JP2019197846A - Processing liquid discharge device, determination device, processing liquid discharge method and determination method - Google Patents

Abstract

To improve the determination accuracy of a section of a closing speed of an opening/closing valve provided in a processing liquid supply pipe connected to a nozzle.SOLUTION: A processing liquid discharge device includes: a determination part which determines the closing speed of an opening/closing valve for opening/closing a processing liquid supply channel for supplying the processing liquid to a nozzle; and an imaging part which images a channel of the tip of the nozzle and a discharge path of the processing liquid extending from the tip of the nozzle to the front side along the discharge direction of the processing liquid in the direction different from the discharge direction when the opening/closing valve closes the processing liquid supply channel and discharge of the processing liquid from the nozzle is stopped. The determination part determines the section of the closing speed of the opening/closing valve for whether the closing speed of the opening/closing valve is proper, and faster or slower than the proper speed by performing the prescribed determination processing based on the image of the channel of the tip of the nozzle and the discharge path out of the original images obtained by imaging the channel of the tip of the nozzle and the discharge path by the imaging part.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a technique for determining a closing speed of an on-off valve that opens and closes a processing liquid supply channel, and a processing liquid discharge technique.

  Patent Document 1 discloses a coating liquid supply apparatus that supplies a coating liquid such as a photoresist liquid from a nozzle to a substrate to form a coating film on the substrate. The apparatus performs supply and stop of the coating liquid from the nozzle by opening and closing the air valve provided in the coating liquid supply pipe connected to the nozzle. In the coating liquid coating process, if uneven coating of the coating liquid occurs on the substrate, the film thickness becomes non-uniform and adversely affects subsequent processes.

  In this apparatus, when the air valve is closed at a certain closing speed from the state where the nozzle is supplying the coating liquid, the discharge width of the coating liquid gradually narrows according to the closing speed of the air valve. The coating liquid is interrupted at a certain position between the nozzle tip and the substrate. This liquid break position is displaced according to the closing speed of the air valve.

  The apparatus performs suck back and draws the coating liquid above the liquid out position back to the nozzle. The coating liquid below the position where the liquid runs out falls in the form of a fine thread toward the surface of the substrate. Also, several droplets are generated in the portion where the coating solution is interrupted, and falls on the substrate later than the fine-filament coating solution.

  In this apparatus, the occurrence of coating unevenness depends on the height of the liquid breakage position regardless of the occurrence of the liquid droplets. Therefore, the apparatus detects the liquid breakage position between the nozzle tip and the substrate by imaging with a camera, and adjusts the closing speed of the air valve so that the liquid breakage position exists within a range where coating unevenness does not occur. Thus, the application unevenness is prevented.

JP 2000-82646 A

  However, in the coating liquid supply device of Patent Document 1, since the closing speed of the air valve is adjusted based on the liquid running position, the closing speed of the air valve is too slow and intermittently for a while after the air valve is closed. In particular, there is a problem that uneven coating occurs when the droplets continue to fall. Further, in the apparatus, as a result of the adjustment, the air valve closing speed is conversely too high, and a region where no liquid exists except for the liquid droplets adhering to the inner wall surface of the nozzle tip portion is a so-called water supply. There is also a problem that droplets generated at the tip of the nozzle by the hammer and adhered to the inner wall surface fall on the substrate and cause uneven coating. That is, the apparatus has a problem that it cannot accurately determine whether the opening / closing valve closing speed is appropriate, or whether the opening / closing valve closing speed is fast or slow.

  The present invention has been made to solve these problems, and an object of the present invention is to provide a technique capable of improving the determination accuracy of the closing speed classification of the on-off valve provided in the processing liquid supply pipe connected to the nozzle.

  In order to solve the above problem, a processing liquid discharge apparatus according to a first aspect is a processing liquid discharge apparatus that discharges a processing liquid from a nozzle, and includes a processing liquid supply channel that supplies the processing liquid to the nozzle. A determination unit that determines a closing speed of an on-off valve that opens and closes, and a flow path at a tip portion of the nozzle when the on-off valve closes the processing liquid supply flow path and the discharge of the processing liquid from the nozzle stops. And an imaging unit that images the treatment liquid ejection path extending forward from the tip of the nozzle along the treatment liquid ejection direction from a direction different from the ejection direction, and the determination unit includes: By performing a predetermined determination process based on the image of the flow path at the tip of the nozzle and the image of the discharge path among the original images in which the imaging unit images the flow path at the tip of the nozzle and the discharge path, Whether the closing speed of the on-off valve is appropriate, Determining the classification of the closing speed of the opening and closing valve that switching of either slow or faster than the speed.

  The treatment liquid ejection device according to the second aspect is the treatment liquid ejection device according to the first aspect, wherein the determination unit is a first image corresponding to a flow path at a tip portion of the nozzle in the original image. For each image of the first image of the region and the second image of the second image region corresponding to the ejection path, the area of the image of the processing liquid in each of the first image and the second image A feature amount calculation unit that calculates a predetermined feature amount; and the classification of the closing speed of the on-off valve by applying a predetermined determination rule to the feature amount of the first image and the feature amount of the second image A rule base determination unit for determining

  A processing liquid discharge apparatus according to a third aspect is the processing liquid discharge apparatus according to the second aspect, wherein an end of the first image region on the downstream side in the discharge direction of the processing liquid is a tip of the nozzle. To the upstream side in the discharge direction of the processing liquid.

  The treatment liquid ejection device according to a fourth aspect is the treatment liquid ejection device according to the second or third aspect, wherein the determination rule is that the flow path at the tip of the nozzle is not liquid-tight. If it is determined that the closing speed of the on-off valve is too high, the flow path at the tip of the nozzle is in a liquid-tight state, and the processing liquid is present in the discharge path, the closing speed of the on-off valve Is a rule that determines that is too late.

  The treatment liquid ejection device according to a fifth aspect is the treatment liquid ejection device according to the first aspect, wherein the determination unit includes an image of the flow path at the tip of the nozzle and the ejection path in the original image. And a classifier for determining a classification of the closing speed of the on-off valve based on whether the closing speed of the on-off valve is appropriate, slower than an appropriate speed, or faster than the appropriate speed. The classifier is generated by machine learning in advance using sample images of the flow path at the tip of the nozzle and the image of the discharge path in the original image.

  A treatment liquid ejection apparatus according to a sixth aspect is the treatment liquid ejection apparatus according to the fifth aspect, wherein the classifier includes a first image corresponding to a flow path at a tip portion of the nozzle in the original image. The classification of the closing speed of the on-off valve is determined based on the first image of the region and the second image of the second image region corresponding to the discharge path, and the classifier It is generated by machine learning in advance using the sample images of the image and the second image.

  A processing liquid discharge apparatus according to a seventh aspect is the processing liquid discharge apparatus according to the sixth aspect, wherein an end of the first image region on the downstream side in the discharge direction of the processing liquid is a tip of the nozzle. To the upstream side in the discharge direction of the processing liquid.

  A treatment liquid discharge device according to an eighth aspect is the treatment liquid discharge device according to any one of the first to seventh aspects, wherein the imaging unit is configured such that the on-off valve closes the treatment liquid supply channel. Then, after the discharge of the processing liquid from the nozzle is stopped, the flow of the processing liquid extending forward from the flow path of the tip of the nozzle and the processing liquid discharge direction from the tip of the nozzle The processing liquid ejection device captures the path of the nozzle in time sequence, and the processing liquid ejection device includes a nozzle tip based on a time-series image in which the imaging unit images the flow path of the nozzle tip and the ejection path. An image generation unit that generates a derivative image of the flow path and the discharge path, and the determination unit determines a classification of the closing speed of the on-off valve based on the derivative image generated by the image generation unit.

  A treatment liquid discharge apparatus according to a ninth aspect is the treatment liquid discharge apparatus according to any one of the first to eighth aspects, wherein a treatment liquid supply source is connected to the nozzle, and the treatment liquid supply source is connected. A pipe that guides the processing liquid supplied by the nozzle to the nozzle, and a drive mechanism that causes the on-off valve to perform an opening / closing operation.The on-off valve is provided in the course of the pipe, and the processing liquid discharge device includes: And a closing speed adjusting unit that adjusts the operation of the drive mechanism so that the closing speed becomes an appropriate speed based on the classification of the closing speed of the on-off valve determined by the determining unit.

  A processing liquid discharge apparatus according to a tenth aspect is the processing liquid discharge apparatus according to the ninth aspect, wherein the on-off valve is supplied with a predetermined gas and has a closing speed corresponding to the supply flow rate of the gas. An air valve that performs a closing operation, and the drive mechanism includes: a gas supply source that supplies the gas to the air valve; a gas supply pipe that connects the gas supply source and the air valve; and the gas supply pipe An electromagnetic valve provided to open and close the gas flow path in the gas supply pipe; and a motor drive that is provided in the gas supply pipe and controls a flow rate of the gas flowing in the gas supply pipe according to an opening degree. The closing speed adjusting unit adjusts the opening degree of the motor-driven needle valve so that the closing speed of the air valve becomes an appropriate speed.

  A treatment liquid discharge apparatus according to an eleventh aspect is the treatment liquid discharge apparatus according to the ninth aspect, wherein the on-off valve is supplied with a predetermined gas and has a closing speed corresponding to the supply flow rate of the gas. An air valve that performs a closing operation, and the drive mechanism includes: a gas supply source that supplies the gas to the air valve; a gas supply pipe that connects the gas supply source and the air valve; and the gas supply pipe And an electropneumatic regulator that controls the opening and closing and flow rate of the gas flow path that flows in the gas supply pipe according to the voltage, and the closing speed adjusting unit has an appropriate closing speed of the air valve. The opening degree of the electropneumatic regulator is adjusted so that the speed is reached.

  A treatment liquid discharge apparatus according to a twelfth aspect is the treatment liquid discharge apparatus according to the ninth aspect, wherein the on-off valve opens and closes a valve body provided in the course of the piping and the valve body. A motor valve that opens and closes at a speed corresponding to the number of rotations of the motor, the drive mechanism includes the motor, and the closing speed adjustment unit has an appropriate closing speed of the motor valve. Adjust the operation of the motor to achieve speed.

  A treatment liquid discharge apparatus according to a thirteenth aspect is the treatment liquid discharge apparatus according to the tenth aspect, wherein an open / close sensor that detects opening and closing of the air valve and an operation that closes the air valve are in the electromagnetic state. A delay time from when the valve is moved to when the air valve is actually closed is measured based on the output of the open / close sensor, and based on the measurement result, the electromagnetic valve is closed so that the air valve is closed at a predetermined timing. And a timing adjustment unit that adjusts a timing at which the valve performs an operation of closing the air valve.

  A determination device according to a fourteenth aspect is a determination device that determines a stop state of a processing liquid discharged from a nozzle, wherein an on-off valve that opens and closes a processing liquid supply channel that supplies the processing liquid to the nozzle is the processing liquid. When the supply flow path is closed and the discharge of the processing liquid from the nozzle is stopped, the flow path at the tip of the nozzle and the front extending from the tip of the nozzle along the discharge direction of the processing liquid An imaging unit that images the treatment liquid ejection path from a direction different from the ejection direction, and the nozzle tip of the original image in which the imaging unit images the flow path of the nozzle tip and the ejection path By performing predetermined determination processing based on the flow path and the image of the discharge path, the closing speed of the opening / closing valve is determined as to whether the closing speed of the opening / closing valve is appropriate or slower than the appropriate speed. A determination unit for determining a classification; Obtain.

