JP2012125743A - Ultrasonic transducer unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic transducer unit in which a vibration mode of a vibrating surface is made uniform to improve detergency.SOLUTION: The ultrasonic transducer unit includes: a vibrating surface 1a; first to third 3 vibrators 5a which mutually adjoin and adds ultrasonic vibration to the vibrating surface 1a, the other surface of a plate vibration body 10 includes first regions 3 of first to third; and second regions 4 which cover the respective first regions 3, respective vibrators of the first to the third are disposed to the first regions 3, the thickness of the plate vibration body 10 which is located in the inside of the triangle made from the first to the third 3 vibrators on the other surface and located in the second regions 4 is formed to be thicker than the thickness of the plate vibration body located in the first regions 3 of the first and the third, and the interval between the first to the third vibrators is at least λ/2, and respective outer peripheries are away from respective the first to the third vibrators by at least λ/4. The λ is a wavelength of the transverse wave of the plate vibration body.

Description

  The present invention relates to an ultrasonic transducer unit and the like for irradiating a cleaning liquid in a cleaning tank with ultrasonic waves.

  FIG. 8A is a plan view showing a conventional ultrasonic transducer unit, and FIG. 8B is a cross-sectional view taken along 7B-7B ′ shown in FIG. 8A.

  The conventional ultrasonic transducer unit irradiates the cleaning liquid in the cleaning tank (not shown) with ultrasonic waves from the vibration surface. For example, the ultrasonic transducer unit is used by throwing the ultrasonic vibrator unit into the cleaning tank. It may be used as a child.

  This ultrasonic transducer unit has a diaphragm 101 made of SUS having a constant thickness, and a diaphragm 101 a is formed on one surface of the diaphragm 101. A plurality of bolted Langevin transducers (hereinafter referred to as “BL transducers”) 102 are bonded on the other surface of the vibration plate 101, and the plurality of BL transducers 102 apply ultrasonic vibrations to the vibration surface 101a. Is.

  Since the BL vibrator 102 generally has a circular vibration surface, the vibration from the BL vibrator 102 spreads in a circular shape on the vibration surface 101a of the diaphragm 101, and interferes with the vibration from the adjacent BL vibrator and is complicated. Will generate a vibration mode. More specifically, the vibration surface 101a is affected by vibrations from the adjacent BL vibrator 102 in addition to the original longitudinal vibration, and a lateral vibration in a complex vibration mode is generated, and the ultrasonic power is concentrated on a specific vibrator. Or the cleaning effect is reduced.

  Therefore, there is a demand for improving the vibration mode of the vibration surface 101a in the ultrasonic transducer unit, making the sound field uniform and improving the cleaning effect.

  An object of one embodiment of the present invention is to provide an ultrasonic transducer unit that improves the cleaning power by making the vibration mode of the vibration surface uniform.

One aspect of the present invention is an ultrasonic transducer unit for irradiating a cleaning liquid in a cleaning tank with ultrasonic waves.
A plate-like vibrator;
A vibrating surface formed on one surface of the plate-like vibrating body;
First to third vibrators mounted on the other surface of the plate-like vibrator, adjacent to each other and applying ultrasonic vibration to the vibration surface;
Comprising
The other surface of the plate-like vibrating body includes first to third first regions and second regions that cover the first to third first regions, respectively.
The first vibrator is disposed in the first first region;
The second vibrator is disposed in the second first region;
The third vibrator is disposed in the third first region;
The thickness of the plate-like vibrating body located inside the triangle formed in the other surface by the first to third vibrators and located in the second region is the first to third first. Formed thicker or thinner than the thickness of the plate-like vibrator located in the region,
The interval between the first to third vibrators is λ / 2 or more,
The ultrasonic transducer unit is characterized in that outer circumferences of the first to third first regions are separated from each of the first to third transducers by λ / 4 or more.
However, λ is the wavelength of the transverse wave of the plate-like vibrating body generated by applying ultrasonic vibration by each of the first to third vibrators.

In one embodiment of the present invention,
The plate-like vibrator has a diaphragm and a weight,
The first to third vibrators are mounted on the diaphragm;
Since the weight is mounted on the diaphragm located in the second region, the thickness of the plate-like vibrator located in the second region is located in the first to third regions. It may be formed thicker than the plate-like vibrating body.

In one embodiment of the present invention,
The weight may be a plate-like body joined on the diaphragm located in the second region.

