JP2019120541A - Magnetic sensor device - Google Patents

Abstract

To provide a magnetic sensor device capable of adjusting the position of a sensing point.SOLUTION: A magnetic sensor device 1, as shown in FIG.1(a) and FIG.1(b), comprises: a plurality of series-connected magnetic sensor elements; and a trimming pattern connected in parallel to at least one of the plurality of magnetic sensor elements, and capable of selecting to use or not use the magnetic sensor element by the presence of disconnection. The magnetic sensor device 1 can adjust the position of the sensing point.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a magnetic sensor device.

  The related art includes a sensing chip having a magnetoresistive element and a magnet for applying a bias magnetic field to the magnetoresistive element of the sensing chip, the magnet having a flat cylindrical shape, and the sensing chip in its hollow portion There is known a magnetic sensor in which is housed (see, for example, Patent Document 1).

  This magnetic sensor senses the change in the magnetic vector produced in cooperation with the bias magnetic field applied from the magnet when the magnetic substance to be detected moves in the vicinity of the sensing chip as a change in the resistance value of the magnetoresistive element. Motion of the object to be detected.

Unexamined-Japanese-Patent No. 2007-147461

  However, in the conventional magnetic sensor, when adjusting the position of the sensing point of the half bridge circuit or the full bridge circuit made of a plurality of magnetoresistance elements, the sensing point is due to the arrangement of the magnetoresistance elements, so the sensing chip is newly added. Need to design.

  Therefore, an object of the present invention is to provide a magnetic sensor device capable of adjusting the position of a sensing point.

  One aspect of the present invention selects the use or non-use of a plurality of magnetic sensor elements connected in series and at least one of a plurality of magnetic sensor elements in parallel, and depending on the presence or absence of disconnection. And a possible trimming pattern.

  According to the present invention, the position of the sensing point can be adjusted.

Fig.1 (a) is schematic which shows an example of the magnetic sensor apparatus which concerns on embodiment, FIG.1 (b) is an example of the block diagram of a magnetic sensor apparatus. Fig.2 (a) is schematic which shows an example of the bias magnet of the magnetic sensor apparatus which concerns on embodiment, FIG.2 (b) is the 1st magnetic sensor of a magnetic sensor apparatus, and a 2nd magnetic sensor. It is the schematic which shows an example of arrangement | positioning. Fig.3 (a) is schematic which shows an example of the magnetic field before the magnetic body of the magnetic sensor apparatus which concerns on embodiment approaches, FIG.3 (b) is an example of the magnetic field after a magnetic body approaches. FIG. FIG. 4A is a schematic view for explaining an example of the selection of the magnetic sensor element of the magnetic sensor device according to the embodiment and the movement of the sensing point, and FIG. 4B is obtained by cutting the trimming pattern. It is the schematic for demonstrating an example of the formed circuit.

(Summary of the embodiment)
The magnetic sensor device according to the embodiment is connected in parallel to the plurality of magnetic sensor elements connected in series and at least one of the plurality of magnetic sensor elements, and the use of the corresponding magnetic sensor element depending on the presence or absence of disconnection And a trimming pattern which can be selected.

  Since the magnetic sensor device can select the magnetic sensor to be used by cutting the trimming pattern, the position of the sensing point can be adjusted as compared with the case where this configuration is not adopted.

Embodiment
(Outline of the magnetic sensor device 1)
Fig.1 (a) is schematic which shows an example of the magnetic sensor apparatus which concerns on embodiment, FIG.1 (b) is an example of the block diagram of a magnetic sensor apparatus. Fig.2 (a) is schematic which shows an example of the bias magnet of the magnetic sensor apparatus which concerns on embodiment, FIG.2 (b) is the 1st magnetic sensor of a magnetic sensor apparatus, and a 2nd magnetic sensor. It is the schematic which shows an example of arrangement | positioning. Fig.3 (a) is schematic which shows an example of the magnetic field before the magnetic body of the magnetic sensor apparatus which concerns on embodiment approaches, FIG.3 (b) is an example of the magnetic field after a magnetic body approaches. FIG. In the drawings according to the embodiments described below, the ratio between figures may be different from the actual ratio. In FIG. 1 (b), main information and the like are indicated by arrows.