  A processing liquid discharge method according to a fifteenth aspect is a processing liquid discharge method for discharging a processing liquid from a nozzle, and determines a closing speed of an on-off valve that opens and closes a processing liquid supply channel for supplying the processing liquid to the nozzle. And when the on-off valve closes the processing liquid supply flow path and the discharge of the processing liquid from the nozzle stops, the processing liquid from the front end of the nozzle and the front end of the nozzle An imaging step of imaging the treatment liquid discharge path extending forward along the discharge direction, and the determination step includes a flow path at a tip of the nozzle and the discharge path in the imaging step. By performing a predetermined determination process based on the image of the flow path at the tip of the nozzle and the image of the discharge path in the original image captured, the closing speed of the on-off valve is appropriate or more appropriate. Whether it is slow or fast Determine the classification of the closing speed of the valve.

  A treatment liquid discharge method according to a sixteenth aspect is the treatment liquid discharge method according to the fifteenth aspect, wherein the determination step includes a first image corresponding to a flow path at the tip of the nozzle in the original image. For each image of the first image of the region and the second image of the second image region corresponding to the ejection path, the area of the image of the processing liquid in each of the first image and the second image A feature amount calculating step of calculating a predetermined feature amount, and the classification of the closing speed of the on-off valve by applying a predetermined determination rule to the feature amount of the first image and the feature amount of the second image A rule base determination step for determining

  A processing liquid discharge method according to a seventeenth aspect is the processing liquid discharge method according to the sixteenth aspect, wherein the end of the first image region on the downstream side in the discharge direction of the processing liquid is the tip of the nozzle. To the upstream side in the discharge direction of the processing liquid.

  A treatment liquid discharge method according to an eighteenth aspect is the treatment liquid discharge method according to the sixteenth or seventeenth aspect, wherein the determination rule is that the opening and closing of the nozzle is performed if the flow path at the nozzle tip is not in a liquid-tight state. If the valve closing speed is determined to be too high, the flow path at the nozzle tip is liquid-tight, and the processing liquid is present in the discharge path, the closing speed of the on-off valve is slow. It is a rule that determines that it is too much.

  A processing liquid discharge method according to a nineteenth aspect is the processing liquid discharge method according to the fifteenth aspect, wherein the determination step includes an image of the flow path at the tip of the nozzle and the discharge path in the original image. Based on the above, the classification of the on-off valve closing speed is determined by a classifier that determines whether the on-off valve closing speed is appropriate, slower or faster than the appropriate speed. The classifier is generated by machine learning in advance using sample images of the flow path at the tip of the nozzle and the image of the discharge path in the original image.

  The processing liquid discharge method according to a twentieth aspect is the processing liquid discharge method according to the nineteenth aspect, wherein the classifier is a first image corresponding to a flow path at the tip of the nozzle in the original image. The classification of the closing speed of the on-off valve is determined based on the first image of the region and the second image of the second image region corresponding to the discharge path, and the classifier It is generated by machine learning in advance using the sample images of the image and the second image.

  A processing liquid discharge method according to a twenty-first aspect is the processing liquid discharge method according to the twentieth aspect, wherein the end of the first image region on the downstream side in the discharge direction of the processing liquid is the tip of the nozzle. To the upstream side in the discharge direction of the processing liquid.

  A processing liquid discharge method according to a twenty-second aspect is the processing liquid discharge method according to any one of the fifteenth to twenty-first aspects, wherein the on-off valve closes the processing liquid supply flow path in the imaging step. Then, after the discharge of the processing liquid from the nozzle is stopped, the flow of the processing liquid extending forward from the flow path of the tip of the nozzle and the processing liquid discharge direction from the tip of the nozzle And a processing liquid discharge method in which the nozzle is formed based on a time-series image obtained by imaging the flow path at the tip of the nozzle and the discharge path in the imaging step. An image generation step of generating a derivative image of the flow path of the tip of the discharge path and the discharge path, wherein the determination step classifies the closing speed of the on-off valve based on the derivative image generated in the image generation step. It is a process of judging .

  A processing liquid discharging method according to a twenty-third aspect is a processing liquid discharging method in a processing liquid discharging apparatus, comprising the processing liquid discharging method according to any one of the fifteenth to twenty-second aspects, wherein the processing liquid discharging The apparatus includes a processing liquid supply source and the nozzle, a pipe that guides the processing liquid supplied from the processing liquid supply source to the nozzle, and a drive mechanism that causes the on-off valve to perform an opening / closing operation. The on-off valve is provided in the course of the pipe, and the processing liquid discharge method is based on the classification of the on-off valve closing speed determined in the determination step so that the closing speed becomes an appropriate speed. A closing speed adjusting step for adjusting the operation of the drive mechanism;

  A processing liquid discharge method according to a twenty-fourth aspect is the processing liquid discharge method according to the twenty-third aspect, wherein the on-off valve is supplied with a predetermined gas and has a closing speed corresponding to the supply flow rate of the gas. An air valve that performs a closing operation, and the drive mechanism includes: a gas supply source that supplies the gas to the air valve; a gas supply pipe that connects the gas supply source and the air valve; and the gas supply pipe An electromagnetic valve provided to open and close the gas flow path in the gas supply pipe; and a motor drive that is provided in the gas supply pipe and controls a flow rate of the gas flowing in the gas supply pipe according to an opening degree. The closing speed adjusting step is a step of adjusting the opening degree of the motor-driven needle valve so that the closing speed of the air valve becomes an appropriate speed.

  A processing liquid discharge method according to a twenty-fifth aspect is the processing liquid discharge method according to the twenty-third aspect, wherein the on-off valve is supplied with a predetermined gas and has a closing speed corresponding to the supply flow rate of the gas. An air valve that performs a closing operation, and the drive mechanism includes: a gas supply source that supplies the gas to the air valve; a gas supply pipe that connects the gas supply source and the air valve; and the gas supply pipe And an electropneumatic regulator for controlling the opening and closing of the gas flow path and the flow rate of the gas flowing in the gas supply pipe in accordance with the voltage, and the closing speed adjusting step has an appropriate closing speed of the air valve. This is a step of adjusting the opening degree of the electropneumatic regulator so as to obtain a speed.

  A treatment liquid discharge method according to a twenty-sixth aspect is the treatment liquid discharge method according to the twenty-third aspect, wherein the on-off valve opens and closes a valve body provided in the course of the piping and the valve body. A motor valve that opens and closes at a speed corresponding to the number of rotations of the motor, wherein the drive mechanism includes the motor, and the closing speed adjustment step has an appropriate closing speed of the motor valve. This is a step of adjusting the operation of the motor so as to obtain a speed.

  A treatment liquid discharge method according to a twenty-seventh aspect is the treatment liquid discharge method according to the twenty-fourth aspect, comprising: an open / close detection step for detecting opening / closing of the air valve; and an operation for closing the air valve. A delay time from when the solenoid valve is operated to when the air valve is actually closed is measured based on the opening degree of the air valve detected in the opening / closing detection step, and the air valve is closed at a predetermined timing. And a timing adjustment step of adjusting a timing at which the electromagnetic valve performs an operation of closing the air valve based on a result of the measurement.

  A determination method according to a twenty-eighth aspect is a determination method for determining a stop state of the processing liquid discharged from the nozzle, wherein an on-off valve that opens and closes a processing liquid supply channel for supplying the processing liquid to the nozzle is the processing liquid. When the supply flow path is closed and the discharge of the processing liquid from the nozzle is stopped, the flow path at the tip of the nozzle and the front extending from the tip of the nozzle along the discharge direction of the processing liquid An imaging step of imaging the treatment liquid ejection path from a direction different from the ejection direction, and the nozzle tip of the original image obtained by imaging the flow path of the nozzle tip and the ejection path in the imaging step By performing predetermined determination processing based on the flow path and the image of the discharge path, the closing speed of the opening / closing valve is determined as to whether the closing speed of the opening / closing valve is appropriate or slower than the appropriate speed. Judgment to judge classification And a step, a.

  According to the first aspect of the present invention, the determination unit of the processing liquid ejection device includes the inside of the tip of the nozzle in the image captured by the imaging unit of the flow path at the tip of the nozzle and the discharge path of the processing liquid. Based on the original image of the treatment liquid discharge path, the classification of the closing speed of the on-off valve is determined. If the closing speed of the on-off valve is too high in the flow path, the processing liquid hardly exists. If the closing speed of the on-off valve is too slow, the liquid droplets in the processing path exist. Therefore, the determination unit can determine a classification to which the opening / closing valve closing speed belongs based on images corresponding to two regions having different relationships between the closing speed of the opening / closing valve and the detected state of the processing liquid. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valve.

  According to the invention relating to the second aspect, the feature amount calculation unit of the determination unit includes a first image corresponding to the flow path at the tip of the nozzle, and a second image corresponding to the discharge path of the processing liquid at the nozzle tip. In each of the above, a predetermined feature amount corresponding to the area of the image of the processing liquid is calculated. The rule base determination unit of the determination unit determines a classification of the closing speed of the on-off valve by applying a predetermined determination rule to the feature amount of the first image and the feature amount of the second image. Therefore, the determination unit can detect the presence of the image of the processing liquid separately for the first image and the second image to determine the classification of the closing speed of the on-off valve, so that the determination accuracy can be improved.

  According to the third aspect of the invention, the end portion of the first image area on the downstream side in the discharge direction of the processing liquid extends from the tip of the nozzle, that is, the end portion of the second image area on the upstream side in the discharge direction. Separated upstream in the discharge direction. Therefore, the determination unit does not use the image in the image area extending from the end of the first image area to the tip of the nozzle on the downstream side in the ejection direction for determining the closing speed of the on-off valve. The image area is an area in which it is difficult to specify the relationship between the presence of the processing liquid and the closing speed of the on-off valve. For this reason, when the said area | region is not used for determination, the precision of determination can further be improved.

  According to the fourth aspect of the invention, the determination rule determines that the closing speed of the on-off valve is too fast unless the flow path at the nozzle tip is liquid-tight, and the flow path is liquid-tight. In addition, it is a rule that determines that the closing speed of the on-off valve is too slow if the processing liquid exists in the discharge path of the processing liquid extending from the nozzle tip. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valve.

  According to the fifth aspect of the invention, the classifier is generated by machine learning in advance using the sample images of the flow path at the tip of the nozzle and the discharge path of the processing liquid, and the determination unit is determined by the classifier. Determine the closing speed category of the on-off valve. Therefore, even when an image different from the sample image is given, the determination accuracy of the closing speed category can be improved.

  According to the sixth aspect of the invention, the classifier includes a first image area corresponding to the flow path in the image captured by the imaging section of the flow path at the tip of the nozzle and the discharge path of the processing liquid. It is generated by machine learning so as to determine the classification of the closing speed of the on-off valve based on the image and the second image in the second image region corresponding to the discharge path. Since the classifier can learn the relationship between the image and the classification of the closing speed of the on-off valve for each image of the first image and the second image, the determination accuracy by the classifier can be improved.

  According to the seventh aspect of the invention, the end portion of the first image region on the downstream side in the discharge direction of the processing liquid is from the tip of the nozzle, that is, the end portion of the second image region on the upstream side in the discharge direction. Separated upstream in the discharge direction. Therefore, the classifier of the determination unit does not use the image of the image region extending from the end of the first image region to the tip of the nozzle on the downstream side in the discharge direction for determining the closing speed classification of the on-off valve. The image area is an area in which it is difficult to specify the relationship between the presence of the processing liquid and the closing speed of the on-off valve. For this reason, when the said area | region is not used for determination, the precision of determination can further be improved.

  According to the eighth aspect of the invention, image generation is performed based on the time-series image of the imaging target region including the flow path at the tip of the nozzle and the discharge path of the processing liquid extending forward from the tip of the nozzle. The unit generates a derivative image of the flow path at the tip of the nozzle and the discharge path of the processing liquid, and the determination unit determines a classification of the closing speed of the on-off valve based on the derivative image. Since the temporal change in the presence state of the treatment liquid can also be reflected in the determination result, the determination accuracy can be improved.

