JP2019060849A - パターン構造のx線測定 - Google Patents
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Abstract
Description
当該技術分野において,パターン構造の測定に関し,X線散乱計測を利用して,粗さ(roughness)や測定信号の背景雑音(background noise)といった影響を効率的に除去し,それによって測定技術の信号対雑音を大幅に改善する新規の測定技術が必要である。
Claims (15)
- パターン構造のX線測定に用いられる方法であって,入射X線放射線に対するパターン構造の検出された放射線反応に対応する測定信号を表すデータを処理し,上記データから実質的に背景雑音のない有効測定信号を減算し,ここで上記有効測定信号が反射回折次数の放射成分から形成されており,上記有効測定信号のモデルベース解釈によってパターン構造の一または複数のパラメータの決定ができるものであり,上記処理が,上記測定信号を解析してそこから上記背景雑音に対応する背景信号を抽出し,上記測定信号にフィルタリング処理を適用してそこから背景信号に対応する信号を減算し,これによって上記有効測定信号を得る,方法。
- 上記測定信号の解析およびそこからの背景信号の抽出が,反射回折次数の放射成分に対応する信号をフィルタリングして上記背景雑音を表す背景特徴を抽出するように上記測定信号を処理し,上記背景特徴に適合処理を適用して上記背景信号を得ることを含む,請求項1に記載の方法。
- 上記背景信号の画像処理を適用して上記背景信号の修正画像表現を取得し,これを上記測定信号から減算される上記背景信号に対応する信号として用いる,請求項1または2に記載の方法。
- 提供される上記測定信号に含まれる上記有効測定信号が,上記構造の放射線反応における反射次数の所定の角度範囲φCOLに対応するものであり,さまざまな反射次数の放射成分が検出器の放射線感受性表面上のさまざまな空間的に分離された領域と干渉する,請求項1から3のいずれか一項に記載の方法。
- 上記測定信号の収集において用いられる最適化測定スキームを表すデータを提供し,上記最適化測定スキームが,上記測定信号に上記有効測定信号が含まれるものにし,上記有効測定信号が,上記構造の放射線反応における反射次数の角度範囲φCOLに対応し,さまざまな反射次数の放射成分が検出器の放射線感受性表面上のさまざまな空間的に分離された領域と干渉する,請求項1から3のいずれか一項に記載の方法。
- 上記最適化測定スキームが,上記構造上のパターンの造形の配向に対して選択される照明放射線の角度範囲θILLおよび方位φILLを含み,照明放射線の上記選択された角度範囲θILLを用いることによって,上記照明放射線に対する上記構造の放射線反応における反射次数の上記角度範囲φCOLが提供される,請求項5に記載の方法。
- 上記最適化測定スキームを用いて上記パターン構造上で実行され,上記測定信号を表すデータを生成する一または複数の測定セッションを実行する,請求項5または6に記載の方法。
- 上記有効測定信号にモデルベース適合処理を適用して,上記パターン構造の一または複数のパラメータを決定する,請求項1から7のいずれか一項に記載の方法。
- データ入力および出力ユーティリティ,メモリユーティリティ,ならびにプロセッサユーティリティを含み,上記プロセッサユーティリティが,請求項1から7のいずれか一項に記載の方法を実行し,上記測定信号を処理し,上記有効測定信号を決定してこれを表すデータを上記パターン構造の一または複数のパラメータのさらなる解釈および決定のために生成するように構成されかつ作動する,制御装置。
- 測定される上記構造上のパターンを表す入力データを解析し,かつ上記パターンに対する照明放射線の選択角度範囲θILLおよび方位φILLを表す測定スキームデータを生成して,上記構造の放射線反応における反射次数の角度範囲φCOLを提供するように構成されかつ作動する,測定スキーム制御器をさらに備え,さまざまな反射次数の放射成分が検出器の放射線感受性表面上のさまざまな空間的に分離された領域と干渉することによって,上記検出された測定信号からの実質的に背景雑音のない上記有効測定信号の減算が可能になる,請求項9に記載の制御装置。
- パターン構造のX線測定に用いられる測定システムであって,測定される構造と干渉するように照明放射線を測定平面上に案内する照明チャネルを規定するように構成されかつ作動する照明装置,上記照明チャネル内に配置される角度範囲制御器,収集チャネルに沿って伝播する上記構造からの放射線反応を検出する検出装置,ならびに上記照明装置および上記検出装置とデータ通信するように構成された制御装置を備え,上記制御装置が,測定される上記構造上のパターンを表すデータを解析しかつ上記パターンに対する照明放射線の選択角度範囲θILLおよび方位φILLを表す測定スキームデータを生成して,上記構造の放射線反応における反射次数の角度範囲φCOLを提供するように構成されて作動する測定スキーム制御器を含み,さまざまな反射次数の放射成分が検出器の放射線感受性表面上のさまざまな空間的に分離された領域と干渉することによって,実質的に背景雑音のない有効測定信号の減算が可能になる,測定システム。
- 上記角度範囲制御器は,選択された測定スキームにしたがう孔寸法を選択可能にするために,寸法を制御可能に可変させる孔アセンブリを備えている,請求項11に記載のシステム。
- 上記制御装置は,データ入力および出力ユーティリティ,メモリユーティリティ,およびプロセッサユーティリティを備え,上記プロセッサユーティリティが,請求項1から7のいずれか一項に記載の方法を実行するように構成されている,請求項11または12に記載のシステム。
- 上記角度範囲制御器は,選択された測定スキームにしたがう孔形状を選択可能にするために,形状を制御可能に可変させる孔アセンブリを備えている,請求項11に記載のシステム。
- 上記角度範囲制御器は,選択された測定スキームにしたがう孔形状を選択可能にするために,形状を制御可能に可変させる孔アセンブリをさらに備えている,請求項12に記載のシステム。
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IL253578A IL253578B (en) | 2017-07-19 | 2017-07-19 | Measurement of patterns using x-rays |
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JP (1) | JP7240829B2 (ja) |
KR (2) | KR102665029B1 (ja) |
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WO2015004662A1 (en) * | 2013-07-08 | 2015-01-15 | Nova Measuring Instruments Ltd. | Method and system for determining strain distribution in a sample |
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US20150110249A1 (en) * | 2013-10-21 | 2015-04-23 | Kla-Tencor Corporation | Small-angle scattering x-ray metrology systems and methods |
JP2017504045A (ja) * | 2014-01-23 | 2017-02-02 | リヴェラ インコーポレイテッド | マルチアングルx線反射散乱計測(xrs)を用いた周期構造を計測する方法およびシステム |
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KR20240069699A (ko) | 2024-05-20 |
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US11692953B2 (en) | 2023-07-04 |
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US11099142B2 (en) | 2021-08-24 |
US20240044819A1 (en) | 2024-02-08 |
CN109283203A (zh) | 2019-01-29 |
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IL253578B (en) | 2018-06-28 |
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