JP2019096618A - Light source device and distance measuring sensor comprising the same - Google Patents

Abstract

To provide a light source device capable of realizing a light source with a higher luminance than the prior art, and a distance measuring sensor comprising the light source device.SOLUTION: A light source device 10 comprises: a light source unit 11 that emits a laser beam; a condenser lens 12; and a translucent fluorescent body 13. The condenser lens 12 condenses the laser beam emitted from the light source unit 11. The translucent fluorescent body 13 emits fluorescent light when being irradiated with the laser beam condensed by the condenser lens 12.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a light source device and a distance measuring sensor provided with the same.

BACKGROUND In recent years, a light source device has been used in which a light source unit that emits blue laser light and a phosphor that emits fluorescence by being emitted by being irradiated with blue laser light.
For example, in Patent Document 1, in order to miniaturize the light source device and to increase the brightness, it is excited by laser beams emitted from a plurality of semiconductor lasers and collected by a condensing lens to emit fluorescent light of different wavelengths. A light source device is disclosed in which a plurality of phosphors are used so that the light emitting point of each semiconductor laser and each phosphor are in a conjugate relationship with each other via a condenser lens.

JP, 2013-120735, A Patent No. 5649202 gazette JP 2007-148418 A

However, the above-described conventional light source device has the following problems.
That is, in the light source device disclosed in the above-mentioned publication, since the phosphor is formed by being mixed with a binder such as resin, when the phosphor is irradiated with the laser light emitted from the semiconductor laser, Laser light is scattered inside. Therefore, when the fluorescence is extracted in a specific direction, the fluorescence emitted from the phosphor can not be efficiently extracted, and it is difficult to obtain a light source with sufficiently high brightness.

Moreover, the said patent document 2 is described about the light source device using the fluorescent substance of the single crystal which does not use binders, such as resin. However, it is difficult to obtain a sufficiently bright light source only by irradiating a single crystal phosphor with laser light.
An object of the present invention is to provide a light source device capable of obtaining a light source having higher luminance than that of the prior art and a distance measuring sensor including the same.

A light source device according to a first aspect of the present invention includes a light source unit that emits a laser beam, a condenser lens, and a translucent phosphor. The condenser lens condenses the laser light emitted from the light source unit. The translucent fluorescent substance emits fluorescence by being irradiated with the laser light condensed by the condensing lens.
Here, the translucent fluorescent substance is irradiated with the laser light emitted from the light source unit and collected by the condensing lens, and the fluorescent substance excited by the laser light in the translucent fluorescent substance is used as a light source There is.

Here, as the light source unit, for example, a semiconductor laser (LD (Laser Diode)) or the like that emits blue laser light can be used.
The condensing lens may have any function as long as it can condense the laser light on the translucent fluorescent substance, and the shape is not limited. Moreover, it is preferable that the condensing lens is disposed so that a condensing point is provided on the surface or inside of the translucent phosphor.

The translucent fluorescent substance is, for example, a polyhedral or spherical block-like fluorescent substance, and includes a single crystal fluorescent substance, a translucent ceramic fluorescent substance, and the like. And, the light transmitting property is a characteristic (including a characteristic without scattering) in which light is hardly scattered in the inside of the phosphor irradiated with the laser light, and a degree to which a focused spot is formed in the inside of the phosphor Means the scattering properties of
Thus, a fluorescent light source unit for emitting the fluorescence excited by the laser light is formed along the propagation direction of the laser light in the portion of the translucent fluorescent substance irradiated with the laser light collected by the collecting lens. At the same time, the emitted fluorescent light can be extracted with little scattering of the laser light due to the characteristics of the translucent phosphor.
As a result, since it is possible to efficiently take out the fluorescence emitted from the fluorescent light source part formed in the translucent fluorescent substance, it is possible to obtain a light source having higher luminance than conventional.

A light source device according to a second aspect of the present invention is the light source device according to the first aspect, wherein the translucent phosphor has a fluorescent light source portion formed in a portion where the laser light is collected by the condensing lens. doing.
Here, for example, in a block-shaped translucent fluorescent material having a rectangular parallelepiped shape, a fluorescent light source unit which is excited by laser light and emits fluorescence is formed in a portion where the laser light is collected.

Here, the fluorescent light source unit is formed along the direction in which the laser light in the translucent fluorescent material propagates, and emits light at the portion irradiated with the laser light.
As a result, since the laser light is irradiated to the translucent fluorescent substance with little scattering, the power of the fluorescence generated per unit volume of the fluorescent light source can be increased. Therefore, it is possible to obtain a light source having higher luminance than in the prior art.

A light source device according to a third aspect of the present invention is the light source device according to the second aspect, wherein the fluorescent light source portion has a substantially cylindrical shape which is irradiated from the light source portion and is long in the propagation direction of the laser light. .
Here, the fluorescent light source part formed in the irradiation part of the laser beam in the inside of translucent fluorescent substance is formed in the substantially cylindrical shape formed along the propagation direction of a laser beam.
Thereby, fluorescence can be emitted from the substantially cylindrical fluorescence light source part formed inside the translucent fluorescent substance.

A light source device according to a fourth aspect of the present invention is the light source device according to any one of the first to third aspects, wherein the laser beam is focused on the surface or inside of the translucent phosphor by a focusing lens. Be done.
Here, the laser light is condensed on the surface or inside of the translucent phosphor.
As a result, in the translucent fluorescent substance, a fluorescent light source unit which is excited to emit fluorescence is formed at the portion where the laser light is collected. Then, since the laser light is emitted from the surface of the light transmitting phosphor to the inside with little scattering, the emitted fluorescence can be efficiently extracted from a desired direction.

A light source device according to a fifth aspect of the present invention is the light source device according to any one of the first to fourth aspects of the present invention, further comprising an intake lens for condensing fluorescence emitted in the translucent phosphor. Have.
Here, there is provided a lens for taking out the fluorescence emitted in the portion (fluorescent light source part) in the inside of the translucent fluorescent substance irradiated with the laser light.
Thereby, the fluorescence emitted in the translucent phosphor is extracted to the outside from the direction of the lens for incorporation in the translucent phosphor.
Therefore, it is possible to obtain a light source having higher luminance than in the prior art.