  According to the ninth aspect of the invention, even when the closing speed of the on-off valve determined by the determining unit is not appropriate, the closing speed adjusting unit drives the on-off valve according to the determined closing speed of the on-off valve. Since the mechanism is adjusted, it is easy to adjust the closing speed of the on-off valve to an appropriate speed.

  According to the tenth aspect of the invention, when the on-off valve is an air valve and the on-off valve drive mechanism includes an electromagnetic valve and a motor-driven needle valve, the air valve closing speed is an appropriate speed. The opening degree of the motor-driven needle valve can be adjusted so that

  According to the eleventh aspect of the invention, the opening degree of the electropneumatic regulator can be adjusted so that the closing speed of the air valve becomes an appropriate speed.

  According to the twelfth aspect, the operation of the motor can be adjusted so that the closing speed of the motor valve becomes an appropriate speed.

  According to the thirteenth aspect of the invention, the delay time from when the electromagnetic valve opens the flow path in the gas supply pipe to when the air valve actually closes is measured based on the output of the open / close sensor, The timing adjustment unit adjusts the timing at which the electromagnetic valve opens the flow path in the gas supply pipe based on the result of the measurement so that the valve is closed at a predetermined timing. Therefore, the air valve is closed at a predetermined timing even when the delay time varies for each processing liquid discharge device due to variations in the diameter, length, etc. of the processing liquid supply pipe for each processing liquid discharge device. Can be adjusted to.

  According to the fourteenth aspect of the present invention, the determination unit of the determination device includes the inside of the nozzle tip and the processing in the image captured by the imaging unit of the flow path of the nozzle tip and the discharge path of the processing liquid. Based on the original image of the liquid discharge path, the closing speed classification of the on-off valve is determined. If the closing speed of the on-off valve is too high in the flow path, the processing liquid hardly exists. If the closing speed of the on-off valve is too slow, the liquid droplets in the processing path exist. Therefore, the determination unit can determine a classification to which the opening / closing valve closing speed belongs based on images corresponding to two regions having different relationships between the closing speed of the opening / closing valve and the detected state of the processing liquid. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valve.

  According to the fifteenth aspect of the invention, in the determination step of the processing liquid discharge method, the flow path at the front end portion of the nozzle in the original image obtained by imaging the flow path at the front end portion of the nozzle and the discharge path of the processing liquid. Based on the image of the treatment liquid discharge path, the classification of the closing speed of the on-off valve is determined. If the closing speed of the on-off valve is too high in the flow path, the processing liquid hardly exists. If the closing speed of the on-off valve is too slow, the liquid droplets in the processing path exist. Therefore, in the determination step, it is possible to determine the classification to which the closing speed of the on-off valve belongs based on images corresponding to two areas where the relationship between the closing speed of the on-off valve and the detected state of the processing liquid is different. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valve.

  According to the twenty-eighth aspect of the invention, in the determination step of the determination method, the flow path and processing at the tip end of the nozzle in the original image in which the flow path at the tip end of the nozzle and the discharge path of the processing liquid are imaged. Based on the image of the liquid discharge path, the classification of the closing speed of the on-off valve is determined. If the closing speed of the on-off valve is too high in the flow path, the processing liquid hardly exists. If the closing speed of the on-off valve is too slow, the liquid droplets in the processing path exist. Therefore, in the determination step, it is possible to determine the classification to which the closing speed of the on-off valve belongs based on images corresponding to two areas where the relationship between the closing speed of the on-off valve and the detected state of the processing liquid is different. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valve.

It is a schematic plan view which shows typically an example of a substrate processing apparatus provided with the substrate processing unit which concerns on Embodiment 1 (2). It is a figure which shows typically the example of 1 structure of the substrate processing unit which concerns on Embodiment 1. FIG. It is a figure which shows an example of the relationship between the state of the process liquid of the nozzle front-end | tip part at the time of discharge stop, its quality, etc. in a table | surface form. 5 is a flowchart illustrating an example of an operation of the substrate processing unit according to the first embodiment. 5 is a flowchart illustrating an example of an operation of the substrate processing unit according to the first embodiment. It is a figure which shows an example of the relationship between the state of the process liquid of the nozzle front-end | tip part at the time of discharge stop, and the division | segmentation of the closing speed of an on-off valve. It is a figure which shows an example of the relationship between the state of the process liquid of the nozzle front-end | tip part at the time of discharge stop, and the division | segmentation of the closing speed of an on-off valve. It is a schematic diagram which shows matching with the input image and the clustered classification. It is a figure which shows typically the example of 1 structure of the substrate processing unit which concerns on Embodiment 2. FIG. It is a figure which shows typically the structural example of other embodiment of a control part. It is a figure which shows typically the structural example of other embodiment of a control part.

  Hereinafter, embodiments will be described with reference to the drawings. The following embodiment is an example embodying the present invention, and is not an example of limiting the technical scope of the present invention. In each of the drawings referred to below, the size and number of each part may be exaggerated or simplified for easy understanding. Moreover, in each figure, the same code | symbol is attached | subjected to the part which has the same structure and function, and duplication description is abbreviate | omitted in the following description. The vertical direction is the vertical direction, and the substrate side is above the spin chuck.

<1. Configuration of Substrate Processing Apparatus 100>
The configuration of the substrate processing apparatus 100 will be described with reference to FIG. FIG. 1 is a schematic plan view schematically showing the substrate processing apparatus 100. The substrate processing apparatus 100 includes the substrate processing unit 1 according to the first embodiment.

  The substrate processing apparatus 100 is a system that processes a plurality of substrates W such as semiconductor wafers. The surface shape of the substrate W is substantially circular. The substrate processing apparatus 100 includes a plurality of substrate processing units 1. The substrate processing apparatus 100 can continuously process the substrates W one by one in each substrate processing unit 1, and can process a plurality of substrates W in parallel by the plurality of substrate processing units 1. You can also.

  The substrate processing apparatus 100 includes a control unit that controls a plurality of cells (processing blocks) arranged in parallel, specifically, the indexer cell 110 and the processing cell 120, and each operation mechanism provided in the plurality of cells 110 and 120. 130.

<Indexer cell 110>
The indexer cell 110 is a cell for delivering an unprocessed substrate W received from outside the apparatus to the process cell 120 and carrying out a processed substrate W received from the process cell 120 to the outside of the apparatus. The indexer cell 110 includes a carrier stage 111 on which a plurality of carriers C1 are placed, and a substrate transfer device (transfer robot) IR that loads and unloads the substrate W with respect to each carrier C1.

  On the carrier stage 111, a carrier C1 containing a plurality of unprocessed substrates W is carried and placed from outside the apparatus by OHT (Overhead Hoist Transfer) or the like. Unprocessed substrates W are taken out from the carrier C1 one by one and processed in the apparatus, and the processed substrates W that have been processed in the apparatus are stored in the carrier C1 again. The carrier C1 containing the processed substrate W is carried out of the apparatus by OHT or the like. Thus, the carrier stage 111 functions as a substrate integration unit that integrates the unprocessed substrate W and the processed substrate W. The form of the carrier C1 may be a FOUP (Front Opening Unified Pod) that stores the substrate W in a sealed space, or a SMIF (Standard Mechanical Inter Face) pod or the stored substrate W is in contact with the outside air. It may be OC (Open Cassette).

  The transfer robot IR includes a plurality of hands (for example, four) that can hold the substrate W in a horizontal posture (a posture in which the main surface of the substrate W is horizontal) and a plurality of hands by supporting the substrate W from below. Are provided with a plurality of arms that respectively move. The transfer robot IR takes out the unprocessed substrate W from the carrier C1 placed on the carrier stage 111, and transfers the taken-out substrate W to the transport robot CR (described later) at the substrate delivery position P. Further, the transfer robot IR receives the processed substrate W from the transfer robot CR at the substrate delivery position P, and stores the received substrate W in the carrier C1 placed on the carrier stage 111. The transfer robot IR can deliver the substrate W using a plurality of hands simultaneously.

<Processing cell 120>
The processing cell 120 is a cell for processing the substrate W. The processing cell 120 includes a plurality of substrate processing units 1 and a transfer robot CR that carries in and out the substrates W with respect to the plurality of substrate processing units 1. The transfer robot CR and the control unit 130 are substrate transfer apparatuses. Here, a plurality of (for example, three) substrate processing units 1 are stacked in the vertical direction to constitute one substrate processing apparatus group 10. A plurality (four in the illustrated example) of substrate processing apparatus groups 10 are installed in a cluster shape (tuft shape) so as to surround the transfer robot CR. Accordingly, the plurality of substrate processing units 1 are respectively arranged around the transport robot CR. The substrate processing unit 1 detachably holds a substrate disposed on an upper side (vertical direction upper side) of a spin chuck (not shown) by a spin chuck, and rotates the spin chuck around a predetermined rotation axis. On the other hand, a predetermined process (for example, a chemical process, a rinse process, or a drying process) is performed.

  The transport robot CR is a robot that transports the substrate W while cantilevering it. The transfer robot CR takes out the processed substrate W from the designated substrate processing unit 1 and transfers the taken out substrate W to the transfer robot IR at the substrate transfer position P. Further, the transfer robot CR receives an unprocessed substrate W from the transfer robot IR at the substrate transfer position P, and transfers the received substrate W to the designated substrate processing unit 1. Similarly to the transfer robot IR, the transfer robot CR also includes a plurality of (for example, four) hands and a plurality of arms that respectively move the plurality of hands. The transfer robot CR can transfer the substrate W using a plurality of hands simultaneously.

  Each substrate processing unit 1 includes a chamber (“housing”) 121 that forms a processing space therein. The casing 121 is formed with a loading / unloading port 122 through which the transfer robot inserts the hand into the casing 121. The carry-in / out port 122 is provided with a shutter (not shown) that can be opened and closed based on the control of the control unit 130. The shutter is opened when the substrate W is carried in and out of the housing 121 and is closed during the processing of the substrate W. The substrate processing unit 1 is arranged in such a manner that the carry-in / out entrance faces the space in which the transfer robot is arranged. A specific configuration of the substrate processing unit 1 will be described later.

<Control unit 130>
The control unit 130 controls the operations of the transfer robot IR, the transfer robot CR, and the group of substrate processing units 1. The configuration of the control unit 130 as hardware can be the same as that of a general computer. That is, the control unit 130 stores, for example, a CPU 11 that performs various arithmetic processes, a ROM 162 that is a read-only memory that stores basic programs, a RAM 163 that is a readable / writable memory that stores various information, a program PG, data, and the like. The magnetic disk 161 is electrically connected to the bus line 29. A display unit 141 such as a liquid crystal panel and an input unit 142 such as a keyboard are also electrically connected to the bus line 29. The magnetic disk 161 also stores a recipe (not shown) that defines the processing content and processing procedure of the substrate W, a determination rule K1, a classifier K2, and the like.

  In the control unit 130, various functional units that control each unit of the substrate processing apparatus 100 are realized by the CPU 11 as the main control unit performing arithmetic processing according to the procedure described in the program PG. Specifically, the CPU 11 has functions such as a determination unit 12, a feature amount calculation unit 13, a rule base determination unit 14, an image generation unit 16, a closing speed adjustment unit 17, a timing adjustment unit 18, and a machine learning unit 19, for example. Operates as a part. The determination unit 12 includes a feature amount calculation unit 13 and a rule base determination unit 14. However, some or all of the functional units realized in the control unit 130 may be realized in hardware by a dedicated logic circuit or the like.

