JP2013107059A - Ultrasonic radiator, ultrasonic radiation device, ultrasonic treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic radiator capable of fully obtaining a radiation area of ultrasonic waves, and uniformly radiating the ultrasonic waves.SOLUTION: The ultrasonic radiator 15 includes a plurality of vibrators 21 which axisymmetrically vibrate in the axial direction. Each vibrator 21 has a through-hole 23 at the center, which is formed in a regular octagon shape viewed from above in the axial direction. In the ultrasonic radiator 15, each radiator 21 is arranged at regular intervals in a matrix shape composed of a plurality of rows and columns in such a state in which the external surface of the vibrator 21 is connected thereto. The vibrator 21 adjoining with each other in the row direction and column direction alternatively repeats expansion and contraction so that the ultrasonic radiator 15 radiates ultrasonic waves from each vibrator 21.

Description

  The present invention relates to an ultrasonic emitter for emitting ultrasonic waves, an ultrasonic emission device including the ultrasonic emitter, and an ultrasonic processing device.

  A chemical engineering process utilizing both chemical action (sonochemistry) by utilizing ultrasonic energy and mechanical and physical action is called a sonoprocess. The sono process has attracted attention in recent years as a highly efficient process with a low environmental impact, and is expected to be applied to a wide range of industrial fields such as the environment, energy, biotechnology and materials. Liquid processes using physical and chemical action by ultrasonic cavitation include washing, dispersion, emulsification, mixing, stirring, crushing, extraction, crystal growth promotion, environmental purification, material synthesis, sterilization, polymer polymerization, chemical reaction Examples include promotion. In addition, ultrasonic waves are different from those used alone (e.g., ozone, ultraviolet rays, electromagnetic waves, electrolysis, plasma, photocatalysts, microbubbles, hydrogen peroxide, addition of reducing agents and chemicals, heating, decompression, etc.) There are many cases where the effect can be exhibited by the combined use.

  As a specific ultrasonic processing apparatus for performing a liquid process, for example, a reaction apparatus in which an ultrasonic vibrator is attached to the inner wall of a reaction tank and ultrasonic waves are emitted from the ultrasonic vibrator into the reaction tank is disclosed. (For example, refer to Patent Document 1). Also, a cleaning device is disclosed in which an ultrasonic vibrator is attached to the outer surface of the bottom plate in the cleaning tank, and ultrasonic waves are emitted from the bottom plate into the cleaning liquid by vibrating the bottom plate (vibrating plate) with the ultrasonic vibrator. (For example, refer to Patent Document 2).

JP 2000-202277 A JP 2003-320328 A

  In conventional ultrasonic processing equipment, since ultrasonic cavitation (bubbles) is localized around the ultrasonic transducer and near the liquid surface, it is difficult to produce an apparatus in which the entire processing tank contributes to the reaction. Met. For example, in the reaction apparatus of Patent Document 1, an ultrasonic vibrator is provided on a part of a tank wall surface, and ultrasonic waves are emitted from the vibrator toward the center of the tank. In this reaction apparatus, since the ultrasonic radiation area is small, the ultrasonic field propagated in the tank becomes non-uniform. In addition, since the energy of the emitted ultrasonic wave is small, a sufficient amount of reaction cannot be ensured. Therefore, it is difficult to realize a processing apparatus capable of mass processing corresponding to the plant level.

  Further, in the cleaning device of Patent Document 2, ultrasonic waves are radiated from the bottom plate of the cleaning tank. In this cleaning device, the position where cavitation (bubbles) is actively generated is limited to the antinode position of the ultrasonic standing wave sound pressure. Further, when the cleaning tank is deepened, the absorption / diffusion of ultrasonic waves due to the expansion / contraction of bubbles becomes remarkable, so that the ultrasonic wave intensity is weakened far away from the vibration surface of the bottom plate and the cleaning ability is lowered.

