９ａは、下向きに形成されており、ノズル穴２９ａからの空気は蒸気ヒータ１４に接触して確実に加温されることになる。温度センサ１３の検出温度に基づき、給蒸弁１７を制御することで、温風の温度（洗浄槽３内の温度）を設定温度（たとえば６０〜１００℃）に維持することができる。なお、乾燥用ファンを設置した場合と比較して、真空ポンプ２２による通風量は少ないので、その分、蒸気ヒータ１４での加熱量（また後述する実施例２のように電気ヒータの場合にはその容量や出力）を小さくすることができる。 In the ventilation operation, it is preferable to open the steam supply valve 17 and operate the steam heater 14. This allows hot air to flow through the cleaning tank 3 to quickly dry the object 2 to be cleaned. The nozzle hole 29a of the liquid-phase air supply nozzle 29 is formed downward, and the air from the nozzle hole 29a comes into contact with the steam heater 14 to be surely heated. By controlling the steam supply valve 17 based on the temperature detected by the temperature sensor 13, the temperature of the hot air (the temperature in the washing tank 3) can be maintained at a set temperature (for example, 60 to 100 ° C.). Since the amount of air flow by the vacuum pump 22 is smaller than that in the case where a drying fan is installed, the amount of heating by the steam heater 14 (and in the case of an electric heater as in Example 2 described later), Its capacity and output) can be reduced.

ところで、図２において二点鎖線で示すように、乾燥工程では、通風動作に加えて、真空乾燥動作や、大気圧（または大気圧付近）までの復圧動作を行ってもよい。 By the way, as shown by a two-dot chain line in FIG. 2, in the drying step, in addition to the ventilation operation, a vacuum drying operation or a pressure recovery operation to atmospheric pressure (or near atmospheric pressure) may be performed.

たとえば、図２において二点鎖線Ｘで示すように、乾燥工程の開始時、通風動作に代えて、真空乾燥動作を実施してもよい。その場合、気相給気弁３４および液相給気弁３１を閉じた状態で、減圧手段５により洗浄槽３内を所定圧力まで（または所定時間）減圧すればよい。この際、真空ポンプ２２を作動させるが、熱交換器２０には通水してもよいし、通水しなくてもよい。また、加温手段４は、停止させているが、所望により作動させてもよい。洗浄槽３内を減圧することで、被洗浄物２の粗熱を取ると共に、被洗浄物２からの水切りを図ることができる。真空乾燥動作の終了に伴い、液相給気弁３１を開ければ、洗浄槽３内がやや復圧されて、通風動作に移行することができる。 For example, as shown by a two-dot chain line X in FIG. 2, at the start of the drying step, a vacuum drying operation may be performed instead of the ventilation operation. In this case, the pressure in the cleaning tank 3 may be reduced to a predetermined pressure (or a predetermined time) by the pressure reducing means 5 with the gas-phase supply valve 34 and the liquid-phase supply valve 31 closed. At this time, the vacuum pump 22 is operated, but water may or may not pass through the heat exchanger 20. Further, the heating means 4 is stopped, but may be operated as desired. By reducing the pressure in the cleaning tank 3, it is possible to remove the rough heat of the cleaning target 2 and to drain water from the cleaning target 2. When the liquid-phase air supply valve 31 is opened with the end of the vacuum drying operation, the pressure inside the cleaning tank 3 is slightly restored, and the operation can be shifted to the ventilation operation.

