JP2016099736A - Stage device, lithographic device, manufacturing method of article, and control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology advantageous for accurately positioning a stage.SOLUTION: A stage device including a movable stage includes a driving part that drives the stage by using a plurality of coils and a control part that controls the driving part by supplying a current to the plurality of coils. The control part controls the driving part by using a first command value for supplying a current respectively to the plurality of coils to control the position of the stage on the basis of a target position, and a second command value for supplying a current respectively to the plurality of coils at a phase difference to prevent the driving part from generating thrust so that the quantity of heat generated in the driving part during a control period of controlling the drive of the stage becomes a target quantity of heat.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a stage apparatus, a lithographic apparatus, an article manufacturing method, and a control method.

  In a lithographic apparatus used in manufacturing a semiconductor device or the like, it is required to accurately position a stage that holds a substrate or a mask. In a lithographic apparatus, for example, a drive unit that drives a stage using a plurality of coils is provided, and the stage can be positioned by supplying a current to each of the plurality of coils to generate a thrust in the drive unit. . In such a lithographic apparatus, the heat generated from the plurality of coils changes according to the thrust generated in the driving unit, and therefore the temperature of the stage may fluctuate, making it difficult to position the stage with high accuracy. . Therefore, in the lithographic apparatus, it is preferable to reduce the variation in the temperature of the stage. Patent Document 1 discloses a method of reducing fluctuations in temperature of a stage by generating heat from a plurality of coils by generating a thrust force to a driving unit and moving the stage even during a period in which a pattern is not formed on a substrate by a lithography apparatus. Has been proposed.

JP-A-11-95444

  In the method described in Patent Document 1, the temperature of the stage is adjusted by moving the stage by generating thrust in the driving unit even in a period in which a pattern is not formed on the substrate by the lithography apparatus, that is, a period in which the stage does not need to be moved. Fluctuation is reduced. Therefore, the wear of parts for driving the stage can be increased by the amount of movement of the stage during the period.

  Therefore, an object of the present invention is to provide an advantageous technique for positioning a stage with high accuracy.

  In order to achieve the above object, a stage apparatus according to one aspect of the present invention is a stage apparatus including a movable stage, wherein a drive unit that drives the stage using a plurality of coils, and the plurality of coils And a controller for controlling the driving unit by supplying a current to the plurality of coils, each for supplying a current to the plurality of coils so as to control the position of the stage based on a target position. A current is applied to each of the plurality of coils with a phase difference that does not cause the drive unit to generate thrust so that the amount of heat generated by the drive unit during the control period for controlling the drive of the stage becomes a target heat amount. The drive unit is controlled using a second command value for supply.

  Further objects and other aspects of the present invention will become apparent from the preferred embodiments described below with reference to the accompanying drawings.

  According to the present invention, for example, it is possible to provide an advantageous technique for positioning the stage with high accuracy.

It is the schematic which shows the stage apparatus of 1st Embodiment. It is the schematic which shows the structure of the stage apparatus of 1st Embodiment. It is a flowchart showing the drive procedure of the stage apparatus of 1st Embodiment. It is a figure which shows the example of the movement profile PROF in the control period t. It is a figure which shows the profile of the target acceleration of the stage in the control period t. It is a figure which shows the electric current profile _Iprof in the control period t. It is a figure which shows the calorie | heat amount which a drive part generate | occur | produces in the control period t. It is the figure which averaged the heat which generate | occur | produced in the drive part in the control period t. Is a diagram illustrating the rated current I _n of the control period t. It is a figure which shows the calorie | heat amount further generated with a drive part in the control period t. It is a figure which shows the electric current profile _INF supplied to each coil by the phase difference which does not generate | occur | produce a thrust in a drive part. It is the schematic which shows the stage apparatus of 2nd Embodiment. It is a flowchart showing the drive procedure of the stage apparatus of 2nd Embodiment. It is the schematic which shows the exposure apparatus to which the stage apparatus of this invention is applied.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the accompanying drawings. In addition, in each figure, the same reference number is attached | subjected about the same member thru | or element, and the overlapping description is abbreviate | omitted.

