JP2019161211A - 高速イメージセンサ - Google Patents
高速イメージセンサ Download PDFInfo
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- JP2019161211A JP2019161211A JP2018197034A JP2018197034A JP2019161211A JP 2019161211 A JP2019161211 A JP 2019161211A JP 2018197034 A JP2018197034 A JP 2018197034A JP 2018197034 A JP2018197034 A JP 2018197034A JP 2019161211 A JP2019161211 A JP 2019161211A
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 45
- 238000003384 imaging method Methods 0.000 claims description 39
- 239000004065 semiconductor Substances 0.000 claims description 19
- 239000012212 insulator Substances 0.000 claims description 16
- 238000003860 storage Methods 0.000 claims description 12
- 230000001629 suppression Effects 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 34
- 238000009792 diffusion process Methods 0.000 abstract description 34
- 229910052710 silicon Inorganic materials 0.000 abstract description 34
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910052796 boron Inorganic materials 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 229920005591 polysilicon Polymers 0.000 description 9
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
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- 238000010438 heat treatment Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000009795 derivation Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002292 fluorescence lifetime imaging microscopy Methods 0.000 description 2
- 102000034287 fluorescent proteins Human genes 0.000 description 2
- 108091006047 fluorescent proteins Proteins 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000003834 intracellular effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
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- 239000002245 particle Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
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- 239000000463 material Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- -1 phosphorus ions Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000001269 time-of-flight mass spectrometry Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14605—Structural or functional details relating to the position of the pixel elements, e.g. smaller pixel elements in the center of the imager compared to pixel elements at the periphery
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14607—Geometry of the photosensitive area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/1461—Pixel-elements with integrated switching, control, storage or amplification elements characterised by the photosensitive area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14806—Structural or functional details thereof
- H01L27/14812—Special geometry or disposition of pixel-elements, address lines or gate-electrodes
- H01L27/14818—Optical shielding
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14629—Reflectors
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- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
表面側の画像信号収集手段に到達する信号電荷の到達時間のばらつきを効果的に小さくすることができ、超短時間単位の撮影できる撮像手段を提供する。
ロート型では垂直電界に対する水平電界が、ロート型水平運動の抑制手段の表面の、水平方向に対する角度の略正弦値倍になり、垂直方向電界よりやや弱いが、同オーダーとなり、光電変換手段内での高速電荷移動を達成できる。その表面側の回路層では、別の手段で水平電界を強化することができる。筒型では、信号電荷が、画素境界近くの水平方向電界の小さい領域を通過しないので、信号電荷の高速収集による到達時間のばらつきを効果的に抑制できる。
信号電荷が該絶縁体に衝突することなく、該絶縁体の表面側に集まって信号電荷の収集効率が100%近くになる。
該水平運動の抑制手段の表面を絶縁体とするためのエッチング工程ではなく、該水平運動の抑制手段の外部を、信号電荷の極性と逆の極性のイオン注入で作成することができ、エッチング工程による光電変換層のダメージを減らし、暗電流を下げることができる。
画像信号のその場記録による超高速撮影ができる。
信号電荷の収集および移送時間が等しくなり、信号電荷の電荷収集手段あるいは電荷保存手段までの到達時間のばらつきを抑制できる。
