JP2019155481A - Cutting device - Google Patents

Abstract

To shorten a cut groove length measuring time when performing set-up of chopper cut.SOLUTION: A cutting device 1 comprises blade diameter recognition means 8. The blade diameter recognition means 8 comprises: a confirmation table 80 which holds a work-piece W1 for confirmation; groove formation storage means 81 which stores a Z-axial position Z1 of cutting means 61 when causing a blade 613 to cut into the work-piece W1 for confirmation, thereby forming a cut groove M1; a camera 85 which can capture an image of the formed cut groove M1 from above; groove length measuring means 83 which determines a pixel, such that an average brightness value of pixels in Y-axial one row of an imaged picture G1 captured by the camera 85 is smaller than a prescribed brightness value, as a cut groove, counts the same in an X direction, and so makes the same as to be a length of the cut groove M1; and calculation mean 84. The calculation means 84 calculates a diameter 2r1 of the blade 613 by use of a length M1d of the cut groove M1, a height position Z3 of a holding area 800a of the confirmation table 80, the Z-axial position Z1 of the cutting means 61 stored by the groove formation storage means 81 when forming the cut groove M1.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a cutting apparatus that cuts a workpiece with a cutting blade.

  A cutting device that cuts a workpiece such as a semiconductor wafer with a rotating cutting blade is used for cutting before the actual cutting, for example, when the tip of the cutting blade contacts the upper surface of a holding table that holds a plate-like workpiece. Perform the setup to recognize the height position of the blade, determine the cutting position of the cutting blade based on the height position of the holding surface of the holding table recognized in the setup, and then cut the actual plate workpiece Yes.

The setup consists of a contact setup in which the tip of the cutting blade contacts the upper surface of the holding table as described above, a non-contact setup performed by an optical sensor that recognizes the tip of the cutting blade, and a plate workpiece held by the holding table. There is a chopper cut setup in which setup is performed by measuring the length of a long cutting groove formed by cutting a blade.
In the chopper cut setup, a confirmation table for confirming the cutting grooves different from the actual machining holding table is used, and the confirmation workpiece is held on the confirmation table and formed on the confirmation workpiece. The captured cutting groove is imaged with a camera. Then, from the length of the cutting groove measured using the formed image and the distance from the spindle axis when the cutting blade is cut into the workpiece to the upper surface of the workpiece held by the check table The radius of the cutting blade is calculated, and the height of the cutting blade where the tip of the cutting blade contacts the upper surface of the holding table is recognized (calculated) (for example, see Patent Documents 1 and 2).

JP 2002-059365 A JP2013-041972A

In the chopper cut setup, in order to measure the length of the cutting groove, the image obtained by imaging the cutting groove is binarized, and the pixels expressed in black in the captured image are counted in the X-axis direction to calculate the length of the cutting groove. Is measuring. Thus, in order to binarize the image and accurately represent the cutting groove, it is better that the upper surface of the work piece for confirmation is not dirty. Therefore, it is necessary to clean and dry the surface of the workpiece after forming the cutting groove in the workpiece, and it takes time from the formation of the cutting groove to imaging. In addition, if the cleaning is insufficient, there is a possibility that the binarization process may cause black to be expressed by cutting waste, and as a result, the cutting groove may be expressed longer than actual. In addition, even if the cutting waste generated during cutting of the plate-like work held on the actual holding table for machining has jumped to the work piece held on the check table, In some cases, the binarization process is expressed in black, and the cutting groove is expressed longer than actual. In order to prevent such a situation from occurring, it is necessary to clean the upper surface of the work piece for confirmation so as not to attach the cutting waste, or to cover the upper face of the work piece for confirmation so that the cutting waste does not adhere. There is a need to. Thus, in the chopper cut setup, there is a problem that it takes time to measure the length of the cutting groove by performing binarization processing, surface cleaning processing, and the like.
In addition, when the thickness of the cutting blade is thick, a large amount of cutting waste is generated, and the upper surface of the workpiece to be confirmed tends to get dirty. Therefore, in order to measure the length of the cutting groove imaged in the captured image by performing binarization processing, it is necessary to clean the surface to be cut sufficiently, and it takes time to measure the length of the cutting groove. There's a problem.

  Therefore, the chopper cut setup has a problem of shortening the time required for measuring the length of the cutting groove.

