JP2019193105A - Tuning-fork type crystal element and crystal device using the tuning-fork type crystal element - Google Patents

Abstract

To provide a tuning-fork type crystal element that can prevent breakdown of the balance between the right and left of a crystal vibration part and reduce degradation of an equivalent series resistance.SOLUTION: A tuning-fork type crystal element 120 comprises: a rectangular crystal base 121 that has an XY'Z' orthogonal coordinate system in a crystal axis and has a thickness in a direction along a Z'-axis; a pair of crystal vibration parts 123 that extend from a side face of the crystal base 121 along a Y'-axis; excitation electrodes 125, 126 that are provided on principal faces and side faces of the pair of crystal vibration parts 123; and electrodes for adjustment 129 that are provided on both the principal faces of the pair of crystal vibration parts 123.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a tuning fork type crystal element used for electronic equipment and the like and a crystal device using the tuning fork type crystal element.

  The crystal device generates a specific frequency by using the piezoelectric effect of the tuning fork type crystal element. For example, there is provided a crystal device including a substrate, a package having a frame on the upper surface of the substrate to provide a recess, and a tuning fork type crystal element mounted on an electrode pad provided on the upper surface of the substrate. It is known (for example, refer to Patent Document 1 below).

JP2012-119920A

  Since the tuning fork type crystal element described above is remarkably miniaturized, there is a possibility that the equivalent series resistance may be deteriorated due to the balance between the left and right of the pair of crystal vibrating parts being lost.

  The present disclosure has been made in view of the above problems, and provides a tuning fork type quartz element that can prevent the balance between the left and right sides of the quartz crystal vibrating part from being lost and can reduce the deterioration of the equivalent series resistance. Is an issue.

  A tuning fork type crystal element according to one aspect of the present disclosure has an XY′Z ′ orthogonal coordinate system in a crystal axis, and has a rectangular crystal base having a thickness in a direction along the Z ′ axis, and a side surface of the crystal base. A pair of crystal vibrating parts extending along the Y ′ axis, excitation electrodes provided on the main surface and side surfaces of the pair of crystal vibrating parts, and adjustment electrodes provided on both main surfaces of the pair of crystal vibrating parts And.

  A tuning fork type crystal element according to one aspect of the present disclosure has an XY′Z ′ orthogonal coordinate system in a crystal axis, and has a rectangular crystal base having a thickness in a direction along the Z ′ axis, and a side surface of the crystal base. A pair of crystal vibrating parts extending along the Y ′ axis, excitation electrodes provided on the main surface and side surfaces of the pair of crystal vibrating parts, and adjustment electrodes provided on both main surfaces of the pair of crystal vibrating parts And. Such a tuning-fork type quartz element includes an adjustment electrode provided on both main surfaces of the pair of quartz vibrating parts, so that the balance between the left and right sides of the quartz vibrating part is prevented from being lost, It is possible to reduce the deterioration of the equivalent series resistance.

It is a perspective view which shows the tuning fork type crystal element which concerns on 1st embodiment. (A) It is the top view seen from the upper surface which shows the tuning fork type crystal element which concerns on 1st embodiment, (b) It is the top view seen from the lower surface which shows the tuning fork type crystal element which concerns on 1st embodiment. FIG. 3 is an enlarged view of a portion A in FIG. (A) It is a top view which shows the crystal piece of the tuning fork type | mold crystal element which concerns on 1st embodiment, (b) It is the X partial enlarged view of Fig.4 (a). It is a disassembled perspective view which shows the crystal device which concerns on 2nd embodiment. It is BB sectional drawing of FIG.

(First Embodiment) As shown in FIG. 1, the tuning fork type crystal element 120 according to the first embodiment is configured by a crystal piece including a crystal base 121, a balancing unit 122, and a crystal vibrating unit 123. As shown in FIG. 2, the tuning fork crystal element 120 includes excitation electrodes 125 a, 125 b, 126 a and 126 b, extraction electrodes 127 a and 127 b, a weight portion 128, and a frequency adjustment electrode 129.