  Furthermore, an ultrasonic processing apparatus using a powerful horn type ultrasonic radiator used in an ultrasonic homogenizer or the like is also embodied. This ultrasonic processing apparatus has a drawback that the reaction area is very narrow because the area where cavitation (bubbles) is actively generated is limited to the vicinity of the horn radiation surface. In particular, when the liquid to be treated is viscous, the attenuation of ultrasonic waves is so severe that the ultrasonic effect can be obtained only in the vicinity of the horn.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide an ultrasonic radiator that can sufficiently radiate ultrasonic waves to a liquid to be processed while ensuring a sufficiently large ultrasonic radiation area. And providing an ultrasonic radiation device. Another object of the present invention is to provide an ultrasonic processing apparatus capable of efficiently radiating ultrasonic waves from the ultrasonic radiator and processing a liquid to be processed efficiently.

  In order to solve the above-mentioned problem, the invention according to claim 1 is an ultrasonic radiator including a plurality of vibrating bodies that perform axially symmetric vibrations in a radial direction, wherein the outer surfaces of the vibrating bodies are connected to each other. The vibrators are regularly arranged in a matrix composed of a plurality of rows and a plurality of columns, and the vibrators adjacent in the row direction and the column direction repeat expansion and contraction alternately to emit ultrasonic waves from the vibrators. The gist is an ultrasonic emitter characterized by the following.

  According to the first aspect of the present invention, a plurality of vibrators that perform axially symmetric vibrations in a radial direction are regularly arranged in a matrix composed of a plurality of rows and a plurality of columns, and adjacent vibrators repeatedly expand and contract alternately. Ultrasonic waves are emitted from the vibrating body. When the ultrasonic radiator is configured in this manner, a sufficient area of the ultrasonic radiation surface can be ensured. Therefore, ultrasonic waves can be uniformly applied to the liquid to be processed from the ultrasonic radiator, and a large number of cavitations can be generated without unevenness. In addition, since a short-distance sound field on which a relatively strong energy ultrasonic wave acts is formed around each vibrating body, the ultrasonic wave is less attenuated and strong cavitation can be generated. In addition, since a uniform reaction field is formed by ultrasonic cavitation in a relatively wide range, the liquid to be processed can be processed efficiently and reliably.

  According to a second aspect of the present invention, in the first aspect, the vibrating body is formed in a columnar shape or a polygonal column shape having a through hole at a central portion, and in addition to the outer surface side of the vibrating body, the inner surface of the through hole. The gist is to emit ultrasonic waves from the side.

  According to invention of Claim 2, in addition to the outer surface side of a vibrating body, an ultrasonic wave can be radiated | emitted from the inner surface side of a through-hole, and the process efficiency of a to-be-processed liquid can be improved.

  Invention of Claim 3 is provided in the edge part of the row direction and column direction of the ultrasonic radiator of Claim 1 or 2 and the some vibration body in the said ultrasonic radiator, The said row direction and A plurality of ultrasonic vibrators that vibrate each vibrator so that the vibrators adjacent in the column direction alternately expand and contract, and an ultrasonic wave that outputs a drive signal for driving the plurality of ultrasonic vibrators The gist of the present invention is an ultrasonic radiation device comprising a sound wave oscillator.

  According to the third aspect of the present invention, the plurality of ultrasonic transducers are provided at the end portions in the row direction and the column direction of the plurality of vibrators in the ultrasonic radiator, and the drive signal output from the ultrasonic oscillator is used. A plurality of ultrasonic transducers are driven. The ultrasonic vibrators are vibrated by the ultrasonic vibrators so that adjacent vibrators alternately expand and contract, and ultrasonic waves are radiated from the outer peripheral surface and the inner peripheral surface of each vibrator. In this case, each vibrator can be vibrated by synthesizing the ultrasonic powers of the ultrasonic transducers arranged at the end portions in the row direction and the ultrasonic transducers arranged at the end portions in the column direction. Therefore, in the ultrasonic radiation device of the present invention, high-power ultrasonic waves can be emitted from each vibrating body, and cavitation can be generated more reliably. As a result, the liquid to be processed can be efficiently and reliably processed.

  The gist of the invention described in claim 4 is that, in claim 3, a plurality of the ultrasonic radiators are stacked in a direction orthogonal to the row direction and the column direction.