  In order to solve the above problems, the present invention provides a holding table having a holding surface for holding a workpiece, and a workpiece held by the holding table, which is rotatably supported by a spindle with a cutting blade attached to the tip. Cutting means for cutting with a cutting blade, X-axis moving means for relatively moving the cutting means and the holding table in the X-axis direction of the cutting feed direction, and the Z-axis direction perpendicular to the holding surface A cutting device comprising: a Z-axis moving means for relatively moving the cutting means and the holding table; and a diameter recognizing means for recognizing the diameter of the cutting blade, the diameter recognizing means comprising: A confirmation table that is adjacent to the holding table and that holds the workpiece to be cut, and a direction in which the cutting blade approaches the confirmation table in the Z-axis direction from above the confirmation table A groove forming storage means for storing the position of the cutting means in the Z-axis direction when a long cut groove is formed by moving a predetermined amount and cutting into a work piece for confirmation held by the confirmation table; A camera capable of imaging the cut groove formed on the workpiece from above, and all pixels arranged in one row in the Y-axis direction perpendicular to the X-axis direction in the horizontal direction of the image captured by the camera. When the average value of the luminance values is smaller than a predetermined luminance value, the pixel of the row is determined as a cutting groove, and is counted in the X-axis direction to obtain the length of the cutting groove, and a calculation means, The calculating means includes the length of the cutting groove measured by the groove length measuring means, the height position of the holding surface of the confirmation table for holding the confirmation workpiece, and the cutting groove on the confirmation workpiece. Z-axis direction of the cutting means stored by the groove forming storage means when forming Position and a cutting device for calculating the diameter of the cutting blade with.

  The diameter recognizing means determines a black pixel in the binarized image captured by the camera as the cutting groove and counts the black pixels arranged in the X-axis direction as the length of the cutting groove. A second groove length measuring means; a setting means for setting at least a thickness of the cutting blade mounted on the spindle; and the groove length measuring means and the first according to the thickness of the cutting blade set in the setting means. Switching means for switching between the two groove length measuring means, and the switching means switches between the groove length measuring means and the second groove length measuring means in accordance with the thickness of the cutting blade. It is preferable that the length can be measured.

  The cutting apparatus according to the present invention includes a diameter recognizing unit for recognizing the diameter of the cutting blade, and the diameter recognizing unit includes a confirmation table that holds a work piece for confirmation adjacent to the holding table and that cuts the cutting blade. When the cutting blade is moved from the upper side of the confirmation table by a predetermined amount in the direction approaching the confirmation table in the Z-axis direction and cut into the work piece for confirmation held by the confirmation table, a long cutting groove is formed. A groove forming storage means for storing the position of one cutting means in the Z-axis direction, a camera capable of picking up the cutting groove formed in the workpiece to be confirmed by the groove forming storage means from above, and Y of an image captured by the camera The average value of the luminance values of all the pixels arranged in the axial direction (pixels constituting one column) is calculated, and the averaging operation is performed in the X-axis direction. The pixel of the column whose luminance value is smaller (darker) than the predetermined luminance value set in advance is determined as a cutting groove and is counted in the X-axis direction to obtain the length of the cutting groove, and a calculation means. It is possible to measure the length of the cutting groove quickly without detecting the coordinate position of the cutting groove or binarizing the captured image when performing chopper cut setup. By eliminating the need for the treatment, it is not necessary to cover the upper surface of the work piece for confirmation or to sufficiently clean the upper face of the work piece for confirmation so that cutting waste does not adhere. Then, the calculated cutting groove length, the height position of the holding surface of the confirmation table for holding the confirmation workpiece, and the groove formation memory when the cutting groove is formed in the confirmation workpiece by the calculating means Since the cutting blade diameter can be calculated using the Z-axis direction position of the cutting means stored in the means, the chopper cut setup can be completed quickly.

  The diameter recognizing means determines a black pixel in the binarized image captured by the camera as a cutting groove, counts the black pixels arranged in the X-axis direction, and sets the length of the cutting groove as a second groove length. Measuring means, setting means for setting at least the thickness of the cutting blade mounted on the spindle, and switching means for switching between the groove length measuring means and the second groove length measuring means in accordance with the thickness of the cutting blade set in the setting means And the switching means switches between the groove length measuring means and the second groove length measuring means so that the length of the cutting groove can be measured. That is, when the cutting blade is a thick cutting blade, the groove The length of the cutting groove is quickly measured without performing binarization processing by the length measuring means, and when the cutting blade is a thin cutting blade, binarization processing is performed by the second groove length measuring means and the cutting groove is processed. Accurately measure the length of And in, in accordance with the thickness of the cutting blade, while the fit within the allowable range needed accuracy of calculating the diameter of the cutting blade by the calculating means, it is possible to perform the chopper cut up.

It is a perspective view which shows an example of a cutting device. It is a side view which shows the state which positioned the to-be-processed workpiece for attraction | suction holding | maintenance with the confirmation table below the 1st cutting means. It is a side view which shows the state which cut the cutting blade in the to-be-checked workpiece sucked and held by the confirmation table, and has formed the cutting groove. FIG. 4A is a side view showing a cutting groove formed by a cutting blade. FIG. 4B is a plan view showing the cutting groove formed by the cutting blade. It is a side view which shows the state which images the workpiece for confirmation in which the cutting groove was formed from upper direction with a camera. It is explanatory drawing which shows typically the state by which the captured image which the cutting groove formed with the thick blade was reflected was displayed on the screen of a monitor. It is explanatory drawing explaining calculation of the diameter of the cutting blade by a calculation means. It is explanatory drawing which shows the structural example of the diameter recognition means further provided with a 2nd groove length measurement means. It is explanatory drawing which shows typically the state by which the picked-up image which showed the cutting groove formed with the thin braid | blade was displayed on the screen of a monitor.

