JP2019121656A - Control method, control device, lithography device, and manufacturing method of article - Google Patents

Abstract

To provide a technique advantageous in generating heat when moving a movable body by means of actuators of a plurality of types.SOLUTION: A control method for controlling movement of a movable body by means of a first actuator having a nonlinear relation between a supplied electric current and a generated thrust and a second actuator controlled so as to compensate for a difference between the thrust generated by the first actuator and a target thrust, comprises a generation step in which drive information is generated for driving the first actuator so as to generate the target thrust. The generation step includes: a first step of obtaining a specific electric current value for the first actuator, at which an absolute value for an electric current value of the second actuator is equal to or lower than a permissible value, by detecting the electric current value of the second actuator while altering the value of an electric current supplied to the first actuator; and a second step of generating, as the drive information, information indicating a correspondence relation between the target thrust and the specific electric current value by performing the first step for each of the plurality of target thrusts.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a control method for controlling movement of a mobile body, a control device, and a method of manufacturing an article.

  In a lithography apparatus used for manufacturing a semiconductor device or the like, the substrate stage mechanism and the original plate stage mechanism are required to have the ability to move the stage (moving body) at high speed with high acceleration and to position the stage with high accuracy. As the stage mechanism, a configuration may be used in which a fine movement stage having a small stroke but high positioning accuracy is disposed on a coarse movement stage having characteristics of a large stroke and a large thrust although the positioning accuracy is low.

  As an actuator for driving the fine movement stage, a linear motor using Lorentz force, an electromagnetic actuator using suction force, or the like can be used. The former has better linearity and is easier to handle, but the latter is advantageous from the viewpoint of heat generation because the thrust constant is larger. Therefore, in the fine movement stage mechanism, there is a method of providing both a linear motor and an electromagnetic actuator, performing positioning control with the linear motor, and performing acceleration / deceleration with the electromagnetic actuator. As described above, by performing positioning control with a linear motor, it is possible to realize highly accurate positioning of the stage, and by performing acceleration and deceleration with an electromagnetic actuator, it is possible to reduce heat generation in the linear motor.

  Here, the electromagnetic actuator generally has nonlinearity in the relationship between the supplied current and the generated thrust, and an error may occur between the thrust generated by the electromagnetic actuator and the target thrust. Since the error varies due to individual differences of the electromagnetic actuators, etc., in the stage apparatus provided with the linear motor and the electromagnetic actuator, a thrust is generated in the linear motor so as to compensate the error to realize the target thrust. However, in such a configuration, the linear motor generates heat in response to the generation of thrust by the linear motor, which may cause thermal deformation of the stage, temperature change of an optical path of an interferometer that measures the position of the stage, and the like. As a result, the pattern transfer accuracy in the lithographic apparatus may be reduced. Patent Document 1 proposes a method of detecting a magnetic flux generated in an electromagnetic actuator by a search coil, and performing feedback control so that the thrust generated by the electromagnetic actuator becomes a target thrust based on the detection result. .

Unexamined-Japanese-Patent No. 2003-218188

  In the method described in Patent Document 1, an error may remain between the thrust generated by the electromagnetic actuator and the target thrust due to a time delay or the like in feedback control of the electromagnetic actuator. In this case, it may be insufficient to reduce the thrust generated by the linear motor and reduce the heat generation of the linear motor.

  Therefore, an object of the present invention is to provide an advantageous technique in terms of heat generation when moving a moving object by a plurality of types of actuators.

  In order to achieve the above object, in a control method according to one aspect of the present invention, a first actuator having nonlinearity in a relationship between a supplied current and a generated thrust, and a generated thrust and a target thrust in the first actuator A control method for controlling movement of a moving body by a plurality of types of actuators including a second actuator controlled to compensate for an error, which is for driving the first actuator to generate a target thrust. And a control step of controlling movement of the movable body while driving the first actuator based on the drive information, wherein the generation step supplies the first actuator. By detecting the current value of the second actuator while changing the current value, the absolute value of the current value of the second actuator is allowed Information indicating the correspondence between the target thrust and the specific current value by performing the first step for each of a plurality of different target thrusts for determining the specific current value of the first actuator, which will be the following And the second step of generating the drive information.

  Further objects or other aspects of the present invention will be made clear by the preferred embodiments described below with reference to the accompanying drawings.

