JP2019124958A - フォトレジスト用保護フィルム - Google Patents
フォトレジスト用保護フィルム Download PDFInfo
- Publication number
- JP2019124958A JP2019124958A JP2019071055A JP2019071055A JP2019124958A JP 2019124958 A JP2019124958 A JP 2019124958A JP 2019071055 A JP2019071055 A JP 2019071055A JP 2019071055 A JP2019071055 A JP 2019071055A JP 2019124958 A JP2019124958 A JP 2019124958A
- Authority
- JP
- Japan
- Prior art keywords
- film
- compound
- acid
- polyester
- acetate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 65
- 150000001875 compounds Chemical class 0.000 claims abstract description 75
- 229920006267 polyester film Polymers 0.000 claims abstract description 42
- 229920000728 polyester Polymers 0.000 claims abstract description 39
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 33
- 150000002291 germanium compounds Chemical class 0.000 claims abstract description 6
- 150000003609 titanium compounds Chemical class 0.000 claims abstract description 6
- 239000002685 polymerization catalyst Substances 0.000 claims abstract description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 3
- -1 melamine compound Chemical class 0.000 claims description 133
- 230000001681 protective effect Effects 0.000 claims description 57
- 239000012948 isocyanate Substances 0.000 claims description 31
- 239000002981 blocking agent Substances 0.000 claims description 22
- 229920000877 Melamine resin Polymers 0.000 claims description 14
- 150000002513 isocyanates Chemical class 0.000 claims description 12
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 claims description 6
- VKVOKQTWSYMEAI-UHFFFAOYSA-N acetyl 2-methylpropanoate Chemical compound CC(C)C(=O)OC(C)=O VKVOKQTWSYMEAI-UHFFFAOYSA-N 0.000 claims description 5
- KLUDQUOLAFVLOL-UHFFFAOYSA-N acetyl propanoate Chemical compound CCC(=O)OC(C)=O KLUDQUOLAFVLOL-UHFFFAOYSA-N 0.000 claims description 4
- LTMRRSWNXVJMBA-UHFFFAOYSA-L 2,2-diethylpropanedioate Chemical compound CCC(CC)(C([O-])=O)C([O-])=O LTMRRSWNXVJMBA-UHFFFAOYSA-L 0.000 claims description 3
- BVOQAUOJSQUGLN-UHFFFAOYSA-N acetyl pentanoate Chemical compound CCCCC(=O)OC(C)=O BVOQAUOJSQUGLN-UHFFFAOYSA-N 0.000 claims description 3
- XWYRSZKKUZYIAE-UHFFFAOYSA-N acetyl 2-ethylheptanoate Chemical compound CCCCCC(CC)C(=O)OC(C)=O XWYRSZKKUZYIAE-UHFFFAOYSA-N 0.000 claims description 2
- BVQHHUQLZPXYAQ-UHFFFAOYSA-N acetyl butanoate Chemical compound CCCC(=O)OC(C)=O BVQHHUQLZPXYAQ-UHFFFAOYSA-N 0.000 claims description 2
- QYBNLKMPMPDFHE-UHFFFAOYSA-N acetyl hexanoate Chemical compound CCCCCC(=O)OC(C)=O QYBNLKMPMPDFHE-UHFFFAOYSA-N 0.000 claims description 2
- BEPAFCGSDWSTEL-UHFFFAOYSA-N dimethyl malonate Chemical compound COC(=O)CC(=O)OC BEPAFCGSDWSTEL-UHFFFAOYSA-N 0.000 claims description 2
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 claims 4
- 239000010408 film Substances 0.000 description 145
- 239000010410 layer Substances 0.000 description 123
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 67
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 50
- 238000000034 method Methods 0.000 description 49
- 239000011248 coating agent Substances 0.000 description 36
- 238000000576 coating method Methods 0.000 description 36
- 239000000178 monomer Substances 0.000 description 31
- 229920000642 polymer Polymers 0.000 description 29