The cutting apparatus 1 shown in FIG. 1 according to the present invention cuts the workpiece W held on the holding table 30 by the first cutting means 61 or the second cutting means 62 provided with the cutting blade 613 that rotates. It is a device that can.
The workpiece W is, for example, a circular plate-shaped semiconductor wafer, and devices D are formed on the surface Wa of the workpiece W in lattice-like regions partitioned by streets S, respectively. A dicing tape (not shown) is attached to the back surface Wb of the workpiece W.

  On the base 10 of the cutting apparatus 1, an X-axis moving means 13 that moves the first cutting means 61 and the holding table 30 relatively in the X-axis direction of the cutting feed direction is disposed. The X-axis moving means 13 includes a ball screw 130 having an axis in the X-axis direction, a pair of guide rails 131 arranged in parallel to the ball screw 130, a motor 132 that rotates the ball screw 130, and an internal nut that is a ball screw. The movable plate 133 is screwed into 130 and has a bottom portion that is in sliding contact with the guide rail 131. Then, when the motor 132 rotates the ball screw 130, the movable plate 133 is guided by the guide rail 131 and moves in the X-axis direction, and the holding table 30 disposed on the movable plate 133 is moved to the movable plate 133. The workpiece W held on the holding table 30 is cut and fed by moving in the X-axis direction along with the movement.

  The holding table 30 that holds the workpiece W has, for example, a disk-like outer shape, and includes a suction portion 300 made of a porous member that sucks the workpiece W and a frame body 301 that supports the suction portion 300. The workpiece W is sucked and held on the holding surface 300a which is the exposed surface of the suction portion 300 and is flush with the frame body 301. The holding table 30 can be rotated around the axis in the Z-axis direction by rotating means 32 disposed on the bottom side of the holding table 30.

  On the rear side of the base 10, the portal column 14 is erected so as to straddle the moving path of the holding table 30. On the front surface of the portal column 14, for example, a first Y-axis moving unit 15 that reciprocates the first cutting unit 61 in the Y-axis direction orthogonal to the X-axis direction and the Z-axis direction is disposed. .

  The first Y-axis moving unit 15 is connected to, for example, a ball screw 150 having an axis in the Y-axis direction, a pair of guide rails 151 arranged in parallel to the ball screw 150, and one end on the + Y direction side of the ball screw 150. And a movable plate 153 whose inner side is screwed into the ball screw 150 and whose side part is in sliding contact with the guide rail 151. When a motor (not shown) rotates the ball screw 150, the movable plate 153 is guided by the guide rail 151 and moves in the Y-axis direction, and the first Z-axis moving means 17 is moved on the movable plate 153 via the first Z-axis moving means 17. The first cutting means 61 arranged in this manner is indexed and fed in the Y-axis direction.

The first Z-axis moving means 17 can relatively move the first cutting means 61 and the holding table 30 in the Z-axis direction perpendicular to the holding surface 300a of the holding table 30. A ball screw 170 having an axial center, a pair of guide rails 171 disposed in parallel with the ball screw 170, a motor 172 connected to the ball screw 170, and a first cutting means 61, and an internal nut A support member 173 is provided which is screwed into the ball screw 170 and whose side part is in sliding contact with the guide rail 171.
When the motor 172 rotates the ball screw 170, the support member 173 is guided by the pair of guide rails 171 and moves in the Z-axis direction, and accordingly, the first cutting means 61 moves in the Z-axis direction.

  For example, a scale (not shown) extending in the Z-axis direction along the guide rail 171 is formed on the movable plate 153, and a reading unit that moves together with the support member 173 is disposed on the support member 173. The reading unit is, for example, an optical unit that reads reflected light of a scale formed on the scale, and can measure the height position of the first cutting means 61 in the Z-axis direction from the scale of the read scale.

  The first cutting means 61 includes a spindle 610 whose axial direction is the Y-axis direction, a housing 611 that is fixed to the lower end side of the support member 173 and rotatably supports the spindle 610, and a motor (not shown) that rotates the spindle 610. And a cutting blade 613 attached to the tip of the spindle 610, and the cutting blade 613 rotates as the motor drives the spindle 610 to rotate.

  The cutting blade 613 is a washer-type cutting blade having an annular outer shape, and diamond abrasive grains are fixed with an appropriate binder. The blade thickness of the cutting blade 613 is, for example, 500 μm, and the cutting blade 613 is a thick blade suitable for performing edge trimming of the outer peripheral portion of the workpiece W. The cutting blade 613 is fixed to the tip of the spindle 610 by a detachable flange 613a and a fixing nut 613b shown in FIG. The cutting blade 613 may be a hub blade including a base metal (hub) made of, for example, aluminum and a cutting blade formed so as to protrude radially outward from the base metal.