  The crystal base 121 supports a crystal vibrating part 123 and a balance part 122, which will be described later, and holds and fixes the tuning fork type crystal element 120 on the package 110. When the crystal base 121 is an orthogonal coordinate system in which the electrical axis is the X axis, the mechanical axis is the Y axis, and the optical axis is the Z axis, the crystal axis 121 is within a range of −5 ° to + 5 ° around the X axis. The plate is a substantially rectangular flat plate in a plan view in which the direction of the Z ′ axis rotated in the above direction is the thickness direction.

  The balancing unit 122 is for adjusting the imbalance between the left and right weights of the quartz crystal vibrating unit 123 generated when the tuning fork type crystal element 120 is formed, depending on the position where the balancing unit 122 is formed. In addition, the balancer 122 can further adjust the balance between the left and right weights of the crystal vibrating part 123 according to the position where the crystal vibrating part 123 is formed, so that vibration leakage can be further suppressed.

  Further, as shown in FIG. 3, the balance portion 122 is provided so as to extend in the Y′-axis direction from the formation surface SP of the crystal base portion 121. The center point P2 of the balance portion 122 in the X-axis direction passes through the center point P1 of the length in the X-axis direction between the pair of crystal vibrating portions 123, and is relative to a reference straight line L1 parallel to the Y′-axis direction. And located in the + X-axis direction. Since the balance portion 122 is arranged so as to be separated in the + X-axis direction with respect to the reference straight line L1 in this way, the left and right weight imbalance of the crystal vibrating portion 123 can be further adjusted. It is further possible to lower the equivalent series resistance value of the crystal element 120.

  In addition, a reference straight line L2 that passes through a center point P2 between a first protrusion E1 and a second protrusion E2, which will be described later, and is parallel to the Y′-axis direction is 0.5 It is provided at a position separated by ˜1.5 μm. By doing so, the reference straight line L2 passing through the center point P2 between the first protrusion E1 and the second protrusion E2 and parallel to the Y′-axis direction is 0 in the + X-axis direction with respect to the reference straight line L1. .5 to 1.5 μm away from each other, it is possible to further adjust the left and right weight imbalance of the crystal vibrating part 123, so that the equivalent series resistance value of the tuning fork type crystal element 120 is lowered. Is possible.

  The balance part 122 is configured by at least two protrusions E. As shown in FIG. 3, the balancing portion 122 is provided with a first protruding portion E1, a second protruding portion E2, and a protruding portion E of a third protruding portion E3. The first protrusion E1 is provided so as to be adjacent to the first crystal vibrating part 123a, and is provided so as to extend in the same direction as the crystal vibrating part 123.

  Further, an inclined surface is formed from the root of the first crystal vibrating portion 123a to the first protruding portion E1. The second protruding portion E2 is provided so as to be adjacent to the first protruding portion E1, and is provided so as to extend in the same direction as the crystal vibrating portion 123. The third protrusion E3 is provided so as to be positioned between the second protrusion E2 and the second crystal vibrating part 123b, and is provided so as to extend in the same direction as the crystal vibrating part 123.

Thus, since the balance part 122 is constituted by at least two or more protrusions E, the first notch part M1 or the second notch part M2 to be described later can be reliably formed. The excitation electrode 126b on the side surface of the one crystal vibrating part 123a and the second crystal vibrating part 12
It is possible to reduce a short circuit with the excitation electrode 126a provided on the side surface 3b.

  When the excitation electrode 126 is formed on the side surface of the crystal oscillating portion 123 composed of the first crystal oscillating portion 123a and the second crystal oscillating portion 123b by the sputtering technique and the photolithography technique, the first insertion portion M1 is formed. This is to reduce a short circuit between the excitation electrode 126b on the side surface of the one crystal vibrating portion 123a and the excitation electrode 126a provided on the side surface of the second crystal vibrating portion 123b. The first recess M1 is provided between the first protrusion E1 and the second protrusion E2, and the first recess M1 penetrates in the thickness direction of the balance portion 122. Further, the length of the first insertion portion M1 in the Y-axis direction may be any length as long as it is formed between the tip side and the boundary of the crystal base 121.