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 27
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 27
- 239000002245 particle Substances 0.000 description 24
- 239000005056 polyisocyanate Substances 0.000 description 19
- 229920001228 polyisocyanate Polymers 0.000 description 19
- 239000000203 mixture Substances 0.000 description 18
- 229920001296 polysiloxane Polymers 0.000 description 18
- 238000010438 heat treatment Methods 0.000 description 17
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 16
- 239000003431 cross linking reagent Substances 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 15
- 230000003578 releasing effect Effects 0.000 description 15
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 14
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 12
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 12
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 12
- 229920001223 polyethylene glycol Polymers 0.000 description 12
- 239000000243 solution Substances 0.000 description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 11
- 229920005862 polyol Polymers 0.000 description 11
- 239000011342 resin composition Substances 0.000 description 11
- 239000002202 Polyethylene glycol Substances 0.000 description 10
- 239000002253 acid Substances 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 10
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 10
- 150000003077 polyols Chemical class 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 9
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 9
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 8
- 239000004698 Polyethylene Substances 0.000 description 8
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 8
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 8
- 235000019441 ethanol Nutrition 0.000 description 8
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 8
- 229920001225 polyester resin Polymers 0.000 description 8
- 239000004645 polyester resin Substances 0.000 description 8
- 229920000573 polyethylene Polymers 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000004925 Acrylic resin Substances 0.000 description 7
- 229920000178 Acrylic resin Polymers 0.000 description 7
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 7
- 125000001931 aliphatic group Chemical group 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
- 150000002009 diols Chemical class 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 7
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 7
- 239000004970 Chain extender Substances 0.000 description 6
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 6
- 150000001412 amines Chemical class 0.000 description 6
- 239000002585 base Substances 0.000 description 6
- 229920001577 copolymer Polymers 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 6
- 238000006116 polymerization reaction Methods 0.000 description 6
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 6
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 6
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 5
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 5
- 239000004372 Polyvinyl alcohol Substances 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 5