<2. Configuration of Substrate Processing Unit 1>
FIG. 2 is a diagram schematically illustrating a configuration example of the substrate processing unit 1 according to the first embodiment.

  The substrate processing unit (also referred to as a “processing liquid discharge device”) 1 supplies, for example, a processing liquid onto one main surface (also referred to as an upper surface) of the substrate W rotating in a plane, so that the upper surface of the substrate W is Various processes can be performed on the. For example, pure water is used as the treatment liquid L1. The treatment liquid L1 is not limited to pure water, and may be functional water such as carbonated water, ion water, ozone water, or reduced water (hydrogen water), or a mixture of ammonia water, ammonia water, and hydrogen peroxide water. It may be a mixed solution, a mixed solution of hydrochloric acid and hydrogen peroxide solution, hydrofluoric acid, a mixed solution of sulfuric acid and hydrogen peroxide solution, or a chemical solution such as isopropyl alcohol.

  As shown in FIG. 2, the substrate processing unit 1 includes, for example, a processing unit 200 that processes the held substrate W with the processing liquid L1 while rotating the substrate W, and a processing liquid supply system 7 that supplies the processing liquid L1 to the processing unit 200. And a control unit 130.

<2-1. Processing unit 200>
The processing unit 200 includes a spin chuck 221 and a nozzle 251 in the housing 121. The processing unit 200 rotates the substrate W around a predetermined rotation axis while holding the substrate W from below by a spin chuck (“rotation holding mechanism”) 221. The processing unit 200 processes the substrate W by supplying the processing liquid L1 from the nozzle 251 to the substrate W.

  The spin chuck 221 includes a disk-shaped spin base having a substantially horizontal main surface, and a rotation mechanism that rotates the spin base around a rotation axis that extends vertically through the center of the spin base. . A plurality of holding pins for detachably holding the periphery of the substrate W are provided on the periphery of the spin base. The spin chuck 221 holds the substrate W in a substantially horizontal posture so that the upper surface of the spin base and the lower surface of the substrate W face each other by holding the peripheral edge of the substrate W with a plurality of holding pins. The center of the held substrate W is located on the rotation axis of the spin base. In this state, the spin chuck 221 rotates the substrate W around the rotation axis by rotating the spin base around the rotation axis.

  The nozzle 251 is disposed above the substrate W held by the spin chuck 221, and is supplied with the processing liquid L 1 from the processing liquid supply source 71 of the processing liquid supply system 7 through the pipe 74. The nozzle 251 discharges the supplied processing liquid L1 to the main surface of the substrate W rotated by the spin chuck 221. The main surface of the substrate W is treated with the chemical solution. For example, at least the tip side portion (portion close to the substrate W) of the nozzle 251 has a transparent material, for example. As the material having the transparent material, for example, PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin), quartz, or the like may be employed. Therefore, the processing liquid L1 present in the flow path at the tip of the nozzle 251 is imaged by the camera 65 described later. The processing liquid L1 supplied to the nozzle 251 passes through the flow path TG1 at the tip of the nozzle 251 and passes through the discharge path TG2 extending from the tip 252 of the nozzle 251 to the downstream side in the discharge direction AR1. Discharged to the side.

  The loading / unloading of the substrate W to / from the processing unit 200 is performed by a robot or the like in a state where the nozzle 251 is disposed at the retracted position by a predetermined moving mechanism. The substrate W carried into the processing unit 200 is detachably held by the spin chuck 221.

<2-2. Treatment liquid supply system 7>
The processing liquid supply system 7 is provided in the middle of the processing liquid supply source 71 that supplies the processing liquid L 1, a pipe (“processing liquid supply pipe”) 74, and the pipe 74, and opens and closes the flow path in the pipe 74. An on-off valve 72. The pipe 74 connects the processing liquid supply source 71 and the nozzle 251, and guides the processing liquid L 1 supplied from the processing liquid supply source 71 to the nozzle 251. The on-off valve 72 is an air valve that is supplied with a predetermined gas and performs a closing operation at a speed corresponding to the supply flow rate of the gas.

  The processing liquid supply system 7 further includes a drive mechanism 132 that causes the on-off valve 72 to perform an opening / closing operation. The drive mechanism 132 supplies a gas H1 for controlling the opening / closing operation of the opening / closing valve 72.

  The drive mechanism 132 is provided in the pipe 34, the gas supply source 31 that supplies the gas H <b> 1 to the on-off valve 72, the pipe (“gas supply pipe”) 34 that connects the gas supply source 31 and the on-off valve 72, and the pipe 34. An electromagnetic valve 32 that opens and closes the flow path of the gas H1 in the pipe 34, and a motor-driven needle valve 33 that is provided in the pipe 34 and controls the flow rate of the gas H1 flowing in the pipe 34 according to the opening degree. . The drive mechanism 132 may include an electropneumatic regulator instead of the needle valve 33. The electropneumatic regulator is provided in the pipe 34, and controls the opening / closing and flow rate of the flow path of the gas H1 flowing in the pipe 34 in accordance with the supplied voltage.

  The gas supply source 31 includes, for example, a cylinder that stores the high-pressure gas H1 and a valve (also referred to as a pressure regulator) that lowers the pressure of the high-pressure gas H1 derived from the cylinder to a constant value. The gas supply source 31 may be provided outside the substrate processing apparatus 100.

<2-3. Closing speed determination device 300>
The substrate processing unit 1 further includes a closing speed determination device (also referred to as “determination device”) 300. The closing speed determination device 300 determines the classification to which the closing speed of the on-off valve 72 that opens and closes the flow path for supplying the processing liquid L1 to the nozzle 251 (“processing liquid supply flow path”) belongs.

  The closing speed determination device 300 includes a camera 65 provided in the housing 121 and a control unit 130 (more specifically, the determination unit 12). The camera 65 is electrically connected to the control unit 130.

<2-3-1. Camera 65>
The camera 65 includes, for example, a lens, an image sensor, and a control processing circuit (each not shown). The lens forms an optical image of the subject on the image sensor. The image sensor converts an optical image of the subject into an electrical signal and supplies it to the control processing circuit. The control processing circuit is electrically connected to the control unit 130, causes the imaging device to perform an imaging operation in accordance with a control signal supplied by the control unit 130, and processes each electrical signal supplied from the imaging device. By converting the value into a digital image, an image signal representing an image corresponding to the number of effective pixels of the image sensor is generated and supplied to the control unit 130.

  That is, the camera 65 processes each electrical signal supplied from the image sensor and converts it into a digital image, thereby generating an image signal representing an image corresponding to the number of effective pixels of the image sensor and outputting the image signal to the control unit 130. To do. The control unit 130 stores the image signal (image) in, for example, the magnetic disk 161.

  Specifically, the camera 65 captures an image defined in the housing 121 according to the control of the control unit 130 when the on-off valve 72 closes the flow path and the discharge of the processing liquid L1 from the nozzle 251 stops. The target area 50 is imaged to obtain an image G0. The imaging target region 50 includes a flow path at the tip of the nozzle 251 and a discharge path of the processing liquid L1 extending forward along the discharge direction AR1 of the processing liquid L1 from the tip (discharge port 252) of the nozzle 251. Including. The camera 65 captures an image from a direction different from the ejection direction AR1. In FIG. 2, the inner region 51 is included in the flow path at the tip of the nozzle 251, and the front region 52 is included in the discharge path of the processing liquid L <b> 1 extending from the tip 252 of the nozzle 251 to the front in the discharge direction AR <b> 1. . The imaging target area 50 includes an internal area 51 and a front area 52.

<2-3-2. Determination unit 12>
The determination unit 12 of the closing speed determination device 300 performs a predetermined determination process based on the images of the internal region 51 at the tip of the nozzle 251 and the front region 52 of the nozzle 251 in the image G0 in which the camera 65 images the imaging target region 50. , The closing speed of the opening / closing valve 72 is determined as to whether the closing speed of the opening / closing valve 72 is appropriate or slower or faster than a predetermined appropriate speed (“target speed”, “target closing speed”). Determine the category. That is, the determination unit 12 of the closing speed determination device 300 determines the stop state of the processing liquid L1 discharged from the nozzle 251.

  The determination unit 12 includes a feature amount calculation unit 13 and a rule base determination unit 14.

  The feature amount calculation unit 13 corresponds to the first image G1 in the area A (“first image region”) corresponding to the internal region 51 and the front region 52 in the image G0 in which the camera 65 captures the imaging target region 50. About each image with the 2nd image G2 of the area B ("2nd image area | region"), the predetermined feature-value according to the area of the image of the process liquid L1 in each of the 1st image G1 and the 2nd image G2 is provided. calculate. As the feature amount, for example, the sum of pixel values, the sum of luminance, or the standard deviation of the pixel value or the luminance of each pixel in each region of the first image G1 and the second image G2 is adopted. The

  The rule base determination unit 14 determines the classification of the closing speed of the on-off valve 72 by applying a predetermined determination rule K1 to the feature amount of the first image G1 and the feature amount of the second image G2.

  As the determination rule K1, for example, if the inner region 51 is not in a liquid-tight state, it is determined that the closing speed of the on-off valve 72 is too fast, the inner region 51 is in a liquid-tight state, and the processing liquid L1 is placed in the front region 52. Is present, a rule for determining that the closing speed of the on-off valve 72 is too slow is employed.

  Moreover, the determination part 12 of the closing speed determination apparatus 300 is provided with the classifier K2. In the classifier K2, the closing speed of the on-off valve 72 is appropriate based on the images of the internal region 51 at the tip of the nozzle 251 and the front region 52 of the nozzle 251 in the image G0 obtained by imaging the imaging target region 50 by the camera 65. The classification of the closing speed of the on-off valve 72 is determined as to whether it is present or slower than an appropriate speed. That is, the determination unit 12 determines the classification of the closing speed of the on-off valve 72 by the classifier K2.

  The classifier K2 performs machine learning performed by the machine learning unit 19 in advance using sample images of the inner region 51 at the tip of the nozzle 251 and the front region 52 of the nozzle 251 in the image G0 obtained by capturing the imaged region 50 by the camera 65. Has been generated by.

  The machine learning unit 19 stores the generated classifier K2 in the magnetic disk 161. The classifier K2 is stored as, for example, a program that realizes the function as the classifier K2, or a parameter. The machine learning unit 19 uses, for example, a neighborhood method, a support vector machine, a random forest, or a neural network as a machine learning algorithm.

  The machine learning unit 19 may be updated regularly or irregularly offline. Further, a sample image (teacher data) may be added to the machine learning unit 19 that has been machine-learned in advance, and online learning may be performed and updated.

  Although the substrate processing apparatus 100 includes a plurality of substrate processing units 1, the classifier K 2 generated by machine learning for one substrate processing unit 1 is used to control the on-off valve 72 in the other substrate processing unit 1. May be used for

<2-3-3. Processing of time-series image by closing speed determination device 300>
Under the control of the controller 130, the camera 65 closes the internal region 51 at the tip of the nozzle 251 and the nozzle after the on-off valve 72 closes the flow path and the discharge of the processing liquid L1 from the nozzle 251 stops. The imaging target region 50 including the front region 52 extending forward along the discharge direction AR1 of the processing liquid L1 from the front end of 251 can be sequentially imaged in time.

<Image generation unit 16>
The closing speed determination device 300 further includes an image generation unit 16.

  The image generation unit 16 generates images (“derivative images”) of the internal region 51 at the tip of the nozzle 251 and the front region 52 of the nozzle 251 based on the time-series image obtained by the camera 65 capturing the imaging target region 50. . More specifically, for example, the image generation unit 16 generates a derived image based on the time-series image captured immediately after the nozzle 251 stops discharging the processing liquid L1 and after a predetermined time has elapsed. . The certain time is, for example, 3 seconds. Then, the determination unit 12 determines the classification of the closing speed of the on-off valve 72 based on the derived image generated by the image generation unit 16. The determination unit 12 performs the determination by applying the same determination process as the determination process (determination process using the determination rule K1 or the classifier K2) applied to the image G0 to the derived image.

