JP2019058883A - Ultrasonic wave generator and vibration plate unit - Google Patents

Abstract

To provide an ultrasonic wave generator which can reduce erosion which occurs in a vibration plate.SOLUTION: An ultrasonic wave generator 10 of the present invention comprises: a vibration plate 13; an ultrasonic vibrator 21; an ultrasonic wave oscillator 17 and a resonator 31. The vibration plate 13 has a radiation plane 15 which radiates ultrasonic wave, and a non-radiation plane 16 which is positioned on a side opposite to the radiation plane 15. The ultrasonic vibrator 21 is joined to plural sites on the non-radiation plane 16 in a scattered manner, and radiates ultrasonic wave. The ultrasonic wave oscillator 17 supplies high-frequency power for continuously vibrating the ultrasonic vibrator 21. The resonator 31 is joined at a position on the non-radiation plane 16, which is surrounded by plural ultrasonic vibrators 21. In the meantime, the ultrasonic vibrator 21 is a longitudinal vibration type vibrator which vibrates in a longitudinal n-th vibration mode. The resonator 31 is a resonator which resonates at a frequency same as the ultrasonic vibrator 21 and in the longitudinal vibration mode.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an ultrasonic wave generator that irradiates ultrasonic waves from an ultrasonic transducer, and a diaphragm unit.

  Conventionally, an ultrasonic cleaning device for cleaning an object to be cleaned (ultrasonic cleaning) by irradiating the cleaning solution with ultrasonic waves has been put to practical use (see, for example, Non-Patent Documents 1 and 2). Ultrasonic cleaning is a combination of the physical action by ultrasonic waves and the chemical action by the cleaning liquid, so that it can act on the details of the object to be cleaned having a complicated shape and can be efficiently cleaned. It is essential for the manufacture of liquid crystal displays, semiconductors and the like.

  Further, as shown in FIG. 12, the ultrasonic cleaning apparatus 100 is provided with a diaphragm 101 also called a radiation plate. In many cases, the diaphragm 101 also serves as the bottom of the cleaning tank 102, and is formed of a stainless steel plate having a thickness of about 1 to 3 mm. Then, one or more ultrasonic transducers 103 are joined to the diaphragm 101. In addition, since the ultrasonic transducer 103 usually vibrates at a single frequency, when using a plurality of ultrasonic transducers 103, it is necessary to use the ultrasonic transducer 103 having a uniform resonant frequency. In addition, the ultrasonic transducer 103 is bonded to the non-radiation surface 104 of the diaphragm 101 using an adhesive such as epoxy resin or a stud bolt. Then, the surface of the diaphragm 101 located on the opposite side of the non-emission surface 104 is the emission surface 105 of the ultrasonic wave.

  Furthermore, as a mounting structure of the diaphragm 101 to the cleaning tank 102, there are three types of cleaning tank type, diaphragm type, and throwing type. In the cleaning tank type, the bottom plate of the cleaning tank 102 is the diaphragm 101 (see FIG. 12). The diaphragm type has a structure in which the cut portion is formed in a part of the cleaning tank and the diaphragm is inserted into the formed cut portion, and has the advantage that the diaphragm can be easily replaced. The throw-in type has a structure in which a vibrator is joined to the inside of a watertight case, and has the advantage that it can be used simply by sinking the case in a tank.

"Ultrasound (The Acoustical Society of Japan)", Corona, 2001 "Ultrasonic engineering (Japan Electronic Machinery Industry Association)", Corona, 1993

  By the way, in the ultrasonic cleaning apparatus 100 which irradiates an ultrasonic wave of several tens of kHz, for example, the to-be-cleaned object 107 is cleaned using a strong shock wave of cavitation caused by the ultrasonic wave in the cleaning solution 106. However, since cavitation causes damage (erosion 108) to the diaphragm 101, when the erosion 108 progresses, holes are formed in the diaphragm 101, and the cleaning liquid 106 may leak.

  Therefore, in the related art, in order to prevent the occurrence of the erosion 108 (or to delay the progress speed of the erosion 108), measures such as applying hard chromium plating to the radiation surface of the diaphragm 101 are taken. However, when the output of the ultrasonic wave is large, there is a problem that the erosion 108 occurs in a short time even if hard chromium plating is performed. In particular, when the plurality of ultrasonic transducers 103 are joined to the diaphragm 101 and the distance between the adjacent ultrasonic transducers 103 becomes large, the progress of the erosion 108 tends to be fast from experience. In addition, it is desirable to lay many ultrasonic transducers 103 on the diaphragm 101 in principle, but due to cost constraints, the ultrasonic transducers 103 are disposed on the diaphragm 101 in a scattered manner to perform ultrasonic vibration. The number of children 103 is often reduced. For this reason, when the cleaning area becomes wide, the distance between the adjacent ultrasonic transducers 103 inevitably becomes large. Although it is conceivable to reduce the distance between the adjacent ultrasonic transducers 103 in a partial region of the diaphragm 101, a large region in which the ultrasonic transducer 103 does not exist is generated in another region. As a result, there is a problem that ultrasonic cleaning can not be performed immediately above such a large area.

  The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide an ultrasonic wave generator and a diaphragm unit capable of reducing the erosion generated in the diaphragm.