  The second cut portion M2 is provided between the second protrusion portion E2 and the third protrusion portion E3, and the second cut portion M2 penetrates in the Z′-axis direction, which is the thickness direction of the balance portion 122. ing. Further, the length of the second cut portion M2 in the Y axis direction is provided to be shorter than the length of the first cut portion M1 in the Y axis direction. Further, the length of the second cut portion M2 in the Y-axis direction may be any length as long as it is formed between the tip end side of the third protrusion E3 and the boundary of the crystal base 121.

  The first residue portion R1 is formed in the vicinity of the protruding portion E, and between the first crystal vibrating portion 123a and the first protruding portion E1, and between the second crystal vibrating portion 123b and the third protruding portion E3. Is formed. Since the first residue portion R1 is formed, the left and right weight imbalance of the first crystal vibrating portion 123a and the second crystal vibrating portion 123b can be adjusted, so that the equivalent series resistance of the tuning fork type crystal element 120 can be adjusted. The value can be lowered.

  Convex portions T are provided so as to extend in the same direction as the quartz crystal vibrating portion 123 with respect to the formation surface of the quartz crystal base portion 121 where the quartz crystal vibrating portion 123 extends. In this way, by adjusting the weight imbalance between the left and right weights of the crystal vibrating portion 123 generated when the tuning fork type crystal element 120 is excited by the convex portion T, vibration leakage can be suppressed, and the equivalent series resistance is deteriorated. Can be reduced.

  As shown in FIG. 4, the convex portion T includes a plane S1 connected to the outer side surface of the crystal base 121 and an inclined surface S2 connected to the plane S1 and formed toward the formation surface SP. The inclined surface S2 is provided so as to be inclined from the plane S1 provided so as to extend from the outer side surface of the crystal base 121 toward the formation surface SP. By providing such an inclined surface S2 on the convex portion T, the balance of the left and right weights by the convex portion T can be further adjusted, so that vibration leakage can be further suppressed.

  Further, as shown in FIG. 4, the convex portion T includes a second residue portion R <b> 2 provided between the inclined surface S <b> 2 and the outer side surface of the crystal vibrating portion 123. As described above, the second residue R2 is provided so that the thickness gradually decreases from the inclined surface S2 toward the outer side surface of the quartz crystal vibrating portion 123, so that vibration leakage from the quartz crystal vibrating portion 123 is reduced to the second. The residue R2 is gradually hindered. Therefore, it is possible to suppress the transmission of vibration leakage from the crystal vibrating portion 123 to the crystal base portion 121.

As shown in FIG. 4B, the angle α formed by the inclined surface S2 and the plane of the formation surface SP when viewed in plan is 50 to 70 degrees. The angle α of the inclined surface S2 is satisfactorily etched when the angle α is in the range of 50 ° to 70 °, and particularly good within the range of 55 ° to 65 °. On the other hand, when the angle α of the inclined surface S is less than 50 degrees, the thickness of the second residue portion R2 becomes too thin, so that the second residue portion R2 is chipped and left and right of the crystal vibrating portion 123. In some cases, the leakage of vibration may occur due to the loss of the weight balance. On the other hand, if the angle α of the inclined surface S2 is larger than 70 degrees, the thickness of the second residue portion R2 becomes too thick, so that the left and right weight balance of the crystal vibrating portion 123 is lost. As a result, vibration leakage may occur. In this way, by setting the angle α of the inclined surface S2 within the range of 50 degrees to 70 degrees, the thickness in the Z-axis direction that is the crystal axis of the second residue portion R2 can be reduced. The impact on the can be very stable.