  According to the invention described in claim 4, since the plurality of ultrasonic radiators are stacked, the ultrasonic radiation area can be sufficiently increased, and the processing efficiency of the liquid to be processed can be increased.

  Invention of Claim 5 is provided in the middle of piping which flows a to-be-processed liquid, and is arrange | positioned in the state which match | combined the distribution direction of the to-be-processed liquid, and the axial direction of the said vibrating body. The ultrasonic radiator described above and the vibrators adjacent to each other in the row direction and the column direction are alternately expanded and contracted at the end portions in the row direction and the column direction of the plurality of vibrators in the ultrasonic radiator. An ultrasonic processing apparatus comprising: a plurality of ultrasonic transducers that vibrate each of the vibrators; and an ultrasonic oscillator that outputs a drive signal for driving the plurality of ultrasonic transducers. Is the gist.

  According to the invention described in claim 5, the ultrasonic radiator is provided in the middle of the pipe through which the liquid to be processed flows, and is arranged in a state where the flow direction of the liquid to be processed and the axial direction of the vibrating body are combined. . In addition, a plurality of ultrasonic vibrators are provided at the row and column ends of the plurality of vibrators in the ultrasonic radiator, and the plurality of ultrasonic vibrators are driven by a drive signal output from the ultrasonic oscillator. Is done. The ultrasonic vibrators are vibrated by the ultrasonic vibrators so that adjacent vibrators alternately expand and contract, and ultrasonic waves are radiated from the outer peripheral surface and the inner peripheral surface of each vibrator. In this case, in the ultrasonic radiator, the ultrasonic powers of the ultrasonic transducers arranged at the end portions in the row direction of the respective vibrators and the ultrasonic transducers arranged at the end portions in the column direction are synthesized to The vibrating body can be vibrated. Therefore, high-power ultrasonic waves can be radiated from each vibrator, and cavitation can be reliably generated. In addition, since the liquid to be processed in the pipe surely circulates in the reaction field (short-range sound field) formed around the ultrasonic radiator, the liquid to be processed can be efficiently and reliably processed.

  According to a sixth aspect of the present invention, there is provided the ultrasonic radiator according to the first or second aspect, provided in a processing tank that stores a liquid to be processed, and a row direction of a plurality of vibrators in the ultrasonic radiator; A plurality of ultrasonic transducers that are provided at end portions in the column direction and that vibrate each of the vibrating bodies so that the vibrating bodies adjacent in the row direction and the column direction alternately expand and contract; and the plurality of ultrasonic waves The gist of the ultrasonic processing apparatus includes an ultrasonic oscillator that outputs a driving signal for driving the vibrator.

  According to the sixth aspect of the present invention, the ultrasonic radiator is provided in the processing tank for storing the liquid to be processed. In addition, a plurality of ultrasonic transducers are provided at the end portions in the row direction and the column direction of the plurality of vibrators in the ultrasonic radiator, and the plurality of ultrasonic transducers are driven by a drive signal output from the ultrasonic oscillator. Driven. The ultrasonic vibrators are vibrated by the ultrasonic vibrators so that adjacent vibrators alternately expand and contract, and ultrasonic waves are radiated from the outer peripheral surface and the inner peripheral surface of each vibrator. In this case, in the ultrasonic radiator, the ultrasonic powers of the ultrasonic transducers arranged at the end portions in the row direction of the respective vibrators and the ultrasonic transducers arranged at the end portions in the column direction are synthesized to The vibrating body can be vibrated. Therefore, high-power ultrasonic waves can be radiated from each vibrator, and cavitation can be reliably generated. In addition, since the ultrasonic wave can be applied uniformly to the liquid to be processed in the processing tank, the liquid to be processed can be efficiently and reliably processed.

  As described above in detail, according to the first to fourth aspects of the present invention, it is possible to sufficiently ensure an ultrasonic radiation area in the ultrasonic radiator and to uniformly radiate ultrasonic waves to the liquid to be processed. it can. In addition, according to the invention described in claim 5 or 6, it is possible to uniformly treat the liquid to be treated by emitting ultrasonic waves uniformly from the ultrasonic radiator.