  In order to solve the above-mentioned problems, the invention according to claim 1 is characterized in that a vibrating plate having a radiation surface emitting ultrasonic waves and a non-radiation surface located on the opposite side of the radiation surface; A plurality of ultrasonic transducers which are joined at a plurality of points on a radiation surface in a scattered manner and which irradiates the ultrasonic waves; an ultrasonic oscillator which supplies high frequency power to continuously vibrate the ultrasonic transducers; And a resonator joined at a position surrounded by a plurality of the ultrasonic transducers on a non-radiating surface of the plate, the ultrasonic transducer vibrating in a longitudinal nth vibration mode. The ultrasonic wave generator according to the present invention is characterized in that the resonator is a resonator that resonates at the same frequency and longitudinal vibration mode as the ultrasonic vibrator.

  Therefore, according to the invention as set forth in claim 1, the ultrasonic transducers are joined to a plurality of locations on the non-radiating surface of the diaphragm, and the resonators are located on the non-radiating surface surrounded by the plurality of ultrasonic transducers. Are joined. As a result, the area where the ultrasonic transducer and the resonator do not exist in the diaphragm is reduced. In addition, since each ultrasonic transducer is disposed as a scattered point on the non-radiating surface and the resonator is disposed at a position surrounded by each ultrasonic transducer, there are ultrasonic transducers and resonators in the diaphragm. The non-regions will be positioned approximately equally. From the above, generation of bending vibration with large vibration displacement is suppressed, and the vibration distribution of the diaphragm is flattened and there is no part where the vibration is too strong, so that the erosion generated in the diaphragm can be reduced. .

  Moreover, since the resonator is a resonator mechanically coupled to the ultrasonic transducer via the diaphragm and resonating at the same frequency and longitudinal vibration mode as the ultrasonic transducer, the resonator is an ultrasonic transducer. In accordance with the vibration of the vibration, the vibration phenomenon is caused by the resonance phenomenon. As a result, an excessive mass load of the resonator is less likely to cause a problem of suppressing the vibration displacement of the diaphragm, so that the ultrasonic wave generator can reliably function. In addition, since the resonator has a simple structure, its manufacturing cost is generally lower than that of an ultrasonic transducer composed of a plurality of parts. Therefore, even when the area of the diaphragm is increased, the cost of the ultrasonic wave generator can be reduced by arranging the resonator separately from the ultrasonic vibrator instead of arranging only a large number of ultrasonic vibrators. Can be realized by In addition to aluminum, stainless steel, iron, copper and the like can be mentioned as a material for forming the resonator.

  The invention as set forth in claim 2 is characterized in that, in claim 1, the resonator has a joint surface in plane contact with the non-radiation surface, and the resonator includes a plurality of the ultrasonic transducers surrounding the resonator. The gist of the invention is that bonding is performed at positions where distances from the bonding surface to the center of the bonding surface are equal to each other.

  Therefore, according to the second aspect of the invention, since the ultrasonic transducers and the resonators are more evenly arranged on the non-radiating surface of the diaphragm, the vibration distribution of the diaphragm is further flattened. Therefore, the erosion generated on the diaphragm can be reduced more reliably.

  The gist of the invention according to claim 3 is that in claim 1 or 2, the ultrasonic transducer is a bolt-clamped Langevin type transducer, and the resonator has a columnar shape.

  Therefore, according to the third aspect of the present invention, a plurality of ultrasonic transducers are configured by the same Langevin transducer. For this reason, it is possible to achieve commonality of parts of the ultrasonic transducer, and to reduce the apparatus cost as compared with the case of using different types of ultrasonic transducers. The shape of the resonator is not particularly limited as long as it has a columnar shape, and may be, for example, a cylindrical shape, a square columnar shape, or the like.

  The gist of the invention according to claim 4 is that in claim 3 the outer diameter of the resonator is equal from the junction end to the free end.

  Therefore, according to the fourth aspect of the present invention, since the resonators have the same outer diameter from the junction end to the free end, the resonators can be easily formed. As a result, the resonator can be formed at low cost, and thus the ultrasonic wave generator can be formed at low cost.

  The gist of the fifth aspect of the present invention is that in the third aspect, the outer diameter of the free end of the resonator is smaller than the outer diameter of the junction end.

  Therefore, according to the fifth aspect of the present invention, the weight of the resonator can be reduced as compared with the case of using a resonator whose outer diameter is equal from the junction end to the free end.

  According to a sixth aspect of the present invention, in the third aspect, an outer diameter of a central portion in a longitudinal direction of the resonator is set smaller than an outer diameter at a junction end and a free end of the resonator. As its gist.

  Therefore, according to the invention of claim 6, by setting the outer diameter of the central portion of the resonator to be smaller than the outer diameter at the bonding end and the free end of the resonator, the cross-sectional dimension of the bonding end is λ / 4. Even when the above (λ: longitudinal vibration wavelength) is large, it is possible to obtain a longitudinal vibration mode in which the vibration distribution of the end face is uniform. That is, when the cross-sectional dimension of the junction end is λ / 4 or more, a horizontal vibration component is generated, and it is difficult to maintain a longitudinal vibration mode with uniform vibration distribution on the end face necessary to function as a resonator. In the invention according to claim 6, there is no problem even if the cross-sectional dimension is increased to some extent. When a resonator having such a large cross-sectional dimension is joined to the diaphragm, the area in the diaphragm where the ultrasonic transducer and the resonator do not exist is further reduced. In other words, the number of ultrasonic transducers and resonators joined to the diaphragm can be reduced.

  The gist of the invention according to claim 7 is that, in any one of claims 3 to 6, the length of the resonator is larger than the outer diameter of the resonator.