入射荷電粒子が可視光や近赤外光の場合は、裏面に入射した直後に、光電変換手段の裏面近傍で拡散され、光電変換手段中への到達距離が短くなる。従って、光電変換手段を薄くでき、より高速化できる。
裏面側と表面側の電界が限界電界のような大きな電界であっても、十分強い電界のバリアを確保し、画像信号収集手段や画像信号保存手段への電子の流入を防止でき、より高速の撮像手段を提供する。
2.中央に孔を持つpwell
3.pwellの下の機能性回路層
4.信号電荷
5.表面側の1画素の平面構造
6.画素中心
7.高い電圧VHがかけられている電荷収集手段
8.低い電圧VLがかけられている電荷収集手段
9.画像信号の保存手段
10.画像信号を受光領域の外部に呼び出すための信号読み出し回路
11.MCGイメージセンサの裏面
12.入射光
13.信号電子光電変換層内の垂直下方への移動方向
14.p−wellの周りを中心に向かう斜め水平の信号電子の移動方向
15.p−wellの孔を通って垂直下方に移動する信号電子の移動方向
16.p−wellの孔
17.VHをかけられた電荷収集手段に向かう斜め水平の信号電子の移動方向
18.正規分布の標準偏差の2倍
19.第1の入射光群で生成し、表面側に近づいたときの平均時刻
20.第2の入射光群で生成し、表面側に近づいたときの平均時刻
21.第2の入射光群
22.第1の入射光群の入射直後に生成した電子群
23.第1の入射光群で生成し、表面側に近づいた電子群
24.第2の入射光群で生成し、表面側に近づいた電子群
25.ドリフト速度
26.電界
27.拡散係数
28.限界電界(拡散係数が最小値を取る時の電界値)
29.本発明の第1実施例の断面図
30.本発明のイメージセンサの集光部
31.本発明のイメージセンサの撮像部
32.本発明のイメージセンサのドライバー部
33.センサチップとドライバーチップを電気的に接合するためのバンプ
34.マイクロレンズ
35.ライトガイド
36.第1の遮光層
37.第1の絶縁層
38.光電変換層
39.第2の遮光層
40.第2の絶縁層
41.回路拡散層
42.第3の絶縁層
43.センサチップの回路層
44.DTIの内部の裏面に電圧を与えるためのコンタクトポイント
45.DTI
46.本発明の第2の実施例の断面図
47.第1の実施例に相当する断面のポテンシャル分布
48.画素中心における表面から裏面までのポテンシャル(電位)
49.光の瞬間的入射後20ピコ秒の信号電子の分布
50.本発明の第3の実施例の断面図
51.オンチップフレネルレンズ
52.ライトガイド52
53.集光手段
54.ロート状のpwell
55.本発明の第4の実施の形態
56.画素
57.DTI
58.光電変換層
59.ロート状の信号電荷の水平方向運動の抑制手段
60.絶縁層
61.ポリシリコン
62.台形突起の先端面
63.エピタキシャル層63
64.配線層
65.イメージセンサ全体図
66.イメージング部
67.制御部
68.アナログ処理部
69.AD変換部
70.ラインメモリ
71.通信部(LVDS)
72.通信ターミナル
73.カメラの全体図
74.パッケージ
75.カメラの本体部
76.撮影部
77.カメラ制御部
78.入射光
79.光学系
80.本発明になるイメージセンサ
81.バッファメモリ
82.メイン処理回路
83.イメージセンサの駆動回路
84.DSP(デジタル画像信号処理プロセッサー)
85.画像メモリ
86.表示エンジン
87.凸ピラミッド集光手段のまわりの等電位線
88.凸ピラミッド集光手段の外部の酸化シリコン
89.等電位線と凸ピラミッド集光手段との表面側の交角
90.凸ピラミッド集光手段に近づいた電子
91.凸ピラミッド集光手段の表面の厚さが薄く、濃いボロンの層
92.凸ピラミッド集光手段の下端の開口部
93.各画素の表面側の凹型ピラミッドの配列
94.凸ピラミッド集光手段の下端の酸化膜
95.凸ピラミッド集光手段の下端の酸化膜の表面の電極
96.該酸化膜を垂直に通る配線96
97.信号電荷を下部のシリコン回路拡散層に送る配線
98.配線層
99.駆動回路チップなどの接合チップ
Claims (9)
- M行×N列(M≧1、N≧1)の画素を備える裏面照射撮像手段であって、受光面を「裏面」と呼び、反対側を「表面」、これらに平行な方向を「平行方向」、直角な方向を「垂直方向」と呼ぶとき、各画素が入射光を電荷に変換する光電変換層を備え、該光電変換層内に、信号電荷の平行方向の運動を抑制する手段(以下「水平運動の抑制手段」と呼ぶ)を備える。
- 請求項1の撮像手段であって、該水平運動の抑制手段が、中心が裏面に対して直交する方向に延在する絶縁体からなる表面側に向かって断面積が縮小するロート型、もしくは画素サイズより実質的に小さいサイズの筒型の光電変換手段である。
- 請求項2の撮像手段であって、中心が裏面に対して直交する方向に延在する絶縁体の表面における等電位線と該絶縁体の表面との表面側の交角が、該絶縁体の表面の広い面積にわたって90度以上である。
- 請求項1の撮像手段であって、各画素への入射光を画素サイズより実質的に小さいサイズの領域に集光する手段を備えるとともに、該水平運動の抑制手段が、裏面近傍において該入射光の集光領域と同程度で、かつ、中心が裏面に対して直交方向に延在する半導体からなる表面側に向かって断面積が縮小するロート型、もしくは筒型の光電変換手段である。
- 請求項1の撮像手段であって、各画素が複数の電荷収集手段または電荷保存手段を備える。
- 請求項5の撮像手段であって、該複数の電荷収集手段または電荷保保存手段が画素中心に対して放射状に配置されている。
- 請求項1から請求項6までのいずれかの撮像手段であって、裏面側にピラミッド型の凹凸を備える。
- 請求項1から請求項6までのいずれかの撮像手段であって、少なくとも、水平方向に延在する上下に重なった2つの半導体層と、該2つの半導体層を電気的に隔離する水平方向に延在する絶縁層とを備えるとともに、各画素が該絶縁層を垂直方向に貫いて、該2つの半導体層を電気的に接続する画素サイズより実質的に小さいサイズの導電手段を備える。
- 請求項1から請求項8までのいずれかの撮像手段を備える撮像装置。
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JP2009088030A (ja) * | 2007-09-27 | 2009-04-23 | Fujifilm Corp | 裏面照射型撮像素子 |
JP2009158798A (ja) * | 2007-12-27 | 2009-07-16 | Konica Minolta Holdings Inc | 光センサ、光センサアレイ、撮像素子、撮像装置および光センサの製造方法 |
WO2013129559A1 (ja) * | 2012-02-29 | 2013-09-06 | Etoh Takeharu | 固体撮像装置 |
WO2015190318A1 (ja) * | 2014-06-11 | 2015-12-17 | ソニー株式会社 | 固体撮像素子、および電子装置 |
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JP2009088030A (ja) * | 2007-09-27 | 2009-04-23 | Fujifilm Corp | 裏面照射型撮像素子 |
JP2009158798A (ja) * | 2007-12-27 | 2009-07-16 | Konica Minolta Holdings Inc | 光センサ、光センサアレイ、撮像素子、撮像装置および光センサの製造方法 |
WO2013129559A1 (ja) * | 2012-02-29 | 2013-09-06 | Etoh Takeharu | 固体撮像装置 |
WO2015190318A1 (ja) * | 2014-06-11 | 2015-12-17 | ソニー株式会社 | 固体撮像素子、および電子装置 |
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