In one embodiment of the present invention,
The plate-like vibrator has a diaphragm,
The first to third vibrators are mounted on the diaphragm;
When the diaphragm located in the first to third first regions is cut away, the thickness of the plate-like vibration member located in the second region is the plate shape located in the first region. It is also possible to form it thicker than the thickness of the vibrator.

In one embodiment of the present invention,
The plate-like vibrator has a diaphragm provided with holes or grooves,
The first to third vibrators are mounted on the diaphragm;
The hole or groove is carved into the diaphragm located in the second region, so that the thickness of the plate-like vibrator located in the second region is located in the first to third first regions. It is also possible to form the plate-like vibrating body thinner than the thickness of the plate-like vibrator.

One aspect of the present invention is an ultrasonic transducer unit for irradiating a cleaning liquid in a cleaning tank with ultrasonic waves.
A plate-like vibrator;
A vibrating surface formed on one surface of the plate-like vibrating body;
Three or more vibrators attached on the other surface of the plate-like vibrator and applying ultrasonic vibrations to the vibration surface;
Comprising
The other surface of the plate-like vibrator has three or more first regions and a second region that covers each of the first regions,
The thickness of the plate-like vibrator located in the second region is formed to be thicker or thinner than the thickness of the plate-like vibrator located in the first region,
Each of the three or more vibrators is disposed in the first region,
The interval between adjacent vibrators in the three or more vibrators is λ / 2 or more,
The ultrasonic transducer unit is characterized in that an outer periphery of the first region is separated from the transducer disposed in the first region by λ / 4 or more.
However, λ is the wavelength of the transverse wave of the plate-like vibrating body that is generated when ultrasonic vibration is applied by each of the three or more vibrators.

In one embodiment of the present invention,
The plate-like vibrator has a diaphragm and a plate-like weight,
The three or more vibrators are mounted on the diaphragm,
The plate-like weight is bonded onto the diaphragm located in the second region, so that the thickness of the plate-like vibrator located in the second region is reduced to the three or more first regions. It is also possible to form it thicker than the thickness of the plate-like vibrator located.

In one embodiment of the present invention,
The plate-like vibrator has a diaphragm,
The three or more vibrators are mounted on the diaphragm,
When the diaphragms located in the three or more first regions are cut away, the thickness of the plate-like vibration member located in the second region is set in the three or more first regions. It can also be formed thicker than the thickness of the plate-like vibrator.

In one embodiment of the present invention,
The plate-like vibrator has a diaphragm provided with a groove,
The three or more vibrators are mounted on the diaphragm,
Since the groove is engraved in the diaphragm located in the second region, the thickness of the plate-like vibrating body located in the second region is the plate shape located in the three or more first regions. It is also possible to form it thinner than the thickness of the vibrator.

  According to one aspect of the present invention, it is possible to provide an ultrasonic transducer unit that makes the vibration mode of the vibration surface uniform and improves the cleaning power.

(A) is a top view which shows the ultrasonic transducer | vibrator unit which concerns on 1 aspect of this invention, (B) is sectional drawing which follows the 1B-1B 'line shown to (A). (A) is a top view which shows the ultrasonic transducer | vibrator unit which concerns on 1 aspect of this invention, (B) is sectional drawing which follows the 2B-2B 'line shown to (A). (A) is a top view which shows the ultrasonic transducer | vibrator unit which concerns on 1 aspect of this invention, (B) is sectional drawing which follows the 3B-3B 'line shown to (A). (A) is a top view which shows the ultrasonic transducer | vibrator unit which concerns on 1 aspect of this invention, (B) is sectional drawing which follows the 4B-4B 'line shown to (A). (A) is a top view which shows the ultrasonic transducer | vibrator unit which concerns on 1 aspect of this invention, (B) is sectional drawing which follows the 5B-5B 'line shown to (A). (A) is a figure which shows the sound pressure characteristic just above the vibration surface of the ultrasonic transducer | vibrator unit shown in FIG. 8, (B) is a figure which shows the sound pressure characteristic just above the vibration surface of the ultrasonic vibrator unit shown in FIG. is there. (A) is a figure which shows the change of the admittance characteristic of the ultrasonic transducer | vibrator unit shown in FIG. 8, (B) is a figure which shows the change of the admittance characteristic of the ultrasonic transducer | vibrator unit shown in FIG. (A) is a top view which shows the conventional ultrasonic transducer | vibrator unit, B) is sectional drawing which follows 7B-7B 'shown to (A).