  The image generation unit 16 applies a predetermined selection rule to the pixel value of each pixel at the same coordinate in each time-series image, and acquires the pixel value of the pixel at the coordinate of the derived image. As the selection rule, for example, a process for obtaining an average value or an integrated value of pixel values of pixels having the same coordinates is employed.

  As the selection rule, for the internal region 51 at the tip of the nozzle 251, the pixel value closest to the pixel value of the spatial region in which the processing liquid L1 does not exist among the pixel values of each pixel having the same coordinates, For the second image G2 in the front area 52 of the nozzle 251, a rule that adopts a pixel value closest to the pixel value of the area where the processing liquid L1 exists among the pixel values of each pixel having the same coordinates may be adopted. .

<2-4. Closing speed adjusting unit 17>
The substrate processing unit 1 further adjusts the operation of the drive mechanism 132 so that the closing speed becomes an appropriate speed based on the closing speed classification of the opening / closing valve 72 determined by the closing speed determination device 300 of the opening / closing valve 72. The closing speed adjusting unit 17 is provided. The closing speed adjusting unit 17 adjusts the opening degree of the needle valve 33 so that the closing speed of the on-off valve 72 becomes an appropriate speed. More specifically, the closing speed adjustment unit 17 supplies a control signal for adjusting the opening degree of the needle valve 33 to the control board 131. The control board 131 supplies a drive current corresponding to the supplied control signal to the motor of the needle valve 33 to operate the motor. Thereby, the opening degree of the needle valve 33 is adjusted.

<2-5. Timing Adjustment Unit 18>
The substrate processing unit 1 further includes a timing adjustment unit 18. The processing liquid supply system 7 further includes an opening / closing sensor 73 that detects opening / closing of the opening / closing valve 72. The open / close sensor 73 supplies an output signal to the control unit 130. Since the opening / closing operation of the opening / closing valve 72 is controlled by gas, the opening / closing valve is operated after the electromagnetic valve 32 opens the flow path in the pipe 34, that is, after the operation for closing the opening / closing valve 72 is performed. There is a delay time (“discharge stop delay time”) before 72 is actually closed.

  The timing adjustment unit 18 measures the delay time based on the output of the opening / closing sensor 73, and based on the result of the measurement, the electromagnetic valve 32 flows in the pipe 34 so that the opening / closing valve 72 is closed at a predetermined timing. Adjust the timing for opening the road.

<3. Regarding the state of the processing liquid L1 when the discharge is stopped>
FIG. 3 is a table showing an example of the relationship between the state of the processing liquid L1 at the tip of the nozzle 251 when discharging is stopped and the quality of the processing liquid L1.

  3 shows three states of the treatment liquid L1 at the tip of the nozzle 251 when the discharge is stopped. In the second row from the top, the quality of the three states of the treatment liquid L1 shown in the uppermost row is described. In the second row from the bottom, the correspondence between the three states of the treatment liquid L1 shown in the uppermost row and the closing speed of the on-off valve 72 is shown. The closing speed of the on-off valve 72 is adjusted by a motor-driven needle valve 33 (speed controller). The lowermost row shows the correspondence between the three states of the treatment liquid L1 shown in the uppermost row and the discharge stop delay time. The discharge stop delay time is a delay time from when the solenoid valve 32 performs an operation of closing the on-off valve 72 by an ON operation or an OFF operation until the on-off valve 72 is actually closed. The discharge stop delay time varies depending on the closing speed of the on-off valve 72, the length and diameter of the pipe 74, the head of the processing liquid L1, and the like.

  As shown in FIG. 3, the state of the processing liquid L1 at the tip of the nozzle 251 when the discharge is stopped from the state where the nozzle 251 discharges the processing liquid L1 varies depending on the closing speed of the on-off valve 72.

  When the closing speed of the on-off valve 72 is too slow, the droplet L2 of the processing liquid L1 continues to fall for a while after the nozzle 251 stops discharging the processing liquid L1. That is, the state of the processing liquid L1 at the tip of the nozzle 251 is not preferable. Further, since the closing speed of the on-off valve 72 is slow, the discharge stop delay time is long.

  If the closing speed of the on-off valve 72 is too high, the processing liquid L1 does not exist except for the liquid droplet L2 that adheres to the inner wall surface or accumulates at the tip 252 of the nozzle 251 by the so-called water hammer. A region arises. These droplets L2 will later fall on the substrate W. That is, the state of the processing liquid L1 at the tip of the nozzle 251 is not preferable. Further, since the closing speed of the on-off valve 72 is fast, the discharge stop delay time is short.

  If the closing speed of the on-off valve 72 is appropriate, the tip portion of the nozzle 251 is almost liquid-tight with the processing liquid L1, and the droplet L2 does not continue to drop for a while after stopping. That is, the state of the processing liquid L1 at the tip of the nozzle 251 is a preferable state. Further, the discharge stop delay time is a time between the time when the closing speed of the on-off valve 72 is too fast and the time when it is too slow.

  As shown in FIG. 3, it is necessary to set the closing speed of the on-off valve 72 to an appropriate speed according to the piping system of the substrate processing unit 1 in order to obtain a good state of the processing liquid L1 when the discharge is stopped. .

<4. Operation of Substrate Processing Unit 1>
4 and 5 are flowcharts showing an example of the operation of the substrate processing unit 1. FIG. 4 is a flowchart when the determination unit 12 of the control unit 130 determines the closing speed of the on-off valve 72 by applying a predetermined determination rule K1. FIG. 5 is a flowchart when the determination unit 12 determines the closing speed of the on-off valve 72 using the classifier K2.

  6 and 7 show, in a tabular form, an example of the relationship between the state of the processing liquid L1 at the tip of the nozzle 251 and the classification of the closing speed of the on-off valve 72 when the nozzle 251 stops discharging the processing liquid L1. FIG.

  In FIGS. 6 and 7, the state of the processing liquid L1 after the stop of the processing liquid L1 is shown for each of the three states in which the closing speed of the on-off valve 72 is “appropriate”, “too slow”, and “too fast”. Two states of “post-stop state 1” and “post-stop state 2” are illustrated. The two states are schematically shown by images G0 obtained by the camera 65 picking up the shooting target region 50, respectively.

  Each image G0 in FIG. 6 displays areas A and B, and each image G0 in FIG. 7 displays area C. Except for this difference, the two images G0 displayed at the same position in the table in FIGS. 6 and 7 are the same image.

  When the closing speed of the on-off valve 72 is appropriate, immediately after the stop, the lower end of the processing liquid L1 coincides with the tip 252 of the nozzle 251 or stops slightly above the tip 252. The droplet L2 does not fall from the tip 252 of the nozzle 251 after the discharge is stopped.

  When the closing speed of the on-off valve 72 is too slow, in the post-stop state 1, the droplet L2 has not dropped, and the lower end surface of the processing liquid L1 has a convex shape downward from the tip 252 of the nozzle 251. Have. In the post-stop state 2, the droplet L <b> 2 has fallen, and the lower end of the processing liquid L <b> 1 coincides with the tip 252 of the nozzle 251. Note that the lower end of the processing liquid L1 does not always coincide with the tip 252 of the nozzle 251, and may have a convex shape. In this case, the drop of the droplet L2 and the lower end surface of the treatment liquid L1 having a convex shape as in the after-stop state 1 occur simultaneously.

  If the closing speed of the on-off valve 72 is too high, in the post-stop state 1, the water hammer causes liquid droplets L <b> 2 adhering to the inner wall surface of the nozzle and the liquid accumulated on the tip 252 of the nozzle 251 to remain. Except for the droplet L2, there is a region where the processing liquid L1 does not exist. The lower end surface of the processing liquid L1 is located considerably above the tip 252 of the nozzle 251. And in the state 2 after a stop, the liquid drop-like droplet L2 of the magnitude | size which closes the front-end | tip 252 of the nozzle 251 has arisen. Similarly to the post-stop state 1, a region where the processing liquid L1 does not exist is generated at the tip portion of the nozzle, and the lower end surface of the processing liquid L1 is positioned considerably above the tip 252 of the nozzle 251. In the post-stop states 1 and 2, the droplet L2 remaining at the tip of the nozzle 251 may become particles when dried.

  Hereinafter, the operation of the substrate processing unit 1 (closing speed determination device 300) will be described based on the flowcharts of FIGS. 4 and 5 with appropriate reference to FIGS.

<4-1. Operation when determining unit 12 uses rule-based determining unit 14>
Hereinafter, the substrate processing unit 1 when the rule base determination unit 14 of the determination unit 12 determines the closing speed of the on-off valve 72 using the determination rule K1 based on the flowchart of FIG. 4 while referring to FIG. 6 as appropriate. The operation of will be described.

  In step S10 of FIG. 4, when the on-off valve 72 closes the flow path and the discharge of the processing liquid L1 from the nozzle 251 is stopped, the camera 65 and the internal region 51 (FIG. 6) at the tip of the nozzle 251 Then, the imaging target region 50 including the front region 52 of the tip portion is imaged. The captured image (“original image”) G0 is supplied to the control unit 130.

  In step S <b> 20, the feature amount calculation unit 13 has an area A (FIG. 6) corresponding to the internal region 51 in the flow path at the tip of the nozzle 251 and a front region on the discharge path of the processing liquid L <b> 1 at the tip of the nozzle 251. A predetermined feature amount is calculated for the first image G1 and the second image G2 in each area with the area B (FIG. 6) corresponding to 52.

  Areas A and B have the width of the tip (discharge port) 252 of the nozzle 251 and are set to be elongated in the discharge direction AR1 of the processing liquid L1.

  In step S30, the rule base determination unit 14 determines whether the area A is liquid-tight with the processing liquid L1 based on the feature amount of the first image G1.

  If the area A is not liquid-tight as a result of the determination, the rule base determination unit 14 determines in step S40 that the closing speed of the on-off valve 72 is too fast.

  In step S50, the closing speed adjusting unit 17 of the substrate processing unit 1 adjusts the flow rate of the gas H1 that the motor-driven needle valve 33 flows through the pipe 34 so that the closing speed of the on-off valve 72 is slowed down. The process proceeds to step S90.

  If the result of determination in step S30 is that area A is liquid-tight, the process proceeds to step S60.

  In step S60, the rule base determination unit 14 determines whether or not the area B is a space where the processing liquid L1 hardly exists based on the feature amount of the second image G2.

  As a result of the determination, if the processing liquid L1 exists in area B, the process proceeds to step S70.

  In step S70, the rule base determination unit 14 determines that the closing speed of the on-off valve 72 is too slow.

  In step S <b> 80, the closing speed adjustment unit 17 adjusts the flow rate of the gas H <b> 1 that the motor-driven needle valve 33 flows through the pipe 34 so that the closing speed of the on-off valve 72 is increased.

  In step S90, in order to reflect the result of adjusting the flow rate of the gas H1, the substrate processing unit 1 once discharges the processing liquid L1 from the nozzle 251, and then stops the discharge again. Thereafter, the process is returned to step S10, and the substrate processing unit 1 performs each process after step S10.

  As a result of the determination in step S60, if the area B is a space where the processing liquid L1 hardly exists, the substrate processing unit 1 ends the operation of FIG.