  A light source device according to a sixth aspect of the present invention is the light source device according to the fifth aspect, wherein the capturing lens has a lens central axis with respect to a central axis of laser propagation of laser light passing through the translucent phosphor. It is arranged together.

Here, the central axis of the lens is aligned with the central axis of the laser propagation of the light emitting portion (fluorescent light source portion) formed along the direction of propagation of the laser light in the inside of the translucent phosphor. Lenses are arranged.
As a result, since the central axis of the taking-in lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source portion) formed inside the translucent fluorescent substance, light is emitted in the translucent fluorescent substance The fluorescence can be extracted efficiently. Therefore, it is possible to obtain a light source having higher luminance than in the prior art.
In addition, since the central axis of the taking-in lens is aligned with the central axis of the fluorescent light emitting part (fluorescent light source part) formed inside the translucent fluorescent substance, it is arranged downstream of the light source part An optical system (condenser lens, capture lens) can be arranged on a straight line. Therefore, while being able to perform optical axis adjustment easily, an optical system can be miniaturized.

  A light source device according to a seventh aspect of the present invention is the light source device according to the fifth or sixth aspect of the present invention, wherein the first end face is irradiated with the fluorescence collected by the lens for capture and opposite to the first end face The optical fiber which emits fluorescence from the side 2nd end face is further provided.

Here, on the downstream side of the taking-in lens for taking out the fluorescence emitted inside the translucent phosphor, the fluorescence incident from the taking-on lens is emitted from the side (second end face) opposite to the incident side (first end face) Optical fibers are arranged.
Thus, light within the depth of field of the fluorescent light source unit can be taken into the optical fiber, so that fluorescence is taken in from the first end face of the optical fiber and high-intensity light is emitted from the second end face. Can.

Note that the depth of field generally refers to a range that can be regarded as practically in focus before and after the focused position on the object surface side with respect to the amount of blur that can be tolerated on the image surface of the lens. Means In the present invention, when the core diameter at the end face of the optical fiber is made the diameter of the permissible circle of confusion in the image plane of the lens, it means the depth of field formed on the object plane by the capturing lens.
Here, the end face of the optical fiber means the cross section at the end of the optical fiber on which the light collected by the capturing lens is incident. Also, the core diameter means the inner diameter of the cylindrical core portion that propagates the light in the optical fiber.

  A light source device according to an eighth invention is the light source device according to any one of the first to seventh inventions, wherein the translucent phosphor has an incident surface on which laser light is incident, and fluorescence is emitted. Among the light exit surfaces, at least one has a convex curved surface.

Here, at least one of the incident side and the outgoing side of the laser light in the translucent phosphor is a convex curved surface.
Thus, when the convex curved surface is provided on the incident side, for example, the size in the radial direction of a concave mirror or the like provided between the condensing lens and the translucent fluorescent material can be reduced.
On the other hand, when the convex curved surface is provided on the exit side, the spread of light due to refraction at the interface between the light-transmissive phosphor and air is suppressed, and for example, the diameter of the intake lens disposed on the downstream side Can be miniaturized.
When the convex curved surface is provided on both the incident side and the exit side, both the above-described effect on the incident side and the effect on the exit side can be obtained.

A light source device according to a ninth aspect of the present invention is the light source device according to any one of the first to eighth aspects, wherein the translucent fluorescent substance is a single crystal fluorescent substance.
Here, a single crystal phosphor is used as the translucent phosphor.
As a result, compared with the conventional phosphor containing a binder such as resin, the laser light collected by the light collecting lens propagates without being mostly scattered inside, so that fluorescent light can be emitted efficiently. it can. Therefore, it is possible to obtain a light source having higher luminance than in the prior art.

  A light source device according to a tenth aspect of the present invention is the light source device according to any one of the first to the ninth aspects, wherein the light source device is disposed on the incident surface side of the translucent phosphor It further comprises a concave mirror that transmits the laser light and reflects the fluorescence emitted on the incident surface side of the fluorescence emitted from the light-transmitting phosphor toward the light-transmitting phosphor.

Here, a concave mirror that transmits laser light and reflects fluorescence is disposed between the light-incident surface side of the translucent phosphor, that is, between the condensing lens and the translucent phosphor.
Here, as the concave mirror, it is possible to use a dichroic mirror or a perforated mirror having an opening through which laser light passes.
As a result, the laser light collected by the condenser lens is transmitted and irradiated to the translucent fluorescent substance, and the fluorescence emitted from the translucent fluorescent substance is emitted to the incident surface side of the translucent fluorescent substance The fluorescent light can be reflected by the concave mirror in the direction of the light emission position of the fluorescent light.
As a result, since the fluorescence emitted from the translucent fluorescent material can be efficiently extracted by the concave mirror, a light source with higher brightness can be obtained.

  A light source device according to an eleventh aspect of the present invention is the light source device according to any one of the first through ninth aspects, which is disposed on the light emitting surface side of the translucent phosphor and is irradiated from the light source portion. It further comprises a concave mirror that reflects the laser light that has passed through the translucent fluorescent material and transmits the fluorescence emitted to the emission surface side of the fluorescent material emitted from the translucent fluorescent material.

Here, a concave mirror that reflects the laser light and transmits the fluorescence is disposed on the emission surface side of the translucent fluorescent material.
Here, as the concave mirror, it is possible to use a dichroic mirror or a perforated mirror having an opening for passing fluorescence.
Thus, the fluorescent light emitted from the translucent fluorescent material is transmitted, and the laser light collected by the condensing lens and transmitted through the translucent fluorescent material is reflected by the concave mirror in the direction of the light emission position of the fluorescent light. it can.
As a result, by reflecting the laser light transmitted through the translucent fluorescent material back to the translucent fluorescent material by the concave mirror, it is possible to efficiently take out fluorescence, so that a light source with higher brightness can be obtained. be able to.

  A light source device according to a twelfth aspect of the present invention is the light source device according to the tenth or eleventh aspect, wherein the concave mirror is a spherical surface or an aspheric surface centered on the focusing point of the laser beam focused by the focusing lens. It has a curved surface.

