JP2019168424A - Connection terminal and method for inspecting semiconductor device - Google Patents

Abstract

To provide a connection terminal and a method for inspecting a semiconductor device which can detect a degradation in the end of a connection terminal and promote exchange of the connection terminal, thereby preventing reduction in the connection yield or wrong measurement in an electric test of a measurement target substrate.SOLUTION: A connection terminal 100 includes: a plunger pin 111 with a fluid discharge pipe 112; a contact maker 119, which blocks the discharge port 103 of the plunger pin 111 in one end of the plunger pin; a shell case 102, which is in contact with a part of the plunger pin 111 in the inner surface and is electrically connected to the part; and a fluid sealing container 105 having an opening part connected to the other end of the plunger pin 111, the fluid sealing container being filled with a sealed fluid material at a pressure higher than a normal pressure.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a connection terminal and a semiconductor device inspection method.

  A semiconductor device formed on a semiconductor substrate or the like is subjected to an electrical test to determine whether it has a predetermined electrical characteristic, and a semiconductor device having a predetermined electrical characteristic is selected and shipped. Such a test is usually performed by using a semiconductor inspection apparatus having a connection terminal for contacting a wiring board and an electrode of a semiconductor device on the semiconductor substrate, pressing the connection terminal against the electrode, and This is done by exchanging and transmitting the electrical signal to the wiring board. In order to alleviate damage to the electrode due to the pressure of the connection terminal against the electrode, a pogo pin using the elastic force of an elastic spring is widely used as the connection terminal.

  In Patent Document 1, in order to improve electrical connectivity in an electrical test of a semiconductor substrate using a semiconductor inspection device, the lower end portion of the pogo pin is elastic in a state where it is not in contact with an electrode of the semiconductor device. A pogo pin configuration capable of changing the force is disclosed.

Japanese Patent Application Laid-Open No. 2006-142644

  However, with the configuration of the pogo pin disclosed in Patent Document 1, it is difficult to detect a decrease in electrical connectivity due to deterioration such as wear at the tip of the pogo pin. Therefore, it is difficult to suppress a decrease in connection yield and erroneous measurement when electrical connectivity deteriorates due to deterioration of connection terminals such as pogo pins.

  In view of the above points, the present invention suppresses a decrease in connection yield and erroneous measurement when the electrical connectivity deteriorates due to deterioration of the tip of the connection terminal, and suppresses the shipment of a low-quality semiconductor product associated therewith. Another object of the present invention is to provide a semiconductor device inspection method.

  In order to solve the above problems, the present invention provides the following connection terminal and semiconductor device inspection method.

  That is, a connection terminal for contacting the substrate to be measured to obtain an electrical connection, a plunger pin having a fluid discharge pipe penetrating from one end to the other end, and the plunger pin The inner surface includes a contact that is provided so as to close the first discharge port at the one end, and that can contact the substrate to be measured; an outer surface; and a cavity including an inner surface and a ceiling surface on the inner side. A shell case that is in contact with and covers a part of the plunger pin and is electrically connected to the plunger pin, and is provided between the ceiling surface and the plunger pin, and the other of the plunger pins. A connection terminal comprising: a fluid enclosure having an opening connected to an end portion and enclosing a fluid with a pressure exceeding normal pressure.

  Further, in the semiconductor device inspection method, an inspection is performed by bringing the connection terminal into contact with the substrate to be measured, wherein the contact is scraped by contact with the substrate to be measured in the inspection, and the first discharge port is exposed. Then, when the fluid is discharged, the deterioration of the contact is detected, and the connection terminal is replaced.

  According to the present invention, the deterioration of the connection terminal in the electrical test performed by contacting the connection terminal with the board to be measured by detecting the deterioration of the tip of the connection terminal and prompting the replacement of the connection terminal, and the The accompanying shipment of low-quality semiconductor products can be suppressed.