  In the operation of FIG. 4, the rule base determination unit 14 determines that the closing speed of the on-off valve 72 is too fast unless the inner region 51 is in a liquid-tight state, the inner region 51 is in a liquid-tight state, and the front If the processing liquid L1 exists in the region 52, a rule for determining that the closing speed of the on-off valve 72 is too slow is used as the determination rule K1. And the rule base determination part 14 determines the classification | category of the closing speed of the on-off valve 72 by applying the determination rule K1 to the feature-value of the 1st image G1 and the feature-value of the 2nd image G2.

  As shown in FIG. 6, the end of the area A on the downstream side in the discharge direction AR1 of the processing liquid L1 is separated from the tip of the nozzle 251 upstream in the discharge direction AR1 of the processing liquid L1. For this reason, the determination unit 12 does not use the image of the image region extending from the end of the first image G1 region to the tip of the nozzle 251 on the downstream side in the discharge direction AR1 for determining the closing speed of the on-off valve 72. The image area is an area in which it is difficult to specify the relationship between the presence of the processing liquid L1 and the closing speed of the on-off valve 72. For this reason, when the said area | region is not used for determination, the precision of determination can improve.

<4-2. Operation when determining unit 12 uses classifier K2>
Hereinafter, the operation of the substrate processing unit 1 when the determination unit 12 determines the closing speed of the on-off valve 72 using the classifier K2 will be described with reference to FIG. 7 as appropriate.

  In step S110 of FIG. 5, the machine learning unit 19 displays an image of an area C (FIG. 7) including the inside (flow path) of the tip portion of the nozzle 251 and the discharge path of the processing liquid L1 in front of the tip portion. Machine learning is performed so that the closing speed of the on-off valve is classified into “appropriate”, “too slow”, and “too fast” classes. The machine learning unit 19 stores the classifier K2 generated by the machine learning in the magnetic disk 161.

  6, when the determination unit 12 applies the classifier K2, the classifier K2 is an area corresponding to the internal area 51 in the image G0 obtained by capturing the imaging target area 50 by the camera 65. Based on the respective images of the first image G1 of A and the second image G2 of the area B corresponding to the front area 52 (FIG. 6), the classification of the closing speed of the on-off valve 72 is determined. The classifier K2 is generated by machine learning in advance using the sample images of the first image G1 and the second image G2.

  In step S120, when the opening / closing valve 72 closes the flow path and the discharge of the processing liquid L1 from the nozzle 251 stops, the camera 65 causes the inside (flow path) of the front end of the nozzle 251 and the front of the front end. The imaging target region 50 including the discharge path of the processing liquid L1 is imaged.

  In step S130, the determination unit 12 classifies the image of the area C in the captured image (original image) G0 by the classifier K2, and determines the classification to which the closing speed of the on-off valve 72 belongs.

  The area C has a width of the tip (discharge port) 252 of the nozzle 251 and is set to be elongated in the discharge direction AR1 of the processing liquid L1. Area C in FIG. 7 is a slightly longer area than the combined range of areas A and B in FIG. This is because areas A and B are provided apart from each other.

  In step S140, the determination unit 12 determines whether or not the closing speed is classified (determined) as “too fast”.

  As a result of the determination, if the closing speed is classified as “too fast”, the process proceeds to step S150.

  In step S150, the closing speed adjusting unit 17 of the substrate processing unit 1 adjusts the flow rate of the gas H1 that the motor-driven needle valve 33 flows through the pipe 34 so that the closing speed of the on-off valve 72 is slow. The process moves to step S180.

  As a result of the determination in step S140, if the closing speed of the on-off valve 72 is not classified as “too fast”, the process proceeds to step S160.

  In step S160, the determination unit 12 determines whether or not the closing speed of the on-off valve 72 is classified as “too slow”.

  As a result of the determination, if the closing speed is classified as “too slow”, the process proceeds to step S170.

  In step S <b> 170, the closing speed adjustment unit 17 adjusts the flow rate of the gas H <b> 1 that the motor-driven needle valve 33 flows to the pipe 34 so that the closing speed of the on-off valve 72 is increased.

  In step S180, in order to reflect the result of adjusting the flow rate of the gas H1, the substrate processing unit 1 once discharges the processing liquid L1 from the nozzle 251, and then stops the discharge again. Thereafter, the process is returned to step S120, and the substrate processing unit 1 performs each process after step S120.

  As a result of the determination in step S160, when the closing speed of the on-off valve 72 is not classified as “too slow”, the substrate processing unit 1 ends the operation of FIG.

  FIG. 8 is a schematic diagram showing matching between an image GI obtained by photographing the vicinity of the tip 252 of the nozzle 251 and the closing speeds of the on-off valves classified in advance into a plurality of classes. The matching is performed by, for example, a known neural network NN1. The closing speed is pre-clustered into multiple classes such as “too fast”, “appropriate”, and “too slow”. Each class corresponds to each feature vector generated in advance. Each of the feature vectors corresponds to each image Gk corresponding to each state of the processing liquid L1 immediately after the stop in the vicinity of the tip 252 (more specifically, the sum of the pixel values or luminances of each image Gk, or the pixel values or luminance values). Standard deviation). In the example of FIG. 8, each class of closing speed is schematically indicated by each corresponding image Gk. The neural network NN1 includes an input layer, an intermediate layer (hidden layer), and an output layer. The neural network NN1 may include a plurality of intermediate layers.

  The neural network NN1 indicates in advance the correspondence between each image GI obtained by photographing the vicinity of the tip 252 with the camera 65 immediately after stopping the discharge of the processing liquid L1 and the feature vector corresponding to the image GI among the above-described feature vectors. Learning. The captured image GI is matched with the most corresponding feature vector by image recognition by the neural network NN1. Thereby, the discharge stop state can be determined. The matching shown by FIG. 8 respond | corresponds to the process of step S140 mentioned above and step S160.

  Note that the images GI and Gk in FIG. 8 are images obtained by photographing the vicinity of the tip 252 of the nozzle 251, but are not necessarily images obtained by extracting only the vicinity of the tip 252 of the nozzle 251, but the entire image captured by the image sensor. An image may be learned as a feature vector. In this case, it is considered that the machine learning unit 19 learns by paying attention to the difference between the nozzle tip states generated in the plurality of whole images as a result.

<5. Configuration of Substrate Processing Apparatus 100A>
FIG. 1 is also a schematic plan view schematically showing the substrate processing apparatus 100A. The substrate processing apparatus 100A includes a substrate processing unit 1A according to the second embodiment. As shown in FIG. 1, the substrate processing apparatus 100 </ b> A is configured in the same manner as the substrate processing apparatus 100 except that it includes a plurality of substrate processing units 1 </ b> A instead of the plurality of substrate processing units 1.

  FIG. 9 is a diagram schematically illustrating a configuration example of the substrate processing unit 1A according to the second embodiment.

  A substrate processing unit (“processing liquid discharge device”) 1A is configured in the same manner as the substrate processing unit 1 except that it includes a processing liquid supply system 7A instead of the processing liquid supply system 7 of the substrate processing unit 1. . Similar to the substrate processing unit 1, the substrate processing unit 1 </ b> A can process the substrates W one by one by discharging the processing liquid L <b> 1 to the substrate W. The substrate processing apparatus 100A can process a plurality of substrates W in parallel by the plurality of substrate processing units 1A.

  The processing liquid supply system 7A of the substrate processing unit 1A includes an on-off valve (“motor valve”) 72A and a driving mechanism 132A in place of the on-off valve 72 and the driving mechanism 132 of the processing liquid supply system 7, The configuration is the same as that of the processing liquid supply system 7.

  The on-off valve 72A includes a valve body 720 and a motor (“electric motor”) 721, and the motor 721 opens and closes the on-off valve 72A by driving an opening / closing mechanism of the valve body 720. The valve body 720 is provided in the course of the pipe 74. In the valve main body 720, for example, a rod-like body (not shown) that can open and close the valve main body 720 by moving forward and backward in a direction crossing the pipe 74, that is, can open and close the flow path of the pipe 74 is provided. For example, the rod-like body is connected to a ball screw mechanism (not shown) connected to the rotation shaft of the motor 721. When the motor 721 rotates, the rod-like body advances and retreats in a direction corresponding to the rotation direction at a speed corresponding to the rotation speed. To do. Thereby, the opening degree and opening / closing speed of the valve body 720 are arbitrarily adjusted. The control unit 130 supplies a control signal corresponding to the target opening / closing speed to the control board 131, and the control board 131 supplies a drive current corresponding to the control signal to the motor 721. The on-off valve 72A performs an opening / closing operation at a speed corresponding to the number of rotations (rotational speed) of the motor 721. In other words, the on-off valve 72A corresponds to the drive current supplied by the control board 131 (for example, if the motor 721 is a DC motor, the current value of the drive current; if the motor 721 is a stepping motor, the frequency of the drive current pulse). Open and close at a certain speed. That is, the drive mechanism 132A includes a control board 131 and a motor 721 for the on-off valve 72A, and adjusts the closing speed of the on-off valve 72A. The closing speed adjusting unit 17 adjusts the operation of the motor 721 by supplying a control signal to the control board 131 so that the closing speed of the on-off valve 72A (valve body 720) becomes an appropriate speed (target closing speed). .

  The motor-driven on-off valve 72A has better responsiveness than the on-off valve 72, which is an air-driven air valve. When the motor 721 performs the operation of closing the on-off valve 72A, the on-off valve 72A is immediately closed. . Since the opening / closing operation of the opening / closing valve 72 is controlled by the gas H1, the above-described discharge stop delay time has occurred. However, since the opening / closing operation of the opening / closing valve 72A is controlled by the motor 721, There is no delay corresponding to the discharge stop delay time in the on-off valve 72. For this reason, in the substrate processing unit 1 </ b> A, the control unit 130 may not include the timing adjustment unit 18.

  FIG. 10 is a diagram schematically showing a control unit 130B as a configuration example of another embodiment of the control unit 130 of the substrate processing apparatuses 100 and 100A.

  As shown in FIG. 10, the machine learning unit 19 is provided in a server 23 provided outside the substrate processing apparatus 100. Machine learning by the machine learning unit 19 is performed offline. The determination unit 12 and the classifier K2 are also provided in the server 23. The control unit 130 </ b> B is connected to the network 22 via the communication unit 21, and the external server 23 is connected to the network 22.

  The CPU 11 of the control unit 130B communicates information with the determination unit 12, the machine learning unit 19, and the classifier K2 provided in the server 23 via the communication unit 21 and the network 22. The control unit 130B is configured in the same manner as the control unit 130 except that it does not include the machine learning unit 19, the determination unit 12, and the classifier K2 of the control unit 130.

  As illustrated in the control unit 130B of FIG. 10, the determination unit 12, the feature amount calculation unit 13, the rule base determination unit 14, the image generation unit 16, the closing speed adjustment unit 17, and the timing realized by the CPU 11 of the control unit 130. A part of each functional unit such as the adjusting unit 18 and the machine learning unit 19 may be provided in the external server 23. If the functional unit is provided in the server 23, common matching (determination) can be performed for a plurality of substrate processing units.

  The machine learning unit 19 may be updated regularly or irregularly offline. Further, a sample image (teacher data) may be added to the machine learning unit 19 that has been machine-learned in advance, and online learning may be performed and updated. Further, online learning may be performed using sample images (teacher data) using another CPU via the network 22.

  FIG. 11 is a diagram schematically illustrating a control unit 130C as a configuration example of another embodiment of the control unit 130 of the substrate processing apparatuses 100 and 100A. As shown in FIG. 11, the control unit 130C is configured in the same manner as the control unit 130 except that the classifier K2 is stored in the ROM 162 instead of the magnetic disk 161, and operates in the same manner. As described above, the classifier K2 may be stored in the ROM 162.

