JP7027212B2 - Inspection method for connection terminals and semiconductor devices - Google Patents

Description

The present invention relates to a connection terminal and a method for inspecting a semiconductor device.

A semiconductor device formed on a semiconductor substrate or the like is subjected to an electrical test as to whether or not it has a predetermined electrical characteristic, and the semiconductor device having a predetermined electrical characteristic is selected and shipped. Such tests are usually performed using a semiconductor inspection device equipped with a connection terminal for contacting the wiring substrate and the electrode of the semiconductor device on the semiconductor substrate, and pressing the connection terminal against the electrode to obtain an electrical signal between them. It is performed by exchanging and transmitting the electric signal to the wiring board. Pogo pins that utilize the elastic force of elastic springs are widely used as the connection terminals in order to alleviate damage to the electrodes due to pressing of the connection terminals against the electrodes.

Patent Document 1 states that in order to improve electrical connectivity in an electrical test of a semiconductor substrate using a semiconductor inspection device, the lower end of the pogo pin is elastic with and without contact with the electrode of the semiconductor device. The composition of pogo pins that can change the force is disclosed.

Japanese Unexamined Patent Publication No. 2016-142644

However, with the pogo pin configuration shown in Patent Document 1, it is difficult to detect a decrease in electrical connectivity due to deterioration such as wear of the tip of the pogo pin. Therefore, it is difficult to suppress a decrease in connection yield and erroneous measurement when electrical connectivity deteriorates due to deterioration of connection terminals such as pogo pins.

In view of the above points, the present invention suppresses the decrease in connection yield and erroneous measurement when the electrical connectivity deteriorates due to the deterioration of the tip of the connection terminal, and the accompanying shipment of low-quality semiconductor products. And to provide a method for inspecting semiconductor devices.

In order to solve the above problems, the present invention uses the following connection terminal and semiconductor device inspection methods.

That is, a plunger pin having a fluid discharge pipe inside which is a connection terminal for contacting the substrate to be measured and obtaining an electrical connection and penetrating from one end to the other end, and the plunger pin. The inner side surface is provided so as to close the first discharge port at the one end portion, and has a contactor that can contact the substrate to be measured, an outer surface, and a cavity including an inner surface surface and a ceiling surface inside. A shell case that is in contact with and covers a part of the plunger pin and is electrically connected to the plunger pin, and is provided between the ceiling surface and the plunger pin in the other of the plunger pin. The connection terminal comprises a fluid-filled container having an opening connected to the end and filled with a fluid at a pressure exceeding normal pressure.

Further, it is an inspection method of a semiconductor device in which the connection terminal is brought into contact with a substrate to be inspected, and the contactor is scraped by the contact with the substrate to be measured in the inspection, and the first discharge port is exposed. A method for inspecting a semiconductor device is characterized in that deterioration of the contact is detected and the connection terminal is replaced when the fluid is discharged.

According to the present invention, by detecting the deterioration of the tip of the connection terminal and prompting the replacement of the connection terminal, the connection yield is lowered or erroneously measured in the electrical test performed by bringing the connection terminal into contact with the substrate to be measured, and the measurement thereof. It is possible to suppress the accompanying shipment of low-quality semiconductor products.

It is a schematic cross-sectional view which shows the state of performing the electrical inspection of the substrate to be measured by the inspection apparatus provided with the connection terminal which concerns on 1st Embodiment of this invention. It is a schematic cross-sectional view of the connection terminal which concerns on 1st Embodiment. FIG. 3 is a schematic cross-sectional view showing a state immediately after the contact disappears in the connection terminal according to the first embodiment. It is a schematic cross-sectional view which shows the state when the fluid-filled container is contracted in the connection terminal which concerns on 1st Embodiment. It is a schematic cross-sectional view which shows the state of performing the electrical inspection of the substrate to be measured by the inspection apparatus provided with the connection terminal which concerns on 2nd Embodiment of this invention. It is a schematic cross-sectional view of the connection terminal which concerns on 2nd Embodiment. It is a schematic cross-sectional view which shows the state when the fluid-filled container is contracted in the connection terminal which concerns on 2nd Embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate. In the drawings used in the following description, in order to make the features of the present invention easy to understand, some of the featured portions may be seen through.

