JP2019171366A - Coating film formation device, coating film formation method, and member manufacturing method - Google Patents

Abstract

To provide a coating film formation device and a coating film formation method, that do not entrain air into a nozzle of a coating head in the coating film formation device, and that can form coating film of high continuous moldability and excellent dimensional accuracy.SOLUTION: A coating film formation device and a coating film formation method include: (a) a tank 111 for storing a liquid material; (b) a coating head 108 for feeding the liquid material onto a substrate 112, that is provided with a nozzle for discharging the liquid material, a storage part of the liquid material discharged from the nozzle, a supply port 115 for feeding the liquid material to the storage part, and a piston which is arranged by facing the storage part, and applies pressure to the liquid material stored in the storage part by reciprocating, in order to extrude the liquid material from the nozzle; (c) a flow path 113 connecting the tank to the supply port; (d) supply means for supplying the liquid material from the tank to the storage part; (e) means for blocking the supply of the liquid material from the tank to the storage part; (f) blocking means of the nozzle; and (g) means for relatively moving the substrate and the coating head.SELECTED DRAWING: Figure 1

Description

The present invention relates to a coating film forming apparatus and a coating film forming method for forming a coating film on the surface of a cylindrical or columnar and sheet-like substrate.
Moreover, this invention relates to the manufacturing method of the cylindrical member or columnar member using the said coating-film formation method, and a sheet-like member.

As a technique for uniformly forming a coating film by applying a liquid material containing rubber or resin to the surface of a cylindrical or columnar substrate (hereinafter also referred to as “cylindrical substrate”) or a sheet-like substrate. A ring coating method and a slit coating method are known.
Conventionally, in the ring coating method and the slit coating method, a liquid material extruded from a tank by a pump or the like is supplied to the coating head from one or two places via a pipe. Furthermore, in the coating head, a tournament type flow path is formed so that the liquid material flows uniformly at the nozzle, and the manifold is designed to make the fluid pressure inside the coating head uniform toward the nozzle. ing.
For example, Patent Document 1 discloses a technique in which a liquid material injected from one material injection port is uniformly discharged in the nozzle direction by a coating head having a manifold.

  On the other hand, with the further improvement in the quality of members in recent years, there has been a demand for higher accuracy for cylindrical members and sheet-like members, and it is necessary to discharge liquid materials from nozzles with high accuracy. is there. As a method of discharging with high accuracy from the nozzle, there is a method of discharging the liquid material supplied to the distribution chamber uniformly in the nozzle direction by a piston. Patent Document 2 discloses a technique for uniformly discharging a liquid material supplied to a distribution chamber from the circumferential direction with high accuracy by moving the liquid material in the discharge direction with an annular piston.

JP 2010-5616 A JP 2008-155087 A

  In the manufacturing method disclosed in Patent Document 2, depending on the type of liquid material, when the annular piston is moved to the most retracted position after discharge in continuous molding, air is drawn into the nozzle from the annular slit. There was a case. In this case, it may be difficult to form a good coating film unless air is discharged from the nozzle before discharge. Therefore, the present inventors have recognized that there is a need for a coating film forming apparatus that can prevent the entrainment of air into the nozzle after discharge and smoothly perform the next discharge even in various liquid materials. I came to get.

Therefore, one embodiment of the present invention is directed to providing a coating film forming apparatus that can form a coating film with good dimensional accuracy and capable of continuous molding without entraining air in the nozzle.
Another aspect of the present invention is directed to providing a method for forming a coating film that can be continuously formed without entraining air in the nozzle and has good dimensional accuracy.
Furthermore, another aspect of the present invention is directed to providing a method of manufacturing a cylindrical member that can be continuously formed without entraining air in the nozzle and has good dimensional accuracy.
Furthermore, another aspect of the present invention is directed to providing a method for producing a sheet-like member that can be continuously formed without entraining air in the nozzle and has good dimensional accuracy.

According to one aspect of the present invention, there is provided a coating film forming apparatus for forming a coating film of a liquid material on a substrate, the coating film forming apparatus including the following (a) to (g).
(A) a tank storing the liquid material;
(B) a coating head for supplying the liquid material onto a substrate,
The coating head is
A nozzle for discharging the liquid material,
A reservoir of the liquid material discharged from the nozzle in communication with the nozzle;
A supply port for supplying the liquid material to the reservoir, and a piston that is arranged facing the reservoir and is moved forward to pressurize the liquid material stored in the reservoir and push it out of the nozzle; Comprising
The supply port is located closer to the nozzle than the limit position the piston can reach during forward movement;
(C) a flow path connecting the tank and the supply port;
(D) supply means for supplying the liquid material from the tank to the storage section;
(E) means for shutting off the supply of the liquid material from the tank to the reservoir;
(F) Shielding means for the nozzle, and (g) means for relatively moving the substrate and the coating head.

Moreover, according to the other aspect of this invention, it is a coating-film formation method which forms the coating film of a liquid material on a base | substrate using said coating-film formation apparatus, Comprising: (1)-(5) below A method for forming a coating film comprising the steps of:
(1) A predetermined amount of the liquid material is supplied from the tank to the storage part by the supply means, and after the supply is completed, the liquid material from the tank is supplied to the storage part by the blocking means. Stopping the supply of;
(2) The liquid material stored in the storage section is moved from the nozzle while moving the piston forward, and the base and the coating head are moved relative to each other on the surface of the first base. Forming a coating film of the liquid material;
(3) After the step (2), in a state where the nozzle is shielded and the shielding of the nozzle is maintained, the blocking of the material supply from the tank to the reservoir by the blocking means is released, and the tank The supply means supplies a predetermined amount of the liquid material to the storage portion, and moves the piston back, stores the liquid material in the storage portion, and shuts off the supply after the supply is completed. A step of stopping the supply of the liquid material from the tank to the reservoir;
(4) opening the nozzle shielded in the step (3); and (5) discharging the liquid material stored in the storage portion from the nozzle by moving the piston forward, A step of relatively moving the coating head to form a coating film of the liquid material on the surface of the second substrate;

According to another aspect of the present invention, there is provided a method for producing a cylindrical member or a columnar member having a cylindrical or columnar substrate and a coating film on the outer peripheral surface of the substrate,
A method for producing a cylindrical member or a columnar member is provided, which includes a step of forming a coating film of a liquid material on the outer peripheral surface of a cylindrical or columnar substrate using the above-described coating film forming method.
Furthermore, according to another aspect of the present invention, there is provided a method for producing a sheet-like member having a sheet-like substrate and a coating film on the substrate,
There is provided a method for producing a sheet-like member, which includes a step of forming a coating film of a liquid material on a sheet-like substrate using the above-described coating film forming method.

According to one embodiment of the present invention, a coating film forming apparatus that can form a coating film with good dimensional accuracy can be obtained. Moreover, according to the other aspect of this invention, the formation method of the coating film which can perform continuous shaping | molding without entraining air in a nozzle and has favorable dimensional accuracy can be obtained.
Furthermore, according to another aspect of the present invention, it is possible to obtain a cylindrical member that can be continuously formed without entraining air into the nozzle and that has good dimensional accuracy. Furthermore, according to another aspect of the present invention, it is possible to obtain a sheet-like member that can be continuously formed without entraining air into the nozzle and that has good dimensional accuracy.

It is a schematic explanatory drawing of the coating-film formation apparatus in the 1st Embodiment of this invention. (A)-(c) is a schematic sectional drawing of the coating head in the 1st Embodiment of this invention. (A)-(b) is the figure which showed the specific behavior of the material supply to the coating head which concerns on the 1st Embodiment of this invention. (A)-(c) is the figure which showed the specific behavior of the piston etc. in the coating head which concerns on the 1st Embodiment of this invention. (A)-(c) is the figure which showed the specific behavior of the piston etc. in the coating head which concerns on the 1st Embodiment of this invention. It is a schematic explanatory drawing of the coating-film formation apparatus in the 2nd Embodiment of this invention. It is a schematic sectional drawing of the coating head in the 2nd Embodiment of this invention. (A)-(b) is the figure which showed the specific behavior of the material supply to the coating head which concerns on the 2nd Embodiment of this invention. (A)-(c) is the figure which showed the specific behavior of the piston etc. in the coating head which concerns on the 2nd Embodiment of this invention. (A)-(c) is the figure which showed the specific behavior of the piston etc. in the coating head which concerns on the 2nd Embodiment of this invention. It is a schematic explanatory drawing of the coating-film formation apparatus in a comparative example. It is a schematic sectional drawing of the coating head in a comparative example. It is a schematic explanatory drawing of the coating-film formation apparatus in the 3rd Embodiment of this invention. (A)-(c) is the figure which showed the specific behavior of the piston etc. in the coating head which concerns on the 3rd Embodiment of this invention. (A)-(c) is the figure which showed the specific behavior of the material supply to the coating head which concerns on the 3rd Embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described, but the present invention is not limited thereto.