  According to the on-off valve closing speed determination device according to the first and second embodiments configured as described above, the determination unit 12 is configured so that the camera 65 is connected to the flow path at the front end of the nozzle 251 and the front end 252 of the nozzle 251. Of the original image G0 obtained by imaging the imaging target area 50 including the ejection path of the processing liquid L1 extending along the ejection direction AR1, the flow path (inner area 51) at the tip of the nozzle 251 and the ejection of the processing liquid L1. Based on the image of the route (front region 52), the classification of the closing speed of the on-off valves 72 and 72A is determined. When the closing speed of the on-off valves 72 and 72A is too high, the inner area 51 is almost free of the processing liquid L1. When the closing speed of the on-off valves 72 and 72A is too low, the inner area 51 There are droplets. Therefore, the determination unit 12 includes a classification to which the closing speeds of the on-off valves 72 and 72A belong based on images corresponding to two areas where the relationship between the closing speed of the on-off valve 72 and the detected state of the processing liquid L1 is different. Can be determined. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valves 72 and 72A.

  Further, according to the on-off valve closing speed determination device according to the first and second embodiments, the feature amount calculation unit 13 of the determination unit 12 includes the first image G1 corresponding to the internal region 51 of the tip portion of the nozzle 251; In each of the second image G2 corresponding to the front region 52 at the tip of the nozzle 251, a predetermined feature amount corresponding to the area of the image of the processing liquid L1 is calculated. The rule base determination unit 14 of the determination unit 12 determines the classification of the closing speeds of the on-off valves 72 and 72A by applying a predetermined determination rule K1 to the feature amount of the first image G1 and the feature amount of the second image G2. . Accordingly, the determination unit 12 detects the presence of the image of the processing liquid L1 individually for the first image G1 and the second image G2, and determines the classification of the closing speeds of the on-off valves 72 and 72A. It can be improved.

  Further, according to the on-off valve closing speed determination device according to the first and second embodiments, the end of the first image G1 region on the downstream side in the discharge direction AR1 of the processing liquid L1 is the tip of the nozzle 251, that is, the discharge. It is separated from the end of area B on the upstream side in the direction AR1 to the upstream side in the ejection direction AR1. Therefore, the determination unit 12 does not use the image in the image region extending from the end of the first image G1 region to the tip of the nozzle 251 on the downstream side in the discharge direction AR1 for determining the closing speed of the on-off valves 72 and 72A. The image region is a region in which it is difficult to specify the relationship between the presence of the processing liquid L1 and the closing speed of the on-off valves 72 and 72A. For this reason, when the said area | region is not used for determination, the precision of determination can further be improved.

  In addition, according to the on-off valve closing speed determination device according to the first and second embodiments, the determination rule K1 indicates that the on-off valves 72 and 72A have the closing speed if the inner region 51 at the tip of the nozzle 251 is not liquid-tight. If it is determined that the internal area 51 is in a liquid-tight state and the processing liquid L1 exists in the front area 52 extending from the tip of the nozzle 251, the closing speed of the on-off valves 72 and 72A is high. It is a rule that determines that it is too late. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valves 72 and 72A.

  Further, according to the on-off valve closing speed determination device according to the first and second embodiments, the classifier corresponds to a region including both the inner region 51 at the tip of the nozzle 251 and the front region 52 of the nozzle 251. It is generated by machine learning in advance using the sample image of the area C to be determined, and the determination unit 12 determines the classification of the closing speed of the on-off valves 72 and 72A by the classifier. Therefore, even when an image different from the sample image is given, the determination accuracy of the closing speed category can be improved.

  Further, according to the opening / closing valve closing speed determination device according to the first and second embodiments, the classifier includes the first of the area A corresponding to the internal area 51 in the image G0 in which the camera 65 images the imaging target area 50. It is generated by machine learning so as to determine the classification of the closing speeds of the on-off valves 72 and 72A based on the images G1 and the second images G2 of the area B corresponding to the front area 52. Since the classifier can learn the relationship between the image and the classification of the closing speeds of the on-off valves 72 and 72A for each of the first image G1 and the second image G2, the determination accuracy by the classifier can be improved.

  Further, according to the on-off valve closing speed determination device according to the first and second embodiments, the end of the first image G1 region on the downstream side in the discharge direction AR1 of the processing liquid L1 is the tip of the nozzle 251, that is, the discharge. It is separated from the end of area B on the upstream side in the direction AR1 to the upstream side in the ejection direction AR1. Therefore, the classifier of the determination unit 12 uses the image in the image region extending from the end of the first image G1 region to the tip of the nozzle 251 on the downstream side in the discharge direction AR1 to determine the closing speed classification of the on-off valves 72 and 72A. do not do. The image region is a region in which it is difficult to specify the relationship between the presence of the processing liquid L1 and the closing speed of the on-off valves 72 and 72A. For this reason, when the said area | region is not used for determination, the precision of determination can further be improved.

  In addition, according to the on / off valve closing speed determination device according to the first and second embodiments, an imaging target including the inner region 51 at the tip of the nozzle 251 and the front region 52 extending forward from the tip of the nozzle 251. Based on the time-series image of the region 50, the image generation unit 16 generates images of the internal region 51 at the tip of the nozzle 251 and the front region 52 of the nozzle 251, and the determination unit 12 opens and closes the open / close valve based on the image. 72, 72A closing speed classification is determined. Since the temporal change in the presence state of the treatment liquid L1 can be reflected in the determination result, the determination accuracy can be improved.

  In addition, according to the processing liquid discharge device according to the first and second embodiments configured as described above, even when the closing speed of the on-off valves 72 and 72A determined by the on-off valve closing speed determination device is not appropriate, the determination is made. Since the closing speed adjusting unit 17 adjusts the drive mechanism of the opening / closing valves 72 and 72A according to the classification of the closing speeds of the opening and closing valves 72 and 72A, it becomes easy to adjust the closing speed to an appropriate speed. Therefore, the start-up time of the processing liquid discharge apparatus can be shortened.

  Further, according to the processing liquid discharge apparatus according to the first embodiment, the on-off valve 72 is an air valve, and the drive mechanism 132 of the on-off valve 72 includes the electromagnetic valve 32 and the motor-driven needle valve 33. The opening degree of the motor-driven needle valve 33 can be adjusted so that the closing speed of the air valve (open / close valve 72) becomes an appropriate speed.

  Further, according to the processing liquid discharge apparatus according to the first embodiment, the delay time from when the electromagnetic valve 32 opens the flow path of the pipe 34 to when the air valve is actually closed is based on the output of the open / close sensor 73. The timing adjustment unit 18 adjusts the timing at which the electromagnetic valve 32 opens the flow path in the pipe 34 based on the measurement result so that the air valve is measured and closed at a predetermined timing. Therefore, even when the delay time varies for each substrate processing unit 1 due to variations in the diameter, length, etc. of the piping 74 that is the supply piping for the processing liquid L1 for each substrate processing unit 1, the air valve is It can be adjusted to close at a predetermined timing.

  Further, according to the on-off valve closing speed determination method according to the first and second embodiments as described above, the determination step includes the inside of the tip of the nozzle 251 in the original image G0 in which the imaging target region 50 is captured. Based on the images of the area 51 and the front area 52 of the nozzle 251, the classification of the closing speeds of the on-off valves 72 and 72A is determined. When the closing speed of the on-off valves 72 and 72A is too high, the inner area 51 is almost free of the processing liquid L1. When the closing speed of the on-off valves 72 and 72A is too low, the inner area 51 There are droplets. Therefore, in the determination step, the closing speeds of the on-off valves 72 and 72A belong based on images corresponding to two areas where the relationship between the closing speed of the on-off valves 72 and 72A and the detected state of the processing liquid L1 is different. A segment can be determined. Accordingly, it is possible to improve the determination accuracy of the closing speed classification of the on-off valves 72 and 72A.

  Further, according to the processing liquid L1 discharge method according to the first and second embodiments as described above, the determination was made even when the closing speeds of the on-off valves 72 and 72A determined in the on-off valve closing speed determination method are not appropriate. Since the drive mechanism of the on-off valves 72 and 72A is adjusted in the closing speed adjustment step according to the classification of the closing speeds of the on-off valves 72 and 72A, it becomes easy to adjust the closing speed to an appropriate speed.

  Although the invention has been shown and described in detail, the above description is illustrative in all aspects and not restrictive. Therefore, embodiments of the present invention can be modified or omitted as appropriate within the scope of the invention.

DESCRIPTION OF SYMBOLS 100 Substrate processing apparatus 200 Processing part 300 Closing speed determination apparatus 1 Substrate processing unit (droplet discharge apparatus)
251 Nozzle 12 Determination unit 72 On-off valve 65 Camera (imaging unit)
G0 image (original image)

Claims (28)

