JP2019101361A - Scan type exposure equipment - Google Patents

Abstract

To provide exposure equipment for reducing exposure unevenness in scan type exposure.SOLUTION: Radiation light reflected on a polygon mirror 5 is converted into parallel light at a collimate mirror 6 and is reflected, and reaches a workpiece 8. A position of the radiation light contacting the collimate mirror 6 is sequentially moved by the polygon mirror 5. The radiation light is radiated to a left end part of the workpiece 8 at time t1, radiated to a center part at time t2, and radiated to a right end part at time t3. According to such a structure in which, the collimate mirror 6 is provided between the polygon mirror 5 and the workpiece 8, for radiating the radiation light vertically to the workpiece 8.SELECTED DRAWING: Figure 19

Description

  The present invention relates to an exposure apparatus using an LED light source, and more particularly to scanning exposure.

  Patent Document 1 discloses an apparatus for drawing a desired pattern on an exposure surface using a large number of semiconductor laser diode (LD) light sources. Since the semiconductor laser diode has a low luminous intensity per piece, scanning is performed to compensate for the illuminance on the exposure surface even if it is small.

  In such an LD scan type exposure apparatus, a high sensitivity dedicated resist is generally used. This is because the illuminance on the exposure surface is not sufficient even if the scanning method is used.

  The inventor examined a scanning exposure apparatus using an LED having a larger amount of light than that of the LD, because the exposure can be performed without using such a high sensitivity dedicated resist.

JP, 2013-045110, A

  The scan type exposure apparatus using an LED as a light source has the following problems. An LED has a large light emission angle as compared to an LD, and therefore a dedicated optical system is required for light collection. Furthermore, it is necessary to converge light to be scanned by using a polygon mirror by using a lens group and to convert these into parallel light. Such a lens mechanism becomes complicated.

  Instead of these optical systems, it is conceivable to enlarge the collimating lens, but increasing the size of the collimating lens is also costly.

  An object of the present invention is to solve the above-mentioned problems and to provide an LED scan type exposure apparatus which can perform exposure using a resist having the same sensitivity as that of a mercury lamp.

1) The scan type exposure apparatus according to the present invention comprises an LED light source device having a light source unit composed of a plurality of LED units, a reflection unit that reflects the irradiation light from the light source device, and the irradiation light reflected by the reflection unit A parabolic reflector for irradiating the object to be exposed, wherein the reflector is a rotating polygon mirror, and the irradiated light from the LED light source device is scanned on different parts of the parabolic reflector The light is reflected, thereby scanning and exposing the exposure object. Therefore, in a scanning exposure apparatus using an LED, exposure can be performed using a resist having the same sensitivity as that of a mercury lamp. In addition, by using a parabolic reflector portion, it is possible to vertically irradiate the exposure object. Thereby, exposure unevenness can be prevented.

  2) In the scan type exposure apparatus according to the present invention, the LED light source device has a second optical system lens that makes uniform the illuminance variation of the irradiation light from the light source unit. Therefore, it is possible to provide a scan type exposure apparatus in which the exposure illuminance is made uniform.

  3) In the scan type exposure apparatus according to the present invention, the light source section has a first optical system whose emission angle is about 6 degrees. Therefore, it is possible to provide a scan type exposure apparatus in which the irradiation diameter does not spread so much.

  4) In the scanning exposure apparatus according to the present invention, the second optical system has an emission angle of about 6 degrees. Therefore, it is possible to provide a scan type exposure apparatus in which the irradiation diameter does not spread so much.

  5) In the scanning exposure apparatus according to the present invention, the light source unit is composed of a first LED and a plurality of LEDs disposed in the periphery, and a plurality of LEDs disposed in the periphery The optical axis of the LED has an LED unit in which the optical axes of the peripheral LEDs are inclined so as to intersect at the same point on the optical axis of the first LED. Therefore, more LEDs having a large light emission angle can be disposed within the critical angle of the second optical system. This makes it possible to provide a scanning exposure apparatus in which more LEDs are arranged.

6) In the scanning exposure apparatus according to the present invention, the light source unit is disposed in a plurality as the LED unit as one collective unit, and each collective unit is an individual LED at the center of each collective unit Optical axes intersect at the same point. Therefore, even when many LEDs are arranged, it is possible to provide a scan type exposure apparatus that can be easily aligned. ,
The terms in the present specification are explained.

  The “parabolic reflector portion” corresponds to the collimating mirror 6 in the embodiment. The “rotation polygon mirror” corresponds to the polygon mirror 5 in the embodiment.