It is a schematic cross section showing a mode that an electric inspection of a substrate to be measured is performed by an inspection device provided with a connection terminal concerning a 1st embodiment of the present invention. It is a schematic cross section of the connection terminal according to the first embodiment. In the connection terminal which concerns on 1st Embodiment, it is a schematic cross section showing the state immediately after the contact lose | disappeared. In the connection terminal which concerns on 1st Embodiment, it is a schematic cross section showing a state when a fluid enclosure is contracted. It is a schematic cross section showing a mode that an electric inspection of a substrate to be measured is performed by an inspection device provided with a connection terminal concerning a 2nd embodiment of the present invention. It is a schematic cross section of the connection terminal according to the second embodiment. In the connection terminal which concerns on 2nd Embodiment, it is a schematic cross section showing a state when a fluid enclosure is contracted.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate. In the drawings used in the following description, in order to make the features of the present invention easier to understand, some of the features that are features may be shown partially transparent for convenience.

  FIG. 1 is a schematic cross-sectional view of an inspection apparatus showing a state in which an electrical inspection of a substrate to be measured is performed by an inspection apparatus in which the connection terminals of the first embodiment are installed in order to facilitate understanding of the present invention. is there. However, the connection terminal is not a cross section but an external view thereof.

  An inspection apparatus 10 shown in FIG. 1 is an apparatus for performing an electrical inspection of a measurement substrate 600 having an electrode 610, and is electrically connected to the wiring board 700 through a land part 710. The connection terminal 100 according to the first embodiment, the holding substrate 400 and the support substrate 500 that support the connection terminal 100, and the holder 300 that connects the holding substrate 400 and the support substrate 500 are provided.

  When performing an electrical inspection, the inspection apparatus 10 moves from the state of FIG. 1 toward the substrate to be measured 600, brings the connection terminal 100 into contact with the electrode 610 on the substrate to be measured 600, and electrically Exchanges signals.

  The wiring board 700 is a board provided with wiring for processing an electrical signal transmitted from the board 600 to be measured via the connection terminal 100, and includes a land portion 710 that is electrically connected to the connection terminal 100.

  The support substrate 500 is installed on the surface of the wiring substrate 700 facing the substrate 600 to be measured, and supports the connection terminal 100. A through hole 510 penetrating in the thickness direction is provided in a portion of the support substrate 500 where the land portion 710 is located, and this portion supports the connection terminal 100.

  The holding substrate 400 is installed at a position away from the support substrate 500 in the direction of the substrate 600 to be measured, and holds the connection terminal 100. The holding substrate 400 is also provided with a through hole 410 penetrating in the plate thickness direction, and this portion supports the connection terminal 100.

  The holder 300 is installed between the holding substrate 400 and the support substrate 500 in the outer peripheral region of the inspection apparatus 10. The holder 300 fixes the holding substrate 400 that supports the connection terminal 100.

  When one end of the connection terminal 100 comes into contact with the electrode 610 formed on the measured substrate 600, the connection terminal 100 exchanges electric signals with the measured substrate 600, and the land portion to which the other end is connected. 710 is a terminal for transmitting the electrical signal. A large number of connection terminals 100 are supported by the through holes 410 and 510 and correspond to the electrodes 610.

  FIG. 2 is a schematic cross-sectional view of the connection terminal 100 according to the first embodiment of the present invention. The connection terminal 100 has conductivity for exchanging electrical signals between the electrode 610 on the board 600 to be measured and the land portion 710 in the wiring board 700. In addition, the connection terminal 100 has a length from one end to the other end by the plunger pin 111 moving up and down the shell case 102 in response to the pressing from the inspection apparatus 10 to the substrate 600 to be measured. It has variable elasticity.

  The plunger pin 111 has conductivity to exchange electrical signals between the shell case 102 and the substrate 600 to be measured. Inside the plunger pin 111, there is provided a cylindrical fluid discharge pipe 112 penetrating from one end facing the substrate to be measured 600 to the other end facing the wiring substrate 700. This is to allow the fluid flowing from the inside of the shell case 102 through the plunger pin discharge port 108 to be discharged from the plunger pin discharge port 103. One end of the plunger pin 111 is provided with a contact 119 that has conductivity and can contact the electrode 610 on the substrate 600 to be measured.