On the front surface of the portal column 14 shown in FIG. 1, for example, second Y-axis moving means 16 for reciprocating the second cutting means 62 in the Y-axis direction is disposed.
The second Y-axis moving means 16 includes, for example, a ball screw 160 having an axis in the Y-axis direction, a pair of guide rails 151 arranged in parallel to the ball screw 160, a motor 162 connected to the ball screw 160, An internal nut is engaged with the ball screw 160, and a movable plate 163 whose side portion is in sliding contact with the guide rail 161 is provided. When the motor 162 rotates the ball screw 160, the movable plate 163 is guided by the guide rail 151 and moves in the Y-axis direction, and the second Z-axis moving unit 18 is moved on the movable plate 163 via the second Z-axis moving unit 18. The arranged second cutting means 62 is indexed and fed in the Y-axis direction.

  The second Z-axis moving means 18 can relatively move the second cutting means 62 and the holding table 30 in the Z-axis direction, and a ball screw 180 having an axis in the Z-axis direction, A pair of guide rails 181 arranged in parallel, a motor 182 connected to the ball screw 180, and the second cutting means 62 are supported, and an inner nut is screwed to the ball screw 180, and a side portion is slid on the guide rail 181. And a supporting member 183 in contact therewith. Then, when the motor 182 rotates the ball screw 180, the support member 183 is guided by the pair of guide rails 181 and moves in the Z-axis direction. Accordingly, the second cutting means 62 moves in the Z-axis direction. .

  The second cutting means 62 is disposed so as to face the first cutting means 61 in the Y-axis direction. Since the first cutting means 61 and the second cutting means 62 are configured in the same manner, description of the second cutting means 62 is omitted.

  The cutting apparatus 1 includes diameter recognition means 8 that recognizes the diameter of the cutting blade 613. The diameter recognizing means 8 is adjacent to the holding table 30 and has a confirmation table 80 for holding the workpiece to be confirmed W1 into which the cutting blade 613 is cut, and a confirmation table 80 in the Z-axis direction for the cutting blade 613 from above the confirmation table 80. Is stored in the Z-axis direction position of the first cutting means 61 when a long cutting groove is formed by moving it by a predetermined amount in the direction approaching the workpiece and cutting it into the workpiece W1 for confirmation held by the confirmation table 80. The groove forming storage unit 81, the camera 85 capable of imaging from the upper side the cutting groove formed on the workpiece W1 for confirmation by the groove forming storage unit 81, and the length of the cutting groove are measured from the image captured by the camera 85. A groove length measuring unit 83 and a calculating unit 84 for calculating the diameter of the cutting blade 613 are provided.

The confirmation table 80 is disposed adjacent to the holding table 30 on the movable plate 133. For example, the confirmation table 80 has a rectangular outer shape, and a suction unit 800 made of a porous member that sucks the confirmation workpiece W1. , And a frame body 801 that supports the suction unit 800. The suction unit 800 communicates with a suction source 809 including a compressor and a vacuum generator. The upper surface of the confirmation table 80 is a horizontal holding surface 800a for sucking and holding the confirmation workpiece W1, and the height position of the holding surface 800a is, for example, substantially the same as the height position of the holding surface 300a of the holding table 30. It has become.
The confirmation workpiece W1 sucked and held on the confirmation table 80 shown in FIGS. 1 and 2 is, for example, formed in a thin plate shape whose outer shape is rectangular and whose upper surface W1a and lower surface W1b are parallel and flat. The workpiece for confirmation W1 is a dummy wafer, and has a thickness T substantially the same as that of the workpiece W. The confirmation workpiece W1 may be formed of the same material as the workpiece W, or may be formed of a different material.

As shown in FIG. 1, the camera 85 is disposed on the side surface of the housing 611, for example, and can image the workpiece W1 for confirmation positioned below the camera 85 from above. For example, the cutting apparatus 1 includes a monitor B, and a captured image formed by the camera 85 can be displayed on the monitor B.
The camera 85 is electrically connected to an alignment means (not shown) that detects the street S of the workpiece W held on the holding table 30. The alignment means performs image processing such as pattern matching based on an image obtained by imaging the workpiece W from the surface Wa side by the camera 85, and detects the position of the surface Wa of the surface W of the workpiece W in the Y-axis direction. be able to.

In order to perform a desired cutting process on the workpiece W (for example, edge trimming of the outer peripheral portion of the workpiece W), it is necessary to control the depth of cut with respect to the workpiece W. Therefore, by performing chopper cut setup before cutting the workpiece W, the diameter of the cutting blade 613 is calculated to ensure the accuracy of the cutting depth of the cutting blade 613.
Below, operation | movement of the cutting device 1 in the case of performing chopper cut setup in the cutting device 1 is demonstrated. In this embodiment, for example, after the cutting blade 613 is worn by the cutting blade 613 of the first cutting means 61 and the workpiece W is cut a plurality of times (edge trimming), the cutting blade 613 is further worn. A chopper cut setup that is performed when performing edge trimming of the workpiece W is assumed.