  According to the present invention, for example, an advantageous technique can be provided in terms of heat generation when moving a moving object by a plurality of types of actuators.

It is the schematic which shows the structure of a stage apparatus. It is a block diagram showing a control system for controlling movement of a fine movement stage. It is a flowchart which shows the method of producing | generating drive information of an electromagnetic actuator. It is a figure which shows the correspondence of each electric current value of an electromagnetic actuator, and the electric current value of the fine-movement linear motor each detected by the detection part corresponding to it. It is a figure which shows the drive information of an electromagnetic actuator. It is a flowchart which shows the method of producing | generating the 1st drive information of an electromagnetic actuator. It is a flowchart which shows the method of producing | generating the 2nd drive information of an electromagnetic actuator. It is a figure which shows the drive information of an electromagnetic actuator. FIG. 1 is a schematic view showing an exposure apparatus.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same members or elements are denoted by the same reference numerals, and redundant description will be omitted.

  In the following embodiment, a stage apparatus (positioning apparatus) that holds an object such as an original or a substrate and controls movement of a movable stage will be described as a control apparatus that controls movement of a movable body. The stage apparatus is configured to move the stage by a plurality of types of actuators, and the plurality of types of actuators may include first and second actuators of different types. In the following description, an electromagnetic actuator is exemplified as the first actuator, and a linear motor is exemplified as the second actuator.

First Embodiment
A stage apparatus 100 according to a first embodiment of the present invention will be described. FIG. 1 is a schematic view showing a configuration of a stage apparatus 100 of the present embodiment, and is a view of the stage apparatus 100 as viewed from above (Z direction). The stage apparatus 100 of the present embodiment can be configured by a coarse movement stage 101 with a large stroke and a large thrust but with a low positioning accuracy, a fine movement stage 102 with a small stroke but a high positioning accuracy, and a control unit 110. The control unit 110 is configured by a computer including, for example, a CPU, a memory (storage unit), and the like, and controls various actuators to control movement of the coarse movement stage 101 and the fine movement stage 102. Further, in the present embodiment, the fine movement stage 102 can be configured to hold an object such as an original plate or a substrate by vacuum suction or electrostatic suction.

  Coarse movement stage 101 is driven in a predetermined direction (± Y direction in FIG. 1) by coarse movement linear motors 103a and 103b. Fine movement stage 102 is connected non-contactingly with coarse movement stage 101 by fine movement linear motors 104a and 104b and electromagnetic actuators 105a and 105b, and in the predetermined direction (± Y direction in FIG. 1) with respect to coarse movement stage 101. It is driven. Generally, a linear motor is easy to handle because the linearity of the generated thrust with respect to the supplied current is easy to handle, but it is disadvantageous in terms of heat generation because the thrust constant is small and the amount of heat generation per unit current is large. Therefore, in the present embodiment, an electromagnetic actuator 105 (105a, 105b) is further provided in addition to the fine movement linear motor 104 (104a, 104b) as an actuator for driving the fine movement stage 102. Then, positioning control of the fine movement stage 102 is performed by the fine movement linear motor 104, and acceleration / deceleration control of the fine movement stage 102 is performed by the electromagnetic actuator 105. As a result, both high-precision positioning of fine movement stage 102 and reduction of heat generation by the linear motor are realized.

  FIG. 2 is a block diagram showing a control system for controlling the movement of fine movement stage 102. As shown in FIG. In the control system according to the present embodiment, the position feedback control system of the fine movement stage 102 by the fine movement linear motor 104 and the acceleration / deceleration feedback control system of the fine movement stage 102 by the electromagnetic actuator 105 are independently configured. In addition, the electromagnetic actuator 105 generally has non-linearity in the relationship between the supplied current and the generated thrust, and an error may occur between the thrust generated by the electromagnetic actuator and the target thrust. Since the error varies due to individual differences among the electromagnetic actuators, etc., the control system according to the present embodiment is configured to generate thrust in the fine movement linear motor 104 to realize the target thrust so as to compensate for the error. There is. Here, in FIG. 2, the first compensator 111, the first driver 112, the second compensator 113, the second driver 114, the subtractors 115 and 116, and the adder 117 may be included as components in the control unit 110. .