1 is a schematic configuration diagram illustrating an ultrasonic radiation device according to an embodiment. FIG. The top view which shows the ultrasonic processing apparatus of one embodiment. The top view which shows the ultrasonic radiator of one Embodiment. Explanatory drawing which shows the vibration mode of the ultrasonic radiator of one Embodiment. The top view which shows the ultrasonic radiator of another embodiment. The perspective view which shows the ultrasonic processing apparatus of another embodiment.

  Hereinafter, an embodiment in which the present invention is embodied in an ultrasonic processing apparatus will be described in detail with reference to the drawings. FIG. 1 is a schematic configuration diagram showing the ultrasonic radiation apparatus of the present embodiment. FIG. 2 is a plan view showing an ultrasonic processing apparatus configured using the ultrasonic radiation apparatus.

  As shown in FIG. 2, the ultrasonic processing apparatus 11 of the present embodiment includes a pipe 12 (flow-through container) for flowing the liquid W1 to be processed and an ultrasonic radiation apparatus 13 provided in the middle of the pipe 12. It is configured. The ultrasonic processing apparatus 11 is a reaction apparatus that generates a sonochemical reaction by applying ultrasonic waves to the liquid W1 to be processed.

  As shown in FIG. 1, the ultrasonic radiation device 13 includes an ultrasonic radiator 15, a support frame 16 that supports the ultrasonic radiator 15, and a plurality of ultrasonic transducers 17 that vibrate the ultrasonic radiator 15. And an ultrasonic oscillator 18 that outputs a drive signal for driving each ultrasonic transducer 17.

  As shown in FIG. 3, the ultrasonic radiator 15 includes a plurality of vibrators 21 regularly arranged in a matrix having a plurality of rows and a plurality of columns with the outer surfaces connected, and the row direction of each vibrator 21. And a longitudinal vibration transmission body 22 extending at the end in the column direction. Each vibrating body 21 is formed in a regular octagonal columnar shape having a through hole 23 in the center, and vibrates axially symmetrically in the radial direction. In the ultrasonic radiator 15 of the present embodiment, 3 rows × 3 columns of vibrators 21 are arranged. The external dimensions (diameter of the octagonal circumscribed circle) in the radial direction of these vibrating bodies 21 are about 20 mm, and the thickness in the axial direction is about 10 mm.

  The longitudinal vibration transmission body 22 constituting the ultrasonic radiation body 15 is a transmission body formed in a columnar shape having a diameter of about 10 mm, and propagates ultrasonic waves to the respective vibration bodies 21 through half-wave resonance. In the ultrasonic radiator 15, the longitudinal vibration transmission bodies 22 are provided in parallel with the arrangement direction of the vibration bodies 21. In addition, the ultrasonic radiator 15 of the present embodiment is formed of an integral metal lump (for example, a lump of stainless steel) without a connecting portion, and is formed by, for example, a lost wax manufacturing method. The ultrasonic radiator 15 may be formed by cutting a metal lump such as a stainless steel plate.

  As shown in FIG. 1, a support frame 16 is provided so as to surround each vibrating body 21 arranged in a matrix in the ultrasonic radiator 15. The end portions of the longitudinal vibration transmission bodies 22 in the ultrasonic radiator 15 protrude outside the support frame 16. The support frame 16 is a quadrangular frame body including four side wall portions 25, and supports the ultrasonic radiator 15 and forms an outer wall surface of a flow path for flowing the liquid W1 to be processed. In the support frame 16, three through grooves 26 are formed in each side wall portion 25, and the ultrasonic radiator 15 is fixed in a state where the longitudinal vibration transmission body 22 is inserted into each through groove 26. In the present embodiment, the support frame 16 is provided at the vibration node position of the longitudinal vibration transmission body 22 that resonates at half wavelength.

  As shown in FIG. 2, a support frame 16 to which the ultrasonic radiator 15 is fixed is disposed at a connection portion between the two pipes 12. More specifically, a packing 32 is interposed between the flange portion 31 provided at the end of each pipe 12 and the support frame 16, and the support frame 16 is connected to the pipe 12 using a bolt 33 in this state. . In this way, by connecting the support frame 16 to the pipe 12, a flow path formed on the outer surface of each vibration body 21 of the ultrasonic radiator 15 and a through hole of each vibration body 21 in the support frame 16. The liquid W1 to be processed from the pipe 12 flows through the flow path formed on the inner surface of the pipe 23.