  First, the confirmation workpiece W1 shown in FIG. 1 is conveyed and placed on the holding surface 800a of the confirmation table 80. Then, the suction force generated by the operation of the suction source 809 is transmitted to the holding surface 800a, and the check workpiece W1 is sucked and held by the check table 80 as shown in FIG. Since the height position Z3 of the holding surface 800a of the confirmation table 80 is known and the thickness T of the workpiece W1 for confirmation is also known, it is higher by the thickness T in the + Z direction than the height position Z3 of the holding surface 800a. The height position Z2 of the upper surface W1a of the confirmation workpiece W1 that is the position is also known. Therefore, the distance from the axial center of the spindle 610 to the upper surface W1a of the work piece for confirmation W1 in the state where the first cutting means 61 is located at the origin height position Z0 is recognized in advance.

  Next, the confirmation table 80 holding the workpiece to be confirmed W1 is sent in the −X direction by the X-axis moving means 13 shown in FIG. 1 and positioned after the cutting blade 613, and then stops. Further, as the motor (not shown) rotates the spindle 610, the cutting blade 613 rotates in the clockwise direction when viewed from the −Y direction side (the front side of the sheet).

The first Z-axis moving means 17 shown in FIG. 1 lowers the first cutting means 61 in a state of being rotated at the origin height position Z0 by a predetermined amount in the −Z direction, and the confirmation table 80 is held. The cutting blade 613 is cut into the confirmation workpiece W1. As a result, a long cutting groove M1 that does not cross the verification workpiece W1 is formed on the upper surface W1a of the verification workpiece W1 shown in FIG. The Z-axis direction position Z1 (the height position Z1 of the axis of the spindle 610) of the first cutting means 61 in this state is a reading section of a scale not shown disposed on the movable plate 153 shown in FIG. Is measured, a measurement signal is sent from the reading unit to the groove formation storage unit 81, and the groove formation storage unit 81 stores the Z-axis direction position Z1.
The groove forming storage means 81 counts the number of drive pulses supplied to the motor 172 of the first Z-axis moving means 17 shown in FIG. 1 so that the first cutting means 61 moves in the −Z direction. May be measured and the Z-axis direction position Z1 of the first cutting means 61 may be detected and stored.

  Next, the first Z-axis moving unit 17 moves the first cutting unit 61 in the + Z direction to move the cutting blade 613 away from the workpiece to be checked W1. As shown in FIG. 5, the confirmation workpiece W1 in which the cutting groove M1 is formed is in a state where it can be imaged from above.

Next, as shown in FIG. 5, for example, the confirmation table 80 is positioned below the camera 85 so that the entire upper surface W <b> 1 a of the confirmation workpiece W <b> 1 falls within the imaging region of the camera 85. The camera 85 includes, for example, a light source 850 that irradiates light to the confirmation workpiece W1 on the confirmation table 80, and an optical system 851 that includes a beam splitter, a lens, and the like and captures reflected light from the confirmation workpiece W1. An image sensor 852 such as a CCD that photoelectrically converts the subject image formed by the optical system 851 and outputs image information. The image sensor 852 has, for example, about 2 million pixels, and the size of one pixel (1 pixel) is 10 μm square.
The camera 85 images the upper surface W1a of the confirmation workpiece W1. In other words, the light source 850 irradiates the confirmation workpiece W1 with light, the reflected light from the confirmation workpiece W1 forms an image on the image sensor 852 via the optical system 851, and the image obtained by the image sensor 852 forms an image. Is sent to the monitor B.

  FIG. 6 is an explanatory diagram schematically showing the captured image G1 displayed on the screen of the predetermined resolution of the monitor B. Each square grid in the captured image G1 represents, for example, one pixel having a gradation with a luminance value of 0 to 255 and a size of 10 μm square. In the captured image G1, a region not painted with the left oblique line indicates the upper surface W1a of the confirmation workpiece W1, and a region represented by the left oblique line indicates the cutting groove M1. In the screen, the luminance value (darkness) of the pixel B11 that displays the cutting groove M1 is smaller than the luminance value of the pixel B12 that displays the upper surface W1a of the confirmation workpiece W1. In FIG. 6, the pixel B13 (pixel B13 that is not completely filled with the left diagonal line) that represents both ends of the cutting groove M1 that is partially enlarged and shown within the circle surrounded by the two-dot chain line is filled with the left diagonal line. The luminance value is larger than the luminance value of the pixel B11 and smaller than the luminance value of the pixel B12. Therefore, the cutting groove M1 is displayed darker in the captured image G1 than the upper surface W1a of the confirmation workpiece W1.