FIG. 1 is a schematic cross-sectional view of an inspection device showing a state in which an inspection device provided with a connection terminal of the first embodiment performs an electrical inspection of a substrate to be measured in order to facilitate understanding of the present invention. be. However, the connection terminal shows its appearance, not its cross section.

The inspection device 10 shown in FIG. 1 is a device for electrically inspecting the substrate 600 to be measured having the electrode 610, and is electrically connected to the wiring board 700 via the wiring board 700 and the land portion 710. Further, the connection terminal 100 of the first embodiment, the holding board 400 and the support board 500 for supporting the connection terminal 100, and the holder 300 for connecting the holding board 400 and the support board 500 are provided.

When performing an electrical inspection, the inspection device 10 moves from the state shown in FIG. 1 in the direction of the substrate 600 to be measured, brings the connection terminal 100 into contact with the electrode 610 on the substrate 600 to be measured, and makes electricity with the substrate 600 to be measured. Exchange signals.

The wiring board 700 is a board provided with wiring for processing an electric signal transmitted from the measured board 600 via the connection terminal 100, and includes a land portion 710 that is electrically connected to the connection terminal 100.

The support board 500 is installed on the surface of the wiring board 700 facing the measured board 600 and supports the connection terminal 100. A through hole 510 penetrating in the plate thickness direction is provided in a portion of the support substrate 500 where the land portion 710 is located, and this portion supports the connection terminal 100.

The holding substrate 400 is installed at a position away from the supporting substrate 500 in the direction of the substrate 600 to be measured, and holds the connection terminal 100. The holding substrate 400 is also provided with a through hole 410 penetrating in the plate thickness direction, and this portion supports the connection terminal 100.

The holder 300 is installed between the holding substrate 400 and the supporting substrate 500 in the outer peripheral region of the inspection device 10. The holder 300 fixes the holding board 400 that supports the connection terminal 100.

When one end of the connection terminal 100 comes into contact with the electrode 610 formed on the substrate 600 to be measured, the connection terminal 100 exchanges an electric signal with the substrate 600 to be measured, and the land portion to which the other end is connected. It is a terminal for transmitting the electric signal to the 710. The connection terminals 100 are supported by through holes 410 and 510, and are provided in large numbers so as to correspond to the electrodes 610.

FIG. 2 is a schematic cross-sectional view of the connection terminal 100 according to the first embodiment of the present invention. The connection terminal 100 has conductivity for exchanging electric signals between the electrode 610 on the substrate 600 to be measured and the land portion 710 in the wiring board 700. Further, the connection terminal 100 has a length from one end to the other by moving the shell case 102 up and down by the plunger pin 111 in response to the pressure from the inspection device 10 to the substrate 600 to be measured. It has variable elasticity.

The plunger pin 111 is conductive for exchanging electrical signals between the shell case 102 and the substrate 600 to be measured. Inside the plunger pin 111, a cylindrical fluid discharge pipe 112 is provided that penetrates from one end facing the substrate 600 to be measured to the other end facing the wiring board 700. This is so that the fluid that has flowed from the inside of the shell case 102 through the plunger pin discharge port 108 is discharged from the plunger pin discharge port 103. One end of the plunger pin 111 is provided with a contactor 119 which is conductive and can come into contact with the electrode 610 on the substrate 600 to be measured.

The contactor 119 has a triangular pyramid shape and has a length from the electrode contact point 114 in contact with the electrode 610 to the wear limit point 113 connected to the plunger pin 111, and has a plunger pin discharge port 103. It is installed so as to block it. The contactor 119 exposes the plunger pin discharge port 103 when the wear caused by the repeated contact with the electrode 610 reaches the wear limit point 113 from the electrode contact point 114, and discharges the fluid inside the shell case 102. Has a function.

