JP2019072999A5 - - Google Patents
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- Publication number
- JP2019072999A5 JP2019072999A5 JP2018160602A JP2018160602A JP2019072999A5 JP 2019072999 A5 JP2019072999 A5 JP 2019072999A5 JP 2018160602 A JP2018160602 A JP 2018160602A JP 2018160602 A JP2018160602 A JP 2018160602A JP 2019072999 A5 JP2019072999 A5 JP 2019072999A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- interlayer insulating
- electrical connection
- connection member
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011229 interlayer Substances 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 39
- 239000010410 layer Substances 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 3
- 239000007769 metal material Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000006260 foam Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 description 2
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18195040.3A EP3470228B1 (en) | 2017-10-11 | 2018-09-18 | Element substrate, manufacturing method thereof, printhead, and printing apparatus |
| US16/150,373 US10493774B2 (en) | 2017-10-11 | 2018-10-03 | Element substrate, manufacturing method thereof, printhead, and printing apparatus |
| CN201811181010.4A CN109649012B (zh) | 2017-10-11 | 2018-10-11 | 元件基板、元件基板的制造方法、打印头和打印装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017197771 | 2017-10-11 | ||
| JP2017197771 | 2017-10-11 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019072999A JP2019072999A (ja) | 2019-05-16 |
| JP2019072999A5 true JP2019072999A5 (cg-RX-API-DMAC7.html) | 2021-09-24 |
| JP7112287B2 JP7112287B2 (ja) | 2022-08-03 |
Family
ID=66543617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018160602A Active JP7112287B2 (ja) | 2017-10-11 | 2018-08-29 | 素子基板、記録ヘッド、記録装置、及び素子基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7112287B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7551348B2 (ja) * | 2019-07-30 | 2024-09-17 | キヤノン株式会社 | 素子基板、液体吐出ヘッドおよび素子基板の製造方法 |
| JP7530214B2 (ja) * | 2020-05-29 | 2024-08-07 | キヤノン株式会社 | 記録素子基板、記録ヘッドおよび記録装置 |
| JP7575888B2 (ja) | 2020-05-29 | 2024-10-30 | キヤノン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
| JP7764173B2 (ja) * | 2021-09-17 | 2025-11-05 | キヤノン株式会社 | 液体吐出ヘッド |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07323577A (ja) * | 1994-05-31 | 1995-12-12 | Canon Inc | 記録ヘッドおよびこれを搭載する液体噴射記録装置 |
| TW446644B (en) | 2000-01-29 | 2001-07-21 | Ind Tech Res Inst | Method and structure for precise temperature measurement of ink-jet printhead heating element |
| JP5222005B2 (ja) | 2008-04-09 | 2013-06-26 | キヤノン株式会社 | 記録ヘッドの製造方法 |
| JP6388372B2 (ja) | 2014-05-09 | 2018-09-12 | キヤノン株式会社 | 基板、液体吐出ヘッド、記録装置及び液体の吐出状態の判定方法 |
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2018
- 2018-08-29 JP JP2018160602A patent/JP7112287B2/ja active Active