  The crystal vibrating portion 123 is, for example, for exciting vibrations at a desired frequency by forming excitation electrodes 125 and 126 having a desired pattern on the surface and applying a potential to the excitation electrodes 125 and 126. is there. The crystal vibrating part 123 is composed of a vibrating arm part 124 and a weight part 128. A hammer head-shaped weight portion 128 is provided at the distal end portion of the vibrating arm portion 124, that is, at the end portion of the vibrating arm portion 124 opposite to the crystal base portion 121.

  In addition, the quartz crystal vibrating unit 123 includes a first quartz crystal vibrating unit 123a and a second quartz crystal vibrating unit 123b. The first crystal vibrating part 123a and the second crystal vibrating part 123b are extended from one side of the crystal base 121 in parallel to the Y′-axis direction. The vibrating arm portion 124 includes a first vibrating arm portion 124a and a second vibrating arm portion 124b. The crystal piece constituting the tuning fork type crystal element 120 is integrally formed with the crystal base part 121, the balance part 122, and the crystal vibrating part 123 to form a tuning fork shape, and is manufactured by a photolithography technique and a chemical etching technique. The

  As shown in FIG. 2, the excitation electrode 125a is provided on the front and back main surfaces of the first vibrating arm portion 124a of the first crystal vibrating portion 123a. In addition, the excitation electrode 126b is provided on both opposite side surfaces of the first vibrating arm portion 124a of the first crystal vibrating portion 123a. One extraction electrode 127 a is electrically connected to the excitation electrodes 125 a and 126 a and is provided on the front and back main surfaces of the crystal base 121.

  In addition, as shown in FIGS. 1 and 2, the excitation electrode 125b is provided on the front and back main surfaces of the second vibrating arm portion 124b of the second crystal vibrating portion 123b. In addition, the excitation electrode 126a is provided on both opposite side surfaces of the second vibrating arm portion 124b of the second crystal vibrating portion 123b. The other lead electrode 127 b is electrically connected to the excitation electrodes 125 b and 126 b and is provided on the front and back main surfaces of the crystal base 121.

  The extraction electrode 127 is electrically connected to the excitation electrodes 125 and 126 and is used when the tuning fork type crystal element 120 is mounted. The lead electrode 127 is provided with a groove G. In this way, the leakage vibration transmitted from the crystal vibrating part 123 to the extraction electrode 127 is prevented by the groove part G, so that the equivalent series resistance is deteriorated when the tuning fork type crystal element 120 is mounted on the package 110 described later. That can be suppressed.

  The weight portion 128 is provided in the form of a hammerhead at the end of the crystal vibrating portion 123 on the opposite side to the crystal base portion 121. The weight portion 128 is for adjusting the frequency of the bending vibration generated in the crystal vibration portion 123. Specifically, by providing the weight portion 128, it is possible to approach the state in which the weight is provided on the distal end side of the crystal vibrating portion 123. Therefore, the frequency of the flexural vibration generated in the crystal vibrating portion 123 does not have the weight portion 128. The frequency of the bending vibration generated in the crystal vibration unit 123 is adjusted to a desired frequency. The weight portion 128 includes a first weight portion 128a provided at the distal end portion of the first crystal vibrating portion 123a and a second weight portion 128b provided at the distal end portion of the second crystal vibrating portion 123b. Has been.

The third cut portion M3 is provided in the weight portion 128 to increase the surface area of the weight portion 128 and increase the surface area of an adjustment electrode 129 described later formed in the weight portion 128. Further, the third cut portion M3 is provided along the extending direction of the crystal vibrating portion 123 from the side located on the crystal base 121 side of the weight portion 128 when viewed in plan. By doing so, the residue formed near the boundary between the vibrating arm portion 124 and the weight portion 128 is less likely to be formed by the third notch portion M3, so that the shape of the tuning fork type crystal element 120 can be maintained. it can. In addition, by forming the third cut portion M3 on the crystal base 121 side of the weight portion 128 in this way, the third cut portion M3 is not scraped off by the laser when the adjustment electrode 129 is removed by the laser. The weight of the weight portion 128 can be further finely adjusted.