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it will be easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments below.

(First embodiment)
FIG. 1A is a plan view illustrating an ultrasonic transducer unit according to one embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along line 1B-1B ′ illustrated in FIG.

  The ultrasonic vibrator unit irradiates the cleaning liquid in the cleaning tank (not shown) with ultrasonic waves from the vibration surface. For example, the ultrasonic vibrator unit is thrown into the cleaning tank, and the BL vibrator 2 is driven by the oscillator (not shown). Ultrasonic vibration can be applied to the cleaning liquid from the vibration surface 1a by ultrasonic vibration. In the present embodiment, the BL vibrator 2 is used, but another vibrator may be used, for example, a ferrite vibrator may be used.

  The ultrasonic transducer unit includes a plate-like vibrator 10 and a plurality of BL vibrators 2. The plate-like vibrator 10 has a diaphragm 1 and first and second weights 5a and 5b. As the diaphragm 1, for example, a metal diaphragm having a constant thickness (for example, SUS, Hastelloy, titanium, etc.) can be used. A vibration surface 1 a is formed on one surface of the vibration plate 1, and a plurality of BL vibrators 2 are joined to the other surface of the vibration plate 1. As a method of joining the diaphragm 1 and the BL vibrator 2, for example, an adhesive may be used, or a stat bolt and an adhesive may be used. The plurality of BL vibrators 2 apply ultrasonic vibration to the vibration surface 1a.

  As shown in FIG. 1A, the plurality of BL vibrators 2 have a triangular shape formed by connecting the centers of three BL vibrators 2 adjacent to each other on the other surface of the diaphragm 1. The two BL vibrators 2 adjacent to each other are arranged so that the interval between them is λ / 2 or more. The thickness of the diaphragm 1 is preferably λ / 100 or less of longitudinal waves. However, with a stat bolt, it is also possible to use the diaphragm 1 having a thickness of 2 mm to 10 mm in view of strength and erosion durability. λ is the wavelength of the longitudinal wave of the diaphragm 1 that is generated when ultrasonic vibration is applied by the BL vibrator 2.

  Each of the plurality of BL vibrators 2 is disposed on the first region 3 on the other surface of the diaphragm 1, and the outer periphery of the first region 3 surrounds each of the plurality of BL vibrators 2. The outer periphery of the first region 3 is separated from the BL vibrator 2 arranged in the first region 3 by λ / 4. In the present embodiment, the plurality of BL vibrators 2 are arranged so as to form the above-described regular triangle. However, the interval between two adjacent BL vibrators 2 is λ / 2 or more and the first region. If the outer periphery of 3 is separated from the BL vibrator 2 by λ / 4 or more, the arrangement of the plurality of BL vibrators 2 is not necessarily the regular triangle described above. However, when the number of BL vibrators 2 per unit area on the other surface of the diaphragm 1 is to be arranged as much as possible, the arrangement as shown in FIG.

  The other surface of the diaphragm 1 has a second region 4 that covers each of the plurality of first regions 3, and is located in the second region 4 inside the triangle formed by the three BL vibrators 2 described above. A first weight 5 a is provided on the other surface of the diaphragm 1. The distance between the first weight 5a and each of the three BL vibrators 2 is preferably substantially equal, and the first weight 5a is preferably installed at the center point of the three BL vibrators 2.

  In addition, as shown in FIG. 1A, the second region is located at an approximately equal distance from two adjacent BL vibrators 2 located on the end side of the diaphragm 1 and located on the end side of the diaphragm 1. 4 is provided with a second weight 5b.

  The mass of each of the first and second weights 5 a and 5 b is preferably 1/150 or more of the mass of the BL vibrator 2. The height of each of the first and second weights 5a and 5b is a resonance length that is ½ of the wavelength λ ′ of the longitudinal vibration of the diaphragm 1 that is generated when ultrasonic vibration is applied by the BL vibrator 2. The diameter of each of the first and second weights 5a and 5b is preferably a size other than an integral multiple of λ ′ / 2. Thereby, it can suppress that each of the 1st and 2nd weights 5a and 5b resonates.

