JP2019086297A - 計測装置及び駆動装置 - Google Patents

計測装置及び駆動装置 Download PDF

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Publication number
JP2019086297A
JP2019086297A JP2017211936A JP2017211936A JP2019086297A JP 2019086297 A JP2019086297 A JP 2019086297A JP 2017211936 A JP2017211936 A JP 2017211936A JP 2017211936 A JP2017211936 A JP 2017211936A JP 2019086297 A JP2019086297 A JP 2019086297A
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JP
Japan
Prior art keywords
light
measured
lights
detection unit
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2017211936A
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English (en)
Japanese (ja)
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JP2019086297A5 (https=
Inventor
健史 太田
Takefumi Ota
健史 太田
崇之 魚住
Takayuki Uozumi
崇之 魚住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2017211936A priority Critical patent/JP2019086297A/ja
Priority to US16/171,824 priority patent/US20190128916A1/en
Publication of JP2019086297A publication Critical patent/JP2019086297A/ja
Publication of JP2019086297A5 publication Critical patent/JP2019086297A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP2017211936A 2017-11-01 2017-11-01 計測装置及び駆動装置 Withdrawn JP2019086297A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017211936A JP2019086297A (ja) 2017-11-01 2017-11-01 計測装置及び駆動装置
US16/171,824 US20190128916A1 (en) 2017-11-01 2018-10-26 Measurement apparatus and driving apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017211936A JP2019086297A (ja) 2017-11-01 2017-11-01 計測装置及び駆動装置

Publications (2)

Publication Number Publication Date
JP2019086297A true JP2019086297A (ja) 2019-06-06
JP2019086297A5 JP2019086297A5 (https=) 2020-12-17

Family

ID=66243700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017211936A Withdrawn JP2019086297A (ja) 2017-11-01 2017-11-01 計測装置及び駆動装置

Country Status (2)

Country Link
US (1) US20190128916A1 (https=)
JP (1) JP2019086297A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7636401B2 (ja) * 2019-09-20 2025-02-26 ノードソン コーポレーション レーザー干渉法システムおよび方法
US20240255318A1 (en) * 2023-01-26 2024-08-01 United States Gypsum Company Non-contact encoder for board measurement
EP4643085A1 (en) * 2023-01-26 2025-11-05 Knauf Gips KG Non-contact encoder for board measurement

Also Published As

Publication number Publication date
US20190128916A1 (en) 2019-05-02

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