  The contact 119 has a triangular pyramid shape, and has a length from the electrode contact point 114 that contacts the electrode 610 to the wear limit point 113 connected to the plunger pin 111, and the plunger pin discharge port 103 is connected to the contact point 119. It is installed so as to close it. The contact 119 exposes the plunger pin discharge port 103 when the wear caused by repeated contact with the electrode 610 reaches the wear limit point 113 from the electrode contact point 114, and discharges the fluid inside the shell case 102. It has a function.

  A part of the outer peripheral side surface of the plunger pin 111 is covered with the shell case 102, and a compression ring 110 and an oil ring 109 are provided so as to surround the plunger pin 111 at that portion. The compression ring 110 and the oil ring 109 are compressed in contact with the shell case 102 and maintain the airtightness between the shell case 102 and the plunger pin 111.

  The shell case 102 has an outer side surface 120 and a cavity including an inner side surface 121 and a ceiling surface 122 on the inner side, and the inner side surface 121 covers a part of the outer periphery of the plunger pin 111. Further, the shell case 102 has conductivity, and is in contact with the plunger pin 111 in a portion covering the plunger pin 111, and transmits an electric signal from the plunger pin 111 to the land portion 710 via the mounting contact surface 115. .

  In the other part of the shell case 102 that is not in contact with the plunger pin 111, a shell case inner portion 118 is provided for securing a region where the plunger pin 111 can move up and down. A spreading step 104 is provided above the inner side surface 121 of the shell case inner portion 118. As will be described later, the spread step 104 serves as a stopper that prevents the oil ring 109 from returning downward when the oil ring 109 reaches the spread step 104.

  In the shell case inner portion 118, the fluid enclosure 105 is installed between the ceiling surface 122 of the shell case inner portion 118 and the plunger pin 111. The fluid enclosure 105 is made of a stretchable elastic body such as rubber, and a fluid such as an inert gas is enclosed therein at a pressure higher than normal pressure. Further, an opening is provided in a portion of the fluid sealing container 105 that contacts the plunger pin discharge port 108. Therefore, the fluid in the fluid enclosure 105 is also filled in the fluid discharge pipe 112 via the plunger pin discharge port 108.

  Lubricating oil 107 is sealed in a portion of the shell case inner portion 118 where the fluid sealing container 105 contacts the inner wall of the shell case inner portion 118. The lubricating oil 107 functions to suppress wear due to contact between the fluid enclosure 105 and the inner wall of the shell case inner portion 118.

  The connection terminal 100 having the above configuration performs the following functions during normal inspection and when the connection terminal deteriorates.

  First, during normal inspection, the inspection apparatus 10 moves from the state of FIG. 1 toward the substrate to be measured 600, and the connection terminal 100 is brought into contact with the electrode 610 on the substrate to be measured 600. Even after the connection terminal 100 comes into contact with the electrode 610, the inspection apparatus 10 further presses down in order to improve the contact property and reduce the contact resistance. At this time, the plunger pin 111 constituting the connection terminal 100 shown in FIG. 2 moves upward in the shell case inner portion 118 while receiving the elastic force of the fluid enclosure 105 that is compressed according to the applied pressure. And the connection terminal 100 relieves the damage of the electrode 610 by the press of the contactor 119, and obtains a stable electrical characteristic. At this time, the fluid enclosure 105 corresponds to the elastic spring of the pogo pin in the prior art, and generates a certain elastic force as long as no fluid leaks inside.