<First Embodiment>
A stage apparatus 100 according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic diagram illustrating a stage apparatus 100 according to the first embodiment. The stage apparatus 100 according to the first embodiment can include a movable stage 1, a drive unit 2 that drives the stage 1, a measurement unit 3 that measures the position of the stage 1, and a control unit 10. Here, the motor in the first embodiment, the drive unit 2 rotates the rotary shaft 2a ₂ with a movable element 2a ₁ which supports the stage 1 ball screw 2a and a rotary shaft 2a _2, and a plurality of coils 2b (synchronous motor). However, it is not restricted to this, The drive part 2 should just be comprised so that the actuator (for example, linear motor) which drives the stage 1 using a some coil may be included. The measurement unit 3 includes, for example, a laser interferometer and an encoder, and measures the current position POS of the stage 1. For example, when the measurement unit 3 includes a laser interferometer, the measurement unit 3 irradiates a mirror (not shown) provided on the side surface of the stage 1 with laser light, and uses the laser light reflected by the mirror 1 The displacement from the reference position is obtained. Thereby, the measurement unit 3 can obtain the current position POS of the stage 1 from the obtained displacement.

  The control unit 10 is configured by, for example, a computer having a CPU, a memory, and the like, and can include, for example, a generation unit 6, a drive control unit 5, a temperature control unit 4, an adder 8, and a driver 9. The generation unit 6 generates the movement profile PROF of the stage 1 and sends the generated movement profile PROF to the drive control unit 5. The movement profile PROF is information for controlling the movement of the stage 1, and may include at least one of a target position profile of the stage 1, a target speed profile of the stage 1, and a target acceleration profile of the stage 1. .

Based on the movement profile PROF supplied from the generation unit 6 and the measurement result by the measurement unit 3, the drive control unit 5 supplies a current to each coil of the drive unit 2 so that the current position POS of the stage 1 approaches the target position. A first command value for supply is determined. At this time, the drive control unit 5 determines the first command value for each of the plurality of coils in the motor 2 based on the phase information PHASE sent from the motor 2b. Further, the drive control unit 5 obtains current information (current profile I _prof ) to be supplied to the plurality of coils so that the current position POS of the stage 1 approaches the target position based on the movement profile PROF, and obtains the obtained current. The profile I _prof is sent to the temperature control unit 4.

The temperature control unit 4 supplies current to each coil with a phase difference that does not cause the drive unit 2 to generate thrust so that the amount of heat generated in the drive unit 2 becomes a target heat amount during a period during which the drive of the stage 1 is controlled (control period t). 2nd command value for supplying is determined. That is, the temperature control unit 4 obtains the amount of heat generated by the drive unit 2 during the control period t based on the movement profile PROF (current profile I _prof ), and the amount of heat corresponding to the difference between the obtained heat amount and the target heat amount is the drive unit. 2nd command value is determined so that it may generate | occur | produce in 2 further. At this time, the temperature control unit 4 determines the second command value for each of the plurality of coils in the motor 2b based on the phase information PHASE sent from the motor 2b. Here, the driving section 2 (the motor 2b) is in driving the stage 1 by rotating the rotary shaft 2a ₂ of the ball screw 2a by using a plurality of coils. Therefore, by shifting the phase difference of the currents in the plurality of coils with respect to the phase difference in the case where the driving unit 2 generates thrust, heat (thermal energy) is generated from the plurality of coils without generating driving force in the driving unit 2. Can be generated. The stage apparatus 100 of the present embodiment uses this principle, and heat is generated from a plurality of coils without generating thrust in the drive unit 2 so that the heat amount generated in the drive unit 2 during the control period t becomes the target heat amount. This is to reduce the fluctuation of the temperature of the stage 1.