It is a figure for demonstrating the relationship of the main elements of the scanning type exposure apparatus 1 concerning this invention. FIG. 2 is a perspective view of a light source unit 2; FIG. 5 is a diagram for explaining the configuration of a multi-unit at the tip of the light source unit 2; FIG. 2 is a diagram showing an LED unit 21. It is a figure which shows the body 29. FIG. 5 is a perspective view of a pedestal 31. FIG. It is a figure for demonstrating the relationship of the optical axis of the center LED unit of the multi units 11-13, and the 2nd optical system 4. FIG. It is a perspective view showing the embodiment which increased the number of multi units. FIG. 9 is a plan view and a back view of the embodiment of FIG. 8; It is a perspective view of pedestal 71. FIG. 7 is a plan view of a pedestal 71. It is a BB cross section enlarged view. It is a perspective view which shows the state which combined seven multi units. FIG. 14 is a plan view and a back view of the embodiment of FIG. 13; It is a figure which shows an example of arrangement | positioning at the time of increasing the number of LED units of 1 multi unit. FIG. 2 is a diagram showing an LED unit 201. It is a figure for demonstrating the determination method of the dimension of the flange 22. FIG. FIG. 5 is a diagram showing an example of a polygon mirror 5; It is a figure for demonstrating movement of the irradiation position by scanning light. FIG. 7 is a view showing an embodiment in which an aperture 320 provided with a slit is provided between a polygon mirror 5 and a collimating mirror 6;

  FIG. 1 shows an entire configuration (an outline showing the relationship of each part) of a scanning exposure apparatus 1 according to the present invention. The scanning exposure apparatus 1 includes a light source unit 2, a second optical system 4, a polygon mirror 5, and a collimating mirror 6 which is a reflective collimator element. The illumination light from the light source unit 2 passes through the second optical system 4 and is reflected by the polygon mirror 5. In the present embodiment, a 9 * 9 fly's eye lens is adopted as the second optical system 4.

  The illumination light reflected by the polygon mirror 5 is reflected by the collimator mirror 6. Therefore, scan irradiation is performed on the work 8 which is the exposure target. Thus, a line light source with high light purity can be obtained with only a simple optical system.

  As described above, the irradiation light from the light source unit is scan-reflected by the polygon mirror 5, and the scan light is scan-reflected by the work 8 at different spots on the collimating mirror 6. Thus, even when an LED is used for the light source portion, exposure using a resist having the same sensitivity as that of a mercury lamp becomes possible.

(1. Light source section)
First, the light source unit 2 will be described with reference to FIG. FIG. 2 is a perspective view of the light source unit 2. The light source unit 2 is configured of three multi units 11 to 13. The multi units 11 to 13 will be described with reference to FIG. The multi-unit 12 has seven LED units 21. The same applies to the multi units 11 and 13. The LED unit 21 will be described with reference to FIG. FIG. 4A is a top view of the LED unit 21. As shown in FIG. FIG. 4B shows an AA cross section of FIG. 4A. The LED unit 21 has a body 29. The body 29 has a flange 22, and the lower surface 22a of the flange 22 is spherical as described later.

  The body 29 accommodates the LED substrate 23 on which the LED element 24 is mounted. The lens unit 26 is configured of two lenses, that is, a first lens 26 a and a second lens 26 b having a smaller diameter. The optical axes of the first lens 26 a and the second lens 26 b coincide with the central axis of the light source unit 4. The light emitted from the LED element 24 is about 120 degrees, and the emission angle is condensed to about 20 degrees by the first lens 26 a and the second lens 26 b.

  Although the case where the lens unit 26 is configured by the first lens 26 a and the second lens 26 b has been described, the lens unit 26 may be configured by one or more lenses.

  FIG. 5 shows a component drawing of the body 29. As shown in FIG. 5A is a perspective view from the hole 19 in which the first lens is set, FIG. 5B is a perspective view from the opposite side, and FIG. 5C is an end view from the rear end. The rear end face is provided with a plug insertion hole 29a into which the plug socket 28 is inserted, and air holes 29b to 29e for taking in cooling air. The taken-in cooling air is discharged from the hole 29f of FIG. 5A. In the present embodiment, the four holes 29 f are provided radially, but the present invention is not limited to this.

  The cooling mechanism may be other than air cooling, such as water cooling or a heat pipe.

  The pedestal 31 for holding the LED unit 21 will be described with reference to FIG. The pedestal 31 has a substantially disk shape, and has seven through holes 32. In the arrangement of the seven through holes 32, six through holes are formed concentrically so as to surround one in the center. The through hole 32 has a diameter with which the body of the LED unit 21 is fitted. The through holes 32 are inclined in the normal direction of the spherical contact surface 33 as described later.