  First, an acceleration / deceleration feedback control system of the fine movement stage 102 by the electromagnetic actuator 105 will be described. The thrust force Fa generated by the electromagnetic actuator 105 is measured by the force measurement unit 118, and the measured thrust force Fa is input to the subtractor 115. The subtractor 115 supplies the first compensator 111 with the deviation between the thrust force Fa measured by the force measurement unit 118 and the target thrust force F. The first compensator 111 includes, for example, a PID compensator, a filter (low pass filter, notch filter) and the like, and generates a command value for the first driver 112 based on the deviation supplied from the subtractor 115. The first driver 112 is, for example, a current amplifier, supplies a current to the electromagnetic actuator 105 (105a, 105b) based on the command value from the first compensator 111, and drives the electromagnetic actuator 105.

  Here, the force measurement unit 118 includes, for example, a search coil provided in the electromagnetic actuator 105, and is configured to obtain the thrust force Fa based on a result of detecting the magnetic flux generated by the electromagnetic actuator 105 with the search coil. . Further, the force measurement unit 118 includes, for example, an accelerometer provided on the fine movement stage 102, and is configured to obtain the thrust Fa by multiplying the acceleration a obtained by the accelerometer by the mass m of the fine movement stage 102. May be Furthermore, the force measurement unit 118 includes a detector (such as a laser interferometer) for detecting the velocity and position of the fine movement stage 102, and from the acceleration obtained by differentiating the information on velocity and position obtained by the detector, etc. It may be configured to determine the thrust force Fa.

  Next, a position feedback control system of fine movement stage 102 by fine movement linear motor 104 will be described. The position of fine movement stage 102 is measured by position measurement unit 119 having a laser interferometer or the like, and the measured position of fine movement stage 102 is input to subtractor 116. The subtractor 116 supplies the deviation between the position of the fine adjustment stage 102 measured by the position measurement unit 119 and the target position P to the second compensator 113. The second compensator 113 includes, for example, a PID compensator, a filter (low pass filter, notch filter) and the like, and generates a command value for the second driver 114 based on the deviation supplied from the subtractor 116. The second driver 114 is, for example, a current amplifier, supplies a current to the fine movement linear motor 104 (104a, 104b) based on the command value from the second compensator 113, and drives the fine movement linear motor 104.

  In the position feedback control system configured as described above, it is possible to generate thrust Fb by fine movement linear motor 104 so as to compensate for an error between thrust Fa of electromagnetic actuator 105 and target thrust F. Therefore, the target thrust F can be realized by combining (adding) the thrust Fa of the electric actuator 105 and the thrust Fb of the fine linear motion motor 104 by the adder 117 (F = Fa + Fb).

  As described above, in the control system according to the present embodiment, the force measuring unit 118 measures the thrust Fa of the electromagnetic actuator 105, and based on the measurement result, feedback is performed so that the thrust Fa of the electromagnetic actuator 105 becomes the target thrust F. Control is performed. However, in feedback control, a time delay occurs when the thrust Fa of the electromagnetic actuator 105 is generated following the target thrust F that changes from moment to moment, so an error occurs between the thrust Fa of the electromagnetic actuator 105 and the target thrust F. There are things that remain. In this case, an error in acceleration / deceleration occurs with respect to the target drive profile of fine movement stage 102, and thrust Fb is generated by fine movement linear motor 104 to compensate for the error, which may generate heat. Therefore, in the stage device 100, it is desirable to realize the target thrust F only by the thrust Fa of the electromagnetic actuator 105 so that the thrust Fb of the fine linear motion motor 104 is reduced as much as possible.

For example, since the thrust constant of the electromagnetic actuator 105 depends on the generated thrust Fa, when the thrust constant is expressed as a function Ka (Fa), the relationship between the current value Ia of the electromagnetic actuator 105 and the thrust Fa is given by It is expressed as Therefore, by obtaining this function Ka (Fa), it is possible to determine the current value Ia for making the thrust Fa of the electromagnetic actuator 105 the target thrust F as in the equation (2) which is the equation (1). .
Fa = Ka (Fa) · Ia (1)
Ia = Fa / Ka (Fa) (2)