  The first command value determined by the drive control unit 5 and the second command value determined by the temperature control unit 4 are combined by the adder 8 and supplied to the driver 9 as a combined command value. The driver 9 supplies current to each of the plurality of coils in the motor 2 based on the combined command value output from the adder 8. As described above, the stage apparatus 100 according to the first embodiment controls the drive unit 2 based on the first command value and the second command value, so that the amount of heat generated in the drive unit 2 during the control period t becomes the target heat amount. The fluctuation of the temperature of the stage 1 can be reduced.

[Control of drive unit 2]
Below, the example of control of the drive part 2 in the stage apparatus 100 of 1st Embodiment is demonstrated. FIG. 2 is a schematic diagram illustrating the configuration of the stage apparatus 100 according to the first embodiment. The configurations of the drive unit 2 (motor 2b), the drive control unit 5, and the temperature control unit 4 are illustrated in more detail than FIG. It is shown. Here, a case where a rotary three-phase synchronous motor is used as the motor 2b will be described. Motor 2b is, for example, in addition to the coil 11 of a plurality (three), and a rotor 19 connected to the rotary shaft 2a _2, a sensor 12a (Hall sensor) may include a phase calculator 12b. The sensor 12 a detects the phase of the magnetic pole of the rotor 19. The phase calculator 12b obtains the phase of the magnetic pole of the rotor 19 based on the output from the sensor 12a, and outputs information on the phase (phase information PHASE). The phase calculator 12b is provided inside the motor 2b in the first embodiment, but may be provided outside the motor 2b.

The drive controller 5 can include, for example, a compensator 5a and a processor 5b. The compensator 5 a has a driving amount for driving the stage 1 so that the current position POS of the stage 1 measured by the measuring unit 3 approaches the target position in the movement profile PROF of the stage 1 supplied from the generating unit 6. decide. The compensator 5a can include, for example, a PID compensator. Based on the driving amount determined by the compensator 5a and the phase information PHASE sent from the phase calculator 12b, the processor 5b applies each of the coils 11 to the plurality of coils 11 so that the current position POS of the stage 1 approaches the target position. A first command value for supplying current is determined. The first command value can be determined for each of the plurality of coils 11. Here, the compensator 5a determines the drive amount and determines the current profile (current profile I _prof ) supplied to the drive unit 2 when the stage 1 is driven according to the movement profile PROF supplied from the generation unit 6. Ask. The obtained current profile I _prof is supplied to the temperature control unit 4.

For example, the temperature control unit 4 calculates the amount of heat generated in the drive unit 2 during the control period t based on the movement profile PROF (current profile I _prof ), and the amount of heat corresponding to the difference between the calculated amount of heat and the target heat amount is the drive unit. 2nd command value is determined so that it may generate | occur | produce in 2 further. The temperature control unit 4 can include, for example, a first calculator 4a, a setter 4b, a subtractor 4c, a second calculator 4d, and a processor 4e. First computing unit 4a calculates the rated current _{I n} on the basis of the current profile _{I prof} supplied from the drive control unit 5 (compensator 5a), outputs the square of the rated current value _{I n (I} ^{n 2)} To do. The setter 4b sets, as the target current value I _trg , the current at which the amount of heat generated in the drive unit 2 during the control period t when the current is supplied to the drive unit 2 with a constant current value becomes the target heat amount. , The square of the target current value I _trg (I _trg ² ) is output. The subtractor 4c is a difference between the square (I _n ² ) of the rated current value I _n output from the first calculator 4a and the square (I _trg ² ) of the target current value I _trg output from the setting unit 4b. The value I _tmp ² is determined. The product of the difference value I _tmp ² and the resistance value R of the coil 11 is the amount of heat that should be further generated by the drive unit 2 during the control period t. The second computing unit 4d is operated by the drive unit 2 (motor 2b) in the control period t based on the current profile I _prof supplied from the drive control unit 5 and the difference value I _tmp ² obtained by the subtractor 4c. A current profile I _NF for determining the amount of generated heat as the target amount of heat is obtained. Based on the current profile I _NF obtained by the second computing unit 4d and the phase information PHASE sent from the phase computing unit 12b, the processing unit 4e has a plurality of coils 11 so as not to generate thrust in the driving unit 2. A second command value for supplying current to each of the first and second current values is determined. The second command value can be determined for each of the plurality of coils 11.