  Therefore, according to the seventh aspect of the present invention, the ultrasonic vibrator and the resonator can be resonated with each other easily and reliably for longitudinal vibration, so that the diaphragm can be efficiently vibrated with a sufficiently large vibration power.

  In the invention according to claim 8, according to any one of claims 1 to 7, the ultrasonic wave generator comprises the ultrasonic transducer joined to the diaphragm which constitutes the bottom of the treatment vessel. The gist of the present invention is that the ultrasonic cleaning device cleans the surface of the object to be cleaned by irradiating the cleaning liquid in the tank with ultrasonic waves.

  Therefore, according to the invention as set forth in claim 8, since the vibration distribution of the diaphragm to which the ultrasonic transducer and the resonator are joined is flattened, within the cleaning area set on the non-radiation surface of the diaphragm, Uniform cleaning can be performed. Moreover, even if the area of the diaphragm is increased to require a large cleaning area, a resonator should be arranged separately from the ultrasonic transducers instead of arranging only a large number of ultrasonic transducers. Thus, the ultrasonic wave generator can be realized at low cost.

  Here, as the cleaning solution, water-based detergents (water, pure water, functional water, alkaline detergents, neutral detergents, acid detergents), semi-water-based detergents (detergents combining hydrocarbon, glycol ether, alcohol, etc. with water) Flammable detergents (alcohol detergents, aliphatic hydrocarbon detergents, glycol ether detergents), non-combustible detergents (fluorine detergents, chlorine detergents, bromine detergents) and the like are used.

  According to a ninth aspect of the present invention, there is provided a vibration plate having a radiation surface emitting ultrasonic waves and a non-radiation surface located on the opposite side of the radiation surface, and scattering points at a plurality of points on the non-radiation surface of the diaphragm. The plurality of ultrasonic transducers that are joined together and that radiate the ultrasonic wave, and the resonator that is joined at a position surrounded by the plurality of ultrasonic transducers on the non-radiating surface of the diaphragm; The ultrasonic transducer is a longitudinal vibration type transducer that vibrates in a longitudinal nth vibration mode, and the resonator is a resonator that resonates at the same frequency and longitudinal vibration mode as the ultrasonic transducer. The feature is the diaphragm unit as a feature.

  Therefore, according to the invention as set forth in claim 9, the ultrasonic transducers are joined to a plurality of locations on the non-radiating surface of the diaphragm, and the resonators are located on the non-radiating surface surrounded by the plurality of ultrasonic transducers. Are joined. As a result, the distance between the adjacent ultrasonic transducer and the resonator and the distance between the adjacent ultrasonic transducers can be reduced, so that the region where the ultrasonic transducer and the resonator do not exist in the diaphragm is small. Become. In addition, since each ultrasonic transducer is disposed as a scattered point on the non-radiating surface and the resonator is disposed at a position surrounded by each ultrasonic transducer, there are ultrasonic transducers and resonators in the diaphragm. The non-regions will be positioned approximately equally. From the above, generation of bending vibration with large vibration displacement is suppressed, and the vibration distribution of the diaphragm is flattened and there is no part where the vibration is too strong, so that the erosion generated in the diaphragm can be reduced. .

  Moreover, since the resonator is a resonator mechanically coupled to the ultrasonic transducer via the diaphragm and resonating at the same frequency and longitudinal vibration mode as the ultrasonic transducer, the resonator is an ultrasonic transducer. In accordance with the vibration of the vibration, the vibration phenomenon is caused by the resonance phenomenon. As a result, since the mass load of the resonator becomes excessive and the problem of suppressing the vibration displacement of the diaphragm hardly occurs, the diaphragm unit can be reliably functioned. In addition, since the resonator has a simple structure, its manufacturing cost is generally lower than that of an ultrasonic transducer composed of a plurality of parts. Therefore, even if the area of the diaphragm is increased, the diaphragm unit can be manufactured at low cost by arranging a resonator separately from the ultrasonic transducers instead of arranging a large number of ultrasonic transducers alone. It can be realized.

  As described above in detail, according to the inventions of claims 1 to 9, it is possible to provide an ultrasonic wave generator and a diaphragm unit capable of reducing the erosion generated in the diaphragm.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows the ultrasonic cleaning apparatus in 1st Embodiment. The top view which shows the arrangement | positioning aspect of an ultrasonic transducer and a resonance stick. The perspective view which shows a diaphragm unit. The photograph which shows the analysis result and measurement result of vibration distribution. BRIEF DESCRIPTION OF THE DRAWINGS The schematic perspective view which shows the ultrasonic cleaning apparatus used for washing | cleaning evaluation. Photograph showing the result of cleaning evaluation. The schematic block diagram which shows the ultrasonic cleaning apparatus in 2nd Embodiment. The schematic block diagram which shows the ultrasonic cleaning apparatus in 3rd Embodiment. The front view which shows a resonator. The top view which shows the arrangement | positioning aspect of the ultrasonic transducer | vibrator and resonance rod in other embodiment. (A), (b) is a top view which shows the resonance rod in other embodiment. The schematic block diagram which shows the ultrasonic cleaning apparatus in a prior art.

First Embodiment
Hereinafter, a first embodiment in which the present invention is embodied in an ultrasonic cleaning apparatus will be described in detail based on the drawings.