  The adjustment electrode 129 is for adjusting the frequency of the bending vibration generated in the crystal vibration unit 123 to be a desired frequency by cutting with a laser or the like. The adjustment electrode 129 includes a first adjustment electrode 129a and a second adjustment electrode 129b.

  The first adjustment electrode 129a is provided on both main surfaces of the first weight portion 128a, and the second adjustment electrode 129b is provided on both main surfaces of the second weight portion 128b. In this way, when the tuning fork type crystal element 120 is excited, the adjustment electrodes 129 are provided on both main surfaces, so that the imbalance between the left and right weights of the generated crystal vibrating part 123 depends on the weight of the adjustment electrode 129. By adjusting, vibration leakage can be suppressed, and deterioration of equivalent series resistance can be reduced.

  The first adjustment electrode 129a is provided at the tip of both sides of the first weight portion 128a, and the second adjustment electrode 129b is provided at the tip of both sides of the second weight 128b. In this way, when the tuning fork type crystal element 120 is excited, the adjustment electrodes 129 are provided on both side surfaces of the weight portion 128, so that the left and right weight imbalance of the generated crystal vibration portion 123 can be reduced. It can be further adjusted by the weight. By doing in this way, the vibration leakage of the tuning fork type crystal element 120 can be further suppressed, and the deterioration of the equivalent series resistance can be further reduced.

  The tuning fork type crystal element 120 can adjust the frequency value to a desired value by increasing or decreasing the amount of metal constituting the adjustment electrode 129. The excitation electrodes 125b and 126b and the first adjustment electrode 129a are electrically connected by an extraction electrode 127b provided on the surface of the crystal piece as shown in FIG. The excitation electrodes 125a and 126a and the second adjustment electrode 129b are electrically connected by a lead electrode 127a provided on the surface of the crystal base 121.

  When the tuning fork type crystal element 120 is vibrated, an alternating voltage is applied to the extraction electrodes 127a and 127b. When an electrical state after application is instantaneously captured, the excitation electrode 126b of the second crystal vibrating part 123b has a + (plus) potential, the excitation electrode 126a has a-(minus) potential, and an electric field is generated from + to-. . On the other hand, the excitation electrode 126 of the first crystal oscillating portion 123a at this time has a polarity opposite to the polarity generated in the excitation electrode 126 of the second crystal oscillating portion 123b. These applied electric fields cause an expansion / contraction phenomenon in the first crystal oscillating portion 123a and the second crystal oscillating portion 123b, and a bending vibration having a resonance frequency set in each crystal oscillating portion 123 is obtained.

In the case where the long side dimension when viewed in plan is 0.8 to 1.2 mm and the short side dimension when viewed in plan is 0.2 to 0.7 mm, the crystal base 121, The crystal vibration unit 123 will be described. The long side dimension when the crystal base 121 is viewed in plan is 0.2 to 0.4 mm,
The short side dimension when viewed from above is 0.2 to 0.4 mm. The long side dimension when the crystal vibrating part 123 is viewed in plan is 0.6 to 0.9 mm, and the short side dimension when viewed in plan is 0.03 to 0.2 mm.

Here, the operation of the tuning fork type crystal element 120 will be described. In the tuning-fork type crystal element 120, when an alternating voltage from the outside is applied from the extraction electrode 127 to the crystal vibration unit 123 via the excitation electrodes 125 and 126, the crystal vibration unit 123 excites in a predetermined vibration mode and frequency. It is like that.

  Here, a manufacturing method of the tuning fork type crystal element 120 will be described. First, the tuning fork type crystal element 120 is cut from the artificial crystalline lens at a predetermined cut angle, and the crystal base 121, the crystal vibrating part 123, and the crystal support part 124 are formed on both main surfaces of the crystal piece by photolithography. Thereafter, the excitation electrodes 125 and 126 and the extraction electrode 127 are formed by depositing a metal film by a photolithography technique, a vapor deposition technique, or a sputtering technique.