Next, the groove length measuring means 83 shown in FIG. 5 averages the luminance values of the pixels arranged in a line in the Y axis direction orthogonal to the X axis direction in the horizontal direction in the captured image G1 shown in FIG. That is, the average value of the luminance values of all the pixels in one line in the Y-axis direction is calculated. Further, the averaging operation is performed in each row aligned in the X-axis direction. As a result, as shown in the graph F1, a graph is formed with the averaged luminance value as the vertical axis and the pixel position in the X-axis direction as the horizontal axis. Thereafter, a row in which the average value of the luminance values of all the pixels in one column in the Y-axis direction is smaller than a preset threshold value (predetermined luminance value) is counted in the X-axis direction to obtain a cutting groove length M1d. In FIG. 6, one row of the cutting groove M1 on the side of the −X direction, which is partially enlarged in a two-dot chain line circle frame, has an average luminance value smaller than the threshold value, so that the pixel counts as the cutting groove M1. In FIG. 6, in the row of the cutting groove M <b> 1 on the side of the + X direction that is partially enlarged in a two-dot chain line circle frame, the average value of the luminance values is larger than the threshold value, so that the pixel is the cutting groove M <b> 1. Do not count.
As shown in FIG. 6, there may be a slight difference between the actual length of the cutting groove M1 and the length M1d of the cutting groove M1 measured by the groove length measuring means 83, but the difference is the maximum. Since it is less than 20 μm, it is a negligible difference that does not affect the calculation of the diameter of the cutting blade 613 by the calculation means 84 described later.

  Next, as shown in FIG. 7, the calculation means 84 includes the length M1d of the cutting groove M1 measured by the groove length measurement means 83 and the holding surface 800a of the confirmation table 80 that holds the work piece for confirmation W1. Using the height position Z3 and the Z-axis direction position Z1 of the first cutting means 61 stored in the groove forming storage means 81 when the cutting groove M1 is formed in the workpiece W1 for confirmation, the cutting blade 613 is used. Calculate the diameter. First, the height position Z2 of the upper surface W1a of the confirmation workpiece W1 is calculated from the height position Z3 of the holding surface 800a and the thickness T of the confirmation workpiece W1. Furthermore, the distance h1 from the height position Z2 of the upper surface W1a of the workpiece W1 for confirmation to the Z-axis direction position Z1 of the first cutting means 61 stored in the groove forming storage means 81 is calculated.

And the calculation means 84 calculates the diameter 2r1 of the cutting blade 613 by the following calculation formula. The diameter 2r1 of the cutting blade 613 is twice the radius r1 of the cutting blade 613.
r1 ² = (1/2 × M1d) ² + h1 ² (Equation 1)
2r1 = 2 (1/4 × M1d ² + h1 ² ) ^1/2 (Equation 2)
Here, the expression (1) uses the Pythagorean theorem, and the expression (2) is a modification of the expression (1).
By calculating the diameter 2r1 of the cutting blade 613 in this way, the cutting device 1 is set up for cutting the workpiece W (for example, edge trimming) by the cutting blade 613 of the first cutting means 61. Can do.

  As described above, the cutting apparatus 1 according to the present invention includes the diameter recognition unit 8 that recognizes the diameter of the cutting blade 613, and the diameter recognition unit 8 cuts the cutting blade 613 adjacent to the holding table 30. A confirmation table 80 holding the confirmation workpiece W1 and a confirmation workpiece held by the confirmation table 80 by moving the cutting blade 613 from the upper side of the confirmation table 80 by a predetermined amount in the direction approaching the confirmation table 80 in the Z-axis direction. The groove forming storage means 81 for storing the Z-axis direction position Z1 of the first cutting means 61 when the long cutting groove M1 is formed by cutting into the workpiece W1, and the confirmation work by the groove forming storage means 81 A camera 85 that can capture an image of the cutting groove M1 formed in the object W1 from above, and all the pixels arranged in the Y-axis direction of the captured image G1 captured by the camera 85 (pixels constituting one row). The average value of the luminance values of the cells is calculated, and the averaging operation is performed in the X-axis direction. The luminance value for each column averaged in the X-axis direction is smaller than a preset luminance value (darker). ) Pixels in a row that are luminance values are determined as a cutting groove M1 and counted in the X-axis direction to obtain a length M1d of the cutting groove M1 and a calculation means 84, and a chopper cut setup. When performing the above, the length M1d of the cutting groove M1 can be quickly measured without performing the detection of the coordinate position of the cutting groove M1 and the binarization processing of the captured image G1, and the binarization processing is performed. By eliminating the necessity, it is not necessary to cover the upper surface W1a of the work piece for confirmation W1 or to sufficiently clean the upper surface W1a of the work piece for confirmation W1 so that cutting waste does not adhere. Then, the cutting means M1 cuts the measured length M1d of the cutting groove M1, the height position Z3 of the holding surface 800a of the checking table 80 holding the checking workpiece W1, and the checking workpiece W1. The diameter 2r1 of the cutting blade 613 can be calculated using the Z-axis direction position Z1 of the first cutting means 61 stored in the groove forming storage means 81 when the groove M1 is formed. It can be completed quickly.

  In addition, for example, the blade thickness of the cutting blade 613 is 300 to 500 μm and is larger than one pixel size (10 μm). It is possible to quickly complete the chopper cut setup while maintaining the level necessary for the processing conditions (for example, edge trimming of the outer peripheral portion of the workpiece W) performed by the cutting blade 613.