  As shown in FIG. 1, in the ultrasonic radiator 15, the ultrasonic transducer 17 is connected to the end face of the longitudinal vibration transmission body 22 protruding from the side wall portion 25 of the support frame 16 by connecting means 35 such as a screw. Each connection is fixed. In the present embodiment, twelve ultrasonic transducers 17 are fixed to the ultrasonic radiator 15. The ultrasonic vibrator 17 is a bolted Langevin type vertical vibrator (piezoelectric vibrator) and has a structure in which piezoelectric ceramics are sandwiched between two metal blocks and fastened with bolts.

  Each ultrasonic transducer 17 is electrically connected to an ultrasonic oscillator 18 and mechanically vibrates based on a drive signal (high frequency power) supplied from the ultrasonic oscillator 18. The frequency of the drive signal output from the ultrasonic oscillator 18 is set near the resonance frequency at which each vibrator 21 resonates in the radial axially symmetric vibration mode, and is, for example, a frequency of about 60 kHz.

  In the present embodiment, the ultrasonic transducers 17 having different polarization directions are alternately arranged in the adjacent ultrasonic transducers 17 in order to reverse the vibration phase. The mechanical vibration of each ultrasonic transducer 17 is propagated to each vibrating body 21 via the longitudinal vibration transmitting body 22. At this time, the phases of the vibration modes of the adjacent vibrators 21 in the ultrasonic radiator 15 are reversed. As a result, as shown in FIG. 4, each vibrating body 21 is vibrated so that each vibrating body 21 adjacent in the row direction and the column direction alternately expands and contracts, and the outer surface of each vibrating body 21 and the through hole 23. Ultrasonic waves are emitted from the inner surface into the liquid W1 to be processed. And by the radiation | emission of the ultrasonic wave from each vibrating body 21, cavitation generate | occur | produces in the to-be-processed liquid W1, and the chemical reaction process of the to-be-processed liquid is performed.

  Therefore, according to the present embodiment, the following effects can be obtained.

  (1) In the ultrasonic processing apparatus 11 according to the present embodiment, the ultrasonic radiator 15 in which a plurality of vibrators 21 are arranged in the row direction and the column direction is used, and a through hole 23 is formed at the center of each vibrator 21. Is formed. In this case, the outer peripheral surface and the inner peripheral surface of each vibrating body 21 become an ultrasonic radiation surface, and a sufficient area of the radiation surface can be secured. Further, each vibrating body 21 in the ultrasonic radiator 15 is vibrated in an axial symmetry by the ultrasonic vibrator 17. As a result, ultrasonic waves can be applied uniformly to the liquid W1 to be processed, and a large number of cavitations can be generated without unevenness. Furthermore, in the ultrasonic processing apparatus 11, a short-distance sound field on which ultrasonic waves with relatively strong energy act is formed around each vibrating body 21 and in the through hole 23. For this reason, there is little attenuation | damping of an ultrasonic wave and it can generate strong cavitation. Further, the ultrasonic radiator 15 forms a uniform reaction field by ultrasonic cavitation in a relatively wide range, so that the processing of the liquid W1 to be processed (for example, a substance decomposition process or a material synthesis process by a chemical reaction) is efficient. Can be done well.

  (2) In the ultrasonic processing apparatus 11 of the present embodiment, the ultrasonic radiation device 13 is provided in the middle of the pipe 12 through which the liquid to be processed W1 flows, and the flow direction of the liquid to be processed W1 and the axial direction of the vibrating body 21 The ultrasonic radiator 15 is arranged in a state where the two are combined. In this case, the liquid to be treated W1 in the pipe 12 reliably flows to the reaction field (short-distance sound field) formed around the ultrasonic radiator 15, so that the liquid to be treated W1 is efficiently and reliably processed. be able to.