  The pedestal 31 has a spherical contact surface 33. The spherical ground contact surface 33 is spherical as shown in FIG. 6B. The through hole 32 of the pedestal 31 is inclined in the normal direction of the spherical contact surface 33. That is, with reference to the normal direction of the spherical contact surface in the central through hole 32, the through holes 32 arranged in the periphery with respect to the radial direction are in the normal direction of the spherical contact surface at that position. It is inclined.

  In addition, in FIG. 6B, the spherical ground-contacting surface 33 is shown to be larger than the actual one so that it can be understood that the shape is spherical.

  The lower surface 22a of the flange 22 is formed of a spherical surface that matches the spherical surface. Therefore, when the body of the LED unit 21 is inserted into the through hole 32, the lower surface 22a of the flange 22 is grounded to the spherical ground surface 33. Thus, each LED unit 21 is held in the direction defined by the spherical surface of the spherical ground surface 33 of the pedestal 31. That is, the spherical ground contact surface 33 is formed of a concave curved surface of a radius at which the optical axes of the plurality of LED units 21 inserted into the pedestal 31 intersect at a specific position. The lower surface 22a in contact with the spherical ground contact surface 33 is formed of a convex curved surface.

  When the LED units 21 are respectively inserted into the plurality of through holes of the pedestal 31 and positioned and fixed (the holding mechanism is not shown), the multi units 11 to 13 are completed.

  The arrangement relationship among the multi units 11 to 13 will be described with reference to FIG.

  As shown in FIG. 7, the multi units 11 to 13 are arranged in an arc so that the optical axis of the central LED unit of the multi units 11 to 13 is directed to a point P1 substantially at the center of the second optical system 4 . As a result, the optical axes of the LED units other than the central LED unit in each multi-unit are also directed toward the substantially central point P1 of the second optical system 4. Thus, the light emitted from the LEDs of the plurality of multi-units can be efficiently arranged so as to pass within the critical angle θ of the second optical system 4.

  In FIG. 7, it is assumed that the multi units 11 to 13 are separated from each other, and the optical axes of the respective central LED units are arranged in an arc so as to face one point of the second optical system 4. did. This conceptually shows how the optical axes of the central LED units of the multi units 11 to 13 are related to each other. In fact, as shown in FIG. 3, to save space, as viewed from the top, the central LED unit of each multi-unit is disposed on one circumference, and the degree of inclination is It may be arranged such that the optical axis of the central LED unit of each multi-unit is directed to one point of the second optical system 4.

  Specifically, the reference plane of each multi-unit may be arranged to coincide with the direction orthogonal to the optical axis of the LED unit at the center of the multi-unit. In the case of FIG. 7, the reference plane β1 orthogonal to the optical axis α1 of the LED unit at the center of the multi-unit 11 may be disposed so as to face the point P1 of the second optical system 4. The same applies to the multi units 12 and 13.

  Thus, light is emitted from the respective multi units in the direction of the point P1.

  The number and arrangement of the multi units are not limited to the shape of FIG. For example, as shown in FIG. 8, the first multi unit 51 may be disposed at the center, and six second to sixth multi units 52 to 57 may be disposed around the same.

  For each multi-unit, each multi-unit is installed at an angle so as to intersect at the same point as the optical axis of the central LED unit, as in FIG.

  The fixing method of each multi-unit will be described using FIG. FIG. 9A is a front view in the case where seven multi-units 51 (only pedestals) shown in FIG. 8 are arranged. FIG. 9B is a view from the back. As shown in FIG. 9B, the center first multi unit 51 is connected to peripheral second to sixth multi units 52 to 57 by bars 62 to 67. The bars 62 to 67 are bent so that the optical axes of the central LEDs of each multi-unit intersect at a predetermined point, as described above. Although only the peripheral multi-unit 57 is connected to the adjacent peripheral multi-unit 56 by the bar 68 in FIG. 9B, the bars may be provided similarly for the other adjacent peripheral multi-units 52 to 56. Thus, the optical axis adjustment of a plurality of LEDs is facilitated by inclining the multi units so as to intersect each multi unit at the same point as the optical axis of the central LED unit.

  In the present embodiment, as shown in FIG. 6B, the through holes 32 of the peripheral LED units are inclined in the normal direction of the spherical ground contact surface, and the LED units are fitted with the through holes. However, the present invention is not limited to this, and without providing such an inclination, all in the same direction as the central through hole 32 and in the same direction, the diameter is increased, and the direction of the optical axis is aligned with the lower surface 22 a of the flange 22. The LED units may be fixed with screws, etc.