  The magnetic sensor device 1 is, for example, a sensor that detects the approach and detachment of a detection target. The magnetic sensor device 1 is used as an example in an electronic device such as a non-contact switch device for turning on approach and off for detachment and a detection device for attachment of a buckle of a seat belt device, but is not limited thereto.

  For example, as shown in FIGS. 1 (a) and 1 (b), the magnetic sensor device 1 is connected in parallel to a plurality of magnetic sensor elements connected in series and at least one of a plurality of magnetic sensor elements. And a trimming pattern capable of selecting use or nonuse of the corresponding magnetic sensor element depending on the presence or absence of cutting.

  In the magnetic sensor device 1, a half bridge circuit is formed by the plurality of selected magnetic sensor elements, and in the half bridge circuit, the sensing point is adjusted by cutting the trimming pattern.

The magnetic sensor device 1 of the present embodiment, as an example, a magnetic sensor element R _{1 ~} magnetic sensor element R ₁₆ as a plurality of magnetic sensor elements. The magnetic sensor element R ₁ to the magnetic sensor element R ₈ constitute a first magnetic sensor 4 which is a half bridge circuit. The magnetic sensor elements R _{9 ~} magnetic sensor element R ₁₆ constitute a second magnetic sensor 5 is a half-bridge circuit. The number of magnetic sensor elements is not limited to this. Similarly, the number and combination of the magnetic sensor elements constituting the first magnetic sensor 4 and the second magnetic sensor 5 are not limited to this.

Further, in the present embodiment, as an example, trimming patterns T ₁ to T ₁₆ are formed in parallel with the magnetic sensor elements R ₁ to R ₁₆ . Trimming pattern _{T 1} ~ trimming pattern _{T 4} and the trimming pattern _{T 9} ~ trimming pattern _{T 12,} is, for example, are formed in a row in the trimming area 21 surrounded by a dotted line in FIG. 1 (a). The trimming pattern _{T 5} ~ trimming pattern _{T 8} and the trimming pattern _{T 13} ~ trimming pattern _{T 16,} is, for example, are formed in a row in the trimming area 22 surrounded by a dotted line in FIG. 1 (a). The number of trimming patterns is not limited to this.

  The magnetic sensor device 1 is disposed, for example, in the through hole 72 of the bias magnet 7 as shown in FIG. 2 (a).

(Configuration of First Magnetic Sensor 4 and Second Magnetic Sensor 5)
First the first magnetic sensor element _{R 1} ~ 16 of the magnetic sensor element _{R 16} of the magnetic sensor 4 and the second magnetic sensor 5 is, for example, as shown in FIG. 1 (a), the surface 20 of the substrate 2 The sensor chip is formed as a sensor chip. The magnetic sensor element _{R 16} of the first magnetic sensor element _{R 1} ~ 16, as an example, magnetic sensitive sections resistance field 75 acts (magnetic resistance) changes are Ni, Fe, such as Co It is formed using a film containing ferromagnetic metal as a main component. Resistance of the first magnetic sensor element R _{1 ~} 16 of the magnetic sensor element R ₁₆ when the magnetic field 75 does not act, assumed to be equal.

The first magnetic sensor element R _{1 ~} fourth magnetic sensor element R ₄ are, for example, magnetic sensitive sections are arranged at equal intervals inclined 45 ° clockwise from the plane of the right and left direction in FIG. 1 (a). The first magnetic sensor element R _{1 ~} second magnetic sensor element R ₄ is, for example, as shown in FIG. 1 (b), are connected in series.

The magnetic sensor element R ₈ of the fifth magnetic sensor elements R _{5 ~} 8, for example, magnetic sensitive sections are arranged at equal intervals inclined 45 ° in the counterclockwise direction from the left-right direction of the page in FIGS. 1 (a) . The magnetic sensor element R ₈ of the fifth magnetic sensor elements R _{5 ~} 8, for example, as shown in FIG. 1 (b), are connected in series.