  (3) In the present embodiment, each vibrating body 21 constituting the ultrasonic radiator 15 is formed in a regular octagonal shape in a plan view as viewed from the axial direction, so that the outer surface of each vibrating body 21 is connected. Can be easily performed. Moreover, the flow path for flowing the liquid W1 to be processed can be formed in the direction parallel to the flow direction of the pipe 12 by the outer surface of each vibrating body 21. Furthermore, since each through-hole 23 serving as a flow path of the liquid to be processed W1 is formed in each vibrating body 21, a sufficient flow rate of the liquid to be processed W1 can be ensured.

  (4) In the ultrasonic radiation device 13 according to the present embodiment, the ultrasonic transducers 17 are arranged at both ends in the row direction and the column direction of each vibrating body 21, and the ultrasonic power of these ultrasonic transducers 17 is obtained. Each vibrator 21 can be vibrated by being synthesized. Specifically, ultrasonic waves are propagated from the four ultrasonic transducers 17 (the ultrasonic transducers 17 arranged in the horizontal direction and the vertical direction in FIG. 1) to each vibrating body 21 in the ultrasonic radiator 15. The ultrasonic waves are synthesized and output by each vibrator 21. If the ultrasonic radiation device 13 is configured in this way, high-power ultrasonic waves can be emitted from the vibrators 21 to the liquid W1 to be processed.

  (5) In this embodiment, since the support frame 16 is provided at the vibration node position in the longitudinal vibration transmission body 22 of the ultrasonic radiator 15, there is no vibration leakage at the support frame 16, and the ultrasonic radiator 15. Can be stably supported. Moreover, since vibration is not transmitted to the piping 12 side via the packing 32, the sealing performance in the connection part of the support frame 16 and the piping 12 can be ensured over a long period of time. Further, the support frame 16 of the ultrasonic radiation device 13 is attached to the pipe 12 by being connected by a bolt 33. In this case, the ultrasonic radiation device 13 can be easily attached to and detached from the pipe 12, and the maintainability of the ultrasonic radiation device 13 can be improved.

  In addition, you may change embodiment of this invention as follows.

  In the above embodiment, each vibrating body 21 constituting the ultrasonic radiator 15 is formed in a regular octagonal shape. However, the shape can be changed as appropriate as long as it vibrates axially. Specifically, for example, as illustrated in FIG. 5, the ultrasonic radiator 15 </ b> A may be formed by arranging columnar vibrators 21 </ b> A in a matrix. In addition, although the vibrators 21 and 21A of the above-described embodiment have the through hole 23 in the center, an ultrasonic radiator is formed by a columnar or polygonal vibrator having no through hole 23 formed therein. May be.

  -In the ultrasonic processing apparatus 11 of the said embodiment, although it set it as the structure which arrange | positions the ultrasonic radiator 15 of the ultrasonic emission apparatus 13 in the middle of the piping 12, it is not limited to this. Specifically, for example, the ultrasonic treatment apparatus may be configured by arranging the ultrasonic radiator 15 in a treatment tank that stores the liquid W1 to be treated. In this case, the support frame 16 that supports the ultrasonic radiator 15 is mounted on the side wall of the processing tank. Then, the end of the longitudinal vibration transmission body 22 in the ultrasonic radiator 15 is projected outside from the side wall of the processing tank, and the ultrasonic vibrator 17 is fixed to the end of the longitudinal vibration transmission body 22 to perform ultrasonic processing. Configure the device. Even if it does in this way, cavitation can generate | occur | produce uniformly in the to-be-processed liquid W1 stored in the processing tank, and the to-be-processed liquid W1 can be processed efficiently.

  In the ultrasonic processing apparatus 11 of the above embodiment, the ultrasonic radiators 15 and 15A in which the vibrators 21 are arranged in 3 rows × 3 columns are used. However, the row direction and the column direction in the ultrasonic radiators 15 and 15A are used. The number of the vibrators 21 and 21A can be appropriately changed according to the size of the pipe 12 and the processing tank, the frequency of the ultrasonic wave to be applied, and the like. Moreover, the size of each vibrating body 21 can also be suitably changed according to the frequency of the ultrasonic wave to act.