  In the present embodiment, although the case where the central first multi unit 51 and the peripheral second to sixth multi units 52 to 57 are connected by the bars 62 to 67 has been described, a pedestal for holding these is provided. May be

  Further, the spherical contact surface of the pedestal in the present embodiment may be lathe processed. In addition, with regard to the through holes, the work may be inclined to perform drilling. Furthermore, in the case where the diameter is to be made large without being fitted, the peripheral through holes may be drilled in parallel with the middle through hole.

  In the present embodiment, since the ground contact surface of the pedestal 31 is a concave spherical surface and the lower surface 22a of the flange is a convex spherical surface, the optical axis can be obtained regardless of the position of the LED unit. You can cross at the same point. In addition, since the ground contact area is increased, the cooling efficiency is improved.

(1.2 Other configuration of light source unit)
In the above embodiment, the ground surface of the pedestal 31 and the lower surface 22a of the flange of the LED unit are spherical, but the shape of the surface is not limited to this. In this embodiment, the ground surface of the pedestal 31 in FIG. 10 is a slope (flat surface), and the surface 122a of the flange of the LED unit 121 is a plane perpendicular to the optical axis of the LED unit 121. This will be described below.

  The perspective view of the base 71 is shown in FIG. The pedestal 71 is configured such that the other ground planes 77b to 77g are inclined with reference to the ground plane 77a. Through holes 78a to 78g are formed in each of the ground contact surfaces. The LED unit 121 is inserted into the through holes 78a to 78g as in the above embodiments. Unlike the first embodiment, the lower surface 122a of the flange 122 in the LED unit 121 in this embodiment is perpendicular to the optical axis (not shown).

  FIG. 11 is a plan view of the state in which the LED unit 121 is inserted into the through hole 78 e of the pedestal 71. FIG. 12 shows an enlarged end view of the cross section BB. In FIG. 12, the optical axis γ1 of the LED unit inserted into the central through hole 78a is orthogonal to the ground plane 77a. The side surfaces of the through holes 78b into which the peripheral LED units are inserted are parallel to the light axes γ2 and γ3 which are inclined as shown in FIG.

  Thus, unlike the above embodiment, even in the shape in which the ground plane 122a is perpendicular to the optical axis, the optical axis of each LED can be directed to a desired one point in the multi-unit set on the pedestal 31.

  The through holes and the ground contact surface of the pedestal may be cut and drilled with a 5-axis machining center or the like.

  FIG. 13 shows an assembly of multi-units in which seven pedestals 71 are combined. FIG. 13 shows a state in which the LED units 121 are inserted into one through hole of each multi-unit, and these are combined. FIG. 14A shows a top view of FIG. Numbers 81 to 87 were assigned to each multi-unit. That is, six multi units 82 to 87 are arranged on the same circumference so as to surround the central multi unit 81. Also in this case, six peripheral multi units 82 to 87 are arranged with respect to the central multi unit 81 such that the optical axes of the central LED units of each multi unit intersect at a point of 1.

  The connection between each multi-unit will be described using FIG. 14B. The central multi unit 81 and the peripheral multi units 82 to 87 are connected and fixed by a bar 91.

  Also in the present embodiment, the number of LED units in each multi-unit and the number of multi-units are arbitrary.

  In the present embodiment, six LED units are arranged around the central LED unit for each multi-unit. By arranging in this way, the LED units can be arranged more efficiently.

(1.3 Other configuration of light source unit)
In the first and second embodiments, one multi-unit is configured by seven LED units, and each multi-unit is arranged such that the optical axis of the central LED unit is directed to one point. The optical axis of the unit was directed to a desired point. However, the number of LED units constituting one multi-unit is not limited.

  FIG. 15 shows the arrangement in the case where one multi-unit is composed of 67 LED units. The diameter D11 may be slightly larger than the flange 22, and the through holes of the diameter D10 may be provided.

  In this case, the inclination of each LED unit may be determined so that the optical axes of the LED units intersect at a desired position with reference to the central LED unit 130 as described above. In the present embodiment, as in the second embodiment, the ground contact surface of the pedestal is formed as an oblique plane, and the ground contact surface of the flange of the LED unit is orthogonal to the optical axis. The angle of each through hole may be formed by determining the normal of the arc at each position according to the distances d1 to d7 away from the central LED unit 130 and forming the angle.

  Further, although the number of LED units is 67 in this embodiment, the number of LED units L0 to L3 may be set. In addition, L4 to L5 may be provided outside of L4, and L6 to L7 may be further provided, and further, L4 to L7 may be further provided outside of L4 to L7.