  The adder 8 combines the first command value supplied from the drive control unit 5 and the second command value supplied from the temperature control unit 4 with respect to each of the plurality of coils 11, and the combined command value obtained for each coil 11. Is supplied to the driver 9. The driver 9 supplies a current to each of the plurality of coils 11 in accordance with the synthesis command value supplied from the adder 8.

[Driving procedure of stage apparatus 100]
Next, the drive procedure of the stage apparatus 100 of 1st Embodiment is demonstrated, referring FIG. FIG. 3 is a flowchart showing a driving procedure of the stage apparatus 100 according to the first embodiment. Here, the generation unit 6 is described as functioning as a main control unit that controls each unit of the stage apparatus 100, but is not limited thereto, and a main control unit different from the generation unit 6 is included in the control unit 10. It may be.

In S <b> 11, the control unit 10 generates a movement profile PROF for controlling the movement of the stage 1 in the generation unit 6. For example, in an exposure apparatus that uses the stage apparatus 100 of the first embodiment, a series of operations called JOB is repeated. Therefore, the control unit 10 can generate the movement profile PROF in the period (control period t) during which JOB is executed to control the driving of the stage 1. FIG. 4 is a diagram illustrating an example of the movement profile PROF. FIG. 4 shows the target velocity profile of stage 1 as the movement profile PROF. As described above, the movement profile PROF includes the target position profile of stage 1 and the target acceleration profile of stage 1. May be. In the first embodiment, as illustrated in FIG. 4, after the stage 1 is moved in a predetermined direction (for example, the X direction) in the control period t, the stage is moved in a direction opposite to the predetermined direction (for example, the −X direction). An example in which the stage is moved back to the original position will be described. In such a movement profile PROF, the first period (t ₁ , t ₃ , t ₅ and t ₇ ) in which the stage 1 is accelerated or decelerated, and the stage 1 in which the stage 1 is moved at a constant speed or maintained in a stopped state. Two periods (t ₂ , t ₄ , t ₆ and t ₈ ) may be included. Here, the control period t is, for example, a period during which exposure processing is performed on several shot areas among a plurality of shot areas formed on the substrate, and is several minutes. Generally, a motor used in a stage apparatus has a temperature time constant of 30 minutes to 1 hour or more. Therefore, by controlling the amount of heat generated in the drive unit 2 during the control period t sufficiently shorter than the temperature time constant in the drive unit 2, the temperature fluctuation of the stage 1 can be efficiently reduced.

In S12, the control unit 10 causes the compensator 5a of the drive control unit 5 to supply current to the drive unit 2 in order to cause the drive unit 2 to generate thrust based on the movement profile PROF supplied from the generation unit 6. (Current profile I _prof ) is obtained. The control unit 10 can obtain the target acceleration profile of the stage 1 as shown in FIG. 5 by differentiating the target speed profile of the stage 1 shown in FIG. The acceleration of the stage 1 is proportional to the thrust generated by the drive unit 2 (motor 2b), and the thrust generated by the drive unit 2 is proportional to the current supplied to each coil 11 of the motor 2b. From this, the control unit 10 can obtain the current profile I _prof based on the target acceleration profile of the stage 1. FIG. 6 is a diagram showing a current profile I _prof .