A part of the outer peripheral side surface of the plunger pin 111 is covered with a shell case 102, and a compression ring 110 and an oil ring 109 are provided in the portion so as to surround the plunger pin 111. The compression ring 110 and the oil ring 109 are compressed in contact with the shell case 102 to maintain the airtightness between the shell case 102 and the plunger pin 111.

The shell case 102 has an outer surface 120 and a cavity inside the outer surface 121 including an inner surface 121 and a ceiling surface 122, and covers a part of the outer periphery of the plunger pin 111 on the inner surface 121. Further, the shell case 102 has conductivity, is in contact with the plunger pin 111 at a portion covering the plunger pin 111, and transmits an electric signal from the plunger pin 111 to the land portion 710 via the mounting contact surface 115. ..

In other portions of the shell case 102 that do not come into contact with the plunger pin 111, a shell case inner portion 118 is provided to secure an area in which the plunger pin 111 can move up and down. A spread step 104 is provided above the inner side surface 121 of the shell case inner portion 118. As will be described later, the spread step 104 serves as a stopper that prevents the oil ring 109 from returning downward from the spread step 104 when the oil ring 109 reaches the spread step 104.

In the shell case inner portion 118, a fluid filling container 105 is installed between the ceiling surface 122 of the shell case inner portion 118 and the plunger pin 111. The fluid-filled container 105 is made of a stretchable elastic body such as rubber, and a fluid substance such as an inert gas is sealed inside at a pressure higher than normal pressure. Further, an opening is provided in a portion of the fluid filling container 105 in contact with the plunger pin discharge port 108. Therefore, the fluid substance in the fluid filling container 105 is also filled in the fluid discharge pipe 112 via the plunger pin discharge port 108.

Lubricating oil 107 is sealed in a portion of the shell case inner portion 118 in which the fluid filling container 105 is in contact with the inner wall of the shell case inner portion 118. The lubricating oil 107 functions to suppress wear due to contact between the fluid-filled container 105 and the inner wall of the shell case inner portion 118.

The connection terminal 100 having the above configuration performs the following functions at the time of normal inspection and at the time of deterioration of the connection terminal.

First, during normal inspection, the inspection device 10 moves from the state shown in FIG. 1 in the direction of the substrate 600 to be measured, and the connection terminal 100 is brought into contact with the electrode 610 on the substrate 600 to be measured. Even after the connection terminal 100 comes into contact with the electrode 610, the inspection device 10 further presses it downward in order to improve the contact property and reduce the contact resistance. At this time, the plunger pin 111 constituting the connection terminal 100 shown in FIG. 2 moves upward in the shell case inner portion 118 while receiving the elastic force of the fluid-filled container 105 compressed by the applied pressure. Then, the connection terminal 100 alleviates damage to the electrode 610 due to the pressing of the contactor 119, and obtains stable electrical characteristics. At this time, the fluid-filled container 105 corresponds to the elastic spring of the pogo pin in the prior art, and generates a constant elastic force as long as the fluid inside does not leak.

Secondly, a case where the contact terminal is deteriorated such that the contact 119 is scraped by repeated contact between the contact 119 and the electrode 610 will be described. If the electrical inspection is continued with the contact 119 excessively scraped, the electrical connectivity between the contact 119 and the electrode 610 deteriorates, resulting in a decrease in connection yield and erroneous measurement. When the connection yield decreases, the throughput decreases due to the remeasurement. Further, if an erroneous measurement occurs, a semiconductor device deviating from a predetermined electrical characteristic may be selected as a non-defective product and a low-quality semiconductor product may be shipped.