  The shape of each of the first and second weights 5a and 5b may be a cylinder, a square, a polygon, a cone, a trapezoid, a stat bolt, or a plate. The first and second weights 5a and 5b may be made of metals such as stainless steel, titanium, titanium alloy, aluminum, aluminum alloy, iron, copper, and tantalum. Ceramics, ferrite quartz, etc. may be used as long as they can be bonded to the diaphragm 1.

  Further, the first and second weights 5a and 5b and the diaphragm 1 are preferably joined by welding, but may be bonded by an adhesive. The corresponding frequency of the BL vibrator 2 is preferably 300 kHz or less.

  According to the present embodiment, the first and second weights 5a and 5b are attached to the diaphragm 1 located in the second region 4 as described above, so that the first and second weights 5a and 5b are attached. The thickness of the plate-like vibrating body 10 in the formed portion is formed to be thicker than the thickness of the plate-like vibrating body 10 located in the first region 3. For this reason, when the vibration from the BL vibrator 2 spreads in a circular shape on the vibration surface 1a of the diaphragm 1, the vibration in the portion where the thickness of the plate-like vibrator 10 is different by the first and second weights 5a and 5b. As a result, interference with vibration from the adjacent BL vibrator 2 is suppressed, and generation of complicated vibration modes can be suppressed. In particular, it is possible to suppress the occurrence of lateral vibration in a complex vibration mode due to interference from three directions by three BL vibrators 2 in a triangular arrangement, and as a result, the concentration of ultrasonic power on a specific BL vibrator And the cleaning mode can be improved by making the vibration mode of the vibration surface 1a uniform.

  Further, the reason why the first and second weights 5a and 5b are not arranged in the first region 3 is that the range of λ / 4 around the BL vibrator 2 is almost ideal vibration. This is because it is preferable not to limit. The reason why the first and second weights 5a and 5b are arranged in the second region 4 is that the vibration in the range exceeding λ / 4 around the BL vibrator 2 is suppressed by adding the weight. This is to reduce the mutual influence between the vibrators 2 and bring the vibration mode of the entire vibration surface closer to ideal vibration.

  The effect of improving the detergency is particularly remarkable by the first weight 5a, and the effect by the second weight 5b is recognized, but is lower than the effect by the first weight 5a. Note that the first and second weights 5a and 5b do not have to be installed as shown in FIG. 1A, and may be installed only where the vibration mode of the vibration surface 1a is poor, for example.

  Further, by making the vibration mode of the vibration surface 1a uniform, generation of erosion on the vibration surface 1a can be suppressed.

In the present embodiment, the first and second weights 5a and 5b are mounted on the diaphragm 1 located in the second region 4, and the thickness of the first and second weights 5a and 5b is the first region 3. Is formed thicker than the thickness of the vibrating body 1 located in the second region 4, but by providing a hole or groove in the vibrating plate 1 located in the second region 4, the portion of the plate-like vibrating body in which the hole or groove is provided is provided. It is also possible to make the thickness thinner than the thickness of the plate-like vibrating body located in the first region 3. This hole is a hole which does not pass through the thickness of the diaphragm 1 and is processed by a method such as counter boring. Even in such a case, the same effect as in the present embodiment can be obtained.
The mass of the weight is preferably 1/150 or more of the BL vibrator.

(Second Embodiment)
2A is a plan view illustrating an ultrasonic transducer unit according to one embodiment of the present invention, and FIG. 2B is a cross-sectional view taken along line 2B-2B ′ illustrated in FIG. 2, the same parts as those in FIG. 1 are denoted by the same reference numerals, and only different parts will be described.

  Each of the first and second weights 5 a and 5 b is screwed into a stat bolt 8 welded to the diaphragm 1.

  In this embodiment, the same effect as that of the first embodiment can be obtained.

(Third embodiment)
3A is a plan view illustrating the ultrasonic transducer unit according to one embodiment of the present invention, and FIG. 3B is a cross-sectional view taken along line 3B-3B ′ illustrated in FIG. 3, the same parts as those in FIG. 1 are denoted by the same reference numerals, and only different parts will be described.

  The weight 5 c is a plate-like body bonded on the diaphragm 1 located in the second region 4, and the thickness of the plate-like weight 5 c is 1/10 or more of the thickness of the diaphragm 1. preferable. Specifically, the plate-like vibrating body 10 includes the vibration plate 1 and a plate-like weight 5 c, and the plate-like weight 5 c is bonded or welded onto the vibration plate 1 located in the second region 4. The thickness of the plate-like vibrating body 10 located in the second region 4 is formed thicker than the thickness of the plate-like vibrating body 10 located in the first region 3.