  In addition, it is good also as circular arc shape like 1st Embodiment. In this case, as shown in FIG. 6, there may be 67 through holes, and the ground contact surface on the surface may be arc-shaped. Also, naturally, the ground contact surface of the flange of the LED unit is also in the form of a circular arc.

  In this embodiment, the six LED units L1 are arranged around the central LED unit L0, and the LED units L2 and L3 surrounding it are arranged outside the central LED unit L0, but they are arranged around the central LED unit L0 The number of LED units required may not be six. That is, it can be increased or decreased.

  In this embodiment, the case where the individual LED units are arranged has been described, but the multi-units of the above embodiment are arranged around the center in this manner, and further arranged around the periphery, and so on. It is also good.

  In each of the above embodiments, the case where the LED units have the same diameter at the top and bottom and flanges are provided in the middle has been described. However, a step 222 as shown in FIG. It may be made to function as This is because the first lens 26a needs to have a certain diameter, but the second lens and its lower part do not need to have a very large diameter. This allows the LED units to be arranged more efficiently.

  In FIG. 16, the same parts as those in the first embodiment are given the same reference numerals. Further, the lower side (the opposite side to the first lens 26 a) than the LED substrate 223 is omitted. Also, the cooling holes are not described in FIG. 16 but exist similarly. Furthermore, in FIG. 16, the flange and the pedestal surface are damaged so as to be apart, because this is for the purpose of explaining the formula.

  In the present embodiment, the dimensions of each part of the pedestal 31 are set as follows. In addition, it is not limited to this.

  As shown in FIG. 17, the LED unit 21 needs to be inclined by an angle δ between the central LED unit 21 and the peripheral LED units. When the angle δ is large, the distance r between the LED units becomes large. The minimum value of the angle δ can be obtained by the following equation.

δ = 2 * tan ^-1 (φ / 2 L)
Here, φ is the outer diameter of the body 29 of the LED unit 21, and L is the distance from the point P in FIG. 7 to the tip of the lens.

  Assuming that the projection length LF from the pedestal 31 is a minimum value of the distance r between the LED units at the center position of each LED unit 21 can be obtained by the following equation.

r = 2 (L + LF) * sin (δ / 2)
When the minimum value of the distance r between the LED units is determined, the minimum value of the diameter D of the pedestal 31 can be obtained by the following equation.

D = 2r + φ + 2d
d is a margin (flange portion) provided on the outside of the peripheral LED unit in FIG.

  Once the diameter D of the pedestal 31 is determined, the arrangement relationship between the multi-units can be determined. When the multi-unit is circular, the minimum value of the distance R between the central through holes in each multi-unit is R = D.

  However, in practice, each multi-unit is slightly inclined, so it is necessary to take a margin for that. Furthermore, peripheral multi-units can also be arranged outside the peripheral multi-units of FIG.

Further, as shown in FIG. 13, the degree of integration can be further enhanced by forming the outer shape of the multi-unit into a hexagonal shape. The minimum value of R in calculation is
R = ( ^3-2 /2) D
It becomes.

  As described above, each dimension in the multi-unit may be determined.

In the present embodiment,
φ = 16 mm
L = 250 mm
LF = 18.6 mm
d = 2 mm
Because
Angle δ = 3.67 °
Distance r = 17.18 mm
D = 54.4 mm
R = 47.1 mm (in the case of a hexagon)
(1.4 Other configuration of light source unit)
In each of the above-described embodiments, although the case where the flange 22 is located on the front surface side (the second optical system side) of the pedestal 31 has been described, both are positioned so that the flange 22 is located on the back surface side of the pedestal 31 You may position it. Thereby, the LED unit can be inserted from the back side of the pedestal.

  In each of the above embodiments, the flange 22 is in contact with the surface so as to protrude from the surface side of the pedestal, but the flange 22 may be partially or entirely embedded from the surface of the pedestal. (Square processing). Furthermore, the same applies to the case where the flange 22 is located on the back side.

  In the roughening process, the entire surface of the flange 22 may be positioned in contact with the ground, or may be partially in contact. For example, as in the first embodiment, when the surface of the pedestal 31 is spherical and the back side is roughened, the flange 22 comes in contact with the surface on which the lens portion side is roughened. In such a case, if the bottom surface of the counterbore and the contact surface of the flange 22 are spherically machined, the two come into surface contact. On the other hand, if the ground contact surface of the flange 22 is processed into a spherical surface and the bottom surface of the counterbore is inclined and planarized, only the peripheral portion of the flange 22 is grounded. In this case, although there is only a partial contact, it is possible to position the peripheral edge in contact.