  Such function Ka (Fa) may be obtained from drive information (hereinafter sometimes referred to as “drive information of the electromagnetic actuator 105”) for driving the electromagnetic actuator 105 to generate the target thrust F. it can. Therefore, if the drive information of the electromagnetic actuator 105 is generated and the movement of the fine movement stage 102 is controlled while driving the electromagnetic actuator 105 based on the drive information, the thrust generated by the electromagnetic actuator 105 can be made closer to the target thrust. . That is, the thrust generated by the fine movement linear motor 104 can be reduced, and the heat generation by the fine movement linear motor 104 can be reduced. Here, the drive information of the electromagnetic actuator 105 can include information indicating the correspondence between a plurality of different target thrusts F and the current value of the electromagnetic actuator 105 for generating each target thrust F.

  FIG. 3 is a flowchart showing a method of generating drive information of the electromagnetic actuator 105. The steps of the flowchart illustrated in FIG. 3 may be controlled by the control unit 110. Here, in the following description, “n” indicates a management number for the target acceleration (target thrust F) of fine movement stage 102, and “m” indicates a management number for the current value supplied to electromagnetic actuator 105. Is shown.

In S11, it sets the target acceleration _{a n} of the fine moving stage 102 (i.e., the target thrust force F). Target acceleration a _n is can be arbitrarily set, it is preferable to set within the range of acceleration that might be used when moving actually fine movement stage 102.

In S12, the current value In _{, m} of the electromagnetic actuator 105 is set. Current value I _{n, m,} which can be set arbitrarily, it is preferably set to a value near the value of the current target acceleration a _n of the fine moving stage 102 is estimated to be obtained by the electromagnetic actuator 105 . In S13, it drives the electromagnetic actuator 105 at a current value _{I n, m} set in S12, the current value _{i n} to be supplied to the fine movement linear motor 104 at that time _is detected by the detection unit 118 _m. The detection unit 118 includes, for example, a current sensor, and the current value in _{, m} of the fine linear motor 104 detected by the detection unit 118 is stored in a memory (storage unit).

As described above, the fine motion linear motor 104 is controlled to compensate for the difference between the thrust force Fa generated by the electromagnetic actuator 105 and the target thrust force F. Therefore, according to the difference, the thrust to be compensated is changed by the fine movement linear motor 104, and the current value in _{, m of the} fine movement linear motor 104 is changed. In this embodiment, S12 to S13 are repeated while changing the current value In _{, m} supplied to the electromagnetic actuator 105, and the fine movement linear motor detected by the detection unit 118 at each current value In _{, m} of the electromagnetic actuator 105 104 of the current value _{i n,} sequentially stores _m. Thus, as shown in FIG. 4, the current values I _{n, m} of the electromagnetic actuator 105, the current value i _n the fine movement linear motor 104 respectively detected by the detection unit 118 _{correspondingly,} correspondence between the _m Can be obtained. Hereinafter, the information may be referred to as “current value information”.

In S14, it is determined whether the current value of the fine adjustment linear motor 104 is detected by changing the current value of the electromagnetic actuator 105 (whether or not the process of S12 to S13 is performed). The determination in S14 may be performed, for example, based on whether or not the current value in _{, m of the} fine linear motor 104 has crossed a specified value (for example, zero) based on the current value information obtained so far. It may be performed depending on whether or not the minimum value of the absolute value of the current value i _{n, m} is obtained. That is, when the current value in _{, m} of the fine movement linear motor 104 does not cross the specified value, or when the minimum value of the absolute value of the current value in _{, m} is not obtained, the current of the electromagnetic actuator 105 It is determined that the current value of the fine movement linear motor 104 is detected by changing the value. If it is determined that the current value of the fine movement linear motor 104 is to be detected, the process proceeds to S15, the current value In _{, m} of the electromagnetic actuator is changed (the control number m is incremented), and the process of S12 to S14 is performed. Do it again. The amount of change of the current value In _{, m} of the electromagnetic actuator is arbitrary. On the other hand, when it is determined that the current value of the fine movement linear motor 104 is not detected, the process proceeds to S16.