Here, the concave curved surface of the concave mirror is formed to be a spherical surface or an aspheric surface centered on the condensing point of the laser beam condensed by the condensing lens.
Thereby, a concave curved surface can be disposed centering on the light emission part (fluorescent light source part) of the fluorescence excited by the laser light condensed to the translucent fluorescent substance, so that the fluorescence or the laser light can be efficiently performed, the fluorescence It can be reflected toward the light emission position of.

A light source device according to a thirteenth aspect of the present invention is the light source device according to any one of the tenth to twelfth aspects of the present invention, wherein the concave mirror is a dichroic mirror.
Thus, the concave mirror provided on the incident surface side of the laser light in the translucent fluorescent material transmits the laser light and transmits the fluorescence emitted from the translucent fluorescent material to the incident surface side as the translucent fluorescent light. It can reflect in the direction of the light emission position in the body.
Alternatively, the concave mirror provided on the light emitting surface side of the translucent fluorescent material transmits the fluorescence emitted from the translucent fluorescent material and transmits the laser light transmitted through the translucent fluorescent material to the translucent fluorescent material. It can reflect in the direction of the light emission position.
As a result, it is possible to obtain a light source with higher brightness.

A distance measuring sensor according to a fourteenth invention includes the light source device according to any one of the first to thirteenth inventions, a light receiving unit, and a measuring unit. The light receiving unit receives the reflected light of the light emitted from the light source device. The measuring unit measures the distance to the object based on the amount of light received by the light receiving unit.
Here, the distance measuring sensor is configured using the light source device described above.
As a result, since it is possible to use a light source whose luminance is higher than that of the conventional light source, it is possible to improve the measurement accuracy and to improve the response speed.

  The distance measuring sensor according to the fifteenth invention is the distance measuring sensor according to the fourteenth invention, wherein the light source device emits fluorescence including a plurality of wavelengths, and the chromatic aberration focusing lens configured to transmit the fluorescence further Furthermore, it has. The light receiving unit receives the reflected light of the fluorescent light irradiated to the object via the chromatic aberration focusing lens. The measuring unit measures the distance to the object based on the wavelength of the fluorescence at which the amount of light received by the light receiving unit is maximum.

Here, a confocal distance measuring sensor that measures the distance to an object by separating fluorescence for each wavelength (each color) using a chromatic aberration focusing lens and detecting the peak of light of each wavelength Configured.
As a result, as described above, since the distance measuring sensor is configured using the light source device that emits fluorescence whose luminance is higher than that of the conventional light source, it is possible to obtain a high-performance confocal distance measuring sensor. .

  According to the light source device of the present invention, it is possible to obtain a light source having higher luminance than in the prior art.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic diagram which shows the structure of the confocal measurement apparatus carrying the light source device which concerns on one Embodiment of this invention. FIG. 2 is a schematic view showing a configuration of a light source device mounted on the confocal measurement device of FIG. 1. The schematic diagram which expanded the principal part of the light source device of FIG. FIG. 5 is a schematic view showing the shape of a fluorescent light source part formed inside the translucent fluorescent substance of FIG. 3; The schematic diagram which shows the structure of the light source device which concerns on Embodiment 2 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. FIG. 6 is a graph showing the wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of FIG. 5. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 3 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 4 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 5 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 6 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. 15 is a graph showing the wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of FIG. (A) And (b) is a side view and a rear view showing the shape of the translucent fluorescent substance contained in the light source device concerning other embodiments of the present invention.

(Embodiment 1)
It will be as follows if the light source device 10 which concerns on one Embodiment of this invention, and the confocal measurement apparatus (distance measuring sensor) 50 provided with this are demonstrated using FIGS. 1-4.
(Confocal measuring device 50)
As shown in FIG. 1, the confocal measurement device 50 equipped with the light source device 10 according to the present embodiment is a measurement device that measures the displacement of the measurement object T using a confocal optical system. The measurement target T measured by the confocal measurement device 50 includes, for example, a cell gap of a liquid crystal display panel.

As shown in FIG. 1, the confocal measurement device 50 outputs signals from the head unit 51 having a confocal optical system, the controller unit 53 optically connected via the optical fiber 52, and the controller unit 53. A monitor 54 for displaying is provided.
The head unit 51 includes a diffractive lens (chromatic aberration focusing lens) 51a, an objective lens 51b disposed on the measurement target T side with respect to the diffractive lens 51a, and an optical fiber 52 and a diffractive lens 51a in a cylindrical casing. And a condenser lens 51c provided therebetween.

  The diffractive lens 51a causes chromatic aberration along the optical axis direction to light emitted from a light source (for example, a white light source) that emits light of a plurality of wavelengths described later. In the diffractive lens 51a, fine undulating shapes such as, for example, a kinoform shape or a binary shape (step shape, step shape) are periodically formed on the surface of the lens. The shape of the diffractive lens 51a is not limited to the above configuration.

The objective lens 51 b focuses the light which has caused the chromatic aberration in the diffractive lens 51 a on the measurement object T.
The condenser lens 51 c is provided between the optical fiber 52 and the diffractive lens 51 a in order to make the numerical aperture of the optical fiber 52 coincide with the numerical aperture of the diffractive lens 51 a.
This is because the light emitted from the white light source is guided to the head unit 51 via the optical fiber 52, and the light emitted from the optical fiber 52 can be effectively used by the diffractive lens 51a. This is because it is necessary to make the numerical aperture (NA: numerical aperture) and the numerical aperture of the diffractive lens 51 a coincide with each other.

  The optical fiber 52 is an optical path from the head unit 51 to the controller unit 53 and also functions as a pinhole. That is, of the light condensed by the objective lens 51 b, the light focused on the measurement object T is focused on the opening of the optical fiber 52. Therefore, the optical fiber 52 functions as a pinhole that blocks light of a wavelength that is not focused by the measurement object T and allows light that is focused by the measurement object T to pass.

  The confocal measurement device 50 may have a configuration in which the optical fiber 52 is not used in the optical path from the head unit 51 to the controller unit 53. However, by using the optical fiber 52 in the optical path, the head unit 51 can be used as the controller unit 53. It is possible to move flexibly with respect to Furthermore, the confocal measurement device 50 needs to have a pinhole in the case where the optical fiber 52 is not used in the optical path from the head unit 51 to the controller unit 53, but in the case where the optical fiber 52 is used, the confocal measurement device 50 is used. The measuring device 50 does not have to be provided with a pinhole.