The magnetic sensor element R ₁₂ of the ninth magnetic sensor element R _{9 ~} 12 of, for example, magnetic sensitive sections are arranged at equal intervals inclined 45 ° clockwise from the plane of the right and left direction in FIG. 1 (a). The magnetic sensor elements R _{9 ~} 12 magnetic sensor element R ₁₂ of the ninth example, as shown in FIG. 1 (b), are connected in series.

The magnetic sensor elements R _{13 ~} 16 of the magnetic sensor element R ₁₆ of the 13, for example, magnetic sensitive sections are arranged at equal intervals inclined 45 ° in the counterclockwise direction from the left-right direction of the page in FIGS. 1 (a) . The magnetic sensor element _{R 16} of the magnetic sensor elements _{R 13} ~ 16 of the 13, for example, as shown in FIG. 1 (b), are connected in series.

The first magnetic sensor 4 may, for example, as shown in FIG. 1 (a) and 1 (b), and has a magnetic sensor element R ₈ of the first magnetic sensor element R _{1 ~} 8, trimming pattern T ₁ to trimming pattern T ₈ are included.

The second magnetic sensor 5 is, for example, as shown in FIG. 1 (a) and 1 (b), and has a magnetic sensor element _{R 16} of the ninth magnetic sensor elements _{R 9} ~ 16, trimming pattern T ₉ to trimming pattern T ₁₆ are included.

The first magnetic sensor element R ₁ and the trimming pattern T ₁ of the first magnetic sensor 4 may, for example, as shown in FIG. 1 (a) and 1 (b), electrically via the pads 31 and the wiring 3 It is connected to the. A reference voltage V _CC is applied to the first magnetic sensor 4 through the pad 31.

The eighth magnetic sensor element R ₈ and trimming pattern T ₈ of the first magnetic sensor 4, for example, are electrically connected through the pads 32 and the wiring 3. The first magnetic sensor 4 is electrically connected to the ground circuit (GND) through the pad 32.

Further, the fourth magnetic sensor element R ₄ , the trimming pattern T ₄ , the fifth magnetic sensor element R ₅ and the trimming pattern T ₅ of the first magnetic sensor 4 are electrically connected to the pad 33 via the wiring 3. ing. The midpoint potential V _{1 of} the first magnetic sensor 4 is output from the pad 33.

The ninth magnetic sensor element R ₉ and the trimming pattern T ₉ of the second magnetic sensor 5 are electrically connected via the pad 34 and the wiring 3 as shown in, for example, FIGS. 1A and 1B. It is connected to the. A reference voltage V _CC is applied to the second magnetic sensor 5 via the pad 31.

The sixteenth magnetic sensor element R ₁₆ and the trimming pattern T ₁₆ of the second magnetic sensor 5 are electrically connected to the pad 35 via the wire 3, for example. The second magnetic sensor 5 is electrically connected to the ground circuit (GND) through the pad 35.

Further, the twelfth magnetic sensor element R ₁₂ , the trimming pattern T ₁₂ , the thirteenth magnetic sensor element R ₁₃ and the trimming pattern T ₁₃ of the second magnetic sensor 5 are electrically connected to the pad 36 via the wiring 3. ing. The midpoint potential V _{2 of} the second magnetic sensor 5 is output from the pad 36.

The first magnetic sensor 4 and the second magnetic sensor 5 is, for example, as shown in FIG. 1 (b), and outputs a midpoint potential V ₁ and the middle point potential V ₂ to the controller 6. Control unit 6 operates amplify middle point potential V ₁ and the middle point potential V ₂ input, determines the approach of the detection target by comparing the threshold 60.