In S _{< b >} 13, the control unit 10 calculates the rated current value In based on the current profile I _prof supplied from the compensator 5 a of the drive control unit 5 in the first computing unit 4 a of the temperature control unit 4. The rated current I _n, is that the current value in the case of heat generated in the driving unit 2 is assumed to be constant in the control period t. That is, the rated current value I _n, is that the current value when the amount of heat generated by the driving section 2 to control period t and averaged. For example, the heat generated in the drive unit 2 can be expressed by (RI ² ) because it is proportional to the product of the resistance value R of each coil 11 and the square of the current value I supplied to each coil. Then, if the current value I is supplied to the drive unit 2 in the first period (t ₁ , t ₃ , t ₅ and t ₇ ) as shown in FIG. 6, the first period ( It is estimated that the heat RI ² is generated in the drive unit 2 at each of t ₁ , t ₃ , t _5, and t ₇ ). Therefore, the amount of heat generated in the drive unit 2 in the control period t by generating thrust in the drive unit 2 is estimated as the total area of the shaded portion in FIG. 7 (= RI ² (t ₁ + t ₃ + t ₅ + t ₇ )). The Control unit 10, by averaging in the control period t as shown in area (the amount of heat) in FIG. 8, it is possible to obtain the rated current I _n as shown in FIG. That is, the control unit 10, equation obtained from the current profile I _prof shown in FIG. 6 (1) by solving the rated current I _n, it is possible to obtain the rated current I _n as in equation (2) .

In S <b> 14, the control unit 10 supplies the current value Ip supplied to the drive unit 2 with a phase difference that does not cause the drive unit 2 to generate thrust so that the heat amount estimated to be generated by the drive unit 2 during the control period t becomes the target heat amount. To decide. For example, the control unit 10, the subtractor 4c of the temperature control unit 4, setter square of the target current value _{I trg} set by 4b and _{(I trg} ^2), the square of the rated current _{^{I n} (I n} 2) A difference value I _tmp ² is obtained. The control unit 10 multiplies the value (heat generation) obtained by multiplying the difference value I _tmp ² and the resistance value R of the coil 11 by the control period t, whereby the amount of heat (RI _tmp) further generated by the drive unit 2 during the control period t. ² t) can be determined. The amount of heat (RI _tmp ² t) is represented by the upper hatched portion in FIG. Then, when the controller 10 (second computing unit 4d) generates the heat quantity (RI _tmp ² t) in the whole of the plurality of second periods (t ₂ , t ₄ , t ₆ and t ₈ ), The current value _Ip supplied to each coil 11 of the drive unit 2 in the second period is determined according to the equation (3). As a result, as shown in FIG. 11, the control unit 10 supplies the coils 11 with a phase difference that does not cause the drive unit 2 to generate thrust in order to set the heat amount generated in the drive unit 2 during the control period t to the target heat amount. A current profile (current profile I _NF ) can be determined. By determining the current profile I _NF in this manner, the control unit 10 sets the second command value so that the magnitudes of the currents supplied to the plurality of coils 11 are the same in each of the plurality of second periods. Can be determined.

Here, in the current profile I _NF shown in FIG. 11, the current value is zero in the first period (t ₁ , t ₃ , t _5, and t ₇ ) in which the drive unit 2 generates thrust, but the current value is limited thereto. is not. For example, the current profile I _NF may be configured to supply the drive unit 2 with a current value that does not cause the drive unit 2 to generate thrust even in the first period. Further, the target current value I _trg is a current value at which the amount of heat generated in the drive unit 2 during the control period t when the current is supplied to the drive unit 2 with a constant current value becomes the target heat amount. It is not limited. For example, the target current value I _trg may be the maximum rated current value I _max that can be determined from the specifications of the stage apparatus 100, the exposure apparatus, and the motor 2b.