[1] First Embodiment Hereinafter, a first embodiment will be described in order with reference to the drawings.
FIG. 1 is a schematic explanatory diagram of a coating film forming apparatus according to the first embodiment.
A column 102 is mounted substantially vertically on the gantry 101. A precision ball screw 103 is attached to the top of the gantry 101 and the column 102 in parallel to the vertical direction. Two linear guides 104 are mounted on the column 102 in parallel with the precision ball screw 103. The plate 114 connects the linear guide 104 and the precision ball screw 103, and can be moved up and down by the rotational motion transmitted from the servo motor 105.

  A coating head 108 is attached to the column 102. The coating head 108 discharges a liquid material (for example, uncured liquid rubber) from an annular nozzle to the outer peripheral surface of a cylindrical or columnar substrate to manufacture a cylindrical member or a columnar member. In the present embodiment, the coating head 108 discharges a liquid material to the outer peripheral surface of the cylindrical substrate 112 to manufacture a cylindrical member. The coating head 108 is supplied with the liquid material from the supply port 115 from the tank 111 storing the liquid material through the material flow path 113 by the feed pump 117. An open / close valve 116 that shuts off the supply of the liquid material is attached to the material flow path 113, and the material can be supplied and stopped by opening / closing the open / close valve 116. Further, an oil supply port 120 is attached to the coating head 108. Oil is supplied to the coating head 108 from the oil supply port 120 through the pipe 121 from the stored oil tank 119.

An upper bracket 106 and a lower bracket 107 are attached to the plate 114.
A lower holding shaft 110 that holds and fixes the cylindrical base body 112 is attached to the lower bracket 107.
A shielding member 118 that seals the inner peripheral surface of the coating head is attached to the lower holding shaft 110.
An upper holding shaft 109 is attached to the upper bracket 106, and the upper holding shaft 109 is disposed so as to be concentric with the lower holding shaft 110 to hold the cylindrical base body 112.

The central axis of the coating head 108 is supported so as to be parallel to the moving direction of the lower holding shaft 110 and the upper holding shaft 109.
When the lower holding shaft 110 and the upper holding shaft 109 are moved, the center axis of the annular nozzle opened inside the coating head 108 is adjusted so that the center axes of the lower holding shaft 110 and the upper holding shaft 109 are concentric. It is.
With such a configuration, the center axis of the annular nozzle of the coating head 108 and the center axis of the cylindrical substrate can be aligned with each other. A uniform gap is formed between the inner peripheral surface of the coating head and the outer peripheral surface of the cylindrical substrate 112.

[1-1] Coating Head FIG. 2A is a schematic cross-sectional view of the coating head 108 in FIG. 2B and 2C are cross-sectional views taken along lines AA and BB, respectively, of the coating head 108 shown in FIG.
In the coating head 108, a hollow cylindrical inner ring (hereinafter referred to as inner ring) 201 and a hollow cylindrical cap ring (hereinafter referred to as cap ring) 202 hold a hollow cylindrical outer ring (hereinafter referred to as outer ring) 205. It is configured by The outer ring 205 has at least one supply port 115. An annular storage portion 206 exists inside the coating head 108, and a ring-shaped piston 204 is disposed in the storage portion 206. The upper side from the piston 204 is a storage part 206A, and the lower side from the piston 204 is a storage part 206B.

The storage unit 206A communicates with the material flow path 113 through the supply port 115, and the liquid material sent from the tank 111 shown in FIG. 1 is supplied to the storage unit 206A.
The reservoir 206B communicates with the pipe 121 via the oil supply port 120, and the oil sent from the oil tank 119 shown in FIG. 1 is supplied to the reservoir 206B.
The annular nozzle 203 opened to the inside is controlled by the inner ring 201 and the cap ring 202, and communicates with the storage portion 206A.

  The ring-shaped piston 204 pressurizes the liquid material supplied into the storage portion 206 </ b> A from the supply port 115 and discharges it from the annular nozzle 203. The liquid material can be pressurized by supplying oil from the oil supply port 120 to the reservoir 206B and moving the piston 204 to the reservoir 206A side (forward movement) so as to pressurize the liquid material (hydraulic drive). ). Due to the forward movement of the piston 204, the material distributed over the entire circumference in the reservoir 206A is discharged from the annular nozzle 203 with a uniform pressure. Here, the forward movement of the piston 204 is exemplified by the oil supply to the reservoir 206B, but the piston 204 may be moved forward by connecting a servo motor or the like to the piston 204 (motor drive).

  The piston 204 can reciprocate within the storage portion 206 within a movable range L1 shown in FIG. The movable range L1 is controlled by the shape and stopper of the inner ring 201 and the outer ring 205. FIG. 2A shows an example in which control is performed by a step provided on the inner peripheral surface of the outer ring 205. In order to form a coating film with good dimensional accuracy, the piston 204 moves from the lower limit position to the upper limit position of the movable range L1, and the amount that can be discharged from the reservoir 206A forms a coating film on one cylindrical substrate. In order to achieve this, it is necessary to make the discharge amount larger than necessary. “Discharge rate required to form a coating on a single cylindrical substrate” means “necessary to form a coating on the entire area of the cylindrical substrate that requires coating. "Discharge amount".

Further, in order to enable supply of the liquid material from the supply port 115 into the storage portion 206A wherever the piston 204 is located in the movable range L1, the supply port 115 is located at an upper limit position of the piston movable range L1. Is also arranged on the annular nozzle side (upward in FIG. 2A).
The upper limit position of the movable range L1 is a limit position where the piston 204 can reach during forward movement. By disposing the supply port 115 closer to the annular nozzle than the upper limit position of the movable range L1 of the piston 204, the piston is moving forward, when reversing from forward to backward, during backward movement, and from backward movement to forward movement. At any time during the reversal of the piston, the piston does not hinder the supply of the liquid material from the supply port.

Similarly, no matter where the piston 204 is located within the movable range L1, the oil supply port 120 has a lower limit of the piston movable range L1 so that oil can be supplied from the oil supply port 120 into the reservoir 206B. It arrange | positions in the downstream (downward in Fig.2 (a)) rather than a position.
The lower limit position of the movable range L1 is a limit position where the piston 204 can be reached during the backward movement. By disposing the oil supply port 120 on the downstream side of the lower limit position of the movable range L1 of the piston 204, the piston is moving forward, when reversing from forward movement to backward movement, during backward movement, and from backward movement to backward movement. At any time during reversal of the piston, the piston does not hinder the oil supply from the oil supply port.

  Here, an example is shown in which the coating head 108 is composed of a plurality of members. However, the coating head 108 may be an integral mold, and the number of constituent members may be larger or smaller than the illustrated number. Good. The inner diameter of the coating head 108 and the width W1 of the annular nozzle 203 are appropriately selected depending on the film thickness, viscosity, solid content, and coating speed of the liquid material applied around the substrate.

[1-2] Coating Film Forming Method Using the Coating Film Forming Apparatus, Cylindrical Member Manufacturing Method Next, a method for forming a cylindrical coating film made of a liquid material on the outer peripheral surface of the substrate will be described.

[1-2-1] Material Supply for Forming Coating Film on First Substrate Surface FIGS. 3A to 3B are diagrams showing specific behaviors when supplying material to the coating head. It is.
(A) is the figure which showed the state with which the storage part was filled by material supply. (B) is the figure which showed the state of the stop of material supply.
When the coating head 108 is fixed and the cylindrical substrate 112 is moved in the axial direction,
The storage portion 206A and the annular nozzle 203 of the coating head 108 are filled with a liquid material as shown in FIG. When the valve 116 is opened, a predetermined amount of liquid material is supplied from the tank 111 shown in FIG. 1 through the material flow path 113 by the feed pump 117 to the reservoir 206A from the supply port 115. Here, the supply amount to the storage unit 206A and the annular nozzle 203 may be appropriately set according to the discharge amount to the substrate surface in consideration of the thickness of the coating film formed on the substrate surface, the length of the substrate, and the like. .
The reservoir 206B is filled with oil from the oil tank 119 shown in FIG.