Incidentally magnetic sensor device 1 is, for example, a magnetic field is applied in the vertical direction of the paper surface of FIG. 1 (a), i.e. a sensitive portion of the first magnetic sensor element R _{1 ~} 16 of the magnetic sensor element R ₁₆ 45 When a magnetic field 75 forming an angle is applied, the resistance value of the magnetic sensor element becomes the same value, so that the difference becomes zero.

  The first magnetic sensor 4 and the second magnetic sensor 5 are disposed apart from each other at both ends of the elongated substrate 2 as shown in, for example, FIGS. 2 (a) and 2 (b).

The sensor center 23 shown in FIG. 2B is the center between the first magnetic sensor 4 and the second magnetic sensor 5. The sensing point P ₄ is the center of the first magnetic sensor element R _{1 ~} fourth magnetic sensing part of the magnetic sensor element R ₄ which is selected in the first magnetic sensor 4, a fifth magnetic sensor that is selected The center point of the element R ₅ to the center of the magnetically sensitive portion of the _eighth magnetic sensor element R ₈ .

Furthermore sensing point P ₅ is the center of the ninth sensitive portion of the magnetic sensor elements R _{9 ~} 12 magnetic sensor element R ₁₂ of the selected second magnetic sensor 5, the 13 magnetic sensors that are selected It is a midpoint between the element R ₁₃ to the center of the magnetic sensing part of the sixteenth magnetic sensor element R ₁₆ .

Trimming pattern _{T 1} ~ trimming pattern _{T 16,} for example, is cut by irradiation of the laser. As described above, the trimming patterns T _{1 ~} trimming pattern T _16, since side by side adjacent to the trimming area 21 and the trimming area 22, and is easily cut by laser irradiation.

The magnetic sensitive sections of the trimming patterns T _{1 ~} trimming pattern T ₁₆ and the magnetic sensor element may be a same material. Trimming pattern T _{1 ~} trimming pattern T _16, by being formed of the same material as the magnetically sensitive portion, it is possible to form in the step of forming the magnetic sensor element.

  As a modification, the magnetic sensor element is not limited to the magnetoresistive element, and may be a Hall element or a GMR (Giant Magneto Resistance) sensor.

(Configuration of control unit 6)
The control unit 6 includes, for example, a central processing unit (CPU) that performs computation, processing, and the like on acquired data according to a stored program, a random access memory (RAM) that is a semiconductor memory, and a read only memory (ROM). Is a microcomputer that For example, a program for the control unit 6 to operate and a threshold 60 are stored in the ROM. The RAM is used, for example, as a storage area for temporarily storing operation results and the like.

The threshold 60 is, for example, a threshold used to detect the approach of the magnetic body 8 as shown in FIGS. 3 (a) and 3 (b). Control unit 6, for example, determines that the voltage of the middle point potential V ₁ and the middle point potential V ₂ to the differential amplifier may become the threshold 60 or more, were detected magnetic body 8. Then, the control unit 6 generates detection information S indicating that the magnetic body 8 has been detected, and outputs the detection information S to the connected electronic device.

(Configuration of bias magnet 7)
The bias magnet 7 is, for example, a permanent magnet such as an alnico magnet, a ferrite magnet or a neodymium magnet, or a magnetic material such as a ferrite type, neodymium type, samaco bar type, samarium iron nitrogen type, polystyrene type, polyethylene type, polyamide type And a synthetic resin material such as acrylonitrile / butadiene / styrene (ABS), and molded into a desired shape.

  For example, as shown in FIGS. 3A and 3B, the bias magnet 7 has a cylindrical shape, but is not limited to this, and may be U-shaped or the like. The bias magnet 7 is magnetized so that the first surface 70 side is the N pole and the second surface 71 side is the S pole, but the N pole and the S pole may be reversed. The bias magnet 7 forms a magnetic field 75 drawn from the N pole and drawn into the S pole.

  The bias magnet 7 has a through hole 72 penetrating from the first surface 70 to the second surface 71. As an example, the through hole 72 has an octagonal shape, and a pair of opposing sides has a shape longer than the other sides, but is not limited to this shape. For example, as shown in FIG. 3A, when the longitudinal direction of the through hole 72 is X axis, the short side direction is Y axis, and the direction orthogonal to the XY axis is Z axis, as shown in FIG. 1 are disposed in the through hole 72 along the Z axis.