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical group NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 5
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 5
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 5
- 229920001451 polypropylene glycol Polymers 0.000 description 5
- 229920002451 polyvinyl alcohol Polymers 0.000 description 5
- YPFDHNVEDLHUCE-UHFFFAOYSA-N propane-1,3-diol Chemical compound OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- PTBDIHRZYDMNKB-UHFFFAOYSA-N 2,2-Bis(hydroxymethyl)propionic acid Chemical compound OCC(C)(CO)C(O)=O PTBDIHRZYDMNKB-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 239000005977 Ethylene Substances 0.000 description 4
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- 239000005058 Isophorone diisocyanate Substances 0.000 description 4
- 125000003277 amino group Chemical group 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
- 239000004202 carbamide Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- WOZVHXUHUFLZGK-UHFFFAOYSA-N dimethyl terephthalate Chemical compound COC(=O)C1=CC=C(C(=O)OC)C=C1 WOZVHXUHUFLZGK-UHFFFAOYSA-N 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 4
- 238000009998 heat setting Methods 0.000 description 4
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 4
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 150000007974 melamines Chemical class 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 230000000379 polymerizing effect Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical class O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 3
- QWDQYHPOSSHSAW-UHFFFAOYSA-N 1-isocyanatooctadecane Chemical compound CCCCCCCCCCCCCCCCCCN=C=O QWDQYHPOSSHSAW-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 3
- 229920001634 Copolyester Polymers 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- 229920002873 Polyethylenimine Polymers 0.000 description 3
- 239000004721 Polyphenylene oxide Substances 0.000 description 3
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 3
- YIMQCDZDWXUDCA-UHFFFAOYSA-N [4-(hydroxymethyl)cyclohexyl]methanol Chemical compound OCC1CCC(CO)CC1 YIMQCDZDWXUDCA-UHFFFAOYSA-N 0.000 description 3
- 239000001361 adipic acid Substances 0.000 description 3
- 235000011037 adipic acid Nutrition 0.000 description 3
- 239000003963 antioxidant agent Substances 0.000 description 3
- 239000002216 antistatic agent Substances 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 3
- 239000001530 fumaric acid Substances 0.000 description 3
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 150000002433 hydrophilic molecules Chemical class 0.000 description 3
- 239000003999 initiator Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000002346 layers by function Substances 0.000 description 3
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 3
- 239000011976 maleic acid Substances 0.000 description 3
- 125000005395 methacrylic acid group Chemical group 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- RXOHFPCZGPKIRD-UHFFFAOYSA-N naphthalene-2,6-dicarboxylic acid Chemical compound C1=C(C(O)=O)C=CC2=CC(C(=O)O)=CC=C21 RXOHFPCZGPKIRD-UHFFFAOYSA-N 0.000 description 3
- 235000011007 phosphoric acid Nutrition 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 238000006068 polycondensation reaction Methods 0.000 description 3