In S16, based on the current value information to determine the current value of the electromagnetic actuator 105 the current value of the fine movement linear motor 104 is a specified value (e.g., zero) as the specific electric current value I _n. For example, as shown in FIG. 4, an approximate straight line A is obtained using the least square method or the like for the current value in _{, m} of the fine linear motion motor 104 detected by the detection unit 118 so far. Then, in the approximate line A, to determine the current value of the electromagnetic actuator 105 when the current value of the fine movement linear motor 104 is a specified value (e.g., zero) as the specific electric current value I _n. This particular current value I _n indicates the value of the current can be generated in the target force _{F n (= m · a n} ) the electromagnetic actuator 105 to achieve the target acceleration a _n, are stored in the memory. Here, in S16, it may determine the current value of an electromagnetic actuator 105 that the absolute value of the current value of the fine movement linear motor 104 becomes equal to or less than the allowable value as the specific electric current value I _n. It is also possible to determine the current value of an electromagnetic actuator 105 that the absolute value of the current value of the fine movement linear motor 104 is minimized as the specific electric current value I _n.

In S17, it determines whether to change the target acceleration _{a n.} For example, it may be determined whether the target acceleration has been set within the range of acceleration that may be used when actually moving the fine movement stage 102. If it is judged to change the target acceleration _{a n} proceeds to S18, by changing the target acceleration _{a n} (increments management number n), it is performed again S11~S17 steps. On the other hand, if it is determined not to change the target acceleration a _n is terminated. Wherein the amount of changing the target acceleration a _n is arbitrary.

Thus, by performing each process of the flowchart shown in FIG. 3, it is possible to obtain drive information of the electromagnetic actuator as shown in FIG. The horizontal axis in FIG. 5 shows the target force F, the vertical axis represents the specific electric current value I _n of the electromagnetic actuator 105 capable of generating the corresponding target force F _n. Each plotted point in the drive information of FIG. 5 is the number of target acceleration a _n set in S11 _(target force Fn). The drive information of the electromagnetic actuator 105 generated in this manner is determined for each plot point using a least squares method or the like, and the approximate line is stored in the memory as the function Ka (Fa) described above. It may be stored as a table. When storing as a table, each plot point may be interpolated by a method such as linear interpolation. Here, the drive information of the electromagnetic actuator 105 shown in FIG. 5 can be generated for each of the electromagnetic actuators 105a and 105b. As described above, in the stage apparatus 100 of the present embodiment, the thrust is generated by the fine linear motor 104 which easily generates heat. The drive information of the electromagnetic actuator 105 is generated so as not to occur. Then, the control unit 110 controls the movement of the fine movement stage 102 while controlling the electromagnetic actuator 105 based on the generated drive information. More specifically, the first compensator 111 of the control unit 110, with reference to the generated drive information of the electromagnetic actuator 105, as specified current value I _n corresponding to the target thrust force F is supplied to the electromagnetic actuator 105 , And generates a command value to the first driver 112. As a result, it is possible to reduce the influence of heat generated by the fine linear motion motor 104, such as thermal deformation of the fine movement stage 102, and to improve the transfer accuracy of the pattern in the lithography apparatus.

  Here, the drive information of the electromagnetic actuator 105 generated as described above may be acquired at the time of calibration such as at the time of manufacturing of the stage apparatus 100. However, even if the electromagnetic actuator 105 is controlled based on the drive information due to, for example, temporal change of actuator characteristics, the thrust generated by the electromagnetic actuator 105 does not become the target thrust, but the thrust is generated in the fine linear motor 104 There is something to do. In this case, the detection unit 118 detects a current. Therefore, when the current value detected by the detection unit 118 becomes equal to or more than the threshold set in advance, the drive information of the electromagnetic actuator 105 may be updated by performing the flowchart shown in FIG. 3 again.

  Furthermore, although the configuration of FIG. 1 in which two electromagnetic actuators 105 are arranged has been described in the present embodiment, the arrangement and number of the electromagnetic actuators are not limited to the configuration of FIG. 1 and may be arbitrary. The arrangement and the number of fine movement linear motors 104 are not limited to the configuration of FIG. 1, and may be arbitrary. Furthermore, although the electromagnetic actuator and the linear motor are illustrated in this embodiment, other actuators may be used instead of these actuators.