また、図２において二点鎖線Ｙで示すように、通風動作中（あるいは通風動作終了後）、復圧動作として、洗浄槽３内を一時的に大気圧（または大気圧付近）まで復圧してもよい。これには、減圧手段５（具体的には真空ポンプ２２）を停止させればよい。これにより、液相給気ノズル２９からの給気により、洗浄槽３内が大気圧まで復圧されることになる。そして、復圧状態のまま所定時間保持するのが好ましい。その間も加温手段４を作動させておくことで、洗浄槽３内に空気を滞留させた状態でその空気を加温して、被洗浄物２の乾燥を図ることができる。また、この復圧動作により被洗浄物２を加温しておけば、その後の真空乾燥動作により、被洗浄物２の真空乾燥を確実に図ることができる。 Further, as shown by a two-dot chain line Y in FIG. 2, during the ventilation operation (or after the ventilation operation is completed), the pressure inside the cleaning tank 3 is temporarily restored to the atmospheric pressure (or near the atmospheric pressure) as the pressure recovery operation. Is also good. This can be achieved by stopping the pressure reducing means 5 (specifically, the vacuum pump 22). Thus, the pressure in the cleaning tank 3 is restored to the atmospheric pressure by the air supply from the liquid phase air supply nozzle 29. It is preferable to hold the pressure recovery state for a predetermined time. By operating the heating means 4 during that time, the air can be heated while the air remains in the cleaning tank 3, and the object to be cleaned 2 can be dried. In addition, if the object to be cleaned 2 is heated by this pressure recovery operation, the object to be cleaned 2 can be surely vacuum dried by a subsequent vacuum drying operation.

その後、図２において二点鎖線Ｚで示すように、洗浄槽３内を再び減圧して、真空乾燥動作を実施するのがよい。乾燥工程の最終部で行う真空乾燥動作では、加温手段４を作動させる必要はないし、熱交換器２０に通水する必要もない。この真空乾燥動作でも、液相給気弁３１や気相給気弁３４を閉じた状態で、洗浄槽３内を所定圧力まで（または所定時間）減圧すればよい。これにより、被洗浄物２の冷却を図ることができる。 Thereafter, as shown by a two-dot chain line Z in FIG. 2, the inside of the cleaning tank 3 is preferably depressurized again to perform a vacuum drying operation. In the vacuum drying operation performed in the final part of the drying step, it is not necessary to operate the heating means 4 and it is not necessary to pass water through the heat exchanger 20. Even in this vacuum drying operation, the pressure in the cleaning tank 3 may be reduced to a predetermined pressure (or for a predetermined time) with the liquid phase gas supply valve 31 and the gas phase gas supply valve 34 closed. Thereby, the object to be cleaned 2 can be cooled.

所定の終了条件を満たすと、乾燥工程を終了する。乾燥工程の終了時、減圧手段５を停止すると共に、液相給気弁３１（および／または気相給気弁３４）を開ければよい。これにより、洗浄槽３内を大気圧まで復圧して、一連の運転を終了する。 When the predetermined termination condition is satisfied, the drying step is terminated. At the end of the drying step, the decompression means 5 may be stopped and the liquid supply valve 31 (and / or the gas supply valve 34) may be opened. Thus, the pressure in the cleaning tank 3 is restored to the atmospheric pressure, and a series of operations is completed.

図３は、本発明の実施例２の洗浄装置１を示す概略図である。
本実施例２の洗浄装置１も、基本的には前記実施例１と同様である。そこで、以下においては、両者の異なる点を中心に説明し、対応する箇所には同一の符号を付して説明する。 FIG. 3 is a schematic diagram illustrating a cleaning apparatus 1 according to a second embodiment of the present invention.
The cleaning apparatus 1 of the second embodiment is basically the same as the first embodiment. Therefore, in the following, description will be made focusing on the differences between the two, and the corresponding portions will be denoted by the same reference numerals.