  The tuning fork type crystal element 120 according to the present embodiment has an XY′Z ′ orthogonal coordinate system in the crystal axis, and has a rectangular crystal base 121 having a thickness in the direction along the Z ′ axis, and side surfaces of the crystal base 121. A pair of crystal vibrating parts 123 extending along the Y ′ axis, excitation electrodes 125 and 126 provided on the main surface and side surfaces of the pair of crystal vibrating parts 123, and both main surfaces of the pair of crystal vibrating parts 123 And an adjustment electrode 129 provided on the substrate. Such a tuning-fork type quartz crystal element 120 includes the adjustment electrodes 129 provided on both main surfaces of the pair of quartz crystal vibrating parts 123, so that the left and right balance of the crystal vibrating part 123 is lost. And the deterioration of the equivalent series resistance can be reduced.

  Further, in the tuning fork type crystal element 120 according to the present embodiment, the crystal vibrating portion 123 is configured by the vibrating arm portion 122 and the weight portion 128, and the adjustment electrode 129 is provided on the weight portion 128. Such a tuning-fork type crystal element 120 can be brought close to a state in which a weight is provided on the tip side of the crystal vibrating part 123, and therefore the frequency of bending vibration generated in the crystal vibrating part 123 is compared with the case without the weight part 128. Thus, the frequency of the bending vibration generated in the crystal vibrating section 123 can be finely adjusted so as to be a desired frequency.

  In the tuning fork type crystal element 120 according to this embodiment, the adjustment electrode 129 is also provided on the side surface of the weight portion 128. In such a tuning fork type crystal element 120, the adjustment electrode 129 is also formed on the side surface of the weight portion 128, so that the left and right balance of the crystal vibrating portion 123 can be adjusted, thereby reducing the deterioration of the equivalent series resistance. It becomes possible to do.

  Further, the tuning fork type crystal element 120 according to the present embodiment includes a balance portion 122 extending along the Y ′ axis from the side surface of the crystal base portion 121 between the pair of crystal vibrating portions 123, and the balance portion 122. The center point of the length in the X-axis direction passes through the center point of the length in the X-axis direction between the pair of crystal vibrating portions 123, and the balance portion 122 with respect to the reference straight line L1 parallel to the Y′-axis direction The center of the length in the X-axis direction is located in the + X-axis direction. Thus, by adjusting the unbalance of the left and right weights of the crystal vibrating part 123 generated when the tuning fork type crystal element 120 is excited, the vibration leakage can be suppressed and the equivalent series can be suppressed. It becomes possible to reduce deterioration of resistance.

Second Embodiment A crystal device according to a second embodiment includes a package 110 and a tuning fork type crystal element 120 mounted on the upper surface of the package 110 as shown in FIGS. 5 and 6. Yes. The package 110 includes a substrate 110a and a frame 110b. A recess K1 is formed by the substrate 110a and the frame 110b. Further, the tuning fork type crystal element 120 is provided with a crystal base part 121 and a crystal vibration part 123. Such a crystal device is used to output a reference signal used in an electronic device or the like.

The substrate 110a has a rectangular shape, and functions as a mounting member for mounting the tuning fork type crystal element 120 on the upper surface. An electrode pad 111 for mounting the tuning fork type crystal element 120 is provided on the upper surface of the substrate 110a. A first electrode pad 111a and a second electrode pad 111b for joining the tuning fork type crystal element 120 are provided along one side of the long side of the substrate 110a.

  The substrate 110a is made of an insulating layer made of a ceramic material such as alumina ceramic or glass-ceramic. The substrate 110a may be one using an insulating layer or may be a laminate of a plurality of insulating layers. On the surface and inside of the substrate 110a, there are provided wiring patterns and via conductors for electrically connecting the electrode pads 111 provided on the upper surface and the external terminals 112 provided on the lower surface of the substrate 110a.