  Next, as shown in FIG. 3B, after the supply of the liquid material is completed, the valve 116 is closed, the supply to the storage portion 206A is stopped, and the coating film is formed on the surface of the first substrate. The material supply to the coating head 108 is completed.

[1-2-2] Coating Film Formation on the First Substrate Surface FIGS. 4A to 4C show the specific behavior of the piston in the coating head when the coating film is formed on the substrate surface. Show. (A) is the figure which showed the state before coating. (B) is the figure which showed the state under coating. (C) is the figure which showed the state of the completion | finish of coating.
First, after the material supply shown in FIG. 3 is completed, the cylindrical base body 112 is held by the upper holding shaft 109 and the lower holding shaft 110 shown in FIG.
The material of the cylindrical substrate 112 is not particularly limited, and in addition to stainless steel (SUS), nickel, aluminum, copper, etc., or alloys thereof, polyimide, polyamideimide, etc., which are thermosetting resins, are used. Can do.

Next, as shown in FIG. 4A, the cylindrical substrate 112 is moved so that the coating start position of the coating film on the cylindrical substrate 112 matches the position (height) of the annular nozzle 203 of the coating head 108. Let
Next, as shown in FIG. 4B, the piston 204 is moved forward in the direction of the arrow A in FIG. 4B, and the liquid material in the storage portion 206A is pushed out toward the annular nozzle 203 to form an annular shape. The ink is discharged from the nozzle 203. The piston 204 is moved forward by supplying oil from the oil supply port 120 to the reservoir 206B. Here, oil is supplied to the reservoir 206B, but is not particularly limited, and may be a liquid other than oil or a gas. Then, it is preferable to use an incompressible liquid.

  Further, at the same time as the liquid material is discharged, the cylindrical substrate 112 held by the substrate holding shaft is moved in the vertical direction, and a desired distance is moved in accordance with the length of the substrate. As shown, a cylindrical coating film made of a liquid material is formed on the outer peripheral surface of the substrate.

[1-2-3] Material supply for coating film formation on the second substrate surface FIG. 5 shows that the coating film is continuously formed on the second substrate surface after the coating film formation on the first substrate surface. It is the figure which showed the specific behavior of the piston etc. in the coating head in the case of the material supply for doing. (A) shows the state before material supply. (B) is the figure which showed the state with which a storage part is filled with material supply. (C) is the figure which showed the state of the stop of material supply.
First, as shown in FIG. 5A, the annular shielding member 118 attached to the lower holding shaft 110 shown in FIG. 1 is moved to match the position of the annular nozzle 203 to shield the entire circumference of the annular nozzle. Thereby, the inside of the coating head can be sealed.

  The shielding member 118 is not particularly limited as long as it can shield the annular nozzle 203 and seal the inside of the coating head. For example, general rubber materials such as fluorine rubber, silicone rubber, natural rubber, nitrile rubber, acrylic rubber, and urethane rubber can be applied.

  Next, as shown in FIG. 5B, the valve 116 is opened in a state where the shielding of the annular nozzle 203 is maintained, and the blocking of the material supply is released. Then, the liquid material is supplied from the tank 111 shown in FIG. 1 to the storage unit 206A via the material flow path 113 and the supply port 115 by the feed pump 117. As a result, the inside of the reservoir 206A becomes positive pressure, and the annular nozzle 203 is in a sealed state, so that the piston 204 moves (restores) in the direction of arrow B in FIG. 5B on the reservoir 206B side due to the pressure of the liquid material. Move). By the backward movement of the piston 204, the oil filled in the reservoir 206B is pushed out and sent from the oil supply port 120 to the oil tank 119 through the pipe 121. By supplying a predetermined amount of the liquid material in the same manner as the first substrate, the storage portion 206A is filled with the liquid material.

  Next, as shown in FIG. 5C, after the supply of the liquid material is completed, the valve 116 is closed and the supply to the storage portion 206A is stopped, so that the coating film is formed on the surface of the second substrate. The material supply to the coating head 108 is completed. Thereafter, the shielding member 118 moves in the vertical direction to open the annular nozzle 203.

  As described above, by supplying the material to the storage portion 206A while the annular nozzle 203 is shielded, the inside of the storage portion 206A can be set to a positive pressure, and air is mixed into the coating head from the outside. Can be prevented.

[1-2-4] Coating film formation on the surface of the second substrate The coating film formation method on the surface of the second substrate should be carried out by the coating film formation method on the first substrate surface shown in FIG. Can do.
According to the above method, even in continuous molding, the material can be supplied in a state in which the annular nozzle 203 is shielded, and air inside the coating head from the outside can be obtained by making the inside of the reservoir 206A a positive pressure. Can be prevented. Thereby, pressure can be uniformly applied to the liquid material distributed annularly in the reservoir 206A using the ring-shaped piston 204, and the discharge from the annular nozzle 203 can be made uniform. Therefore, in the circumferential direction at the time of discharge, the discharge irregularity of the liquid material does not occur, and a cylindrical coating film with little thickness unevenness can be formed. As a result, it is possible to manufacture a good cylindrical member with high continuous formability and excellent thickness accuracy.

  In the above description, the position (height) of the coating head 108 is fixed, and the cylindrical substrate 112 is moved in the central axis direction. On the other hand, the position (height) of the cylindrical substrate 112 can be fixed, and the coating head 108 can be moved in the central axis direction of the cylindrical substrate 112. That is, when the cylindrical coating film made of a liquid material is formed on the outer peripheral surface of the substrate by moving the coating head relative to the cylindrical substrate, the coating head 108 or the cylindrical substrate 112 is formed. Either of these may be moved.

[2] Second Embodiment Hereinafter, a second embodiment will be described in order with reference to the drawings.
FIG. 6 is a schematic explanatory diagram of a coating film forming apparatus according to the second embodiment.
A precision ball screw 303 is mounted on the gantry 301 in parallel to the horizontal direction. Two linear guides 304 are mounted on the gantry 301 in parallel with the precision ball screw 303. The plate 314 connects the linear guide 304 and the precision ball screw 303, and can be moved horizontally by the rotational motion transmitted from the servo motor 305.

  A coating head 308 is attached to the gantry 301. The coating head 308 discharges a liquid material (for example, uncured liquid rubber) from a plate-like nozzle 403 having a depth onto the surface of a sheet-like substrate 312 having a width in the depth direction of the paper (hereinafter, depth). . The coating head 308 is supplied with a liquid material from a supply port 315 through a material flow path 313 by a feed pump 317 from a tank 311 storing the liquid material. An open / close valve 316 that shuts off the supply of the liquid material is attached to the material flow path 313, and the material can be supplied and stopped by opening and closing the valve 316. Further, an oil supply port 320 is attached to the coating head 308. Oil is supplied to the coating head 308 from an oil supply port 320 through a pipe 321 from a stored oil tank 319.

A holding plate 309 having a depth for holding and fixing the sheet-like substrate 312 is attached to the plate 314. Further, a shielding member 318 for sealing the open end surface of the plate nozzle 403 is attached to the plate 314.
The tip end surface of the nozzle that opens to the lower side of the coating head 308 is supported so as to be parallel to the holding plate 309, and further supported so as to be parallel to the moving direction of the holding plate 309. Yes.
With such a configuration, a uniform gap is formed between the tip surface of the coating head 308 and the surface of the sheet-like substrate 312 while the sheet-like substrate 312 moves below the tip surface of the coating head 308. And maintained.

[2-1] Coating Head FIG. 7 is a schematic sectional view of the coating head 308 in FIG.
The coating head 308 is configured by a holding body 405 having at least one supply port 315 holding a pair of plate-shaped lips 401 and a plate-shaped cap 402. Inside the coating head 308 are reservoirs 406A and 406B, and the reservoir 406 is provided with a plate-like piston 404.
The reservoir 406A communicates with the material channel 313 via the supply port 315, and the liquid material sent from the tank 311 shown in FIG. 6 is supplied to the reservoir 406A.
The reservoir 406B communicates with the pipe 321 via the oil supply port 320, and the oil sent from the oil tank 319 shown in FIG. 6 is supplied to the reservoir 406B.
The plate-like nozzle 403 opened to the lower side is controlled by a pair of lips 401 and a holding body 405, and communicates with the reservoir 406A.