本実施例２の洗浄装置１は、加温手段４および液相給気手段６の構成において、前記実施例１と相違する。具体的には、加温手段４は、蒸気ヒータ１４ではなく、電気ヒータ３５，３６から構成される。しかも、電気ヒータとして、洗浄槽３外の液相給気路２８ａに第一電気ヒータ３５を備えると共に、洗浄槽３内に第二電気ヒータ３６を備える。第二電気ヒータ３６は、前記実施例１の蒸気ヒータ１４と同様、液相給気ノズル２９よりも下方に設けられる。なお、第一電気ヒータ３５は、第一液相給気路２８ａを通過する空気を加温可能に構成される。また、第一電気ヒータ３５は、第二電気ヒータ３６よりも小容量（小出力）のヒータとされている。各電気ヒータ３５，３６は、制御器に接続され、オンオフ制御されるか、出力（電力）が制御される。 The cleaning apparatus 1 according to the second embodiment differs from the first embodiment in the configuration of the heating unit 4 and the liquid-phase air supply unit 6. Specifically, the heating means 4 is configured by electric heaters 35 and 36 instead of the steam heater 14. In addition, as the electric heater, the first electric heater 35 is provided in the liquid phase air supply passage 28 a outside the cleaning tank 3, and the second electric heater 36 is provided in the cleaning tank 3. The second electric heater 36 is provided below the liquid-phase air supply nozzle 29 similarly to the steam heater 14 of the first embodiment. The first electric heater 35 is configured to be able to heat air passing through the first liquid-phase air supply passage 28a. The first electric heater 35 has a smaller capacity (smaller output) than the second electric heater 36. Each of the electric heaters 35 and 36 is connected to a controller, and is controlled to be on or off, or output (power) is controlled.

本実施例２の液相給気手段６では、フィルタ３０と液相給気ノズル２９が、第一液相給気路２８ａを介して接続される。フィルタ３０から液相給気ノズル２９への第一液相給気路２８ａには、第一電気ヒータ３５と第一液相給気弁３１ａとが順に設けられる。第一液相給気路２８ａには、第一電気ヒータ３５と第一液相給気弁３１ａとをバイパスするように、第二液相給気路２８ｂが設けられる。つまり、フィルタ３０と第一電気ヒータ３５との間の第一液相給気路２８ａと、第一液相給気弁３１ａと液相給気ノズル２９との間の第一液相給気路２８ａとが、第二液相給気路２８ｂで接続される。この第二液相給気路２８ｂには、第二液相給気弁３１ｂが設けられる。 In the liquid phase air supply means 6 of the second embodiment, the filter 30 and the liquid phase air supply nozzle 29 are connected via a first liquid phase air supply path 28a. A first electric heater 35 and a first liquid phase supply valve 31a are sequentially provided in a first liquid phase supply path 28a from the filter 30 to the liquid phase supply nozzle 29. A second liquid phase air supply passage 28b is provided in the first liquid phase air supply passage 28a so as to bypass the first electric heater 35 and the first liquid phase air supply valve 31a. That is, the first liquid phase air supply path 28a between the filter 30 and the first electric heater 35, and the first liquid phase air supply path between the first liquid phase air supply valve 31a and the liquid phase air supply nozzle 29 28a are connected by a second liquid phase air supply passage 28b. The second liquid phase air supply passage 28b is provided with a second liquid phase air supply valve 31b.

第一液相給気路２８ａと第二液相給気路２８ｂの管径を変えておけば、各液相給気路２８ａ，２８ｂによる給気流量を変えることができる。たとえば、第一液相給気路２８ａの管径（内径）を第二液相給気路２８ｂの管径（内径）よりも大きくしておくのがよい。この場合、洗浄工程では、第二液相給気弁３１ｂを開けて、第二液相給気路２８ｂにより比較的小流量で給気することができ、乾燥工程では、第一液相給気弁３１ａを開けて、第一液相給気路２８ａにより比較的大流量で給気することができる。 If the pipe diameters of the first liquid phase air supply path 28a and the second liquid phase air supply path 28b are changed, the air supply flow rates of the respective liquid phase air supply paths 28a and 28b can be changed. For example, it is preferable that the pipe diameter (inner diameter) of the first liquid phase air supply path 28a be larger than the pipe diameter (inner diameter) of the second liquid phase air supply path 28b. In this case, in the cleaning step, the second liquid phase air supply valve 31b is opened, and air can be supplied at a relatively small flow rate through the second liquid phase air supply passage 28b. In the drying step, the first liquid phase air supply valve 31b is supplied. By opening the valve 31a, it is possible to supply air at a relatively large flow rate through the first liquid phase air supply passage 28a.