(Configuration of magnetic body 8)
The magnetic body 8 contains, for example, a ferromagnetic metal such as Ni, Fe, or Co as a main component. For example, as shown in FIGS. 3 (a) and 3 (b), the magnetic body 8 is movable in the direction of arrow A, which is a direction approaching the magnetic sensor device 1, and in the direction of arrow B, which is a separation direction. Is configured.

  The magnetic body 8 is attached to, for example, a detection target. The magnetic sensor device 1 is configured to detect the approach and the detachment of the detection target via the magnetic body 8.

(Selection of magnetic sensor element)
FIG. 4A is a schematic view for explaining an example of the selection of the magnetic sensor element of the magnetic sensor device according to the embodiment and the movement of the sensing point, and FIG. 4B is obtained by cutting the trimming pattern. It is the schematic for demonstrating an example of the formed circuit.

As shown in FIGS. 3A and 3B, when the magnetic sensor device 1 is disposed in the through hole 72 of the bias magnet 7, the change of the magnetic field vector 76 due to the approach and detachment of the magnetic body 8 is effectively made. in order to detect, the need to arrange the magnetic sensor device 1 as sensing point P ₄ and the sensing point P ₅ of the magnetic sensor device 1 is a change in the magnetic field vector 76 is large, the magnetic flux density is positioned in a higher place is there.

  Here, the positions in the Y-axis direction and the Z-axis direction can be adjusted by changing the mounting position of the magnetic sensor device 1 and the chip thickness. However, the position in the X-axis direction should be newly designed because the direction of the magnetic field vector 76 at the sensing point is preferably symmetrical with respect to the Z-axis, and the sensing point is determined by the distance from the sensor center 23 there is a possibility.

  For example, as shown in FIG. 4B, the magnetic sensor device 1 is configured to be able to select and use a magnetic sensor element connected in parallel with the trimming pattern by cutting the trimming pattern. ing.

Specifically, for example, as shown in FIG. 4B, when the trimming pattern T ₁ , the trimming pattern T ₂ , the trimming pattern T ₇ and the trimming pattern T ₈ are cut, the first magnetic sensor 4 can A half bridge circuit including one magnetic sensor element R ₁ , a second magnetic sensor element R ₂ , a seventh magnetic sensor element R ₇ and an eighth magnetic sensor element R ₈ is formed.

When the trimming pattern T ₉ , the trimming pattern T ₁₀ , the trimming pattern T _15, and the trimming pattern T ₁₆ are cut, for example, as illustrated in FIG. 4B so as to be symmetrical, the second magnetic sensor 5 The ninth magnetic sensor element R ₉ , the tenth magnetic sensor element R ₁₀ , the fifteenth magnetic sensor element R _15, and the sixteenth magnetic sensor element R ₁₆ form a half bridge circuit.

  When the magnetic sensor device 1 does not cut the trimming pattern, the current does not flow to the magnetic sensor element connected in parallel with the trimming pattern, and flows in the trimming pattern. This is because the resistance value of the magnetic sensor element is larger than the resistance value of the trimming pattern. Therefore, in order to select the magnetic sensor element, the trimming pattern connected in parallel with the magnetic sensor element to be selected may be cut.

By selecting this magnetic sensor element, it is possible to adjust the sensing point and adjust the output characteristics of the magnetic sensor device 1. The output characteristics of the magnetic sensor device 1 are adjusted, for example, according to the number and relative positions of the magnetic sensor elements used. Hereinafter, as an example of sensing points, sensing point P ₄₁ to sensing point P ₄₇ and sensing point P ₅₁ to sensing point P ₅₇ will be described.