(2. About the scanning mechanism)
The illumination light of the light source unit 2 passes through the second optical system 4.

  The irradiation light emitted from the second optical system 4 is reflected by the reflection surface 5 a of the polygon mirror 5.

  As the polygon mirror 5, an integral polygon mirror 301 as shown in FIG. 18A may be adopted, or as shown in FIG. 18B, eight plane mirrors 311 are formed into an octagon by eight columns 312. The polygon mirror 310 may be employed.

  The illumination light reflected by the polygon mirror 5 is reflected by the collimator mirror 6.

  The collimating mirror 6 converts the light into parallel light, reflects it, and illuminates the work 8. Here, since the polygon mirror 5 is rotating at a high speed, the position that strikes the collimating mirror 6 sequentially moves. For example, as shown in FIG. 19A, the spot light irradiated to the left end of the work 8 at time t1 is at the center of the work 8 at time t2 (see FIG. 19B), and the right end of the work 8 at time t3. (See Figure C).

  In the present embodiment, the collimating mirror 6 is provided between the polygon mirror 5 and the work 8. This has the following merits. When the reflected light from the polygon mirror 5 is directly irradiated to the workpiece 8, the scanning speed at the end of the irradiation area to be scanned is faster than that at the central part. This is because the distance between the reflecting surface of the polygon mirror 5 and the work 8 is different at the end and the center of the irradiation area to be scanned although the rotational speed of the polygon mirror 5 is constant. If the moving speed is different, the exposure time is different, so that uneven exposure can be made. On the other hand, by providing the collimating mirror 6, the workpiece 8 can be irradiated perpendicularly, so that such a problem can be avoided.

  The irradiation light is collimated by the collimating mirror. Therefore, the irradiation areas at time t1, time t2 and time t3 have substantially the same shape, and the intervals are the same.

   The specific configuration of each part adopted in the present embodiment will be described. The fly's eye lens 4 has a diameter of 35 mm, and light having an incident angle of 20 degrees is narrowed to an emission angle of 6 degrees. The polygon mirror 5 has a width d21 in FIG. 18 of 50 mm, and the collimating mirror 6 has a width 500 mm in the direction of arrow α in FIG. 1, a width 100 mm in the depth direction, and a radius R2000. Further, the angle θ1 in FIG. 1 is set to 30 degrees, and the collimator mirror 6 is set to rotate clockwise 15 degrees, and the distance between the fly eye lens 4 and the polygon mirror 5 is 180 mm. The distance to the collimating mirror 6 was about 1000 mm, and the distance between the collimating mirror 6 and the work 8 was about 1000 mm.

  As a result, the spot diameter of the irradiation light on the polygon mirror 5 becomes about 37 mm as the emission angle spreads by 6 degrees.

 The reason why the collimating mirror 6 has a width of 500 mm is because the width of the work is 300 mm. Since the emission angle of the polygon mirror 5 is 6 degrees, the spot diameter of the irradiation light on the collimating mirror 6 is expanded by that amount to be 50 to 55 mm (diameter).

  The following error occurs between the polygon mirror 5 and the collimating mirror 6. Specifically, since the diameter of the collimating mirror 6 is R2000, the linear distance is 155.29 mm, and the arc distance (corresponding to 9 degrees) is 155.5 mm. This is only an increase of 0.13%. Even if the uniformity is 90% or more, the decrease in ambient illumination can be said to be within the range of error.

  Also, a difference in optical path length occurs between the center and the end in the exposure area of 300 mm width. This is almost negligible. The optical path length of the central portion is 1000 + 1000 = 2000 mm, the left end is 965.5 + 1034.07 = 1999.82 mm, and the right end is 1069.61 + 953.42 = 2023.03 mm. Thus, the difference is less than 2%.

  In addition, an aperture 320 having a slit 321 as shown in FIG. 20 may be provided between the polygon mirror 5 and the collimating mirror 6. Thereby, the illuminance uniformity on the exposure surface can be improved. In the present embodiment, the slit 321 has an oval shape, and d11 = 400 mm in the longitudinal direction and d12 = 40 mm in the lateral direction. However, the present invention is not limited to this.

  In the above embodiment, a fly's eye block configured by a fly's eye lens is adopted as the second optical system 4, but a rod lens may be adopted.

  In the present embodiment, although the light source unit is configured by the light source unit 2 and the second optical system 4, the second optical system 4 may be omitted. Even in this case, since the irradiation light is scanned on the work 8, a certain degree of uniformity can be maintained. Also in this case, excessive light can be removed by providing the slits shown in FIG.