Second Embodiment
In the case of an actuator including a magnetic circuit, such as an electromagnetic actuator, hysteresis exists in the relationship between the current and the thrust of the actuator. In the present embodiment, an example in which drive information of the electromagnetic actuator 105 is generated in consideration of the hysteresis of the electromagnetic actuator 105 will be described. That is, in the present embodiment, an example will be described in which drive information of the electromagnetic actuator 105 is generated for each of increasing and decreasing the target thrust (target acceleration). That is, in this embodiment, the drive information (first drive information) applied when moving the fine movement stage 102 while increasing the target thrust and the drive applied when moving the fine movement stage 102 while decreasing the target thrust. Information (second drive information) is generated respectively. Here, the present embodiment basically inherits the first embodiment, and the configuration and the like of the stage apparatus 100 are the same as those shown in FIG.

  First, first drive information of the electromagnetic actuator 105 to be applied when increasing the target thrust is generated. FIG. 6 is a flowchart showing a method of generating first drive information of the electromagnetic actuator 105. The flowchart shown in FIG. 6 is different from S13 of the flowchart shown in FIG. 3 only in the process of S23, and the other processes of S21 to S22 and S24 to S28 are S11 to S12 and S14 of the flowchart shown in FIG. The same as S18.

In S23, the electromagnetic actuator 105 is driven at the current value In _{, m} set in S22. Then, the target acceleration of the fine moving stage 102 is increased from 0 to _{a n,} the current value _{i n} that the target acceleration of the fine moving stage 102 is supplied to the fine movement linear motor 104 when it is _{a n,} the detection unit 118 _m To detect. By performing the other steps in the same manner as the flowchart shown in FIG. 3, it is possible to generate the first drive information of the electromagnetic actuator 105 as shown by the black dot plot point U (●) in FIG.

  Next, second drive information of the electromagnetic actuator 105 to be applied when decreasing the target thrust is generated. FIG. 7 is a flowchart showing a method of generating second drive information of the electromagnetic actuator 105. The flowchart shown in FIG. 7 is different from S13 of the flowchart shown in FIG. 3 only in the process of S33, and the other processes of S31 to S32 and S34 to S38 are S11 to S12 and S14 of the flowchart shown in FIG. The same as S18.

In S33, the electromagnetic actuator 105 is driven at the current value In _{, m} set in S32. Then, the fine movement of the target acceleration of the stage 102 is reduced from _{a max} to _{a n,} the current value _{i n} that the target acceleration of the fine moving stage 102 is supplied to the fine movement linear motor 104 when it is _{a n,} detector 118 _m Detect by By performing the other steps in the same manner as the flowchart shown in FIG. 3, second drive information of the electromagnetic actuator 105 can be generated as indicated by the white circle plot point D (o) in FIG. 8. Here, the acceleration a _max may be set to the acceleration when actually driving the fine movement stage 102.

As shown in FIG. 8, in the first drive information and the second drive information of the electromagnetic actuator 105, specific current values corresponding to the target thrust have different values. For example, certain current value I _n corresponding to the target thrust force F _n is a first drive information to become "Iu _n", in the second drive information has occurred deviation becomes "Id _n". Therefore, when moving the fine movement stage 102 by increasing the target thrust from 0 to F _max , the control unit 110 may control the electromagnetic actuator 105 using the first drive information. Similarly, when moving the fine movement stage 102 by decreasing the target thrust from F _max to 0, the electromagnetic actuator 105 may be controlled using the second drive information. By performing control in consideration of the hysteresis of the electromagnetic actuator 105 in this manner, the influence of heat generation in the fine linear motion motor 104 can be further reduced, and the transfer accuracy of the pattern in the lithography apparatus can be further improved. Here, F _max in FIG. 8 indicates the thrust corresponding to the acceleration a _max .

Embodiment of Lithographic Apparatus
An example of applying the stage apparatus described in the first embodiment and the second embodiment to a lithography apparatus that forms a pattern on a substrate will be described. The lithography apparatus may be, for example, an exposure apparatus that exposes a substrate to transfer a pattern of an original (mask) onto the substrate, an imprint apparatus that forms a pattern of an imprint material on a substrate using the original (mold), charged particles The apparatus may include a drawing device that forms a pattern on a substrate by lines. In these devices, the above-described stage device can be used to hold at least one of the original (mask, mold) and the substrate to control the movement of the movable stage. Hereinafter, an example in which the above-described stage device is used in the exposure apparatus will be described.