In S15, the control unit 10 controls the driving of the stage 1 according to the movement profile PROF supplied from the generation unit 6. At this time, the control unit 10 determines a drive amount for driving the stage 1 so that the current position POS of the stage measured by the measurement unit 3 approaches the target position in the drive control unit 5, and the determined drive amount And the first command value is determined based on the phase information PHASE. In addition, the control unit 10 includes a plurality of phase differences that do not cause the drive unit 2 to generate thrust based on the current profile _INF and the phase information PHASE obtained by the second calculation unit 4d in the processor 4e of the temperature control unit 4. The second command value for supplying current to each of the coils 11 is determined. Then, the control unit 10 combines the first command value and the second command value in the adder 8 to generate a combined command value, and supplies the combined command value to the driver 9. As a result, a current corresponding to the combined command value is supplied from the driver 9 to each coil 11. In this way, the control unit 10 can bring the amount of heat generated in the drive unit 2 during the control period t closer to the target heat amount by controlling the drive unit 2 based on the first command value and the second command value. . That is, assuming that the amount of heat generated by the drive unit 2 during the control period t is Q, the amount of heat Q can be expressed by Equation (4).

In S <b> 16, the control unit 10 determines whether or not there is a step of moving the stage 1 next in accordance with the movement profile PROF generated by the generation unit 6. If there is a process of moving the stage 1 according to the movement profile PROF, the process returns to S15, and if there is no process, the process proceeds to S17. In S <b> 17, the control unit 10 supplies a current having a phase difference that does not cause the drive unit 2 to generate thrust to each coil 11 with the target current value I _trg . As a result, even when the stage 1 is stopped, heat can be generated from the drive unit 2, so that fluctuations in the temperature of the stage 1 can be reduced.

  As described above, the stage apparatus 100 according to the first embodiment controls the drive unit 2 using the first command value and the second command value. The first command value is used to supply current to each of the plurality of coils 11 with a phase difference that causes the drive unit 2 to generate thrust so that the position of the stage 1 approaches the target position. The second command value is used to supply current to each of the plurality of coils 11 with a phase difference that does not cause the drive unit 2 to generate thrust so that the heat amount generated in the drive unit 2 during the control period t becomes the target heat amount. Used. Thereby, the stage apparatus 100 of 1st Embodiment can reduce the fluctuation | variation of the temperature of the stage 1 by making the calorie | heat amount which generate | occur | produces in the drive part 2 in the control period t approach the target calorie | heat amount.

Second Embodiment
A stage apparatus 200 according to a second embodiment of the present invention will be described with reference to FIG. FIG. 12 is a schematic diagram illustrating a stage apparatus 200 according to the second embodiment. The stage apparatus 200 of the second embodiment is compared with the stage apparatus 100 (FIG. 2) of the first embodiment. The current value I actually supplied to the drive unit 2 so that the current position POS of the stage 1 approaches the target position. _r is supplied to the first computing unit 4 a of the temperature control unit 4. Accordingly, the temperature control unit 4 obtains the amount of heat generated in the drive unit 2 during the control period t based on the result of actually driving the stage according to the first command value, and corresponds to the difference between the obtained amount of heat and the target amount of heat. The second command value can be updated so that the amount of heat is further generated in the drive unit 2.

  Below, the drive procedure of the stage apparatus 200 of 2nd Embodiment is demonstrated, referring FIG. FIG. 13 is a flowchart showing a driving procedure of the stage apparatus 200 according to the second embodiment. Here, the generation unit 6 is described as functioning as a main control unit that controls each unit of the stage apparatus 200, but is not limited thereto, and a main control unit different from the generation unit 6 is included in the control unit 10. It may be.

The steps S21 to S25 are the same as the steps S11 to S15 in the flowchart of FIG. In S26, the control unit 10 (first computing unit 4a) calculates the rated current I _n on the basis of the current I _r which is supplied to the drive unit 2 while controlling the driving of the stage 1 in S25. In S27, the control unit 10 uses the rated current I _n which is calculated in S26, so the amount of heat generated by the driving section 2 to control period t becomes equal to the target amount of heat, a phase difference does not generate a thrust in the driving unit 2 The current profile I _NF supplied to each coil is determined. Thereby, the control part 10 can update the 2nd command value used for the process (S25) which moves the stage 1 next.