  The frame body 110b is disposed along the outer peripheral edge of the upper surface of the substrate 110a, and is for forming the recess K1 on the upper surface of the substrate 110a. The opening of the recess K1 has a rectangular shape when viewed in plan. The frame 110b is made of a ceramic material such as alumina ceramics or glass-ceramics, and is formed integrally with the substrate 110a. The recess K1 is for mounting a tuning fork type crystal element 120 described later.

  External terminals 112 are provided at the four corners of the lower surface of the substrate 110a. In addition, two of the four external terminals 112 are electrically connected to the tuning fork type crystal element 120. The first external terminal 112a and the second external terminal 112b that are electrically connected to the tuning fork type crystal element 120 are provided so as to be located diagonally on the lower surface of the substrate 110a.

  The electrode pad 111 is for mounting the tuning fork type crystal element 120. A pair of electrode pads 111 are provided on the upper surface of the frame 110b, and are provided adjacent to each other along one side of the frame 110b. As shown in FIGS. 4 and 5, the electrode pads 111 are external terminals provided on the lower surface of the substrate 110a via the wiring patterns 113 and the via conductors 114 provided on the upper surface of the frame 110b and the substrate 110a. 112 is electrically connected.

  As shown in FIG. 5, the electrode pad 111 includes a first electrode pad 111a and a second electrode pad 111b. In addition, the arithmetic average surface roughness of the electrode pad 111 is 0.02 to 0.10 μm, and the arithmetic average surface roughness of the surface of the substrate 110a is 0.5 to 1.5 μm.

  The external terminal 112 is used for electrical connection with a mounting board (not shown) such as an electronic device. The external terminals 112 are provided at the four corners of the lower surface of the substrate 110a. Two of the external terminals 112 are electrically connected to a pair of electrode pads 111 provided on the upper surface of the substrate 110a. At least one of the remaining external terminals 112 is electrically connected to the sealing conductor pattern 117.

  Here, when the package 110 is viewed in plan, the dimension of one side is 0.8 to 3.2 mm, and the vertical dimension of the package 110 is 0.2 to 1.5 mm as an example. The size of the pad 111 will be described. The length of the side of the electrode pad 111 parallel to one side of the substrate 110a is 0.15 to 0.40 mm. The length of the side of the electrode pad 111 that is parallel to the side that intersects with one side of the substrate 110a is 0.15 to 0.40 mm. The length of the thickness of the electrode pad 111 in the vertical direction is 10 to 50 μm.

  The sealing conductor pattern 117 plays a role of improving the wettability of the bonding member 131 when bonded to the lid 130 via the bonding member 131. The sealing conductor pattern 117 is provided so as to surround the upper surface of the frame 110b. The sealing conductor pattern 117 is formed to have a thickness of, for example, 10 to 25 μm by sequentially applying nickel plating and gold plating on the surface of the conductor pattern made of, for example, tungsten or molybdenum so as to surround the upper surface of the frame 110b in an annular shape. Has been.

  The lid 130 is made of an alloy containing at least one of iron, nickel, and cobalt, for example. Such a lid 130 is for hermetically sealing the recess K1 in a vacuum state or the recess K1 filled with nitrogen gas or the like. Specifically, the lid 130 is placed on the frame 110b of the package 110 in a predetermined atmosphere so that the sealing conductor pattern 117 of the frame 110b and the joining member 131 of the lid 130 are joined. The joining member 131 is melted by applying heat to the frame 110b and joined to the frame 110b. The lid 130 is electrically connected to at least one external terminal 112 on the lower surface of the substrate 110a through the sealing conductor pattern 117. Therefore, the lid 130 is electrically connected to at least one external terminal 112.

  The joining member 131 is provided at a location of the lid 130 facing the sealing conductor pattern 117 provided on the upper surface of the frame 110b of the package 110. The joining member 131 is provided by, for example, silver solder or gold tin. In the case of silver wax, the thickness is 10 to 20 μm. For example, the component ratio is 72 to 85% for silver and 15 to 28% for copper. In the case of gold tin, the thickness is 10 to 40 μm. For example, the component ratio is 78 to 82% for gold and 18 to 22% for tin.