  The plate-like piston 404 pressurizes the liquid material supplied from the supply port 315 into the storage unit 406 </ b> A and discharges it from the plate-like nozzle 403. The liquid material can be pressurized by supplying oil from the oil supply port 320 to the reservoir 406B, and moving the piston 404 toward the reservoir 406A (forward movement) so as to pressurize the liquid material (hydraulic drive). ). Due to the forward movement of the piston 404, the material distributed over the entire area in the reservoir 406A is discharged from the plate-like nozzle 403 with a uniform pressure. Here, the forward movement of the piston is shown by an example of supplying oil to the reservoir 406B, but the piston may be moved forward by connecting a servo motor or the like to the piston (motor drive).

  The piston 404 can reciprocate within the storage portion 406 within a movable range L2 shown in FIG. The movable range L2 is controlled by the shape of the holding body 405, a stopper, and the like. FIG. 7 shows an example of controlling by reducing the inner diameter of the holding body 405. In order to form a coating film with good dimensional accuracy, the piston 404 moves from the upper limit position to the lower limit position of the movable range L2, and the amount that can be discharged from the reservoir 406A forms a coating film on one sheet-like substrate. In order to achieve this, it is necessary to make the discharge amount larger than necessary. “Discharge amount necessary to form a coating film on one sheet-like substrate” means “necessary to form a coating film in the entire region where coating film formation on the surface of one sheet-like substrate is required” It means “discharge amount”.

Further, the supply port 315 is located at a position lower than the lower limit position of the movable range L2 of the piston so that the liquid material can be supplied from the supply port 315 into the storage portion 406A regardless of where the piston 404 is located in the movable range L2. Is also arranged on the nozzle side.
Similarly, no matter where the piston 404 is located within the movable range L2, the oil supply port 320 has an upper limit of the movable range L2 of the piston so that oil can be supplied from the oil supply port 320 into the reservoir 206B. It is arranged above the position.
The lower limit position of the movable range L2 is a reverse position where the piston 404 is reversed from the forward movement to the backward movement, and the upper limit position of the movable range L2 is a reverse position where the piston 404 is reversed from the backward movement to the backward movement.

  Here, an example in which the coating head 308 is configured by a plurality of members is shown. However, the coating head 308 may be an integral mold, and the number of components may be larger or smaller than the number illustrated. Good. The width W2 of the plate-like nozzle 403 is appropriately selected depending on the film thickness, viscosity, solid content, and coating speed of the liquid material applied around the substrate.

[2-2] Method for Forming Coating Film Using the Coating Film Forming Apparatus and Method for Producing Sheet-Shaped Member Next, a method for forming a sheet-shaped coating film made of a liquid material on the surface of the substrate will be described.

[2-2-1] Material supply for coating film formation on first substrate surface FIGS. 8 (a) and 8 (b) show specific behavior when supplying material to the coating head. It is a figure. FIG. 8A is a view showing a state in which the storage portion is filled with the material supply. FIG. 8B is a diagram showing a state in which the material supply is stopped.
When the coating head 308 is fixed and the sheet-like substrate 312 is moved in the horizontal direction, the storage portion 406A and the plate-like nozzle 403 of the coating head 308 are filled with a liquid material as shown in FIG. Fill. When the valve 316 is opened, a predetermined amount of liquid material is supplied from the tank 311 shown in FIG. 6 through the material flow path 313 by the feed pump 317 to the reservoir 406A from the supply port 315. Here, the supply amount to the storage unit 406A and the plate-like nozzle 403 may be appropriately set according to the discharge amount to the substrate surface in consideration of the thickness of the coating film formed on the substrate surface, the length of the substrate, and the like. Good.
In addition, oil is sent from the oil tank 319 shown in FIG.

  Next, as shown in FIG. 8B, after the supply of the liquid material is completed, the valve 316 is closed, the supply to the storage unit 406A is stopped, and the coating film is formed on the first substrate surface. The material supply to the coating head 308 is completed.

[2-2-2] Formation of Coating Film on First Substrate Surface FIGS. 9A to 9C show specific examples of pistons and the like in the coating head when forming a coating film on the surface of the substrate. Shows behavior. FIG. 9A shows a state before coating. FIG. 9B is a diagram showing a state during coating. FIG. 9C is a diagram showing a state where the coating has been completed.
First, after the material supply shown in FIG. 8 is completed, the sheet-like substrate 312 is held by the holding plate 309 shown in FIG.
The material of the sheet-like substrate 312 is not particularly limited, and in addition to stainless steel (SUS), nickel, aluminum, copper, etc., or alloys thereof, polyimide, polyamideimide, etc., which are thermosetting resins, are used. Can do.
The holding plate 309 is a porous adsorption table, and can hold the entire surface of the sheet-like substrate 312 by applying a negative pressure with a vacuum pump or the like. Here, an example using a suction table is shown as the holding plate, but the holding plate is not particularly limited, and a method of sandwiching and holding a sheet-like substrate by providing a plurality of toggle wrenches and the like can be applied.

Next, as shown in FIG. 9A, the sheet-like substrate 312 is moved so that the coating start position of the coating film on the sheet-like substrate 312 matches the position of the plate-like nozzle 403 of the coating head 308.
Next, as shown in FIG. 9B, the piston 404 is moved forward in the direction of arrow C in FIG. 9B, and the liquid material in the reservoir 406A is pushed out toward the plate nozzle 403, The ink is discharged from the plate-like nozzle 403. The piston 404 is moved forward by supplying oil from the oil supply port 320 to the reservoir 406B. Here, oil is supplied to the reservoir 406B, but is not particularly limited, and may be a liquid other than oil or a gas. Then, it is preferable to use an incompressible liquid.

  Further, at the same time as the liquid material is discharged, the sheet-like substrate 312 held by the holding plate 309 is moved in the horizontal direction, and a desired distance is moved in accordance with the length of the substrate. As shown, a sheet-shaped coating film made of a liquid material is formed on the surface of the substrate.

[2-2-3] Material supply for coating film formation on second substrate surface FIGS. 10 (a) to 10 (c) show the first and second films continuously after the coating film formation on the first substrate surface. It is the figure which showed the specific behavior of the piston etc. in the coating head at the time of the material supply for forming a coating film on the base | substrate surface of 2. FIG. FIG. 10A shows a state before material supply. FIG. 10B is a diagram showing a state in which the material is filled in the storage portion by supplying the material. FIG. 10C is a diagram showing a state in which the material supply is stopped.
First, as shown in FIG. 10A, the plate-like shielding member 318 attached to the plate 314 shown in FIG. 6 is moved so as to match the position of the plate-like nozzle 403, thereby shielding the entire surface of the plate-like nozzle 403. . Thereby, the inside of the coating head can be sealed.

  The shielding member 318 only needs to shield the plate-like nozzle 403 and seal the inside of the coating head, and the material is not particularly limited. Fluorine rubber, silicone rubber, natural rubber, nitrile rubber, acrylic rubber And general rubber materials, such as urethane rubber, are applicable.

  Next, as shown in FIG. 10B, in the state where the shielding of the plate nozzle 403 is maintained, the valve 316 is opened to release the blocking of the material supply. Then, the liquid material is supplied from the tank 311 shown in FIG. 6 to the storage unit 406A through the material flow path 313 and the supply port 315 by the feed pump 317. Thereby, the inside of the reservoir 406A becomes positive pressure, and the plate-like nozzle 403 is in a sealed state, so that the piston 404 moves in the direction of the arrow D in FIG. 10B on the reservoir 406B side by the pressure of the liquid material ( To return). By the backward movement of the piston 404, the oil filled in the reservoir 406B is pushed out and sent from the oil supply port 320 to the oil tank 319 through the pipe 321. By supplying a predetermined amount of the liquid material in the same manner as the first substrate, the storage part 406A is filled with the liquid material.

  Next, as shown in FIG. 10C, after the supply of the liquid material is completed, the valve 316 is closed and the supply to the storage unit 406A is stopped, so that the coating film is formed on the surface of the second substrate. The material supply to the coating head 308 is completed. Thereafter, the shielding member 318 moves in the horizontal direction to open the plate nozzle 403.

  As described above, by supplying the material to the storage unit 406A in a state where the plate-like nozzle 403 is shielded, the inside of the storage unit 406A can be set to a positive pressure, and air from the outside into the coating head can be obtained. Mixing can be prevented.