In the second embodiment, by using the output (current value I _r ) of the feedback control system, the amount of heat generated in the drive unit 2 by supplying the current for generating the thrust to the drive unit 2 to each coil 11 is reduced. It can be obtained with high accuracy. Therefore, the control unit 10 can accurately calculate the rated current I _n on the basis of the amount of heat, as compared with the stage device of the first embodiment, the target amount of heat the quantity of heat generated by the driving section 2 to control period t Can be even closer.

In S28, the control unit 10 determines whether or not there is a step of moving the stage 1 in accordance with the movement profile PROF generated by the generation unit 6. If there is a process of moving the stage 1 according to the movement profile PROF, the process returns to S25, and if there is no process, the process proceeds to S29. In S29, the control unit 10 calculates the rated current I _n on the basis of the current value I _r which is supplied to the drive unit 2 while controlling the driving of the stage 1 in S25. After the step of moving the stage 1 is completed, the stage 1 is in a stopped state. However, in the stage apparatus 200 of the second embodiment, the position of the stage 1 is controlled by the feedback control system. I _r does not become zero. Therefore, the control unit 10, in S29, calculates the rated current I _n on the basis of the current value I _r in a state where the stage 1 is stopped. Then, in S30, the control unit 10 uses the rated current I _n which is calculated in S29, so the amount of heat generated by the driving section 2 to control period t equivalent period becomes equal to the target amount of heat, thrust driving section 2 The current profile I _NF to be supplied to the drive unit 2 is determined with a phase difference that does not generate the current. In this way, by determining the current profile I _NF , heat can be generated from the drive unit 2 even when the stage 1 is stopped, so that fluctuations in the temperature of the stage 1 can be reduced. it can.

  As described above, the stage apparatus 200 according to the second embodiment obtains the amount of heat generated in the drive unit 2 during the control period t based on the result of driving the stage 1 according to the first command value, and performs the first operation based on the obtained amount of heat. 2 Update the command value. Thereby, the stage device 200 of the second embodiment further brings the amount of heat generated in the drive unit 2 in the control period t closer to the target heat amount and further varies the temperature of the stage 1 compared to the stage device 100 of the first embodiment. Can be reduced.

<Embodiment of Lithographic Apparatus>
An example in which the above-described stage apparatus is applied to a lithography apparatus that forms a pattern on a substrate will be described. The lithography apparatus is, for example, an exposure apparatus that exposes a substrate to transfer a mask pattern onto the substrate, an imprint apparatus that forms an imprint material on the substrate using a mold, and a substrate that is irradiated with charged particle beams. A drawing apparatus for forming a pattern may be included. In the exposure apparatus, the above-described stage apparatus can be used to control the position of the stage that holds at least one of the mask and the substrate. In the imprint apparatus, the above-described stage apparatus can be used to control the position of the stage that holds at least one of the mold and the substrate. In the drawing apparatus, the above-described stage apparatus can be used to control the position of the stage holding the substrate. Below, the example which uses the above-mentioned stage apparatus in exposure apparatus is demonstrated.

  FIG. 14 is a schematic view showing an exposure apparatus 300 to which the stage apparatus of the present invention is applied. The exposure apparatus 300 includes positions of an illumination optical system 50, a projection optical system 60, a first stage device 70 for controlling the position of a mask stage 72 that holds a mask 71, and a substrate stage 82 that holds a substrate 81. And a second stage device 80 for controlling. Here, each of the first stage device 70 and the second stage device 80 has the same configuration as the stage device 100 of the first embodiment or the stage device 200 of the second embodiment, and thus description thereof is omitted here. Further, the exposure apparatus 300 can include a control unit 90. The control unit 90 includes, for example, a CPU and a memory, and controls each unit of the exposure apparatus 300 (controls the exposure process). The control unit 90 in the exposure apparatus 300 can include a control unit in the first stage device 70 and a control unit in the second stage device 80.