  Secondly, a description will be given of a case where the connection terminal is deteriorated such that the contact 119 is scraped by repeated contact between the contact 119 and the electrode 610. If the electrical inspection is continued with the contactor 119 shaved excessively, the electrical connectivity between the contactor 119 and the electrode 610 deteriorates, resulting in a decrease in connection yield and erroneous measurement. When the connection yield decreases, a decrease in throughput occurs due to remeasurement. In addition, when an erroneous measurement occurs, a semiconductor device that deviates from a predetermined electrical characteristic is selected as a non-defective product, and a low-quality semiconductor product may be shipped.

  As shown in FIG. 3, in the first embodiment, when the contact 119 is scraped due to wear or the like with the electrode 610 and the scraping reaches the wear limit point 113 from the electrode contact point 114, the plunger pin discharge port 103. Is exposed. When the plunger pin discharge port 103 is exposed, the fluid in the fluid discharge tube 112 and the fluid enclosure 105 connected to the fluid discharge tube 112 is discharged from the plunger pin discharge port 103, and the pressure exceeding the normal pressure. The pressure inside the fluid enclosure 105 is reduced, and the fluid enclosure 105 contracts according to the elastic force.

  As shown in FIG. 4, the plunger pin 111 connected to the fluid sealing container 105 via the plunger pin discharge port 108 is drawn into the cavity of the shell case 102 due to the contraction of the fluid sealing container 105. . When the plunger pin 111 is drawn into the cavity of the shell case 102 and the oil ring 109 spreads and reaches the step 104, the compression of the oil ring 109 is released until the oil ring 109 spreads and reaches the inside of the step 104 due to the spread of the space. Therefore, the spread step 104 serves as a stopper against the downward movement of the oil ring 109, and the plunger pin 111 is prevented from moving downward from the state of FIG.

  With the above operation, the connection terminal 100 is separated from the electrode 610 and kept in a non-contact state, so that an electrical inspection is impossible, and deterioration of the connection terminal 100 due to scraping of the contact 119 is detected. Upon detecting the deterioration of the connection terminal 100, the deteriorated connection terminal is replaced with a new connection terminal, and the electrical inspection is restarted, so that the connection yield is reduced or the measurement is erroneous when the electrical connectivity deteriorates. Is suppressed.

  Next, a connection terminal according to the second embodiment of the present invention will be described. FIG. 5 is a schematic cross-sectional view of an inspection apparatus showing a state in which an electrical inspection of a substrate to be measured is performed by the inspection apparatus in which the connection terminal according to the second embodiment is installed. However, the connection terminal shows the external appearance, not the cross section.

  As shown in FIG. 5, the inspection apparatus 20 that performs an electrical test of the board 600 to be measured includes the wiring board 700 and the connection of the second embodiment that is electrically connected to the wiring board 700 via the land portion 710. A terminal 200, a holding substrate 400 and a supporting substrate 500 that support the connection terminal 200, and a holder 300 that connects the holding substrate 400 and the supporting substrate 500 are provided. The connection terminal 200 of the second embodiment is newly provided with a shell case discharge port 223 as compared to the first embodiment. The shell case discharge port 223 can discharge the fluid in the shell case to the outside of the inspection apparatus 20 by a groove (not shown) provided in the support substrate 500.

  When performing an electrical inspection, the inspection apparatus 20 moves from the state shown in FIG. 5 toward the substrate 600 to be measured, brings the connection terminal 200 into contact with the electrode 610 on the substrate 600 to be measured, and electrically Exchanges signals.

  FIG. 6 is a schematic cross-sectional view of a connection terminal 200 according to the second embodiment of the present invention. The connection terminal 200 is provided with conductivity to contact the electrode 610 at one end to exchange an electric signal with the substrate to be measured 600 and to transmit the electric signal to the land portion 710 to which the other end is connected. Is the same as in the first embodiment. In addition, the connection terminal 200 is elastic so that the length from one end portion to the other end portion can be changed by the plunger pin 211 moving up and down the shell case 202 in response to the pressure on the substrate 600 to be measured. Is provided.