A processing liquid discharge device for discharging a processing liquid from a nozzle,
A determination unit for determining a closing speed of an on-off valve that opens and closes a processing liquid supply channel for supplying a processing liquid to the nozzle;
When the on-off valve closes the treatment liquid supply flow path and the discharge of the treatment liquid from the nozzle stops, the flow path at the tip of the nozzle and the discharge direction of the treatment liquid from the tip of the nozzle An imaging unit that images the treatment liquid ejection path extending forward from a direction different from the ejection direction;
With
The determination unit
By performing a predetermined determination process based on the image of the flow path at the tip of the nozzle and the image of the discharge path among the original images in which the imaging unit images the flow path at the tip of the nozzle and the discharge path, A treatment liquid discharge device for determining a classification of a closing speed of the on-off valve, whether the closing speed of the on-off valve is appropriate, slower or faster than an appropriate speed. The processing liquid discharge device according to claim 1,
The determination unit
For each of the first image of the first image region corresponding to the flow path at the tip of the nozzle and the second image of the second image region corresponding to the ejection path in the original image, the first image A feature amount calculation unit that calculates a predetermined feature amount according to the area of the image of the processing liquid in each of the image and the second image;
A rule base determination unit that determines the classification of the closing speed of the on-off valve by applying a predetermined determination rule to the feature amount of the first image and the feature amount of the second image;
A treatment liquid discharge apparatus comprising: The processing liquid discharge apparatus according to claim 2,
The processing liquid ejection apparatus, wherein an end of the first image area on the downstream side in the processing liquid ejection direction is separated from the nozzle tip to the upstream side in the processing liquid ejection direction. The processing liquid discharge apparatus according to claim 2 or 3, wherein
The determination rule is:
If the flow path at the tip of the nozzle is not liquid-tight, it is determined that the closing speed of the on-off valve is too fast, the flow path at the tip of the nozzle is liquid-tight, and the discharge path A treatment liquid discharge apparatus according to a rule that determines that the closing speed of the on-off valve is too slow if the treatment liquid is present. The processing liquid discharge device according to claim 1,
The determination unit
Based on the image of the flow path at the tip of the nozzle and the discharge path in the original image, the on-off valve is closed as to whether the on-off valve closing speed is appropriate or slower than the appropriate speed. A classifier for determining a classification of speed, and determining a classification of a closing speed of the on-off valve by the classifier;
The classifier is
A processing liquid ejection apparatus, which is generated in advance by machine learning using a sample image of a flow path at the tip of the nozzle and an image of the ejection path in the original image. The processing liquid discharge apparatus according to claim 5,
The classifier is
Opening and closing based on respective images of a first image in a first image region corresponding to the flow path at the tip of the nozzle and a second image in a second image region corresponding to the ejection path in the original image. Determine the category of valve closing speed,
The classifier is
A treatment liquid ejection apparatus, which is generated in advance by machine learning using the sample images of the first image and the second image. The processing liquid discharge apparatus according to claim 6,
The processing liquid ejection apparatus, wherein an end of the first image area on the downstream side in the processing liquid ejection direction is separated from the nozzle tip to the upstream side in the processing liquid ejection direction. The processing liquid discharge apparatus according to any one of claims 1 to 7,
The imaging unit
After the on-off valve closes the treatment liquid supply flow path and the discharge of the treatment liquid from the nozzle stops, the flow path at the tip of the nozzle and the discharge direction of the treatment liquid from the tip of the nozzle And sequentially imaging the treatment liquid discharge path extending forward along the line,
The treatment liquid discharge device is
An image generation unit configured to generate a flow path of the nozzle tip and a derivative image of the discharge path based on a time-series image obtained by imaging the flow path of the nozzle tip and the discharge path; Prepared,
The determination unit is a processing liquid ejection device that determines a classification of a closing speed of the on-off valve based on the derivative image generated by the image generation unit. The processing liquid discharge apparatus according to any one of claims 1 to 8,
A pipe that connects the processing liquid supply source and the nozzle, and guides the processing liquid supplied by the processing liquid supply source to the nozzle;
A drive mechanism for causing the on-off valve to perform an opening / closing operation;
Further comprising
The on-off valve is provided in the course of the piping,
The treatment liquid discharge device is
A closing speed adjusting unit that adjusts the operation of the drive mechanism so that the closing speed becomes an appropriate speed based on the classification of the closing speed of the on-off valve determined by the determining unit;
A processing liquid discharge apparatus further comprising: The processing liquid discharge apparatus according to claim 9,
The on-off valve is an air valve that is supplied with a predetermined gas and performs a closing operation at a closing speed according to a supply flow rate of the gas,
The drive mechanism is
A gas supply source for supplying the gas to the air valve;
A gas supply pipe connecting the gas supply source and the air valve;
An electromagnetic valve that is provided in the gas supply pipe and opens and closes the flow path of the gas in the gas supply pipe;
A motor-driven needle valve that is provided in the gas supply pipe and controls a flow rate of the gas flowing in the gas supply pipe according to an opening;
The closing speed adjuster is
A processing liquid discharge device that adjusts an opening degree of the motor-driven needle valve so that a closing speed of the air valve becomes an appropriate speed. The processing liquid discharge apparatus according to claim 9,
The on-off valve is an air valve that is supplied with a predetermined gas and performs a closing operation at a closing speed according to a supply flow rate of the gas,
The drive mechanism is
A gas supply source for supplying the gas to the air valve;
A gas supply pipe connecting the gas supply source and the air valve;
An electropneumatic regulator that is provided in the gas supply pipe and controls the opening and closing and flow rate of the gas flow path that flows in the gas supply pipe according to a voltage;
With
The closing speed adjuster is
A treatment liquid discharge device for adjusting an opening degree of the electropneumatic regulator so that a closing speed of the air valve becomes an appropriate speed. The processing liquid discharge apparatus according to claim 9,
The on-off valve is a motor valve that includes a valve body provided in the course of the piping, and a motor that opens and closes the valve body, and that opens and closes at a speed according to the number of rotations of the motor,
The drive mechanism includes the motor,
The closing speed adjuster is
A treatment liquid discharge device that adjusts the operation of the motor so that the closing speed of the motor valve becomes an appropriate speed. The processing liquid discharge apparatus according to claim 10,
An open / close sensor for detecting opening and closing of the air valve;
A delay time from when the solenoid valve performs an operation to close the air valve to when the air valve is actually closed is measured based on an output of the open / close sensor, and the air valve is closed at a predetermined timing. As described above, a timing adjustment unit that adjusts the timing at which the solenoid valve performs an operation of closing the air valve based on the measurement result;
A processing liquid discharge apparatus further comprising: A determination device for determining a stop state of a processing liquid discharged from a nozzle,
When an on-off valve that opens and closes a processing liquid supply channel for supplying a processing liquid to the nozzle closes the processing liquid supply channel and stops discharging the processing liquid from the nozzle, the flow of the tip of the nozzle is stopped. An imaging unit that images a path and a discharge path of the processing liquid extending forward along the discharge direction of the processing liquid from the tip of the nozzle from a direction different from the discharge direction;
By performing a predetermined determination process based on the image of the flow path at the tip of the nozzle and the image of the discharge path among the original images in which the imaging unit images the flow path at the tip of the nozzle and the discharge path, A determination unit for determining a classification of the closing speed of the on-off valve such as whether the closing speed of the on-off valve is appropriate or slower or faster than an appropriate speed;
A determination device comprising: A processing liquid discharge method for discharging a processing liquid from a nozzle,
A determination step of determining a closing speed of an on-off valve that opens and closes a processing liquid supply channel for supplying a processing liquid to the nozzle;
When the on-off valve closes the treatment liquid supply flow path and the discharge of the treatment liquid from the nozzle stops, the flow path at the tip of the nozzle and the discharge direction of the treatment liquid from the tip of the nozzle Imaging step of imaging the processing liquid discharge path extending forward,
With
The determination step includes
By performing a predetermined determination process based on the image of the flow path at the tip of the nozzle and the image of the discharge path among the original images obtained by imaging the flow path at the tip of the nozzle and the discharge path in the imaging step. A processing liquid discharge method for determining a classification of the closing speed of the on-off valve, whether the closing speed of the on-off valve is appropriate, slower or faster than an appropriate speed. The processing liquid discharge method according to claim 15,
The determination step includes
For each of the first image of the first image region corresponding to the flow path at the tip of the nozzle and the second image of the second image region corresponding to the ejection path in the original image, the first image A feature amount calculating step of calculating a predetermined feature amount according to the area of the image of the processing liquid in each of the image and the second image;
A rule base determination step of determining the classification of the closing speed of the on-off valve by applying a predetermined determination rule to the feature amount of the first image and the feature amount of the second image;
A processing liquid discharge method comprising: The processing liquid discharge method according to claim 16,
The processing liquid discharge method, wherein an end portion of the first image area on the downstream side in the discharge direction of the processing liquid is separated from the tip of the nozzle to the upstream side in the discharge direction of the processing liquid. The processing liquid discharge method according to claim 16 or 17,
The determination rule is:
If the flow path at the nozzle tip is not in a liquid-tight state, it is determined that the closing speed of the on-off valve is too high, the flow path at the nozzle tip is in a liquid-tight state, and the process is performed in the discharge path. A treatment liquid discharge method according to a rule for determining that the closing speed of the on-off valve is too slow if liquid is present. The processing liquid discharge method according to claim 15,
The determination step includes
Based on the image of the flow path at the tip of the nozzle and the discharge path in the original image, the on-off valve is closed as to whether the on-off valve closing speed is appropriate or slower than the appropriate speed. A step of determining a classification of a closing speed of the on-off valve by a classifier for determining a classification of the speed;
The classifier is
A processing liquid discharge method, which is generated by machine learning in advance using a sample image of a flow path at the tip of the nozzle and an image of the discharge path in the original image. The processing liquid discharge method according to claim 19,
The classifier is
Opening and closing based on respective images of a first image in a first image region corresponding to the flow path at the tip of the nozzle and a second image in a second image region corresponding to the ejection path in the original image. Determine the category of valve closing speed,
The classifier is
A processing liquid ejection method, which is generated in advance by machine learning using the sample images of the first image and the second image. The processing liquid discharge method according to claim 20,
The processing liquid discharge method, wherein an end portion of the first image area on the downstream side in the discharge direction of the processing liquid is separated from the tip of the nozzle to the upstream side in the discharge direction of the processing liquid. The processing liquid discharge method according to any one of claims 15 to 21,
The imaging step includes
After the on-off valve closes the treatment liquid supply flow path and the discharge of the treatment liquid from the nozzle stops, the flow path at the tip of the nozzle and the discharge direction of the treatment liquid from the tip of the nozzle A step of sequentially imaging the processing liquid discharge path extending forward along the time axis,
The treatment liquid discharge method includes:
An image generation step of generating a flow path image of the nozzle tip and a derivative image of the discharge path based on a time-series image obtained by imaging the flow path of the nozzle tip and the discharge path in the imaging step; Prepared,
The processing liquid ejection method, wherein the determination step is a step of determining a classification of a closing speed of the on-off valve based on the derivative image generated in the image generation step. A treatment liquid discharge method in a treatment liquid discharge apparatus,
The processing liquid discharge method according to any one of claims 15 to 22,
With
The treatment liquid discharge device is
A pipe that connects the processing liquid supply source and the nozzle, and guides the processing liquid supplied by the processing liquid supply source to the nozzle;
A drive mechanism for causing the on-off valve to perform an opening / closing operation;
With
The on-off valve is provided in the course of the piping,
The treatment liquid discharge method is
A closing speed adjusting step of adjusting the operation of the drive mechanism so that the closing speed becomes an appropriate speed based on the classification of the closing speed of the on-off valve determined in the determining step;
A treatment liquid discharge method, further comprising: The processing liquid discharge method according to claim 23,
The on-off valve is an air valve that is supplied with a predetermined gas and performs a closing operation at a closing speed according to a supply flow rate of the gas,
The drive mechanism is
A gas supply source for supplying the gas to the air valve;
A gas supply pipe connecting the gas supply source and the air valve;
An electromagnetic valve that is provided in the gas supply pipe and opens and closes the flow path of the gas in the gas supply pipe;
A motor-driven needle valve that is provided in the gas supply pipe and controls a flow rate of the gas flowing in the gas supply pipe according to an opening;
The closing speed adjusting step includes
A treatment liquid discharge method, which is a step of adjusting an opening degree of the motor-driven needle valve so that a closing speed of the air valve becomes an appropriate speed. The processing liquid discharge method according to claim 23,
The on-off valve is an air valve that is supplied with a predetermined gas and performs a closing operation at a closing speed according to a supply flow rate of the gas,
The drive mechanism is
A gas supply source for supplying the gas to the air valve;
A gas supply pipe connecting the gas supply source and the air valve;
An electropneumatic regulator that is provided in the gas supply pipe and controls the opening and closing and flow rate of the gas flow path that flows in the gas supply pipe according to a voltage;
With
The closing speed adjusting step includes
A treatment liquid discharge method, which is a step of adjusting an opening degree of the electropneumatic regulator so that a closing speed of the air valve becomes an appropriate speed. The processing liquid discharge method according to claim 23,
The on-off valve is a motor valve that includes a valve body provided in the course of the piping, and a motor that opens and closes the valve body, and that opens and closes at a speed according to the number of rotations of the motor,
The drive mechanism includes the motor,
The closing speed adjusting step includes
A treatment liquid discharge method, which is a step of adjusting an operation of the motor so that a closing speed of the motor valve becomes an appropriate speed. A processing liquid discharge method according to claim 24,
An opening / closing detection step for detecting opening / closing of the air valve;
Measure the delay time from when the solenoid valve performs the operation of closing the air valve until the air valve is actually closed based on the opening of the air valve detected in the open / close detection step, A timing adjustment step of adjusting a timing at which the electromagnetic valve performs an operation of closing the air valve based on a result of the measurement so that the air valve is closed at a predetermined timing;
A treatment liquid discharge method, further comprising: A determination method for determining a stop state of a processing liquid discharged from a nozzle,
When an on-off valve that opens and closes a processing liquid supply channel for supplying a processing liquid to the nozzle closes the processing liquid supply channel and stops discharging the processing liquid from the nozzle, the flow of the tip of the nozzle is stopped. An imaging step of imaging a path and a discharge path of the processing liquid extending forward along the discharge direction of the processing liquid from the tip of the nozzle from a direction different from the discharge direction;
By performing a predetermined determination process based on the image of the flow path at the tip of the nozzle and the image of the discharge path among the original images obtained by imaging the flow path at the tip of the nozzle and the discharge path in the imaging step, A determination step of determining a classification of the closing speed of the on-off valve, whether the closing speed of the on-off valve is appropriate, slower or faster than an appropriate speed;
A determination method comprising:

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