  As shown in FIGS. 1 to 3, the ultrasonic cleaning apparatus 10 (ultrasonic generator) includes a metal cleaning tank 11 (processing tank) for storing the cleaning liquid W <b> 1 and a diaphragm unit 12. The diaphragm unit 12 includes a diaphragm 13, a plurality of (seven in this embodiment) ultrasonic transducers 21 joined to the diaphragm 13, and a plurality (six in this embodiment) similarly joined to the diaphragm 13. And the resonator 31). In addition, the ultrasonic cleaning apparatus 10 of this embodiment irradiates an ultrasonic wave to the washing | cleaning liquid W1 in the washing tank 11 from each ultrasonic transducer 21, The surface of the to-be-cleaned object 14 accommodated in the washing tank 11 Is an apparatus for cleaning the

  The diaphragm 13 constitutes the bottom of the cleaning tank 11, and is a substantially rectangular plate-like metal plate (a stainless steel plate in the present embodiment) of 220 mm long × 220 mm wide × 2.5 mm thick. That is, the diaphragm 13 of the present embodiment is a so-called cleaning tank type diaphragm. The diaphragm 13 also has a radiation surface 15 for emitting ultrasonic waves and a non-radiation surface 16 located on the opposite side of the radiation surface 15.

  As shown in FIGS. 1 to 3, each ultrasonic transducer 21 is a transducer for emitting an ultrasonic wave. Each ultrasonic transducer 21 is bonded to the non-radiation surface 16 of the diaphragm 13 using an adhesive such as epoxy resin, a stud bolt, or the like. In addition, each ultrasonic transducer 21 is bonded to a plurality of locations (seven locations in the present embodiment) on the non-radiating surface 16 in a scattered manner. More specifically, each ultrasonic transducer 21 surrounds one central transducer 21 a (see FIGS. 2 and 3) disposed at the central portion of the non-radiating surface 16 and the central transducer 21 a. It is comprised by the six outer periphery side vibrators 21b (refer FIG. 2, FIG. 3) arrange | positioned in a position. And each ultrasonic transducer | vibrator 21 comprises the transducer group (refer FIG. 2) of a regular hexagon shape by six outer periphery side transducers 21b. In addition, each ultrasonic transducer 21 forms an equilateral triangular transducer group (see FIG. 2) by one central portion transducer 21a and a pair of outer circumferential transducers 21b adjacent to each other. There is. The distance L1 (see FIG. 2) between adjacent ultrasonic transducers 21 is all set to 65 mm.

  As shown in FIGS. 1 to 3, each ultrasonic transducer 21 has a columnar shape having a bonding surface 22 to be surface-bonded to the non-emitting surface 16 and a non-bonding surface 23 located on the opposite side of the bonding surface 22. It is made of aluminum alloy, stainless steel, piezoelectric ceramic material or the like. Further, the outer diameter (maximum diameter) of the ultrasonic transducer 21 is set to 45 mm, and the height (length) of the ultrasonic transducer 21 is set to about 80 mm. Therefore, the length of the ultrasonic transducer 21 is larger than the outer diameter of the ultrasonic transducer 21.

  In this embodiment, as each ultrasonic transducer 21, a longitudinally-vibrating bolt-clamped Langevin vibrator having a longitudinal primary vibration mode (resonance frequency 28 kHz) in which a longitudinal vibration component in the axial direction resonates at 1⁄4 wavelength is used. It is used. The ultrasonic transducers 21 vibrate at the same frequency. As each ultrasonic transducer 21, a solid type piezoelectric ceramic transducer, a magnetostrictive transducer, or the like may be used other than the bolted Langevin type transducer.

  Further, as shown in FIG. 1, an ultrasonic oscillator 17 is connected to each ultrasonic transducer 21. The ultrasonic oscillator 17 supplies high frequency power to continuously vibrate the ultrasonic transducers 21. The ultrasonic transducers 21 are driven by the high frequency power, and ultrasonic waves of 28 kHz are applied to the cleaning liquid W1 in the cleaning tank 11 by the ultrasonic transducers 21. In addition, the output of the ultrasonic wave of this embodiment is 350W.

  As shown in FIGS. 1 to 3, each resonator 31 is bonded to the non-radiation surface 16 of the diaphragm 13 using an adhesive such as epoxy resin or a stud bolt. Further, each resonator 31 is joined at a position surrounded by the plurality of ultrasonic transducers 21 on the non-radiating surface 16. More specifically, each of the resonators 31 is surrounded by one center-side oscillator 21a (see FIGS. 2 and 3) and a pair of outer-peripheral oscillators 21b (see FIGS. 2 and 3) adjacent to each other. Are arranged at different positions. Further, as shown in FIG. 2, the resonator 31 includes three ultrasonic transducers 21 surrounding the same resonator 31 (specifically, one central-portion-side transducer 21 a and a pair of members adjacent to each other). It joins to the position where the distance from the axial center O1 of outer periphery side vibrator | oscillator 21b) to the center O2 of the joint surface 32 becomes mutually equal. In other words, the resonator 31 is disposed at the position of the center of gravity of an equilateral triangle formed of one center-portion-side transducer 21 a and a pair of outer-peripheral-side transducers 21 b adjacent to each other.