(3. Summary of light source part)
1) The LED unit according to the present invention is an LED unit composed of a first LED and a plurality of LEDs disposed in the periphery thereof, wherein the optical axes of the plurality of LEDs disposed in the periphery are the above The optical axes of the peripheral LEDs are inclined in an oblique manner so as to intersect at the same point on the optical axis of the first LED. Therefore, more LEDs having a large light emission angle can be disposed within the critical angle of the second optical system.

  2) In the LED unit according to the present invention, the peripheral LEDs are arranged on the same circumference around the first LED. As described above, by arranging a plurality of LEDs around one LED, it is possible to arrange more LEDs having a large light emission angle within the critical angle of the second optical system.

  3) In the LED unit according to the present invention, each of the LEDs has a flange for installation, and each of the LED units has a pedestal surface in contact with the flange. By tilting, the optical axes of the respective peripheral LEDs intersect at the same point as the optical axis of the first LED. Therefore, it is possible to arrange more LEDs having a large emission angle within the critical angle of the second optical system with a simple configuration.

  4) In the LED unit according to the present invention, the number of peripheral LEDs is 6 or more. Therefore, more LEDs having a large light emission angle can be disposed within the critical angle of the second optical system.

  5) In the LED unit according to the present invention, the peripheral LEDs are six. Therefore, more LEDs having a large light emission angle can be disposed within the critical angle of the second optical system.

  6) The LED light source according to the present invention is an LED light source in which a plurality of LED units comprising a first LED and a plurality of LEDs disposed around the first LED are arranged as one collective unit, each collective unit The respective assembly units are installed such that the optical axes of the individual LEDs at the center of each intersect at the same point. In this manner, alignment can be easily performed by separating the LED units into a plurality of LED units and arranging so that the optical axes of the individual LEDs at the center of each assembly unit intersect.

  7) In the LED light source according to the present invention, a plurality of peripheral aggregation units are disposed so as to surround the central aggregation unit, with the plurality of aggregation units arranged in the center as the central aggregation unit. The collective units are installed such that the optical axes of the individual LEDs in the center of the peripheral collective units intersect at one point on the optical axis of the individual LEDs in the center of the central collective unit. As described above, by arranging a plurality of aggregation units around one aggregation unit, it is possible to arrange more LEDs with large emission angles within the critical angle of the second optical system.

  8) In the LED light source according to the present invention, the number of collective units is three or more. Therefore, more LEDs having a large light emission angle can be disposed within the critical angle of the second optical system.

  9) In the LED light source according to the present invention, the number of peripheral aggregation units is six. Therefore, more LEDs having a large light emission angle can be disposed within the critical angle of the second optical system.

  10) The LED unit according to the present invention is an LED unit composed of a first LED and a plurality of LEDs arranged around the first LED, each of the LEDs having a flange for installation, Each of the LEDs has a pedestal surface in contact with the flange, the pedestal surface has a concave spherical shape, and the LED has a convex spherical flange in contact with the spherical ground surface, and the convex surface has a convex surface. When the mold spherical flange contacts the concave spherical shape, the optical axes of the peripheral LEDs intersect at the same point on the optical axis of the first LED. Therefore, it is possible to arrange more LEDs having a large emission angle within the critical angle of the second optical system with a simple configuration.

  11) The LED light source according to the present invention is an LED light source in which a plurality of LED units are arranged as one collective unit, and a plurality of peripherals are arranged so as to surround the central collective unit as a central collective unit. An aggregation unit is disposed, and the optical axes of the individual LEDs in the center of the peripheral aggregation units are arranged to intersect at one point on the optical axis of the individual LEDs in the center of the central aggregation unit. Therefore, it is possible to arrange more LEDs having a large emission angle within the critical angle of the second optical system with a simple configuration.

  12) The LED light source according to the present invention is an LED light source configured of a first LED and a plurality of LEDs disposed around the first LED, wherein each of the LEDs has a flange for installation, Each of the LEDs has a pedestal surface in contact with the flange, the pedestal surface has a concave spherical shape, and the LED has a convex spherical flange in contact with the spherical ground surface, and the convex surface has a convex surface. The optical axis of the plurality of LEDs arranged in the periphery intersect at the same point on the optical axis of the first LED by being in contact with the concave spherical shape and the flange of the spherical shape is arranged in the periphery An extended peripheral LED is further arranged around the LED, and the convex spherical flange of the extended peripheral LED is in contact with the concave spherical shape. The optical axes of the extended peripheral LEDs also intersect at the same point. Therefore, it is possible to arrange more LEDs having a large emission angle within the critical angle of the second optical system with a simple configuration.