  In the above embodiment, the ultrasonic radiators 15 and 15A are integrally formed. However, each of the vibrators 21 and each of the longitudinal vibration transmitters 22 is individually formed to be a screw-like connecting means. The ultrasonic radiators 15 and 15A may be formed by connecting the vibrators 21 and the longitudinal vibration transmitters 22 in FIG. When the ultrasonic radiators 15 and 15A are formed to be separable, the vibrators 21 and 21A damaged by erosion or the like can be appropriately changed. If it does in this way, the maintenance cost at the time of repairing and exchanging ultrasonic radiator 15 and 15A in ultrasonic radiating device 13 can be held down low.

  -In the ultrasonic processing apparatus 11 of the said embodiment, although it was a reaction apparatus which performs the chemical reaction of the to-be-processed liquid W1, sono processes other than a chemical reaction (washing, dispersion | distribution, emulsification, mixing, stirring, crushing, extraction, The present invention may be embodied as an apparatus that performs crystal growth promotion, environmental purification, sterilization, and the like. Moreover, you may actualize as an ultrasonic processing apparatus used together with other processes, such as ozone, an ultraviolet-ray, electromagnetic waves, electrolysis, plasma, a photocatalyst, and a microbubble.

  -Although the ultrasonic processing apparatus 11 of the said embodiment provided the one ultrasonic radiator 15 in the middle of the piping 12, it is not limited to this. As in the ultrasonic processing apparatus 11 </ b> A shown in FIG. 6, an ultrasonic radiation module including an ultrasonic radiator 15 and a support frame 16 that supports the ultrasonic radiator 15 is stacked in a multistage manner in the middle of the pipe 12. A processing apparatus may be configured. In this ultrasonic processing apparatus 11A, a plurality of ultrasonic radiators 15 are arranged along the flow direction of the liquid to be processed W1 flowing in the pipe 12. For this reason, even when the flow rate of the liquid to be processed W1 is increased to increase the processing amount, the ultrasonic waves can be reliably applied from the vibrating bodies 21 in the ultrasonic radiators 15 at each stage, and the sono process by cavitation is performed. Can be performed efficiently. If it does in this way, enlargement of 11 A of ultrasonic processing apparatuses can be implement | achieved corresponding to a plant level, and it will become possible to perform mass production by mass processing of a hardly decomposable substance and material synthesis | combination.

  In the ultrasonic processing apparatus 11A shown in FIG. 6, the vibrators 21 are configured to vibrate at different frequencies between the upstream ultrasonic radiator 15 and the downstream ultrasonic radiator 15 of the pipe 12. Also good. Specifically, after applying low frequency ultrasonic waves from the upstream ultrasonic radiator 15 to the liquid to be processed W1, high frequency ultrasonic waves from the downstream ultrasonic radiator 15 to the liquid to be processed W1. To be configured. When the ultrasonic processing apparatus 11A is configured in this manner, for example, when dispersion processing is performed as a sono process, relatively large granular particles can be pulverized on the upstream side and further pulverized into finer particles on the downstream side. Processing can be performed efficiently and reliably.

  The ultrasonic radiator 15 according to the above embodiment is a radiator in which the plurality of vibrators 21 are two-dimensionally arranged in the row direction and the column direction, but in addition to the row direction and the column direction, the row A plurality of vibrators 21 may also be arranged in a direction orthogonal to the direction and the column direction. That is, an ultrasonic radiator in which a plurality of vibrators 21 are arranged three-dimensionally may be formed. In this case, it is preferable to form a three-dimensional ultrasonic radiator using a spherical body or a polygonal vibrating body. In addition, this three-dimensional ultrasonic radiator is used, for example, disposed in a processing tank. Further, in the case of a three-dimensional ultrasonic radiator, the ultrasonic vibrators 17 are arranged at both ends in the direction orthogonal to the row direction and the column direction so that each vibrator 21 is vibrated via the longitudinal vibration transmitter 22. Configure. If comprised in this way, in addition to the four ultrasonic transducer | vibrators 17 arrange | positioned in the row direction and the column direction, each vibrating body 21 can be vibrated by the two ultrasonic transducer | vibrators 17 from an orthogonal direction, It becomes possible to radiate powerful ultrasonic waves from each vibrator 21.

  Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the embodiments described above are listed below.

  (1) The ultrasonic radiator according to claim 1 or 2, wherein the plurality of vibrators are made of a metal block integrally connected.

  (2) The ultrasonic radiator according to claim 1 or 2, wherein the plurality of vibrators are separable.

  (3) The ultrasonic radiator according to claim 1 or 2, wherein the plurality of vibrators are formed in a regular octagonal shape in a plan view as viewed from the axial direction.

  (4) In Claim 3 or 4, further comprising a support frame for supporting the ultrasonic radiator, wherein the ultrasonic radiator is provided at an end in the row direction and the column direction of each vibrator. A longitudinal vibration transmission body that is extended and resonates at half wavelength and propagates ultrasonic waves to the respective vibration bodies is provided, and the support frame is fixed at a vibration node position of the longitudinal vibration transmission body that resonates at half wavelength. Ultrasonic radiation device characterized by.

  (5) In Claim 5, a plurality of the ultrasonic radiators are arranged along the flow direction of the liquid to be processed in the middle of the pipe, and the ultrasonic radiators on the upstream side and the ultrasonic waves on the downstream side are arranged. An ultrasonic processing apparatus characterized in that each of the vibrators is vibrated at a frequency different from that of the radiator.

DESCRIPTION OF SYMBOLS 11, 11A ... Ultrasonic processing apparatus 12 ... Pipe 13 ... Ultrasonic radiation apparatus 15, 15A ... Ultrasonic radiation body 17 ... Ultrasonic vibrator 18 ... Ultrasonic oscillator 21, 21A ... Vibrating body 23 ... Through-hole W1 ... To-be-processed liquid

Claims (6)

An ultrasonic radiator including a plurality of vibrators that vibrate in axial symmetry.
The vibrators are regularly arranged in a matrix composed of a plurality of rows and a plurality of columns in a state where the outer surfaces of the vibrators are connected, and the vibrators adjacent in the row direction and the column direction repeat expansion and contraction alternately. An ultrasonic radiator characterized in that ultrasonic waves are emitted from each vibrator.   The vibrating body is formed in a columnar shape or a polygonal column shape having a through hole in a central portion, and emits ultrasonic waves from the inner surface side of the through hole in addition to the outer surface side of the vibrating body. The ultrasonic emitter according to 1. The ultrasonic radiator according to claim 1 or 2,
Provided at the end of the plurality of vibrators in the row direction and the column direction in the ultrasonic radiator, and vibrates each vibrator so that the vibrators adjacent in the row direction and the column direction repeat expansion and contraction alternately. A plurality of ultrasonic transducers,
An ultrasonic radiation apparatus comprising: an ultrasonic oscillator that outputs a drive signal for driving the plurality of ultrasonic transducers.   The ultrasonic radiation apparatus according to claim 3, wherein a plurality of the ultrasonic radiators are stacked in a direction orthogonal to the row direction and the column direction. The ultrasonic radiator according to claim 1 or 2, which is provided in the middle of a pipe through which the liquid to be processed flows, and is arranged in a state in which a flow direction of the liquid to be processed and an axial direction of the vibrator are combined.
Provided at the end of the plurality of vibrators in the row direction and the column direction in the ultrasonic radiator, and vibrates each vibrator so that the vibrators adjacent in the row direction and the column direction repeat expansion and contraction alternately. A plurality of ultrasonic transducers,
An ultrasonic processing apparatus comprising: an ultrasonic oscillator that outputs a drive signal for driving the plurality of ultrasonic transducers. The ultrasonic radiator according to claim 1 or 2 provided in a treatment tank for storing a liquid to be treated;
Provided at the end of the plurality of vibrators in the row direction and the column direction in the ultrasonic radiator, and vibrates each vibrator so that the vibrators adjacent in the row direction and the column direction repeat expansion and contraction alternately. A plurality of ultrasonic transducers,
An ultrasonic processing apparatus comprising: an ultrasonic oscillator that outputs a drive signal for driving the plurality of ultrasonic transducers.

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