When the magnetic sensor element R ₈ of the first magnetic sensor element R ₁ and the eighth is selected, that is, when the trimming patterns T ₁ and the trimming pattern T ₈ is disconnected, the sensing points P _4, for example, FIG. 4 ( as shown in a), the sensing point P ₄₁ is the center of both.

Also to be symmetrical, when the magnetic sensor element R ₁₆ of the ninth magnetic sensor element R ₉ and the 16 is selected, that is, when the trimming pattern T ₉ and the trimming pattern T ₁₆ is disconnected, sensing point P ₅ for example, as shown in FIG. 4 (a), the sensing point P ₅₁ is the center of both.

When the first magnetic sensor element R ₁ , the second magnetic sensor element R ₂ , the seventh magnetic sensor element R ₇ and the eighth magnetic sensor element R ₈ are selected, that is, the trimming pattern T ₁ , the trimming pattern T _2, if the trimming pattern T ₇ and the trimming pattern T ₈ is disconnected, the sensing points P _4, for example, as shown in FIG. 4 (a), the sensing point P ₄₂ is the center of the four magnetic sensor elements .

When the ninth magnetic sensor element R ₉ , the tenth magnetic sensor element R ₁₀ , the fifteenth magnetic sensor element R ₁₅ and the sixteenth magnetic sensor element R ₁₆ are selected to be symmetrical, that is, trimming When the pattern T ₉ , the trimming pattern T ₁₀ , the trimming pattern T ₁₅ and the trimming pattern T ₁₆ are cut, for example, as shown in FIG. 4A, the sensing point P ₅ is at the center of four magnetic sensor elements. a certain sensing point _{P 52.}

When the magnetic sensor element R ₇ in the second magnetic sensor element R ₂ and 7 are selected, that is, when the trimming pattern T ₂ and the trimming pattern T ₇ is disconnected, the sensing points, for example, FIGS. 4 (a) As shown in, the sensing point P ₄₃ is the center of both.

The sensing point P ₄₃ selects the first magnetic sensor element R ₁ to the third magnetic sensor element R ₃ , the sixth magnetic sensor element R ₆ to the eighth magnetic sensor element R ₈ , or the first sensing point P ₄₃ . The adjustment can also be made by selecting the magnetic sensor element R ₁ , the third magnetic sensor element R ₃ , the sixth magnetic sensor element R _6, and the eighth magnetic sensor element R ₈ .

Also to be symmetrical, if the magnetic sensor element _{R 10} of the 10 second 15 magnetic sensor element _{R 15} is selected, that is, when the trimming pattern _{T 10} and the trimming pattern _{T 15} is disconnected, sensing point _{P 5} for example, as shown in FIG. 4 (a), the sensing point P ₅₃ is the center of both.

The sensing point P ₅₃ selects the ninth magnetic sensor element R ₉ to the eleventh magnetic sensor element R ₁₁ and the fourteenth magnetic sensor element R ₁₄ to the sixteenth magnetic sensor element R ₁₆ or the ninth The adjustment can also be made by selecting the magnetic sensor element R ₉ , the eleventh magnetic sensor element R ₁₁ , the fourteenth magnetic sensor element R ₁₄ and the sixteenth magnetic sensor element R ₁₆ .

When the second magnetic sensor element R ₂ , the third magnetic sensor element R ₃ , the sixth magnetic sensor element R ₆ and the seventh magnetic sensor element R ₇ are selected, that is, the trimming pattern T ₂ , the trimming pattern T _3, if the trimming pattern T ₆ and the trimming pattern T ₇ is disconnected, the sensing points P _4, for example, as shown in FIG. 4 (a), the sensing point P ₄₄ is the center of the four magnetic sensor elements .

The sensing point P ₄₄ is selected when the first magnetic sensor element R ₁ to the eighth magnetic sensor element R ₈ are selected, or the first magnetic sensor element R ₁ , the fourth magnetic sensor element R ₄ , and the _fourth magnetic sensor element R ₄ are selected. the magnetic sensor element R ₅ and the magnetic sensor element R ₈ of the eighth 5 can be also adjusted by when selected.