  In this embodiment, the same effect as that of the first embodiment can be obtained.

(Fourth embodiment)
4A is a plan view illustrating an ultrasonic transducer unit according to one embodiment of the present invention, and FIG. 4B is a cross-sectional view taken along line 4B-4B ′ illustrated in FIG. 4, the same parts as those in FIG. 1 are denoted by the same reference numerals, and only different parts will be described.

  The plate-like vibrating body 10 has a diaphragm 1, and the plate-like vibrating body located in the second region 4 is obtained by cutting or digging the diaphragm 1 located in the plurality of first regions 3. 10 (that is, the thickness of the diaphragm 1) is formed thicker than the thickness of the plate-like vibrator 10 located in the plurality of first regions 3.

  The thickness of the diaphragm 1 located in the second region 4 is preferably 1.1 times or more the thickness of the diaphragm 1 located in the plurality of first regions 3.

  In this embodiment, the same effect as that of the first embodiment can be obtained.

(Fifth embodiment)
5A is a plan view illustrating an ultrasonic transducer unit according to one embodiment of the present invention, and FIG. 5B is a cross-sectional view taken along the line 5B-5B ′ illustrated in FIG. 5, the same parts as those in FIG. 1 are denoted by the same reference numerals, and only different parts will be described.

  The plate-like vibrating body 10 has a diaphragm 1, and a groove 5 d is carved into the diaphragm 1 located outside the first region and at the boundary with the second region, so that the plate located in the second region 4. The thickness of the vibrating plate 10 (that is, the thickness of the vibrating plate 1) is formed to be thinner than the thickness of the vibrating plate 10 located in the first region 3.

  The groove 5d preferably has a depth of 0.5 mm or more and a width of 0.2 mm or more. Various shapes can be used for the cross-sectional shape of the groove 5d. For example, a box shape, a V shape, or a U shape may be used.

  In this embodiment, the same effect as that of the first embodiment can be obtained.

  FIG. 6A is a diagram showing sound pressure characteristics immediately above the vibration surface when ultrasonic waves are applied to the cleaning liquid from the vibration surface by ultrasonically vibrating the BL vibrator of the ultrasonic transducer unit shown in FIG. FIG. 6B shows the sound pressure characteristics immediately above the vibration surface when the cleaning liquid is irradiated with ultrasonic waves from the vibration surface by ultrasonically vibrating the BL vibrator of the ultrasonic transducer unit shown in FIG. FIG.

  The specifications of the ultrasonic transducer units in FIGS. 6A and 6B are a frequency of 38 kHz, 600 W, an outer diameter of 320 mm × 220 mm, and 13 BL transducers are used. The average sound pressure in FIG. 6 (A) is 573 mV, and the average sound pressure in FIG. 6 (B) is 757 mV.

  6 (A) and 6 (B), it can be seen that the sound field is clearly uniformed and the sound pressure is increased directly above the vibration surface of the ultrasonic transducer unit shown in FIG.

  FIG. 7 shows an example of improving the admittance characteristics of a 38 kHz vibrator. FIG. 7A shows a change in admittance characteristics of three BL vibrators of the ultrasonic vibrator unit shown in FIG. FIG. 7B is a diagram showing a result of measurement of a change in admittance characteristics in which three BL transducers of the ultrasonic transducer unit shown in FIG. 1 are combined.

  The measurement conditions for the admittance characteristics in FIGS. 7A and 7B were SUS304 diaphragms having a thickness of 3 mm, and the frequency of the BL vibrator was 38 kHz.

  In FIG. 7A, the main resonance is dispersed as suppressed, and the value of the resonance point is low, whereas in FIG. 7B, the value of the resonance point is large and rises sharply. It can be seen that the main resonance becomes an ideal shape, and that the main resonance is greatly improved by attaching the weight.