[2-2-4] Coating film formation on the surface of the second substrate The coating film formation method on the surface of the second substrate should be carried out by the coating film formation method on the first substrate surface shown in FIG. Can do.
According to the above method, even in the continuous molding, it becomes possible to supply the material in a state where the plate-like nozzle 403 is shielded, and by making the inside of the reservoir 406A a positive pressure, the outside can be supplied into the coating head. Mixing of air can be prevented. Thereby, pressure can be uniformly applied to the liquid material distributed in the reservoir 406A using the plate-like piston 404, and the discharge from the plate-like nozzle 403 can be made uniform. Therefore, in the width direction at the time of discharge, the discharge unevenness of the liquid material does not occur, and a sheet-shaped coating film with little thickness unevenness can be formed. As a result, it is possible to manufacture a good sheet-like member having high continuous formability and excellent thickness accuracy.

  In the above description, the position of the coating head 308 is fixed, and the sheet-like substrate 312 is moved in the horizontal direction. On the other hand, the position of the sheet-like substrate 312 can be fixed and the coating head 308 can be moved in the horizontal direction. That is, by moving the coating head relative to the sheet-like substrate, the coating head 308 or the sheet-like substrate 312 is formed when a sheet-like coating film made of a liquid material is formed on the surface of the substrate. Either of them may be moved.

[3] Third Embodiment Hereinafter, a third embodiment will be described in order with reference to the drawings.
FIG. 13 is a schematic explanatory diagram of a coating film forming apparatus according to the third embodiment.
A precision ball screw 303 is mounted on the gantry 301 in parallel to the horizontal direction. Two linear guides 304 are mounted on the gantry 301 in parallel with the precision ball screw 303. The frame body 1301 connects the linear guide 304 and the precision ball screw 303, and is able to move horizontally by receiving rotational movement from the servo motor 305.

  A coating head 308 is attached to the gantry 301. The coating head 308 of the coating film forming apparatus in the third embodiment is the same as the coating head 308 shown in the description of the second embodiment. Further, a support member 1302 is fixed to the gantry 301. The support member 1302 is disposed so as to face the plate-like nozzle 403, and has a support surface for the sheet-like substrate 312 on the side facing the plate-like nozzle 403.

A pressing body 1303 is fixed to the frame body 1301, a first holding body 1304 is provided on the pressing body 1303 </ b> A, and a second holding body 1305 is provided on the pressing body 1303 </ b> B.
The sheet-like substrate 312 can be grasped by a first holding body 1304 having a depth for fixing one end of the sheet-like substrate 312 and a second holding body 1305 for fixing the other end of the sheet-like substrate 312. it can. The first grip body 1304 and the second grip body 1305 are horizontally moved in the same manner as the frame body 1301 and the pressing body 1303 fixed to the frame body 1301 are moved horizontally. It can be conveyed in a direction (X-axis direction) orthogonal to the direction (Y-axis direction).

  The pressing body 1303A and the pressing body 1303B move the first gripping body 1304 and the second gripping body 1305 in a state of gripping the sheet-like base 312 in the horizontal direction (X-axis direction) away from each other, thereby causing the sheet-like base 312 to move. The tension acting on the can be increased. Further, the pressing body 1303A and the pressing body 1303B move the first gripping body 1304 and the second gripping body 1305 in a state of gripping the sheet-like substrate 312 from the plate-like nozzle 403 toward the support surface of the support member 1302 (Z-axis). Direction). By increasing the tension acting on the sheet substrate 312, the surface of the sheet substrate 312 opposite to the side facing the plate nozzle 403 can be pressed against the support surface of the support member 1302. Further, by moving the first gripping body 1304 and the second gripping body 1305 in the state of gripping the sheet-like base 312 in the Z-axis direction, the side opposite to the side facing the plate-like nozzle 403 of the sheet-like base 312. The surface can be pressed against the support surface of the support member 1302.

With the above configuration, the sheet-like substrate 312 is conveyed while being pressed against the fixed gap between the tip of the lip 401 and the support surface of the support member 1302. For this reason, it is possible to carry and apply while maintaining the gap between the tip of the lip 401 and the application surface of the sheet-like substrate 312 even during conveyance, and good coating film formation with excellent thickness accuracy in the conveyance direction can be achieved. Is possible.
Further, in order to increase the coating thickness accuracy in the transport direction, the second embodiment requires a large-area and high-accuracy plate 314 and a high-accuracy linear guide 304. However, the coating in the third embodiment is not necessary. The film forming apparatus does not require them. For this reason, an apparatus can be simplified more.

  As a method for the first gripping body 1304 and the second gripping body 1305 to grip the sheet-like substrate, a method in which a plurality of toggle clamps are provided and the sheet-like substrate is sandwiched and gripped can be applied. Good, not particularly limited.

  Further, the pressing body 1303 moves the first gripping body 1304 and the second gripping body 1305 away from each other in the horizontal direction (X-axis direction) and the direction from the plate-like nozzle 403 toward the support surface of the support member 1302 (Z-axis direction). There is no particular limitation as long as it can be moved. A general cylinder lifting mechanism and slide mechanism can be used.

  A shielding member 1307 is installed on the lifting stage 1306 fixed to the frame body 1301. The elevating stage 1306 has a general elevating mechanism such as a cylinder elevating mechanism in order to raise and lower the shielding member 1307. When the plate-like nozzle 403 is shielded for the purpose of supplying the material to the coating head 308, the frame body 1301 is moved horizontally with the height of the elevating stage 1306 raised in accordance with the support member 1302. Then, the shielding member 1307 is aligned with the position of the plate nozzle 403. By doing in this way, the whole surface of the plate-like nozzle 403 can be shielded.

[3-1] Coating Head The coating head of the coating film forming apparatus in the third embodiment is the same as the coating head 308 described in the second embodiment.

[3-2] Coating Film Forming Method Using the Coating Film Forming Apparatus, and Sheet-Shaped Member Manufacturing Method Next, in the third embodiment, a sheet-shaped coating film made of a liquid material is formed on the surface of the substrate. A method of forming will be described.

[3-2-1] Material supply for coating film formation on the first substrate surface The material supply for coating film formation on the first substrate surface in the third embodiment is [2-2. -1] is the same as the material supply method shown in FIG.
[3-2-2] Formation of coating film on first substrate surface FIGS. 14 (a) to 14 (c) show specific behaviors of pistons and the like in the coating head when a coating film is formed on the surface of the substrate. Show. FIG. 14A is a diagram showing a state before coating. FIG. 14B is a diagram showing a state during coating. FIG. 14C is a diagram showing a state where the coating is finished.
First, after the material supply shown in FIG. 8 is completed, the sheet-like base 312 is held in a state of being pressed against the support member 1302 by the pressing body 1303, the first holding body 1304, and the second holding body 1305 shown in FIG. . The material of the sheet-like substrate 312 is not particularly limited, and in addition to stainless steel (SUS), nickel, aluminum, copper, etc., or alloys thereof, polyimide, polyamideimide, etc., which are thermosetting resins, are used. Can do. The material of the sheet-like substrate 312 needs to be deformable along the support surface of the support member 1302 during application conveyance.

Next, as shown in FIG. 14A, the sheet-like substrate 312 is conveyed so that the coating start position of the coating film on the sheet-like substrate 312 matches the position of the plate-like nozzle 403 of the coating head 308.
Next, as shown in FIG. 14 (b), the piston 404 is moved forward in the direction of arrow C in FIG. 14 (b), and the liquid material in the reservoir 406A is pushed out toward the plate nozzle 403, The ink is discharged from the plate-like nozzle 403. The piston 404 is moved forward by supplying oil from the oil supply port 320 to the reservoir 406B. Here, oil is supplied to the reservoir 406B, but is not particularly limited, and may be a liquid other than oil or a gas. Then, it is preferable to use an incompressible liquid.

Further, at the same time as the liquid material is discharged, the sheet-like substrate 312 held by the first holding body 1304 and the second holding body 1305 is transported, and a desired distance is moved according to the length of the sheet-like substrate 312. .
By doing so, a sheet-shaped coating film made of a liquid material is formed on the surface of the sheet-like substrate 312 as shown in FIG.

[3-2-3] Material supply for coating film formation on second substrate surface FIGS. 15 (a) to 15 (c) show the first continuous coating after the coating film formation on the first substrate surface. It is the figure which showed the specific behavior of the piston etc. in the coating head at the time of the material supply for forming a coating film on the base | substrate surface of 2. FIG. FIG. 15A shows a state before material supply. FIG. 15B is a diagram illustrating a state in which the material is filled in the storage portion by supplying the material. FIG. 15C is a diagram showing a state in which the material supply is stopped.
First, as shown in FIG. 15A, the plate-like shielding member 1307 attached to the lifting stage 1306 shown in FIG. 13 is moved so as to match the position of the plate-like nozzle 403, and the whole plate-like nozzle 403 is shielded. To do. Thereby, the inside of the coating head can be sealed.