  13) In the LED light source according to the present invention, the concave spherical shape is one spherical surface. Therefore, the concave spherical surface can be formed by one spherical surface. Thereby, spherical processing can be put together.

  14) In the LED exposure method according to the present invention, a plurality of LEDs are disposed around the first LED, and the optical axes of the plurality of LEDs disposed around the first LED are on the optical axis of the first LED The optical axes of the peripheral LEDs are arranged at an angle so as to intersect at the same point. Therefore, the light from the LED can be efficiently irradiated to the second optical system.

  15) A holding pedestal according to the present invention is a holding pedestal of an LED unit for holding a plurality of LED units having a body portion and a flange portion, and is disposed in the central portion of the LED unit holding portion and its periphery The plurality of peripheral LED unit holding parts, and each of the peripheral LED unit holding parts has a pedestal surface in contact with the flange portion of the LED, and each pedestal surface is a light of the respective peripheral LEDs The axis is slanted to intersect at the same point on the optical axis of the first LED, and the LED unit holder at the central portion and the peripheral LED unit holder are orthogonal to the pedestal surface Through holes are provided in the direction. Therefore, it is possible to arrange more LEDs having a large emission angle within the critical angle of the second optical system with a simple configuration.

  The terms in the present specification are explained.

  The “collection unit” corresponds to the multi units 11, 12 or 13 in FIG. 3 and the multi units 51 to 57 in FIG. Also, the case where the LED unit is inserted into the pedestal of FIG. 10 corresponds to this.

  The “central aggregation unit” is an aggregation unit which is surrounded by the other aggregation units among the aggregation units, and corresponds to the multi unit 51 of FIG. Moreover, the thing by which the LED unit was inserted in the base 81 of FIG. 14 corresponds, too.

  The “peripheral aggregation unit” corresponds to the multi-units 52 to 57 in FIG. Moreover, that by which the LED unit was inserted in the pedestals 82-87 of FIG. 14 corresponds.

  The "holding pedestal" corresponds to the pedestal 31 of FIG. Further, the pedestal 71 of FIG. 11 corresponds.

  The “LED unit holder at the center” corresponds to the central through hole in FIG. 6 and the spherical ground plane around it. Further, the ground plane 77a and the through hole 78a in FIG. 11 correspond thereto.

  The “a plurality of peripheral LED unit holders disposed around the periphery” corresponds to a through hole other than the central through hole in FIG. 6 and a spherical ground surface around the through hole. Further, the ground planes 77 b to g and the through holes 78 b to g in FIG.

“Flange” is a concept including not only the flange 22 shown in FIG. 5 but also a step 222 as shown in FIG.

1 ........ LED exposure device 2 ........ source unit 4 ........ second optical system 5 ........ polygon mirror 6 ... ...... ............ Ground 78a to 78g: through hole 121: LED unit 122: flange 122a: lower surface γ1 to γ3: optical axis

Claims (6)

An LED light source device having a light source unit configured of a plurality of LED units,
A reflecting unit that reflects the light emitted from the light source device;
A parabolic reflector for irradiating the exposure object with the irradiation light reflected by the reflection unit;
Equipped with
The reflection unit is a rotary polygon mirror, and causes the irradiation light from the LED light source device to be scan-reflected to different portions of the parabolic reflector, thereby scanning and exposing the exposure object.
Scanning exposure apparatus characterized by In the scan type exposure apparatus of claim 1,
The LED light source device has a second optical system lens that makes the illumination variation of the illumination light from the light source unit uniform.
Scanning exposure apparatus characterized by The scan type exposure apparatus according to claim 1 or 2
The light source unit includes a first optical system having an emission angle of about 6 degrees,
Scanning exposure apparatus characterized by The scan type exposure apparatus according to claim 2 or 3
The second optical system has an emission angle of about 6 degrees,
Scanning exposure apparatus characterized by In the scan type exposure apparatus according to any one of claims 2 to 4,
The light source unit is
Comprising a first LED and a plurality of LEDs arranged around the first LED, and
An LED unit in which the optical axes of the peripheral LEDs are inclined such that the optical axes of the plurality of LEDs disposed in the periphery intersect at the same point on the optical axis of the first LED To have
Scanning exposure apparatus characterized by In the scan type exposure apparatus of claim 5,
A plurality of the light source units are disposed with the LED units as one collective unit, and in each collective unit, the optical axes of the individual LEDs in the center of the collective units intersect at the same point.
Scanning exposure apparatus characterized by

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