  The mask 71 and the substrate 81 are held by a mask stage 72 and a substrate stage 82, respectively, and are optically conjugate positions (object plane and image plane positions of the projection optical system 60) via the projection optical system 60. Be placed. The projection optical system 60 has a predetermined projection magnification (for example, ½ times), and projects the pattern formed on the mask 71 onto the substrate 81 using light emitted from the illumination optical system 50. At that time, the first stage device 70 and the second stage device 80 move the mask stage 72 and the substrate stage 82 relatively in the Y direction, for example, at a speed ratio corresponding to the projection magnification of the projection optical system 60. Thereby, the pattern formed on the mask 71 can be transferred to the substrate 81.

<Embodiment of Method for Manufacturing Article>
The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing an article such as a microdevice such as a semiconductor device or an element having a fine structure. The method for manufacturing an article according to the present embodiment includes a step of forming a pattern on a substrate using the above-described lithography apparatus (exposure apparatus) (step of exposing the substrate), and processing the substrate on which the pattern is formed in the step (for example, Development). Further, the manufacturing method includes other well-known steps (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, and the like). The method for manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

  As mentioned above, although preferred embodiment of this invention was described, it cannot be overemphasized that this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

1: Stage, 2: Drive unit, 10: Control unit, 11: Coil, 100: Stage device

Claims (9)

A stage device including a movable stage,
A drive unit that drives the stage using a plurality of coils;
A control unit for supplying current to the plurality of coils to control the driving unit;
Including
The control unit includes a first command value for supplying current to each of the plurality of coils so as to control the position of the stage based on a target position, and the driving unit during a control period for controlling driving of the stage. The drive unit is controlled using a second command value for supplying current to each of the plurality of coils with a phase difference that does not cause the drive unit to generate a thrust so that the amount of heat generated in the step becomes a target heat amount. A stage apparatus characterized by that. The controller is
Determining the first command value based on the movement profile of the stage;
Based on the movement profile, the amount of heat generated in the drive unit during the control period is obtained, and the second command value is set so that the amount of heat corresponding to the difference between the calculated amount of heat and the target heat amount is further generated in the drive unit. The stage device according to claim 1, wherein the stage device is determined.   The stage apparatus according to claim 2, wherein the movement profile includes at least one of a target position profile of the stage, a target speed profile of the stage, and a target acceleration profile of the stage. . The movement profile in the control period includes a first period in which the stage is accelerated or decelerated and a second period in which the stage is moved at a constant speed or maintained in a stopped state.
4. The stage device according to claim 2, wherein the control unit controls the driving unit based on the second command value in the second period. 5. The movement profile in the control period includes a plurality of the second periods,
The said control part determines the said 2nd command value so that the magnitude | size of the electric current supplied to these coils may become the mutually same in each of several said 2nd period. The stage apparatus described in 1.   The control unit obtains the amount of heat generated in the drive unit during the control period based on the result of driving the stage according to the first command value, and the amount of heat corresponding to the difference between the obtained amount of heat and the target heat amount is The stage apparatus according to claim 2, wherein the second command value is updated so as to be further generated by a drive unit. A lithographic apparatus for forming a pattern on a substrate,
A lithographic apparatus comprising the stage apparatus according to claim 1. Forming a pattern on a substrate using the lithography apparatus according to claim 7;
Processing the substrate on which the pattern has been formed in the step;
A method for producing an article comprising: A control method for controlling drive of a stage by a drive unit including a plurality of coils,
A first command value for supplying current to each of the plurality of coils so as to control the position of the stage based on a target position, and an amount of heat generated by the driving unit during a control period for controlling the driving of the stage. The stage drive is controlled using a second command value for supplying current to each of the plurality of coils with a phase difference that does not generate thrust in the drive unit so that a target heat amount is obtained. Control method to do.

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