As shown in FIG. 3, in the first embodiment, when the contact 119 is scraped by wear with the electrode 610 and the scraping reaches the wear limit point 113 from the electrode contact point 114, the plunger pin discharge port 103 Is exposed. When the plunger pin discharge port 103 is exposed, the fluid in the fluid discharge pipe 112 and the fluid filling container 105 connected to the fluid discharge pipe 112 is discharged from the plunger pin discharge port 103, and the pressure exceeds the normal pressure. The pressure inside the fluid-filled container 105 is reduced, and the fluid-filled container 105 contracts according to its elastic force.

Then, as shown in FIG. 4, the plunger pin 111 connected to the fluid filling container 105 via the plunger pin discharge port 108 is pulled into the cavity of the shell case 102 by the contraction of the fluid filling container 105. .. When the plunger pin 111 is pulled into the cavity of the shell case 102 and the oil ring 109 expands and reaches the step 104, the expansion of the space releases the compression of the oil ring 109 until it touches the inside of the expansion step 104. Therefore, the spread step 104 serves as a stopper for the downward movement of the oil ring 109, and the plunger pin 111 is prevented from moving downward from the state shown in FIG.

By the above-mentioned function, the connection terminal 100 is separated from the electrode 610 and the non-contact state is maintained, so that the electrical inspection becomes impossible and the deterioration of the connection terminal 100 due to the scraping of the contact 119 is detected. Upon receiving the detection of deterioration of the connection terminal 100, the deteriorated connection terminal is replaced with a new connection terminal, and the electrical inspection is restarted. Is suppressed.

Next, the connection terminal according to the second embodiment of the present invention will be described. FIG. 5 is a schematic cross-sectional view of the inspection device showing how the inspection device provided with the connection terminal of the second embodiment performs an electrical inspection of the substrate to be measured. However, the connection terminal shows the appearance, not the cross section.

As shown in FIG. 5, the inspection device 20 that performs an electrical test of the substrate 600 to be measured is a connection between the wiring board 700 and the second embodiment electrically connected to the wiring board 700 via the land portion 710. It includes a terminal 200, a holding board 400 and a supporting board 500 that support the connection terminal 200, and a holder 300 that connects the holding board 400 and the supporting board 500. The connection terminal 200 of the second embodiment is newly provided with a shell case discharge port 223 with respect to the first embodiment. The shell case discharge port 223 is capable of discharging a fluid substance in the shell case to the outside of the inspection device 20 by a groove (not shown) provided in the support substrate 500.

When performing an electrical inspection, the inspection device 20 moves from the state shown in FIG. 5 in the direction of the substrate 600 to be measured, brings the connection terminal 200 into contact with the electrode 610 on the substrate 600 to be measured, and makes electricity with the substrate 600 to be measured. Exchange signals.

FIG. 6 is a schematic cross-sectional view of the connection terminal 200 according to the second embodiment of the present invention. The connection terminal 200 has conductivity in which it contacts the electrode 610 at one end and exchanges an electric signal with the substrate 600 to be measured, and transmits the electric signal to the land portion 710 to which the other end is connected. Is the same as in the first embodiment. Further, the connection terminal 200 has elasticity that allows the length from one end to the other end to be changed by the plunger pin 211 moving up and down the shell case 202 in response to the pressure on the substrate 600 to be measured. To prepare for.

The plunger pin 211 is conductive and has an internal cylindrical fluid discharge pipe 212 that penetrates from one end to the other. This is to allow the fluid to be discharged from the plunger pin discharge port 203 from the inside of the shell case 202 through the plunger pin discharge port 208. During normal inspection, the contactor 219 is installed so as to block the plunger pin discharge port 203, but when the wear during use reaches the wear limit point 213 from the electrode contact point 214, the plunger pin discharge port 203 is exposed. Then, the fluid inside the shell case 202 is discharged.

A part of the side surface of the outer periphery of the plunger pin 211 is covered with a shell case 202, and an oil ring 209 and a compression ring 210 are provided at that portion so as to surround the outer periphery of the plunger pin 211. The oil ring 209 and the compression ring 210 are compressed in contact with the shell case 202 to maintain the airtightness between the shell case 202 and the plunger pin 211.