The controller unit 53 incorporates a light source device 10 as a white light source, a branch optical fiber 56, a spectroscope 57, an imaging device (light receiving unit) 58, and a control circuit unit (measurement unit) 59 inside. The detailed configuration of the light source device 10 will be described in detail later.
The branch optical fiber 56 has one optical fiber 55a on the connection side with the optical fiber 52 forming the optical path from the head unit 51 to the controller unit 53, and two optical fibers 15 and 55 on the opposite side. ing. The optical fiber 15 constitutes a part of a light source device 10 described later. The optical fiber 55b is connected to the spectroscope 57, and the light collected by the spectroscope 57 is taken in from the end face.

For this reason, the branch optical fiber 56 guides the light emitted from the light source device 10 to the optical fiber 52 and irradiates the measurement target T from the head unit 51. Furthermore, the branch optical fiber 56 guides the light reflected on the surface of the measurement object T to the spectroscope 57 via the optical fiber 52 and the head unit 51.
The spectroscope 57 condenses the light emitted from the diffraction grating 57b, the concave mirror 57a for reflecting the reflected light returned through the head unit 51, the diffraction grating 57b for the light reflected by the concave mirror 57a to be incident, and And a condenser lens 57c. The spectroscope 57 may have any configuration such as a Zernita type or a Littrow type, as long as the reflected light returned via the head unit 51 can be divided according to the wavelength.

The imaging device 58 is a line complementary metal oxide semiconductor (CMOS) or a charge coupled device (CCD) that measures the intensity of light emitted from the spectroscope 57. Here, in the confocal measurement device 50, the spectroscope 57 and the imaging device 58 constitute a measurement unit that measures the intensity of the reflected light returned via the head unit 51 for each wavelength.
The measuring unit may be configured of a single imaging device 58 such as a CCD as long as the intensity of light returning from the head unit 51 can be measured for each wavelength. The imaging device 58 may be a two-dimensional CMOS or a two-dimensional CCD.

The control circuit unit 59 controls the operation of the light source device 10, the imaging device 58, and the like. Further, although not shown, the control circuit unit 59 has an input interface for inputting a signal for adjusting the operation of the light source device 10, the imaging device 58, etc., an output interface for outputting a signal of the imaging device 58, etc. ing.
The monitor 54 displays the signal output from the imaging device 58. For example, the monitor 54 draws a spectral waveform of light returning from the head unit 51, and displays the displacement of the measurement object.

In the confocal measurement device 50 of the present embodiment, by mounting the following light source device 10, a high-intensity light source can be obtained.
Thereby, as a measuring device, effects such as being able to extend the measuring distance and being able to improve the response can be obtained.
The configuration of the light source device 10 will be described in detail below.

(Light source device 10)
The light source device 10 of the present embodiment is mounted as a light source of the above-described confocal measurement device 50, and as shown in FIG. 2, a light source unit 11, a condenser lens 12, and a translucent phosphor 13; It has a lens for taking in 14 and an optical fiber 15.
The light source unit 11 is, for example, a semiconductor laser that emits a laser beam having a peak wavelength of about 450 nm, and is a laser beam in the direction of the focusing lens 12 as excitation light for emitting fluorescence in the translucent phosphor 13 Irradiate.

The condensing lens 12 is a lens in which both the incident surface and the emission surface are convex, and condenses the laser light emitted from the light source unit inside the translucent phosphor 13.
The translucent phosphor 13 is, for example, a single-crystal phosphor of YAG doped with Ce ions, and has an incident surface 13a and an emission surface 13b respectively disposed along a plane perpendicular to the laser propagation direction. ing. The translucent phosphor 13 emits fluorescence having a wavelength in the range of 480 to 750 nm at the portion irradiated with the laser light which is emitted from the light source unit 11 and collected by the condensing lens 12.

Then, as shown in FIG. 3, in the translucent phosphor 13, a substantially cylindrical fluorescent light source unit 20 which is long along the propagation direction of the laser light is formed at the portion irradiated with the laser light.
The fluorescent light source unit 20 is formed at a portion where the laser light has passed through the inside of the translucent fluorescent substance 13, and as shown in FIGS. 3 and 4, has a substantially cylindrical shape elongated in the laser propagation direction .
Then, the fluorescent light source unit 20 emits fluorescence in all directions in each part, and thus can be regarded as a light source formed inside the translucent fluorescent body 13. Specifically, as shown in FIG. 4, the fluorescent light source unit 20 has a small-diameter portion in which the radius of the circle of the cross section decreases in the central portion in the longitudinal direction along the propagation direction of the laser light The cross section has a substantially cylindrical shape in which the radius of the circle of the cross section increases.

That is, the fluorescent light source unit 20 is formed such that the condensing point of the laser light is located on the small diameter portion cross section 20b. The fluorescent light source unit 20 is formed so that the cross-sectional areas of the incident side cross section 20a and the output side cross section 20c are larger than the small diameter cross section 20b in accordance with the focusing and diffusion of the laser light.
For example, the fluorescence light source unit 20 includes an end face on the incident side of the laser beam (incident side cross section 20a), a small diameter portion of the substantially cylindrical central portion (small diameter cross section 20b), an end face on the emission side of the laser light (emission side In the cross section 20c), fluorescence is emitted in all directions.

Therefore, among the fluorescence emitted in the fluorescence light source unit 20, the fluorescence emitted in the depth of field is captured by the capturing lens 14 and collected on the end face (first surface) of the optical fiber 15.
Note that the depth of field generally refers to a range that can be regarded as practically in focus before and after the focused position on the object surface side with respect to the amount of blur that can be tolerated on the image surface of the lens. Means In this embodiment, when the core diameter at the end face of the optical fiber 15 is the diameter of the permissible circle of confusion on the image plane of the lens, this means the depth of field formed on the object plane by the capturing lens 14.

