JP2019191566A - センサ窓 - Google Patents
センサ窓 Download PDFInfo
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- JP2019191566A JP2019191566A JP2019043094A JP2019043094A JP2019191566A JP 2019191566 A JP2019191566 A JP 2019191566A JP 2019043094 A JP2019043094 A JP 2019043094A JP 2019043094 A JP2019043094 A JP 2019043094A JP 2019191566 A JP2019191566 A JP 2019191566A
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- 230000003595 spectral effect Effects 0.000 claims abstract description 66
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 239000010410 layer Substances 0.000 claims description 189
- 230000003287 optical effect Effects 0.000 claims description 116
- 230000005540 biological transmission Effects 0.000 claims description 29
- 238000002310 reflectometry Methods 0.000 claims description 12
- 239000003086 colorant Substances 0.000 claims description 8
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 230000036541 health Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- XWNWBGHUGMRHNF-UHFFFAOYSA-N [SiH4].[Ge] Chemical compound [SiH4].[Ge] XWNWBGHUGMRHNF-UHFFFAOYSA-N 0.000 claims description 2
- QUZPNFFHZPRKJD-UHFFFAOYSA-N germane Chemical compound [GeH4] QUZPNFFHZPRKJD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052986 germanium hydride Inorganic materials 0.000 claims description 2
- 230000002209 hydrophobic effect Effects 0.000 claims description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 2
- 239000003921 oil Substances 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 230000002940 repellent Effects 0.000 claims description 2
- 239000005871 repellent Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 2
- 239000005341 toughened glass Substances 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 150000003376 silicon Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 27
- 239000011248 coating agent Substances 0.000 description 26
- 238000000576 coating method Methods 0.000 description 26
- 239000000463 material Substances 0.000 description 20
- 239000011521 glass Substances 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- 230000003667 anti-reflective effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000000049 pigment Substances 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 241000872198 Serjania polyphylla Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical class [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
- G01J2003/123—Indexed discrete filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
- G01J2003/1239—Interference filters and separate detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
- G01J2003/2826—Multispectral imaging, e.g. filter imaging
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Spectrometry And Color Measurement (AREA)
- Optical Filters (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
120 センサ窓
130 センサ
140 物体
210 センサ窓
220 基板
230 光センサ
240 入力光信号
250 入力光信号の第1部分
260 入力光信号の第2部分
270 出力電気信号
310 光学フィルタコーティング部分
320 基板
330-1〜330-(N+1) 第1セットの層
340-1〜340-N 第2セットの層
Claims (20)
- センサ窓であって、
基板と、及び
前記基板上に配置した1組の層のセットと
を備え、
前記層のセットは、第1屈折率の層の第1サブセットと、第1屈折率とは異なる第2屈折率の層の第2サブセットとを含み、
前記層のセットは、感知スペクトルレンジにおける閾値透過率に関連付けられており、また
前記層のセットは、可視スペクトルレンジにおける特定色を呈するように構成され、かつ前記可視スペクトルレンジにおける閾値不透明性に関連付けられている
ものである、センサ窓。 - 請求項1記載のセンサ窓において、前記層のセットは、約0°〜約30°の入射角に対して前記特定色の色シフトが12ΔE未満であるように構成されている、センサ窓。