本実施例２の洗浄装置１の運転方法も、基本的には前記実施例１と同様であるが、特に次の点が異なる。洗浄工程において、洗浄槽３内に被洗浄物が浸漬された状態で、液相部へ給気する際、第二液相給気弁３１ｂを開けて第二液相給気路２８ｂから給気するのがよい。その際、第一電気ヒータ３５は停止させておけばよい。洗浄工程において、貯留液を加温したい場合、第二電気ヒータ３６が用いられる。 The operation method of the cleaning apparatus 1 of the second embodiment is also basically the same as that of the first embodiment, except for the following points. In the cleaning step, when air is supplied to the liquid phase in a state where the object to be cleaned is immersed in the cleaning tank 3, the second liquid phase air supply valve 31b is opened to supply air from the second liquid phase air supply passage 28b. Good to do. At that time, the first electric heater 35 may be stopped. In the cleaning step, when the stored liquid is to be heated, the second electric heater 36 is used.

一方、乾燥工程の通風動作時、液相給気ノズル２９から洗浄槽３内へ給気する際、第一液相給気弁３１ａを開けて第一液相給気路２８ａから給気するのがよい。その際、第一電気ヒータ３５を作動させることで、加温した空気を洗浄槽３内へ供給することができる。この場合、洗浄槽３内の第二電気ヒータ３６を作動させる必要はない。温度センサ１３の検出温度に基づき第一電気ヒータ３５の発停（または出力）を制御することで、給気温度（洗浄槽３内の温度）を所望に調整することができる。その他の構成および制御は、前記実施例１と同様のため、説明を省略する。 On the other hand, when air is supplied from the liquid-phase air supply nozzle 29 into the cleaning tank 3 during the ventilation operation in the drying step, the first liquid-phase air supply valve 31a is opened and air is supplied from the first liquid-phase air supply passage 28a. Is good. At that time, by operating the first electric heater 35, heated air can be supplied into the cleaning tank 3. In this case, it is not necessary to operate the second electric heater 36 in the cleaning tank 3. By controlling the start / stop (or output) of the first electric heater 35 based on the temperature detected by the temperature sensor 13, the supply air temperature (the temperature in the cleaning tank 3) can be adjusted as desired. Other configurations and controls are the same as those in the first embodiment, and thus description thereof is omitted.

本発明の洗浄装置１は、前記各実施例の構成（制御を含む）に限らず、適宜変更可能である。特に、（ａ）洗浄槽３と、洗浄槽３内の減圧手段５と、洗浄槽３内への給気手段６（７）と、制御手段とを備え、（ｂ）減圧手段５は、洗浄槽３内からの排気路１９に真空ポンプ２２を備え、（ｃ）制御手段は、洗浄後の被洗浄物２の乾燥工程の乾燥動作として、給気手段６（７）から洗浄槽３内へ気体を導入させると共に真空ポンプ２２を作動させる通風動作を行わせるのであれば、その他の構成は適宜に変更可能である。 The cleaning apparatus 1 of the present invention is not limited to the configuration (including control) of each of the above embodiments, but can be appropriately changed. In particular, (a) the cleaning tank 3, a decompression means 5 in the cleaning tank 3, an air supply means 6 (7) into the cleaning tank 3, and a control means, and (b) the decompression means 5 A vacuum pump 22 is provided in an exhaust path 19 from the inside of the tank 3, and (c) the control means enters the cleaning tank 3 from the air supply means 6 (7) as a drying operation in a drying step of the object 2 after washing. Other configurations can be appropriately changed as long as a ventilation operation for operating the vacuum pump 22 while introducing gas is performed.