- 229920000570 polyether Polymers 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 150000005846 sugar alcohols Polymers 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- QPFMBZIOSGYJDE-UHFFFAOYSA-N 1,1,2,2-tetrachloroethane Chemical compound ClC(Cl)C(Cl)Cl QPFMBZIOSGYJDE-UHFFFAOYSA-N 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- ZXHZWRZAWJVPIC-UHFFFAOYSA-N 1,2-diisocyanatonaphthalene Chemical compound C1=CC=CC2=C(N=C=O)C(N=C=O)=CC=C21 ZXHZWRZAWJVPIC-UHFFFAOYSA-N 0.000 description 2
- 229940043375 1,5-pentanediol Drugs 0.000 description 2
- JVYDLYGCSIHCMR-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)butanoic acid Chemical compound CCC(CO)(CO)C(O)=O JVYDLYGCSIHCMR-UHFFFAOYSA-N 0.000 description 2
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 2
- NSENZNPLAVRFMJ-UHFFFAOYSA-N 2,3-dibutylphenol Chemical compound CCCCC1=CC=CC(O)=C1CCCC NSENZNPLAVRFMJ-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- IAXFZZHBFXRZMT-UHFFFAOYSA-N 2-[3-(2-hydroxyethoxy)phenoxy]ethanol Chemical compound OCCOC1=CC=CC(OCCO)=C1 IAXFZZHBFXRZMT-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- SXFJDZNJHVPHPH-UHFFFAOYSA-N 3-methylpentane-1,5-diol Chemical compound OCCC(C)CCO SXFJDZNJHVPHPH-UHFFFAOYSA-N 0.000 description 2
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 2
- FJKROLUGYXJWQN-UHFFFAOYSA-N 4-hydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
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Abstract
【解決手段】 ポリエステルフィルムの少なくとも片面に離型層を有し、当該離型層が炭素数が6以上の直鎖または分岐のアルキル基を有する化合物を含有し、当該ポリエステルフィルムに使用されるポリエステルが重合触媒としてチタン化合物又はゲルマニウム化合物を用いて形成されたものであることを特徴とするフォトレジスト用保護フィルム。
【選択図】 なし
Description
これらの反応性基を有する化合物としては、例えば、ポリビニルアルコール、ポリエチレンイミン、ポリエチレンアミン、反応性基含有ポリエステル樹脂、反応性基含有ポリ(メタ)アクリル樹脂等が挙げられる。これらの中でも離型性や取り扱い易さを考慮するとポリビニルアルコールであることが好ましい。
また、これらの架橋剤は2種以上を併用しても良い。
ポリエステルに非相溶な他のポリマー成分および顔料を除去したポリエステル1gを精秤し、フェノール/テトラクロロエタン=50/50(重量比)の混合溶媒100mlを加えて溶解させ、30℃で測定した。
島津製作所製遠心沈降式粒度分布測定装置(SA−CP3型)を用いて測定した等価球形分布における積算体積分率50%の粒径を平均粒径d50とした。
離型層の表面をRuO4で染色し、エポキシ樹脂中に包埋した。その後、超薄切片法により作成した切片をRuO4で染色し、離型層の断面をTEM(株式会社日立ハイテクノロジーズ製 H−7650、加速電圧100kV)を用いて測定した。
離型層を設けたポリエステルフィルムの離型層表面に粘着テープ(日東電工株式会社製「No.31B」基材厚み25μm)を2kgゴムローラーにて1往復圧着し、室温にて1時間放置後の剥離力を測定した。剥離力は、株式会社島津製作所製「Ezgraph」を使用し、引張速度300mm/分の条件下、180°剥離を行った。
離型層を設けたポリエステルフィルムの離型層表面に粘着テープ(日東電工株式会社製「No.31B」基材厚み25μm)を2kgゴムローラーにて1往復圧着した後、100℃のオーブン内にて1hr加熱した。その後、室温にて1時間放置後の剥離力を測定した。剥離力は、株式会社島津製作所製「Ezgraph」を使用し、引張速度300mm/分の条件下、180°剥離を行った。
キャリアフィルムとして、厚さ16μmである比較例1に記載のポリエステルフィルムを用い、その片面に下記組成の感光性樹脂組成物を塗布し、110℃で3分間、乾燥して40μmのフォトレジスト層を形成し、その上に本発明の保護フィルムを、離型層とフォトレジスト層が向かい合うように乗せた後、加圧して保護フィルムでカバーしたフォトレジストフィルムを作成した。その後、保護フィルムを剥がして、その剥離性を評価した。
剥離がスムーズでレジストの保護フィルムへの転写が無く、レジスト表面に傷を与えなかったものを○、剥離がスムーズでなかったり、レジストからの剥離が不可であったり、レジスト表面に傷を与えたりしたものを×とした。
重合性不飽和基を有する単量体として、エチレンオキサイドの繰返し数が17(繰り返し単位数の合計)である、エチレンオキサイド変性ビスフェノールAジメタクリレートを30部、プロピレングリコールジグリシジルエーテルジアクリレートを10部、トリメチロールプロパントリアクリレートを10部、ポリマーとして、メチルメタクリレート/n−ブチルメタクリレート/スチレン/メタクリル酸=45/15/15/25(重量比)の割合で重合した重量平均分子量が17万のポリマーを25部、スチレン/アクリル酸=75/25(重量比)の割合で重合させた重量平均分子量が2万のポリマーを25部、光重合開始剤として、2,2−ジメトキシ−1,2−ジフェニルエタン−1−オンを2部、(2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタノン−1を0.4部、溶剤として、メチルエチルケトンを75部、イソプロピルアルコールを25部の混合物。
<ポリエステル(A)の製造方法>