The cutting device 1 according to the present invention is not limited to the above-described embodiment, and each configuration of the cutting device 1 illustrated in the accompanying drawings is not limited to this, and the effects of the present invention are exhibited. It can be changed as appropriate within a possible range.
For example, in addition to the confirmation table 80, the groove formation storage unit 81, the camera 85, the groove length measurement unit 83, and the calculation unit 84 shown in FIG. A second groove length measuring unit 87 that determines black pixels in the binarized image as a cutting groove and counts black pixels arranged in the X-axis direction to obtain the length of the cutting groove; Setting means 88 for setting at least the thickness of the mounted cutting blade 613, and switching means 89 for switching between the groove length measuring means 83 and the second groove length measuring means 87 according to the thickness of the cutting blade set in the setting means 88. The diameter recognizing means 8A may further be provided. FIG. 8 is an explanatory diagram showing the configuration of the camera 85, the groove length measuring means 83, the calculating means 84, the second groove length measuring means 87, the setting means 88, and the switching means 89.

  The operation of the cutting apparatus 1 when performing chopper cut setup in the cutting apparatus 1 provided with the diameter recognition means 8A will be described below. The first cutting means 61 of the cutting apparatus 1 is provided with a thin cutting blade having a thickness of 15 μm to 40 μm. For example, the workpiece W is cut (full cut or half cut) multiple times by the cutting blade. It is assumed that a chopper cut setup is performed when the workpiece W is further cut after the cutting blade is worn.

  First, similarly to the chopper cut setup described above, formation of a cutting groove by the cutting blade of the first cutting means 61 in the workpiece W1 for confirmation, and the Z axis of the first cutting means 61 by the groove forming storage means 81 The storage of the direction position, the imaging of the upper surface W1a of the confirmation workpiece W1 by the camera 85, and the transmission of the image information about the captured image formed by the camera 85 to the monitor B are performed.

  For example, after the operator completes the chopper cut setup of the cutting apparatus 1, the operator inputs and sets at least the thickness of the cutting blade to the setting means 88 as 15 μm. In addition, a desired processing condition (for example, full cut or half cut) actually applied to the workpiece W may be input to the setting unit 88 and set. Then, the input information is sent from the setting means 88 to the switching means 89.

  From the information that the cutting blade is as thin as 15 μm and the information that the processing conditions are full cut or half cut, the switching means 89 uses the diameter recognizing means 8A to measure the second groove length. Switching to the state in which the means 87 operates.

  FIG. 9 is an explanatory diagram schematically showing a captured image G2 displayed on the screen of the monitor B in which a cutting groove M2 formed by a cutting blade having a thickness of 15 μm is shown. A region not shaded by the left diagonal line shows the upper surface W1a of the workpiece W1 for confirmation, and a region shaded by the left diagonal line shows the cutting groove M2. The luminance value of the pixel B14 that displays the cutting groove M2 and the luminance value of the pixel B15 that represents both ends of the cutting groove M2 shown in a partly enlarged circle within the circle of the two-dot chain line are the upper surface W1a of the workpiece W1 for confirmation. Is smaller than the luminance value of the pixel B12, and the luminance value of the pixel B14 is smaller than the luminance value of the pixel B15. Therefore, the cutting groove M2 is displayed darker in the captured image G2 than the upper surface W1a of the confirmation workpiece W1.

  Next, the binarization processing unit 870 of the second groove length measuring unit 87 binarizes the captured image at a predetermined slice level (threshold), thereby forming a binarized image. A binarized image is displayed on the screen. That is, for example, the binarization processing unit 870 converts the captured image G2 in which the luminance of one pixel is displayed with gradations 0 to 255 into black pixels with a pixel having a luminance value lower than the threshold as 0, The captured image G2 is converted into a binarized image by converting a pixel having a higher luminance value to 255 as a white pixel. Thereafter, the second groove length measuring means 87 determines the black pixel in the binarized image as the cutting groove M2 and measures the length. That is, the total sum in the X-axis direction of black pixels at an arbitrary Y-axis coordinate position is counted, and this sum is recognized as the length M2d of the cutting groove M2. In FIG. 9, the pixel at the −X direction side end of the cutting groove M <b> 2 that is partially enlarged and shown in a two-dot chain line circle frame has a luminance value smaller than the threshold value, so that the pixel is counted as the cutting groove M <b> 2. In FIG. 9, the pixel at the + X direction side end of the cutting groove M2 which is partially enlarged and shown in a two-dot chain line circle frame does not count as the cutting groove M2 because the luminance value is larger than the threshold value.

  As shown in FIG. 9, there may be a slight difference between the actual length of the cutting groove M2 and the length M2d of the cutting groove M2 measured by the second groove length measuring means 87. Since it is less than 20 μm at the maximum, it becomes a negligible difference that does not affect the calculation of the diameter of the cutting blade having a thickness of 15 μm by the calculation means 84 described later.