Here, the end face of the optical fiber 15 means a cross section at the end of the optical fiber 15 to which the light collected by the capturing lens 14 is incident. Also, the core diameter means the inner diameter of the cylindrical core portion that propagates the light in the optical fiber 15.
Like the condenser lens 12, the taking-in lens 14 is a lens in which both the incident surface and the exit surface are convex, and is disposed on the downstream side of the translucent phosphor 13 in the direction in which the laser light propagates. . Then, the taking-in lens 14 condenses the fluorescence emitted in the interior (fluorescent light source unit 20) of the translucent fluorescent substance 13 on the end face of the optical fiber 15.

  Further, as shown in FIG. 3, the taking-in lens 14 is disposed so that the lens central axis A2 is coaxial (in line with the central axis A1 with which the laser light in the inside of the translucent fluorescent material 13 propagates). ing. As described above, by arranging the central axis A1 of the laser propagation and the central axis A2 of the capturing lens 14 to be coaxial with each other, the fluorescence emitted from the fluorescence light source unit 20 can be efficiently transmitted from the first surface 15a. It can be introduced into the fiber 15.

The optical fiber 15 is a single optical fiber that constitutes the branch optical fiber 56 of the above-described confocal measurement device 50, and internally forms an optical path of light emitted from the head unit 51 of the confocal measurement device 50. .
Further, as shown in FIG. 3, the optical fiber 15 has an end face (first surface 15a) on which the fluorescence collected by the capturing lens 14 is incident and an end face (second surface 15b) on the output side on the opposite side thereof. And.

Thus, the optical fiber 15 can emit the light incident from the first surface 15a from the second surface 15b.
In the light source device 10 according to the present embodiment, as shown in FIG. 2, with the above configuration, the excitation laser light emitted from the light source unit 11 is transmitted to the inside of the translucent phosphor 13 by the condenser lens 12. Focus on Then, as shown in FIG. 3, the fluorescence generated at the condensing portion of the laser light in the inside of the translucent fluorescent substance 13 is condensed on the first surface 15 a of the optical fiber 15 by the taking-in lens 14.

Here, in the light source device 10 according to the present embodiment, as described above, the laser light collected by the light collecting lens 12 is applied to the inside of the single crystal phosphor (light transmitting phosphor 13). .
At this time, when the laser light is incident on the single-crystal phosphor (light-transmitting phosphor 13), the light is not diffused in the phosphor and is transmitted through the inside of the phosphor while exciting the fluorescence.
That is, in the light source device 10 of the present embodiment, a single-crystal phosphor (translucent phosphor) that hardly scatters the laser light incident on the inside is used. For this reason, compared with the conventional fluorescent substance hardened using binders, such as a resin, since the fluorescence light-emitted by the laser beam which injected into the inside can be taken out efficiently, a light source with high brightness compared with the past is made. You can get it.

Second Embodiment
It will be as follows if the light source device which concerns on Embodiment 2 of this invention is demonstrated using FIGS. 5-7.
The light source device 110 according to this embodiment is different from that of the first embodiment in that a concave mirror 116 is provided between the condenser lens 12 and the translucent phosphor 13 as shown in FIG.

The other components of the light source device 110 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components is omitted.
As shown in FIG. 5, the light source device 110 according to the present embodiment includes the light source unit 11, the condenser lens 12, the concave mirror 116, the translucent fluorescent body 13, the taking lens 14, and the optical fiber 15. Have.

The concave mirror 116 is disposed between the condenser lens 12 and the translucent phosphor 13 and has a concave reflecting surface on the surface on the translucent phosphor 13 side. The concave mirror 116 has a characteristic of transmitting the laser light condensed by the condenser lens 12 and reflecting the fluorescence emitted in the inside of the translucent fluorescent substance 13.
As a result, the laser light emitted from the light source unit 11 and collected by the condenser lens 12 can be irradiated to the translucent phosphor 13 without being blocked by the concave mirror 116. Furthermore, as shown in FIG. 6, of the fluorescence emitted toward the omnidirectional direction from the fluorescence light source unit 120 formed inside the translucent phosphor 13, the fluorescence emitted to the condensing lens 12 side is a concave mirror It can be reflected back to the translucent fluorescent substance 13 side by 116.

As a result, the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment, and condense it on the first surface 15 a of the optical fiber 15. Therefore, the luminance can be further enhanced compared to the conventional case. Light source can be obtained.
Furthermore, the concave mirror 116 is disposed such that the center of the concave curved surface is located with respect to the central axis A1 of the fluorescent light source unit 120.

Thereby, the reflected fluorescence can be condensed to the position of the part (fluorescence light source part 120) which fluorescence emitted.
As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.

More preferably, the concave mirror 116 has a spherical or aspherical shape centered on the focusing point of the laser light focused in the translucent fluorescent substance 13 by the focusing lens 12.
Thereby, the reflected fluorescence can be condensed to the part (fluorescence light source part 120) which fluorescence emitted.
As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.

The concave mirror 116 may be a dichroic mirror, or a lens obtained by depositing a reflection film that reflects fluorescence on the concave surface of a meniscus lens, or a hole on the concave surface that has an opening in the portion through which laser light passes. A mirror or the like can be used.
For example, when a dichroic mirror is used as the concave mirror 116, as shown in FIG. 7, laser light is transmitted by transmitting light of a wavelength of about 480 nm or less and reflecting light of a wavelength of greater than about 480 nm. The fluorescence can be reflected while causing

(Embodiment 3)
It will be as follows if the light source device which concerns on Embodiment 3 of this invention is demonstrated using FIG. 8 and FIG.
As shown in FIG. 8, the light source device 210 according to the present embodiment uses the plate-like light-transmitting phosphor 13 in that the light-emitting surface 213b uses the light-transmitting phosphor 213 having a convex shape. It differs from the first embodiment.

The other components of the light source device 210 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 8, the light source device 210 of the present embodiment includes a light source unit 11, a condensing lens 12, a translucent fluorescent substance 213, a capturing lens 14, and an optical fiber 15.
The translucent fluorescent substance 213 has the entrance plane 213a and the output plane 213b, as shown in FIG. In addition, in the translucent fluorescent substance 213, a fluorescence light source unit 220 that emits fluorescence is formed at a portion through which the laser light condensed by the condensing lens 12 passes.

