JP2019070179A5 - - Google Patents

Claims (10)

A first element, the raw material is atomized or liquid droplets containing at least a different second element from the first element, and transported the resulting mist or droplets in a carrier gas, then the mist or droplets by thermal reaction, at least the first element and the second a element and method of forming a film containing the first element of group 14 or group 15 of the periodic table A film forming method comprising an element, wherein the second element is a D-block element or a Group 14 element of the periodic table, and the thermal reaction is carried out in an atmosphere of an inert gas or a reducing gas. .. The raw material, the film forming method according to claim 1, wherein the compound containing the first element and the second element. The raw material is, the first element compound and the second film forming method according to claim 1, wherein a compound of an element of. The film forming method according to any one of claims 1 to 3, wherein the first element is an element of Group 15 of the periodic table. The film forming method according to any one of claims 1 to 4, wherein the first element is nitrogen. The film forming method according to any one of claims 1 to 5, wherein the second element is a 4th period D block element or a group 14 element in the periodic table. The film forming method according to any one of claims 1 to 6, wherein the second element is an element of Group 14 of the periodic table. The atomic ratio of the first element in the raw material solution and the second element, 1: 2-10: 1 film-forming method according to any one of claims 1 to 7. The film forming method according to any one of claims 1 to 8, wherein the thermal reaction is carried out in an atmosphere of an inert gas. The film forming method according to any one of claims 1 to 9, wherein the thermal reaction is carried out at a temperature of 500 ° C. or higher.