When the tenth magnetic sensor element R ₁₀ , the eleventh magnetic sensor element R ₁₁ , the fourteenth magnetic sensor element R ₁₄ and the fifteenth magnetic sensor element R ₁₅ are selected to be symmetrical, that is, trimming pattern _{T 10,} trimming pattern _{T 11,} if the trimming pattern _{T 14} and the trimming pattern _{T 15} is disconnected, the sensing points _{P 5,} for example, as shown in FIG. 4 (a), in the center of the four magnetic sensor elements a certain sensing point _{P 54.}

The sensing point P ₅₄ is selected when the ninth magnetic sensor element R ₉ to the sixteenth magnetic sensor element R ₁₆ are selected, or the ninth magnetic sensor element R ₉ , the twelfth magnetic sensor element R ₁₂ , and the _ninth magnetic sensor element R ₁₂ . the magnetic sensor element R ₁₃ and the magnetic sensor element R ₁₆ of the sixteenth 13 can be also adjusted by when selected.

When the magnetic sensor element R ₆ of the third magnetic sensor element R ₃ and the sixth is selected, that is, when the trimming patterns T ₃ and the trimming pattern T ₆ is disconnected, the sensing points P _4, for example, FIG. 4 ( As shown in a), it becomes the sensing point P ₄₅ which is the center of both.

When the second magnetic sensor element R ₂ to the fourth magnetic sensor element R ₄ and the fifth magnetic sensor element R ₅ to the seventh magnetic sensor element R ₇ are selected, the sensing point P ₄₅ is The adjustment is possible even when the second magnetic sensor element R ₂ , the fourth magnetic sensor element R ₄ , the fifth magnetic sensor element R _5, and the seventh magnetic sensor element R ₇ are selected.

Also to be symmetrical, when the magnetic sensor element _{R 14} of the magnetic sensor element _{R 11} of the 11 14 is selected, that is, when the trimming pattern _{T 11} and the trimming pattern _{T 14} is disconnected, sensing point _{P 5} For example, as shown in FIG. 4A, the sensing point P ₅₅ is the center of both.

The sensing point P ₅₅ is selected when the tenth magnetic sensor element R ₁₀ to the fifteenth magnetic sensor element R ₁₅ are selected, or the tenth magnetic sensor element R ₁₀ , the twelfth magnetic sensor element R ₁₂ , the _tenth the magnetic sensor elements R ₁₃ and 15 magnetic sensor element R ₁₅ of 13 are also possible adjusted by when selected.

When the magnetic sensor element R ₆ of the third magnetic sensor element R _{3 ~} 6 is selected, that is, when the trimming pattern T _{3 ~} trimming pattern T ₆ is disconnected, the sensing points P _4, for example, FIG. 4 ( as shown in a), the sensing point P ₄₆ is the center of both.

Also to be symmetrical, when the magnetic sensor element _{R 14} of the magnetic sensor elements _{R 11} ~ 14 of the 11 have been selected, that is, when the trimming pattern _{T 11} ~ trimming pattern _{T 14} is disconnected, sensing point _{P 5} for example, as shown in FIG. 4 (a), the sensing point P ₅₆ is the center of both.

When the magnetic sensor element R ₅ of the fourth magnetic sensor element R ₄ and fifth is selected, that is, when the trimming patterns T ₄ and the trimming pattern T ₅ is disconnected, the sensing points P _4, for example, FIG. 4 ( as shown in a), the sensing point P ₄₇ is the center of both.

Also to be symmetrical, when the magnetic sensor element _{R 13} of the twelfth magnetic sensor element _{R 12} of the 13 have been selected, that is, when the trimming patterns _{T 12} and the trimming pattern _{T 13} is disconnected, sensing point _{P 5} for example, as shown in FIG. 4 (a), the sensing point P ₅₇ is the center of both.

Thus, the sensing points can be adjusted from the outermost sensing point P ₄₁ and sensing point P ₅₁ to the sensing point P ₄₇ and sensing point P ₅₇ located the innermost.