The fluorescent light source unit 220 has substantially the same shape and function as the fluorescent light source unit 20 of the first embodiment described above.
The incident surface 213a is a surface on the condensing lens 12 side, and is disposed along a plane perpendicular to the propagation direction of the laser beam.
The exit surface 213 b is a surface on the intake lens 14 side, and has a curved surface convex toward the intake lens 14.

Thereby, the fluorescence excited by the laser beam irradiated to the translucent fluorescent substance 213 has a refractive index at the interface between the translucent fluorescent substance 213 (YAG refractive index ≒ 1.8) and air on the emission surface 213b. The spread due to the difference is suppressed and taken into the taking lens 14.
As a result, the size of the capture lens 14 can be reduced, and the light source device 210 can be miniaturized.

Alternatively, even when the size of the capturing lens 14 is fixed, the degree of diffusion of the emitted fluorescence is suppressed, so that the amount of capturing fluorescence can be improved.
Therefore, a light source with high brightness can be obtained more effectively.
(Embodiment 4)
It will be as follows if the light source device which concerns on Embodiment 4 of this invention is demonstrated using FIG. 10 and FIG.

In the light source device 310 according to the present embodiment, as shown in FIG. 10, a concave mirror 316 is provided between the condenser lens 12 and the translucent fluorescent substance 313, and both the incident surface and the emission surface are convexly curved. The second embodiment differs from the first embodiment in that a translucent phosphor 313 is provided.
The other components of the light source device 310 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 10, the light source device 310 according to the present embodiment includes the light source unit 11, the condenser lens 12, the concave mirror 316, the translucent phosphor 313, the capturing lens 14, and the optical fiber 15. Have.
The concave mirror 316 is disposed between the condenser lens 12 and the translucent phosphor 313, and has a concave reflecting surface on the surface on the translucent phosphor 313 side. The concave mirror 316 transmits the laser light condensed by the condenser lens 12 and has the property of reflecting the fluorescence emitted in the inside of the translucent fluorescent substance 313 as shown in FIG. .

  In this way, the laser beam emitted from the light source unit 11 and collected by the condenser lens 12 can be irradiated to the translucent phosphor 313 without being blocked by the concave mirror 316. Furthermore, as shown in FIG. 11, of the fluorescence emitted toward the omnidirectional direction from the fluorescence light source part 320 formed inside the translucent fluorescent substance 313, the fluorescence emitted to the condenser lens 12 side is a concave mirror It can be reflected back to the translucent fluorescent substance 313 side by 316.

As a result, the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment, and condense it on the first surface 15 a of the optical fiber 15. Therefore, the luminance can be further enhanced compared to the conventional case. Light source can be obtained.
Furthermore, as shown in FIG. 11, the concave mirror 316 is disposed such that the center of the concave curved surface is located with respect to the central axis A1 of the fluorescent light source unit 320.

Thereby, the reflected fluorescence can be condensed to the position of the part (fluorescence light source part 320) which fluorescence emitted.
As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.

More preferably, the concave mirror 316 has a spherical or aspherical shape centered on the focusing point of the laser light focused in the translucent fluorescent substance 313 by the focusing lens 12.
Thereby, the reflected fluorescence can be condensed to the part (fluorescence light source part 320) which fluorescence emitted.

As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.
As the concave mirror 316, as in the case of the concave mirror 116 in the second embodiment, a dichroic mirror or a lens on which a reflection film for reflecting fluorescence is deposited on the concave surface of a meniscus lens, and an opening is provided in a portion through which laser light passes. A perforated mirror or the like that reflects fluorescence on a concave surface can be used.

The translucent fluorescent substance 313 has the entrance plane 313a and the output plane 313b, as shown in FIG.
The incident surface 313 a is a surface on the condensing lens 12 side, and has a curved surface convex toward the condensing lens 12.
Thereby, the fluorescence excited by the laser beam irradiated to the translucent fluorescent substance 313 has a refractive index at the interface between the translucent fluorescent substance 313 (YAG refractive index ≒ 1.8) and air on the incident surface 313a. The spread due to the difference is suppressed and taken into concave mirror 316.

As a result, the size of the concave mirror 316 can be reduced, and the light source device 310 can be miniaturized.
Alternatively, even when the size of the concave mirror 316 is fixed, the degree of diffusion of the emitted fluorescence is suppressed, so that the amount of fluorescence reflected by the concave mirror 316 can be improved.
Therefore, fluorescence can be more effectively reflected by the concave mirror 316 to obtain a light source with high brightness.

On the other hand, the exit surface 313 b is a surface on the intake lens 14 side, and has a curved surface convex toward the intake lens 14.
Thereby, the fluorescence excited by the laser beam irradiated to the translucent fluorescent substance 313 has a refractive index at the interface between the translucent fluorescent substance 313 (YAG refractive index .apprxeq.1.8) and air at the emission surface 313b. The spread due to the difference is suppressed and taken into the taking lens 14.

As a result, the size of the capturing lens 14 can be reduced, and the light source device 310 can be miniaturized.
Alternatively, even when the size of the capturing lens 14 is fixed, the degree of diffusion of the emitted fluorescence is suppressed, so that the amount of capturing fluorescence can be improved.
Therefore, a light source with high brightness can be obtained more effectively.

Embodiment 5
It will be as follows if the light source device which concerns on Embodiment 5 of this invention is demonstrated using FIG. 12 and FIG.
In the light source device 410 according to the present embodiment, as shown in FIG. 12, a concave mirror 416 is provided between the condensing lens 12 and the translucent fluorescent substance 413, and the light transmitting device has a convex curved incident surface. The point which provided the fluorescent substance 413 differs from the said Embodiment 1. FIG.

The other components of the light source device 410 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 12, the light source device 410 of the present embodiment includes the light source unit 11, the condenser lens 12, the concave mirror 416, the translucent phosphor 413, the capturing lens 14, and the optical fiber 15. Have.

