JP2019060005A5 - - Google Patents
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- Publication number
- JP2019060005A5 JP2019060005A5 JP2017187387A JP2017187387A JP2019060005A5 JP 2019060005 A5 JP2019060005 A5 JP 2019060005A5 JP 2017187387 A JP2017187387 A JP 2017187387A JP 2017187387 A JP2017187387 A JP 2017187387A JP 2019060005 A5 JP2019060005 A5 JP 2019060005A5
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- power supply
- screen
- control
- bias
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010891 electric arc Methods 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017187387A JP2019060005A (ja) | 2017-09-28 | 2017-09-28 | プラズマ窒化方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017187387A JP2019060005A (ja) | 2017-09-28 | 2017-09-28 | プラズマ窒化方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019060005A JP2019060005A (ja) | 2019-04-18 |
| JP2019060005A5 true JP2019060005A5 (enExample) | 2019-05-30 |
Family
ID=66176310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017187387A Pending JP2019060005A (ja) | 2017-09-28 | 2017-09-28 | プラズマ窒化方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2019060005A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7582749B2 (ja) | 2021-05-20 | 2024-11-13 | 東京エレクトロン株式会社 | 温度制御方法及び温度制御装置 |
| DE102022106661A1 (de) * | 2022-03-22 | 2023-09-28 | Plasmanitriertechnik Dr. Böhm GmbH | Verfahren und Vorrichtung zum Plasmanitrieren und anschließendem Oxidieren einer Oberfläche eines Bauteils |
| CN116479371B (zh) * | 2023-04-13 | 2025-09-26 | 江西省检验检测认证总院工业产品检验检测院 | 一种碳钢储罐内壁Cr2N耐蚀涂层及其制备方法 |
-
2017
- 2017-09-28 JP JP2017187387A patent/JP2019060005A/ja active Pending
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