  FIG. 9 is a schematic view showing an exposure apparatus 200 to which the stage apparatus of the present invention is applied. The exposure apparatus 200 can include an illumination optical system 201, an original stage 203 movable to hold an original 202, a projection optical system 204, and a substrate stage 206 movable to hold a substrate 205. The above-mentioned stage apparatus can be applied to either of the original stage 203 and the substrate stage 206.

<Embodiment of manufacturing method of article>
The method for producing an article in the embodiment of the present invention is suitable for producing an article such as a microdevice such as a semiconductor device or an element having a microstructure, for example. The method of manufacturing an article according to the present embodiment includes the steps of forming a pattern on a substrate using the above-described lithography apparatus (exposure apparatus) (a step of exposing a substrate), and processing the substrate on which the pattern is formed in such a step And developing). Furthermore, such a manufacturing method includes other known steps (oxidation, film formation, deposition, doping, planarization, etching, resist peeling, dicing, bonding, packaging, etc.). The method of manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of an article, as compared to the conventional method.

  Although the preferred embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the present invention.

100: stage device, 101: coarse movement stage, 102: fine movement stage, 103a, 103b: coarse movement linear motor, 104a, 104b: fine movement linear motor, 105a, 105b: electromagnetic actuator, 110: control unit

Claims (12)

A plurality of types of actuators including a first actuator having nonlinearity in the relationship between the supplied current and the generated thrust, and a second actuator controlled to compensate for an error between the generated thrust at the first actuator and the target thrust. A control method for controlling the movement of a mobile body by
A generation step of generating drive information for driving the first actuator so as to generate a target thrust force;
And controlling the movement of the movable body while driving the first actuator based on the drive information.
The generation step is
By detecting the current value of the second actuator while changing the current value supplied to the first actuator, the specific current value of the first actuator for which the absolute value of the current value of the second actuator is less than the allowable value The first step of determining
And performing a first step for each of a plurality of different target thrusts to generate information indicating the correspondence between the target thrust and the specific current value as the drive information. Control method.   In the first step, the specific current value is determined based on a result of detecting a current value of the second actuator when a plurality of different current values are respectively supplied to the first actuator. The control method according to Item 1.   The control method according to claim 1 or 2, wherein, in the first step, a current value of the first actuator at which an absolute value of a current value of the second actuator is minimum is determined as the specific current value. .   In the generation step, as the drive information, first drive information applied when moving the movable body while increasing the target thrust, and second applied when moving the movable body while reducing the target thrust. The control method according to any one of claims 1 to 3, wherein drive information is respectively generated.   The method according to any one of claims 1 to 4, wherein when the current value of the second actuator detected in the control step reaches or exceeds a threshold value, the generation step is performed again to update the drive information. The control method described in the section.   The control method according to any one of claims 1 to 5, wherein a thrust constant of the first actuator is larger than a thrust constant of the second actuator.   The control method according to any one of claims 1 to 6, wherein the calorific value per unit current in the first actuator is smaller than the calorific value per unit current in the second actuator.   The control method according to any one of claims 1 to 7, wherein the first actuator includes an electromagnetic actuator.   The control method according to any one of claims 1 to 8, wherein the second actuator includes a linear motor. A control device for controlling the movement of a mobile body, wherein
A first actuator having non-linearity in supply current and generated thrust and moving the moving body;
A second actuator which is different in type from the first actuator and moves the movable body;
The first actuator is controlled based on drive information for driving the first actuator to generate a target thrust, and the error between the thrust generated by the first actuator and the target thrust is compensated. A control unit that controls the second actuator;
The control unit
By detecting the current value of the second actuator while changing the current value supplied to the first actuator, the specific current value of the first actuator for which the absolute value of the current value of the second actuator is less than the allowable value Asking for
A control device characterized in that information indicating a correspondence between a target thrust and the specific current value is generated as the drive information by obtaining the specific current value for each of a plurality of different target thrusts. A lithographic apparatus for forming a pattern on a substrate, comprising:
A movable stage which holds at least one of an original and a substrate;
The control device according to claim 10, which controls movement of the stage as a moving body.
A lithographic apparatus comprising: Forming a pattern on a substrate using the lithographic apparatus of claim 11;
Processing the substrate having the pattern formed in the step;
A method of producing an article comprising producing an article from the processed substrate.

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