  The shielding member 1307 only needs to shield the plate-like nozzle 403 and seal the inside of the coating head. The material is not particularly limited, and fluorine rubber, silicone rubber, natural rubber, nitrile rubber, acrylic rubber And general rubber materials, such as urethane rubber, are applicable.

  Next, as shown in FIG. 15B, in the state where the shielding of the plate nozzle 403 is maintained, the valve 316 is opened to release the blocking of the material supply. Then, the liquid material is supplied from the tank 311 shown in FIG. 13 to the storage unit 406A via the material flow path 313 and the supply port 315 by the feed pump 317. Thereby, the inside of the reservoir 406A becomes positive pressure, and the plate-like nozzle 403 is in a sealed state, so that the piston 404 moves in the direction of the arrow D in FIG. 15B on the reservoir 406B side by the pressure of the liquid material ( To return). By the backward movement of the piston 404, the oil filled in the reservoir 406B is pushed out and sent from the oil supply port 320 to the oil tank 319 through the pipe 321. By supplying a predetermined amount of the liquid material in the same manner as the first substrate, the storage part 406A is filled with the liquid material.

  Next, as shown in FIG. 15C, after the supply of the liquid material is completed, the valve 316 is closed and the supply to the storage unit 406A is stopped, so that the coating film is formed on the surface of the second substrate. The material supply to the coating head 308 is completed. Thereafter, the shielding member 1307 moves in the horizontal direction to open the plate nozzle 403.

  As described above, by supplying the material to the storage unit 406A in a state where the plate-like nozzle 403 is shielded, the inside of the storage unit 406A can be set to a positive pressure, and air from the outside into the coating head can be obtained. Mixing can be prevented.

[3-2-4] Coating film formation on the surface of the second substrate The coating film formation method on the surface of the second substrate should be performed by the coating film formation method on the first substrate surface shown in FIG. Can do.
According to the above method, also in continuous molding, as in [2-2-4], it is possible to manufacture a good sheet-like member having high continuous moldability and excellent thickness accuracy.

[Example 1]
In manufacturing the sheet-like member, a polyimide sheet-like body, which is a thermosetting resin having a thickness of 0.1 mm and 1000 mm × 1000 mm, was used as a substrate.
As the liquid material, a liquid silicone rubber mixed liquid (manufactured by Toray Dow Corning Co., Ltd .: DY35-3093) was used.
Silicone oil (manufactured by Shin-Etsu Chemical Co., Ltd .: Shin-Etsu Silicone: KF-96-200CS) was used as the oil.

  576 mL of liquid silicone rubber mixed solution is supplied to the coating head shown in [2-1] by the material supply method shown in [2-2-1] using the coating film forming apparatus shown in FIG. Then, the reservoir 406A and the plate nozzle 403 were filled. The depth length of the pair of lips 401 of the coating head was 900 mm, and the width W2 of the plate nozzle 403 was 0.5 mm. The piston 404 had a width W3 of 40 mm, a depth length of 900 mm, a height H2 of 10 mm, and a movable range L2 of 30 mm.

Next, the holding plate 309 is moved at a speed of 30 mm / second in the horizontal direction in a state where the sheet-like substrate 312 is sucked and held by the holding plate 309 as a suction table by the coating film forming method shown in [2-2-2]. The sheet-like substrate 312 was moved to the coating start location.
The coating head 308 was attached so that the gap between the lip tip surface and the surface of the sheet-like substrate 312 was 1 mm.
The sheet-like substrate 312 was moved by 800 mm in the horizontal direction at a speed of 15 mm / second, and at the same time, oil was supplied from the oil supply port 320 at a speed of 10.8 mL / second. The piston 404 moves forward, and the liquid silicone rubber mixed solution is discharged from the plate-like nozzle 403 at 10.8 mL / second, and the coating film of the 0.8 mm thick liquid silicone rubber mixed solution is applied to the surface of the first sheet-like substrate. Was formed in 900 mm × 800 mm.
Thereafter, the adsorption by the holding plate 309 was released, the sheet-like substrate 312 was taken out, and heat-cured in a warm air circulation oven to produce a first sheet-like member.

Subsequently, a second sheet-like member was manufactured. In the material supply method shown in [2-2-3], the plate-shaped shielding member 318 made of urethane rubber attached to the plate 314 is moved so as to be aligned with the position of the plate-like nozzle 403, and the plate-like The entire nozzle surface was shielded.
Next, by opening the valve 316 and supplying the liquid silicone rubber mixed solution, the piston 404 was moved back, and the reservoir 406A and the plate nozzle 403 were filled with 576 mL of the liquid silicone rubber mixed solution. Thereafter, the valve 316 was closed and the shielding member 318 was moved in the horizontal direction.

Next, according to the coating film forming method shown in [2-2-4], the sheet-like substrate 312 is sucked and held by the holding plate 309 which is a suction table, and is moved at a speed of 30 mm / second in the horizontal direction. The sheet-like substrate 312 was moved to the coating start location.
The sheet-like substrate 312 was moved 800 mm in the horizontal direction at a speed of 15 mm / second, and at the same time, oil was supplied from the oil supply port 320 at 10.8 mL / second. The piston 404 moves forward, the liquid silicone rubber mixed solution is discharged from the plate-like nozzle 403 at 10.8 mL / second, and a coating film of 0.8 mm thick liquid silicone rubber mixed solution is applied to the surface of the second sheet-like substrate. Was formed in 900 mm × 800 mm.
Thereafter, the adsorption by the holding plate 309 was released, the sheet-like substrate 312 was taken out, and heat-cured in a hot air circulation oven to produce a second sheet-like member.
The production of the third and subsequent sheet-like members was also performed in the same manner as the production of the second sheet-like member, and 50 sheet-like members were continuously produced.

The coating thickness of the sheet-like member produced above was measured with DIGIMMICRO (MF-501 manufactured by Nikon Corporation). A 900 mm × 800 mm sheet was measured every 100 mm pitch from a position 50 mm from the end, and Δt, which was the difference between the maximum thickness and the minimum thickness at all 72 points, was calculated.
The maximum value of Δt of 50 sheet-like members was 16 μm, which was excellent with excellent thickness accuracy. The reason is considered as follows.
Even in continuous molding, the material could be supplied with the nozzle shield maintained, so when the material was supplied, positive pressure was applied to the nozzle to prevent air from entering the coating head from the outside. I was able to. Thereby, it was possible to uniformly apply pressure to the liquid material distributed in the storage portion by using a plate-like piston, and to uniformly discharge from the nozzle. Therefore, in the depth direction of the lip at the time of discharge, there was no uneven discharge of the liquid material, and a sheet-shaped coating film with little thickness unevenness could be formed. As a result, it was possible to produce a good sheet-like member having high continuous formability and excellent thickness accuracy.

[Comparative example]
A sheet-like member was produced in the same manner as in Example 1 using the coating film forming apparatus shown in FIG. The coating head 1108 uses the one shown in the schematic cross-sectional view shown in FIG. 12, and the liquid material injected from one material injection port 315 is supplied from the reservoir 1206 in the nozzle depth direction and uniformly from the nozzle 403. This is a conventional method of discharging.

In manufacturing the sheet-like member, a polyimide sheet-like body, which is a thermosetting resin having a thickness of 0.1 mm and 1000 mm × 1000 mm, was used as a substrate.
As the liquid material, a liquid silicone rubber mixed liquid (manufactured by Toray Dow Corning Co., Ltd .: DY35-3093) was used. The depth length of the pair of lips 401 of the coating head was 900 mm, and the width W2 of the plate nozzle 403 was 0.5 mm.

In the coating film forming method, the sheet-like substrate 312 is moved in the horizontal direction at a speed of 30 mm / second in a state where the sheet-like substrate 312 is sucked and held by the holding plate 309 which is the suction table shown in FIG. Moved to the coating start location.
The coating head 1108 was attached so that the gap between the lip tip surface and the surface of the sheet-like substrate 312 was 1 mm.
The sheet-like substrate 312 is moved by 800 mm in the horizontal direction at a speed of 15 mm / sec. At the same time, a liquid material is supplied from the material supply port 315 at a speed of 10.8 mL / sec. The rubber mixed solution was discharged at 10.8 mL / second, and a coating film of a liquid silicone rubber mixed solution having a thickness of 0.8 mm was formed on the surface of the first sheet-like substrate at 900 mm × 800 mm.
Thereafter, the adsorption by the holding plate 309 was released, the sheet-like substrate 312 was taken out, and heat-cured in a warm air circulation oven to produce a first sheet-like member.