  As shown in FIGS. 1 to 3, each resonator 31 has a cylindrical shape having a bonding surface 32 in surface contact with the non-radiating surface 16 and a non-bonding surface 33 located on the opposite side of the bonding surface 32. ing. Further, the resonator 31 is formed of aluminum, which is a material lighter than the forming material of the ultrasonic transducer 21 (aluminum alloy, stainless steel, piezoelectric ceramic material, etc.). Furthermore, the resonator 31 has a circular cross-sectional shape, and the outer diameter (25 mm in the present embodiment) is equal from the junction end 34 to the free end 35. Accordingly, the outer diameter of the bonding surface 32 and the non-bonding surface 33 of the resonator 31 is 25 mm, which is smaller than the outer diameter (45 mm) of the bonding surface 22 of the ultrasonic transducer 21. Furthermore, the areas of the bonding surface 32 and the non-bonding surface 33 of the resonator 31 are also smaller than the area of the bonding surface 22 of the ultrasonic transducer 21. The height (length) of the resonator 31 is set to 89 mm. From the above, the length of the resonator 31 is larger than the outer diameter of the resonator 31. Further, the volume of the resonator 31 is smaller than the volume of the ultrasonic transducer 21. Moreover, the weight of the resonator 31 is smaller than the weight of the ultrasonic transducer 21. The resonator 31 of the present embodiment is a resonator that resonates at the same frequency (28 kHz) as that of the ultrasonic transducer 21 and in the longitudinal vibration mode.

  Next, the operation of the ultrasonic cleaning device 10 of the present embodiment will be described.

  First, the ultrasonic cleaning apparatus 10 is driven, and high frequency power is supplied from the ultrasonic oscillator 17 to the plurality of ultrasonic transducers 21 to vibrate each ultrasonic transducer 21 continuously. As a result, ultrasonic waves are irradiated from the ultrasonic transducer 21 into the cleaning liquid W1. At this time, cavitation occurs in the cleaning liquid W1 with the irradiation of the ultrasonic wave, but the object 14 is cleaned by the impact of the cavitation burst.

  Next, a method of evaluating the diaphragm unit and the result thereof will be described.

  First, measurement samples were prepared as follows. The same diaphragm unit as the diaphragm unit 12 of the present embodiment was prepared, and this was taken as an example (see “with a resonance rod” in FIGS. 4 and 6). Moreover, the diaphragm unit which abbreviate | omitted the resonance rod 31 from the diaphragm unit 12 of this embodiment was prepared, and this was made into the comparative example (refer the "conventional" of FIG. 4, FIG. 6).

  Next, the vibration distribution of the diaphragm of the diaphragm unit of each of the measurement samples (examples and comparative examples) was analyzed by the conventionally known finite element method analysis. The vibration distribution of each measurement sample was actually measured using a conventionally known measurement device. The above results (analysis results and measurement results) are shown in FIG.

  Further, the ultrasonic cleaning device 41 (see FIG. 5) is manufactured using the diaphragm unit of each measurement sample (example and comparative example), and the object to be cleaned 42 is cleaned using the manufactured ultrasonic cleaning device 41. Did. Specifically, first, after the cleaning liquid 44 was stored in the cleaning tank 43, the object to be cleaned 42 was accommodated in the cleaning tank 43. Here, a tap water of normal temperature (20 ° C.) was used as the cleaning liquid 44, and an aluminum plate of 170 mm in length × 170 mm in width, to which dirt (specifically, colored powder) was attached, was used as the cleaning object 42. Next, ultrasonic waves of a frequency of 26 kHz and an output of 50 W were applied to the cleaning liquid 44 from the ultrasonic transducer 45 of the diaphragm unit, and the object 42 in the cleaning liquid 44 was cleaned for 20 seconds. Then, with respect to each measurement sample, the removal rate of dirt (washing removal rate) was calculated (washing evaluation). The above results are shown in FIG.

  As a result, it was confirmed that in the comparative example having no resonance rod, unevenness occurs in the vibration distribution of a specific region (a portion surrounded by a broken line in FIG. 4) in both the analysis result and the measurement result. On the other hand, in the embodiment having the resonance rod, it was confirmed that the vibration distribution in the specific region is not uneven in any of the analysis result and the measurement result, in other words, the vibration distribution is flattened.

  Moreover, in the comparative example, it was confirmed that the cleaning removal rate was only 42%. On the other hand, in the example, it was confirmed that the cleaning removal rate reached 76%. That is, it was confirmed that the cleaning removal rate of the embodiment having the resonance rod is about 1.8 times the cleaning removal ratio of the comparative example having no resonance rod.

  From the above, when both the ultrasonic transducer and the resonator are joined to the diaphragm, the vibration distribution of the diaphragm is flattened and the dirt removal rate is improved. It has been proved that the cleaning efficiency is high.

  Therefore, according to this embodiment, the following effects can be obtained.

  (1) In the ultrasonic cleaning apparatus 10 according to the present embodiment, the ultrasonic transducers 21 are joined to a plurality of locations on the non-radiation surface 16 of the diaphragm 13, and to the plurality of ultrasonic transducers 21 on the non-radiation surface 16. The resonator 31 is joined to the enclosed position. As a result, the area where the ultrasonic transducer 21 and the resonator 31 do not exist in the diaphragm 13 is reduced. In addition, since each ultrasonic transducer 21 is disposed at a non-radiating surface 16 as a scattered point and the resonator 31 is disposed at a position surrounded by each ultrasonic transducer 21, the ultrasonic transducer in the diaphragm 13 is The regions where 21 and the resonators 31 do not exist are also positioned approximately equally. From the above, generation of bending vibration with large vibration displacement is suppressed, and the vibration distribution of the diaphragm 13 is flattened and there is no part where the vibration is too strong. Therefore, the erosion generated in the diaphragm 13 is reduced. Can. Therefore, since the wear of the diaphragm 13 due to the erosion is reduced, the life of the diaphragm 13 can be extended.