  The plunger pin 211 has conductivity, and has a cylindrical fluid discharge pipe 212 penetrating from one end to the other end. This is because the fluid is discharged from the plunger pin discharge port 203 from the inside of the shell case 202 through the plunger pin discharge port 208. During normal inspection, the contact 219 is installed so as to block the plunger pin discharge port 203, but when the wear during use reaches the wear limit point 213 from the electrode contact point 214, the plunger pin discharge port 203 is exposed. Then, the fluid inside the shell case 202 is discharged.

  A part of the outer peripheral side surface of the plunger pin 211 is covered with a shell case 202, and an oil ring 209 and a compression ring 210 are provided so as to surround the outer periphery of the plunger pin 211 at that portion. The oil ring 209 and the compression ring 210 are compressed in contact with the shell case 202 and maintain airtightness between the shell case 202 and the plunger pin 211.

  The conductive shell case 202 has an outer side surface 220 and a cavity including an inner side surface 221 and a ceiling surface 222 on the inner side, and the inner side surface 221 covers a part of the plunger pin 211. The shell case 202 is in contact with the plunger pin 211 and transmits an electrical signal from the plunger pin 211 to the land portion 710 via the mounting contact surface 215.

  In the other part of the shell case 202 that does not come into contact with the plunger pin 211, a shell case inner portion 218 is provided to secure an area where the plunger pin 211 can move up and down, and is spread above the inner side surface 221. A step 204 is provided. The spread step 204 serves as a stopper that prevents the oil ring 209 from returning downward when the oil ring 209 reaches the spread step 204.

  In the shell case inner portion 218, a fluid sealing container 205 made of a stretchable elastic body such as rubber is installed, and a fluid substance such as an inert gas is contained therein at a pressure higher than normal pressure. It is enclosed. In addition, an opening connected to the fluid discharge pipe 212 via the plunger pin discharge port 208 is provided in a portion that contacts the plunger pin 211 of the fluid sealing container 205. Therefore, the fluid in the fluid enclosure 205 is also filled in the fluid discharge pipe 212 via the plunger pin discharge port 208.

  Lubricating oil 207 is sealed in a portion of the shell case inner portion 218 where the fluid sealing container 205 is in contact with the inner wall of the shell case inner portion 218, and wear due to contact between the fluid sealing container 205 and the inner wall of the shell case inner portion 218 is prevented. Suppress.

  The above is the same as that of the first embodiment, and the second embodiment performs the same function as that of the first embodiment during a normal inspection. On the other hand, when the connection terminal is deteriorated, the second embodiment including the shell case discharge port 223 in addition to the first embodiment performs the following operation.

  As shown in FIG. 7, the shell case outlet 223 discharges the fluid enclosure container 205 to the outside of the shell case 202 when the fluid enclosure container 205 is damaged and the fluid substance inside flows out. Shrink. By doing so, the second embodiment enables detection of deterioration related to the elastic force of the connection terminal 200 other than deterioration due to wear of the contact 219.

  Since the fluid enclosure 205 is an elastic body like the elastic spring of the pogo pin, it can be worn and deteriorated by repeated compression. In addition, although the lubricating oil 207 is sealed in a portion where the fluid sealing container 205 is in contact with the inner wall of the shell case inner portion 218, it may be damaged due to wear.

  In the second embodiment, by providing the shell case discharge port 223 in the shell case 202, when the fluid sealing container 205 is damaged, the fluid is sealed at a pressure higher than the normal pressure inside the fluid sealing container 205. Is discharged out of the shell case 202. When the fluid sealing container 205 contracts according to the elastic force, the plunger pin 211 is drawn into the shell case 202 and the oil ring 209 installed on the side surface of the plunger pin 211 spreads and moves downward from the step 204. Be disturbed. By such a function, the connection terminal 200 is separated from the electrode 610 and is in a non-contact state, so that an electrical inspection is impossible, and deterioration of the connection terminal 200 due to breakage of the fluid enclosure 205 is detected.