  The calculation means 84 confirms the length M2d of the cutting groove M2 shown in FIG. 9 measured by the groove length measurement means 83, the height position of the holding surface 800a of the confirmation table 80 that holds the workpiece W1 for confirmation, and the confirmation. Using the Z-axis direction position of the first cutting means 61 stored in the groove forming storage means 81 when the cutting groove M2 is formed in the workpiece W1, the diameter of the cutting blade having a thickness of 15 μm is obtained in the same manner as described above. By calculating, it is possible to set up the cutting apparatus 1 for fully cutting the workpiece W by the first cutting means 61 having a cutting blade having a thickness of 15 μm.

  The diameter recognizing means 8A determines the black pixel in the binarized image G2 captured by the camera 85 as the cutting groove M2 and counts it in the X-axis direction to obtain the length M2d of the cutting groove M2. The groove length measuring means 87, the setting means 88 for setting at least the thickness of the cutting blade 613 mounted on the spindle 610, the groove length measuring means 83 and the second according to the thickness of the cutting blade 613 set in the setting means 88. Switching means 89 for switching between the groove length measuring means 87 and the groove length measuring means 83 and the second groove length measuring means 87 are switched by the switching means 89 so that the length of the cutting groove M2 can be measured. That is, when the cutting blade 613 is a thick cutting blade (blade thickness is, for example, 500 μm), the groove length measuring means 83 quickly measures the length of the cutting groove without performing binarization processing, and cuts the cutting blur. When the blade 613 is a thin cutting blade (blade thickness is 15 μm, for example), the binning process is performed by the second groove length measuring means 87 and the length of the cutting groove M2 is accurately measured. Depending on the thickness of 613, the chopper cut setup can be performed while the calculation accuracy of the diameter of the cutting blade 613 by the calculation means 84 falls within an allowable range.

W: Workpiece Wa: Workpiece surface Wb: Workpiece back surface S: Street D: Device 1: Cutting device 10: Base 14: Portal column 30: Holding table 300: Suction part 300a: Holding surface 301: Frame
13: X axis moving means 130: Ball screw 131: Guide rail 132: Motor
133: Movable plate 15: First Y axis moving means 150: Ball screw 151: Guide rail 153: Movable plate 17: First Z axis moving means 170: Ball screw 171: Guide rail 172: Motor 173: Support member 16: First 2 Y-axis moving means 18: Second Z-axis moving means
61: First cutting means 610: Spindle 611: Housing 613: Cutting blade 62: Second cutting means W1: Work piece for confirmation W1a: Upper surface of work piece for confirmation W1b: Lower face of work piece for confirmation M1 : Cutting groove 8: Diameter recognition means 80: Confirmation table 800: Adsorption part 800a: Holding surface 801: Frame body 809: Suction source 81: Groove formation storage means 83: Groove length measurement means 84: Calculation means 85: Camera B: Monitor G1: Captured image 8A: Diameter recognition means 87: Second groove length measurement means 88: Setting means 89: Switching means G2: Captured image

Claims (2)

A holding table having a holding surface for holding a workpiece; a cutting means for rotatably supporting a spindle having a cutting blade mounted on a tip thereof; and cutting the workpiece held by the holding table with the cutting blade; and the cutting An X-axis moving means for relatively moving the means and the holding table in the X-axis direction of the cutting feed direction, and the cutting means and the holding table relative to each other in the Z-axis direction perpendicular to the holding surface A cutting apparatus comprising: a Z-axis moving means for moving the workpiece and a diameter recognizing means for recognizing the diameter of the cutting blade;
The diameter recognition means includes
A confirmation table that holds a workpiece to be confirmed adjacent to the holding table and that cuts the cutting blade, and a predetermined amount in the direction in which the cutting blade approaches the confirmation table in the Z-axis direction from above the confirmation table Groove forming storage means for storing the position in the Z-axis direction of the cutting means when the long cutting groove is formed by being cut into the confirmation workpiece held by the confirmation table, and the groove forming storage means And a camera capable of imaging the cutting groove formed on the workpiece to be confirmed from above, and all of the captured images captured by the camera arranged in one row in the Y-axis direction orthogonal to the X-axis direction in the horizontal direction When the average value of the luminance values of the pixels is smaller than the predetermined luminance value, the pixel of the row is determined as a cutting groove, and the groove length measuring means that counts in the X-axis direction and sets the length of the cutting groove; Prepared,
The calculating means includes a length of the cutting groove measured by the groove length measuring means, a height position of a holding surface of the confirmation table for holding the confirmation work, and the cutting work on the confirmation work. A cutting apparatus that calculates the diameter of the cutting blade using the Z-axis direction position of the cutting means stored in the groove forming storage means when the grooves are formed.   The diameter recognizing means determines a black pixel in the binarized image captured by the camera as the cutting groove and counts the black pixels arranged in the X-axis direction as the length of the cutting groove. A second groove length measuring means; a setting means for setting at least a thickness of the cutting blade mounted on the spindle; and the groove length measuring means and the first according to the thickness of the cutting blade set in the setting means. Switching means for switching between the two groove length measuring means, and the switching means switches between the groove length measuring means and the second groove length measuring means in accordance with the thickness of the cutting blade. The cutting device according to claim 1, wherein the length can be measured.

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