The conductive shell case 202 has an outer surface 220 and a cavity inside the outer surface 220 including an inner surface 221 and a ceiling surface 222, and covers a part of the plunger pin 211 on the inner surface 221. Further, the shell case 202 is in contact with the plunger pin 211, and an electric signal from the plunger pin 211 is transmitted to the land portion 710 via the mounting contact surface 215.

In other parts of the shell case 202 that do not come into contact with the plunger pin 211, a shell case inner portion 218 is provided to secure an area in which the plunger pin 211 can move up and down, and the shell case inner portion 218 is provided above the inner side surface 221 thereof. Step 204 is provided. The spread step 204 serves as a stopper that prevents the oil ring 209 from returning downward from the spread step 204 when the oil ring 209 spreads and reaches the step 204.

A fluid-filled container 205 made of a stretchable elastic body such as rubber is installed in the inner part 218 of the shell case, and a fluid substance such as an inert gas is placed inside the container at a pressure higher than normal pressure. It is enclosed. Further, an opening connected to the fluid discharge pipe 212 via the plunger pin discharge port 208 is provided at a portion of the fluid filling container 205 in contact with the plunger pin 211. Therefore, the fluid substance in the fluid filling container 205 is also filled in the fluid discharge pipe 212 via the plunger pin discharge port 208.

Lubricating oil 207 is sealed in the portion of the shell case inner portion 218 where the fluid-filled container 205 is in contact with the inner wall of the shell case inner portion 218, and wear due to contact between the fluid-filled container 205 and the inner wall of the shell case inner portion 218 is caused. Suppress.

The above is the same as the first embodiment, and the second embodiment performs the same function as the first embodiment at the time of normal inspection. On the other hand, when the connection terminal is deteriorated, the second embodiment provided with the shell case discharge port 223 in addition to the first embodiment performs the following functions.

As shown in FIG. 7, in the shell case discharge port 223, when the fluid filling container 205 is damaged and the fluid inside flows out, the fluid is discharged to the outside of the shell case 202, and the fluid filling container 205 is discharged. Shrink. By doing so, the second embodiment makes it possible to detect deterioration related to the elastic force of the connection terminal 200 other than deterioration due to wear of the contactor 219.

Since the fluid-filled container 205 is an elastic body like the elastic spring of the pogo pin, it may be worn and deteriorated by repeated compression. Further, although the lubricating oil 207 is sealed in the portion where the fluid-filled container 205 is in contact with the inner wall of the inner wall of the shell case 218, it is considered that the fluid-filled container 205 is damaged by wear.

In the second embodiment, the shell case 202 is provided with the shell case discharge port 223, so that when the fluid-filled container 205 is damaged, the fluid is sealed at a pressure higher than the normal pressure inside the fluid-filled container 205. Is discharged to the outside of the shell case 202. Then, at the same time that the fluid filling container 205 contracts according to its elastic force, the plunger pin 211 is pulled into the shell case 202, and the oil ring 209 installed on the side surface of the plunger pin 211 expands and moves downward from the step 204. Be hindered. Due to such an action, the connection terminal 200 is separated from the electrode 610 and becomes a non-contact state, so that an electrical inspection becomes impossible and deterioration of the connection terminal 200 due to damage of the fluid filling container 205 is detected.

That is, the connection terminal 200 of the second embodiment detects the deterioration of the contact 219 and the deterioration due to the breakage of the fluid filling container 205, and prompts the replacement with a new connection terminal, so that the connection yield is lowered or erroneous. The measurement can be suppressed.

Needless to say, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

Deterioration of the connection terminals in the first and second embodiments described above is detected by the fact that the connection terminals are separated from the electrodes on the substrate to be measured and become non-contact state, which makes electrical inspection impossible. However, the method of detection is not limited to this. For example, when the fluid-filled container contracts and the plunger pin is pulled into the shell case, the plunger pin comes into contact with the land portion to generate an electrical signal, and the connection is made by detecting the signal. A method of detecting the deterioration of the terminal may be used.