たとえば、前記実施例２では、液相給気ノズル２９には、第一液相給気路２８ａと第二液相給気路２８ｂとにより給気可能とされたが、場合により、第二液相給気路２８ｂの設置を省略してもよい。その場合、第一液相給気弁３１ａを開ければ、フィルタ３０および第一電気ヒータ３５を介した空気が供給されるが、第一電気ヒータ３５の作動の有無を状況に応じて切り替えればよい。具体的には、洗浄工程では、洗浄槽３内の第二電気ヒータ３６を用いるので、第一電気ヒータ３５を停止させておけばよいし、乾燥工程では、洗浄槽３外の第一電気ヒータ３５を用いるので、第二電気ヒータ３６を停止させておけばよい。 For example, in the second embodiment, the liquid supply nozzle 29 can be supplied with air by the first liquid supply passage 28a and the second liquid supply passage 28b. The installation of the phase air supply passage 28b may be omitted. In this case, when the first liquid-phase air supply valve 31a is opened, air is supplied through the filter 30 and the first electric heater 35, but the operation of the first electric heater 35 may be switched according to the situation. . Specifically, since the second electric heater 36 in the cleaning tank 3 is used in the cleaning step, the first electric heater 35 may be stopped, and in the drying step, the first electric heater outside the cleaning tank 3 may be used. Since 35 is used, the second electric heater 36 may be stopped.

また、前記実施例２では、洗浄槽３外に第一電気ヒータ３５を設ける一方、洗浄槽３内に第二電気ヒータ３６を設けたが、場合により、第一電気ヒータ３５および／または第二電気ヒータ３６の設置を省略することができる。第一電気ヒータ３５の設置を省略する場合、乾燥工程において洗浄槽３内を加温する際、前記実施例１と同様に、第二電気ヒータ３６を作動させればよい。特に、第二電気ヒータ３６が出力（発熱量）を調整できる場合、第一電気ヒータ３５の設置を省略しやすい。なお、第一電気ヒータ３５を設置しない場合、液相給気手段６の構成は、第一液相給気路２８ａの設置を省略して、実施例１と同様に構成することができる。一方、第二電気ヒータ３６の設置を省略しても、第一電気ヒータ３５を用いて、温風による通風動作を実施可能である。また、両電気ヒータ３５，３６の設置を省略しても、常温空気による通風動作を実施可能である。 In the second embodiment, the first electric heater 35 is provided outside the cleaning tank 3, while the second electric heater 36 is provided inside the cleaning tank 3. The installation of the electric heater 36 can be omitted. When the installation of the first electric heater 35 is omitted, when heating the inside of the cleaning tank 3 in the drying step, the second electric heater 36 may be operated as in the first embodiment. In particular, when the output (heat generation amount) of the second electric heater 36 can be adjusted, the installation of the first electric heater 35 can be easily omitted. When the first electric heater 35 is not installed, the configuration of the liquid-phase air supply means 6 can be the same as that of the first embodiment, omitting the installation of the first liquid-phase air supply passage 28a. On the other hand, even if the installation of the second electric heater 36 is omitted, the ventilation operation by the warm air can be performed using the first electric heater 35. Further, even if the installation of the electric heaters 35 and 36 is omitted, the ventilation operation using the normal-temperature air can be performed.

さらに、本発明は、通風動作を実行可能であれば、従来公知の各種の浸漬洗浄装置にも適用可能である。たとえば、超音波振動子を備えた超音波洗浄装置や、洗浄槽内へエアポンプで空気を吹き込むバブリング洗浄装置にも適用可能である。 Furthermore, the present invention can be applied to various conventionally known immersion cleaning devices as long as the ventilation operation can be performed. For example, the present invention can be applied to an ultrasonic cleaning device having an ultrasonic vibrator or a bubbling cleaning device in which air is blown into a cleaning tank by an air pump.