  The production of the second and subsequent sheet-like members was also carried out in the same manner as the production of the first sheet-like member, and 50 sheet-like members were produced continuously.

The coating thickness of the sheet-like member produced above was measured with DIGIMMICRO (MF-501 manufactured by Nikon Corporation). A 900 mm × 800 mm sheet was measured every 100 mm pitch from a position 50 mm from the end, and Δt, which was the difference between the maximum thickness and the minimum thickness at all 72 points, was calculated.
The maximum value of Δt of the 50 sheet-like members was 128 μm, and the thickness unevenness was large.

[Example 2]
When manufacturing a cylindrical member, a primer (manufactured by Toray Dow Corning Co., Ltd .: DY35-051) is applied to a cylindrical body of stainless steel (SUS) having a length of 310 mm, an outer diameter of 29.8 mm, and a thickness of 0.2 mm. Then, a substrate baked at 150 ° C. for 30 minutes was used as a substrate.
As the liquid material, a liquid silicone rubber mixed solution (manufactured by Dow Corning Toray: DY35-4097) was used.
As the oil, silicone oil (manufactured by Shin-Etsu Chemical Co., Ltd .: Shin-Etsu Silicone Oil: KF-96-100CS) was used.

  Using the coating film forming apparatus shown in FIG. 1, 5 mL of liquid silicone rubber mixed solution is supplied to the coating head shown in [1-1] by the material supply method shown in [1-2-1]. Then, the reservoir 206A and the annular nozzle 203 were filled. The inner diameter of the inner ring 201 and the cap ring 202 of the coating head was 30 mm, and the width W1 of the annular nozzle 203 was 0.4 mm. The piston 204 has an outer diameter of 40 mm, an inner diameter of 35 mm, a height H1 of 10 mm, and a movable range L1 of 20 mm.

Next, in the state where the cylindrical substrate is clamped by the upper holding shaft 109 and the lower holding shaft 110 by the coating film forming method shown in [1-2-2], both the holding shafts are vertically moved 50 mm from top to bottom. The cylindrical substrate 112 was moved to the coating start position by being lowered at a speed of / sec.
The cylindrical substrate 112 was moved upward from the bottom in the vertical direction at a speed of 30 mm / second and moved 280 mm, and at the same time, oil was supplied from the oil supply port 120 at a speed of 0.28 mL / second. The piston 204 moves forward, and the liquid silicone rubber mixed solution is discharged from the annular nozzle 203 at a rate of 0.28 mL / second, and the liquid silicone rubber mixed solution having a thickness of 0.1 mm is applied to the outer peripheral surface of the first cylindrical substrate. A film was formed.
Thereafter, the clamps by the upper holding shaft 109 and the lower holding shaft 110 were released, the cylindrical base body 112 was taken out, and heated and cured in a hot air circulation oven to produce a first cylindrical member.

Subsequently, a second cylindrical member was manufactured. In the material supply method shown in [1-2-3], the annular shielding member 118 made of silicone rubber attached to the lower holding shaft 110 is moved so as to match the position of the annular nozzle 203, and the annular nozzle is moved. Shielded all around.
Next, by opening the valve 116 and supplying the liquid silicone rubber mixed solution, the piston 204 moved backward, and the reservoir 206A and the annular nozzle 203 were filled with 5 mL of the liquid silicone rubber mixed solution. Thereafter, the valve 116 was closed, and the shielding member was moved upward from the bottom.

Next, in the state where the cylindrical base is clamped by the upper holding shaft 109 and the lower holding shaft 110 by the coating film forming method shown in [1-2-4], both the holding shafts are vertically moved 50 mm from top to bottom. The cylindrical substrate 112 was moved to the coating start position by being lowered at a speed of / sec.
The cylindrical base body 112 is moved vertically upward from the bottom at a speed of 30 mm / second to move the cylindrical base body by 280 mm in about 9.3 seconds, and at the same time, the oil is supplied from the oil supply port 120 to 0.28 mL / second. Supplied at a rate of seconds. The piston 204 moves forward, and the liquid silicone rubber mixed solution is discharged from the annular nozzle 203 at a rate of 0.28 mL / second, and the liquid silicone rubber mixed solution having a thickness of 0.1 mm is applied to the outer peripheral surface of the second cylindrical substrate. A film was formed.
Thereafter, the clamps by the upper holding shaft 109 and the lower holding shaft 110 were released, the cylindrical base body 112 was taken out, and heated and cured in a hot air circulation oven to produce a second cylindrical member.
The third and subsequent cylindrical members were also manufactured in the same manner as the second cylindrical member, and 100 cylindrical members were continuously manufactured.

The cylindrical members manufactured by the above method were all excellent in thickness accuracy. The reason is considered as follows.
Even in continuous molding, the material could be supplied with the nozzle shield maintained, so when the material was supplied, positive pressure was applied to the nozzle to prevent air from entering the coating head from the outside. I was able to. As a result, a uniform pressure was applied to the liquid material distributed annularly in the reservoir using a ring-shaped piston, and the discharge from the nozzle could be made uniform. Therefore, in the circumferential direction at the time of discharge, the discharge irregularity of the liquid material did not occur, and a cylindrical coating film with little thickness unevenness could be formed. As a result, it was possible to produce a good cylindrical member having high continuous formability and excellent thickness accuracy.

[Example 3]
In manufacturing the sheet-like member, a polyimide sheet-like body, which is a thermosetting resin having a thickness of 0.1 mm and 1000 mm × 1000 mm, was used as a substrate.
As the liquid material, a liquid silicone rubber mixed liquid (manufactured by Toray Dow Corning Co., Ltd .: DY35-3093) was used.
Silicone oil (manufactured by Shin-Etsu Chemical Co., Ltd .: Shin-Etsu Silicone: KF-96-200CS) was used as the oil.

  Using the coating film forming apparatus shown in FIG. 13, 576 mL of the liquid silicone rubber mixed solution is supplied to the coating head shown in [3-1] by the material supply method shown in [3-2-1]. Then, the reservoir 406A and the plate nozzle 403 were filled. The depth length of the pair of lips 401 of the coating head was 900 mm, and the width W2 of the plate nozzle 403 was 0.5 mm. The piston 404 had a width W3 of 40 mm, a depth length of 900 mm, a height H2 of 10 mm, and a movable range L2 of 30 mm.

Next, according to the coating film forming method shown in [3-2-2], the first gripping body having five toggle clamps arranged at equal intervals in the depth direction of FIG. 13 with respect to the depth length of 1000 mm of the sheet-like substrate. The both ends of the sheet-like substrate 312 were gripped by 1304 and the second gripping body 1305, respectively.
In a state where the sheet-like substrate 312 is gripped, the first gripping body 1304 and the second gripping body 1305 are lowered in the downward direction (Z-axis direction) in FIG. As a result, it was confirmed that the sheet-like substrate 312 was deformed following the shape of the support surface of the support member 1302. Thereafter, the frame 1301 was moved in the horizontal direction (X-axis direction) at a speed of 30 mm / second, and the sheet-like substrate 312 was moved to the coating start location.
The coating head 308 was attached so that the gap between the lip tip surface and the surface of the sheet-like substrate 312 was 1 mm.
The sheet-like substrate 312 was moved 800 mm in the horizontal direction (X-axis direction) at a speed of 15 mm / second, and at the same time, oil was supplied from the oil supply port 320 at a speed of 10.8 mL / second. The piston 404 moves forward, and the liquid silicone rubber mixed solution is discharged from the plate-like nozzle 403 at 10.8 mL / second, and the coating film of the 0.8 mm thick liquid silicone rubber mixed solution is applied to the surface of the first sheet-like substrate. Was formed in 900 mm × 800 mm.
Thereafter, the gripping of the first gripping body and the second gripping body was released, the sheet-like substrate 312 was taken out, and heat-cured in a hot air circulation oven to produce a first sheet-like member.