The concave mirror 416 is disposed between the condenser lens 12 and the translucent phosphor 413, and has a concave reflecting surface on the surface on the translucent phosphor 413 side. The concave mirror 416 transmits the laser light condensed by the condenser lens 12 and has the characteristic of reflecting the fluorescence emitted in the inside of the translucent phosphor 413 as shown in FIG. .
Thus, the laser light emitted from the light source unit 11 and collected by the condenser lens 12 can be irradiated to the translucent phosphor 413 without being blocked by the concave mirror 416. Furthermore, as shown in FIG. 13, of the fluorescence emitted toward all directions from the fluorescence light source 420 formed inside the translucent phosphor 413, the fluorescence emitted to the condenser lens 12 side is a concave mirror It can be reflected back to the side of the translucent fluorescent substance 413 by the light emitting element 416.

As a result, the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment, and condense it on the first surface 15 a of the optical fiber 15. Therefore, the luminance can be further enhanced compared to the conventional case. Light source can be obtained.
Furthermore, as shown in FIG. 13, the concave mirror 416 is disposed such that the center of the concave curved surface is located with respect to the central axis A1 of the fluorescence light source unit 420.

Thereby, the reflected fluorescence can be condensed to the position of the part (fluorescence light source part 420) which fluorescence emitted.
As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.

More preferably, the concave mirror 416 has a spherical or aspheric shape centered on the focusing point of the laser light focused in the translucent fluorescent substance 413 by the focusing lens 12.
Thereby, the reflected fluorescence can be condensed to the part (fluorescent light source part 420) which fluorescence emitted.

As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.
As the concave mirror 416, as in the case of the concave mirror 116 in the second embodiment, a dichroic mirror, or a lens obtained by depositing a reflection film for reflecting fluorescence on the concave surface of a meniscus lens, and an opening at a portion through which laser light passes A perforated mirror or the like that reflects fluorescence on a concave surface can be used.

The translucent fluorescent substance 413 has the entrance plane 413a and the output plane 413b, as shown in FIG.
The incident surface 413 a is a surface on the condensing lens 12 side, and has a curved surface convex toward the condensing lens 12.
The emitting surface 413b is a surface on the side of the capturing lens 14, and is disposed along a plane perpendicular to the propagation direction of the laser beam.

Thereby, the fluorescence excited by the laser light irradiated to the translucent fluorescent substance 413 and emitted toward all directions is the translucent fluorescent substance 313 (YAG refractive index ≒ 1.8) on the incident surface 413a. At the interface between the light source and the air, the spread due to the difference in refractive index is suppressed and taken into the concave mirror 416.
As a result, the size of the concave mirror 416 can be reduced, and the light source device 410 can be miniaturized.

Alternatively, even when the size of the concave mirror 416 is fixed, the degree of diffusion of the emitted fluorescence is suppressed, so that the amount of fluorescence reflected by the concave mirror 416 can be improved.
Therefore, fluorescence can be more effectively reflected by the concave mirror 416 to obtain a light source with enhanced brightness.
Embodiment 6
It will be as follows if the light source device which concerns on Embodiment 6 of this invention is demonstrated using FIGS. 14-16.

The light source device 510 according to the present embodiment is different from that of the first embodiment in that a concave mirror 516 is provided between the light-transmitting phosphor 13 and the taking-in lens 14 as shown in FIG.
The other components of the light source device 510 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 14, the light source device 510 of the present embodiment includes the light source unit 11, the condensing lens 12, the translucent fluorescent body 13, the concave mirror 516, the taking lens 14, and the optical fiber 15. Have.
The concave mirror 516 is disposed between the translucent fluorescent substance 13 and the taking-in lens 14, and has a concave reflective surface on the incident face on the translucent fluorescent substance 13 side. The concave mirror 516 has a characteristic of transmitting the fluorescence excited in the translucent fluorescent substance 13 and reflecting the laser light transmitted through the translucent fluorescent substance 13.

As a result, among the fluorescence emitted in all directions from the fluorescence light source unit 120 formed inside the translucent phosphor 13, the fluorescence emitted to the side of the capturing lens 14 is not blocked by the concave mirror 516. , Can be taken in the taking lens 14.
Furthermore, as shown in FIG. 15, the laser beam transmitted without being absorbed by the translucent fluorescent substance 13 can be reflected by the concave mirror 516 and returned to the translucent fluorescent substance 13 side.

As a result, in the translucent phosphor 13, since it is possible to excite fluorescence by taking in more excitation light than the laser light irradiated in the first embodiment, a light source having a higher luminance than in the conventional case can be obtained. You can get it.
Furthermore, as shown in FIG. 15, the concave mirror 516 is disposed such that the center of the concave curved surface is on the center axis A1 of the fluorescent light source 520.

Thereby, the reflected laser beam can be condensed again on the position of the portion (fluorescent light source unit 520) where the fluorescence is emitted.
As a result, in the translucent phosphor 13, since it is possible to excite fluorescence by taking in more excitation light than the laser light irradiated in the first embodiment, a light source having a higher luminance than in the conventional case can be obtained. You can get it.

Further, the concave mirror 516 more preferably has a spherical or aspheric shape centered on the focusing point of the laser light focused in the translucent fluorescent substance 13 by the focusing lens 12.
Thereby, the reflected laser beam can be condensed again on the portion (fluorescent light source unit 520) where the fluorescence is emitted.
As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.

Note that as the concave mirror 516, a dichroic mirror, or a lens obtained by depositing a reflective film that reflects laser light on the concave surface of a meniscus lens can be used.
For example, when a dichroic mirror is used as the concave mirror 516, as shown in FIG. 16, fluorescence is transmitted by reflecting light having a wavelength of about 480 nm or less and transmitting light having a wavelength greater than about 480 nm. At the same time, laser light can be reflected.

[Other embodiments]
As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the summary of invention.
(A)
In the fourth embodiment and the like, the light source device using a translucent fluorescent material having a convex curved surface on at least one of the light incident surface and the light emission surface has been described as an example. However, the present invention is not limited to this.
For example, as shown in FIGS. 17A and 17B, an incident surface 613a having a convex curved surface portion 613aa only at a portion through which laser light passes and a convex curved surface only at a portion through which fluorescence passes A translucent fluorescent body 613 provided with an emission surface 613b having a portion 613ba may be used.