  Moreover, since the resonator 31 is mechanically coupled to the ultrasonic transducer 21 via the diaphragm 13 and resonates at the same frequency and longitudinal vibration mode as the ultrasonic transducer 21, the resonator 31 is As the ultrasonic transducer 21 vibrates, it vibrates due to the resonance phenomenon. As a result, since the mass load of the resonator 31 becomes excessive and the problem of suppressing the vibration displacement of the diaphragm 13 hardly occurs, the ultrasonic cleaning apparatus 10 can be reliably functioned. Moreover, since the resonator 31 is a metal-processed part obtained by only processing aluminum, its manufacturing cost is lower than that of the ultrasonic transducer 21 made of a plurality of parts. Therefore, even when the area of the diaphragm 13 is increased, ultrasonic cleaning can be performed by arranging the resonator 31 separately from the ultrasonic vibrator 21 instead of arranging a large number of ultrasonic vibrators 21 alone. The device 10 can be realized at low cost.

  (2) In the present embodiment, not only the ultrasonic transducer 21 but also the resonance rod 31 is joined to the vibrating plate 13. As a result, the vibration distribution of the diaphragm 13 is flattened, so that ultrasonic waves can be generated uniformly and in a wide range in the cleaning tank 11, and accordingly cavitation can be generated uniformly, so that the cleaning efficiency can be improved. It can be enhanced. Further, if the ultrasonic cleaning apparatus 10 according to the present embodiment is used, the object to be cleaned 14 can be cleaned in a short time, so that the power consumption can be suppressed. Furthermore, if the ultrasonic cleaning apparatus 10 is used, a strong cleaning effect can be obtained, so the amount of cleaning agent contained in the cleaning solution W1 can be reduced. In particular, when washing water containing no washing agent is used as the washing liquid W1, running costs such as the cost of the washing agent and its disposal cost can be suppressed, and the environmental load can also be reduced. Further, in this case, the present invention can be applied to the cleaning of food, medical products and the like where the use of the cleaning agent is not preferable.

  (3) In the present embodiment, since the resonators 31 have the same outer diameter from the junction end 34 to the free end 35, the formation of the resonators 31 is facilitated. As a result, the resonator 31 can be formed at low cost, and consequently, the ultrasonic cleaning apparatus 10 can be formed at low cost.

Second Embodiment
Hereinafter, a second embodiment of the present invention will be described based on the drawings. Here, parts different from the first embodiment will be mainly described. In the present embodiment, the structure of the resonator is different from that of the first embodiment.

  More specifically, as shown in FIG. 7, the resonator 51 of the present embodiment includes a bonding surface 52 in surface bonding with the non-radiation surface 16 of the diaphragm 13, and a non-bonding on the opposite side of the bonding surface 52. It has a columnar shape having a surface 53. Further, the resonator 51 has a circular cross-sectional shape, and has a tapered shape in which the outer diameter decreases as going from the junction end 54 to the free end 55. The outer diameter of the joint end 54 of the resonator 51 is 45 mm, and the outer diameter of the free end 55 of the resonator 51 is 10 mm.

  Therefore, according to the present embodiment, the outer diameter of the resonator 51 decreases from the joint end 54 to the free end 55, so the outer diameter is equal from the joint end 34 to the free end 35. The weight of the resonator 51 can be reduced as compared with the case of using the resonator 31 of the first embodiment. Therefore, it is effective in the case of enlarging the outer diameter of the junction end 54 of the resonator 51 and joining in a wide area.

Third Embodiment
Hereinafter, a third embodiment of the present invention will be described based on the drawings. Here, parts different from the first embodiment will be mainly described. In the present embodiment, the structure of the resonator is different from that of the first embodiment.

  More specifically, as shown in FIG. 8 and FIG. 9, the resonator 61 of this embodiment is located on the opposite side of the bonding surface 62 to be surface-bonded to the non-radiation surface 16 of the diaphragm 13 and the bonding surface 62. It has a columnar shape having a non-joining surface 63. Further, the resonator 61 has a circular cross section, and the outer diameter A1 of the central portion in the longitudinal direction of the resonator 61 is set smaller than the outer diameter A2 at the joint end 64 and the outer diameter A3 at the free end 65 It is done. The outer diameter A2 at the joint end 64 of the resonator 61 and the outer diameter A3 at the free end 65 are 70 mm, and the outer diameter A1 at the central portion of the resonator 61 is 56 mm. That is, the outer diameter A2 at the joint end 64 and the outer diameter A3 at the free end 65 are equal to each other. In addition, the resonator 61 has a shape having an arc-shaped side surface in a front view. That is, the resonator 61 has a so-called heart shape having a constriction.