  That is, the connection terminal 200 of the second embodiment detects deterioration due to breakage of the fluid enclosure 205 along with the deterioration of the contactor 219, and prompts replacement with a new connection terminal, thereby reducing the connection yield and error. Measurement can be suppressed.

  Needless to say, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

  When the deterioration of the connection terminal in the first and second embodiments described so far is detected by the fact that the connection terminal is separated from the electrode on the substrate to be measured and is in a non-contact state, electrical inspection is impossible. However, the detection method is not limited to this. For example, when the fluid enclosure contracts and the plunger pin is pulled into the shell case, the plunger pin comes into contact with the land portion to generate an electrical signal and detect the signal to connect. A method of detecting deterioration of the terminal may be used.

  Further, a method of detecting deterioration of the connection terminal by using a marking material or the like as the fluid substance sealed in the fluid sealing container and detecting the adhesion of the ink by a subsequent appearance inspection may be used.

  Further, a valve is provided at the opening on the plunger pin outlet 108 side of the fluid enclosure 105, and the valve of the fluid enclosure 105 is opened simultaneously with the abrasion due to wear of the contact 119 so that the fluid inside is discharged. Also good. For this purpose, for example, a cylindrical fluid discharge tube is provided along the inner wall in the fluid discharge pipe 112. By doing so, the tip of the fluid discharge cylinder is pushed toward the shell case 102 due to disappearance due to wear of the contact 119 and the tip of the plunger pin 111, the valve of the fluid enclosure container 105 is pushed open, and the fluid enclosure container 105. The fluid inside can be discharged.

10, 20 Inspection device 100, 200 Connection terminal 102, 202 Shell case 103, 108, 203, 208 Plunger pin discharge port 104, 204 Spreading step 105, 205 Fluid filled container 107, 207 Lubricating oil 109, 209 Oil ring 110, 210 Compression ring 111, 211 Plunger pin 112, 212 Fluid discharge pipe 113, 213 Wear limit point 114, 214 Electrode contact point 115, 215 Mounting contact surface 118, 218 Shell case inner part 119, 219 Contact 120, 220 Outer surface 121, 221 Inner side surfaces 122, 222 Ceiling surface 223 Shell case outlet 300 Holder 400 Holding substrate 500 Support substrate 410, 510 Through-hole 600 Substrate 610 Electrode 700 Wiring substrate 710 Land portion

Claims (5)

A connection terminal for contacting the board to be measured to obtain an electrical connection,
A plunger pin having a fluid discharge pipe penetrating from one end to the other end;
A contactor provided so as to close the first outlet of the one end of the plunger pin and capable of contacting the substrate to be measured;
A shell case having an outer side surface, a cavity including an inner side surface and a ceiling surface on the inner side, covering the inner side surface in contact with a part of the plunger pin, and electrically connected to the plunger pin;
A fluid-filled container that is provided between the ceiling surface and the plunger pin and has an opening connected to the other end of the plunger pin, in which a fluid is sealed at a pressure exceeding normal pressure; A connection terminal comprising:   The connection terminal according to claim 1, wherein the fluid enclosure is an elastic body.   3. The connection terminal according to claim 1, wherein a second discharge port penetrating from the inner side surface to the outer side surface is provided in a part of the shell case. A method for inspecting a semiconductor device, wherein inspection is performed by bringing the connection terminal according to any one of claims 1 to 3 into contact with the substrate to be measured.
The contact is scraped by contact with the substrate to be measured in the inspection, the first discharge port is exposed and the fluid is discharged, and the deterioration of the contact is detected.
A method for inspecting a semiconductor device, wherein the connection terminal is replaced. A method for inspecting a semiconductor device for inspecting at the connection terminal according to claim 3,
The contact is scraped by contact with the substrate to be measured in the inspection, the first discharge port is exposed and the fluid is discharged, and the deterioration of the contact is detected.
With the fluid being discharged from the second discharge port, the deterioration of the fluid enclosure is detected,
5. The method for inspecting a semiconductor device according to claim 4, wherein the connection terminal is exchanged.

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