- 請求項1記載のセンサ窓において、前記特定色は、特定パターンで、又は前記可視スペクトルレンジにおける特定図像を形成するよう配列される複数色である、センサ窓。
- 請求項1記載のセンサ窓において、前記感知スペクトルレンジは約600ナノメートル〜約2500ナノメートルである、センサ窓。
- 請求項1記載のセンサ窓において、前記感知スペクトルレンジは約800ナノメートル〜約1600ナノメートルである、センサ窓。
- 請求項1記載のセンサ窓において、前記閾値不透明性は前記可視スペクトルレンジで80%より大きい、センサ窓。
- 請求項1記載のセンサ窓において、前記層のセットは、前記可視スペクトルレンジの少なくとも一部分に対して80%の反射率より大きいことに関連付けられている、センサ窓。
- 請求項1記載のセンサ窓において、前記層のセットは、
ゲルマニウム層、
シリコン-ゲルマニウム層、
水素化シリコン層、
水素化ゲルマニウム層、
水素化シリコン-ゲルマニウム層、
シリコン層、
二酸化ケイ素(SiO2)層、
酸化アルミニウム(Al2O3)層、
二酸化チタン(TiO2)層、
五酸化ニオブ(Nb2O5)層、
五酸化タンタル、(Ta2O5)層、又は
フッ化マグネシウム(MgF2)層
のうちの少なくとも1つを含む、センサ窓。 - 請求項1記載のセンサ窓において、前記第1屈折率は約3.5より大きい、センサ窓。
- 請求項1記載のセンサ窓において、前記第2屈折率は約2.0未満である、センサ窓。
- 請求項1記載のセンサ窓において、前記層のセットは、前記第1屈折率及び前記第2屈折率とは異なる第3屈折率の層の第3サブセットを含む、センサ窓。
- 請求項1記載のセンサ窓において、前記基板は化学的に強化されたガラスである、センサ窓。
- 請求項1記載のセンサ窓において、さらに、
疎水性層、
親水性層、
撥油性層、
保護層、
反射防止層、
発熱層、
氷結防止層、
帯域外ブロッカー層、
のうち少なくとも1つを備える、センサ窓。 - 請求項1記載のセンサ窓において、さらに、前記層のセットにおける1つ又はそれ以上の第1層と、前記層のセットにおける1つ又はそれ以上の第2層との間に配置された少なくとも1つの中間層を備える、センサ窓。
- 光学フィルタにおいて、
複数の層であって、
前記複数の層は、第1屈折率に関連付けられた1組の高屈折率層のセットと、及び前記第1屈折率より小さい第2屈折率に関連付けられた1組の低屈折率層のセットとを含み、
前記複数の層は、光の複数の波長を指向させる複数チャンネルを形成し、
前記複数の層は、感知スペクトルレンジにおける閾値透過率及び可視スペクトルレンジにおける閾値不透明性に関連付けられている
ものである、該複数の層を備える、光学フィルタ。 - 請求項15記載の光学フィルタにおいて、前記複数の層は、前記光学フィルタに隣接する他の表面に対してカラーマッチングするよう構成されている、光学フィルタ。
- 請求項15記載の光学フィルタにおいて、前記複数のチャンネルは少なくとも64個のチャンネルを含む、光学フィルタ。
- 基板上又は基板内に配置された1組の光センサのセットと、及び
前記光センサのセットにおける光路に堆積されたセンサ窓であって、前記センサ窓は、
第1スペクトルレンジで約0°〜約45°の入射角に対して80%より大きい不透明性を付与し、また前記第1スペクトルレンジとは異なる第2スペクトルレンジで約0°〜約45°の入射角に対して80%より大きい透過率を付与するよう構成されている少なくとも1つの層を含む
該センサ窓と
を備える、システム。 - 請求項18記載のシステムにおいて、前記システムは、車両に設けられ、また車両の車体色に対して1ΔE以内でカラーマッチングしている、システム。
- 請求項18記載のシステムにおいて、前記システムは、生体測定システム、セキュリティシステム、通信システム、健康監視システム、物体識別システム、分光学的識別システムのうち少なくとも1つである、システム。
Priority Applications (1)
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JP2022166659A JP2023002663A (ja) | 2018-03-13 | 2022-10-18 | センサ窓 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862642354P | 2018-03-13 | 2018-03-13 | |
US62/642,354 | 2018-03-13 | ||
US16/103,625 | 2018-08-14 | ||
US16/103,625 US10948640B2 (en) | 2018-03-13 | 2018-08-14 | Sensor window with a set of layers configured to a particular color and associated with a threshold opacity in a visible spectral range wherein the color is a color-matched to a surface adjacent to the sensor window |
US16/293,539 US11009636B2 (en) | 2018-03-13 | 2019-03-05 | Sensor window to provide different opacity and transmissivity at different spectral ranges |
US16/293,539 | 2019-03-05 |
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JP2022166659A Division JP2023002663A (ja) | 2018-03-13 | 2022-10-18 | センサ窓 |
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JP7299717B2 JP7299717B2 (ja) | 2023-06-28 |
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EP3588152A2 (en) | 2020-01-01 |
CN110275226A (zh) | 2019-09-24 |
KR102575748B1 (ko) | 2023-09-06 |
TWI770367B (zh) | 2022-07-11 |
TW202238085A (zh) | 2022-10-01 |
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MX2023001007A (es) | 2023-03-01 |
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JP2023002663A (ja) | 2023-01-10 |
JP7299717B2 (ja) | 2023-06-28 |
KR20190108072A (ko) | 2019-09-23 |
US11567251B2 (en) | 2023-01-31 |
US11009636B2 (en) | 2021-05-18 |
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