  Here, a method for manufacturing the substrate 110a will be described. When the substrate 110a is made of alumina ceramic, first, a plurality of ceramic green sheets obtained by adding and mixing an appropriate organic solvent or the like to a predetermined ceramic material powder is prepared. In addition, a predetermined conductor paste is applied to the surface of the ceramic green sheet or a through-hole previously punched by punching the ceramic green sheet by screen printing or the like. Further, these green sheets are laminated and press-molded and fired at a high temperature. Finally, it is produced by applying nickel plating, gold plating, silver palladium, or the like to predetermined portions of the conductor pattern, specifically, the portions to be the electrode pads 111, the external terminals 112, and the sealing conductor pattern 117. Moreover, the conductor paste is comprised from the sintered compact etc. of metal powders, such as tungsten, molybdenum, copper, silver, or silver palladium, for example.

  The crystal device according to the second embodiment includes a tuning fork type crystal element 120 described in the first embodiment, a substrate 110a having an electrode pad 111 for mounting the tuning fork type crystal element 120, and an outer peripheral edge of the upper surface of the substrate 110a. And a lid body 130 joined to the upper surface of the frame body 110b. Such a crystal device can suppress vibration leakage by adjusting the left and right weight imbalance of the crystal vibrating part 123 generated when exciting the tuning fork type crystal element 120 with the adjustment electrode. It becomes possible to reduce the deterioration of the series resistance.

  In addition, this invention is not limited to the said embodiment, A various change, improvement, etc. are possible in the range which does not deviate from the summary of this invention. For example, in the above-described embodiment, the case where quartz is used as the piezoelectric material constituting the piezoelectric vibration element has been described. However, as other piezoelectric materials, lithium niobate, lithium tantalate, or piezoelectric ceramics is used as the piezoelectric material. The piezoelectric vibration element may be used.

DESCRIPTION OF SYMBOLS 110 ... Package 110a ... Board | substrate 110b ... Frame body 111 ... Electrode pad 112 ... External terminal 117 ... Conductive pattern for sealing 120 ... Tuning fork type crystal element 121 ... Crystal Base 122 ... Balance part 123 ... Quartz vibrating part 124 ... Vibrating arm part 125, 126 ... Excitation electrode 127 ... Extraction electrode 128 ... Weight part 129 ... Adjustment electrode 130 ··································································································································································································································································································· • G ... groove R1 ... first residue R2 ... second residue S1 ... plane connected to the outer side surface of the crystal base S2 ... inclined surface SP ... formation surface α ... inclination Angle of surface T ・ ・ ・ Convex

Claims (6)

A rectangular crystal base having an XY′Z ′ orthogonal coordinate system in the crystal axis and having a thickness in a direction along the Z ′ axis;
A pair of crystal vibrating portions extending along the Y ′ axis from the side surface of the crystal base;
Excitation electrodes provided on the main surface and side surfaces of the pair of crystal vibrating parts;
A tuning fork type quartz crystal element comprising: adjustment electrodes provided on both main surfaces of the pair of quartz crystal vibrating portions. The tuning fork type crystal element according to claim 1,
The crystal vibrating part is composed of a vibrating arm part and a weight part,
A tuning fork type crystal element in which the adjustment electrode is provided on the weight portion. A tuning fork type quartz element according to claim 2,
A tuning-fork type crystal element in which the adjustment electrode is also provided on a side surface of the weight portion. A tuning fork type quartz element according to any one of claims 1 to 3,
A tuning fork type quartz crystal element comprising: a balance portion extending along a Y ′ axis from a side surface of the quartz crystal base portion between the pair of quartz crystal vibrating portions. The tuning fork type quartz element according to claim 4,
The balance portion is a tuning fork type crystal element constituted by at least two protrusions.   A quartz crystal device comprising the tuning fork type quartz crystal element according to any one of claims 1 to 5.