Subsequently, a second sheet-like member was manufactured. With the material supply method shown in [3-2-3], the entire plate-like nozzle was shielded by a plate-like shielding member 1307 made of urethane rubber attached to the lifting stage 1306.
Next, by opening the valve 316 and supplying the liquid silicone rubber mixed solution, the piston 404 was moved back, and the reservoir 406A and the plate nozzle 403 were filled with 576 mL of the liquid silicone rubber mixed solution. Thereafter, the valve 316 is closed, the shielding member 1307 is moved in the horizontal direction (X-axis direction), and the elevating stage 1306 is lowered so as not to obstruct the holding of the sheet-like substrate 312 by the first holding body 1304 and the second holding body 1305. I let you.

Next, the first gripping body having five toggle clamps arranged at equal intervals with respect to the depth length of 1000 mm of the sheet-like substrate in the depth direction of FIG. 13 by the coating film forming method shown in [3-2-4] The both ends of the sheet-like substrate 312 were gripped by 1304 and the second gripping body 1305, respectively.
In a state where the sheet-like substrate 312 is gripped, the first gripping body 1304 and the second gripping body 1305 are lowered in the downward direction (Z-axis direction) in FIG. As a result, it was confirmed that the sheet-like substrate 312 was deformed following the shape of the support surface of the support member 1302. Thereafter, the frame 1301 was moved in the horizontal direction (X-axis direction) at a speed of 30 mm / second, and the sheet-like substrate 312 was moved to the coating start location.
The sheet-like substrate 312 was moved 800 mm in the horizontal direction (X-axis direction) at a speed of 15 mm / second, and at the same time, oil was supplied from the oil supply port 320 at 10.8 mL / second. The piston 404 moves forward, the liquid silicone rubber mixed solution is discharged from the plate-like nozzle 403 at 10.8 mL / second, and a coating film of 0.8 mm thick liquid silicone rubber mixed solution is applied to the surface of the second sheet-like substrate. Was formed in 900 mm × 800 mm.
Then, the toggle clamp of the 1st holding body and the 2nd holding body was open | released, the sheet-like base | substrate 312 was taken out, and it heat-hardened in the warm air circulation type oven, and manufactured the 2nd sheet-like member.
The production of the third and subsequent sheet-like members was also performed in the same manner as the production of the second sheet-like member, and 50 sheet-like members were continuously produced.

The coating film thickness of the sheet-like member produced above was measured with a digital length measuring device (trade name: DF-501, manufactured by Nikon Corporation Nikon Corporation). A 900 mm × 800 mm sheet was measured every 100 mm pitch from a position 50 mm from the end, and Δt, which was the difference between the maximum thickness and the minimum thickness at all 72 points, was calculated.
The maximum value of Δt of the 50 sheet-like members was 14 μm, which was excellent with excellent thickness accuracy. The reason is considered as follows.
Even in continuous molding, the material could be supplied with the nozzle shield maintained, so when the material was supplied, positive pressure was applied to the nozzle to prevent air from entering the coating head from the outside. I was able to. Thereby, it was possible to uniformly apply pressure to the liquid material distributed in the storage portion by using a plate-like piston, and to uniformly discharge from the nozzle. Therefore, in the depth direction of the lip at the time of discharge, there was no uneven discharge of the liquid material, and a sheet-shaped coating film with little thickness unevenness could be formed. As a result, it was possible to produce a good sheet-like member having high continuous formability and excellent thickness accuracy. In addition, since there was no plate 314 used in Example 1, it was possible to manufacture a good sheet-like member excellent in thickness accuracy with a simple apparatus configuration.

DESCRIPTION OF SYMBOLS 101 Base 102 Column 103 Precision ball screw 104 Linear guide 105 Servo motor 106 Upper bracket 107 Lower bracket 108,308,1108 Coating head 109 Upper holding shaft 110 Lower holding shaft 111 Tank 112 Cylindrical base body 113 Material flow path 114 Plate 115 Supply port 116 Opening / closing valve 117 Feed pump 118 Shield member 119 Oil tank 120 Oil supply port 121 Piping 201 Inner ring 202, 402, 1202 Cap ring 203 Annular nozzle 204, 404 Piston 205 Outer ring 206A, 206B, 406A, 406B, 1206 Reservoir 301 Stand 303 Precision Ball Screw 304 Linear Guide 305 Servo Motor 309 Holding Plate 311 Tank 312 Sheet Substrate 313 Material Flow 314 Plate 315 Supply port 316 Open / close valve 317 Feed pump 318 Shield member 319 Oil tank 320 Oil supply port 321 Piping 401 Lip 403 Plate nozzle 405, 1205 Holding body 1301 Frame body 1302 Support member 1303 Press body 1304 First grip body 1305 Second grip 1306 Lifting stage 1307 Shielding member

Claims (5)

A coating film forming apparatus for forming a coating film of a liquid material on a substrate, the coating film forming apparatus comprising the following (a) to (g):
(A) a tank storing the liquid material;
(B) a coating head for supplying the liquid material onto a substrate,
The coating head is
A nozzle for discharging the liquid material,
A reservoir of the liquid material discharged from the nozzle in communication with the nozzle;
A supply port for supplying the liquid material to the reservoir, and a piston that is arranged facing the reservoir and is moved forward to pressurize the liquid material stored in the reservoir and push it out of the nozzle; Comprising
The supply port is located closer to the nozzle than the limit position the piston can reach during forward movement;
(C) a flow path connecting the tank and the supply port;
(D) supply means for supplying the liquid material from the tank to the storage section;
(E) means for shutting off the supply of the liquid material from the tank to the reservoir;
(F) shielding means for the nozzle; and (g) means for relatively moving the substrate and the coating head. A coating film forming method for forming a coating film of a liquid material on a substrate using a coating film forming apparatus,
The coating film forming apparatus comprises the following (a) to (g),
(A) a tank storing the liquid material;
(B) a coating head for supplying the liquid material onto a substrate,
The coating head is
A nozzle for discharging the liquid material,
A reservoir of the liquid material discharged from the nozzle in communication with the nozzle;
A supply port for supplying the liquid material to the reservoir, and a piston that is arranged facing the reservoir and is moved forward to pressurize the liquid material stored in the reservoir and push it out of the nozzle; Comprising
The supply port is located closer to the nozzle than the limit position the piston can reach during forward movement;
(C) a flow path connecting the tank and the supply port;
(D) supply means for supplying the liquid material from the tank to the storage section;
(E) means for shutting off the supply of the liquid material from the tank to the reservoir;
(F) shielding means for the nozzle, and (g) means for relatively moving the substrate and the coating head,
The coating film forming method includes the following steps (1) to (5):
(1) A predetermined amount of the liquid material is supplied from the tank to the storage part by the supply means, and after the supply is completed, the liquid material from the tank is supplied to the storage part by the blocking means. Stopping the supply of;
(2) The liquid material stored in the storage portion is moved from the nozzle while moving the piston forward, and the base and the coating head are moved relative to each other on the surface of the first base. Forming a coating film of the liquid material;
(3) After the step (2), in a state where the nozzle is shielded and the shielding of the nozzle is maintained, the blocking of the material supply from the tank to the reservoir by the blocking means is released, and the tank The supply means supplies a predetermined amount of the liquid material to the storage section, and moves the piston back, stores the liquid material in the storage section, and shuts off the supply after the supply ends. A step of stopping the supply of the liquid material from the tank to the reservoir;
(4) opening the nozzle shielded in the step (3); and (5) discharging the liquid material stored in the storage part from the nozzle by moving the piston forward, A step of relatively moving the coating head to form a coating film of the liquid material on the surface of the second substrate; A method for producing a cylindrical member or a columnar member having a cylindrical or columnar substrate and a coating film on the outer peripheral surface of the substrate,
A process for forming a coating film of a liquid material on the outer peripheral surface of a cylindrical or columnar substrate using the coating film forming method according to claim 2. Production method. A method for producing a sheet-like member having a sheet-like substrate and a coating film on the substrate,
A method for producing a sheet-like member, comprising the step of forming a coating film of a liquid material on a sheet-like substrate using the method for forming a coating film according to claim 2. The base is a sheet-like base;
The coating film forming apparatus further comprises:
A support member for the base body that is disposed to face the nozzle and has a support surface for the base body on the side facing the nozzle;
A first gripping means for gripping one end of the substrate, and a second gripping means for gripping the other end;
Means for transporting the substrate gripped by the first gripping means and the second gripping means in a direction perpendicular to the longitudinal direction of the nozzle;
Pressing means for moving the first gripping means and the second gripping means in a direction of pressing the surface of the base opposite to the side facing the nozzle against the support surface. The coating film forming apparatus according to claim 1.