The combination of the magnetic sensor elements described above is an example, and may be a combination such as the first magnetic sensor element R ₁ , the third magnetic sensor element R ₃ , the fourth magnetic sensor element R ₄ and the like. good. The sensing points can be further finely adjusted depending on the number, combination, and area of the magnetic sensor elements.

(Effect of the embodiment)
The magnetic sensor device 1 according to the present embodiment can adjust the position of the sensing point. Specifically, the magnetic sensor device 1 can select the magnetic sensor element by cutting the trimming pattern, and adjust the position of the sensing point by the combination of the selected magnetic sensor elements. Therefore, the magnetic sensor device 1 does not have to newly design the pattern of the magnetic sensor element and the like, and the development period can be shortened.

  The magnetic sensor device 1 can adjust the position of the sensing point according to the shape of the bias magnet 7 and the shape of the through hole 72, the magnetic field 75 acting on the first magnetic sensor 4 and the second magnetic sensor 5, etc. . And since the magnetic sensor apparatus 1 is easy to match a sensing point to a suitable position, the detection precision of the magnetic body 8 improves compared with the case where a sensing point is not in a suitable position.

  The magnetic sensor device 1 can change the magnetic flux density acting on the magnetic sensor element to change the output characteristics by adjusting the sensing point.

  The magnetic sensor device 1 can adjust the impedance by selecting the magnetic sensor element to be used.

  In the magnetic sensor device 1, since the trimming patterns are arranged side by side in the trimming area 21 and the trimming area 22, the number of times of trimming by the laser can be reduced compared with the case where they are not arranged, and the cost is suppressed.

The magnetic sensor device 1 shortens the wiring 3 and reduces the occupied area by sharing the pad 31 and the pad 34 for the reference voltage V _CC and GND and the pad 32 and the pad 35 by forming the two-layer wiring. be able to.

  Since the magnetic sensor device 1 can be formed in the same process by forming the magnetic sensor element and the trimming pattern with the same material, the process can be shortened and the manufacturing cost compared to the case where it is formed with different materials. Is suppressed. Further, since the magnetic sensor device 1 is formed of the same material as the magnetic sensor element and the trimming pattern, the film thickness of the trimming pattern becomes thinner as well as the film thickness of the magnetic sensor element, and it becomes easy to cut.

  As mentioned above, although some embodiment and modification of this invention were described, these embodiment and modification are only an example, and do not limit the invention which concerns on a claim. These novel embodiments and modifications can be implemented in other various forms, and various omissions, replacements, changes and the like can be made without departing from the scope of the present invention. Further, all combinations of the features described in the embodiments and the modifications are not necessarily essential to the means for solving the problems of the invention. Furthermore, these embodiments and modifications are included in the scope and the gist of the invention, and are included in the invention described in the claims and the equivalent scope thereof.

DESCRIPTION OF SYMBOLS 1 ... Magnetic sensor apparatus, 2 ... board | substrate, 3 ... wiring 4 ... 1st magnetic sensor, 5 ... 2nd magnetic sensor, 6 ... Control part, 7 ... Bias magnet, 8 ... magnetic body, 20 ... surface, 21 ... trimming area, 22 ... trimming area, 23 ... sensor center, 31 to 36 ... pad, 60 ... threshold value, 70 ... first surface, 71 ... second surface, 72 ... through hole, 75 ... magnetic field, 76 ... magnetic field vector

Claims (3)

A plurality of magnetic sensor elements connected in series;
A trimming pattern which is connected in parallel to at least one of the plurality of magnetic sensor elements and which can select use or nonuse of the corresponding magnetic sensor element depending on the presence or absence of disconnection;
Magnetic sensor device equipped with The trimming patterns are arranged in a line.
The magnetic sensor device according to claim 1. A half bridge circuit is formed by the plurality of selected magnetic sensor elements,
The half bridge circuit adjusts a sensing point by cutting the trimming pattern.
The magnetic sensor device according to claim 1.

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