JP2019086093A5 - - Google Patents
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- Publication number
- JP2019086093A5 JP2019086093A5 JP2017215060A JP2017215060A JP2019086093A5 JP 2019086093 A5 JP2019086093 A5 JP 2019086093A5 JP 2017215060 A JP2017215060 A JP 2017215060A JP 2017215060 A JP2017215060 A JP 2017215060A JP 2019086093 A5 JP2019086093 A5 JP 2019086093A5
- Authority
- JP
- Japan
- Prior art keywords
- spring
- disposed
- processing apparatus
- substrate processing
- region side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 1
Claims (1)
- 前記第１のばね及び第２のばねは、前記第２の領域側に配置されていることを特徴とする請求項３ないし５のいずれか一項に記載の基板処理装置。
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017215060A JP7035461B2 (ja) | 2017-11-07 | 2017-11-07 | リリーフバルブ及び基板処理装置 |
| KR1020180133321A KR102366478B1 (ko) | 2017-11-07 | 2018-11-02 | 릴리프 밸브 및 기판 처리 장치 |
| US16/181,467 US20190136994A1 (en) | 2017-11-07 | 2018-11-06 | Relief valve and substrate processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017215060A JP7035461B2 (ja) | 2017-11-07 | 2017-11-07 | リリーフバルブ及び基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019086093A JP2019086093A (ja) | 2019-06-06 |
| JP2019086093A5 true JP2019086093A5 (ja) | 2020-08-20 |
| JP7035461B2 JP7035461B2 (ja) | 2022-03-15 |
Family
ID=66328424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017215060A Active JP7035461B2 (ja) | 2017-11-07 | 2017-11-07 | リリーフバルブ及び基板処理装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20190136994A1 (ja) |
| JP (1) | JP7035461B2 (ja) |
| KR (1) | KR102366478B1 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7242582B2 (ja) * | 2020-01-24 | 2023-03-20 | Ckd株式会社 | バタフライバルブ |
| US20220020615A1 (en) * | 2020-07-19 | 2022-01-20 | Applied Materials, Inc. | Multiple process semiconductor processing system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4247403B2 (ja) * | 2002-10-15 | 2009-04-02 | 株式会社協真エンジニアリング | 安全弁 |
| JP4326931B2 (ja) | 2002-12-16 | 2009-09-09 | 株式会社フジキン | 内部雰囲気切替機構付密閉容器 |
| JP5524139B2 (ja) * | 2010-09-28 | 2014-06-18 | 東京エレクトロン株式会社 | 基板位置検出装置、これを備える成膜装置、および基板位置検出方法 |
| JP5572515B2 (ja) * | 2010-10-15 | 2014-08-13 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
| JP5418697B2 (ja) | 2011-08-24 | 2014-02-19 | トヨタ自動車株式会社 | 流体制御装置および燃料供給システム |
-
2017
- 2017-11-07 JP JP2017215060A patent/JP7035461B2/ja active Active
-
2018
- 2018-11-02 KR KR1020180133321A patent/KR102366478B1/ko active IP Right Grant
- 2018-11-06 US US16/181,467 patent/US20190136994A1/en not_active Abandoned