  Therefore, according to the present embodiment, the cross-sectional dimension of the joint end 64 is set by setting the outer diameter A1 of the central portion of the resonator 61 to be smaller than the outer diameter A2 at the joint end 64 and the outer diameter A3 at the free end 65. Even in the case where λ is λ / 4 or more (λ: longitudinal vibration wavelength, λ 場合 45 mm in the case of 28 kHz), it is possible to obtain a longitudinal vibration mode in which the vibration distribution of the end face is uniform. That is, when the cross-sectional dimension of the joint end 64 is λ / 4 or more, a vibration component in the lateral direction is generated, and the longitudinal vibration mode with uniform vibration distribution on the end face necessary to function as the resonator 61 can be maintained. Although this becomes difficult, in the present embodiment, there is no problem even if the cross-sectional dimension is increased to some extent. As a result, since the bonding surface 62 of the resonator 61 becomes large, when the resonator 61 is bonded to the diaphragm 13, the area where the ultrasonic transducer 21 and the resonator 61 do not exist in the diaphragm 13 is surely reduced. . In other words, the number of ultrasonic transducers 21 and resonators 61 joined to the diaphragm 13 can be reduced. Further, since the bonding area between the diaphragm 13 and the resonator 61 is larger than those in the first and second embodiments, the vibration distribution of the diaphragm 13 can be made more even.

  The above embodiments may be modified as follows.

  In each of the above embodiments, the arrangement of the ultrasonic transducers 21 and the resonators 31, 51, 61 bonded to the diaphragm 13 may be changed. For example, as shown in FIG. 10, a plurality of (in this case, nine) ultrasonic transducers 73 are arranged in an array on the non-radiating surface 72 of the diaphragm 71 and surrounded by four ultrasonic transducers 73. The resonators 74 may be disposed at the respective positions.

  In each of the above embodiments, the shape of the resonator may be changed as appropriate. For example, as shown in FIG. 11 (a), the resonator 81 may have a substantially Y-shaped cross section, and as shown in FIG. 11 (b), the resonator 82 has an annular cross section. It may be

  -Although the ultrasonic cleaning apparatus 10 of said each embodiment was equipped only with the ultrasonic transducer 21 of 1 type, you may be equipped with the ultrasonic transducer of multiple types. For example, the ultrasonic transducer comprises a first ultrasonic transducer vibrating at a first frequency (for example 28 kHz) and a second ultrasonic transducer vibrating at a second frequency (for example 75 kHz) May be The resonators 31, 51, 61 may be capable of resonating at only the first frequency, may be capable of resonating at only the second frequency, or may be capable of resonating at the first frequency and the second frequency. It may be possible to resonate at both frequencies.

  In this case, cavitation occurs more efficiently by using two types of ultrasonic waves having different frequencies, and bubbles are more efficiently generated in the cleaning liquid W1, so the occurrence of erosion on the diaphragm 13 is suppressed. At the same time, the cleaning efficiency can be sufficiently enhanced. Further, since the object to be cleaned 14 can be cleaned in a short time, power consumption of the ultrasonic cleaning apparatus 10 can be suppressed.

  In the ultrasonic cleaning device 10 according to the first embodiment, the volume of the resonator 31 is smaller than the volume of the ultrasonic transducer 21. However, the volume of the resonator 31 may be equal to the volume of the ultrasonic transducer 21 or may be larger than the volume of the ultrasonic transducer 21.

  In the ultrasonic cleaning apparatus 10 according to the first embodiment, the weight of the resonator 31 is smaller than the weight of the ultrasonic transducer 21. However, the weight of the resonator 31 may be equal to the weight of the ultrasonic transducer 21, or may be heavier than the weight of the ultrasonic transducer 21.

  In the ultrasonic cleaning apparatus 10 according to the first embodiment, the outer diameter of the bonding surface 32 of the resonator 31 is smaller than the outer diameter of the bonding surface 22 of the ultrasonic transducer 21. However, the outer diameter of the bonding surface 32 of the resonator 31 may be equal to the outer diameter of the bonding surface 22 of the ultrasonic transducer 21, or may be larger than the outer diameter of the bonding surface 22.

  In the ultrasonic cleaning apparatus 10 according to the first embodiment, the area of the bonding surface 32 of the resonator 31 is smaller than the area of the bonding surface 22 of the ultrasonic transducer 21. However, the area of the bonding surface 32 of the resonator 31 may be equal to the area of the bonding surface 22 of the ultrasonic transducer 21 or may be larger than the area of the bonding surface 22.

  -In ultrasonic cleaning device 10 of each above-mentioned embodiment, although diaphragm 13 constituted the bottom (bottom plate) of cleaning tank 11, a diaphragm is provided separately from a bottom plate, and both are bolted via packing. It is good also as a structure attached by. Moreover, in the ultrasonic cleaning apparatus 10, although the external type ultrasonic transducer 21 mounted | worn with the diaphragm 13 of the washing tank 11 was used, it is not limited to this. For example, the ultrasonic cleaning apparatus 10 may be configured using a throwing type ultrasonic transducer which is thrown into the cleaning liquid W1 of the cleaning tank 11 and used. The throwing type ultrasonic transducer has a structure in which the transducer is joined inside a watertight case.

  -Although the ultrasonic generator of each above-mentioned embodiment was ultrasonic cleaning device 10 which performs cleaning using an ultrasonic wave, extraction, emulsification, dispersion, mixing, stirring, crushing, atomization etc. besides cleaning The present invention may be applied to an ultrasonic generator that performs the processing of Specifically, for example, when an ultrasonic generator is applied to an ultrasonic emulsifying device, the emulsion can be finely divided into nanoparticles with high efficiency, and effects such as long-term stabilization and reduction of surfactant can be obtained. You can expect. When the ultrasonic generator is applied to an ultrasonic dispersion device, nanoparticles (metal nanoparticles, carbon nanotubes, ceramic nanoparticles, magnetic nanoparticles, etc.) can be dispersed with high efficiency. Furthermore, the ultrasonic generator may be embodied as an ultrasonic processor utilizing chemical action. In this case, since the cavitation can be generated uniformly and in a wide range and efficiently, it becomes possible to increase the amount of radicals such as OH radicals generated due to the high temperature and high pressure field at the time of bubble collapse. Therefore, the reaction efficiency of sonochemicals caused by radical species can be enhanced, and treatments such as decomposition to harm of harmful substances, sterilization, and high molecular polymerization can be efficiently performed.

  Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the embodiments described above will be listed below.

  (1) In any one of the means 1 to 8, the ultrasonic transducer includes a first ultrasonic transducer vibrating at a first frequency, and a second ultrasonic vibration vibrating at a second frequency. An ultrasonic wave generator comprising: a resonator, wherein the resonator is capable of resonating at least one of the first frequency and the second frequency.

  (2) The ultrasonic wave generator according to any one of the means 1 to 8, wherein the plurality of ultrasonic wave vibrators are vibrators vibrating at the same frequency.

  (3) In the means 3, the volume of the resonator is equal to or smaller than the volume of the ultrasonic transducer.

  (4) In the means 3, the weight of the resonator is equal to or less than the weight of the ultrasonic transducer.

  (5) In the technical concept (4), the resonator is formed of a material lighter than the ultrasonic transducer.

  (6) In the technical idea (4) or (5), the resonator is made of aluminum.

  (7) In any one of the means 1 to 8, the ultrasonic transducer and the resonator each have a bonding surface to be bonded to the non-radiation surface, and the outer diameter of the bonding surface of the resonator is An ultrasonic wave generator characterized in that it is larger than the outer diameter of the bonding surface of the ultrasonic transducer.

  (8) In any one of the means 1 to 8, the ultrasonic transducer and the resonator each have a bonding surface to be bonded to the non-radiation surface, and the area of the bonding surface of the resonator is the above An ultrasonic wave generator characterized in that it is larger than the area of the bonding surface of an ultrasonic wave transducer.

DESCRIPTION OF SYMBOLS 10 ... Ultrasonic cleaning apparatus 11 as an ultrasonic wave generation apparatus 11 ... Cleaning tank 12 as a processing tank ... Diaphragm unit 13; 71 ... Vibration board 14 ... Cleaning object 15 ... Radiation surface 16; Ultrasonic oscillators 21, 73 ... ultrasonic transducers 31, 51, 61, 74, 81, 82 ... resonators 32, 52, 62 ... bonding surfaces 34, 54, 64 ... bonding ends 35, 55, 65 of resonators ... resonance The free end A1 of the child ... The outer diameter A2 of the central part in the length direction of the resonator ... The outer diameter A3 at the junction end of the resonator ... The outer diameter O2 at the free end of the resonator ...

Claims (9)

A vibrating plate having a radiation surface for emitting ultrasonic waves, and a non-radiation surface located on the opposite side of the radiation surface;
A plurality of ultrasonic transducers which are joined at a plurality of points on a non-radiating surface of the diaphragm in a scattered manner and which irradiates the ultrasonic waves;
An ultrasonic oscillator for supplying high frequency power to continuously vibrate the ultrasonic vibrator;
And a resonator joined to a position surrounded by the plurality of ultrasonic transducers on a non-radiating surface of the diaphragm.
The ultrasonic transducer is a longitudinal vibration type transducer that vibrates in a longitudinal nth vibration mode,
The ultrasonic generator according to claim 1, wherein the resonator is a resonator that resonates at the same frequency and longitudinal vibration mode as the ultrasonic transducer. The resonator has a bonding surface in surface contact with the non-radiating surface,
The ultrasonic wave generator according to claim 1, wherein the resonators are bonded at positions where distances from the plurality of ultrasonic transducers surrounding the resonators to the center of the bonding surface are equal to each other. .   The ultrasonic wave generator according to claim 1 or 2, wherein the ultrasonic wave vibrator is a bolt-clamped Langevin type vibrator, and the resonator has a columnar shape.   The ultrasonic wave generator according to claim 3, wherein the resonator has an equal outer diameter from the junction end to the free end.   The ultrasonic wave generator according to claim 3, wherein an outer diameter of a free end of the resonator is smaller than an outer diameter of a junction end.   The ultrasonic wave generator according to claim 3, wherein an outer diameter of a central portion in a length direction of the resonator is set smaller than an outer diameter at a junction end and a free end of the resonator. .   The ultrasonic wave generator according to any one of claims 3 to 6, wherein a length of the resonator is larger than an outer diameter of the resonator.   The ultrasonic wave generator cleans the surface of the object to be cleaned by irradiating ultrasonic waves to the cleaning liquid in the processing tank from the ultrasonic transducer joined to the vibrating plate constituting the bottom of the processing tank. The ultrasonic generator according to any one of claims 1 to 7, which is an ultrasonic cleaning device. A vibrating plate having a radiation surface for emitting ultrasonic waves, and a non-radiation surface located on the opposite side of the radiation surface;
A plurality of ultrasonic transducers which are joined at a plurality of points on a non-radiating surface of the diaphragm in a scattered manner and which irradiates the ultrasonic waves;
And a resonator joined to a position surrounded by the plurality of ultrasonic transducers on a non-radiating surface of the diaphragm.
The ultrasonic transducer is a longitudinal vibration type transducer that vibrates in a longitudinal nth vibration mode,
The diaphragm unit, wherein the resonator is a resonator that resonates at the same frequency and longitudinal vibration mode as the ultrasonic transducer.