DESCRIPTION OF SYMBOLS 1,101 ... Diaphragm 1a, 101a ... Vibration surface 2,102 ... BL vibrator 3 ... 1st area | region 4 ... 2nd area | region 5a ... 1st weight 5b ... 2nd weight 5c ... Plate-shaped weight 5d ... Groove 8 ... Stat bolt 10 ... Plate-shaped vibrator

Claims (9)

In the ultrasonic vibrator unit for irradiating the cleaning liquid in the cleaning tank with ultrasonic waves,
A plate-like vibrator;
A vibrating surface formed on one surface of the plate-like vibrating body;
First to third vibrators mounted on the other surface of the plate-like vibrator, adjacent to each other and applying ultrasonic vibration to the vibration surface;
Comprising
The other surface of the plate-like vibrating body includes first to third first regions and second regions that cover the first to third first regions, respectively.
The first vibrator is disposed in the first first region;
The second vibrator is disposed in the second first region;
The third vibrator is disposed in the third first region;
The thickness of the plate-like vibrating body located inside the triangle formed in the other surface by the first to third vibrators and located in the second region is the first to third first. Formed thicker or thinner than the thickness of the plate-like vibrator located in the region,
The interval between the first to third vibrators is λ / 2 or more,
The ultrasonic transducer unit, wherein outer circumferences of the first to third first regions are separated from each of the first to third transducers by λ / 4 or more.
However, λ is the wavelength of the transverse wave of the plate-like vibrating body generated by applying ultrasonic vibration by each of the first to third vibrators. In claim 1,
The plate-like vibrator has a diaphragm and a weight,
The first to third vibrators are mounted on the diaphragm;
Since the weight is mounted on the diaphragm located in the second region, the thickness of the plate-like vibrator located in the second region is located in the first to third regions. The ultrasonic transducer unit is formed thicker than a thickness of the plate-like vibrator. In claim 2,
The ultrasonic transducer unit according to claim 1, wherein the weight is a plate-like body joined on the diaphragm located in the second region. In claim 1,
The plate-like vibrator has a diaphragm,
The first to third vibrators are mounted on the diaphragm;
When the diaphragm located in the first to third first regions is cut away, the thickness of the plate-like vibration member located in the second region is the plate shape located in the first region. An ultrasonic transducer unit, wherein the ultrasonic transducer unit is formed to be thicker than a vibrating body. In claim 1,
The plate-like vibrator has a diaphragm provided with holes or grooves,
The first to third vibrators are mounted on the diaphragm;
The hole or groove is carved into the diaphragm located in the second region, so that the thickness of the plate-like vibrator located in the second region is located in the first to third first regions. An ultrasonic transducer unit, wherein the ultrasonic transducer unit is formed thinner than a thickness of the plate-like vibrator. In the ultrasonic vibrator unit for irradiating the cleaning liquid in the cleaning tank with ultrasonic waves,
A plate-like vibrator;
A vibrating surface formed on one surface of the plate-like vibrating body;
Three or more vibrators attached on the other surface of the plate-like vibrator and applying ultrasonic vibrations to the vibration surface;
Comprising
The other surface of the plate-like vibrator has three or more first regions and a second region that covers each of the first regions,
The thickness of the plate-like vibrator located in the second region is formed to be thicker or thinner than the thickness of the plate-like vibrator located in the first region,
Each of the three or more vibrators is disposed in the first region,
The interval between adjacent vibrators in the three or more vibrators is λ / 2 or more,
The ultrasonic transducer unit, wherein an outer periphery of the first region is separated from the transducer arranged in the first region by λ / 4 or more.
However, λ is the wavelength of the transverse wave of the plate-like vibrating body that is generated when ultrasonic vibration is applied by each of the three or more vibrators. In claim 6,
The plate-like vibrator has a diaphragm and a plate-like weight,
The three or more vibrators are mounted on the diaphragm,
The plate-like weight is bonded onto the diaphragm located in the second region, so that the thickness of the plate-like vibrator located in the second region is reduced to the three or more first regions. An ultrasonic transducer unit, wherein the ultrasonic transducer unit is formed to be thicker than a thickness of the plate-like vibrator located. In claim 6,
The plate-like vibrator has a diaphragm,
The three or more vibrators are mounted on the diaphragm,
When the diaphragms located in the three or more first regions are cut away, the thickness of the plate-like vibration member located in the second region is set in the three or more first regions. An ultrasonic transducer unit, wherein the ultrasonic transducer unit is formed thicker than a plate-like vibrator. In claim 6,
The plate-like vibrator has a diaphragm provided with a groove,
The three or more vibrators are mounted on the diaphragm,
Since the groove is engraved in the diaphragm located in the second region, the thickness of the plate-like vibrating body located in the second region is the plate shape located in the three or more first regions. An ultrasonic transducer unit, wherein the ultrasonic transducer unit is formed to be thinner than the thickness of the vibrator.