１洗浄装置
２被洗浄物
３洗浄槽
４加温手段
５減圧手段
６液相給気手段
７気相給気手段
８網棚
９洗浄槽本体
１０ドア
１１パッキン
１２圧力センサ
１３温度センサ
１４蒸気ヒータ
１５給蒸路
１６ドレン排出路
１７給蒸弁
１８スチームトラップ
１９排気路（１９ａ：排気口）
２０熱交換器
２１逆止弁
２２真空ポンプ
２３熱交給水路
２４熱交排水路
２５熱交給水弁
２６封水給水路
２７封水給水弁
２８液相給気路（２８ａ：第一液相給気路、２８ｂ：第二液相給気路）
２９液相給気ノズル（２９ａ：ノズル穴）
３０フィルタ
３１液相給気弁（３１ａ：第一液相給気弁、３１ｂ：第二液相給気弁）
３２気相給気路
３３フィルタ
３４気相給気弁
３５第一電気ヒータ
３６第二電気ヒータ DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Object to be washed 3 Cleaning tank 4 Heating means 5 Decompression means 6 Liquid phase air supply means 7 Gas phase air supply means 8 Net shelf 9 Cleaning tank body 10 Door 11 Packing 12 Pressure sensor 13 Temperature sensor 14 Steam heater 15 Supply Steam path 16 Drain discharge path 17 Steam supply valve 18 Steam trap 19 Exhaust path (19a: exhaust port)
DESCRIPTION OF SYMBOLS 20 Heat exchanger 21 Check valve 22 Vacuum pump 23 Heat exchange water supply channel 24 Heat exchange drainage channel 25 Heat exchange water supply valve 26 Sealed water supply channel 27 Sealed water supply valve 28 Liquid phase air supply path (28a: first liquid phase supply Air path, 28b: second liquid phase air supply path)
29 Liquid phase air supply nozzle (29a: Nozzle hole)
30 Filter 31 Liquid phase air supply valve (31a: first liquid phase air supply valve, 31b: second liquid phase air supply valve)
32 Gas-phase air supply path 33 Filter 34 Gas-phase air supply valve 35 First electric heater 36 Second electric heater

Claims

A washing tank in which an object to be washed is stored and a liquid is stored; a decompression unit for sucking and discharging gas in the washing tank to the outside; an air supply unit for introducing gas into the washing tank; Control means for controlling the
The pressure reducing means includes a vacuum pump in an exhaust path from inside the cleaning tank,
The control means performs a ventilation operation of introducing a gas from the air supply means into the cleaning tank and operating the vacuum pump as a drying operation in a drying step of the object to be cleaned after cleaning. Cleaning equipment.

The air supply means includes a liquid phase air supply nozzle provided below the cleaning tank,
The cleaning device according to claim 1, wherein the liquid-phase air supply nozzle has a plurality of nozzle holes that open downward.

The cleaning device according to claim 1, further comprising a heater configured to heat the gas from the air supply unit.

The heater is a steam heater or an electric heater,
The cleaning device according to claim 3, wherein when the heater is an electric heater, a first electric heater is provided in an air supply passage outside the cleaning tank.

The cleaning device according to claim 4, wherein a second electric heater is provided below the liquid-phase air supply nozzle in the cleaning tank.

The control means includes:
In the drying step, using a first electric heater outside the cleaning tank,
The cleaning device according to claim 5, wherein a second electric heater in the cleaning tank is used in the cleaning step in which the liquid is stored in the cleaning tank.

A heat exchanger and the vacuum pump are sequentially provided in an exhaust path from inside the cleaning tank,
The cleaning step includes a pressure reducing operation of reducing the pressure in the cleaning tank by the pressure reducing unit,
The control means performs control such that water is passed through the heat exchanger in the depressurizing operation, and water is not passed through the heat exchanger in the ventilation operation in the drying step. The cleaning device according to claim 1.