Further, a method of detecting deterioration of the connection terminal may be performed by using a fluid substance to be sealed in the fluid filling container as ink for marking or the like and detecting the adhesion of the ink in a later visual inspection.

Further, a valve is provided at the opening on the plunger pin discharge port 108 side of the fluid filling container 105, and the valve of the fluid filling container 105 opens at the same time as the contact 119 is scraped due to wear, and the fluid inside is discharged. May be good. For this purpose, for example, a cylindrical fluid discharge cylinder is provided along the inner wall in the fluid discharge pipe 112. By doing so, the tip of the fluid discharge cylinder is pushed toward the shell case 102 due to disappearance due to wear of the contact 119 and the tip of the plunger pin 111, the valve of the fluid filling container 105 is pushed open, and the fluid filling container 105 is pushed open. The fluid inside can be discharged.

10, 20 Inspection device 100, 200 Connection terminal 102, 202 Shell case 103, 108, 203, 208 Plunger pin discharge port 104, 204 Spread step 105, 205 Fluid filling container 107, 207 Lubricating oil 109, 209 Oil ring 110, 210 Compression ring 111, 211 Plunger pin 112, 212 Fluid discharge pipe 113, 213 Wear limit point 114, 214 Electrode contact point 115, 215 Mounting contact surface 118, 218 Shell case inner part 119, 219 Outer side surface 121,221 Inner side surface 122,222 Ceiling surface 223 Shell case Discharge port 300 Holder 400 Holding board 500 Support board 410, 510 Through hole 600 Measured board 610 Electrode 700 Wiring board 710 Land part

Claims (5)

It is a connection terminal for contacting the substrate to be measured and obtaining an electrical connection.
A plunger pin having a fluid discharge pipe that penetrates from one end to the other end and having a ring that urges in the radial direction on the outer circumference of the other end .
A contact that is provided so as to close the first discharge port at the one end of the plunger pin and exposes the first discharge port when it comes into contact with the substrate to be measured and wears .
An outer surface, a first inner surface that slidably accommodates the other end of the plunger pin and the ring inside, a second inner surface having an inner diameter larger than that of the first inner surface, and an inner surface. A shell case that has a cavity including the ceiling surface and is electrically connected to the plunger pin.
The fluid material provided between the ceiling surface and the plunger pin in the cavity , having an opening connected to the fluid discharge pipe of the plunger pin, and being sealed at a pressure exceeding normal pressure is said . With a fluid-filled container that contracts when discharged from the first discharge port through the fluid discharge pipe through the opening and makes the ring slidable from the first inner surface to the second inner surface. A connection terminal characterized by being provided with. The connection terminal according to claim 1, wherein the fluid-filled container is an elastic body. The connection terminal according to claim 1 or 2, wherein a part of the shell case is provided with a second discharge port penetrating from the inner side surface to the outer side surface. A method for inspecting a semiconductor device, wherein the connection terminal according to any one of claims 1 to 3 is brought into contact with the substrate to be inspected for inspection.
When the contact is scraped by contact with the substrate to be measured in the inspection and the first discharge port is exposed and the fluid is discharged , the ring is brought into the second by the contraction of the fluid-filled container. The ring that spreads when sliding on the inner side surface is locked by a step between the first inner side surface and the second inner side surface, and the contactor cannot contact the measured substrate and the measured substrate cannot be contacted. The deterioration of the contact is detected by the inability to inspect the contact.
A method for inspecting a semiconductor device, which comprises replacing the connection terminal. The connection terminal further comprises a second outlet that penetrates from the inner surface to the outer surface in a part of the shell case.
The method for inspecting a semiconductor device according to claim 4, wherein the fluid is discharged from the second discharge port.

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