(B)
The above embodiment has been described by way of an example in which the condensing lens is disposed so as to condense the laser light inside the translucent phosphor. However, the present invention is not limited to this.

For example, the condenser lens may be disposed to condense the laser light on the surface of the translucent phosphor.
Even in this case, by forming a substantially cylindrical fluorescent light source unit from the light condensing point on the surface of the translucent fluorescent substance to the inside, the same effect as the above embodiment can be obtained.
In the light propagation direction of the laser light, taking into consideration that the fluorescent light source unit is formed on the front and back with respect to the light collection point, the position in the translucent phosphor for collecting the laser light by the light collection lens is It is preferably inside the surface of the translucent phosphor.

(C)
In the said embodiment, the example which used the fluorescent substance of the single crystal as a translucent fluorescent substance mounted in the light source device 10 was mentioned and demonstrated. However, the present invention is not limited to this.
For example, a translucent ceramic phosphor may be used instead of the single crystal phosphor.

(D)
In the above embodiment, the light source device 10 and the like provided with the lens for capture and the optical fiber as a configuration have been described as an example. However, the present invention is not limited to this.
For example, a configuration without an intake lens or an optical fiber may be used as the light source device of the present invention.

(E)
In the above embodiment, an example in which the present invention is applied to the light source device 10 of the confocal measurement device (distance measurement sensor) 50 has been described. However, the present invention is not limited to this.
For example, as a distance measurement sensor on which the light source device of the present invention is mounted, not only a distance measurement sensor such as a confocal measurement device but also another distance measurement sensor may be used.
In addition, as the light source device, the present invention can also be applied as a light source device for a headlight or an endoscope.

  The light source device of the present invention is widely applicable as various light source devices because it has the effect of being able to obtain a light source having higher luminance than in the prior art.

DESCRIPTION OF SYMBOLS 10 light source device 11 light source part 12 condensing lens 13 translucent fluorescent substance 13a incident surface 13b output surface 14 taking-in lens 15 optical fiber 15a 1st surface 15b 2nd surface 20 fluorescence light source part 20a incident side cross section 20b small diameter part cross section 20c Output side cross section 50 Confocal measurement device (ranging sensor)
51 Head 51a Diffractive lens (chromatic aberration lens)
51b Objective lens 51c Condensing lens 52 Optical fiber 53 Controller 54 Monitor 55a, 55b Optical fiber 56 Branching optical fiber 57 Spectrometer 57a Concave mirror 57b Diffraction grating 57c Condensing lens 58 Imaging device (light receiving part)
59 Control circuit unit (measurement unit)
DESCRIPTION OF SYMBOLS 110 light source device 116 concave mirror 120 fluorescence light source part 210 light source device 213 translucent fluorescent substance 213a incident surface 213b outgoing surface 220 fluorescent light source part 310 light source apparatus 313 translucent fluorescent substance 313a incident surface 313b outgoing surface 316 concave mirror 320 fluorescent light source part 410 Light source device 413 translucent phosphor 413a entrance surface 413b exit surface 416 concave mirror 420 fluorescence light source unit 510 light source device 516 concave mirror 520 fluorescence light source unit 613 translucent phosphor 613a entrance surface 613aa curved surface portion 613b exit surface 613ba curved surface portion A1 central axis A2 Lens central axis T Measurement object

Claims (15)

A light source unit that emits a laser beam;
A condensing lens that condenses the laser light emitted from the light source unit;
A translucent phosphor that emits fluorescence by being irradiated with the laser light condensed by the condenser lens;
A light source device equipped with The translucent fluorescent substance has a fluorescence light source part formed in a portion where the laser light is condensed by the condensing lens.
The light source device according to claim 1. The fluorescent light source unit has a substantially cylindrical shape that is irradiated from the light source unit and is long in the propagation direction of the laser light.
The light source device according to claim 2. The laser beam is focused on the surface or inside of the translucent phosphor by the focusing lens.
The light source device according to any one of claims 1 to 3. It further comprises an acquisition lens for condensing the fluorescence emitted from the translucent phosphor.
The light source device according to any one of claims 1 to 4. The capturing lens is disposed with the central axis of the lens aligned with the central axis of the laser propagation of the laser light passing through the translucent phosphor.
The light source device according to claim 5. The first end face is irradiated with the fluorescence collected by the capturing lens, and the optical fiber is further provided to emit the fluorescence from the second end face opposite to the first end face.
The light source device according to claim 5. The translucent fluorescent material has a convex curved surface on at least one of an incident surface on which the laser light is incident and an emission surface on which the fluorescent light is emitted.
The light source device according to any one of claims 1 to 7. The translucent phosphor is a single crystal phosphor,
The light source device according to any one of claims 1 to 8. It is disposed on the incident surface side of the translucent fluorescent material, and transmits the laser light emitted from the light source unit, and on the incident surface side of the fluorescence emitted from the translucent fluorescent material. It further comprises a concave mirror for reflecting the emitted fluorescence towards the translucent phosphor.
The light source device according to any one of claims 1 to 9. It is disposed on the emission surface side of the translucent phosphor, and reflects the laser light that has been emitted from the light source unit and has passed through the translucent phosphor, and is emitted from the translucent phosphor It further comprises a concave mirror which transmits the fluorescence emitted to the emission surface side among the fluorescence.
The light source device according to any one of claims 1 to 9. The concave mirror has a spherical or aspheric curved surface centered on a condensing point of the laser beam condensed by the condensing lens.
The light source device according to claim 10. The concave mirror is a dichroic mirror or a perforated mirror having an opening.
The light source device according to any one of claims 10 to 12. The light source device according to any one of claims 1 to 13,
A light receiving unit that receives reflected light of light emitted from the light source device;
A measuring unit that measures the distance to the object based on the amount of light received by the light receiving unit;
Ranging sensor equipped with. The light source device further includes a chromatic aberration focusing lens configured to emit fluorescence including a plurality of wavelengths and to pass the fluorescence.
The light receiving unit receives the reflected light of the fluorescence emitted to the object via the chromatic aberration focusing lens.
The measurement unit measures the distance to the object based on the wavelength of the fluorescence at which the light reception amount in the light reception unit is maximum.
The distance measuring sensor according to claim 14.

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