テレフタル酸ジメチル100重量部、エチレングリコール60重量部、エチルアシッドフォスフェートを生成ポリエステルに対して30ppm、触媒として酢酸マグネシウム・四水和物を生成ポリエステルに対して100ppmを窒素雰囲気下、260℃でエステル化反応をさせた。引き続いて、テトラブチルチタネートを生成ポリエステルに対して50ppm添加し、2時間30分かけて280℃まで昇温すると共に、絶対圧力0.3kPaまで減圧し、さらに80分、溶融重縮合させ、極限粘度0.63、ジエチレングリコール量が2モル%のポリエステル(A)を得た。
テレフタル酸ジメチル100重量部、エチレングリコール60重量部、触媒として酢酸マグネシウム・四水和物を生成ポリエステルに対して900ppmを窒素雰囲気下、225℃でエステル化反応をさせた。引き続いて、正リン酸を生成ポリエステルに対して3500ppm、二酸化ゲルマニウムを生成ポリエステルに対して70ppm添加し、2時間30分かけて280℃まで昇温すると共に、絶対圧力0.4kPaまで減圧し、さらに85分、溶融重縮合させ、極限粘度0.64、ジエチレングリコール量が2モル%のポリエステル(B)を得た。
ポリエステル(A)の製造方法において、溶融重合前に平均粒径2μmのシリカ粒子を0.3重量部添加する以外はポリエステル(A)の製造方法と同様の方法を用いてポリエステル(C)を得た。
・長鎖アルキル基含有化合物:(I)
4つ口フラスコにキシレン200部、オクタデシルイソシアネート600部を加え、攪拌下に加熱した。キシレンが還流し始めた時点から、平均重合度500、ケン化度88モル%のポリビニルアルコール100部を少量ずつ10分間隔で約2時間にわたって加えた。ポリビニルアルコールを加え終わってから、さらに2時間還流を行い、反応を終了した。反応混合物を約80℃まで冷却してから、メタノール中に加えたところ、反応生成物が白色沈殿として析出したので、この沈殿を濾別し、キシレン140部を加え、加熱して完全に溶解させた後、再びメタノールを加えて沈殿させるという操作を数回繰り返した後、沈殿をメタノールで洗浄し、乾燥粉砕して得た。
メチロール基とメトキシ基が1:2.2の比率である部分エーテル化メラミン
・活性メチレンブロックポリイソシアネート:(IIB)
下記方法で合成したブロックポリイソシアネート
ヘキサメチレンジイソシアネート1000部を60℃で攪拌し、触媒としてテトラメチルアンモニウム・カプリレート0.1部を加えた。4時間後、リン酸0.2部を添加して反応を停止させ、イソシアヌレート型ポリイソシアネート組成物を得た。得られたイソシアヌレート型ポリイソシアネート組成物100部、数平均分子量400のメトキシポリエチレングリコール42.3部、プロピレングリコールモノメチルエーテルアセテート29.5部を仕込み、80℃で7時間保持した。その後反応液温度を60℃に保持し、イソブタノイル酢酸メチル35.8部、マロン酸ジエチル32.2部、ナトリウムメトキシドの28%メタノール溶液0.88部を添加し、4時間保持した。n−ブタノール58.9部を添加し、反応液温度80℃で2時間保持し、その後、2−エチルヘキシルアシッドホスフェート0.86部を添加して得られたブロックポリイソシアネート
下記組成で共重合したポリエステル樹脂の水分散体
モノマー組成:(酸成分)テレフタル酸/イソフタル酸/5−ソジウムスルホイソフタル酸//(ジオール成分)エチレングリコール/1,4−ブタンジオール/ジエチレングリコール=56/40/4//70/20/10(mol%)
・アクリル樹脂:(IIIB)下記組成で重合したアクリル樹脂の水分散体
エチルアクリレート/n−ブチルアクリレート/メチルメタクリレート/N−メチロールアクリルアミド/アクリル酸=65/21/10/2/2(重量%)の乳化重合体(乳化剤:アニオン系界面活性剤)
・ウレタン樹脂(IIIC)
イソホロンジイソシアネート/テレフタル酸/イソフタル酸/エチレングリコール/ジエチレングリコール/ジメチロールプロパン酸=12/19/18/21/25/5(mol%)から形成されるポリエステル系ウレタン樹脂の水分散体。
ポリエステル(A)、(B)、(C)をそれぞれ77%、3%、20%の割合で混合した混合原料を最外層(表層)の原料とし、ポリエステル(A)、(B)をそれぞれ97%、3%の割合で混合した混合原料を中間層の原料として、2台の押出機に各々を供給し、各々285℃で溶融した後、40℃に設定した冷却ロール上に、2種3層(表層/中間層/表層=1:6:1の吐出量)の層構成で共押出し冷却固化させて未延伸シートを得た。
次いで、ロール周速差を利用してフィルム温度85℃で縦方向に3.4倍延伸した後、この縦延伸フィルムの片面に、下記表1に示す塗布液1を塗布し、テンターに導き、横方向に100℃で4.0倍延伸し、230℃で熱処理を行った後、横方向に2%弛緩し、片面に塗布層の膜厚(乾燥後)が0.03μmの離型層を有する厚さ16μmの保護フィルムを得た。得られた保護フィルムを評価したところ、初期の離型性や、加熱後の離型性も良好であり、フォトレジスト層に対する剥離性も良好なフィルムであった。このフィルムの特性を下記表2に示す。
実施例1において、離型層の組成を表1に示す塗布剤組成に変更する以外は実施例1と同様にして製造し、保護フィルムを得た。でき上がった保護フィルムは表2に示すとおり、初期の離型性や、加熱後の離型性も良好であり、フォトレジスト層に対する剥離性も良好であった。
実施例1において、離型層を設けないこと以外は実施例1と同様にして製造し、保護フィルムを得た。でき上がった保護フィルムを評価したところ、表2に示すとおりであり、離型層の離型性が劣り、フォトレジスト層に対する剥離性も劣るフィルムであった。
実施例1において、離型層の塗布剤組成を表1に示す塗布剤組成に変更する以外は実施例1と同様にして製造し、保護フィルムを得た。でき上がった保護フィルムを評価したところ、表2に示すとおりであり、離型層の離型性が劣り、フォトレジスト層に対する剥離性も劣るフィルムであった。
Claims (7)
- ポリエステルフィルムの少なくとも片面に離型層を有し、当該離型層が炭素数が6以上の直鎖または分岐のアルキル基を有する化合物を含有し、当該ポリエステルフィルムに使用されるポリエステルが重合触媒としてチタン化合物又はゲルマニウム化合物を用いて形成されたものであることを特徴とするフォトレジスト用保護フィルム。
- 前記離型層がメラミン化合物を用いて形成された層である請求項1に記載のフォトレジスト用保護フィルム。
- 前記離型層がイソシアネート基を活性メチレン系ブロック剤で保護した構造を有するブロックイソシアネートを用いて形成された層である請求項1に記載のフォトレジスト用保護フィルム。
- 前記活性メチレン系ブロック剤が、イソブタノイル酢酸エステル、n−プロパノイル酢酸エステル、n−ブタノイル酢酸エステル、n−ペンタノイル酢酸エステル、n−ヘキサノイル酢酸エステルおよび2−エチルヘプタノイル酢酸エステルから選ばれる少なくとも一種である請求項3に記載のフォトレジスト用保護フィルム。
- 前記活性メチレン系ブロック剤が、2種以上である請求項3に記載のフォトレジスト用保護フィルム。
- 前記活性メチレン系ブロック剤の少なくとも1種が、マロン酸ジメチルまたはマロン酸ジエチルである請求項5に記載のフォトレジスト用保護フィルム。
- 請求項1〜6の何れかに記載のフォトレジスト用保護フィルムを、フォトレジストフィルムのフォトレジスト面に貼り合わせてなる積層体。
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